JP2004184253A - Method for measuring organic volatile substance of organic material - Google Patents

Method for measuring organic volatile substance of organic material Download PDF

Info

Publication number
JP2004184253A
JP2004184253A JP2002352109A JP2002352109A JP2004184253A JP 2004184253 A JP2004184253 A JP 2004184253A JP 2002352109 A JP2002352109 A JP 2002352109A JP 2002352109 A JP2002352109 A JP 2002352109A JP 2004184253 A JP2004184253 A JP 2004184253A
Authority
JP
Japan
Prior art keywords
volatile
container
organic
organic compound
volatilization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002352109A
Other languages
Japanese (ja)
Other versions
JP4389078B2 (en
Inventor
Shuichi Ishiwari
修一 石割
Atsuko Hanabuchi
温子 花渕
Haruo Kato
治夫 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Technology Corp
Hitachi Plant Technologies Ltd
Original Assignee
Renesas Technology Corp
Hitachi Plant Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Technology Corp, Hitachi Plant Technologies Ltd filed Critical Renesas Technology Corp
Priority to JP2002352109A priority Critical patent/JP4389078B2/en
Publication of JP2004184253A publication Critical patent/JP2004184253A/en
Application granted granted Critical
Publication of JP4389078B2 publication Critical patent/JP4389078B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for measuring an organic volatile substance of a polymeric organic material, which collects the volatile organic substance volatilized from the organic material in a volatile container capable of being mounted on a measuring instrument and preliminarily cleans the volatile container by a heating system to enable highly accurate measurement and evaluation. <P>SOLUTION: The volatile organic substance is collected in the volatile container integrated with a collecting agent. This volatile container is cleaned by the heating system before measurement to make a measured value highly accurate. The volatile container after sampling is mounted in the thermal desorbing device of a thermal elimination type gas chromatograph analyzer and the whole of the volatile container is heated to be desorbed thermally while the collected organic compound is injected in the gas chromatograph analyzer to measure the kind and amount of the organic compound. <P>COPYRIGHT: (C)2004,JPO&NCIPI

