JP5475560B2 - Light switch - Google Patents

Description

  The present invention relates to an optical switch used in optical communication.

  Due to the rapid increase in data traffic represented by stream data such as WWW (World Wide Web) and video, it is required to increase the capacity of a backbone network constituting the Internet. High-speed, high-capacity optical communication devices exceeding 10 Gbit / s, and WDM (Wavelength Division Multiplexing) that realizes higher capacity by multiplexing optical signals with different wavelengths on the same optical fiber An optical communication device has been introduced.

  On the other hand, at the node portion of the network, a method of once converting an optical signal into an electric signal, switching a route with a switch using a conventional electric circuit, and then converting it back into an optical signal and returning it to the network is adopted. It is common. It has been pointed out that the cost and power consumption of the device for converting an electrical signal into an optical signal or the device for converting from an optical signal into an electrical signal shown here increase significantly as the signal band is improved. In particular, when the signal speed reaches 40 Gbit / s, it is effective to use an optical switch that switches an optical signal as light. Among the optical switches, the free space type optical switch using high-density three-dimensional wiring using a light beam can compactly construct a large-scale optical switch exceeding 1000 ports, so that the switch section constituting the optical cross-connect device Is expected to be introduced.

  As this type of free space type optical switch, for example, there is one described in Non-Patent Document 1. A free space type optical switch disclosed in Non-Patent Document 1 will be described with reference to FIG. FIG. 12 is a side view showing a first conventional example of a free space type optical switch. An optical switch 100 shown in FIG. 12 includes an input optical fiber array 101, a collimating microlens array 102, an input-side micro movable mirror array 103, an output-side micro movable mirror array 104, and a condensing microlens array 105. , And an output optical fiber array 106.

  The optical fiber arrays 101 and 106 are two-dimensionally aligned and arranged at a certain interval by using fiber alignment members (not shown). Similar to the optical fiber arrays 101 and 106, the microlens arrays 102 and 105 are two-dimensionally aligned and arranged at a certain interval, similarly to the optical fiber arrays 101 and 106, respectively. Similarly to the optical fiber arrays 101 and 106, the micro movable mirror arrays 103 and 104 are two-dimensionally aligned and arranged at a certain interval, similarly to the optical fiber arrays 101 and 106, respectively. In FIG. 12, each component is displayed as a one-dimensional array for a side view. In FIG. 12, the arrow indicates the traveling direction of the light beam 107.

  The individual input optical fibers 101a constituting the input optical fiber array 101 and the individual microlenses 102a constituting the collimating microlens array 102 have a one-to-one correspondence, and each emits light emitted from the optical fiber 101a. It functions as an optical collimator that converts the beam 107. Similarly, the individual output optical fibers 106a constituting the output optical fiber array 106 and the individual microlenses 105a constituting the condensing microlens array 105 have a one-to-one correspondence, and each of them is a microlens 105a. It functions as an optical collimator that condenses the light beam 107 that reaches the optical fiber 106a. The beam waist of the light beam 107 formed by each optical collimator is arranged between the input / output micro movable mirror arrays 103 and 104. Since this optical switch has a point-symmetric configuration around this beam waist position and is optically reversible, there is no change in the function of the optical switch even if the traveling direction of the light beam is reversed. Route switching is established.

  The micro movable mirrors 103a and 104a are active elements having two orthogonal rotation axes formed on a semiconductor substrate using micromachine technology. In the micro movable mirrors 103a and 104a, the mirror surface can be rotated in any direction around the two rotation axes, and the tilt angle θ can be adjusted. The individual input optical fibers 101a constituting the input optical fiber array 101 and the individual micro movable mirrors 103a constituting the input-side micro movable mirror array 103 have a one-to-one correspondence. On the other hand, the individual output optical fibers 106a constituting the output optical fiber array 106 and the individual micro movable mirrors 104a constituting the output-side micro movable mirror array 104 have a one-to-one correspondence. With this configuration, an arbitrary input optical fiber 101a and output optical fiber 106a arranged two-dimensionally can be selectively connected.

  Next, a method for switching the route of an optical signal in the free space type optical switch 100 of the first conventional example will be described. In the input optical fiber array 101 that is an optical input port of the optical switch 100, an optical signal is input to a specific input optical fiber 101a and converted into a light beam 107 by a corresponding microlens 102a. The light beam 107 reaches the micro movable mirror 103a uniquely corresponding to the input optical fiber 101a on the input side micro movable mirror array 103 without interfering with the light beams of other ports.

  The micro movable mirror 103a deflects the traveling direction of the light beam 107 reflected by the mirror surface by changing the rotation angle θ1 of the mirror surface about two orthogonal rotation axes, and outputs the micro movable mirror array 104 on the output side. The specific micro movable mirror 104a above is selected. The light beam 107 arriving on the micro movable mirror 104a can be handled via the micro lens 105a by adjusting the rotation angle θ2 of the micro movable mirror 104a so as to vertically enter the output optical fiber 106a according to the incident angle. The output optical fiber 106a is uniquely optically coupled. Thereby, an optical signal can be output to a specific optical output port. The solid line in FIG. 12 indicates the traveling direction of the light beam 107 when the rotation angle θ of the input side micro movable mirror 103a is 0 [rad], and the broken line indicates the light beam when the rotation angle θ is θ1 [rad]. The direction of travel 107 is shown.

  In the first conventional example described above, the rotation angle required for the micro movable mirror arrays 103 and 104 varies depending on the positions of the corresponding input / output optical fibers 101a and 106a. Specifically, the maximum rotation angle of the micro movable mirror required for the path control of the light beam 107 emitted from the input port located at the upper end or the lower end of the input optical fiber array 101 is at the center of the input optical fiber array 101. This is approximately twice the maximum rotation angle of the micro movable mirror required for the path control of the light beam 107 emitted from the input port located.

  As described above, in the free space type optical switch 100 having the configuration shown in the first conventional example, the rotation angle required for the input / output micro movable mirror arrays 103 and 106 corresponds to the corresponding input / output optical fibers 101a and 106a. Varies depending on the position of For this reason, there is a problem that requirements for the rotational operation range are particularly high for the input / output micro movable mirrors 103a and 106a corresponding to the input / output optical fibers 101a and 106a located at the corners of the input / output optical fiber arrays 101 and 106. is there. On the other hand, the optical system of the optical switch 100 includes an optical input / output unit, that is, an optical collimator array including optical fiber arrays 101 and 106, and microlens arrays 102 and 105, and a light beam path control unit, that is, input / output micro movable. This is a simple configuration constituted by the mirror arrays 103 and 104, which is advantageous in terms of suppressing excess loss due to mounting errors of optical components and reducing the size of the optical switch.

  As a free space type optical switch, there is one described in Non-Patent Document 2, for example, in addition to the one shown in FIG. A second conventional example of the free space type optical switch disclosed in Non-Patent Document 2 will be described with reference to FIGS. In the following description, the same members as those of the first conventional example described above are denoted by the same reference numerals as those used in the above description, and redundant description is omitted.

  13 and 14 are side views showing a second conventional example of the free space type optical switch described in Non-Patent Document 2. FIG. The optical switch 110 in FIGS. 13 and 14 includes an input optical fiber array 101, a collimating microlens array 102, an input-side movable micromirror array 103, an output-side movable micromirror array 104, and a condensing microlens array. 105, an output optical fiber array 106, and a concave mirror 111. In FIG. 13 and FIG. 14, the arrow indicates the traveling direction of the light beam 112a. In FIG. 13, each component is displayed as a one-dimensional array for side view.

  Next, a method of switching the optical signal path in the free space type optical switch 110 of the second conventional example will be described. The optical signal emitted from the input optical fiber array 101 is converted into a light beam group 112 by the collimating microlens array 102 and reaches the input side micro movable mirror array 103. Here, as shown in FIG. 13, when the rotation angle θ1 around the Y axis (axis in the direction orthogonal to the paper surface of FIG. 13) of each mirror constituting the micro movable mirror array 103 is set to 0 [rad], All the light beams in the light beam group 112 travel in the direction of a fixed emission angle α1 [rad]. Thereafter, the light beam of the light beam group 112 reflected by the concave mirror 111 is condensed at the focal position of the concave mirror 111.

  Here, when the micro movable mirror 104 a in the center of the output side micro movable mirror array 104 is arranged at the focal position of the concave mirror 111, all the light beams reflected by the concave mirror 111 are transmitted from the output side micro movable mirror array 104. It reaches the micro movable mirror 104a at the center. A solid line 112 a in FIG. 13 indicates a light beam emitted from the input optical fiber 101 a located at the center of the input optical fiber array 101. This light beam 112 a is reflected by the micro movable mirror 103 a at the center of the input side micro movable mirror array 103, then reflected at the center of the optical axis of the concave mirror 111 to change the traveling direction, and the output side micro movable mirror array 104. Is reflected again by the micro movable mirror 104a at the center of the light, and then condensed by the micro lens 105a at the center of the condensing micro lens array 105 and optically coupled to the output optical fiber 106a at the center of the output optical fiber array 106. To do.

  As shown in FIG. 14, when the rotation angle θ1 about the Y axis of each micro movable mirror 103a constituting the input side micro movable mirror array 103 is set to + σ1 [rad], all the light beams in the light beam group 112 are obtained. The beam travels in the direction of a constant emission angle α2 [rad]. Thereafter, the light beams of the light beam group 112 reflected by the concave mirror 111 are condensed at the focal position of the concave mirror 111 as in the case where the rotation angle θ1 is 0 [rad]. , The output side micro movable mirror array 104 is shifted from the center by Xshift. The shift amount Xshift is uniquely determined by the focal length f of the concave mirror 111 and the incident angle of the light beam incident on the concave mirror 111. When the influence of each aberration on the concave mirror 111 can be ignored, the following relationship is established.

Xshift = f · (α2−α1) (1)
σ1 = (α2−α1) / 2 (2)
From the above formulas (1) and (2), the position of the light beam reaching the output side micro movable mirror array 104 does not depend on the position of the input optical fiber 101a, and the focal length f of the concave mirror 111 and the input side. The rotation angle θ1 of the micro movable mirror 103a constituting the micro movable mirror array 103 is determined. In general, the conversion action between the incident angle of the light beam and the arrival position of the light beam shown in Expression (1) is called “optical Fourier transform”. Note that this conversion function can also be realized by using a convex lens, a combination lens, or the like (for example, see Non-Patent Document 3).

