JP2004165498A5 - - Google Patents
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- JP2004165498A5 JP2004165498A5 JP2002331072A JP2002331072A JP2004165498A5 JP 2004165498 A5 JP2004165498 A5 JP 2004165498A5 JP 2002331072 A JP2002331072 A JP 2002331072A JP 2002331072 A JP2002331072 A JP 2002331072A JP 2004165498 A5 JP2004165498 A5 JP 2004165498A5
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- JP
- Japan
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002331072A JP4459524B2 (ja) | 2002-11-14 | 2002-11-14 | 荷電粒子線露光装置、デバイス製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002331072A JP4459524B2 (ja) | 2002-11-14 | 2002-11-14 | 荷電粒子線露光装置、デバイス製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004165498A JP2004165498A (ja) | 2004-06-10 |
JP2004165498A5 true JP2004165498A5 (ja) | 2006-01-05 |
JP4459524B2 JP4459524B2 (ja) | 2010-04-28 |
Family
ID=32808565
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2002331072A Expired - Fee Related JP4459524B2 (ja) | 2002-11-14 | 2002-11-14 | 荷電粒子線露光装置、デバイス製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4459524B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2435348B (en) * | 2004-11-17 | 2009-06-24 | Ims Nanofabrication Ag | Pattern lock system for particle-beam exposure apparatus |
JP6293435B2 (ja) * | 2013-08-08 | 2018-03-14 | 株式会社ニューフレアテクノロジー | マルチ荷電粒子ビーム描画装置及びマルチ荷電粒子ビーム描画方法 |
JP6442295B2 (ja) * | 2015-01-19 | 2018-12-19 | 株式会社ニューフレアテクノロジー | マルチ荷電粒子ビーム像の回転角測定方法、マルチ荷電粒子ビーム像の回転角調整方法、及びマルチ荷電粒子ビーム描画装置 |
US11869746B2 (en) * | 2019-07-25 | 2024-01-09 | Nuflare Technology, Inc. | Multi-beam writing method and multi-beam writing apparatus |
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2002
- 2002-11-14 JP JP2002331072A patent/JP4459524B2/ja not_active Expired - Fee Related