JP2004191606A - Optical switch - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To arrange collimator lens-attached optical fibers with highly accurate intervals in the horizontal and vertical directions, and to facilitate exchange of the collimator lens-attached optical fibers due to failures or changes in specifications. <P>SOLUTION: A plurality of silicon substrates 4 supporting a plurality of collimator lens-attached optical fibers 9 are stacked leaving a space between the adjacent silicon substrates 4 so that these collimator lens-attached optical fibers 9 are two-dimensionally arrayed. The silicon substrates 4 are supported at least at two parts on the substrate surface 4a by the same substrate array members 18. Frames 1 support the surface 4a of the silicon substrates 4 on which the collimator lens-attached optical fibers 9 are mounted, or a side face adjacent to the surface 4a. In addition, the silicon substrates 4 are supported by open grooves 6 provided on the frames 1 while being positioned and held by leaf springs 7. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an optical switch, and more particularly, to an optical switch for switching connection of an optical signal transmitted through a number of optical fibers.
[0002]
[Prior art]
In a conventional optical fiber array with a collimator lens, as disclosed in Japanese Patent Application Laid-Open No. 6-214138, ferrules are attached to the ends of optical fibers, and the outer circumferences of the ferrules adjacent to each other are aligned in the axial direction. Stacked so as to be in contact with each other and aligned in two dimensions. The outer circumference of all the ferrules located at the outermost circumference is held so as to be in contact with the hard flat plate, thereby holding the entire ferrule aligned in two dimensions. An adhesive is filled and fixed between the adjacent ferrules and the hard flat plate. The ferrule has a structure in which an optical fiber and a rod lens are integrated, thereby forming an optical fiber with a collimator lens.
[Patent Document 1]
JP-A-6-214138 (Description of Embodiments of the Invention and Others)
[0003]
[Problems to be solved by the invention]
JP-A-6-214138 disclosed in the above prior art has the following problems. The first is a case where ferrules are stacked to form a two-dimensional array. That is, in order to stack the ferrules so that the outer circumferences of the adjacent ferrules are in contact with each other and to make the outer circumferences of all the ferrules located at the outermost circumference contact the flat plate, the outer diameters of all the ferrules must be the same, or The condition is that the arrangement is made so as to cancel the variation in the diameter. When a large number of ferrules having the same outer diameter are prepared, it is necessary to perform inspection for the outer diameter measurement for each ferrule and separate the ferrules, so that the labor for the inspection increases and the unit cost of parts increases. Arrangement to grasp irregularities in the outer diameter and cancel out irregularities is not only performed by inspecting the outer diameter dimensions for each one, but also sorting, and assembling considering the combination of arrangements, new The problem that work efficiency and production efficiency are deteriorated is added. On the other hand, when unevenness due to variation in the outer diameter of the ferrule cannot be suppressed, a gap is generated between adjacent ferrules. In this case, since the ferrule is fixed in an inclined manner, there is a problem in that the output light is shifted in angle and the coupling loss is increased.
[0004]
Second, there is a problem of parts replacement due to damage and defects of the ferrule or the collimator lens. In other words, since all ferrules are stacked and filled with an adhesive and fixed, if any damage or defect is found in one ferrule at the time of product inspection, replace only that ferrule and regenerate it. Can not. In other words, a defect in the final inspection has a large effect on production, and deteriorates production efficiency.
[0005]
Further, as another problem, since ferrules having the same outer diameter are stacked and arranged two-dimensionally, the intervals (horizontal interval and vertical interval) between adjacent ferrules are the same. That is, it is difficult to arrange the horizontal direction and the vertical direction at different intervals, and this imposes constraints on the design of the optical fiber array configured in a two-dimensional array.
[0006]
Therefore, an object of the present invention is to provide an optical switch that solves at least one of the above problems. For example, there is a need to provide an optical fiber array in which adjacent optical fibers are arranged with high accuracy at different intervals in the horizontal direction and the vertical direction, or the optical fibers can be easily replaced at the time of failure or due to specification change.
[0007]
[Means for Solving the Problems]
The above problem can be solved by the following configuration.
[0008]
A first optical fiber array, a mirror to which light from the first optical fiber array is irradiated, and a second optical fiber array including a second optical fiber, which is irradiated with the light passing through the mirror. , Wherein the first optical fiber array includes a substrate on which a plurality of optical fibers are mounted, and a support member including a plurality of the substrates.
