JP2004214640A - Sealed vessel with internal atmosphere switching mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sealed vessel which can hold vacuum or pressure and which can readily eject particles inside the vessel. <P>SOLUTION: The vessel is constituted of a vessel body, a vessel lid which is detachably fixed on the vessel body in a sealed manner, and an internal atmosphere switching mechanism 4, which comprises a vacuum-holding valve mechanism 17 and a pressure-holding vacuum breaking valve mechanism 18. The vacuum-keeping valve mechanism 17 opens and closes the communicating passages 19 to 22 for communication between the inside of the vessel body and the outside of the vessel lid. The vacuum-holding valve mechanism 17 is configured so that a valve is opened to produce vacuum in the vessel body, when vacuum is produced in an operation space, formed outside the container lid and the valve, is opened to hold a predetermined vacuum level in the vessel body, when the operation space is opened to the atmosphere. The pressure-holding vacuum breaking valve mechanism 18 is configured so that a valve will be closed to pressurize the vessel body, when the operation space is pressurized, and the valve will be closed to hold a predetermined pressure level in the vessel body when the operation space is opened to the atmosphere. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

  The present invention relates to an improvement of a closed container (vacuum pod) for a wafer or the like used mainly in a technical field such as a semiconductor manufacturing apparatus, an optical exposure apparatus, a precision machine apparatus, and a chemical product manufacturing apparatus. The atmosphere can be quickly and reliably switched to a vacuum or pressurized state, and particles can be efficiently discharged by purging the inside of the sealed container, and particles can be prevented from entering from outside during the switching operation. The present invention relates to an airtight container with an internal atmosphere switching mechanism that can be operated while moving.

2. Description of the Related Art In the field of semiconductor manufacturing equipment, a small closed container called a so-called vacuum pod has been widely used for transferring a silicon wafer as an object to be processed between processing steps.
A handling system using the above-mentioned vacuum pod is widely known as a standard mechanical interface (SMIF) system. (1) A pod which is a closed container for storing and transferring wafers and the like, and (2) a semiconductor. An input / output (I / O) mini environment provided on the processing tool to provide a small clean space (in this clean environment, wafers are transferred from the pod to the processing tool or from the processing tool to the pod) And (3) an interface for transferring the wafer between the pod and the mini-environment without soiling, etc. (US Pat. No. 4,532,970).

By the way, in the SMIF system, since the inside of the pod, which is a closed container, is evacuated and the inside of the pod is purged by using the load lock chamber provided in the interface or the mini environment, equipment is inevitably provided. As the size increases, the cost of equipment increases.
Therefore, although various solutions have been studied, it is difficult to quickly and reliably switch and hold the inside of the pod, which is a sealed container, to a vacuum or pressurized state without using a load lock chamber or the like, The problem has not been resolved.

U.S. Pat. No. 4,532,970

  The present invention relates to the above-mentioned problems in a processing / transferring system for wafers and the like using a vacuum pod which is a conventional closed container, that is, a special facility such as a load lock chamber for evacuation and purging inside the vacuum pod. In order to solve the problem that it is not possible to reduce the size of the equipment and reduce the cost of equipment, a valve mechanism for vacuum holding and a pressure holding vacuum are provided on the container lid of the closed container forming the vacuum pod. Built-in internal atmosphere switching mechanism consisting of a release valve mechanism, switches the external space provided outside the container lid to the atmosphere, vacuum or pressurized state and keeps the inside of the sealed container at vacuum or pressurized state With such a configuration, evacuation and purging in the sealed container, transfer of the stored wafers to the processing chamber, and processed wafers from the processing chamber can be performed without using special equipment costs such as a load lock chamber. The inside atmosphere switching mechanism with a sealed container to allow the wafer restoring the like there is provided cents.

  According to the first aspect of the present invention, a container body, a container lid air-tightly and detachably fixed to the container body, and a container lid air-tightly provided to communicate the inside of the container body with the outside of the container lid. An operation in which an internal atmosphere switching mechanism provided with a vacuum holding valve mechanism for opening and closing the communication passage and a pressure holding vacuum breaking valve mechanism, respectively, and wherein the vacuum holding valve mechanism is formed outside the container lid. When the space is evacuated, the valve is opened to evacuate the inside of the container body, and when the operation space is opened to the atmosphere, the valve is closed to close the valve and maintain a predetermined degree of vacuum in the container body. When the operation space is pressurized in order to return the inside of the container body from the vacuum holding state to the atmospheric pressure, the valve mechanism for holding vacuum release is opened to break the container body by pressurized vacuum and open the operation space to the atmosphere. Is closed, the inside of the container body A valve mechanism for holding the 圧度, in which the basic configuration of the invention that it has respective configurations.

