JP2007227800A - Substrate storage and transport container, and purge system of substrate storage and transport container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate storage and transport container in sealed structure in which nonreactive gas can securely be charged and a sealed state can stably be maintained, and which prevents outside air from entering itself. <P>SOLUTION: The substrate storage and transport container comprises a sealed container 1 in which a substrate is stored, a lid 2 capable of opening and closing the container, an air supply port, and an air discharge port. The air supply port and the gas discharge port each have a valve body energized to close a valve port, and external force is passed through the valve port to operate through a member abutting against the valve body to perform opening operation. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a substrate storage transport container and a substrate storage transport container purge system used for transporting a substrate such as a silicon wafer or a glass substrate in the process of manufacturing a semiconductor device.

  Storage and transportation of a substrate, for example, a wafer in a semiconductor manufacturing process is performed in a state where a required number is stored in a substrate storage and transportation container. Also, one of the substrate storage and transport containers is a sealed substrate storage and transport container. In the substrate storage and transport container, the substrate is not contaminated with particles during storage or transport, or by water or oxygen in the atmosphere. In order to prevent natural oxidation or the like, non-reactive gas such as nitrogen gas is enclosed.

  Further, since the substrate storage / transport container is not a pressure container and cannot withstand a large internal / external pressure difference, the inside / outside of the container communicates with each other via a filter for particle removal so that a large internal / external pressure difference does not occur. For this reason, even if it fills with non-reactive gas, such as nitrogen gas, the inside of a substrate storage transport container cannot be maintained in a non-reactive gas atmosphere.

  Since a filter is provided at the communication point, infiltration of particles can be suppressed and contamination by particles can be prevented, but intrusion of gaseous substances such as moisture, oxygen, or organic substances in the air cannot be suppressed. For this reason, it was not possible to prevent the substrate from being naturally oxidized and the deterioration of the insulation characteristics due to organic contamination.

  On the other hand, as a substrate storage and transport container that maintains a non-reactive gas atmosphere in the container, two check valves that operate opposite to the internal / external pressure difference are provided in the communication part of the container, There is a substrate storage and transport container having a structure in which a non-reactive gas having a predetermined pressure or higher is supplied into a substrate storage and transport container, and the non-reactive gas is sealed in the substrate storage and transport container at a predetermined internal pressure. In such a substrate storage and transport container, the other check valve releases the internal pressure when the internal pressure of the substrate storage and transport container becomes higher than the external pressure, and when the external pressure becomes higher than the internal pressure, Outside air enters from the stop valve to eliminate the internal / external pressure difference.

  In general, a check valve is a valve in which a steel ball, which is a valve element, is pressed against a valve seat with a tapered surface by a spring and sealed, and a predetermined surface pressure is required between the valve seat and the valve element to have the required sealing performance. is required. Therefore, in order to obtain a reliable sealing performance, the spring force must be large. However, when provided so as to maintain a predetermined internal / external pressure difference, the spring force can maintain the set pressure, and the substrate storage / transport container The internal pressure greatly affects the surface pressure, and when the internal pressure becomes close to the set pressure, the surface pressure decreases, the plugged state becomes unstable, and the sealing performance decreases. For this reason, in an environment where a dynamic external force acts, such as during transportation, outside air may enter from the outside.

Japanese Patent Laid-Open No. 8-203993

  In view of such a situation, the present invention is capable of reliably sealing non-reactive gas in a substrate storage and transport container having a sealed structure, and can stably maintain the sealed state, and prevent the entry of outside air from the outside. A storage transport container and a substrate storage transport container purge system are provided.

  The present invention includes a hermetically sealed container for storing a substrate, a lid capable of opening and closing the container, an air supply port, and an exhaust port, and the air supply port and the exhaust port each close a valve port. The valve body is related to a substrate storage and transport container that is opened by an external force acting through a member that comes into contact with the valve body through the valve port. The valve body of the port and the valve body of the exhaust port relate to a substrate storage and transport container configured to be opened and closed differently so that the exhaust port is opened and closed while the air supply port is open.