[0009]
For example, in the optical switch, the first optical fiber array, a substrate mounted with a plurality of optical fibers,
A support member having a plurality of openings for supporting the substrate, a distance between a first main surface of the substrate and a first region of the opening opposed to the first main surface is the first region. An optical switch characterized by being supported so as to be larger than a distance between a second main surface on the opposite side of the main surface and a second region of the opening facing the second main surface. is there. The opening includes not only a form like a through-hole but also a form having a bottom (a groove having a concave cross section, etc.). Then, a first pressing member is provided between the one main surface of the substrate and the supporting member. Further, it is preferable that the first pressing member is not provided on the other side.
[0010]
Preferably, the distance from the end of the optical fiber mounted on the second substrate to the mirror is greater than the distance from the end of the optical fiber mounted on the first substrate to the mirror. .
[0011]
Further, an optical fiber with a collimator lens, a substrate member on which a plurality of the optical fibers with a collimator lens are mounted, and an optical fiber array with a collimator lens in which a plurality of the substrate members are stacked and the optical fibers with a collimator lens are two-dimensionally arranged. It is preferable to have the form provided. At this time, the plurality of substrate members have a space between adjacent substrate members, and at least two portions of the substrate members are supported and laminated by the same common support member.
[0012]
Alternatively, it is preferable that the common support member supports a surface of the substrate member on which the optical fiber with a collimator lens is mounted or a side surface adjacent to the surface.
[0013]
Alternatively, it is preferable that the substrate member is configured to be supported by any one of a beam, a groove, and a protrusion provided on the common support member.
[0014]
Alternatively, it is preferable that the substrate member is positioned and supported by an elastic member provided on the common support member.
[0015]
Alternatively, it is preferable that the substrate member is formed of a silicon wafer, and the optical fiber with the collimator lens is mounted in a groove formed by photolithography and illegal etching.
[0016]
Thereby, the optical fibers with the collimator lens are arranged one-dimensionally on the substrate member, and these substrate members are laminated by the same common support member and arranged two-dimensionally, so that the horizontal direction and the vertical direction are different at arbitrary intervals. The arrangement can be performed, and the degree of freedom in designing an optical fiber array with a collimator lens configured in a two-dimensional arrangement can be greatly expanded. As for the spacing between adjacent optical fibers with collimator lenses, the grooves in the substrate member can be formed with high precision by photolithography and illegal etching. Optical fibers with collimator lenses can be arranged at high precision intervals. As for the vertical spacing, by processing the support portion of the same common support member with high precision, the optical fibers with collimator lenses can be arranged with high precision via the substrate member. In other words, the horizontal direction can be determined by the interval between the grooves formed in the substrate member, and the vertical direction can be determined by the interval between the support portions of the same support member that supports the substrate member, and the optical fiber with the collimator lens is arranged with high precision. be able to. In addition, since the optical fiber with a collimator lens is mounted along the groove of the substrate member, the optical fiber with a collimator lens can be accurately positioned without tilting. This makes it possible to configure an optical fiber array with a collimator lens that does not increase the coupling loss due to the angular shift of the emitted light. Further, by positioning and supporting the substrate member on the same common supporting member by the elastic member, the substrate member can be removed, and replacement can be performed for each substrate due to damage and defect of the optical fiber with the collimator lens. As a result, even if the number of optical fibers with a collimator lens to be mounted on the board member and the number of these board members are large, it is possible to replace the board unit. And the production efficiency does not deteriorate. Further, an optical fiber array with a collimator lens in which the specification of the optical fiber with a collimator lens is changed for each substrate member unit can be provided, and a product having expandability can be provided.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of the present invention will be described below with reference to FIGS. In addition, in each figure, illustration of some components is omitted as appropriate in order to avoid complication.
[0018]
It should be noted that the present invention is not limited to the embodiments described in the embodiments of the present invention and the embodiments described in the detailed description of the invention, but prevents changes based on known techniques. Not something.