  According to a second aspect of the present invention, in the first aspect, the operation space is formed between a lower portion of the container lid of the closed container and an upper portion of the bottom plate of the processing chamber. The inside of the operation space is maintained at a vacuum, an atmospheric pressure and a pressurized state through a flow passage formed as described above.

  According to a third aspect of the present invention, in the first aspect of the invention, the vacuum holding valve mechanism and the pressure holding vacuum breaking valve mechanism are provided adjacent to a common body. According to a fourth aspect of the present invention, in the first aspect of the present invention, a vacuum holding valve mechanism and a pressure holding vacuum breaking valve mechanism are provided adjacent to a common body, and an inlet end of each communication passage is provided. And a filter at the outlet end.

  According to a fifth aspect of the present invention, in the first aspect of the invention, the vacuum holding valve mechanism and the pressure holding vacuum breaking valve mechanism are separately provided on the container lid. According to a sixth aspect of the present invention, in the first aspect of the present invention, the vacuum holding valve mechanism and the pressure holding vacuum breaking valve mechanism are separately provided and opposed to the outer peripheral edge of the container lid. In addition, filters are provided at the inlet end and the outlet end of each communication passage.

  According to a seventh aspect of the present invention, in the first aspect of the present invention, any one or both of the vacuum holding valve mechanism and the pressure holding vacuum breaking valve mechanism arbitrarily prevents the functions of the respective valve mechanisms from the outside. Means are provided.

  The invention of claim 8 is the invention of claim 1, wherein the vacuum holding valve mechanism and the pressure holding vacuum breaking valve mechanism are diaphragm type valves, and the diaphragm valve body is made of stainless steel, rubber or fluorine. It is a rubber diaphragm valve element.

  According to a ninth aspect of the present invention, in the first aspect of the invention, the thickness of the body of the internal atmosphere switching mechanism is made substantially the same as the thickness of the container lid, and the body is hermetically sealed to a part of the container lid. It is designed to be inserted and fixed.

  According to a tenth aspect of the present invention, in the first aspect of the present invention, the inside of the closed container is enlarged by using a diaphragm-type valve as the pressure holding vacuum breaking valve mechanism and holding the diaphragm valve body in an open state from the outside. It is designed to be kept at atmospheric pressure.

  According to an eleventh aspect of the present invention, in the first aspect, the vacuum holding valve mechanism is a diaphragm type valve, and the diaphragm valve body is opened from the outside to make the inside of the closed vessel an atmospheric pressure. It is what it was.

In the closed container with an internal atmosphere switching mechanism according to the present invention, the internal atmosphere switching mechanism provided with a vacuum holding valve mechanism and a pressure holding vacuum breaking valve mechanism in the container lid body is hermetically inserted, The operation space formed outside the container lid side of the closed container is set to a vacuum, air, and pressurized state to open and close the two valve mechanisms, and the inside of the closed container is switched to a vacuum or pressurized state and held. It has a configuration.
As a result, the inside of the closed container can be maintained at a predetermined degree of vacuum or pressurization only by setting the internal pressure of the operation space to vacuum, atmospheric or pressurized, and the vacuum state and pressurized state can be maintained. By repeating the process, so-called purging of the inside of the closed container can be performed. Even if a load lock chamber or the like having a complicated mechanism is not provided as in a conventional handling system using a vacuum pod, the closed container (vacuum pod) may be used. ) Can be handled with high efficiency, and equipment costs and semiconductor manufacturing costs can be significantly reduced.
The present invention has excellent practical utility as described above.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIGS. 1 and 2 are explanatory views of a use state of a closed container with an internal atmosphere switching mechanism according to the present invention (hereinafter referred to as a closed container). In the drawings, A is a wafer, 1 is a closed container, and 2 is a container. Main body, 3 is a closed container lid, 4 is an internal atmosphere switching mechanism, 5 is a processing chamber, 6 is a chamber main body, 7 is a bottom plate of the processing chamber, 8 is a flow passage, 9 is an operation space, 10 · 11 · 12 is an O-ring.