  The present invention also provides a substrate storage / transport container purge system in which a substrate storage / transport container is purged with a non-reactive gas by placing the substrate storage / transport container on a container mounting table. The container includes a hermetically sealed container for storing a substrate, a lid capable of opening and closing the container, a container side air supply port, and a container side exhaust port, and the container side air supply port and the container side exhaust port Each has a valve body biased to close the valve port, and the container mounting table includes a table side air supply port connected to a purge gas supply system and a table side exhaust port, and the substrate storage When the transport container is placed on the container mounting table and removed from the container mounting table, the table side air supply port and the table side exhaust port are disconnected from the container side air supply port and the container side exhaust port, respectively. It is possible to store and transport the substrate In a state where the container is mounted on the container mounting table, the container-side air supply port, the container-side exhaust port, or the table-side air supply port, via a rod protruding from at least one of the table-side exhaust port The present invention relates to a substrate storage / transport container purge system configured to open the valve body.

  According to the present invention, a sealed container for storing a substrate, a lid capable of opening and closing the container, an air supply port, and an exhaust port are provided, and each of the air supply port and the exhaust port has a valve port. The valve body is biased so as to be closed, and the valve body is opened by an external force acting through a member that contacts the valve body through the valve port, so that the external force acts on the valve body. Unless this is done, the valve port is not opened, so that the airtight state of the substrate storage and transport container is stably maintained, and when the non-reactive gas is sealed, the positive pressure state can be obtained, the intrusion of outside air can be prevented, and natural oxidation can be performed. Formation of a film can be prevented and contamination by an organic gas can be prevented, so that the quality of the film formed on the substrate can be improved and the yield can be improved.

  Further, according to the present invention, the valve body of the air supply port and the valve body of the exhaust port are configured to have different opening and closing timings so that the exhaust port is opened and closed when the air supply port is open. Therefore, when the purge gas is supplied from the air supply port, it is possible to prevent the outside air from being caught from the exhaust port side.

  According to the present invention, in the substrate storage / transport container purge system, the substrate storage / transport container is purged with a non-reactive gas by placing the substrate storage / transport container on the container mounting table. A storage and transport container includes a hermetically sealed container for storing a substrate, a lid capable of opening and closing the container, a container side air supply port, and a container side exhaust port, and the container side air supply port and the container side Each of the exhaust ports has a valve body biased to close the valve port, and the container mounting table includes a table side air supply port connected to a purge gas supply system, and a table side exhaust port, By placing the substrate storage / transport container on the container mounting table and removing it from the container mounting table, the table-side air supply port and the table-side exhaust port are respectively connected to the container-side air supply port and the container-side exhaust port. Can be disconnected, and In a state where the transport container is mounted on the container mounting table, the container-side air supply port, the container-side exhaust port, or the table-side air supply port, via a rod protruding from at least one of the table-side exhaust port Since the valve body is opened, the substrate storage / transport container can be purged by simply placing the substrate storage / transport container on the container mounting table. When it is removed from the container mounting table, the valve port is not opened unless an external force is applied to the valve body, the airtight state of the substrate storage and transport container is stably maintained, and when the non-reactive gas is sealed, Pressure can be prevented, the intrusion of outside air can be prevented, the formation of a natural oxide film can be prevented, and the contamination by organic gas can be prevented, improving the quality of the film produced on the substrate and improving the yield, etc. To exert the effect.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  First, referring to FIG. 1, an outline of a substrate storage / transport container 1 according to the present embodiment will be described.

  The substrate storage / transport container 1 is an airtight container, and the front container lid 2 can be opened and closed. In the storage / transport state, the container lid 2 hermetically closes the substrate storage / transport container 1, and a semiconductor manufacturing apparatus When carried in, the container lid 2 is opened and closed by an opening and closing device provided in the semiconductor manufacturing apparatus.

  A predetermined number of, for example, 25 wafers 3 are accommodated inside the substrate storage / transport container 1, and a compressed gas tank 4 is provided at a required position of the substrate storage / transport container 1, for example, the back surface. The compressed gas tank 4 is compressed and filled with a non-reactive gas such as nitrogen gas. The compressed gas tank 4 and the inside of the substrate storage / transport container 1 are communicated by a gas supply pipe 5, and the substrate storage / transport container 1 and the outside are communicated by an exhaust pipe 6, and the gas supply pipe 5 and the exhaust pipe 6 are communicated. Are provided with electromagnetic on-off valves 7 and 8, respectively, and the differential pressure between the internal pressure of the substrate storage and transport container 1 and the external pressure outside the substrate storage and transport container 1 is detected by a differential pressure gauge 9.

