JP2004151119A5 - - Google Patents
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- Publication number
- JP2004151119A5 JP2004151119A5 JP2003432567A JP2003432567A JP2004151119A5 JP 2004151119 A5 JP2004151119 A5 JP 2004151119A5 JP 2003432567 A JP2003432567 A JP 2003432567A JP 2003432567 A JP2003432567 A JP 2003432567A JP 2004151119 A5 JP2004151119 A5 JP 2004151119A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electron beam
- image
- electron
- defect inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000007547 defect Effects 0.000 claims 22
- 238000010894 electron beam technology Methods 0.000 claims 22
- 238000007689 inspection Methods 0.000 claims 13
- 238000001514 detection method Methods 0.000 claims 7
- 230000001678 irradiating effect Effects 0.000 claims 6
- 238000000926 separation method Methods 0.000 claims 6
- 230000003287 optical effect Effects 0.000 claims 5
- 238000010191 image analysis Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003432567A JP2004151119A (ja) | 2003-12-26 | 2003-12-26 | パターン欠陥検査方法および検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003432567A JP2004151119A (ja) | 2003-12-26 | 2003-12-26 | パターン欠陥検査方法および検査装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26950097A Division JP3534582B2 (ja) | 1997-10-02 | 1997-10-02 | パターン欠陥検査方法および検査装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004289636A Division JP4028864B2 (ja) | 2004-10-01 | 2004-10-01 | パターン欠陥検査方法および検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2004151119A JP2004151119A (ja) | 2004-05-27 |
| JP2004151119A5 true JP2004151119A5 (enExample) | 2005-05-26 |
Family
ID=32464113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003432567A Withdrawn JP2004151119A (ja) | 2003-12-26 | 2003-12-26 | パターン欠陥検査方法および検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2004151119A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4253576B2 (ja) | 2003-12-24 | 2009-04-15 | 株式会社日立ハイテクノロジーズ | パターン欠陥検査方法及び検査装置 |
-
2003
- 2003-12-26 JP JP2003432567A patent/JP2004151119A/ja not_active Withdrawn
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