The hermetically sealed container 1 is formed of a container body 2 made of aluminum or engineering plastic and a container lid 3, in which an appropriate number of wafers A to be processed are stored.
The container lid 3 is detachably inserted into the lower opening of the container body 2 via the O-ring 10, and the O-ring 10 maintains airtightness.
Further, the container lid 3 is detachably fixed to the container main body 2 via a lock mechanism (not shown).

  An engagement mechanism (not shown) is provided on the lower surface side of the container lid 3 to detachably engage the projection 7a of the bottom plate 7, and is sealed to the upper opening of the processing chamber 5. When the container 1 is set, the projection 7a of the bottom plate 7 is engaged with the lower surface of the container lid 3 by an engagement mechanism (not shown), and the lower portion of the lid 3 and the upper portion of the bottom plate 7 An airtight operating space 9 is formed between the two.

  An internal atmosphere switching mechanism 4, which is a main part of the present invention, is hermetically incorporated and fixed to the container lid 3. The inside of the closed container 1 is evacuated or vacuumed through the internal atmosphere switching mechanism 4 as described later. It is kept in a slightly pressurized state.

  The processing chamber 5 includes a chamber main body 6, a bottom plate 7 for hermetically closing an upper opening of the main body, an elevating mechanism (not shown) for vertically moving the bottom plate 7, and the like. By setting the closed container 1 at a predetermined position on the chamber main body 6 and then raising the bottom plate 7, the protrusion 7a at the upper portion of the bottom plate is automatically engaged with the lower surface side of the container lid 3, and An airtight operation space 9 is formed between the lid 3 and the bottom plate 7.

  The airtight operation space 9 is connected to an external vacuum pump device 13, a pressurized gas supply device 14, and the atmosphere via a flow passage 8 and an operation valve 8a so as to be freely switchable. By operating the valves 13a, 14a, and 15, the state is switched to vacuum, pressurized, or atmospheric pressure.

The internal atmosphere switching mechanism 4 is detachably and air-tightly fixed to the container lid 3 via an O-ring 16 as shown in FIG. 3, and a communication path 19 between the inside of the closed container 1 and the operation space 9; A vacuum holding valve mechanism 17 for opening and closing 21 and a pressure holding vacuum breaking valve mechanism 18 for opening and closing the communication paths 20 and 21 between the inside of the sealed container 1 and the operation space 9 are provided.
In FIG. 3, 22 is a communication passage, 23 is a filter, 24 and 25 are diaphragm valve bodies, 26 and 27 are springs, and 28 and 29 are valve seats.

The vacuum holding valve mechanism 17 is opened when the inside of the operation space 9 becomes vacuum to make the inside of the sealed container 1 vacuum, and when the inside of the operation space 9 becomes atmospheric pressure, it is closed and the inside of the closed container 1 becomes vacuum. It keeps the state.
The pressure holding vacuum breaking valve mechanism 18 is opened when the inside of the operation space 9 is pressurized to break the inside of the closed container 1 under pressure and closed when the inside of the operation space 9 becomes atmospheric pressure. Then, the inside of the closed container 1 is maintained in a pressurized state.

The inner volume of the closed vessel 1 usually requires about 500 to 3000 cc, the degree of vacuum requires 1 to 100 Pa, and the degree of pressurization requires 780 to 850 torr.
Specifically, when performing the pressurization purge with N _2, it the O ₂ concentration in the sealed container 1 within 5 minutes N ₂ after pressing need to be 20 ppm.
Further, the sheet leak amount of each of the valve mechanisms 17 and 18 is preferably within 10 ⁻¹⁰ Pa · m ³ / sec, and it is desirable that a vacuum degree of 100 to 200 Pa can be maintained for 30 days.
In addition, the thickness of the closed container lid 3 for fixing the internal atmosphere switching mechanism 4 is desirably about 10 to 20 mm.

Referring to FIG. 1 and FIG. 2, the sealed container 1 storing the wafer A is transported to a predetermined position above the processing chamber 5 and set. Thereby, the projecting portion 7a of the bottom plate 7 is engaged with the container lid 3, the lock between the container lid 3 and the container main body 2 is released, and the airtightness between the lid 3 and the bottom plate 7 is further improved. An operation space 9 is formed.
Next, the vacuum pump device 13 is operated to reduce the pressure inside the operation space 9. As a result, the vacuum holding valve mechanism 17 of the internal atmosphere switching mechanism 4 is opened, and the inside of the sealed container 1 and the operation space 9 are communicated. Incidentally, the inside of the sealed container 1 and the inside of the processing chamber 5 are usually kept at a predetermined degree of vacuum.