[0019]
FIG. 1 is a perspective view showing a structure of an optical fiber array 100 with a collimator lens according to an embodiment to which the present invention is applied, and FIG. 2 is a perspective view showing a structure of a silicon substrate 4 on which an optical fiber 9 with a collimator lens is mounted. 3 and 4 are a front view and a side view showing the structure of the optical fiber array 100 with a collimator lens of FIG. 1, FIGS. 5 to 7 are perspective views showing a supporting structure of the silicon substrate 4, and FIGS. 1A and 1B are a perspective view and a side view showing a structure of an optical matrix switch in which an optical fiber array with a collimator lens 100 and a mirror device 10 are combined.
[0020]
In FIG. 1, an optical fiber array 100 with a collimator lens includes an optical fiber 9 with a collimator lens including a collimator lens 2 and an optical fiber 3, a silicon substrate 4 on which the optical fiber 9 with a collimator lens is mounted, and a silicon substrate 4 And an optical fiber 9 with a collimator lens arranged two-dimensionally.
[0021]
A plurality of silicon substrates 4 on which a plurality of optical fibers 9 with collimator lenses are mounted are supported. A space is provided between adjacent silicon substrates 4 so that the optical fibers 9 with collimator lenses are two-dimensionally arranged, and at least two portions of the silicon substrate 4 are separated by the same substrate arrangement member 18 into the silicon substrate surface 4a. Support with. The frame 1 supports a surface 4a of the silicon substrate 4 on which the optical fiber 9 with a collimator lens is mounted or a side surface adjacent to the surface 4a. The silicon substrate 4 is made of a silicon wafer, and an optical fiber 9 with a collimator lens is mounted in a groove 5 formed by photolithography and illegal etching.
[0022]
The substrate arrangement member 18 has a substantially box-like shape composed of a base 17 having a bottom surface and a frame 1 having side walls, and has an opening in a forward direction in which laser light is emitted from the collimator lens 2 and a backward direction in which the optical fiber 3 is taken out. Shape. Opening grooves 6 and beams 6 a are alternately formed in the frame 1 so as to support the silicon substrate 4. There is a gap between the silicon substrates 4. As shown in FIG. 5, the beam 6a is formed by forming a plurality of the opening grooves 6, as shown in FIG. The surface 4a of the silicon substrate 4 is pressed against and supported by the lower surface of the beam 6a. The external dimensions of the board arrangement member 18 are a height of 34 mm, a width of 33 mm, a depth of 24 mm, a thickness of the frame 1 of 3 mm, and a height of the opening groove 6 of 1.6 mm.
[0023]
The processing of the substrate arrangement member 18 was performed by electric discharge machining using a 0.1 mm diameter wire. The processing conditions are a processing feed rate of 0.21 mm / min, a wire feed rate of 3 mm / sec, a voltage of 120 V, and a pulse frequency of 3 pps. The wire material is brass. The material of the substrate arrangement member 18 is an Fe-Ni-Co alloy. Under the above-mentioned processing conditions, the processing accuracy between the opening grooves 6 (B in FIG. 3) is 0.005 mm or less.
[0024]
FIG. 2 shows a silicon substrate 4 on which an optical fiber 9 with a collimator lens is mounted. The collimator lens 2 is made of a quartz material, and is integrated with the optical fiber 3 by fusion splicing (not shown). The fusion spliced portion between the lens 2 and the optical fiber 3 is reinforced with an adhesive (not shown). The outer diameter of the lens 2 is φ1.25 mm, the length is 4.3 mm, and a curvature processing (not shown) and an anti-reflection coating film (not shown) are applied to a tip of the lens 2 which is a laser light emitting end. I have. The characteristics of the collimator lens 2 include a coupling loss of 0.5 dB, an effective collimation distance of 180 mm, a return loss of -55 dB or less, and an inclination of the emitted laser light with respect to the center axis of the lens 2 of 0.3 degrees or less.
[0025]
The silicon substrate 4 is made of a silicon wafer material, and a groove 5 having an inclined groove for mounting the collimator lens 2 is formed by photolithography and anisotropic etching. The groove 5 is substantially V-shaped, the width of the groove 5 is 1.248 mm, the depth is 0.47 mm, and the inclination angle of the groove 5 is about 54.7 °. When the φ1.25 mm collimator lens 2 is mounted in the groove 5, the center position of the lens 2 is a position 0.2 mm higher than the silicon substrate surface 4 a. The variation of the center position of the lens 2 is determined by the width accuracy of the groove 5, and is 0.003 mm or less here. The spacing between adjacent grooves 5 can be made with high precision by photolithography and anisotropic etching, and the variation in the spacing between grooves 5 is 0.002 mm or less. The dimensions of the silicon substrate 4 are 15 mm in length, 32 mm in width, and 1.5 mm in thickness, and a 1.5 μm thermal oxide film is formed on the front and back surfaces and in the groove. The fixing of the collimator lens 2 to the groove 5 is performed by using a thermosetting ultraviolet curing adhesive (not shown). The irradiation condition of the ultraviolet light is illuminance 2000mJ / cm ² The heat treatment for the main curing is performed at 120 ° C. for 60 minutes for 20 seconds.