The optical Fourier transform can be applied not only in the XZ plane in FIGS. 13 and 10 but also in the YZ plane. In this case, each micro movable mirror 103a constituting the input-side micro movable mirror array 103 is operated in a rotation direction around the X axis, thereby similarly converting the light beam incident angle and the light beam arrival position. The action is realizable. Since this optical switch has a symmetrical configuration with respect to the optical axis of the concave mirror and is optically reversible, the function of the optical switch does not change even if the traveling direction of the light beam is reversed. Signal path switching is established.
As described above, according to the form of the second conventional example, the input side micro movable mirror array 103 and the output side micro movable mirror array 104 are arranged at the focal position of the optical Fourier transform optical element represented by the concave mirror 111. As a result, the output-side micro movable mirror 104a corresponding to the output optical fiber 106a is uniquely selected according to the rotation angle of the input-side micro movable mirror 103a. The requirements for the rotational operation range are equal without depending on the positions of the input / output optical fibers 101a and 106a.

  As a result, compared with the configuration shown in the first conventional example, the maximum rotation angle of the micro movable mirrors 103a and 104a corresponding to the input / output optical fibers 101a and 106a located at the corners is reduced to approximately 1/2. In addition, the requirements for the rotational operation range of the micro movable mirror arrays 103 and 104 can be relaxed. On the other hand, in the form of the second conventional example, the beam waist of the light beam formed by the collimating microlens array 102 and the condensing microlens array 105 is arranged at each focal position of the optical Fourier transform optical element. This is disadvantageous in terms of downsizing the optical switch as compared with the first conventional example. Further, an increase in the number of optical Fourier transform optical elements may increase excess loss due to accumulation of component mounting errors and the like. Therefore, when configuring the optical switch, the maximum rotation angle of the micro movable mirror, the collimating length of the light beam, the layout of the optical components, etc. are taken into consideration, and either the first conventional example or the second conventional example is used. It is comprehensively judged whether the configuration of the optical system is suitable.

Yamamoto et al., “3-D MEMS large-scale optical switch”, IEICE Technical Report, PS2002, 2002 M. Kozhevnikov, et al., “Compact 64 × 64 Micromechanical Optical Cross Connect”, IEEE Photonics Tecnology Letters, Vol.15, No.7, July 2003. V. A. Aksyuk, et al., “238 × 238 Micromechanical Optical Cross Connect”, IEEE Photonics Tecnology Letters, Vol.15, No.4, April 2003.

By the way, in the conventional example of the free space type optical switch described so far, there are the following problems in constructing a large-scale optical switch in which the number of optical input / output ports exceeds several hundred.
(1) First, as the number of input / output ports of an optical switch is increased, an optical fiber array used for input / output of an optical signal, and a microlens array for converting an optical signal input / output from the optical fiber array into a light beam, In addition, it is necessary to expand the array scale for each of the micro movable mirror arrays that deflect the light beam.

  Among these, in particular, the optical fiber array is different from the micro movable mirror array that is collectively formed by using a semiconductor process and the micro lens array that can be integrally formed by using a semiconductor process or a molding technique. Since it is necessary to mount the array in an aligned manner, the array error tends to accumulate as the array scale is increased. The alignment error of the optical fiber array becomes an optical axis shift between the optical fiber and the microlens in a plane perpendicular to the traveling direction of the light beam, and causes an optical axis tilt in the light beam.

For this reason, simply expanding the array size of the optical fiber array increases the vignetting loss at the lens aperture, the vignetting loss due to the micro movable mirror, and the optical coupling loss due to the angular deviation of the light beam with respect to the output side optical fiber. there were. Furthermore, the light beam having the optical axis tilt has a problem in that it causes crosstalk to adjacent ports and degrades the quality of optical communication.
In addition, there is a problem that as the arrangement scale of the optical fiber array is increased, the difficulty of aligning and mounting the individual optical fibers is increased, the manufacturing yield is reduced, and the manufacturing cost is increased.

(2) When the arrangement scale of the optical components constituting the optical switch is increased, the light beam is connected between the path connecting the farthest input / output ports and the path connecting the nearest input / output ports. There is a problem that the difference in the distance (hereinafter referred to as the optical path length) propagates. This optical path length difference causes an optical axis shift with respect to the traveling direction of the light beam, which increases the variation in optical coupling loss, and makes the required value for the dynamic range of the optical receiver strict.

(3) Further, when the arrangement scale of the optical components constituting the optical switch is increased, there is a problem that it is difficult to relatively align the optical components even if the cumulative arrangement error of the individual optical components is suppressed. there were. For example, when alignment is performed between an optical collimator array composed of the input optical fiber array 101 and the collimating microlens array 102 and the input-side micro movable mirror array 103, the optical components are arranged two-dimensionally. If a shift θrot in the direction of rotation about an axis perpendicular to the surface is generated, even if the shift amount is small, the relative positional shift amount Δ at the end of the array depends on the array scale N as follows: As a result, the light beam emitted from the optical collimator deviates from the center of the micro movable mirror to increase the vignetting loss.

Δ = tan (θrot) × (N−1) × (arrangement of optical components) (3)
This deviation also causes light leakage to the adjacent optical port and causes deterioration of the optical switch performance. Therefore, when expanding the number of input / output ports of a free space type optical switch, it rotates not only in the translation direction but also between the optical collimator array composed of the optical fiber array and the collimating microlens array, and the micro movable mirror array. It is important to match the relative positional relationship with high accuracy also in the direction.

  The present invention has been made in view of such circumstances, and its purpose is to suppress an increase in optical coupling loss accompanying an increase in the array scale of the light input / output unit in an optical system constituting a large-scale optical switch, It is to realize a low-loss optical switch.

In order to achieve this object, an optical switch according to the present invention includes an optical input unit having a plurality of optical input ports for inputting an optical signal into the optical switch, and a plurality of optical output ports for outputting the optical signal. And an optical switch that deflects an optical signal input from the optical input port and outputs the deflected optical signal to the selected optical output port. Each of the optical input port and the optical output port includes a plurality of support members. The light input portion and the light output portion are each formed by an assembly of the plurality of support members, and a support member that constitutes the assembly of the light input portions; The support member that constitutes the aggregate of the light output portions is formed between a light input port and a light output port by forming a step portion in a frame that combines and aggregates a plurality of support members. In which the difference in path length is disposed so as to decrease.

According to the present invention, in the above invention, the optical input port and the optical output port are optical fibers or fiber collimators .
The present invention provides the optical output unit according to the invention, wherein a plurality of tiltable micromirrors are used between the optical input unit and the optical output unit to deflect an optical signal from the optical input unit. A micro movable mirror array for transmission is provided.

  According to the present invention, in the above invention, the micro movable mirror array includes an input side micro movable mirror array for deflecting an optical signal from the light input unit, and an optical signal deflected by the input side micro movable mirror array as the light. The output side movable micro mirror array is deflected by the input side movable micro mirror array between the input side movable micro mirror array and the output side movable micro mirror array. There is provided a Fourier transform optical element that makes the output angle of the signal light correspond to the arrival position on the output side micro movable mirror array on a one-to-one basis.

According to the present invention, in the above invention, the Fourier transform optical element is a concave mirror.
The present invention includes an optical input unit having a plurality of optical input ports for inputting an optical signal into an optical switch, and an optical output unit having a plurality of optical output ports for outputting the optical signal, and the optical input port In the optical switch that deflects the optical signal input from the optical switch and outputs the deflected optical signal to the selected optical output port, each of the optical input port and the optical output port is two-dimensionally arranged and supported by a plurality of support members. The light input part and the light output part are each formed by an assembly of the plurality of support members, and a plurality of tiltable micromirrors are used between the light input part and the light output part. A micro movable mirror array for deflecting an optical signal from an optical input unit and transmitting the deflected optical signal to the optical output unit is provided, and the micro movable mirror array is an input side for deflecting an optical signal from the optical input unit The movable movable mirror array and an output micro movable mirror array that deflects an optical signal deflected by the input micro movable mirror array toward the optical output unit. These input micro movable mirror array and output A Fourier transform optical element that makes the output angle of the signal light deflected by the input side micro movable mirror array one-to-one correspond to the arrival position on the output side micro movable mirror array between the side micro movable mirror array and the side micro movable mirror array The Fourier transform optical element is a concave mirror, and the reflecting surface of the concave mirror is a toroidal surface.
According to the present invention, in the above invention, the optical input port and the optical output port are optical fibers or fiber collimators.

  In the present invention, the optical input unit and the optical output unit are attached to a pair of independent frames, respectively, and the pair of frames propagates an optical signal at least from the optical input unit to the optical output unit. And a positioning means for arranging the light input part and the light output part in a predetermined positional relationship.

The present invention includes an optical input unit having a plurality of optical input ports for inputting an optical signal into an optical switch, and an optical output unit having a plurality of optical output ports for outputting the optical signal, and the optical input port In the optical switch that deflects the optical signal input from the optical switch and outputs the deflected optical signal to the selected optical output port, each of the optical input port and the optical output port is two-dimensionally arranged and supported by a plurality of support members. The light input part and the light output part are each formed by an assembly of the plurality of support members, and a plurality of tiltable micromirrors are used between the light input part and the light output part. A micro movable mirror array for deflecting an optical signal from an optical input unit and transmitting the deflected optical signal to the optical output unit is provided, and the micro movable mirror array is an input side for deflecting an optical signal from the optical input unit The movable movable mirror array and an output micro movable mirror array that deflects an optical signal deflected by the input micro movable mirror array toward the optical output unit. These input micro movable mirror array and output A Fourier transform optical element that makes the output angle of the signal light deflected by the input side micro movable mirror array one-to-one correspond to the arrival position on the output side micro movable mirror array between the side micro movable mirror array and the side micro movable mirror array The optical input unit and the optical output unit are mounted on a pair of independent support structures, respectively, and the input side micro-movable is maintained in a predetermined positional relationship with the support structure mounted with the optical input unit. A mirror array is mounted, and the output side microphone is maintained in a predetermined positional relationship with the support structure mounted with the light output unit. A movable mirror array is mounted, and the pair of support structures has an opening at least on a path through which an optical signal propagates from the light input unit toward the light output unit, and the pair of support structures are fitted to each other. Or a pair of supporting structures and a first mounting means for arranging the light input portion and the light output portion in a predetermined positional relationship between the support structure and the base on which the support structure is mounted, The Fourier transform optical element has a predetermined positional relationship between the input-side micro movable mirror array and the output-side micro movable mirror array on a pair of support structures or a base on which the pair of support structures are mounted. It has the 2nd positioning means for arrange | positioning.

