JP2004174628A - Foreign substance separation device in grinding material circulation use system - Google Patents

Foreign substance separation device in grinding material circulation use system Download PDF

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Publication number
JP2004174628A
JP2004174628A JP2002341501A JP2002341501A JP2004174628A JP 2004174628 A JP2004174628 A JP 2004174628A JP 2002341501 A JP2002341501 A JP 2002341501A JP 2002341501 A JP2002341501 A JP 2002341501A JP 2004174628 A JP2004174628 A JP 2004174628A
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Japan
Prior art keywords
filter
gas
foreign matter
foreign substance
separation device
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Granted
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JP2002341501A
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Japanese (ja)
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JP4246481B2 (en
Inventor
Hiroyuki Yasuyoshi
裕之 安吉
Hiroyuki Murato
博之 村戸
Shinji Kanda
真治 神田
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Shibuya Corp
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Shibuya Kogyo Co Ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/10Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working

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Abstract

<P>PROBLEM TO BE SOLVED: To provide a foreign substance separation device in a grinding material circulation use system, keeping favorable separation function for a long time by preventing clogging while keeping precise and efficient separation action as an advantage of a filter. <P>SOLUTION: This foreign substance separation device in a grinding material circulation use system includes: a casing 17 where gas to be processed containing a grinding material and foreign substance is let flow in in the tangential direction to generate a swirl flow inside; and a cylindrical filter 18 provided in the central part of the swirl flow, wherein the foreign substance is separated from the gas to be processed by the filter 18. In the filter 18, gas jetting nozzles 27, 28 having jet orifices 29, 20 oriented outward are rotatably provided along the filter 18, and rotated in the same direction as the direction of swirl flow of the gas to be processed to prevent clogging of the filter. <P>COPYRIGHT: (C)2004,JPO

Description

【0001】
【発明の属する技術分野】
本発明は、プラズマディスプレイパネルのリブ形成などの精密加工に使用されるブラスト装置等において研掃材を循環使用する場合に好適な、研掃材循環使用システムにおける異物分離装置に関する。