  The electromagnetic on / off valves 7 and 8 are controlled by the control unit 10 so that the differential pressure detected by the differential pressure gauge 9 is within a predetermined value. That is, the internal pressure of the substrate storage / transport container 1 is set to be slightly higher than the outside air (positive pressure). When the internal pressure becomes lower than the set pressure, the electromagnetic on-off valve 7 is opened, and the non-reactive gas is compressed. When the substrate storage / transport container 1 is supplied from the gas tank 4 and the internal pressure of the substrate storage / transport container 1 becomes higher than a predetermined value, the electromagnetic on-off valve 8 is opened, and the load inside the substrate storage / transport container 1 is released. Thus, the pressure inside the substrate storage / transport container 1 is controlled to be a predetermined positive pressure.

  Since the inside of the substrate storage / transport container 1 has a predetermined positive pressure, the intrusion of outside air is prevented, and the inside of the substrate storage / transport container 1 is maintained in a non-reactive gas atmosphere.

  The inside of the substrate storage / transport container 1 is filled with a non-reactive gas. The substrate storage / transport container purge system for filling the inside of the substrate storage / transport container 1 with a non-reactive gas will be described with reference to FIGS. To do.

  A container mounting table 12 is provided in the vicinity of the transport path of the substrate storage / transport container 1 or the storage position, and a table-side air supply port 13 and a table-side exhaust port 14 are provided on the upper surface of the container mounting table 12. ing. The stand-side air supply port 13 is connected to a non-reactive gas supply source 16, for example, a nitrogen gas cylinder, via an air supply pipe 15. The air supply pipe 15 is provided with a flow rate controller 17, and the flow rate control is performed. On-off valves 18 and 19 are provided upstream and downstream of the vessel 17, respectively. The air supply pipe 15, the non-reactive gas supply source 16, the flow rate controller 17, the on-off valves 18 and 19, etc. constitute a purge gas supply system 20.

  An exhaust pipe 21 is connected to the table-side exhaust port 14, and the exhaust pipe 21 is open to the atmosphere or connected to an exhaust device (not shown).

  A container-side air supply port 22 and a container-side exhaust port 23 are provided at positions corresponding to the lower surface of the substrate storage / transport container 1, the table-side air supply port 13, and the table-side exhaust port 14. Is mounted on the container mounting table 12, the container side air supply port 22 and the table side air supply port 13 are connected, and the container side exhaust port 23 and the table side exhaust port 14 are connected. It is like.

  The table-side air supply port 13, the table-side exhaust port 14, the container-side air supply port 22, and the container-side exhaust port 23 are each open / close valves or have a structure equipped with open / close valves. When the container side air supply port 22 and the table side air supply port 13 are connected, or when the container side exhaust port 23 and the table side exhaust port 14 are connected, the valves are opened. Then, non-reactive gas is filled into the substrate storage / transport container 1 from the non-reactive gas supply source 16 via the air supply pipe 15, and the air in the substrate storage / transport container 1 passes through the exhaust pipe 21. The substrate storage / transport container 1 is purged with a non-reactive gas.

  When the substrate storage / transport container 1 is separated from the container mounting table 12, the container side air supply port 22 and the table side air supply port 13, and the container side exhaust port 23 and the table side exhaust port 14 are connected. Are released, the valves of the container side air supply port 22, the table side air supply port 13, the container side exhaust port 23, and the table side exhaust port 14 are closed, and the substrate storage / transport container 1 is non-reactive. It will be in the airtight state in which sex gas was enclosed with the predetermined pressure.

  Thus, by transporting the substrate storage / transport container 1 to the container mounting table 12, the inside of the substrate storage / transport container 1 is purged with a non-reactive gas to a predetermined pressure.

  Next, a first form of the container side air supply port 22, the table side air supply port 13, the container side exhaust port 23, and the table side exhaust port 14 will be described with reference to FIG.

  Since the container side air supply port 22, the table side air supply port 13, the container side exhaust port 23, and the table side exhaust port 14 have the same structure, the container side air supply port 22, The table side air supply port 13 will be described.

  First, the base side air supply port 13 will be described.

  A connecting recess 25 is formed on the upper surface of the table-side air supply port 13, and an O-ring 26 serving as a seal member is fitted into the connecting recess 25. Further, a valve body storage portion 27 is formed inside the base side air supply port 13, and the valve body storage portion 27 and the air supply pipe 15 (see FIG. 2) communicate with each other. The storage portion 27 and the connecting recess 25 are communicated with each other by a valve port 28.

  The pedestal side valve body 29 is housed in the valve body housing portion 27 and is formed of a flange portion 31 and a rod 32 protruding upward from the flange portion 31, and the flange portion 31 is attached to the valve seat 33 on the lower surface of the valve port 28. A compression spring 35 is provided between the lower surface of the flange portion 31 and the bottom surface of the valve body housing portion 27, and the base side valve body is provided by the compression spring 35. 29 is urged upward.