The present invention includes an optical input unit having a plurality of optical input ports for inputting an optical signal into an optical switch, and an optical output unit having a plurality of optical output ports for outputting the optical signal, and the optical input port In the optical switch that deflects the optical signal input from the optical switch and outputs the deflected optical signal to the selected optical output port, each of the optical input port and the optical output port is two-dimensionally arranged and supported by a plurality of support members. The light input part and the light output part are each formed by an assembly of the plurality of support members, and a plurality of tiltable micromirrors are used between the light input part and the light output part. A micro movable mirror array for deflecting an optical signal from an optical input unit and transmitting the deflected optical signal to the optical output unit is provided, and the micro movable mirror array is an input side for deflecting an optical signal from the optical input unit The movable movable mirror array and an output micro movable mirror array that deflects an optical signal deflected by the input micro movable mirror array toward the optical output unit. These input micro movable mirror array and output A Fourier transform optical element that makes the output angle of the signal light deflected by the input side micro movable mirror array one-to-one correspond to the arrival position on the output side micro movable mirror array between the side micro movable mirror array and the side micro movable mirror array The input-side micro movable mirror array and the output-side micro movable mirror array include an adjustment mechanism that adjusts a relative position with respect to the light input unit or the light output unit.
According to the present invention, in the above invention, the Fourier transform optical element is a concave mirror.
In the present invention according to the present invention, the reflecting surface of the concave mirror is a toroidal surface.

The present invention includes an optical input unit having a plurality of optical input ports for inputting an optical signal into an optical switch, and an optical output unit having a plurality of optical output ports for outputting the optical signal, and the optical input port In the optical switch that deflects the optical signal input from the optical switch and outputs the deflected optical signal to the selected optical output port, each of the optical input port and the optical output port is two-dimensionally arranged and supported by a plurality of support members. The light input portion and the light output portion are each formed by an assembly of the plurality of support members, and the assembly of the plurality of support members forming the light input portion and the light output portion is the plurality of support members. Is provided with an adjusting mechanism for adjusting the relative position.

According to the present invention, a plurality of (at least two or more) support members (for example, a plurality of optical fibers are two-dimensionally arranged without forming the optical input unit or the optical output unit by one optical fiber array. By using an assembly of supported alignment substrates), the arrangement scale of the individual support members can be reduced, and the accumulation of arrangement errors can be suppressed. As a result, according to the present invention, it is possible to improve the accuracy of the position of the light input port and the light output port in the direction perpendicular to the traveling direction of the light beam. A switch can be provided.
When the optical input port and the optical output port are optical fibers, the optical axis deviation between the optical fiber and the lens can be kept within an allowable value, and an increase in optical coupling loss can be suppressed. Also, when the optical input port and the optical output port are configured by a fiber collimator in which the optical fiber and the collimating lens are integrated in advance, it is possible to prevent the optical axis from being shifted between the optical input unit and the optical output unit. Can do.

  Further, in the present invention, compared to the case where the optical input port and the optical output port are each supported by a large and single support member, the number of ports per support member is reduced. The difficulty of the assembly process for supporting the constituent members of each port is reduced. For this reason, according to the present invention, the light input portion and the light output portion can be manufactured with a more stable manufacturing yield, and the manufacturing cost can be kept low.

Further, when configuring the light input section or the light output section, the plurality of optical fiber arrays or fiber collimator arrays are arranged at a distance from each other by providing a predetermined offset with respect to the traveling direction of the light beam. Reduces the optical path length difference between the path connecting between the input / output ports and the path connecting between the closest input / output ports, and suppresses the optical axis deviation with respect to the traveling direction of the light beam, thereby optical coupling. Variation in loss can be suppressed.
These effects of reducing the optical coupling loss are effective for any of the optical switches shown in the first and second conventional examples.

  As for the optical switch of the second conventional example, a concave mirror is used as the Fourier transform optical element, and an optical switch is used as compared with the case where a lens having the same Fourier transform action is used by turning back the traveling direction of the light beam. The volume of can be reduced. In the optical switch of the second conventional example, the input side and output side micro movable mirror arrays have a predetermined distance with respect to the concave mirror on the plane (XZ plane in FIGS. 13 and 10) where the light beam is folded. Since they are arranged with an inclination angle, the light beam reflected by the micro movable mirror array becomes an off-axis ray, and the aberration in the concave mirror may be a value that cannot be ignored. About this off-axis aberration, it can correct | amend by making the said concave-surface mirror into the toroidal surface from which a curvature differs by the X-axis and a Y-axis.

In the present invention, the optical switch is composed of a pair of support structures, each of which includes an input side optical port and a micro movable mirror array, and an output side optical port and a micro movable mirror array. By combining the support structures using high-precision positioning means, the optical components at spatially separated positions can be arranged with high accuracy.
The pair of support structures have openings at least on a path through which an optical signal propagates. Of these, input / output optical ports and openings for attaching the micro movable mirror array are represented by positioning pins and the like. It has high-precision positioning means.

  For example, by providing two positioning means on the outer periphery of the opening, a translational direction (parallel to the surface) in the plane in which the optical components are two-dimensionally arranged between the optical port and the micro movable mirror array is provided. As well as the relative positional relationship in the rotational direction about the axis perpendicular to the plane can be determined in a short time and passively. Such positioning means is a technique generally used as a method of aligning optical components.

  By the way, in reality, the mounting of the optical components is inclined due to the gap necessary for fitting the positioning means and a slight positional error, and the above-described rotational direction deviation occurs in both the optical port and the micro movable mirror array. there is a possibility. In particular, when the arrangement scale of the optical components is large, the positional deviation between the optical port and the micro movable mirror array resulting from the deviation in the rotation direction may adversely affect the optical switch performance as described above. In the present invention, by separating the optical switch into an independent support structure on the input side and the output side, the presence or absence of the aforementioned shift or the degree thereof is observed from the opening of the surface where the pair of support structures are combined, Can be evaluated. Furthermore, the above-described deviation can be corrected by correcting the mounting position of the optical component based on the evaluated result and repeating this process.

Since the optical switch in the present invention is optically reversible, the pair of support structures can have substantially the same structure on the input side and the output side, and the evaluation method may be the same. Therefore, the assembly and inspection processes can be independently performed on the input side and the output side, and the assembly time can be shortened.
If the relative position error between the pair of support structures, that is, the input / output micro movable mirrors is in the range of several hundreds of micrometers, the tilt angle of each micro movable mirror is finely adjusted when the optical switch is operated. By doing so, correction can be generally made, and it is not necessary to perform high-precision adjustment when combining a pair of support structures.

  Thus, after evaluating the presence / absence of positional deviation between the light input / output port and the micro movable mirror array and correcting the positional deviation, positioning means provided with a pair of support structures mounted with the optical components on the surfaces to be combined with each other A low-loss optical switch can be realized by using a base member independent of the support structure or providing a positioning means for aligning the pair of support structures.

  In the present invention, when a Fourier transform optical element is provided between the input side micro movable mirror array and the output side micro movable mirror array, the light reflected from the input side micro movable mirror array applies a voltage to the input side micro movable mirror. In the initial assembly state where no voltage is applied, all the light is focused on the center of the output side micro movable mirror array, so the relative positions of the output side micro movable mirror array and the Fourier transform optical element are actively adjusted. Is very difficult.

  In the present invention, by configuring the optical switch with a pair of support structures, the presence / absence of misalignment between the light input / output port and the micro movable mirror array is evaluated and the misalignment is corrected in advance, as in the above invention. Can do. Further, by passively positioning the input / output micro movable mirror array and the Fourier transform element using the pair of support structures, a passive alignment between them is realized.

  Specifically, for each of the input side and the output side, after mounting the optical port and the micro movable mirror array in the same manner as in the above invention, the surface of the pair of support structures on which the Fourier transform optical elements are arranged Positioning means is provided in the opening, or similar positioning means is provided on a base independent of the support structure, and the relative positional relationship between the pair of support structures and the Fourier transform element is determined.

  If the relative positional error between the input / output micro movable mirror and the Fourier transform optical element is in the range of several hundred μm, the tilt angle of each micro movable mirror can be finely adjusted during the optical switch operation. Can be corrected roughly. For this reason, it is not necessary to perform a highly accurate adjustment when combining a pair of support structure like the said invention. In addition, as long as the Fourier transform optical element has an outer diameter tolerance of a general optical element, passive alignment is performed on the basis of the outer diameter even if it is not mounted on a highly accurate holder. Can be done.

  In the present invention, a plurality of support members constituting the optical input port or the optical output port are mounted on the frame, and the translation direction in a plane in which, for example, optical fibers are two-dimensionally arranged and arranged on the frame, By providing a fine adjustment mechanism that is movable in the rotation direction about an axis perpendicular to the surface, the position of the light input / output port can be relatively aligned with the micro movable mirror array. Thereby, for example, even a slight error in the direction of the rotation axis, which is difficult to adjust only by reattaching the optical component, can be corrected with high accuracy.

  In the present invention, the input-side micro movable mirror array or the output-side micro movable mirror array is mounted on a frame, and the translation direction in a plane in which, for example, micro movable mirrors are two-dimensionally arranged on the frame, and By providing a fine adjustment mechanism that is movable in the rotation direction about an axis perpendicular to this surface, the position of the input / output micro movable mirror array can be aligned relative to the optical input / output port. Thus, as in the case of the above-described invention, for example, even a slight position error in the rotation axis direction that is difficult to adjust only by reattaching the optical component can be adjusted with high accuracy.

1 is a perspective view showing a configuration of a first embodiment of an optical switch according to the present invention. It is a disassembled perspective view of each part which comprises the optical fiber array shown in FIG. It is a perspective view of the optical fiber array shown in FIG. It is a perspective view which shows each part which comprises an optical collimator array. It is a perspective view which shows each part which comprises an optical collimator array. It is a side view which shows the structure of 2nd Embodiment of the optical switch which concerns on this invention. It is a perspective view which shows the structure of the optical fiber array which has an offset in the advancing direction of the light shown in FIG. It is a disassembled perspective view which shows the structure of 3rd Embodiment of the optical switch which concerns on this invention. It is a perspective view which shows the structure of 4th Embodiment of the optical switch which concerns on this invention. It is a perspective view which shows the structure of 5th Embodiment of the optical switch which concerns on this invention. It is a perspective view which shows the structure of 6th Embodiment of the optical switch which concerns on this invention. It is a side view which shows the schematic structure of the 1st prior art example of a free space type optical switch. It is a side view which shows the schematic structure of the 2nd prior art example of a free space type optical switch. It is a side view which shows the schematic structure of the 2nd prior art example of a free space type optical switch.

[First Embodiment]
Hereinafter, an optical switch according to a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a perspective view of an optical switch using two micro movable mirrors, and an arrow in the figure indicates a traveling direction of a light beam. In FIG. 1, 1 is an optical switch according to the present invention, 2 is an optical input unit, 3 is an input side micro movable mirror array, 4 is an output side micro movable mirror array, and 5 is an optical output unit. Since the optical switch 1 according to the present invention has an optically reversible configuration, there is no change in the function of the optical switch even if the traveling direction of the light beam is reversed. Therefore, in this description, the direction of light input / output is a setting given for convenience of description, and it goes without saying that the present invention is not limited to the role of the input side or the output side when the present embodiment is adopted.