Description

【０００１】
【発明の属する技術分野】
本発明は有機材料の有機揮発物測定方法に係り、特に有機材料から微量に揮発する吸着性の強い有機化合物を測定する場合に好適な手法に関する。
【０００２】
【従来の技術】
クリーンルーム雰囲気中に存在する有機化合物が半導体ウェハ表面に吸着し、その電気特性に影響を与える問題がある。有機化合物はさまざまな有機材料から発生するが、代表的なものとしてジオクチルフタル酸（ＤＯＰ）がある。このジオクチルフタル酸はプラスチック材中の可塑性の添加剤として多く使用される。ジオクチルフタル酸の性質は沸点が３６０℃であり、常温ではわずかに揮発する。このためジオクチルフタル酸は通常クリーンルーム雰囲気中には０．１から１ｎｇ／Ｌの微量含まれている。そこで、このような有機化合物のうちウェハ表面に吸着するものを評価する必要がある。
【０００３】
現在プラスチック材からの揮発有機化合物測定は日本空気清浄協会の「クリーンルーム構成材料から発生する分子状汚染物質の測定方法指針（案）」で記述されている方法が使用されている。その概要図を図６に示した。この測定は、試験片から揮発する有機化合物を吸引ポンプにより気流が一定方向に流通する雰囲気中で、積算流量計で測定時間を調整し、気流にのせて吸引ポンプ手前の捕集管で捕集する方法である。まず測定対象となる有機化合物が揮発するプラスチック材などの試験片１をチャンバー２に入れる。このチャンバー２の材質はステンレス製又はガラス製容器を使用している。チャンバー２内上部の注入口を通した配管から清浄空気又は窒素ガスなどの不活性ガスを注入し、試験片から揮発する有機化合物を気流に乗ってチャンバー２上部の排出口に接続された配管を通じて、インビンジャー３又は捕集剤４などの捕集管に捕集する。捕集後その捕集管を熱脱着式ガスクロマトグラフで揮発有機化合物の種類及び量を測定している。
【０００４】
特許文献１はガスクロマトグラフの質量分析装置に直接装着可能な吸着管容器を用いる構造とし、汚染物質が吸着する試験片を収容したまま、吸着管容器ごと質量分析装置に装着して熱脱着を行い、汚染物質材料および汚染物質量を測定して被測定個所の汚染度を評価している。
【０００５】
【特許文献１】
特開２００１−２６４２９５号公報
【０００６】
【発明が解決しようとする課題】
しかしながら前記測定方法指針の問題点はプラスチック材から発生した有機化合物のうち吸着性の強いものは、チャンバー内部、または気流が流れる配管内壁に吸着されてしまい、捕集管に到達できない。このため発生した有機化合物の種類・量を精度良く測定することは困難である。
【０００７】
本発明の目的は、有機材料から揮発する吸着性の強い有機化合物に対しても精度良く測定することが可能な、有機材料の有機揮発物測定方法を提供することにある。
【０００８】
【課題を解決するための手段】
上記目的を達成するために、本発明に係る高分子有機材料の有機揮発物測定方法は、有機材料から揮発する揮発有機化合物を、予め捕集剤を充填した揮発容器で捕集した後、前記揮発有機化合物が付着した前記揮発容器ごと質量分析装置に装着することにより、揮発容器と捕集剤を含めた形態で揮発有機物の測定をなすことを特徴とし、揮発容器に予め有機化合物の捕集剤を充填してなる揮発容器を熱加熱方式により清浄化処理した後、当該揮発容器にて有機材料から揮発する揮発有機化合物を捕集し、前記揮発有機化合物が付着した前記揮発容器ごと質量分析装置に装着することにより、揮発容器と捕集剤を含めた形態で揮発有機物の測定をなす構成としている。また、前記揮発容器を単独容器として内部に評価対象有機材料と捕集剤を収容して揮発有機化合物を揮発させ、この揮発性容器ごと質量分析装置に装着して測定することを特徴とし、さらに、前記揮発容器を揮発部と捕集剤を収容した吸着部とに分別して接続し、前記揮発部内に評価対象有機材料を収容して揮発有機化合物を揮発させ、後段の吸着部により有機材料から揮発する揮発有機化合物を捕集し、前記揮部と吸着部とを別々に質量分析装置に装着して測定する構成としている。
【０００９】
本発明は、吸着性の強い有機化合物をすべて捕集管に捕集することは大変むずかしいので、揮発させる容器を小型化、および捕集剤も結合した形にする。そしてプラスチック材からの揮発サンプリング後、その容器および捕集剤ごと熱脱着式ガスクロマトグラフに挿入し測定する方式である。これにより、吸着性の強い有機化合物を含めて、精度良く測定することができる。
【００１０】
【発明の実施の形態】
本発明に係る有機材料の有機揮発物測定方法の実施形態を添付図面に従って説明する。
図１に本発明の実施の形態に係る測定方法を説明する図を示す。本実施の形態では分析装置に取付けられる測定容器を、有機材料から揮発する揮発有機化合物を捕集する揮発容器１０と捕集剤１２とから成る同一の容器として用いている。図２に揮発容器と捕集剤の断面図を示す。熱脱離型ガスクロマトグラフ分析装置１４に装着する揮発容器１０は一方を容器外径と同径の不活性ガスの注入口１１とし、もう一方は容器外径より先細でロート状に形成された排出口１３としている石英管である。注入口１１には、気流が流れる配管に接続するための孔の開いたキャップ１５が取付けられている。この揮発容器１０のサイズは、以下に説明する質量分析装置に収容できるサイズに設定すればよい。
【００１１】
まず測定前に前記揮発容器を清浄する目的で、容器内部の排出口１３側に捕集剤１２を充填する。この捕集剤１２は本実施の形態では吸着剤（商品名；テナックス）を充填している。つぎに注入口１１より不活性ガスを流通させながら容器外周部を覆うヒーター１６を用いて２８０℃で約１〜３時間加熱する。これにより揮発有機物の捕集前に存在する揮発容器１０内面および捕集剤中の有機化合物を除去することができ、測定値の精度を上げることができる。
【００１２】
図３にサンプルからの揮発有機物サンプリングを示す。清浄にした揮発容器１０の注入口１１から捕集剤１２のあいだにプラスチック剤のサンプル１８を挿入する。次に測定温度を室温、または揮発評価したい温度に設定し、清浄な空気または不活性ガスを注入口１１から排出口１３に向けて流しながら、サンプル１８から揮発した有機化合物を捕集剤１２に捕集し、揮発有機化合物のサンプリングを行う。このとき吸着力が強い有機化合物の場合、揮発後捕集剤１２に捕集される前に揮発容器１０内壁に吸着する。揮発有機化合物をサンプリングした後、揮発容器１０よりサンプル１８を取り出す。
【００１３】
図４に揮発容器および捕集剤中の揮発有機化合物が捕集される箇所を示す。揮発した有機化合物は揮発容器１０の内壁および捕集剤１２に捕集される。
次に捕集した揮発有機物の測定を行う。図１に示すように、揮発容器１０の容器ごと熱脱離型ガスクロマトグラフ分析装置１４の熱脱着装置に装着する。揮発容器１０全体を熱脱着装置（ＴＤＴ）２０で加熱して熱脱着を行い、捕集された有機化合物をガスクロマトグラフ部（ＧＣ）２２と質量分析部（ＭＳ）２４に注入し、有機化合物の種類、および量を測定する。
【００１４】
以上の説明は揮発容器１０内に捕集剤１２を充填した構成について説明したが、図５に揮発容器を揮発部と吸着部とで分離した構成を示す。基本的に考え方は前述した捕集方法と同じであるが、分析装置にそのまま装着できる揮発容器２５として、サンプル１８を収容した揮発部２６と、捕集剤１２を充填した吸着部２８とからなる２つの石英管を用いている。この２つの管の排出口どうしをフッ素系樹脂（登録商標テフロン）管３０で対称につなぎ石英管内のみ気流が流れるようにしている。前述同様のサンプリング後、測定方法は揮発部２６と吸着部２８を別々に前記分析装置で測定し、その合計値を有機揮発物の分析値としている。このためサンプル１８からの揮発する有機化合物の捕集面積が広がるとともに、捕集剤１２の量を増やすことにより、精度良く測定することができる。
【００１５】
本発明に係る実施形態では揮発容器１０，２５を石英管を用いて説明したが、この石英管をシリコン材料で製作すること、および捕集剤をシリコンの粉末にすることにより、プラスチック材料から揮発する有機化合物のうち、シリコン表面に吸着する有機化合物を測定することができる。またシリコン以外の金属やガラスについてもその材料で揮発容器および捕集剤を形成することにより、製造品の対象となる材質に吸着する有機化合物を測定することができる。
【００１６】
【発明の効果】