  The container-side air supply port 22 has a connecting projection 36 that protrudes downward. The shape of the connecting projection 36 is a hollow ring ridge, and the periphery of the lower end is chamfered. The connecting projection 36 can be fitted into the connecting recess 25, and the connecting projection 36 and the connecting recess 25 are fitted, that is, the substrate storage and transport container 1 is in the container mounting table 12. In this state, the lower end of the connecting projection 36 presses the O-ring 26, and the connecting projection 36 and the connecting recess 25 are fitted in an airtight manner.

  A valve body storage portion 37 is formed inside the container-side air supply port 22, and a valve port 38 penetrating the connection protrusion 36 in the vertical direction communicates with the valve body storage portion 37. 37 communicates with the inside of the substrate storage and transport container 1, that is, the space in which the wafer 3 (see FIG. 3) is stored.

  A container-side valve element 39 is accommodated in the valve element accommodating portion 37, and the container-side valve element 39 has a flange portion 41 and a rod 42 that protrudes downward from the flange portion 41. It comes to contact.

  A compression spring 43 is provided between the upper surface of the flange portion 41 and the ceiling surface of the valve body storage portion 37. The compression spring 43 causes the flange portion 41 to be connected to the upper surface of the valve port 38, that is, the valve seat 44. Pressed. Further, an O-ring 45 as a seal member is provided between the valve seat 44 and the container side valve body 39, and the flange portion 41 is pressed by the compression spring 43, so that the valve port 38 is hermetically sealed. It is supposed to block.

  FIG. 5 shows a state where the substrate storage / transport container 1 is mounted on the container mounting table 12, and shows a state where the table-side air supply port 13 and the container-side air supply port 22 are connected.

  The connection projection 36 is fitted into the connection recess 25 and the O-ring 26 is crushed, so that the valve port 28 and the valve port 38 communicate with each other in an airtight manner.

  Before the connecting protrusion 36 is completely inserted into the connecting recess 25, the rod 32 and the rod 42 come into contact with each other, and the lower end of the rod 42 is engaged with the recess 46 at the upper end of the rod 32. . The weight of the substrate storage / transport container 1 acts between the rod 32 and the rod 42, and the compression spring 35 and the compression spring 43 are set to be bent by the weight of the substrate storage / transport container 1. The base-side valve body 29 and the container-side valve body 39 are pushed into each other, the valve port 28 and the valve port 38 are opened, and the valve body storage portion 27 and the valve body storage portion 37 are connected to each other. Communicated.

  In addition, when the said base side valve body 29 and the said container side valve body 39 are guided and displaced and the contact state of the said rod 32 and the said rod 42 is stable, the said hollow 46 can be abbreviate | omitted.

  Similarly, by connecting the base side exhaust port 14 and the container side exhaust port 23, the valves (not shown) of both ports are opened, and the inside of the substrate storage / transport container 1 communicates with the exhaust pipe 21.

  The on-off valves 18 and 19 are opened, and the inflow rate is adjusted by the flow rate controller 17 so that the non-reactive gas does not flow into the substrate storage and transport container 1 suddenly. A non-reactive gas is supplied into the substrate storage / transport container 1 through the port 13 and the container-side air supply port 22. A gas such as air inside the substrate storage / transport container 1 is discharged through the container-side exhaust port 23, the table-side exhaust port 14, and the exhaust pipe 21, and the inside of the substrate storage / transport container 1 is a non-reactive gas. Is purged to a positive pressure.

  When the predetermined time has elapsed and the inside of the substrate storage / transport container 1 is purged with a non-reactive gas, the substrate storage / transport container 1 is removed from the container mounting table 12. By separating the substrate storage / transport container 1 from the container mounting table 12, the table-side air supply port 13, the container-side air supply port 22, the table-side exhaust port 14, and the container-side exhaust port 23 The connection is released. Further, each port is airtightly closed by releasing the connection.

  For example, the flange portion 31 airtightly closes the valve port 28 by the restoration of the compression spring 35 in the base side air supply port 13, and the flange by the restoration of the compression spring 43 in the container side air supply port 22. The part 41 hermetically closes the valve port 38.

  Thus, the substrate storage / transport container 1 can be purged by placing and unloading the substrate storage / transport container 1 on the container mounting table 12, and the substrate storage / transport container 1 can be removed from the container mounting table 12. When separated, the substrate storage / transport container 1 is in a hermetically sealed state, and a state in which a non-reactive gas is sealed in a positive pressure state is maintained. Since the inside of the substrate storage / transport container 1 is at a positive pressure, it is possible to prevent particles from being caught when the container lid 2 is opened and closed without being affected by atmospheric pressure fluctuations.