[0026]
The procedure for bonding the optical fiber 9 with the collimator lens to the groove 5 is as follows. First, the silicon substrate 4 is held stationary by a supporting member (not shown) provided with vacuum suction, and an ultraviolet curing adhesive is attached to the slope of the groove 5. Is applied little by little with a dispenser. The portion to be applied is an area of about 4 mm (about the same as the length of the lens 2) from the end face of the silicon substrate 4. After the adhesive is applied to the slope of the groove 5, the collimator lens 2 is set in the groove 5, and the lens 2 is pressed against the groove 5 using a pressing member (not shown). The load pressing the lens 2 is about 2N. The position where the lens 2 is set in the groove 5 is a position where the tip of the lens 2 slightly protrudes from the end surface of the silicon substrate 4, thereby preventing the adhesive from flowing around the tip of the lens 2. In this state (the state where the lens 2 is pressed against the groove 5), ultraviolet rays are irradiated. After irradiation with ultraviolet light for a predetermined time, the pressing load is released, and then the optical fiber 3 is bonded to the groove 5 on the side opposite to the side to which the lens 2 is bonded with an ultraviolet curing adhesive. The bonding of the optical fiber 3 is for preventing a sudden tensile force applied from the outside from being directly applied to the lens 2. By repeating this procedure, a plurality of optical fibers 9 with collimator lenses are bonded and fixed to the grooves 5. In the case of FIG. 2, seven optical fibers 9 with collimator lenses are bonded and fixed. After all the optical fibers 9 with collimator lenses are adhered to the grooves 5, the silicon substrate 4 is removed from the vacuum-sucking support member and a heat treatment is performed. A heat treatment at 120 ° C. for 60 minutes is performed to complete the bonding and fixing of the optical fiber 9 with the collimator lens to the silicon substrate 4. Thus, an optical fiber array with a collimator lens having a one-dimensional array is completed.
[0027]
FIG. 3 shows a structure of an optical fiber array 100 with a collimator lens in which the silicon substrate 4 is placed on the frame 1 of the substrate arrangement member 18 and the optical fibers 9 with the collimator lens are two-dimensionally arranged in seven rows and four stages. On the silicon substrate 4, seven optical fibers 9 with collimator lenses are mounted at equal intervals. These silicon substrates 4 are respectively set in the open grooves 6 of the frame 1, and are pushed up from below by a leaf spring 7 installed in the open grooves 6, and the surface 4 a of the silicon substrate 4 is pressed against the upper surface of the open grooves 6 for positioning. are doing. A plate-like stopper plate 14 is attached to one (left side in the figure) frame 1, and a plate-like pin support member 16 having a spring pin 15 is attached to the other (right side in the figure) frame 1. I have. The silicon substrate 4 is pressed against the stopper plate 14 by the spring pins 15 and positioned. The distance A from the end of the silicon substrate 4 on the side of the stopper plate 14 to the lens 2 closest to this end is processed with high precision by dicing cut when dividing the silicon wafer. 01 mm or less. That is, the amount of vertical displacement of the two-dimensionally arranged collimator lenses 2 in the horizontal direction is determined by the dicing cut accuracy, and the accuracy is 0.01 mm or less. In the drawing, the lens interval P is 1.95 mm, and the vertical lens interval S is 2.9 mm. The vertical interval S between the lenses 2 is substantially determined by the interval B between the opening grooves 6 formed in the frame 1 and has a processing accuracy of 0.005 mm. The pressing load of the spring pin 15 pressing the silicon substrate 4 is in the range of 0.2 to 1N. The material of the stopper plate 14 and the pin support member 16 is the same Fe-Ni-Co alloy as the material of the substrate arrangement member 18, and the attachment to the frame 1 is performed with M2 screws (not shown).