以上のように、本発明によれば、有機材料から揮発する揮発有機化合物を、予め捕集剤を充填した揮発容器で捕集した後、前記揮発有機化合物が付着した前記揮発容器ごと質量分析装置に装着することにより、揮発容器と捕集剤を含めた形態で揮発有機物の測定をなすことを特徴とし、揮発容器に予め有機化合物の捕集剤を充填してなる揮発容器を熱加熱方式により清浄化処理した後、当該揮発容器にて有機材料から揮発する揮発有機化合物を捕集し、前記揮発有機化合物が付着した前記揮発容器ごと質量分析装置に装着することにより、揮発容器と捕集剤を含めた形態で揮発有機物の測定をなす構成とすることで、有機材料から揮発する、特に固体表面に吸着する有機化合物の微量を正確に評価することができる。これによりクリーンルームを構成するプラスチック材などの材料および使用量などの選択と、クリーンルーム雰囲気で許容される有機化合物量との関係を明確にすることができる。よってクリーンルーム構成材料の開発時に含有する有機化合物の影響などへ指針を与えることが可能である。
【図面の簡単な説明】
【図１】本実施形態に係る測定方法を示す図である。
【図２】揮発容器と捕集剤の断面図である。
【図３】サンプルからの揮発有機物サンプリングを示す図である。
【図４】揮発有機化合物の捕集される箇所を示す図である。
【図５】揮発部と吸着部の分離型を示す図である。
【図６】従来法の概要図である。
【符号の説明】
１………試験片、２………チャンバー、３………インビンジャー、４………捕集剤、１０………揮発容器、１１………注入口、１２………捕集剤、１３………排出口、１４………熱脱離型ガスクロマトグラフ分析装置、１５………キャップ、１６………ヒーター、１８………サンプル、２０………熱脱着装置（ＴＤＴ）、２２………ガスクロマトグラフ（ＧＣ）、２４………質量分析部（ＭＳ）、２５………揮発容器、２６………揮発部、２８………吸着部、３０………フッ素系樹脂管。[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for measuring organic volatiles of an organic material, and more particularly to a method suitable for measuring a very adsorptive organic compound volatilized in a trace amount from an organic material.
[0002]
[Prior art]
There is a problem that an organic compound present in a clean room atmosphere is adsorbed on the surface of a semiconductor wafer and affects its electric characteristics. Organic compounds are generated from various organic materials, and a typical example is dioctyl phthalic acid (DOP). This dioctyl phthalic acid is often used as a plastic additive in plastic materials. Dioctyl phthalic acid has a boiling point of 360 ° C. and volatilizes slightly at room temperature. For this reason, dioctyl phthalic acid usually contains a trace amount of 0.1 to 1 ng / L in a clean room atmosphere. Therefore, it is necessary to evaluate such organic compounds that are adsorbed on the wafer surface.
[0003]
At present, measurement of volatile organic compounds from plastic materials uses the method described in the "Guidelines for the Method of Measuring Molecular Contaminants Generated from Clean Room Constituent Materials" (draft) by the Japan Air Purification Association. The schematic diagram is shown in FIG. In this measurement, the organic compound volatilized from the test piece is collected in an atmosphere in which the air current flows in a certain direction by a suction pump, the measurement time is adjusted by an integrating flow meter, and the sample is placed in the air current and collected by a collection tube in front of the suction pump. How to First, a test piece 1 such as a plastic material from which an organic compound to be measured is volatilized is put into the chamber 2. The chamber 2 is made of a stainless steel or glass container. An inert gas such as clean air or nitrogen gas is injected from a pipe passing through an inlet in the upper part of the chamber 2, and an organic compound volatilized from the test piece is entrained in an airflow through a pipe connected to an outlet in the upper part of the chamber 2. , The collecting agent 4 or the like. After the collection, the type and amount of the volatile organic compounds are measured from the collection tube by a thermal desorption type gas chromatograph.
[0004]
Patent Literature 1 has a structure using an adsorption tube container that can be directly attached to a gas chromatograph mass spectrometer, and performs thermal desorption by attaching the adsorption tube container to the mass spectrometer together with a test piece to which a contaminant is adsorbed. In addition, the contaminant material and the amount of the contaminant are measured to evaluate the degree of contamination at the measurement site.
[0005]
[Patent Document 1]
JP 2001-264295 A