  The optical input unit 2 is configured by arranging and arranging four input optical fiber arrays 6 to 9 in an array of 2 rows × 2 columns. Similarly, the light output unit 5 is configured by arranging and arranging four output optical fiber arrays 11 to 14 so as to form an array of 2 rows × 2 columns. The input optical fiber arrays 6 to 9 and the output optical fiber arrays 11 to 14 are two-dimensional optical fiber arrays each having an array number of 8 rows × 8 columns.

  The input / output optical fiber arrays 6 to 9 and 11 to 14 are mounted with two-dimensional microlens arrays 15 to 18 and 21 to 24 each having an arrangement number of 8 rows and 8 columns, so that 8 rows × 8. It functions as a two-dimensional optical collimator array having an array number of columns. The micro movable mirror arrays 3 and 4 are 16 row × 16 column micro movable mirror arrays each having the same arrangement as that of the optical input / output units 2 and 5 and manufactured on a one-chip silicon substrate by a semiconductor manufacturing technique. is there.

  The light input unit 2 and the light output unit 5 are each composed of a relatively small two-dimensional optical fiber array 6 to 9, 11 to 14 and a two-dimensional microlens array 15 to 18, 21 having an array of 8 rows × 8 columns. ˜24 are assembled into an array of 16 rows × 16 columns, thereby realizing an optical input / output port having 256 ports.

  The micro lens arrays 15 to 18 and 21 to 24 are formed to have the same arrangement interval as the optical fiber arrays 6 to 9 and 11 to 14, and the optical fiber arrays 6 to 9 and 11 to 14 and By aligning each optical axis to coincide, it functions as an optical collimator array.

  Each of the micro lens arrays 15 to 18 and 21 to 24 is manufactured by a mold molding technique. The arrangement accuracy of the lens centers in these microlens arrays 15 to 18 and 21 to 24 is within ± 1 μm. Further, an antireflection film is provided on the light input / output end faces of the microlens arrays 15 to 18 and 21 to 24. These microlens arrays 15 to 18 and 21 to 24 may be manufactured by a mold molding technique using a low melting point glass or an optical polymer, or may be manufactured by processing quartz or silicon by a semiconductor process technique. Good.

  Further, the microlens arrays 15 to 18 and 21 to 24 are 16 rows × 16 columns in any of the above processing techniques, particularly in the semiconductor process technology, as compared with the case where the microlens arrays 15 to 18 and 21 to 24 are divided and formed with an array number of 8 rows × 8 columns. Can be produced as a single microlens array component on the premise of having the same arrangement as the optical fiber arrays 6 to 9 and 11 to 14.

  As shown in FIGS. 2 and 3, the input optical fiber arrays 6 to 9 and the output optical fiber arrays 11 to 14 include a ferrule 26 that holds an optical fiber 25, and alignment substrates 27 to 30 that support the ferrule 26. The frame-shaped frame 31 is formed by combining the aligned substrates 27 to 30 together. In this embodiment, the optical fiber 25 constitutes an optical input port and an optical output port according to the present invention, and the alignment substrate 27-30 constitutes a support member according to the present invention. The assembly with the frame 31 constitutes an assembly of a plurality of support members in the present invention.

The ferrule 26 is formed in a cylindrical shape, and holds the optical fiber 25 in a state where the optical fiber 25 is fitted and positioned in the axial center portion. An antireflection film is formed on the light incident / exit end face 25 a of the optical fiber 25.
The alignment substrates 27 to 30 are respectively provided with a plurality of through holes 32 that are two-dimensionally arranged at predetermined intervals so as to form an array of 8 rows × 8 columns, for example. These alignment substrates 27 to 30 support the plurality of optical fibers 25 in a two-dimensional array by inserting the ferrule 26 into the through holes 32, and the light of the plurality of optical fibers 25. The entrance / exit end face 25a is exposed at the end faces of the alignment substrates 27 to 30 and aligned so as to be parallel to each other.

  In addition, guide holes 33 are formed in outer edge portions of the alignment substrates 27 to 30 located outside the plurality of through holes 32 in order to determine and fix positions with other alignment substrates. The diameter of the guide hole 33 is formed such that the fitting pin 34 erected on the frame 31 can be fitted. By fitting the fitting pins 34 into the guide holes 33, the optical fiber arrays 6 to 9 and 11 to 14 can be positioned and fixed to the frame 31 with high accuracy.

  This positioning can be passively performed with high accuracy and without any special positioning operation by positioning the fitting pin 34 at a predetermined position of the frame 31 with high accuracy. Further, when the fitting pins 34 are fitted into the guide holes 33, the microlens arrays 15-18 provided with the guide holes 35 (see FIG. 4) in the same arrangement as the optical fiber arrays 6-9, 11-14. , 21 to 24 can be aligned.

  The ferrule 26 is generally marketed as a ferrule for optical connectors, and its external accuracy is ± 1 μm or less. In addition, the amount of eccentricity, which is a deviation between the outer diameter center of the ferrule 26 and the core center of the optical fiber 25 held by the ferrule 26, generally has a high accuracy of 1 μm or less. Further, the inner diameters of the plurality of through holes 32 are substantially equal to the outer shape of the cylindrical ferrule 26. In addition, the alignment substrates 27 to 30 may be made of metal, ceramic, or glass in addition to the polymer-based thermoplastic material.

  By machining these materials or molding them using a mold, it is possible to arrange the positions of the respective through holes 32 with a high accuracy of ± 2 μm or less in the entire region of the two-dimensional array. The positional accuracy of the guide hole 33 with respect to the fitting pin 34 of the frame 31 can be formed with the same accuracy. In particular, when the alignment substrates 27 to 30 are made of a thermoplastic resin, the alignment substrates 27 to 30 can be manufactured at low cost while maintaining high accuracy by a transfer molding method.

  When the array scale becomes large, if all the through holes 32 are provided in one alignment substrate, the alignment accuracy is limited by the manufacturing accuracy of the alignment substrate, so that it is difficult to arrange with high accuracy. This limit of manufacturing accuracy is due to accumulation of tool feed errors in the case of machining, or non-uniform shrinkage of the molded member in the case of molding. In the present invention, the size of one optical fiber array is limited to a size that does not impair the alignment accuracy of the optical fibers, and a plurality of optical fiber arrays are aligned on one frame 31, thereby The input / output port scale of the optical switch 1 can be increased without degrading the arrangement accuracy.

  In the present embodiment, as shown in FIG. 4, optical fiber arrays 6-9, 11-14 and microlens arrays 15-18, 21-24 are used as the optical collimator array constituting the optical input / output port. As an optical collimator, as shown in FIG. 5, for example, the optical fiber 25 is fixed to the rod lens 41 {see FIG. 5B) whose tip is aspherical by optical adhesive or fusion. It may be a single part.

  The fiber collimator 42 configured by connecting the rod lens 41 and the optical fiber 25 as described above is generally commercially available, and the external accuracy thereof is ± 2 μm or less. FIG. 5 shows a configuration example of a fiber collimator array 43 in which the fiber collimators 42 are arranged on the alignment substrates 27 to 30. The angle deviation of the optical axis of the light beam emitted from the fiber collimator 42, that is, the pointing accuracy is 0.1 ° or less. This pointing accuracy is such that when the light beam reaches the micro movable mirror, the shift amount of the beam center position due to the optical axis inclination of the light beam is several tens of μm, and the influence on the optical loss is sufficiently negligible. is there.

  For this reason, when aligning the plurality of fiber collimators 42, it is not necessary to align the direction of the angular deviation. In this embodiment, the fiber collimator 42 constitutes an optical input port and an optical output port in the present invention. The lens portion constituting the fiber collimator 42 is a rod lens whose tip is aspherical processed, a refractive index distribution type rod lens represented by a SELFOC lens, or a metal tube having a hollow inside. A plano-convex or bi-convex collimator lens may be used.

The plurality of through-holes 32 arranged in the alignment substrates 27 to 30 are formed in a shape in which a fiber collimator 42 having the cylindrical lens portion can be fitted. In other words, the hole shape of the through hole 32 is formed to be substantially the same as the outer shape of the fiber collimator 42. For this reason, the fiber collimator array 43 with a very small arrangement error can be manufactured at low cost simply by inserting the fiber collimator 42 into the plurality of through holes 32 of the alignment substrates 27 to 30 and aligning them.
In the present embodiment, the number of ports of the optical input / output units 2 and 5 is 256 ports of 16 rows × 16 columns, but the number of ports is not limited to this value.
In the present embodiment, the light input / output units 2 and 5 are configured by combinations of the input / output optical fiber arrays 6 to 9 and 11 to 14 and the microlens arrays 15 to 18 and 21 to 24. As shown in FIG. 5, a fiber collimator array can be used.
Further, the geometrical arrangement of the input / output optical fiber arrays 6 to 9 and 11 to 14 and the input / output micro movable mirror arrays 3 and 4, and the optical fibers 25 and microlens arrays 15 to 18 and 21 to 24, which constitute these, Needless to say, the arrangement interval of the micro movable mirror arrays 3 and 4 is not limited to the value when the present embodiment is adopted.

  In the optical switch 1 according to the present embodiment configured as described above, for example, the positions and shapes of the through holes 32 and the guide holes 33 of the alignment substrates 27 to 30 are formed with high dimensional accuracy, and pass through the optical fiber 25. If the hole 32 is inserted through the ferrule 26 or the fiber collimator 42 and fixed to the alignment substrates 27 to 30, the two-dimensional optical collimator array that is the main component of the optical switch 1 can be manufactured with extremely small arrangement errors. Furthermore, by arranging a plurality of alignment substrates 27 to 30 in the frame 31 through the guide holes 33, for example, optical input / output ports of a large-scale optical switch having more than 200 ports can be configured with high accuracy and simplicity. It becomes possible.

[Second Embodiment]
The optical switch according to the present invention can be configured as shown in FIGS.
FIG. 6 is a side view of an optical switch using two micro movable mirrors and a concave mirror, and FIG. 7 is a perspective view of an optical fiber array according to this embodiment. The arrows in FIG. 6 indicate the traveling direction of the light beam. 6 and 7, the same or equivalent members as those described with reference to FIGS. 1 to 5 are denoted by the same reference numerals, and detailed description thereof is omitted as appropriate. Since the optical switch according to the present invention has an optically reversible configuration, there is no change in the function of the optical switch even if the traveling direction of the light beam is reversed. Therefore, in this description, the direction of light input / output is a setting given for convenience of description, and it goes without saying that the present invention is not limited to the role of the input side or the output side when the present embodiment is adopted.