When the inside of the operation space 9 and the closed container 1 are communicated with each other and the degree of vacuum in both spaces reaches a set value, the operation valve 8a of the flow passage 8 is closed, and the bottom plate 7 is lowered.
As a result, the wafer A in the sealed container 1 is moved into the processing chamber 5, where a predetermined processing is performed.

When the processing on the wafer A is completed, the bottom plate 7 is moved upward, whereby the wafer A is returned into the closed container 1.
When the operation space 9 is formed by raising the bottom plate 7, the operation valve 8a of the flow passage 8 is opened, and the operation space 9 is communicated with the atmosphere. As a result, the vacuum holding valve mechanism 17 is closed. Thereafter, the container lid 3 is locked and the bottom plate projection 7a is disengaged from the lid 3, and the vacuum container 1 containing the wafer A is transferred to the next step.

Further, when it is necessary to slightly pressurize the inside of the sealed container 1 with N ₂ or the like or when purging the inside of the container main body 2, the N ₂ gas is supplied into the operation space 9 through the flow passage 8 and the operation space 9 is supplied. Is pressurized to a predetermined pressure. As a result, the diaphragm 25 of the pressure holding / vacuum breaking valve mechanism 18 is pushed down through the passage 20 against the spring 27, and the interior of the sealed container 1 is pressurized to a predetermined pressure by opening the valve mechanism 18.
On the other hand, the vacuum holding valve mechanism 17 has a difference between the valve closing force applied to the diaphragm 24 from below (the pressing force of the spring 26 + the lower surface receiving pressure) and the valve opening force from above (the upper surface receiving pressure). Thus, the valve is normally kept closed.

After the inside of the closed container 1 is pressurized to a predetermined pressure, when the pressurization in the operation space 9 is stopped and the inside of the operation space 9 is returned to the atmospheric pressure, the diaphragm 25 of the pressure holding vacuum breaking valve mechanism 18 is actuated by a spring 27. It is pushed up and held in the valve closed state.
Also, the vacuum holding valve mechanism 17 is kept in a state where the diaphragm 24 is pressed upward by the spring 26, and is kept in a closed state.
As a result, the inside of the closed container 1 is maintained in a state where it is pressurized to a predetermined pressure. By repeating the vacuuming operation and the pressurizing operation, the inside of the container body 2 is purged, and the particles remaining inside are discharged to the outside.

FIGS. 4 and 5 are a bottom view and a plan view of the first embodiment of the internal atmosphere switching mechanism 4 used in the present invention.
4 and 5, reference numeral 30 denotes an alumite body, which is selected to have a thickness of about 10 to 18 mm in accordance with the thickness of the container lid 3.

  The body 30 is provided with a circular hole having a depth of about half the thickness in the thickness direction on the back surface side (that is, the side facing the processing chamber 5). Further, two small holes forming valve chambers of the vacuum holding valve mechanism 17 and the pressure holding vacuum breaking valve mechanism 18 are respectively formed.

Further, communication passages 19, 20, 21 are formed in an upper portion of the body 30 in the thickness direction (ie, on a side facing the container body 2), and a filter 36 is provided at an end of each communication passage 19, 20. The filter body 37 is fixed by a filter body holding ring 37a. Further, a filter 23, a filter body 34, and a filter holding ring 35 are provided at an end of the communication path 21, and the filter 23 is inserted and fixed by fixing the holding ring 35 to the body 30.
The filters 23 and 36 are for preventing particles from entering the closed vessel 1 and the processing chamber 5, and in the present embodiment, the filters 23 and 36 are for preventing particles of 0.15 μm or more from entering. , 0.1 μm diameter filters are provided.

  Inside each of the small holes forming the valve chamber, a fluorine rubber-based valve seat sheet 28/29, a fluoro rubber-based diaphragm 24/25, a spring receiver 31a / 31b made of PCTFE, and a spring 26/27 are respectively provided. Each member is assembled and fixed by inserting the holding flanges 32a and 32b and the diaphragm holding member 33 from the lower surface side thereof and fixing the diaphragm holding member 33 to the body 30 by the diaphragm holding screw 40. .