[Problems to be solved by the invention]
However, the problem of the measurement method guideline is that among the organic compounds generated from the plastic material, those having a high adsorptivity are adsorbed in the chamber or the inner wall of the pipe through which the air flows, and cannot reach the collection pipe. Therefore, it is difficult to accurately measure the type and amount of the generated organic compound.
[0007]
An object of the present invention is to provide a method for measuring an organic volatile matter of an organic material, which can accurately measure even an organic compound having a high adsorptivity that volatilizes from the organic material.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, the method for measuring the organic volatile matter of a high-molecular-weight organic material according to the present invention comprises: collecting volatile organic compounds volatilized from the organic material in a volatilization container previously filled with a collecting agent; By attaching the volatile container to which the volatile organic compound is attached to the mass spectrometer, the volatile organic substance is measured in a form including the volatile container and the trapping agent. After the volatile container filled with the agent is cleaned by a thermal heating method, the volatile organic compound volatilized from the organic material is collected in the volatile container, and the volatile container with the volatile organic compound attached thereto is subjected to mass spectrometry. It is configured to measure volatile organic matter in a form including a volatile container and a trapping agent by being attached to the device. Further, the volatile container is contained as an independent container, and the volatile organic compound is volatilized by storing the organic material to be evaluated and the collecting agent therein, and the volatile container is attached to a mass spectrometer for measurement. The volatilization container is separated and connected to a volatilizing section and an adsorbing section containing a trapping agent, and the organic material to be evaluated is stored in the volatilizing section to volatilize the volatile organic compound. The volatile organic compound which volatilizes is collected, and the volatile part and the adsorption part are separately mounted on a mass spectrometer for measurement.
[0009]
In the present invention, it is very difficult to collect all the organic compounds having a high adsorptivity in the collecting tube. Therefore, the container for volatilization is reduced in size and the collecting agent is combined. After volatilization sampling from a plastic material, the container and the collecting agent are inserted into a thermal desorption type gas chromatograph for measurement. This allows accurate measurement including an organic compound having strong adsorptivity.
[0010]
BEST MODE FOR CARRYING OUT THE INVENTION
An embodiment of a method for measuring organic volatile matter of an organic material according to the present invention will be described with reference to the accompanying drawings.