【0002】
【従来の技術】
この種の研掃材循環使用システムにおける異物分離装置に関しては、従来から例えば多数段の拡散板を設置した空間に使用済みの研掃材と異物とを含んだ被処理気体を給送して、各拡散板に被処理気体を衝突させながら、粒子の比重差を利用して質量の小さい塵埃を上方へ排出するとともに、再利用可能な研掃材を下方に分離するもの(特許文献1)や、使用済みの研掃材と異物とを含んだ被処理気体をケーシング内に給送し、そのケーシング内の下方から供給される上昇気流によって被処理気体を上昇させながら、フィルタにより分離して異物を下方へ落下させるというもの(特許文献2)などが知られている。しかしながら、前者のように粒子の比重差を利用した従来技術の場合には、きめ細かい分離作用を的確かつ効率的に行うことは困難であった。また、後者のようにフィルタを用いる従来技術の場合には、精密加工の場合などに必要とされる微細な研掃材を分離するためにフィルタの網目を小さくすると、目詰りが生じやすくなり、本来の分離機能を維持できなくなるといった問題があった。
【0003】
【特許文献1】
特開平8−25223号公報
【特許文献2】
特許第2923464号公報
【0004】
【発明が解決しようとする課題】
本発明は、以上のような従来の技術的状況に鑑みて開発したものであり、フィルタによる場合の利点である的確かつ効率的な分離作用を維持しながら、目詰りを防ぐことにより長時間良好な分離機能を維持し得る研掃材循環使用システムにおける異物分離装置を提供することを目的とするものである。
【0005】
【課題を解決するための手段】
本発明は、前記課題を解決するため、接線方向から研掃材と異物とを含んだ被処理気体を流入する流入口と処理済気体を流出する流出口を有し、内部で旋回流を発生させるケーシングと、前記旋回流の中心部に設けられた筒状のフィルタとを具備し、前記フィルタによって被処理気体から異物を分離する研掃材循環使用システムにおける異物分離装置において、前記フィルタ内に外方に指向した噴射口を有する気体噴射ノズルを該フィルタに沿って回転可能に設け、被処理気体の旋回流の方向と同一方向に回転するように構成するという技術手段を採用した。本発明によれば、以上の技術手段の採用により、フィルタの表面には気体噴射ノズルからのエア等の噴流が吹付けられるため、その噴流によってフィルタ表面への粒子の付着が防止され、目詰りの発生が的確に防がれる。しかも、気体噴射ノズルを被処理気体の旋回流の方向と同一方向に回転するように構成したので、被処理気体の旋回流を乱すことなく目詰りを防止することが可能である。
【0006】
【発明の実施の形態】
本発明は、プラズマディスプレイパネルのリブ形成などの精密加工に使用されるブラスト装置等の研掃材循環使用システムに好適であるが、例えば研掃材を使用する洗浄装置などの他の形態の研掃材循環使用システムにおける異物分離装置としても有効である。なお、前記気体噴射ノズルの具体的形状や設置数、あるいはその気体噴射ノズルに形成される噴射口の具体的形状や設置数に関しては、必要に応じて自由な選定が可能である。例えば、以下の実施例のようにパイプ状の気体噴射ノズルの所定位置に単に孔を形成することにより噴射口としたものや、同様の気体噴射ノズルの所定位置に形成した噴射口をスリット状に形成したものなどが可能である。また、気体噴射ノズルの回転駆動手段は、電動モータでもよいし、流体アクチュエータでもよい。さらに、気体噴射ノズルに形成される噴射口の近傍にブラシを付設してフィルタ表面の異物を除去するように構成することも可能である。
【0007】
【実施例】
以下、本発明の実施例に関して説明する。図1は本発明を適用したブラスト装置における研掃材循環使用システムを例示した概略構成図である。図中1はブラスト装置で、内部のブラスト加工室2には、ワーク3に対して研掃材を吹付けるための噴射ノズル4を配設している。噴射ノズル4には、使用済みの研掃材と異物を含んだ被処理気体を分離処理して得た研掃材を送給する研掃材送給管5と加圧エアを送給する加圧エア送給管6とを接続し、加圧エアの高速流により研掃材を吸引しながら、エアと研掃材の混合流をワーク3へ向けて噴射するように構成した。ワーク3の下方にはホッパ7を設けて使用済みの研掃材を回収するようにしている。ホッパ7の底部の排出部8に溜った研掃材は、回収管9を介して途中に配設された本発明に係るフィルタを備えた異物分離装置10により比較的大きな異物を除去した上、サイクロン11の入口12を介して吸引する。そして、サイクロン11内に吸引された使用済みの研掃材を含んだ被処理気体は、サイクロンの分離作用により、上方の異物除去口13より比較的小さな異物を排除するとともに目的の研掃材を下方の研掃材回収口14より回収し、前記研掃材送給管5を介して循環使用するように構成している。なお、上方の異物除去口13より排除された比較的小さな異物は、本実施例では集塵機15により除去した上、残りの気体を排気するように構成した。この集塵機15の吸引作用によって、サイクロン11の内部及び異物分離装置10の内部は若干の負圧状態となり、被処理気体は、ホッパ7の排出部8から異物分離装置10を経由してサイクロン11へ送給されることになる。
【0008】