[0028]
Here, when the variation of the horizontal interval P and the vertical interval S of the two-dimensionally arranged collimator lenses 2 is estimated, the horizontal interval is 0.012 mm obtained by adding 0.002 mm of the variation between the grooves 5 and 0.01 mm of the dicing cut accuracy. Become. The vertical interval is about 0.005 mm, the variation of the center position of the lens 2 is 0.003 mm, the processing accuracy of the opening groove 16 is 0.005 mm, and the variation of the adhesion of the lens 2 and the variation of the pressing force of the leaf spring 7 are about 0.015 mm. As long as the horizontal interval is about 0.012 mm and the vertical interval is about 0.015 mm, there is no problem as long as the specifications of the optical fiber array 100 with a collimator lens constituting the optical matrix switch are sufficiently acceptable.
[0029]
FIG. 4 shows a structure in which the silicon substrate 4 is supported in the opening groove 6 by the leaf spring 7. The leaf springs 7 are installed at two locations on the inner side (left side in the figure) and nearer side (right side in the figure) of the opening groove 6, and are bent upward to have a spring effect so that the silicon substrate 4 is placed on the upper side. Press. A gap of about 0.1 mm remains between the lower surface of the silicon substrate 4 provided in the opening groove 6 and the upper surface of the beam 6a, and a leaf spring 7 having a fold is provided in the gap. The leaf spring 7 on the far side (left side in the figure) is installed with one end inserted into a slit 8 formed simultaneously with the processing of the opening groove 6. In addition, you may make it press at three or more places from a viewpoint of a press part dispersion | distribution. The leaf spring 7 on the near side (right side in the figure) is inserted after the silicon substrate 4 is set. The slit 8 on the back side (left side in the figure) of the opening groove 6 is formed along the lower surface of the opening groove 6. The material of the leaf spring 7 is phosphor bronze, and the plate thickness is 0.05 mm. The end surface of the silicon substrate 4 on the side of the collimator lens 2 does not come into contact with the end surface of the opening groove 6 and is provided with a slight space. This is because the posture of the silicon substrate 4 is determined by pressing it against the stopper plate 14 shown in FIG. 3, so that the other end surface does not come into contact with the opening groove 6 to prevent the posture of the silicon substrate 4 from becoming unstable. To do that.
[0030]
FIG. 6 shows that the shape of the supporting portion of the silicon substrate 4 provided on the frame 1 is performed by a method different from the opening groove 6 in which a plurality of beams are arranged as shown in FIG. In addition, an opening groove such as a concave groove 20 having a wall provided outside the groove is provided. The support of the silicon substrate 4 is the same as in the case of the opening groove 6 shown in FIG. 5, and a leaf spring () is placed under the silicon substrate 4 so as to press the surface 4a of the silicon substrate 4 against the upper surface of the concave groove 20. (Not shown). In the case of the opening groove 6, a stopper plate 14 for pressing the silicon substrate 4 is attached to the frame 1, but in the case of the concave groove 20, the stopper plate 14 is not required, and the number of parts is reduced.
[0031]
FIG. 7 is different from the shape of the support portion of the silicon substrate 4 shown in FIGS. 5 and 6. The side surface of the silicon substrate 4 is processed into a concave shape by anisotropic etching, and the shape of the support portion of the silicon substrate 4 is The protrusion 21 is formed in accordance with the concave shape on the side surface of the silicon substrate 4. The concave shape on the side surface of the silicon substrate 4 can be formed by etching along the crystal plane of the silicon single crystal, and a highly accurate concave shape can be formed. The shape of the projection 21 is formed according to the concave shape on the side surface of the silicon substrate 4. Since the machining is performed by wire electric discharge machining, the machining of the projections 21 can be easily performed and can be performed with high accuracy. By setting the shape of the support portion to the shape of the protrusion 21, the position of the silicon substrate 4 can be easily determined, and it is not necessary to attach the stopper plate 14 and the leaf spring 7 as compared with the case of the opening groove 6 shown in FIG. .