That is, the vacuum holding valve mechanism 17 is formed of a valve seat 28, a diaphragm 24, a spring 26, a spring receiver 31a, a holding flange 32a, and the like, and a filter 38 is provided in the communication passage 22 as necessary. I have.
The pressure holding vacuum breaking valve mechanism 18 includes a valve seat 29, a diaphragm 25, a spring 27, a spring receiver 31b, a holding flange 32b, and the like. By adjusting the elastic force of the springs 26, 27 and the like and the pressure receiving area ratio of the diaphragms 24, 25, a vacuum is maintained during the evacuation of the closed vessel 1 (that is, the evacuation of the operation space 9). The valve mechanism 17 is opened first, and conversely, when pressurizing the closed container 1, the pressure holding vacuum breaking valve mechanism 18 is opened first.

More specifically, the valve mechanism 17 is opened and closed by using a pressure difference (approximately 1.033 kgf / cm ² ) between the vacuum and the atmospheric pressure applied to the diaphragm 24 of the vacuum holding valve mechanism 17. The pressure holding vacuum break valve mechanism 18 uses the pressure difference between pressurization and atmospheric pressure (about 100 torr) to open and close the pressure hold vacuum break valve mechanism 18.

  The internal atmosphere switching mechanism 4 including the vacuum holding valve mechanism 17 and the pressure holding vacuum breaking valve mechanism 18 is provided by fixing the body 30 to the container lid 3 with the body fixing screw 39. 3 and move to each processing step together with the closed container 1.

6 and 7 show another embodiment of the internal atmosphere switching mechanism 4, which is different from the first embodiment in that the body 30 is formed in a flange shape. The configuration of the switching mechanism 4 is substantially the same as that of the first embodiment.
That is, in the second embodiment, a flange receiving portion (not shown) for receiving the flange portion 30a of the body 30 is formed on the container lid 3 side, and the flange receiving portion 30a of the body 30 is formed on the flange receiving portion. The body 30 is fixed by tightening the body fixing screw 39 in a state where is brought into contact with the body 30.

  In the first and second embodiments, the body 30 is fixed to the container lid 3 by the body fixing screw 39. However, instead of using the body fixing screw 39, a screw is attached to the outer peripheral surface of the body 30. It may be configured to be formed and screwed and fixed to the container lid 3.

(Third embodiment)
FIGS. 8 and 9 are a bottom view and a sectional view, respectively, showing a part (a pressure holding vacuum breaking valve mechanism 18) of a third embodiment of the present invention.
In the third embodiment, the vacuum holding valve mechanism 17 and the pressure holding vacuum breaking valve mechanism 18 of the internal atmosphere switching mechanism 4 are divided and formed separately.
Note that the configurations of the vacuum holding valve mechanism 17 and the pressure holding vacuum breaking valve mechanism 18 are substantially the same as those in the first and second embodiments, and therefore description thereof is omitted here.

The vacuum holding valve mechanism 17 and the pressure holding vacuum breaking valve mechanism 18 according to the third embodiment are usually the diameter of the container lid 3 (in the case of the circular closed container 1) or the diagonal line (in the case of the rectangular closed container). Are attached near both ends. This is because, by arranging the container lid 3 at both edges so as to face each other, it is easy to discharge particles existing in the closed container 1.
That is, the pressure in the operation space 9 is sequentially switched to vacuum-atmosphere-pressurization, and the inside of the closed container 1 is repeatedly switched to the vacuum-pressurized state, so that the particles in the closed container 1 are discharged to the outside of the container 1. Is done. At this time, if the two valve mechanisms 17 and 18 are arranged to face each other, the flow of the purge fluid in the sealed container 1 flows through the entire internal space without being a bypass flow, so that the particle discharge efficiency is improved. Will be greatly improved.
[Operation test]

FIG. 10 is an explanatory diagram of a configuration of an operation test device of the internal atmosphere switching mechanism according to the present invention. In FIG. 10, C is a closed container portion (internal volume of 512 cc), D is an operation space portion (internal volume of 463 cc), PT ₁ is a pressure gauge (−1.03 to 10 kgf / cm ² G), PT ₂ is a baratron gauge (1000 torr FS · S), PT ₃ is a vacuum gauge (10 ^{-3 to} 760 Torr), and PT ₄ is a baratron gauge (1000 torr F · S). S), RG is a regulator (0.2 MPaG), MFC is a flow controller (5 SLMF · S), FIL is a filter (0.01 μm), DP is a vacuum pump (180 L / min), V ₁ is a vent valve, V ₂ is a N ₂ gas supply valve, V ₃ is a vacuum evacuation valve, V ₄ is an air release valve, V ₅ is a vacuum evacuation speed control valve, P ₁ is the pressure of the operation space D, and P ₂ is the pressure of the closed space C. Pressure.