図2は異物分離装置10に関する実施例を示した縦断面図であり、図3はそのA−A断面図、図4及び図5は要部に関する部分拡大図である。本実施例に係る異物分離装置10では、前記ホッパ7の排出部8に連なる回収管9を接続する流入側の配管接続部16は、図3に示したように中央から偏心した位置に形成した。回収された研掃材を含む被処理気体は、筒状のケーシング17とフィルタ18との間に形成される環状の通路19を旋回しながら、フィルタ18を通過し得ない比較的大きな異物を残して内部20へ流れ込み、図2に示した上方の流出口から配管接続部21を介して前記サイクロン11に送給される。フィルタ18により流通を阻止された比較的大きな異物は、自重により落下してケーシング17の下部に形成した異物溜り22に貯留される。なお、図中23はフィルタ18の枠体であり、この枠体23の外周面にフィルタを構成する網部材を張り、開口部24を介してその網目より小さい研掃材を含んだ粒子が内部20へ流通し得るように構成した。また、図中25は前記通路19に連なる被処理気体の流入口、26は前記フィルタ18の内部20に連なり該フィルタ18によって異物が除去された処理済気体の流出口である。
【0009】
次に、本発明の特徴部分に関して説明する。図示のように、前記フィルタ18の内側には、本実施例では2本のエア吹出し用の気体噴射ノズル27,28をフィルタ18の内面に沿って同心的に回転可能に配設した。前述のように、この噴射ノズル27,28の設置数に関しては必要に応じて増減し得る。それらの気体噴射ノズル27,28には、図4及び図5に示したように、それぞれフィルタ18の内面に向けて外方に指向した多数の噴射口29,30を形成した。気体噴射ノズル27,28は、それらの下方を回転可能に配設した取付アーム31によって支持するとともに、下端部に連通管32,33を接続して、前記取付アーム31を回転可能に支持する回転軸34の中空部を利用して形成したエア送給路35を介して外部の圧力エア供給源36に接続している。回転軸34の下方にはプーリ37を固着し、スピードコントロール可能な駆動モータ38の出力軸39に固着したプーリ40とベルト41により連係することにより、回転軸34を介して取付アーム31に支持した気体噴射ノズル27,28を被処理気体の旋回流の方向と同一方向に回転駆動し得るように構成した。なお、図中42,43は回転軸34支持用のベアリング、44はロータリ継手、45は流量調整弁、46は異物排出部を示したものである。
【0010】
しかして、前記異物分離装置10の運転時には、気体噴射ノズル27,28が回転軸34を介して駆動モータ38により被処理気体の旋回流の方向と同一方向に回転される。したがって、フィルタ18の内面には、回転移動する気体噴射ノズル27,28に形成した外方に指向した多数の噴射口29,30から噴射される圧力エアが吹付けられ、フィルタ18の網目を通って外側に吹出す。この網目を通ってフィルタ18の外側に吹出す圧力エアによって、フィルタ18の外面に残留する粒子は吹飛ばされて落下し目詰りが防止されることから、長時間に渡る安定した異物の分離作用が可能である。しかも、気体噴射ノズル27,28は被処理気体の旋回流の方向と同一方向に回転されることから、噴射口29,30から噴射される圧力エアによって生じる被処理気体の旋回流の乱れは小さく抑えられる。
【0011】
【発明の効果】
本発明によれば、フィルタ内に外方に指向した噴射口を有する気体噴射ノズルを該フィルタの表面に沿って同心的に回転可能に設け、被処理気体の旋回流の方向と同一方向に回転するように構成したので、フィルタの網目を通って外側に吹出す気体によってフィルタの外面に残留する粒子が落下して目詰りが防止され、フィルタによる的確かつ効率的な分離作用を長時間に渡り安定的に維持することが可能である。しかも、気体噴射ノズルが被処理気体の旋回流の方向と同一方向に回転されることから、気体噴射ノズルの噴射口から噴射される圧力エアによって生じる被処理気体の旋回流の乱れも小さく抑えることができる。
【図面の簡単な説明】
【図1】本発明を適用したブラスト装置における研掃材循環使用システムを例示した概略構成図である。
【図2】異物分離装置に関する実施例を示した縦断面図である。
【図3】図2中のA−A断面図である。
【図4】要部に関する部分拡大図である。
【図5】要部に関する部分拡大図である。
【符号の説明】
1…ブラスト装置、2…ブラスト加工室、3…ワーク、4…噴射ノズル、5…研掃材送給管、6…加圧エア送給管、7…ホッパ、8…排出部、9…回収管、10…異物分離装置、11…サイクロン、12…入口、13…異物除去口、14…研掃材回収口、15…集塵機、16…配管接続部、17…ケーシング、18…フィルタ、19…通路、20…内部、21…配管接続部、22…異物溜り、23…枠体、24…開口部、25…被処理気体の流入口、26…処理済気体の流出口、27,28…気体噴射ノズル、29,30…噴射口、31…取付アーム、32,33…連通管、34…回転軸、35…エア送給路、36…圧力エア供給源、37…プーリ、38…駆動モータ、39…出力軸、40…プーリ、41…ベルト、42,43…ベアリング、44…ロータリ継手、45…流量調整弁、46…異物排出部
[0001]
TECHNICAL FIELD OF THE INVENTION
TECHNICAL FIELD The present invention relates to a foreign matter separation device in a polishing material recycle system that is suitable for circulating and using a polishing material in a blast device or the like used for precision processing such as rib formation of a plasma display panel.