FIG. 1 is a diagram illustrating a measurement method according to an embodiment of the present invention. In the present embodiment, the measurement container attached to the analyzer is used as the same container including the volatile container 10 for collecting volatile organic compounds volatilized from the organic material and the collecting agent 12. FIG. 2 shows a cross-sectional view of the volatile container and the collecting agent. One of the volatile containers 10 to be attached to the thermal desorption type gas chromatograph analyzer 14 is an inlet 11 for an inert gas having the same diameter as the outer diameter of the container, and the other is a funnel-shaped drainage outlet that is tapered from the outer diameter of the container. A quartz tube serving as the outlet 13. The inlet 11 is provided with a cap 15 having a hole for connection to a pipe through which air flows. The size of the volatile container 10 may be set to a size that can be accommodated in a mass spectrometer described below.
[0011]
First, before the measurement, for the purpose of cleaning the volatile container, the trapping agent 12 is filled into the discharge port 13 inside the container. In this embodiment, the trapping agent 12 is filled with an adsorbent (trade name: Tenax). Next, heating is performed at 280 ° C. for about 1 to 3 hours using a heater 16 that covers the outer periphery of the container while flowing an inert gas through the injection port 11. As a result, the organic compound in the inner surface of the volatile container 10 and the trapping agent existing before the trapping of the volatile organic substances can be removed, and the accuracy of the measured value can be increased.
[0012]
FIG. 3 shows volatile organic matter sampling from the sample. A sample 18 of a plastic agent is inserted between the trapping agent 12 and the inlet 11 of the cleaned volatile container 10. Next, the measurement temperature is set to room temperature or the temperature to be evaluated for volatilization, and the organic compound volatilized from the sample 18 is passed to the collector 12 while flowing clean air or an inert gas from the inlet 11 toward the outlet 13. Collect and sample volatile organic compounds. At this time, in the case of an organic compound having a strong adsorption force, the organic compound is adsorbed on the inner wall of the volatilization container 10 before being collected by the collecting agent 12 after volatilization. After sampling the volatile organic compound, a sample 18 is taken out from the volatile container 10.
[0013]
FIG. 4 shows a volatile container and a portion where the volatile organic compound in the collecting agent is collected. The volatilized organic compound is collected by the inner wall of the volatilization container 10 and the collecting agent 12.
Next, the collected volatile organic substances are measured. As shown in FIG. 1, the entire container of the volatilization container 10 is attached to the thermal desorption apparatus of the thermal desorption type gas chromatograph analyzer 14. The entire volatile container 10 is heated by a thermal desorption device (TDT) 20 to perform thermal desorption, and the collected organic compound is injected into a gas chromatograph unit (GC) 22 and a mass spectrometry unit (MS) 24 to remove the organic compound. Measure the type and quantity.
[0014]
In the above description, the configuration in which the trapping agent 12 is filled in the volatilization container 10 has been described. FIG. 5 shows a configuration in which the volatilization container is separated into a volatilization unit and an adsorption unit. Basically, the concept is the same as that of the above-described collection method. However, as a volatilization container 25 that can be directly attached to the analyzer, the volatilization unit 26 containing the sample 18 and the adsorption unit 28 filled with the collection agent 12 are provided. Two quartz tubes are used. The outlets of the two tubes are symmetrically connected to each other by a fluororesin (registered trademark Teflon) tube 30 so that air flows only in the quartz tube. After the same sampling as described above, in the measuring method, the volatilizing section 26 and the adsorbing section 28 are separately measured by the analyzer, and the total value is used as the analysis value of the organic volatile matter. For this reason, the collection area of the volatile organic compound from the sample 18 is increased, and the measurement can be performed with high accuracy by increasing the amount of the collection agent 12.