  Next, a second form of the container side air supply port 22, the table side air supply port 13, the container side exhaust port 23, and the table side exhaust port 14 will be described with reference to FIG.

  FIG. 6 shows the table-side air supply port 13 and the container-side air supply port 22.

  In the second embodiment, the amount of protrusion of the rod 32 of the base valve body 29 is increased, and the rod 42 (see FIG. 4) of the container side valve body 39 is omitted. By mounting on the mounting table 12, the rod 32 directly contacts the flange portion 41 of the container-side valve body 39, the table-side valve body 29 and the container-side valve body 39 are pushed into each other, and the valve port 28, the valve port 38 is opened.

  Next, FIG. 7 shows a third form of the container side air supply port 22, the table side air supply port 13, the container side exhaust port 23, and the table side exhaust port 14.

  FIG. 7 shows the table-side air supply port 13 and the container-side air supply port 22.

  In the third embodiment, the protruding amount of the rod 42 of the container side valve body 39 is increased, and the rod 32 (see FIG. 4) of the base side valve body 29 is omitted. By mounting on the mounting table 12, the rod 42 comes into direct contact with the flange portion 31 of the table-side valve body 29, and the table-side valve body 29 and the container-side valve body 39 are pushed into each other. 28, the valve port 38 is opened.

  Next, FIG. 8 shows a fourth form of the container side air supply port 22, the table side air supply port 13, the container side exhaust port 23, and the table side exhaust port 14.

  FIG. 8 shows the table-side air supply port 13 and the container-side air supply port 22.

  In the fourth embodiment, the valve mechanism on the side of the base side air supply port 13 is omitted, and the rod 32 protrudes from the bottom surface of the valve body storage portion 27 through the valve port 28.

  When the substrate storage / transport container 1 is mounted on the container mounting table 12, the rod 42 contacts the rod 32 and is pushed upward, and the container-side valve body 39 is pushed up to open the valve port 38. It is like.

  In the fourth embodiment, the table side air supply port 13 on the container mounting table 12 side is always open, but the open / close valves 18 and 19 provided in the air supply pipe 15 (see FIG. 2) are opened and closed. Thus, the supply and stop of the non-reactive gas is performed.

  Next, FIG. 9 shows a fifth form of the container-side air supply port 22, the table-side air supply port 13, the container-side exhaust port 23, and the table-side exhaust port 14.

  FIG. 9 shows the table-side air supply port 13 and the container-side air supply port 22.

  In the fifth embodiment, either one of the base side air supply port 13 and the container side air supply port 22 is opened and closed by an actuator, and the other valve follows the movement of one valve. Is.

  In FIG. 9, the valve of the base side air supply port 13 is driven by an actuator.

  The valve structure of the container side air supply port 22 is the same as that shown in FIG.

  The base-side air supply port 13 has a valve body 47 that slides on and off the valve port 28. When the valve body 47 seals the valve port 28, an O-ring 48 that is a seal member. Is airtightly sealed.

  The valve body 47 is connected to the actuator 49, for example, an air cylinder or an electric cylinder, and a rod 32 extending upward from the valve body 47 is projected. The rod 32 has such a length that it does not come into contact with the flange portion 41 in a state where the connecting projection 36 is completely fitted in the connecting recess 25.

  A container detection sensor 51 for detecting the substrate storage / transport container 1 when the substrate storage / transport container 1 is placed is provided on the upper surface of the table-side air supply port 13 or the upper surface of the container mounting table 12. The container detection sensor 51 sends a detection signal to the control unit 52 when the substrate storage / transport container 1 is mounted on the container mounting table 12. The controller 52 drives the actuator 49 at a required timing based on a signal from the container detection sensor 51.

  As the container detection sensor 51, various detection sensors such as a micro switch, a pressure sensor, an optical sensor, and an ultrasonic sensor can be used.

  When the substrate storage / transport container 1 is mounted on the container mounting table 12 and a detection signal is input from the container detection sensor 51 to the control unit 52, the control unit 52 drives the actuator 49, and the actuator 49 raises the valve body 47. As the valve body 47 is raised, the valve port 28 is opened, the flange portion 41 is pushed up via the rod 32, and the valve port 38 is opened.