[0002]
[Prior art]
Regarding the foreign matter separation device in this kind of abrasive material circulation use system, conventionally, for example, a processing target gas containing used abrasive material and foreign matter is supplied to a space in which a multi-stage diffusion plate is installed, A device that uses a difference in specific gravity of particles to discharge dust having a small mass upward while separating a gas to be treated against each diffusion plate, and separates a reusable abrasive material downward (Patent Document 1) , A gas to be treated containing used abrasives and foreign matter is fed into the casing, and the gas to be treated is lifted by an ascending airflow supplied from below the casing, and separated by a filter to remove the foreign matter. Is known (Patent Document 2). However, in the case of the prior art utilizing the difference in specific gravity of particles as in the former case, it has been difficult to accurately and efficiently perform a fine separation action. In the case of the prior art using a filter as the latter, if the mesh of the filter is reduced in order to separate fine abrasive material required in the case of precision processing, clogging is likely to occur, There is a problem that the original separation function cannot be maintained.
[0003]
[Patent Document 1]
JP-A-8-25223 [Patent Document 2]
Japanese Patent No. 2923464
[Problems to be solved by the invention]
The present invention has been developed in view of the above-mentioned conventional technical situations, and maintains a precise and efficient separation effect, which is an advantage of a filter, while preventing clogging for a long time. It is an object of the present invention to provide a foreign matter separating apparatus in an abrasive cleaning and recycling system capable of maintaining a proper separating function.
[0005]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, the present invention has an inlet for inflowing a gas to be treated containing a polishing material and foreign matter from a tangential direction and an outlet for flowing out a treated gas, and generates a swirling flow inside. A casing, and a cylindrical filter provided at the center of the swirling flow, wherein a foreign matter separation device in a polishing material recycle use system that separates foreign matter from a gas to be treated by the filter. A technical means is adopted in which a gas injection nozzle having an outwardly directed injection port is rotatably provided along the filter so as to rotate in the same direction as the direction of the swirling flow of the gas to be treated. According to the present invention, a jet of air or the like from a gas injection nozzle is sprayed on the surface of the filter by employing the above technical means, so that the jet prevents particles from adhering to the filter surface and causes clogging. The occurrence of occurrence can be accurately prevented. Moreover, since the gas injection nozzle is configured to rotate in the same direction as the swirling flow of the gas to be processed, clogging can be prevented without disturbing the swirling flow of the gas to be processed.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
INDUSTRIAL APPLICABILITY The present invention is suitable for a system for circulating and using abrasive material such as a blast device used for precision processing such as rib formation of a plasma display panel. It is also effective as a foreign matter separation device in a cleaning material circulation use system. The specific shape and the number of the gas injection nozzles or the specific shapes and the number of the injection ports formed in the gas injection nozzle can be freely selected as necessary. For example, as in the following embodiment, a nozzle is formed by simply forming a hole at a predetermined position of a pipe-shaped gas injection nozzle, or a similar gas injection nozzle is formed at a predetermined position of a gas injection nozzle into a slit shape. Formed ones are possible. Further, the rotation driving means of the gas injection nozzle may be an electric motor or a fluid actuator. Furthermore, it is also possible to provide a brush near the injection port formed in the gas injection nozzle so as to remove foreign matter on the filter surface.