  FIG. 11 shows an operation test result of the internal atmosphere switching mechanism 4. The internal atmosphere switching mechanism 4 having the configuration shown in FIGS. 6 and 7 is used. That is, the body 30 is formed using A5052 (alumite 7 μm), and its port inner diameter is 2 mmφ. The diaphragms 24 and 25 were made of fluorine rubber (hardness 70), and the spring (vacuum side) 26 was set to 0.05 (kgf) and the spring (pressing side) 27 was set to 0.02 kgf. Incidentally, the ultimate vacuum pressure and the vacuum breaking pressure can be adjusted by adjusting the elasticity of the two springs 26, 27.

FIG. 11 shows the recorder outputs of PT ₂ and PT ₄ in FIG. 10 recorded on a data logger.
Referring to FIG. 11, first, the vacuum pump DP was operated from point P1a to evacuate the operation space D (180 sec, P ₁ = 1 Torr or less). As a result, the degree of vacuum P ₂ of the sealed container portion C is held in 23.4Torr, the vacuum sealed space D is also open to the atmosphere is maintained at the same value (P2a, P2b).
Next, the pressure in the operation space D is increased by supplying N ₂ (100 SCCM), the vacuum of P ₂ is stopped at the point P _1e of 1031 torr (vacuum break), and the pressure of the sealing device C is changed from vacuum to atmospheric pressure. Is boosted. Thereafter, P ₁ is at P _1f terms of 920Torr, the same space D stop pressurization of the operating space D is open to the atmosphere. Its dwell pressure in the closed space C when it is found that 783torr (P2d point), and the pressure P ₂ in the closed space portion C is held in the fine pressure.
In FIG. 11, P _1c is a point at which the space D is open to the atmosphere, P _1b is a vacuum evacuation stop point of the space D, and P _1d is a pressure start point of the space D. In the case of P _2c , P _1e is the breaking start point of the vacuum P _{2 in} the space C. Incidentally, the ultimate pressure and vacuum break pressure P ₁ of P ₂ when the evacuation can be adjusted by changing the springs of the vacuum side and pressure side.

As is clear from the result of the operation test shown in FIG. 11, in the internal atmosphere switching mechanism 4 according to the present invention, the operation space portion D is brought into a vacuum state so that the pressure holding valve breaking valve mechanism 18 The vacuum holding valve mechanism 17 can be opened while keeping the valve closed, and the interior of the closed vessel C can be evacuated, and the operation space D can be returned to the atmospheric state. The valve 17 is closed, and the inside of the closed container C is kept in a vacuum state.
Conversely, by pressurizing the inside of the operation space D, the pressure holding vacuum breaking valve mechanism 18 is opened while the vacuum holding valve mechanism 17 is held in the closed state, and the inside of the closed vessel C is opened. Can be pressurized and the operation space D is returned to the atmosphere, the pressure holding vacuum breaking valve mechanism 18 is closed, and the inside of the closed vessel C is maintained in a pressurized state.

  FIGS. 12 and 13 are an enlarged sectional view and a bottom view showing still another embodiment of the vacuum holding valve mechanism 17, which is separated from the pressure holding vacuum breaking valve mechanism 18 and used alone to form a closed container lid. 3, where appropriate.

  In the vacuum holding valve mechanism 17 of the present embodiment, a spring 26 for holding the diaphragm 24 and a spring receiver 31a are provided in the vacuum holding valve mechanism 17 of the embodiment shown in FIGS. The operation as the vacuum holding valve mechanism 17 is performed by the elastic force of the diaphragm 24 itself and the area difference between the pressure receiving surfaces on both sides.

12 and 13, 16 is an O-ring, 19, 20, and 21 are communication paths, 24 is a diaphragm, 28 is a valve seat, 30 is a body (10 mm thick), 33 is a diaphragm presser, 39 Is a body fixing screw, and 40 is a diaphragm holding screw.
Although not shown in the present embodiment, a mechanism for forcibly opening the external body 24 of the vacuum holding valve mechanism 17 is provided, and a function as an opener for opening the inside of the sealed container 1 to atmospheric pressure is provided. You may make it.

  FIGS. 14 and 15 are an enlarged sectional view and a bottom view showing still another embodiment of the pressure holding and vacuum breaking valve mechanism 18, respectively. The container cover 3 of the main body 1 is attached to an appropriate place.