  The valve body storage section 27 of the container mounting table 12 and the valve body storage section 37 of the substrate storage / transport container 1 are communicated with each other, and purge gas is supplied into the substrate storage / transport container 1 from the purge gas supply system 20 (see FIG. 2). Supplied.

  When the substrate storage / transport container 1 is unloaded from the container mounting table 12, the valve port 38 is airtightly closed by the container-side valve body 39 by the restoring force of the compression spring 43. Further, the container detection sensor 51 issues a signal indicating that the substrate storage / transport container 1 is not detected, and the control unit 52 drives the actuator 49 based on the signal from the container detection sensor 51, and the valve body 47 performs the above-described operation. The valve port 28 is airtightly closed.

  When the valve opening 28 is opened and closed by the actuator 49, the container detection sensor 51 may be omitted, and the actuator 49 may be individually driven by an operation button or the like.

  Next, FIG. 10 shows a sixth form of the container-side air supply port 22, the table-side air supply port 13, the container-side exhaust port 23, and the table-side exhaust port 14.

  In the sixth embodiment, the opening / closing timings of the valves of the table-side air supply port 13, the container-side air supply port 22, the container-side exhaust port 23, and the table-side exhaust port 14 are shifted.

  In the figure, the structure of the container side air supply port 22, the table side air supply port 13, the container side exhaust port 23, and the table side exhaust port 14 is the same as that shown in FIG. For the container side air supply port 22 and the table side air supply port 13, and the subscript b for each symbol for the container side exhaust port 23 and the table side exhaust port 14. It is attached.

  The connecting shaft length when the rod 42a and the rod 32a of the container side valve body 39a and the base side valve body 29a in the container side air supply port 22 and the table side air supply port 13 are in contact with each other is set to the container side. This is longer than the connecting shaft length when the rod 42b and the rod 32b of the container side valve body 39b and the base side valve body 29b in the exhaust port 23 and the base side exhaust port 14 are in contact with each other.

  Accordingly, in the process of placing the substrate storage / transport container 1 on the container mounting table 12, the rod 42a and the rod 32a first come into contact with each other, and the valve port 28a and the valve port 38a start to open. Next, the rod 32b and the rod 42b come into contact with each other, and the valve port 28b and the valve port 38b start to open with a delay by the difference of the connecting shaft length. When the substrate storage / transport container 1 is unloaded from the container mounting table 12, the rod 32b and the rod 42b are first separated from each other, and then the rod 32a and the rod 42a are separated from each other.

  Therefore, when the substrate storage / transport container 1 is placed on the container mounting table 12, the valve port 28a and the valve port 38a are first opened, purge gas is supplied, and the valve port 28b, The valve port 38b is opened. When the substrate storage / transport container 1 is unloaded from the container mounting table 12, the valve port 28b and the valve port 38b are closed while purge gas is supplied, and then the valve port 28a and The valve port 38a is closed. Accordingly, it is possible to prevent the outside air from entering from the side of the base side exhaust port 14 and the side of the container side exhaust port 23 while the substrate storage / transport container 1 is purged.

  It should be noted that the urging forces of the compression springs 35a and 35b and the compression springs 43a and 43b of the base side air supply port 13, the container side air supply port 22, the base side exhaust port 14 and the container side exhaust port 23 are increased or decreased. The opening / closing timing of the valve can also be changed by opening the one with the smaller biasing force first. In addition to changing the valve opening / closing timing between the air supply port side and the exhaust port side, the valve opening / closing timing can also be changed between the container mounting table 12 side and the substrate storage / transport container 1 side.

  Next, FIG. 11 shows a seventh form of the table-side air supply port 13, the container-side air supply port 22, the container-side exhaust port 23, and the table-side exhaust port 14.

  In the seventh embodiment, similarly to the sixth embodiment, the opening / closing timings of the valves of the table-side air supply port 13, the container-side air supply port 22, the container-side exhaust port 23, and the table-side exhaust port 14 are shifted. It is a thing.

  In the drawing, the structure of the container side air supply port 22, the table side air supply port 13, the container side exhaust port 23, and the table side exhaust port 14 is the same as that shown in FIG. For the container side air supply port 22 and the table side air supply port 13, and the subscript b for each symbol for the container side exhaust port 23 and the table side exhaust port 14. It is attached.

  The valve body 47a and the valve body 47b for opening and closing the table-side air supply port 13 and the table-side exhaust port 14 are opened and closed by an actuator 49a and an actuator 49b. The actuator 49a and the actuator 49b are driven by a control unit 52. Be controlled.