[0007]
【Example】
Hereinafter, embodiments of the present invention will be described. FIG. 1 is a schematic configuration diagram illustrating a system for circulating and using abrasive material in a blast apparatus to which the present invention is applied. In the drawing, reference numeral 1 denotes a blasting apparatus, and an injection nozzle 4 for spraying an abrasive material to a workpiece 3 is provided in an internal blasting chamber 2. The spray nozzle 4 has an abrasive cleaning material supply pipe 5 for supplying a cleaning material obtained by separating a used cleaning material and a gas to be treated containing foreign matter, and a pump for supplying pressurized air. The pressurized air supply pipe 6 is connected, and a mixed flow of air and the abrasive material is jetted toward the work 3 while sucking the abrasive material by a high-speed flow of pressurized air. A hopper 7 is provided below the work 3 to collect used abrasive material. The abrasive material collected in the discharge portion 8 at the bottom of the hopper 7 is removed through a foreign matter separating device 10 provided with a filter according to the present invention disposed on the way through a collecting pipe 9 to remove relatively large foreign matter. Suction is drawn through the inlet 12 of the cyclone 11. The gas to be treated including the used abrasive material sucked into the cyclone 11 removes relatively small foreign matter from the upper foreign matter removal port 13 and separates the intended abrasive material by the cyclone separating action. It is configured to be collected from the lower abrasive material recovery port 14 and circulated through the abrasive material supply pipe 5. In this embodiment, the relatively small foreign matter removed from the upper foreign matter removing port 13 is removed by the dust collector 15 in this embodiment, and the remaining gas is exhausted. Due to the suction action of the dust collector 15, the inside of the cyclone 11 and the inside of the foreign matter separation device 10 are in a slightly negative pressure state, and the gas to be processed is discharged from the discharge part 8 of the hopper 7 to the cyclone 11 via the foreign matter separation device 10. Will be sent.
[0008]
FIG. 2 is a longitudinal sectional view showing an embodiment of the foreign matter separating apparatus 10, FIG. 3 is a sectional view taken along the line AA, and FIGS. 4 and 5 are partially enlarged views of essential parts. In the foreign matter separation device 10 according to the present embodiment, the inflow side pipe connection portion 16 connecting the recovery pipe 9 connected to the discharge portion 8 of the hopper 7 is formed at a position eccentric from the center as shown in FIG. . The gas to be treated including the collected abrasive is swirled through an annular passage 19 formed between the cylindrical casing 17 and the filter 18 while leaving relatively large foreign matters that cannot pass through the filter 18. 2 and is fed to the cyclone 11 from the upper outlet shown in FIG. The relatively large foreign matter whose flow has been blocked by the filter 18 falls by its own weight and is stored in a foreign matter pool 22 formed at the lower portion of the casing 17. In the figure, reference numeral 23 denotes a frame of the filter 18, a mesh member constituting the filter is provided on the outer peripheral surface of the frame 23, and particles containing a polishing material smaller than the mesh are passed through the opening 24. 20. In the drawing, reference numeral 25 denotes an inlet for the gas to be treated connected to the passage 19, and reference numeral 26 denotes an outlet for the treated gas from which the foreign matter has been removed by the filter 18 and connected to the inside 20 of the filter 18.
[0009]
Next, features of the present invention will be described. As shown in the drawing, inside the filter 18, in this embodiment, two gas injection nozzles 27 and 28 for blowing out air are concentrically rotatable along the inner surface of the filter 18. As described above, the number of the jet nozzles 27 and 28 can be increased or decreased as necessary. As shown in FIGS. 4 and 5, the gas injection nozzles 27 and 28 have a large number of injection ports 29 and 30 that are directed outward toward the inner surface of the filter 18. The gas injection nozzles 27 and 28 are supported by a mounting arm 31 rotatably disposed below the gas injection nozzles 27, and connected to communication pipes 32 and 33 at lower ends thereof to rotatably support the mounting arm 31. The shaft 34 is connected to an external pressure air supply source 36 via an air supply passage 35 formed by using a hollow portion of the shaft 34. A pulley 37 is fixed below the rotating shaft 34, and is linked to a pulley 40 fixed to an output shaft 39 of a drive motor 38 capable of speed control by a belt 41, so that the pulley 37 is supported by the mounting arm 31 via the rotating shaft 34. The gas injection nozzles 27 and 28 are configured to be driven to rotate in the same direction as the direction of the swirling flow of the gas to be processed. In the figures, 42 and 43 are bearings for supporting the rotating shaft 34, 44 is a rotary joint, 45 is a flow control valve, and 46 is a foreign matter discharge section.