  In the pressure-holding vacuum breaking valve mechanism 18 of the present embodiment, the pressing spring 27 of the diaphragm 25 in the pressure-holding vacuum breaking valve mechanism 18 of the embodiment shown in FIGS. Further, the spring mechanism 31b is not provided, and the operation as the pressure holding vacuum breaking valve mechanism 18 is performed by the elastic force of the diaphragm 25 itself and the area difference between the pressure receiving surfaces on both sides.

  In this embodiment, a screw is formed in the communication passage 20 as shown in FIG. 14, and a vacuum breaking holding bolt 41 is screwed into the screw and the diaphragm 25 is pressed with its tip. Thereby, the diaphragm 25 can be kept open at all times. That is, the holding bolt 41 for vacuum breaking is used when the valve seat 29 is always fixed to the open state and the inside of the sealed container 1 is maintained at the atmospheric pressure.

  14 and 15, 16 is an O-ring, 20 and 21 are communication paths, 23 is a filter, 25 is a diaphragm, 29 is a valve seat, 30 is a body (thickness 10 mm), and 33 is a diaphragm holder. , 39 are body fixing screws, 40 is a diaphragm holding screw, 41 is a holding bolt for vacuum breaking, and 42 is a port for charging nitrogen gas.

  In the embodiments of FIGS. 14 and 15, the holding bolt 41 is used to open the diaphragm 25, but the opening mechanism of the diaphragm 25 may be any mechanism, for example, a manual push button (engagement mechanism). (With a stop lock mechanism) or an electrically operated plunger button.

  The present invention is mainly used in the technical fields of a semiconductor manufacturing apparatus, an optical exposure apparatus, a precision machine, a chemical manufacturing apparatus, and the like.

FIG. 4 is an explanatory view of a use state of the closed container with an internal atmosphere switching mechanism, showing a state where the closed container is set in a processing chamber. FIG. 3 is an explanatory view of a use state of the closed container with an internal atmosphere switching mechanism, showing a state in which a bottom plate is lowered. FIG. 3 is an explanatory diagram of a configuration of an internal atmosphere switching mechanism. FIG. 4 is a bottom view of the internal atmosphere switching mechanism according to the first embodiment. FIG. 5 is a sectional view taken along line AA of FIG. 4. FIG. 9 is a bottom view of the internal atmosphere switching mechanism according to the second embodiment. It is AA sectional drawing of FIG. It is a bottom view of the valve mechanism part for pressure holding vacuum breakage of the internal atmosphere switching mechanism concerning a 3rd example. FIG. 9 is a sectional view taken along line AA of FIG. 8. It is an explanatory view of an operation test device for an internal atmosphere switching mechanism according to the present invention. It is a diagram showing the result of an operation test. It is sectional drawing of the valve mechanism part for vacuum maintenance of the internal atmosphere switching mechanism which concerns on 4th Example. It is a bottom view of FIG. It is sectional drawing of the valve mechanism part for pressurization holding vacuum break of the internal atmosphere switching mechanism which concerns on 4th Example. FIG. 15 is a bottom view of FIG. 14.

Explanation of reference numerals

A is a wafer, 1 is a sealed container, 2 is a container body, 3 is a container lid, 4 is an internal atmosphere switching mechanism, 5 is a processing chamber, 6 is a chamber body, 7 is a bottom plate, 7a is a protruding portion, and 8 is A flow passage, 8a is an operation valve, 9 is an operation space, 10 ・ 11 ・ 12 is an O-ring, 13 is a vacuum pump device, 13a is a vacuum switching valve, 14 is a pressurized gas supply device, 14a is a pressurized gas switching valve, 15 is an atmosphere release valve, 16 is an O-ring, 17 is a valve mechanism for vacuum holding, 18 is a valve mechanism for vacuum holding and pressure release, 19, 20, 21, and 22 are communication paths, 23 is a filter, and 24 and 25 are diaphragms. Valve bodies, 26 and 27 are springs, 28 and 29 are valve seats, 30 is a body, 30a is a flange, 31a and 31b are spring receivers, 32a and 32b are holding flanges, 33 is a diaphragm holder, and 34 is a filter body. , 35 is a filter holding ring, 36 is a filter, 37 is a filter body, 37a is a filter holding ring, 38 is a filter, 39 is a body fixing screw, 40 is a diaphragm holding screw, 41 is a holding bolt for vacuum breaking, and 42 is nitrogen. Port for gas filling, C is a sealed container (operation test device), D is an operation space (operation test device), PT ₁ is a pressure gauge PT ₂ is a baratron gauge, PT ₃ is a vacuum gauge, PT ₄ is a baratron gauge, RG is regulator, MFC is flow controller, FIL filter, V ₁ is a vent valve, V ₂ is N ₂ gas supply valve, V ₃ vacuuming valve, V ₄ is the air release valve, V ₅ is evacuated speed control valve, P ₁ is the pressure of the operating space D, P ₂ is the pressure in the sealed space station C, a start point of P _1a is a vacuum pump DP, P _1b is evacuated stopping point, P _1c is air release point, P _1d is the starting point of N ₂ pressurization, P _1e is vacuum Break point, P _1f is open point to atmosphere, P _2a is P ₂ pressure hold (at P ₂ vacuum), P _2b is P ₂ pressure hold (at P ₁ atmospheric pressure), P _1e is vacuum break point, P _2c is P P ₂ vacuum breaking (opening start point), P _2d is P ₂ holding pressure (when P _{2 is} pressurized).