The optical switch 51 shown in FIG. 6 includes an optical input unit 52, an input-side micro movable mirror array 53, a concave mirror 54, an output-side micro movable mirror array 55, and an optical output unit 56. In FIG. 6, reference numeral 57 denotes a light beam group.
The optical input unit 52 aligns the input microlens arrays 15 to 18 having the same arrangement as the input optical fiber arrays with the four input optical fiber arrays 6 to 9 each having an array size of 8 rows × 8 columns. As a result, four optical collimator arrays are formed and arranged in 2 rows × 2 columns, whereby an optical input port with 256 ports as a whole is configured.

  Similarly to the optical input unit 52, the optical output unit 56 includes an optical collimator array of 8 rows × 8 columns composed of the output optical fiber arrays 11 to 14 and the output microlens arrays 21 to 24 in 2 rows × 2 columns. An optical output port having 256 ports is arranged. The input / output optical fiber arrays 6 to 9 and 11 to 14 and the input / output microlens arrays 15 to 18 and 21 to 24 are two-dimensionally arranged so that the optical fibers or microlenses constituting each of the input / output optical fiber arrays It is arranged.

The micro movable mirror arrays 53 and 55 are 16 rows × 16 columns micro movable mirror arrays each having the same arrangement as that of the optical collimator array, manufactured on a one-chip silicon substrate by a semiconductor manufacturing technique.
As shown in FIG. 6, the light input unit 52, the input side micro movable mirror array 53, the concave mirror 54, the output side micro movable mirror array 55, and the light output unit 56 are each δ [ rad] with an inclination angle of “rad”.

  The input / output micro movable mirror arrays 53 and 55 are respectively arranged at the focal positions of the concave mirror 54 having a focal length of 150 mm. The light input / output units 52 and 56 are arranged at a distance of about 150 mm from the input or output side micro movable mirror arrays 53 and 55, respectively. The concave mirror 54 shown in this embodiment is a toroidal mirror having a curvature radius in the X direction of 315 mm and a curvature radius in the Y direction of 300 mm.

  In the optical switch according to the present embodiment, when connecting the most distant optical fibers between the input and output optical fiber arrays, an optical path length difference of about 20 mm is compared with connecting the closest optical fibers. Arise. In this embodiment, in order to reduce this optical path length difference, the four optical fiber arrays constituting the light input / output unit are arranged in the Y direction in FIG. 6 (direction orthogonal to the paper surface of FIG. 6). A predetermined offset is given to the traveling direction of light, with the two arranged in a set as one set.

  FIG. 7 shows the configuration of the light input unit 52 to which the offset is given in this way. Regarding the input optical fiber arrays 6 to 9, the optical fiber arrays 7 and 9 located in the vicinity of the concave mirror 54 are brought close to the input side movable micro mirror array 53 by approximately 10 mm. In this manner, the offset is given to the optical fiber array by forming the step portion 61 in the frame 31 as shown in FIG.

Similarly, the output optical fiber arrays 11 to 14 are fixed to the frame 31 by bringing the optical fiber arrays 11 and 13 located close to the concave mirror 54 to approximately 10 mm close to the output side micro movable mirror array 55. Arranged.
By adopting such a configuration, the optical path length variation of the entire optical switch can be suppressed within a range of approximately 10 mm, and the optical coupling loss variation due to the optical path length difference can be kept to 0.1 dB or less.

When the light beam is incident at an oblique incidence with a large angle with respect to the optical axis of the reflecting surface 54a of the concave mirror 54, that is, the axis passing through the center of curvature, the focusing position of the beam group is one point as described above. A position error occurs. This position error is obtained by making the radius of curvature of the surface obliquely incident on the concave mirror optical axis (in this case, the XZ plane) larger than the radius of curvature of the vertical plane (YZ plane). , The required conditions for the rotational operation range of each micro movable mirror can be made uniform, and an optical switch that effectively uses the mirror rotation angle can be configured.
Further, by making the reflecting surface 54a of the concave mirror 54 a toroidal surface, the off-axis aberration in the concave mirror 54 is reduced as compared with the case where the curvature is formed equally on the X axis and the Y axis, and the value Of 0.5 dB or less.
In this embodiment, the number of ports of the optical input / output units 52 and 56 is 256 ports of 16 rows × 16 columns, but the number of ports is not limited to this value. Further, the optical input / output units 52 and 56 are configured by using four optical fiber arrays each having an array of 8 rows × 8 columns. However, if necessary, it is possible to adopt a configuration in which two optical fiber arrays of 16 rows × 8 columns are combined and one of them is close.

  In the present embodiment, the optical fiber array 7, 9, 11, 13 is brought close to the micro movable mirror arrays 53, 55 to reduce the optical path length difference. It can also be kept away from 53,55. Furthermore, for example, when configuring an optical input / output unit of an optical switch having more ports than 1000 and having a larger number of ports, it is not necessary to limit the number of optical fiber arrays constituting these to two or four. It can be constituted by 16 optical fiber arrays, and these can be arranged in multiple stages so as to be close to or away from each other.

In the present embodiment, the light input / output units 52 and 56 are configured by combinations of the input / output optical fiber arrays 6 to 9 and 11 to 14 and the microlens arrays 15 to 18 and 21 to 24. As shown in FIG. 5, a fiber collimator array can be used.
Further, the geometrical arrangement of the input / output optical fiber arrays 6-9, 11-14, the concave mirror 54, and the input / output micro movable mirror arrays 53, 55, and the optical fiber 25, microlens arrays 15-18, It goes without saying that the arrangement intervals of the 21 to 24 and the micro movable mirror arrays 53 and 55 are not limited to values when the present embodiment is adopted.

  In the optical switch 51 according to the present embodiment configured as described above, for example, the optical input / output units 52 and 56 are configured by four input / output optical fiber arrays 6 to 9 and 11 to 14, respectively. By providing an offset relative to the traveling direction of the light beam, the increase in the optical path length difference accompanying the increase in the size of the optical switch 51 is suppressed, and the variation in optical coupling loss due to the optical path length difference is extremely small. can do. Further, by making the reflecting surface 54a of the concave mirror 54 a toroidal surface having different curvatures between the X axis and the Y axis, the off-axis aberration in the concave mirror 54 can be suppressed to about 0.5 dB.

[Third Embodiment]
Hereinafter, an optical switch according to a third embodiment of the present invention will be described with reference to the drawings. The optical switch according to the present invention can be configured as shown in FIG.
FIG. 8 is an exploded perspective view of the optical switch according to the third embodiment. In FIG. 8, the same or equivalent members as described with reference to FIGS. 1 to 7 are given the same reference numerals, and detailed description thereof is omitted as appropriate. Since the optical switch according to the present invention has an optically reversible configuration, there is no change in the function of the optical switch even if the traveling direction of the light beam is reversed. Therefore, in this description, the direction of light input / output is a setting given for convenience of description, and it goes without saying that the present invention is not limited to the role of the input side or the output side when the present embodiment is adopted.

The optical switch 1 shown in FIG. 8 is an exploded view of the structure of the optical switch shown in the first embodiment of the present invention, and the optical input is applied to the support structure 60a constituting the input side of the optical switch. The output side micro movable mirror array 4 and the light output unit 5 are mounted on the support structure 60b constituting the output side of the optical switch. In this embodiment, the support structures 60a and 60b constitute a “pair of support structures” according to the invention of claim 9 . The optical input / output unit and the input / output micro movable mirror array each have an arrangement scale of 16 rows × 16 columns and 256 ports. In order to simplify the description, drawing on the upper surface of the output side support structure 60b is omitted. In addition, the arrangement scale of each optical component is also omitted from the drawing.

The support structures 60a and 60b include an opening 61 for mounting the light input / output units 2 and 5, an opening 63 for mounting the micro movable mirror arrays 3 and 4, and an input / output support structure. And an opening 66 for establishing optical coupling between the input / output micro movable mirror arrays by combining them.
A plurality of positioning pins for mounting the alignment substrates 27 to 30 on which the optical fiber arrays 6 to 9 and 11 to 14 are mounted at predetermined positions in the opening 61 for mounting the optical input / output units 2 and 5. 62 is provided with high positional accuracy. By fitting the positioning pins 62 into the plurality of guide holes 33 formed in the alignment substrates 27 to 30, the optical fiber array is arranged not only in the translation direction in the XY plane in FIG. 8 but also on this surface. It can be passively positioned and fixed with high accuracy even in the rotation direction around the vertical Z-axis.

  Similarly, a plurality of positioning pins 64 for mounting the micro movable mirror arrays 3 and 4 are provided in the opening 63 for mounting the micro movable mirror arrays 3 and 4 with high positional accuracy. By fitting the positioning pins 64 into a plurality of guide holes 65 provided on the micro movable mirror array side, the micro movable mirror arrays 3 and 4 can be passively positioned and fixed with high accuracy. When each of the support structures 60a and 60b is manufactured as an integrally formed part by cutting or molding a metal block, for example, a plurality of positioning pins for mounting the optical fiber arrays 6 to 9 and 11 to 14 are provided. The position error of 62, the position error of the positioning pin 64 for mounting the micro movable mirror arrays 3 and 4, and the relative position error between these positioning pins 62 and 64 can be approximately 10 μm to 25 μm. Is possible.

  In this manner, the relative arrangement of the light input / output units 2 and 5 and the micro movable mirror arrays 3 and 4 using the plurality of positioning pins 62 and 64 provided with high positional accuracy on the pair of support structures 60. The optical input / output at spatially separated positions is constrained by the degree of freedom in the translation direction in the plane in which the array components are aligned and the rotation direction about the axis perpendicular to the plane. The portions 2 and 5 and the micro movable mirror arrays 3 and 4 can be passively aligned with high accuracy. However, when the support structures 60a and 60b on the input side and the output side are respectively formed integrally, the processing becomes difficult and the cost becomes high. Therefore, the plates and the frames constituting the support structures 60a and 60b are made of a plurality of members. It may be configured and integrated by fastening them with screws or the like.

  In this case, the positional error between the plurality of positioning pins 62 for mounting the optical fiber arrays 6 to 9 and 11 to 14 and the positioning pins 64 for mounting the micro movable mirror arrays 3 and 4 is described above. It becomes larger than the value. Alternatively, even in the case of manufacturing by an integral forming technique, depending on the shape of the support structures 60a and 60b, a plurality of positioning pins 62 for mounting the optical fiber array and the micro movable mirror arrays 3 and 4 are mounted. Although the positioning pins 64 can be formed with high positional accuracy, it may be difficult to obtain relative positional accuracy between them.