[0010]
During the operation of the foreign matter separating apparatus 10, the gas injection nozzles 27 and 28 are rotated by the drive motor 38 via the rotary shaft 34 in the same direction as the swirling flow of the gas to be processed. Accordingly, pressure air jetted from a large number of outwardly directed injection ports 29 and 30 formed on the rotatable gas injection nozzles 27 and 28 is sprayed on the inner surface of the filter 18, and passes through the mesh of the filter 18. And blow it out. The particles remaining on the outer surface of the filter 18 are blown off by the pressure air blown out of the filter 18 through the mesh, thereby preventing the particles from dropping and clogging. Is possible. Moreover, since the gas injection nozzles 27 and 28 are rotated in the same direction as the direction of the swirling flow of the gas to be processed, the turbulence of the swirling flow of the gas to be processed caused by the pressure air injected from the injection ports 29 and 30 is small. Can be suppressed.
[0011]
【The invention's effect】
According to the present invention, a gas injection nozzle having an outwardly directed injection port in a filter is provided rotatably concentrically along the surface of the filter, and rotates in the same direction as the direction of the swirling flow of the gas to be treated. As a result, particles remaining on the outer surface of the filter are prevented from being clogged by the gas blown out through the mesh of the filter and clogging is prevented. It is possible to maintain stable. In addition, since the gas injection nozzle is rotated in the same direction as the direction of the swirling flow of the gas to be processed, the disturbance of the swirling flow of the gas to be processed caused by the pressurized air injected from the injection port of the gas injection nozzle is also suppressed. Can be.
[Brief description of the drawings]
FIG. 1 is a schematic configuration diagram illustrating a system for circulating and using abrasive material in a blast device to which the present invention is applied.
FIG. 2 is a longitudinal sectional view showing an embodiment relating to a foreign matter separating device.
FIG. 3 is a sectional view taken along line AA in FIG. 2;
FIG. 4 is a partially enlarged view of a main part.
FIG. 5 is a partially enlarged view of a main part.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Blast apparatus, 2 ... Blast processing chamber, 3 ... Work, 4 ... Injection nozzle, 5 ... Polishing material supply pipe, 6 ... Pressurized air supply pipe, 7 ... Hopper, 8 ... Discharge part, 9 ... Recovery Pipe, 10: Foreign matter separator, 11: Cyclone, 12: Inlet, 13: Foreign matter removal port, 14: Abrasive material recovery port, 15: Dust collector, 16: Pipe connection, 17: Casing, 18: Filter, 19 ... Passageway, 20 inside, 21 pipe connection, 22 foreign matter pool, 23 frame, 24 opening, 25 inlet of gas to be treated, 26 outlet of treated gas, 27, 28 gas Injection nozzle, 29, 30 ... Injection port, 31 ... Mounting arm, 32, 33 ... Communication pipe, 34 ... Rotary shaft, 35 ... Air supply path, 36 ... Pressure air supply source, 37 ... Pulley, 38 ... Drive motor, 39 ... output shaft, 40 ... pulley, 41 ... belt, 42, 43 ... bearing 44 ... rotary joint, 45 ... flow control valve, 46 ... foreign matter discharge part

Claims (1)

接線方向から研掃材と異物とを含んだ被処理気体を流入する流入口と処理済気体を流出する流出口を有し、内部で旋回流を発生させるケーシングと、前記旋回流の中心部に設けられた筒状のフィルタとを具備し、前記フィルタによって被処理気体から異物を分離する研掃材循環使用システムにおける異物分離装置において、前記フィルタ内に外方に指向した噴射口を有する気体噴射ノズルを該フィルタに沿って回転可能に設け、被処理気体の旋回流の方向と同一方向に回転するように構成したことを特徴とする研掃材循環使用システムにおける異物分離装置。A casing for generating a swirling flow inside, having an inlet for inflowing the gas to be treated containing the abrasive and foreign matter from the tangential direction and an outlet for flowing out the treated gas, and a central portion of the swirling flow. A foreign matter separation device in an abrasive cleaning and circulating use system for separating foreign matter from a gas to be treated by the filter, the gas injection having an outwardly directed injection port in the filter. A foreign matter separating apparatus in a polishing material recycle use system, wherein a nozzle is rotatably provided along the filter so as to rotate in the same direction as the direction of the swirling flow of the gas to be treated.
JP2002341501A 2002-11-25 2002-11-25 Foreign material separator in abrasive material circulation system Expired - Fee Related JP4246481B2 (en)

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