Claims (11)

  A container body, a container lid hermetically and detachably fixed to the container main body, and vacuums provided in the container lid hermetically to open and close a communication passage communicating between the inside of the container main body and the outside of the container lid. An internal atmosphere switching mechanism provided with a holding valve mechanism and a pressure holding vacuum breaking valve mechanism, and the vacuum holding valve mechanism is opened when an operation space formed outside the container lid is evacuated. A valve mechanism for evacuating the inside of the container body and closing the valve body when the operation space is opened to the atmosphere to maintain the inside of the container body at a predetermined degree of vacuum, and a valve mechanism for pressurized holding vacuum breakage. When the operation space is pressurized in order to return the inside of the container body from the vacuum holding state to the atmospheric pressure, the valve is opened and the inside of the container body is pressurized and vacuum destroyed, and the valve is closed and closed when the operation space is opened to the atmosphere. A valve that maintains the inside of the main body at a predetermined degree of pressurization The structure, the sealed container with the internal atmosphere switching mechanism, characterized in that the respective configuration.   An operation space is formed between the lower part of the container lid of the closed container and the upper part of the bottom plate of the processing chamber, and the inside of the operation space is evacuated, atmospheric pressure and pressurized through the flow passage formed in the wall of the processing chamber. The sealed container with an internal atmosphere switching mechanism according to claim 1, wherein the container is held in a state.   The sealed container with an internal atmosphere switching mechanism according to claim 1, wherein the vacuum holding valve mechanism and the pressure holding vacuum breaking valve mechanism are provided adjacent to a common body.   2. A vacuum holding valve mechanism and a pressure holding vacuum breaking valve mechanism are provided adjacent to a common body, and filters are provided at an inlet end and an outlet end of each communication passage. Closed container with internal atmosphere switching mechanism.   The closed container with an internal atmosphere switching mechanism according to claim 1, wherein the vacuum holding valve mechanism and the pressure holding vacuum breaking valve mechanism are separately provided on the container lid.   A vacuum holding valve mechanism and a pressure holding vacuum breaking valve mechanism are separately provided and arranged on the outer peripheral edge of the container lid so as to face each other, and filters are provided at the inlet end and the outlet end of each communication passage. The sealed container with an internal atmosphere switching mechanism according to claim 1.   2. The internal atmosphere switching mechanism according to claim 1, wherein one or both of the vacuum holding valve mechanism and the pressure holding vacuum breaking valve mechanism are provided with means for arbitrarily preventing the function of each valve mechanism from the outside. Sealed container with.   2. The internal atmosphere switching according to claim 1, wherein the vacuum holding valve mechanism and the pressure holding vacuum breaking valve mechanism are diaphragm type valves, and the diaphragm valve body is a stainless steel, rubber or fluorine rubber diaphragm valve body. Closed container with mechanism.   2. The internal atmosphere switching device according to claim 1, wherein the thickness of the body of the internal atmosphere switching mechanism is substantially equal to the thickness of the container lid, and the body is airtightly inserted and fixed to a part of the container lid. Closed container with mechanism.   2. The internal atmosphere switching mechanism according to claim 1, wherein the pressure holding vacuum breaking valve mechanism is a diaphragm type valve, and the inside of the closed vessel is kept at atmospheric pressure by holding the diaphragm valve body in an open state from the outside. Sealed container with.   2. The sealed container with an internal atmosphere switching mechanism according to claim 1, wherein the vacuum holding valve mechanism is a diaphragm type valve, and the inside of the sealed container is set to the atmospheric pressure by opening the diaphragm valve body from the outside.

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