  The controller 52 drives the actuator 49a and the actuator 49b based on the detection signal of the substrate storage / transport container 1 from the container detection sensor 51, and the driving timing is shifted.

  When the substrate storage / transport container 1 is placed on the container mounting table 12, the container detection sensor 51 detects the substrate storage / transport container 1, and a detection signal is sent to the control unit 52.

  In a state where the container detection sensor 51 detects the substrate storage / transport container 1, the connecting protrusion 36a is fitted into the connecting recess 25a, and the connecting protrusion 36b is fitted into the connecting recess 25b. The container side air supply port 22 and the table side air supply port 13 and the container side air supply port 23 and the table side exhaust port 14 are in an airtightly connected state.

  When the container detection sensor 51 detects the substrate storage / transport container 1, the controller 52 first drives the actuator 49a to displace the valve body 47a to open the valve port 28a, and further through the rod 32a. The container side valve body 39a is pushed up to open the valve port 38a. By opening the valve port 28a and the valve port 38a, the valve body storage portion 27a and the valve body storage portion 37a are communicated, and purge gas is supplied into the substrate storage and transport container 1 from the purge gas supply system 20 (see FIG. 2). .

  After a predetermined time has elapsed, the actuator 49b is driven, the valve port 28b and the valve port 38b are similarly opened, the valve body storage part 27b and the valve body storage part 37b are communicated, and the air inside the substrate storage and transport container 1 is communicated. Gas is discharged, and the inside of the substrate storage / transport container 1 is purged.

  When a predetermined time has elapsed and the inside of the substrate storage / transport container 1 is purged with non-reactive gas, the controller 52 first drives the actuator 49b to close the valve port 38b and the valve port 28b, and then Then, the actuator 49a is driven to close the valve port 38a and the valve port 28a.

  Thus, the connection and disconnection between the table-side exhaust port 14 and the container-side exhaust port 23 is the communication state of the table-side supply port 13 and the container-side supply port 22, that is, the inside of the substrate storage / transport container 1 Since non-reactive gas is supplied to the outside, intrusion of outside air is prevented when the gas purge is performed.

  Note that the timing difference for driving the actuator 49a and the actuator 49b and the time for purging the inside of the substrate storage / transport container 1 are set based on data obtained by tests or the like.

(Appendix)
The present invention includes the following embodiments.

  (Additional remark 1) It has the airtight container which accommodates a board | substrate, the lid | cover which can open and close this container, an air supply port, and an exhaust port, The said air supply port and the said exhaust port each close a valve port A substrate storage and transport container comprising: a valve body biased in this manner, and the valve body is opened by an external force acting through a member that contacts the valve body through the valve port.

  (Additional remark 2) The valve body of the said air supply port and the valve body of the said exhaust port are comprised so that the opening / closing timing may differ so that the said exhaust port may be opened and closed when the said air supply port is an open state. Substrate storage transport container.

  (Supplementary Note 3) In the substrate storage / transport container purge system in which the substrate storage / transport container is purged with a non-reactive gas by placing the substrate storage / transport container on the container mounting table. Comprises a hermetically sealed container for storing a substrate, a lid capable of opening and closing the container, a container-side air supply port, and a container-side exhaust port, and the container-side air supply port and the container-side exhaust port are Each having a valve body biased to close the valve port, and the container mounting table includes a table-side air supply port connected to a purge gas supply system, and a table-side exhaust port; By placing the container on the container mounting table and removing it from the container mounting table, the table-side air supply port and the table-side exhaust port can be disconnected from the container-side air supply port and the container-side exhaust port, respectively. The substrate storage and transport capacity Is placed on the container mounting table through the rod protruding from at least one of the container side air supply port, the container side exhaust port, the table side air supply port, or the table side exhaust port. A substrate storage / transport container purge system characterized in that the valve body is opened.

  (Supplementary note 4) The substrate storage and transport container according to supplementary note 1, wherein a timing difference is provided between when the member on the supply side contacts the valve body and when the member on the exhaust side contacts the valve body.

  (Supplementary Note 5) Each of the base side air supply port and the base side exhaust port has a valve body biased so as to close a valve port, and the rod is a valve body of the base side air supply port, the container A valve body for the side air supply port, a valve body for the base side exhaust port, and a valve body for the container side exhaust port, and each valve body for the air supply side and the exhaust side via the rod. The substrate storage and transport container purge system according to appendix 3, wherein an external force in the opening direction is applied to the substrate.