[0015]
In the embodiment according to the present invention, the volatilization containers 10 and 25 are described using a quartz tube. However, the quartz tube is made of a silicon material, and the collecting agent is made of a silicon powder so that the volatilization container can be volatilized from a plastic material. Organic compounds adsorbed on the silicon surface can be measured. Also for metals and glasses other than silicon, by forming a volatile container and a collecting agent using the materials, an organic compound adsorbed on a material to be manufactured can be measured.
[0016]
【The invention's effect】
As described above, according to the present invention, after a volatile organic compound volatilized from an organic material is collected in a volatilization container previously filled with a trapping agent, the mass spectrometer together with the volatilization container to which the volatile organic compound is attached is attached. It is characterized by measuring volatile organic matter in a form including a volatile container and a collecting agent by mounting it on a volatile container that is pre-filled with a collecting agent of an organic compound in a volatile container by a thermal heating method. After the cleaning treatment, the volatile organic compound volatilized from the organic material is collected in the volatile container, and the volatile container to which the volatile organic compound is attached is attached to a mass spectrometer, whereby the volatile container and the collecting agent are collected. By measuring the volatile organic matter in a form including the above, it is possible to accurately evaluate the trace amount of the organic compound which is volatilized from the organic material, particularly adsorbed on the solid surface. This makes it possible to clarify the relationship between the selection of a material such as a plastic material constituting the clean room and the amount used, and the amount of the organic compound allowed in the clean room atmosphere. Therefore, it is possible to give a guide to the influence of the organic compounds contained in the development of the clean room constituent material.
[Brief description of the drawings]
FIG. 1 is a diagram illustrating a measurement method according to an embodiment.
FIG. 2 is a cross-sectional view of a volatile container and a collecting agent.
FIG. 3 is a diagram showing volatile organic matter sampling from a sample.
FIG. 4 is a diagram showing locations where volatile organic compounds are collected.
FIG. 5 is a diagram showing a separation type of a volatilizing section and an adsorbing section.
FIG. 6 is a schematic diagram of a conventional method.
[Explanation of symbols]
1 ... test piece, 2 ... chamber, 3 ... injar, 4 ... collecting agent, 10 ... volatile container, 11 ... inlet, 12 ... collecting agent, Reference numeral 13: outlet, 14: thermal desorption gas chromatograph analyzer, 15: cap, 16: heater, 18: sample, 20: thermal desorption device (TDT), 22 ... gas chromatograph (GC), 24 ... mass spectrometry part (MS), 25 ... volatile container, 26 ... volatile part, 28 ... adsorption part, 30 ... fluorine resin tube.