[0032]
FIG. 8 is an external perspective view of an optical matrix switch formed by combining the optical fiber array 100 with a collimator lens shown in FIG. 1 and two mirror devices 10 and 11. As an example, the optical switch shown in FIG. 1 does not convert an optical signal that has passed through an output-side optical fiber into an electric signal, and transmits the signal as it is to the incident-side optical fiber. Specifically, a laser beam 13 emitted from one of the optical fibers 9 with a collimator lens is once emitted into space, and the laser beam 13 is first applied to the mirror 12 of the first mirror device 10. The laser light 13 reflected by adjusting the angle is applied to the mirror 12 of the second mirror device 11 in the future, and the laser light 13 reflected by adjusting the angle of the mirror 12 is similarly arranged on the incident side. The light is incident on one of the same optical fibers (not shown) with a collimator lens on the exit side.
[0033]
The mirror devices 10 and 11 are made of a silicon wafer material, and form a mirror 12 by photolithography and etching. A multilayer metallized film (not shown) having a surface of Au is applied to the surface of the mirror 12 so that the laser beam 13 from the collimator lens 2 is reflected with high efficiency. The surfaces of the mirrors 12 formed on the mirror devices 10 and 11 are arranged in a two-dimensional array similarly to the optical fiber array 9 with a collimator lens, and the mirrors 12 are arranged at positions facing the collimator lens 2. The vertical interval and the horizontal interval are the same as the arrangement interval of the collimator lens 2 (S and P in FIG. 3). The mirror 12 has a mechanism capable of adjusting the angle by electrostatic force, and adjusts the angle of one mirror 12 in two axial directions with four beams. The optical path of the laser light 13 is converted in space by using two mirror devices 10 and 11 constituted by these mirrors 12.
[0034]
9 and 10 show a structure in which the optical fiber array 100 with a collimator lens shown in FIG. 1 and the first mirror device 10 shown in FIG. 8 are integrated. The configuration includes both the mirror device 10 and the plurality of silicon substrates 4. The substrate arrangement member 18 includes an opening groove 6 that supports the silicon substrate 4 and a mirror insertion groove 19 that supports the mirror device 10. The distance from the end of the optical fiber (or the end of the collimator lens) mounted on one silicon substrate to the corresponding position of the mirror device 10, and the distance from the end of the optical fiber (or the end of the collimator lens) mounted on the other silicon substrate to the mirror The distance to the corresponding position of the device 10 is different. The opening groove 6 for installing the silicon substrate 4 is formed so that the lower stage approaches the mirror device 10 side than the upper stage. On the other hand, the mirror insertion groove 19 for installing the mirror device 10 is formed obliquely to the substrate arrangement member 18 so as to approach the lower side of the opening groove 6. The positional relationship between the front end of the opening groove 6 and the mirror insertion groove 19 becomes like an inverted C shape.
[0035]
As shown in FIG. 10, after the silicon substrate 4 is inserted into the opening groove 6 and supported by the leaf spring 7, the mirror device 10 is installed in the mirror insertion groove 19, and is similarly supported by the leaf spring (not shown). I do. In this state, the optical fiber 9 with the collimator lens and the mirror 12 of the mirror device 10 are arranged at positions facing each other. The laser light 13 emitted from the optical fiber 9 with the collimator lens hits the mirror 12 facing the same, and the reflected laser light 13 is emitted in an arbitrary direction by adjusting the angle of the mirror 12. The light emitted from the collimator lens is reflected and emitted to the side where the distance between the mirror device 10 and the collimator lens is widened. In FIG. 10, the laser beam 13 emitted from the collimator lens 2 is subjected to an angle change of approximately 90 degrees by the mirror 12 and emitted upward. On the upper side, an integrated unit of the mirror device 10 on the incident side and the optical fiber array 100 with a collimator lens is installed to constitute an optical matrix switch. According to this structure, since the mirror device 10 is attached to the substrate arrangement member 18 constituting the optical fiber array 100 with the collimator lens to form an integrated structure, the position adjustment of the mirror device 10 with respect to the collimator lens 2 becomes easy. In addition, since the collimator lens 2 and the mirror device 10, which are optical components, are installed on the substrate arrangement member 18 made of a metal material, the rigidity can be increased, and the laser beam 13 is not affected by externally applied force or deformation. A structure that does not cause optical axis shift can be achieved, and handling of the mirror device 10 alone can be reduced.
[0036]
As described above, the optical fibers 9 with collimator lenses are one-dimensionally arranged on the silicon substrate 4, and the silicon substrates 4 are supported by the frame 1 of the substrate arrangement member 18, whereby the optical fibers with collimator lenses are two-dimensionally arranged. The horizontal interval 9 can be determined by the interval between the grooves 5 formed in the silicon substrate 4, and the vertical interval can be determined by the interval between the opening grooves 6 of the frame 1 supporting the silicon substrate 4, and the horizontal interval and the vertical interval can be arranged with high precision. can do. Moreover, the vertical and horizontal intervals of the optical fibers 9 with collimator lenses can be arranged at arbitrary intervals different from each other, so that the degree of freedom in designing the optical fiber array 100 with collimator lenses formed in a two-dimensional array is greatly expanded. can do.
[0037]
Further, since the center position of the collimator lens 2 is determined with high precision from the surface 4a of the silicon substrate 4, the surface 4a of the silicon substrate 4 is pressed against the lower surface of the beam 6a to be installed. The stop position of the collimator lens 2 can be positioned with high accuracy without being affected by the thickness variation.
[0038]
In addition, since the optical fiber 9 with a collimator lens is mounted on the groove 5 of the silicon substrate 4 so as to follow the same, the optical fiber 9 with a collimator lens can be accurately positioned without tilting. Thus, it is possible to configure the optical fiber array 100 with a collimator lens that does not increase the coupling loss due to the angular deviation of the emitted laser light.
[0039]
In addition, the silicon substrate 4 can be removed by positioning and supporting the silicon substrate 4 with the leaf spring 7, and replacement can be performed in units of the silicon substrate 4 due to damage or defect of the optical fiber 9 with a collimator lens. As a result, even if the number of optical fibers 9 with a collimator lens mounted on the silicon substrate 4 and the number of these silicon substrates 4 are increased, it is possible to replace the silicon substrates 4 as a unit. Can be reproduced even if found, without reducing production efficiency. Furthermore, the optical fiber array 100 with a collimator lens in which the specification of the optical fiber 9 with a collimator lens is changed for each silicon substrate 4 unit can be provided, and a product having expandability can be provided.
[0040]
In this embodiment, the material of the substrate arrangement member 18 is described as Fe-Ni-Co alloy. However, the material is not limited thereto. For example, a stainless alloy, an iron-based alloy, or a copper alloy may be used. Since the same processing accuracy can be obtained, the same effect can be obtained.
[0041]
The specifications of the optical fiber 9 with a collimator lens have been described in the present embodiment. However, the present invention is not limited to these specifications, and the same effect as that of the present embodiment can be obtained by using another optical fiber with a collimator lens. it can.
[0042]
In this embodiment, the optical fiber array 100 with a collimator lens is described as a combination of seven rows and four stages. However, the present invention is not limited to this arrangement. For example, a small-medium-scale switch having a range of 8 channels to 64 channels, or a large-scale switch having 1000 channels can be combined in a similar configuration to achieve the same effect.
[0043]
【The invention's effect】
According to the present invention, it is possible to provide an optical switch that can arrange adjacent optical fibers in the horizontal direction and the vertical direction with high accuracy, or that can replace an optical fiber in the event of a failure or a change in specifications.
[Brief description of the drawings]
FIG. 1 is a perspective view illustrating an entire structure of an optical fiber array with a collimator lens according to a first embodiment of the present invention.
FIG. 2 is a perspective view illustrating a structure of a substrate member on which the optical fiber with a collimator lens illustrated in FIG. 1 is mounted.
FIG. 3 is a front view showing the structure of the optical fiber array with a collimator lens shown in FIG.
FIG. 4 is a side view showing the structure of the optical fiber array with a collimator lens shown in FIG.
FIG. 5 is a perspective view illustrating a support portion structure of the substrate member illustrated in FIG.
FIG. 6 is a perspective view illustrating a structure of a support portion of a substrate member different from the embodiment of FIG.
FIG. 7 is a perspective view illustrating a support portion structure of a substrate member different from the embodiments of FIGS. 5 and 6.
FIG. 8 is a perspective view illustrating a configuration of an optical matrix switch using an optical fiber array with a collimator lens according to the first embodiment of the present invention.
FIG. 9 is a side view illustrating an assembly structure of an optical fiber array with a collimator lens, which is different from the first embodiment.
10 is a side view illustrating a structure of an optical matrix switch using an optical fiber array with a collimator lens according to the embodiment of FIG.
[Explanation of symbols]
100: Optical fiber array with collimator lens, 1: Frame, 2: Collimator lens, 3: Optical fiber, 4: Silicon substrate, 4a: Silicon substrate surface, 5: Groove, 6: Open groove, 6a: Beam, 7: Leaf spring, 8: Slit, 9: Optical fiber with collimator lens, 10: First mirror device, 11 ..Second mirror device, 12 mirror, 13 laser light, 14 stopper plate, 15 spring pin, 16 pin support member, 17 base, 18 ... substrate arrangement member, 19 ... mirror insertion groove, 20 ... concave groove, 21 ... projection.

Claims (12)

A first optical fiber array, a mirror to which light from the first optical fiber array is irradiated, and a second optical fiber array including a second optical fiber, which is irradiated with the light passing through the mirror. An optical switch comprising:
An optical switch, wherein the first optical fiber array includes a substrate on which a plurality of optical fibers are mounted, and a support member including a plurality of the substrates. A first optical fiber array; a mirror in optical communication with the first optical fiber array; and a second optical fiber array in optical communication with the mirror, comprising a second optical fiber. Optical switch,
The first optical fiber array, a substrate on which a plurality of optical fibers are mounted,
A support member having a plurality of openings for supporting the substrate,
The distance between the first main surface of the substrate and the first region of the opening facing the first main surface is the second main surface opposite to the first main surface and the second main surface. An optical switch characterized in that the optical switch is supported so as to be longer than a distance from the second area of the opening facing the main surface of the optical switch. A first optical fiber array comprising a first optical fiber, a mirror in optical communication with the first optical fiber array, and a second optical fiber comprising a second optical fiber in optical communication with the mirror. An optical switch comprising:
The first optical fiber array includes a substrate on which a plurality of optical fibers including the first optical fiber are mounted, and a support member including a plurality of the substrates,
The support member has an opening, and the substrate is supported by the opening,
An optical switch comprising: a first pressing member that presses the substrate between a first main surface of the substrate and a first region of the opening facing the first main surface. . The optical switch according to claim 3, wherein a second main surface located on a side opposite to the first main surface of the substrate and a second region of the opening opposed to the second main surface. An optical switch, wherein the pressing member is not installed. A first optical fiber array comprising a first optical fiber, a mirror in optical communication with the first optical fiber array, and a second optical fiber comprising a second optical fiber in optical communication with the mirror. An optical switch comprising:
The first optical fiber array includes a substrate on which a plurality of optical fibers including the first optical fiber are mounted, and a support member including a plurality of the substrates,
The support member has an opening, and the substrate is supported by the opening,
The first main surface of the substrate is arranged via a first region of the opening facing the first main surface and an elastic body, and is located on the opposite side of the first main surface of the substrate. An optical switch, wherein the second main surface is arranged adjacent to a second region of the opening facing the second main surface. The optical switch according to claim 3, wherein the optical fiber is mounted on the second main surface. 4. The optical switch according to claim 3, wherein the pressing member has two or more regions for pressing the substrate. A first optical fiber array; a mirror in optical communication with the first optical fiber array; and a second optical fiber array in optical communication with the mirror, comprising a second optical fiber. Optical switch,
The first optical fiber array, a substrate on which a plurality of optical fibers are mounted,
An optical switch, comprising: a support member including a support portion provided with a plurality of the substrates and a support portion supporting the mirror in an integrated region. 9. The optical switch according to claim 8, wherein a distance from an end of the optical fiber mounted on the second substrate to the mirror is larger than a distance from an end of the optical fiber mounted on the first substrate to the mirror. An optical switch characterized by being arranged. 2. The optical switch according to claim 1, further comprising a pressing member for pressing a surface of the substrate adjacent to the surface on which the optical fiber is mounted. 2. The device according to claim 1, wherein the support member includes a first frame portion having a first support portion, a second frame portion having a second support portion, the first frame portion, and the second frame portion. An optical switch, wherein the substrate is disposed in an area between the first frame part and the second frame part. An optical fiber array including a plurality of optical fibers,
A substrate on which a plurality of optical fibers are mounted,
A support member having a plurality of support portions for supporting the substrate,
The distance between the first main surface of the substrate and the first region of the support portion facing the first main surface is the second main surface opposite to the first main surface and the second main surface. An optical fiber array characterized in that the optical fiber array is supported so as to be larger than a distance from a second region of the support portion facing the main surface of the optical fiber.

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