  (Supplementary note 6) The substrate storage and transport container purge system according to supplementary note 3, wherein the rods have different lengths on the air supply side and the exhaust side, and the timing at which an external force acts on the valve body.

  (Appendix 7) The rod protrudes from the valve body on the container mounting table side and the valve body on the substrate storage and transport container side, and the rods of both valve bodies come into contact with each other so that an external force in the opening direction acts on both valve bodies. The substrate storage / transport container purge system according to appendix 5, which is configured to perform the above operation.

  (Supplementary note 8) The substrate storage and transport container according to supplementary note 7, wherein the connecting shaft length of the rod in a state where both valve bodies are in contact differs between the supply side and the exhaust side, and the opening and closing timings are different between the supply side and the exhaust side. Purge system.

  (Supplementary Note 9) Each of the table-side air supply port and the table-side exhaust port has a valve body that opens and closes a valve port, the valve body is opened and closed by an actuator, the rod projects from the valve body, and the valve The substrate storage / transport container purge system according to appendix 5, wherein an external force is applied to the valve body of the container-side air supply port and the valve body of the container-side exhaust port via the rod by opening / closing movement of the body.

  (Supplementary note 10) The substrate storage and transport container purge system according to supplementary note 9, wherein the actuator is driven by a control unit, and the control unit shifts the opening and closing timing of the supply side port and the exhaust side port.

It is a schematic block diagram of the board | substrate storage transport container which concerns on embodiment of this invention. It is a front view which shows schematic structure of the substrate storage transport container purge system which concerns on embodiment of this invention. It is a side view which shows schematic structure of the same substrate storage transport container purge system. It is sectional drawing which shows the 1st form of the base side air supply port used for this invention, and a container side air supply port. It is sectional drawing which shows the connection state of this 1st form. It is sectional drawing which shows the 2nd form of the base side air supply port used for this invention, and a container side air supply port. It is sectional drawing which shows the 3rd form of the base side air supply port used for this invention, and a container side air supply port. It is sectional drawing which shows the 4th form of the base side air supply port used for this invention, and a container side air supply port. It is sectional drawing which shows the 5th form of the base side air supply port used for this invention, and a container side air supply port. It is sectional drawing which shows the 6th form of the container side air supply port used for this invention, the base side air supply port, the container side exhaust port, and the base side exhaust port. It is sectional drawing which shows the 7th form of the container side air supply port used for this invention, the base side air supply port, the container side exhaust port, and the base side exhaust port.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate storage transport container 2 Container lid 3 Wafer 4 Compressed gas tank 7 Electromagnetic on-off valve 8 Electromagnetic on-off valve 9 Differential pressure gauge 10 Control part 12 Container mounting base 13 Unit side air supply port 14 Unit side exhaust port 16 Non-reactive gas supply source 20 Purge gas supply system 22 Container side air supply port 23 Container side exhaust port 28 Valve port 29 Base side valve body 32 Rod 35 Compression spring 36 Connecting projection 38 Valve port 39 Container side valve body 42 Rod 43 Compression spring 47 Valve body 49 Actuator 51 Container detection sensor 52 Control unit

Claims (3)

  A sealed container for storing a substrate, a lid capable of opening and closing the container, an air supply port, and an exhaust port are provided, and the air supply port and the exhaust port are energized so as to close the valve ports, respectively. A substrate storage and transport container, wherein the valve body is opened by an external force acting through a member that contacts the valve body through the valve port.   2. The substrate storage and transportation according to claim 1, wherein the valve body of the air supply port and the valve body of the exhaust port are configured to be opened and closed differently so that the exhaust port is opened and closed while the air supply port is open. container.   In the substrate storage and transport container purge system in which the inside of the substrate storage and transport container is purged with a non-reactive gas by placing the substrate storage and transport container on the container mounting table, the substrate storage and transport container A sealed container to be stored; a lid capable of opening and closing the container; a container-side air supply port; and a container-side exhaust port. The container-side air supply port and the container-side exhaust port each have a valve port. A container having a valve body biased to be closed; and a container-side supply port connected to a purge gas supply system, and a container-side exhaust port; By mounting on the mounting table and detaching from the container mounting table, the table-side air supply port and the table-side exhaust port can be disconnected from the container-side air supply port and the container-side exhaust port, respectively. Substrate storage and transport container When mounted on the mounting table, the valve element is inserted through a rod protruding from at least one of the container-side air supply port, the container-side exhaust port, the table-side air supply port, or the table-side exhaust port. A substrate storage / transport container purge system characterized by being configured to be opened.

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