  In such a case, before the support structures 60a and 60b are combined, the light input unit 2 and the input side micro movable mirror array 3 or the light output unit 5 and the output side micro movable mirror array 4 are connected as described above. After being mounted on the support structure, light is input from the optical fiber arrays 6 to 9 and 11 to 14 constituting the light input / output units 2 and 5 to form a light beam, and input / output support structures 60a and 60b. By observing the micro movable mirror arrays 3 and 4 irradiated to the light beam from the opening 66 of the optical fiber with an optical microscope, the relative relationship between the optical fiber arrays 6 to 9 and 11 to 14 and the micro movable mirror arrays 3 and 4 is increased. Presence or absence of misalignment and its degree can be confirmed in advance. The micro movable mirror arrays 3 and 4 may be observed at all locations, but the arrangement scale of the optical components is large even when the micro movable mirror arrays 3 and 4 are limited to only a plurality of locations such as the four corners of the array region where the influence of the shift in the rotational direction is most noticeable. In this case, the influence of the positional deviation in the rotational direction, which is particularly problematic, can be evaluated with high sensitivity.

  As a means for evaluation, similarly, a light beam is formed and reflected by the micro movable mirror arrays 3 and 4, and the light intensity of the reflected light is measured by a photodetector to confirm the presence or absence of excessive loss due to vignetting loss. There are also methods. However, using the optical microscope makes it easier to visually detect the amount and direction of the center deviation between the light beam and the micro movable mirror. Here, when the arrangement scale of the optical components is large, for example, the four corners of the array region exist with an interval of several mm to several tens mm. In order to observe these measurement points at once, the magnification of the microscope must be reduced or the light receiving area of the photodetector must be increased, resulting in a reduction in measurement resolution for each point.

  The amount of positional deviation allowed between the light input / output units 2 and 5 and the micro movable mirror arrays 3 and 4 is approximately 100 μm, although it depends on the relationship between the micro movable mirror diameter and the light beam diameter. In order to detect the influence of the position shift, it is necessary to mount a high-resolution measuring device on a linear stage or the like and move it, and measure each point to be observed. As described above, in order to evaluate the deviation in the rotational direction with high accuracy, it is required to secure a certain amount of space. Therefore, it is a fact that the support structure 60 of the optical switch is evaluated without being separated by input and output. It is difficult.

  As a result of the evaluation, if the deviation exceeds an allowable range, the fixing of any one of the optical fiber arrays 6 to 9 and 11 to 14 or the micro movable mirror arrays 3 and 4 is loosened to finely adjust the mounting position. Therefore, it is possible to correct the deviation. In this embodiment, this correction and the evaluation of the deviation are repeatedly performed, so that the deviation amount in the rotation direction of the optical switch having the arrangement scale of 16 rows × 16 columns and the number of ports of 256 is calculated as the light beam. The relative center deviation of the micro movable mirror could be kept below 100 μm.

Further, the support structures 60a and 60b in which the shift is corrected for each of the input side and the output side are fixed together with the fitting pin 67 and the fitting hole 68 provided on the end face of the opening 66, and the optical switch. Complete 1 In this embodiment, the fitting portion between the fitting pin 67 and the fitting hole 68, the fitting portion between the positioning pin 62 and the guide hole 33, and the fitting between the positioning pin 64 and the guide hole 65. A positioning means as defined in the invention of claim 8 is constituted by the joint portion.
As a result, in the evaluation of the insertion loss of the optical switch 1, the vignetting loss in the micro movable mirror was suppressed to within 0.5 dB, and an average value of insertion loss of 1.1 dB could be realized.
In the present embodiment, an example in which the optical components are arranged in 16 rows × 16 columns has been described, but it goes without saying that the effect of the present invention is not limited to this arrangement scale.

In the present embodiment, the optical input / output units 2 and 5 are the optical fiber arrays 6 to 9 and 11 to 14. However, these may be optical collimator arrays in which the optical fiber and the microlens are integrated in advance. Absent.
In the present embodiment, the light input / output units 2 and 5 are arranged on the same plane. However, as in the second embodiment of the present invention, an optical path length difference may be provided by providing an offset. Absent.
Further, in the present embodiment, an example in which the micro movable mirror arrays 3 and 4 are individually attached in the form of being divided into a plurality of substrates is shown, but these may be mounted on the same electrode substrate. The through holes 65 may be provided at a plurality of locations on the electrode substrate.

In the present embodiment, the openings of the support structures 60a and 60b include the surface 61 on which the light input / output units 2 and 5 are mounted, the surface 63 on which the micro movable mirror arrays 3 and 4 are mounted, and a pair of support structures 60. However, if necessary, the support structures 60a and 60b may be formed in the shape of only the frame, and other openings may be provided.
In the present embodiment, as a means for combining the pair of support structures 60, the fitting pins 67 and the fitting holes 68 are provided in the openings 66 of the support structures 60a and 60b to be positioned and fitted. The positioning structure is not limited to a combination of pins and holes. Similarly, with respect to a structure in which the pair of support structures 60, the light input / output units 2 and 5, and the micro movable mirror arrays 3 and 4 are positioned and fitted, for example, a minute ball having a precise outer diameter accuracy and a rectangular receiver It goes without saying that a combination of holes or the like may be used, and is not limited to a combination of pins and holes.

  Further, as a means for combining the pair of support structures 60, the support structures 60a and 60b on the input side and the output side are fitted together as described above, and as shown by a two-dot chain line in FIG. A fitting pin 70 for aligning the pair of support structures 60 is provided on a base 69 independent of the bodies 60a and 60b, and openings 61, 63, and 66 are provided for the input side and output side support structures 60a and 60b, respectively. It may be realized by providing fitting holes 68 on the other surfaces and fitting them. The positioning structure of the base 69 and the support structures 60a and 60b is not limited to the combination of pins and holes described here.

[Fourth Embodiment]
Hereinafter, an optical switch according to a fourth embodiment of the present invention will be described with reference to the drawings. The optical switch according to the present invention can be configured as shown in FIG.
FIG. 9 is an exploded perspective view of an optical switch according to the fourth embodiment. In FIG. 9, the same or equivalent members as described with reference to FIGS. 1 to 8 are given the same reference numerals, and detailed description thereof is omitted as appropriate. Since the optical switch according to the present invention has an optically reversible configuration, there is no change in the function of the optical switch even if the traveling direction of the light beam is reversed. Therefore, in this description, the direction of light input / output is a setting given for convenience of description, and it goes without saying that the present invention is not limited to the role of the input side or the output side when the present embodiment is adopted.

  An optical switch 51 shown in FIG. 9 is an exploded view of the structure of the optical switch shown in the second embodiment of the present invention, and the optical input is applied to the support structure 60a constituting the input side of the optical switch. The output-side micro movable mirror array 55 and the light output unit 56 are mounted on the support structure 60b that constitutes the output side of the optical switch. The optical input / output units 52 and 56 and the input / output micro movable mirror arrays 53 and 55 each have an arrangement scale of 16 rows × 16 columns and 256 ports. In addition, in order to simplify description, drawing is partially omitted from the outer surfaces of the support structure 60a and the support structure 60b. In addition, the arrangement scale of each optical component is also omitted from the drawing. The support structures 60a and 60b include an opening 61 for mounting the optical input / output units 52 and 56, an opening 63 for mounting the input / output micro movable mirror arrays 53 and 55, and an opening for mounting the concave mirror 54. 71 and an opening 66 for establishing optical coupling between the input / output micro movable mirror arrays 53 and 55 and the concave mirror 54.

As in the third embodiment described above, a plurality of positioning pins 62 and 64 provided with high positional accuracy are used for the support structures 60a and 60b on the input side and the output side. The optical input / output units 52 and 56 and the input / output micro movable mirror arrays 53 and 55 configured by 9, 11 to 14 are rotated about the translation direction in the aligned plane and the axis perpendicular to the plane. Mounted with high accuracy in the direction. Further, as in the third embodiment, light is input from the optical fiber arrays 6 to 9 and 11 to 14 constituting the light input / output units 52 and 56 for the input side and the output side, respectively. The optical fiber arrays 6 to 9 and 11 to 14 and the micro movable mirror array 53 are formed by observing the micro movable mirror arrays 53 and 55 irradiated with the light beam from the opening 66 of the support structure with an optical microscope. 55, the relative center deviation of the light beam and the micro movable mirror should be kept to 100 μm or less for an optical switch having an arrangement scale of 16 rows × 16 columns and 256 ports. I was able to.

  Subsequently, on the base 69 provided with a plurality of positioning pins 70 in accordance with the arrangement of the input side and output side support structures 60a and 60b and the concave mirror 54, a plurality of positioning fitting holes are provided on the bottom surface. Support structures 60a and 60b provided with 68 are mounted, and the positioning pins 70 and the fitting holes 68 are fixed together. Finally, the concave mirror is positioned and fixed by abutting the flat surfaces of the back and sides of the concave mirror 54 against a plurality of positioning pins 70 provided at positions where the concave mirror 54 on the base 69 is disposed. The optical switch 51 is completed.

  As a result, in the evaluation of the insertion loss of the optical switch 51, the vignetting loss in the micro movable mirror was suppressed to within 0.5 dB, and an average value of 4.2 dB of the insertion loss of the optical switch could be realized. In this embodiment, the positioning pins 70 for positioning the support structures 60a and 60b on the base 69 and the fitting holes 68 constitute the first positioning means referred to in the invention of claim 9. . In this embodiment, the positioning pins 70 provided for positioning the concave mirror 54 on the base 69 constitute the second positioning means referred to in the invention of claim 9.

  As in the present embodiment, when a Fourier transform optical element (concave mirror 54) is provided between the input side micro movable mirror array 53 and the output side micro movable mirror array 55, reflection from the input side micro movable mirror array 53 occurs. All the collected light is collected at the center of the output side micro movable mirror array 55 in the initial assembly state where no voltage is applied to the input side micro movable mirror 53. Therefore, it is very difficult to actively adjust the relative position and relative inclination of the output side micro movable mirror array 55 and the Fourier transform optical element with respect to the input side micro movable mirror array 53. Therefore, the required alignment accuracy cannot be realized by an assembly method in which the members are sequentially aligned from the input side based on the input light from the light input unit 52.

  On the other hand, the focal length of a Fourier optical element as used in this embodiment is as long as several tens of millimeters, and the accuracy required for positioning in the optical axis direction and translational direction is between the light beam and the micro movable mirror. Compared to the required accuracy, it is greatly relaxed. In the present embodiment, the optical input unit 52 and the input-side micro movable mirror 53, and the optical output unit 56 and the output-side micro movable mirror 55, which require higher precision alignment, are respectively provided on the support structures 60a and 60b. After mounting and positioning individually with high accuracy, the three parts of the Fourier transform optical element (concave mirror 54 in the present embodiment) and the support structures 60a and 60b, which are relatively loosely required, are supported. A configuration that performs separate passive alignment is adopted. This makes it possible to achieve the alignment accuracy required by a very simple procedure.

In the present embodiment, an example in which the optical components are arranged in 16 rows × 16 columns has been described, but it goes without saying that the effect of the present invention is not limited to this arrangement scale.
In the present embodiment, the optical input / output units 52 and 56 are the optical fiber arrays 6 to 9 and 11 to 14. However, these may be an optical collimator array in which an optical fiber and a microlens are integrated in advance. Absent.
In the present embodiment, the light input / output units 52 and 56 are arranged on the same plane. However, as in the second embodiment of the present invention, an optical path length difference may be provided by providing an offset. Absent.

In this embodiment, the concave mirror 54 is used as the Fourier transform element. However, other Fourier transform elements may be applied without departing from the scope of the present invention.
Further, in the present embodiment, an example in which the micro movable mirror arrays 53 and 55 are individually attached in a form divided into a plurality of substrates is shown, but these may be mounted on the same electrode substrate. The through holes 65 may be provided at a plurality of locations on the electrode substrate.

In the present embodiment, the openings of the support structures 60a and 60b include the surface 61 on which the light input / output units 52 and 56 are mounted, the surface 63 on which the micro movable mirror arrays 53 and 55 are mounted, and the pair of support structures 60. However, if necessary, the support structure may be formed in the shape of only the frame, and other openings may be provided.
As a means for combining the pair of support structures 60 and the concave mirror 54, as described above, each component is mounted on the base 69 provided with the plurality of positioning pins 70, and the concave mirror 54 of the support structures 60a and 60b. A frame on which a plurality of positioning pins 70 are mounted is provided in the opening 71 on which the pair of support structures 60 are mounted, and the pair of support structures 60 are fitted by positioning means provided in each other opening 66, and then provided in the opening 71. You may implement | achieve by aligning the external shape of the concave mirror 54 to the some positioning pin 70, and positioning. The positioning structure of the base 69 and the support structures 60a and 60b is not limited to the combination of pins and holes described here. Further, the structure for positioning and fitting the pair of support structures 60, the light input / output units 52 and 56, and the micro movable mirror arrays 53 and 55 is also a combination of pins and holes, as in the fourth embodiment. Needless to say, this is not a limitation.

[Fifth Embodiment]
Hereinafter, an optical switch according to a fifth embodiment of the present invention will be described with reference to the drawings.
FIG. 10 is an exploded perspective view of the optical input unit of the optical switch according to the fifth embodiment. 10, the same or equivalent members as described with reference to FIGS. 1 to 9 are given the same reference numerals, and detailed description thereof will be omitted as appropriate. Since the optical switch according to the present invention has an optically reversible configuration, there is no change in the function of the optical switch even if the traveling direction of the light beam is reversed. Therefore, in this description, the direction of light input / output is a setting given for convenience of description, and it goes without saying that the present invention is not limited to the role of the input side or the output side when the present embodiment is adopted.

The optical input unit 2 or 52 shown in FIG. 10 is an exploded view of the structure of the optical input unit of the optical switches 1 and 51 shown in the first and second embodiments of the present invention. The optical input units 2 and 52 and the input-side micro movable mirror arrays 3 and 53 each have an arrangement scale of 16 rows × 16 columns and 256 ports.
The opening 61 for mounting the optical input / output units 2 and 52 is a fine adjustment mechanism that can be driven in the translation direction in the XY plane in FIG. 10 and in the rotation direction about the Z axis perpendicular to the plane. 72. The fine adjustment mechanism 72 includes an outer frame 72a and an inner frame 72b arranged on the same plane, and these are connected by a plurality of leaf springs 72c. The inner frame 72b is provided with a plurality of positioning pins 62 with a positional accuracy of approximately ± 10 μm for mounting a plurality of alignment substrates 27 to 30 on which the input optical fiber arrays 6 to 9 are mounted. The plurality of guide holes 33 provided in .about.30 are fitted to be passively positioned with high accuracy.

  The inner frame 72b is composed of four parts separated from the alignment members 27 to 30, and the alignment members 27 to 30 attached to the inner frame 72b are independently adjusted with respect to the outer frame 72a. Can do. That is, the alignment members 27 to 30 (support members) constituting the light input portions 2 and 52 can be individually adjusted with respect to the input side movable micro mirror arrays 3 and 53. Thus, by providing the adjustment mechanism which can be adjusted individually with respect to the plurality of alignment members 27 to 30 (support members), individual differences in the manufacturing accuracy of the alignment members 27 to 30 and positions when the alignment members are attached. The error can be adjusted, and assembly with higher accuracy can be realized.

  Between the outer frame 72a and each divided portion of the divided inner frame 72b, two adjustment screws (not shown) are attached to one side in the Y direction, and the translation in the X direction is performed by screwing them. The inner frame 72b can be moved with respect to rotation about the Z axis. Similarly, one adjustment screw (not shown) is attached to one side in the X direction of each of the divided parts of the outer frame 72a and the inner frame 72b, and by screwing it, the inner frame is translated in the Y direction. 72b can be moved. By combining these movements of the screws, it is possible to correct a very slight positional deviation of several tens of μm or less with respect to an arbitrary direction in the XY plane. The adjusting screw is provided at two locations on one of the orthogonal sides and at one location on the other side to realize both translational movement and rotation, for example, two locations on one side in the X direction, Even if one is provided on one side in the Y direction, the same correction as described above can be realized.

  In the present embodiment, the inner frame 72b is divided, and the adjustment mechanism in which each divided portion is adjustable with respect to the outer frame 72a is shown. Even with such an adjustment mechanism, it is possible to easily adjust the position of the light input units 2 and 52 with respect to the input-side micro movable mirror arrays 3 and 53 integrally.

  In the present embodiment, light is input from the optical fiber arrays 6 to 9 constituting the light input portions 2 and 52 to form a light beam, and an opening for fitting the support structures 60a together. While observing the micro movable mirror arrays 3 and 53 irradiated to the light beam from 66 with an optical microscope, the fine adjustment mechanism 72 is used to adjust the light input units 2 and 52 to the input side micro movable mirror arrays 3 and 53. Deviation correction was performed. As a result, the positions of the light input portions 2 and 52 or the input-side micro movable mirror arrays 3 and 53 are attached slightly offset from the center of the opening 61 or 63 of the support structure 60a. Even in the case where the X direction and the Y direction are shifted at the same time as the rotation direction about the axis is adjusted, the relative center shift between the light beam and the micro movable mirror can be reduced to about 50 μm or less.

In the present embodiment, an example in which the optical components are arranged in 16 rows × 16 columns has been described, but it goes without saying that the effect of the present invention is not limited to this arrangement scale.
In the present embodiment, the optical input units 2 and 52 are optical fiber arrays. However, they may be optical collimator arrays in which optical fibers and microlenses are integrated in advance.
In the present embodiment, the light input units 2 and 52 are arranged on the same plane. However, as in the second embodiment of the present invention, an optical path length difference may be provided by providing an offset.
In the present embodiment, the opening of the support structure 60a fits the surface 61 on which the light input portions 2 and 52 are mounted, the surface 63 on which the micro movable mirror arrays 3 and 53 are mounted, and the pair of support structures 60. However, if necessary, the support structure may be formed in the shape of only the frame, and other openings may be provided.
Further, the structure for positioning and fitting the support structure 60a, the light input portions 2, 52, and the micro movable mirror arrays 3, 53 is also limited to the combination of pins and holes, as in the fourth embodiment. is not.

[Sixth Embodiment]
Hereinafter, an optical switch according to a sixth embodiment of the present invention will be described with reference to the drawings.
FIG. 11 is an exploded perspective view of an optical input unit of an optical switch according to the sixth embodiment. In FIG. 11, the same or equivalent members as those described with reference to FIGS. 1 to 10 are denoted by the same reference numerals and detailed description thereof is omitted as appropriate. Since the optical switch according to the present invention has an optically reversible configuration, there is no change in the function of the optical switch even if the traveling direction of the light beam is reversed. Therefore, in this description, the direction of light input / output is a setting given for convenience of description, and it goes without saying that the present invention is not limited to the role of the input side or the output side when the present embodiment is adopted.

An optical input unit 2 or 52 shown in FIG. 11 is an exploded view of the structure of the optical input unit of the optical switches 1 and 51 shown in the first and second embodiments of the present invention. The optical input units 2 and 52 and the input-side micro movable mirror arrays 3 and 53 each have an arrangement scale of 16 rows × 16 columns and 256 ports.
The opening 63 for mounting the input-side micro movable mirror arrays 3 and 53 is finely adjustable so that it can be driven in the translational direction in the XY plane in FIG. 11 and in the rotational direction centered on the Z-axis perpendicular thereto. A mechanism 72 is provided.

  The fine adjustment mechanism 72 includes an outer frame 72a and an inner frame 72b arranged on the same plane, and these are connected by a plurality of leaf springs 72c. A plurality of positioning pins 62 for attaching the input side micro movable mirror arrays 3 and 53 are provided on the inner frame 72b with a positional accuracy of approximately ± 10 μm, and these are provided on the input side micro movable mirror arrays 3 and 53. The plurality of guide holes 65 are fitted to be passively positioned with high accuracy.

  The inner frame 72b is composed of four parts separated from the input-side micro movable mirror arrays 3 and 53, and the input-side micro movable mirror array 3 and 53 attached to the inner frame 72b is used as the outer frame 72a. The position can be adjusted independently. Thus, by providing an adjustment mechanism that can be individually adjusted for the plurality of input side micro movable mirror arrays 3, 53, individual differences in manufacturing accuracy of the input side micro movable mirror arrays 3, 53, It is possible to adjust the position error when attaching the movable mirror array, and it is possible to realize more accurate assembly.

  Between the outer frame 72a and each divided portion of the divided inner frame 72b, two adjustment screws (not shown) are attached to one side in the Y direction, and the translation in the X direction is performed by screwing them. The inner frame 72b can be moved with respect to rotation about the Z axis. Similarly, one adjustment screw (not shown) is attached to one side in the X direction of each of the divided parts of the outer frame 72a and the inner frame 72b, and by screwing it, the inner frame is translated in the Y direction. 72b can be moved. By combining these movements of the screws, it is possible to correct a very slight positional deviation of several tens of μm or less with respect to an arbitrary direction in the XY plane. The adjusting screw is provided at two locations on one of the orthogonal sides and at one location on the other side to realize both translational movement and rotation, for example, two locations on one side in the X direction, Even if one is provided on one side in the Y direction, the same correction as described above can be realized.

In the present embodiment, the inner frame 72b is divided, and the adjustment mechanism in which each divided portion is adjustable with respect to the outer frame 72a is shown. However, the inner frame 72b is not divided and is adjusted with respect to the outer frame 72a integrally. Even with such an adjustment mechanism, the position of the input-side micro movable mirror arrays 3 and 53 can be easily adjusted relative to the light input units 2 and 52.
In the present embodiment, light is input from the optical fiber arrays 6 to 9 constituting the light input portions 2 and 52 to form a light beam, and an opening for fitting the support structures 60a together. While observing the input side micro movable mirror arrays 3 and 53 irradiated to the light beam from 66 with an optical microscope, the input side micro movable mirror arrays 3 and 53 with respect to the light input units 2 and 52 are used by using the fine adjustment mechanism. Correction of deviation was performed.

  As a result, the positions of the light input portions 2 and 52 or the input-side micro movable mirror arrays 3 and 53 are attached slightly offset from the center of the opening 61 or 63 of the support structure 60a. Even in the case where the X direction and the Y direction are shifted at the same time as adjusting the rotation direction about the axis, the relative center shift between the light beam and the micro movable mirror is the same as in the fifth embodiment. Was approximately 50 μm or less.

In the present embodiment, an example in which the optical components are arranged in 16 rows × 16 columns has been described, but it goes without saying that the effect of the present invention is not limited to this arrangement scale.
In the present embodiment, the optical input units 2 and 52 are optical fiber arrays. However, they may be optical collimator arrays in which optical fibers and microlenses are integrated in advance.
In the present embodiment, the light input units 2 and 52 are arranged on the same plane. However, as in the second embodiment of the present invention, an optical path length difference may be provided by providing an offset. .
In the present embodiment, the opening of the support structure 60a is the surface 61 on which the light input portions 2 and 52 are mounted, the surface 63 on which the micro movable mirror arrays 3 and 53 are mounted, and the pair of openings. However, the support structure may be formed in a shape of only the frame and provided with other openings if necessary.
Further, the structure for positioning and fitting the support structure 60a, the light input portions 2, 52, and the micro movable mirror arrays 3, 53 is also limited to the combination of pins and holes, as in the fourth embodiment. is not.

DESCRIPTION OF SYMBOLS 1,51 ... Optical switch, 2,52 ... Optical input part, 3,53 ... Input side micro movable mirror array, 4,55 ... Output side micro movable mirror array, 5,56 ... Optical output part, 6-9 ... Input Optical fiber array, 11-14 ... Output optical fiber array, 15-18, 21-24 ... Two-dimensional microlens array, 27-30 ... Alignment substrate, 25 ... Optical fiber, 26 ... Ferrule, 31 ... Frame, 32 ... Through Holes 33, 35 ... guide holes, 34 ... fitting pins, 42 ... fiber collimators, 54 ... concave mirrors, 54a ... reflective surfaces, 60 ... a pair of support structures, 60a ... support structures on the input side, 60b ... outputs Side support structure, 61... Opening for mounting optical fiber array, 62... Positioning pin for mounting optical fiber array, 63... Opening for mounting micro movable mirror array, 64. (B) Positioning pin for mounting the movable mirror array, 65... Through hole, 66... Opening for combining a pair of support structures, 67... Fit pin for support structure, 68. , 70 ... fitting pin on base, 71 ... opening for mounting concave mirror, 72 ... fine adjustment mechanism, 72a ... outer frame of fine adjustment mechanism, 72b ... inner frame of fine adjustment mechanism, 72c ... leaf spring.

Claims (13)

An optical input unit having a plurality of optical input ports for inputting optical signals into the optical switch;
An optical output unit having a plurality of optical output ports for outputting the optical signal,
In an optical switch that deflects an optical signal input from the optical input port and outputs the deflected optical signal to a selected optical output port,
The optical input port and the optical output port are supported by being arranged two-dimensionally on a plurality of support members,
The light input portion and the light output portion are each formed by an assembly of the plurality of support members ,
The support member that constitutes the aggregate of the light input portion and the support member that constitutes the aggregate of the light output portion are formed by forming a step portion on a frame that combines and aggregates a plurality of support members. An optical switch, wherein the optical switch is disposed at a position where a difference in optical path length between the optical input port and the optical output port decreases . The optical switch according to claim 1, wherein
The optical switch, wherein the optical input port and the optical output port are optical fibers or fiber collimators. The optical switch according to claim 1 or 2 ,
A micro movable mirror array is provided between the optical input unit and the optical output unit, which deflects an optical signal from the optical input unit using a plurality of tiltable micro mirrors and transmits the deflected optical signal to the optical output unit. An optical switch characterized by The optical switch according to claim 3 ,
The micro movable mirror array includes an input side micro movable mirror array for deflecting an optical signal from the optical input unit, and an output for deflecting the optical signal deflected by the input side micro movable mirror array toward the optical output unit. Side micro movable mirror array,
Between the input side micro movable mirror array and the output side micro movable mirror array, the output angle of the signal light deflected by the input side micro movable mirror array is set to the arrival position on the output side micro movable mirror array. An optical switch comprising a Fourier transform optical element that is made to correspond one-to-one. The optical switch according to claim 4 , wherein
The optical switch, wherein the Fourier transform optical element is a concave mirror. An optical input unit having a plurality of optical input ports for inputting optical signals into the optical switch;
An optical output unit having a plurality of optical output ports for outputting the optical signal,
In an optical switch that deflects an optical signal input from the optical input port and outputs the deflected optical signal to a selected optical output port,
The optical input port and the optical output port are supported by being arranged two-dimensionally on a plurality of support members,
The light input portion and the light output portion are each formed by an assembly of the plurality of support members,
A micro movable mirror array is provided between the optical input unit and the optical output unit, which deflects an optical signal from the optical input unit using a plurality of tiltable micro mirrors and transmits the deflected optical signal to the optical output unit. And
The micro movable mirror array includes an input side micro movable mirror array for deflecting an optical signal from the optical input unit, and an output for deflecting the optical signal deflected by the input side micro movable mirror array toward the optical output unit. Side micro movable mirror array,
Between the input side micro movable mirror array and the output side micro movable mirror array, the output angle of the signal light deflected by the input side micro movable mirror array is set to the arrival position on the output side micro movable mirror array. A Fourier transform optical element is provided for one-to-one correspondence;
The Fourier transform optics Ri der concave mirror,
Optical switch reflecting surface of the concave mirror, wherein a toroidal surface der Rukoto. The optical switch according to claim 6.
The optical switch, wherein the optical input port and the optical output port are optical fibers or fiber collimators. The optical switch according to any one of claims 1 to 7,
The light input unit and the light output unit are mounted on a pair of independent frames,
The pair of frames have openings at least on a path through which an optical signal propagates from the optical input unit toward the optical output unit, and the optical input unit and the optical output unit are arranged in a predetermined positional relationship. An optical switch characterized by having positioning means for being operated. An optical input unit having a plurality of optical input ports for inputting optical signals into the optical switch;
An optical output unit having a plurality of optical output ports for outputting the optical signal,
In an optical switch that deflects an optical signal input from the optical input port and outputs the deflected optical signal to a selected optical output port,
The optical input port and the optical output port are supported by being arranged two-dimensionally on a plurality of support members ,
The light input portion and the light output portion are each formed by an assembly of the plurality of support members,
A micro movable mirror array is provided between the optical input unit and the optical output unit, which deflects an optical signal from the optical input unit using a plurality of tiltable micro mirrors and transmits the deflected optical signal to the optical output unit. And
The micro movable mirror array includes an input side micro movable mirror array for deflecting an optical signal from the optical input unit, and an output for deflecting the optical signal deflected by the input side micro movable mirror array toward the optical output unit. Side micro movable mirror array,
Between the input side micro movable mirror array and the output side micro movable mirror array, the output angle of the signal light deflected by the input side micro movable mirror array is set to the arrival position on the output side micro movable mirror array. A Fourier transform optical element is provided for one-to-one correspondence;
The light input part and the light output part are attached to a pair of independent support structures,
The input side micro movable mirror array is mounted on the support structure mounted with the light input unit while maintaining a predetermined positional relationship,
The support structure to which the light output unit is mounted is mounted with the output side micro movable mirror array while maintaining a predetermined positional relationship,
The pair of support structures have an opening on a path through which an optical signal propagates from at least the light input portion toward the light output portion,
The light input part and the light output part are arranged in a predetermined positional relationship between the fitting parts of the pair of support structures or between the pair of support structures and the base on which the pair of support structures are mounted. 1 positioning means,
The Fourier transform optical element maintains a predetermined positional relationship between the input-side micro movable mirror array and the output-side micro movable mirror array on the pair of support structures or the base on which the pair of support structures are mounted. An optical switch having second positioning means for being arranged. An optical input unit having a plurality of optical input ports for inputting optical signals into the optical switch;
An optical output unit having a plurality of optical output ports for outputting the optical signal,
In an optical switch that deflects an optical signal input from the optical input port and outputs the deflected optical signal to a selected optical output port,
The optical input port and the optical output port are supported by being arranged two-dimensionally on a plurality of support members,
The light input portion and the light output portion are each formed by an assembly of the plurality of support members,
A micro movable mirror array is provided between the optical input unit and the optical output unit, which deflects an optical signal from the optical input unit using a plurality of tiltable micro mirrors and transmits the deflected optical signal to the optical output unit. And
The micro movable mirror array includes an input side micro movable mirror array for deflecting an optical signal from the optical input unit, and an output for deflecting the optical signal deflected by the input side micro movable mirror array toward the optical output unit. Side micro movable mirror array,
Between the input side micro movable mirror array and the output side micro movable mirror array, the output angle of the signal light deflected by the input side micro movable mirror array is set to the arrival position on the output side micro movable mirror array. A Fourier transform optical element is provided for one-to-one correspondence;
The optical switch characterized in that the input side micro movable mirror array and the output side micro movable mirror array include an adjusting mechanism for adjusting a relative position with respect to the light input unit or the light output unit. The optical switch according to claim 9 or 10 ,
The optical switch, wherein the Fourier transform optical element is a concave mirror . The optical switch according to claim 11, wherein
An optical switch characterized in that the reflecting surface of the concave mirror is a toroidal surface. An optical input unit having a plurality of optical input ports for inputting optical signals into the optical switch;
An optical output unit having a plurality of optical output ports for outputting the optical signal,
In an optical switch that deflects an optical signal input from the optical input port and outputs the deflected optical signal to a selected optical output port,
The optical input port and the optical output port are supported by being arranged two-dimensionally on a plurality of support members,
The light input portion and the light output portion are each formed by an assembly of the plurality of support members,
An assembly of the plurality of support members forming the light input unit and the light output unit includes an adjustment mechanism for adjusting a relative position of the plurality of support members.

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