Claims (4)

有機材料から揮発する揮発有機化合物を、予め捕集剤を充填した揮発容器で捕集した後、前記揮発有機化合物が付着した前記揮発容器ごと質量分析装置に装着することにより、揮発容器と捕集剤を含めた形態で揮発有機物の測定をなすことを特徴とする有機材料の有機揮発物測定方法。After collecting the volatile organic compound volatilized from the organic material in a volatilization container previously filled with a collecting agent, the volatilization container to which the volatile organic compound adheres is attached to a mass spectrometer, thereby collecting the volatilization container and the volatilization container. A method for measuring organic volatile matter of an organic material, comprising measuring volatile organic matter in a form including an agent. 揮発容器に予め有機化合物の捕集剤を充填してなる揮発容器を熱加熱方式により清浄化処理した後、当該揮発容器にて有機材料から揮発する揮発有機化合物を捕集し、前記揮発有機化合物が付着した前記揮発容器ごと質量分析装置に装着することにより、揮発容器と捕集剤を含めた形態で揮発有機物の測定をなすことを特徴とする有機材料の有機揮発物測定方法。After a volatile container, which is previously filled with an organic compound collector in a volatile container, is subjected to a cleaning treatment by a thermal heating method, the volatile organic compound volatilized from the organic material is collected in the volatile container, and the volatile organic compound is removed. A method for measuring the organic volatile matter of an organic material, wherein the volatile organic matter to which the is attached is attached to a mass spectrometer to measure the volatile organic matter in a form including the volatile container and the trapping agent. 前記揮発容器を単独容器として内部に評価対象有機材料と捕集剤を収容して揮発有機化合物を揮発させ、この揮発容器ごと質量分析装置に装着して測定することを特徴とする請求項１または２に記載の有機材料の有機揮発物測定方法。2. The method according to claim 1, wherein the volatilization container is used as a single container, and an evaluation target organic material and a collecting agent are housed therein to volatilize the volatile organic compound, and the volatilization container is attached to a mass spectrometer for measurement. 3. The method for measuring organic volatiles of an organic material according to item 2. 前記揮発容器を揮発部と捕集剤を収容した吸着部とに分別して接続し、前記揮発部内に評価対象有機材料を収容して揮発有機化合物を揮発させ、後段の吸着部により有機材料から揮発する揮発有機化合物を捕集し、前記揮発部及び吸着部とを別々に質量分析装置に装着して測定し、その合計値を有機化合物の分析値とすることを特徴とする請求項１または２に記載の有機材料の有機揮発物測定方法。The volatilization container is separated and connected to a volatilization section and an adsorption section containing a trapping agent, an evaluation target organic material is contained in the volatilization section, and the volatile organic compound is volatilized. The volatile organic compound to be collected is collected, and the volatile part and the adsorption part are separately mounted on a mass spectrometer and measured, and the total value is used as the analysis value of the organic compound. 3. The method for measuring organic volatile matter of an organic material according to 1.
JP2002352109A 2002-12-04 2002-12-04 Method for measuring organic volatiles in organic materials Expired - Fee Related JP4389078B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002352109A JP4389078B2 (en) 2002-12-04 2002-12-04 Method for measuring organic volatiles in organic materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002352109A JP4389078B2 (en) 2002-12-04 2002-12-04 Method for measuring organic volatiles in organic materials

Publications (2)

Publication Number Publication Date
JP2004184253A true JP2004184253A (en) 2004-07-02
JP4389078B2 JP4389078B2 (en) 2009-12-24

Family

ID=32753817

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002352109A Expired - Fee Related JP4389078B2 (en) 2002-12-04 2002-12-04 Method for measuring organic volatiles in organic materials

Country Status (1)

Country Link
JP (1) JP4389078B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010038701A (en) * 2008-08-04 2010-02-18 Foundation For The Promotion Of Industrial Science Collection tube of semi-volatile organic compound, and measuring method and measuring device of semi-volatile organic compound
JP2017006974A (en) * 2015-06-25 2017-01-12 Ｊｆｅスチール株式会社 Weldability evaluation method and production method for electromagnetic steel sheet with insulating film
CN107228789A (en) * 2017-07-31 2017-10-03 郝东辉 A kind of heat cracker and a kind of mercury analyzer with temperature measurement function
CN112462004A (en) * 2020-11-25 2021-03-09 中国石油大学(北京) Volatile substance detection device and method

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0235328A (en) * 1988-07-23 1990-02-05 Fuji Electric Co Ltd Method and apparatus for picking up gas in specimen
JPH0547061B2 (en) * 1986-07-25 1993-07-15 Nippon Electric Co
JPH11258218A (en) * 1998-03-16 1999-09-24 Toshiba Corp Analyzer
JP2000304734A (en) * 1999-04-21 2000-11-02 Shimizu Corp Detecting method for contaminant in air
JP2001228117A (en) * 2000-02-14 2001-08-24 Mitsubishi Electric Corp Diagnostic method for internal abnormal overheat of power apparatus
JP2002328078A (en) * 2001-03-02 2002-11-15 Kao Corp Aroma collecting apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0547061B2 (en) * 1986-07-25 1993-07-15 Nippon Electric Co
JPH0235328A (en) * 1988-07-23 1990-02-05 Fuji Electric Co Ltd Method and apparatus for picking up gas in specimen
JPH11258218A (en) * 1998-03-16 1999-09-24 Toshiba Corp Analyzer
JP2000304734A (en) * 1999-04-21 2000-11-02 Shimizu Corp Detecting method for contaminant in air
JP2001228117A (en) * 2000-02-14 2001-08-24 Mitsubishi Electric Corp Diagnostic method for internal abnormal overheat of power apparatus
JP2002328078A (en) * 2001-03-02 2002-11-15 Kao Corp Aroma collecting apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010038701A (en) * 2008-08-04 2010-02-18 Foundation For The Promotion Of Industrial Science Collection tube of semi-volatile organic compound, and measuring method and measuring device of semi-volatile organic compound
JP2017006974A (en) * 2015-06-25 2017-01-12 Ｊｆｅスチール株式会社 Weldability evaluation method and production method for electromagnetic steel sheet with insulating film
CN107228789A (en) * 2017-07-31 2017-10-03 郝东辉 A kind of heat cracker and a kind of mercury analyzer with temperature measurement function
CN107228789B (en) * 2017-07-31 2023-09-08 郝东辉 Thermal cracker with temperature measurement function and mercury analyzer
CN112462004A (en) * 2020-11-25 2021-03-09 中国石油大学(北京) Volatile substance detection device and method

Also Published As

Publication number Publication date
JP4389078B2 (en) 2009-12-24

Similar Documents

Publication Publication Date Title
US7430893B2 (en) Systems and methods for detecting contaminants
US7882754B2 (en) Gas component collector, gas component collecting device, filter producing method, and gas component analyzing apparatus
US7654129B2 (en) Sensor with an analyte modulator
US8062610B2 (en) Apparatus and methods for use in concentration of gas and particle-laden gas flows
JP2009531698A (en) Pre-concentrator and detector
JP2006337158A (en) Sample concentration device
JP3506599B2 (en) Analysis method
Halder et al. Integration of a micropreconcentrator with solid-phase microextraction for analysis of trace volatile organic compounds by gas chromatography-mass spectrometry
US4194884A (en) Method and apparatus for air sampling and filtration
US20020182746A1 (en) Method and device for sample introduction of volatile analytes
US20050120775A1 (en) Systems and methods for detecting contaminants
JP2004184253A (en) Method for measuring organic volatile substance of organic material
JP2003315221A (en) Organic compound analyzer
JP4044851B2 (en) Method for measuring volatile organic substances and sampling instrument for measurement
JPS58501787A (en) Method and apparatus for continuous automatic air analysis
JP3632748B2 (en) Method for evaluating solid surface adsorption of pollutants
JP3567154B2 (en) Sampler
JP4089646B2 (en) Organic volatile matter collection tube and organic volatile matter measurement method
JP2005241473A (en) Air pollutant collecting device
CN117460943A (en) Gas sampling system and method for trace level analysis of compounds
JP2003294592A (en) Sampler for atmospheric trace hazardous substance
EP1004871A3 (en) Sample analysing method and apparatus
JP2002162323A (en) Method and apparatus for analyzing dioxin
JP2000028596A (en) Collecting device for semiconductor contaminant and analyzing method therefor
JP2987921B2 (en) Gas enrichment measurement method and apparatus

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20051018

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090127

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090205

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090331

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090601

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090729

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090819

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090917

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121016

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121016

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121016

Year of fee payment: 3

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121016

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131016

Year of fee payment: 4

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313115

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees