JP2004150857A - Temperature characteristic measuring instrument for piezoelectric diaphragm - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To measure the temperature characteristics of a piezoelectric diaphragm simple body by changing peripheral environment temperature within a specific measuring temperature range. <P>SOLUTION: This temperature characteristic measuring instrument has a measuring space 2 for housing the piezoelectric diaphragm to measure the characteristics thereof, and a vacuuming means 3 for turning the measuring space into a vacuum atmosphere. A base table 41 for mounting the diaphragm thereon, a cover member 42, and a referential electronic component 44 with characteristics changing in compliance with the environment temperature, are provided within the measurement space. The base table has a measuring electrode formed for measuring the frequency of the diaphragm and a temperature adjustment means capable of arbitrarily adjusting temperature in the measuring space. The characteristics of the referential electronic component are measured, an environmental temperature corresponding to the characteristics as the measurement result is recognized as the environmental temperature of the diaphragm to be measured, and characteristic measuring operation on the diaphragm to be measured is executed in connection with the recognized environmental temperature. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a temperature characteristic measuring device used for measuring a characteristic change associated with an environmental temperature change of a piezoelectric vibrating plate incorporated in a quartz oscillator or the like.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, it is necessary to know in advance how characteristics of electronic components such as quartz resonators change due to temperature changes in the use environment. For example, in the case of a crystal oscillator, the resonance frequency and CI (crystal impedance) change according to the change in the environmental temperature. Therefore, it is necessary to measure the resonance frequency and CI at various environmental temperatures in advance.
[0003]
Heretofore, as an apparatus for measuring the frequency-temperature characteristics of a quartz oscillator in a vacuum atmosphere, there is an apparatus disclosed in Patent Document 1. This type of measuring apparatus measures the resonance frequency of a quartz oscillator in a measurement temperature range (for example, a range of −40 ° C. to 70 ° C.) with the temperature inside the measurement chamber set at −35 ° C. The resonance frequency under each temperature environment is measured while increasing the temperature in the measurement room.
[0004]
[Patent Document 1]
JP-A-11-14683
[Problems to be solved by the invention]
However, in the above measuring device, the piezoelectric vibrating plate is housed in a package, and the temperature characteristics of the finished product as a hermetically sealed quartz oscillator are measured. Confirmation of a defect due to only the piezoelectric vibrating plate, such as a deviation from the standard or a defect due to coupling with unnecessary vibration, can be performed only for a completed product as a hermetically sealed crystal resonator. That is, since characteristics cannot be evaluated as a single piezoelectric vibrating plate, various wastes such as assembly materials such as a package, a lead time required for assembling into a package, and labor costs required for assembly have occurred.
[0006]
The present invention has been made in view of such a point, it is possible to change the surrounding environmental temperature of the piezoelectric vibrating plate alone within a specific measurement temperature range, and to know the measurement result of the temperature characteristic at an early stage. An object of the present invention is to provide a more reliable piezoelectric vibrator without wasting since a piezoelectric vibrating plate having a desired temperature characteristic can be recognized.
[0007]
[Means for Solving the Problems]
Specifically, as set forth in claim 1, a temperature characteristic measuring device used for measuring a characteristic change of a piezoelectric vibrating plate with a change in environmental temperature, the piezoelectric vibrating plate being accommodated therein, There is a measurement space for measuring a characteristic change, and vacuuming means for making the inside of the measurement space a vacuum atmosphere. Inside the measurement space, a base on which the piezoelectric vibration plate is mounted, and a base A cover member for positioning the piezoelectric diaphragm, and a reference electronic component that is placed on the same base as the piezoelectric diaphragm to be measured and whose characteristics change according to the environmental temperature are provided. A measurement electrode for measuring the frequency of the piezoelectric diaphragm is formed on the base, and the base has a temperature adjustment means capable of arbitrarily adjusting the temperature in the measurement space. Measure the characteristics of the part and It is configured to recognize the environmental temperature corresponding to the characteristic as the environmental temperature of the piezoelectric diaphragm to be measured, and perform the characteristic measuring operation of the piezoelectric diaphragm to be measured in association with the recognized environmental temperature. And
[0008]
According to a second aspect of the present invention, in the temperature measuring apparatus for a piezoelectric vibrating plate according to the first aspect, the base having the temperature adjusting means is formed of a Peltier element.
[0009]
According to a third aspect of the present invention, in the temperature characteristic measuring apparatus for a piezoelectric vibrating plate according to any one of the first and second aspects, the reference electronic component is a piezoelectric vibrating plate of the same kind as the piezoelectric vibrating plate to be measured. It is a piezoelectric vibration device using a plate.
[0010]
Further, as set forth in claim 4, in the temperature characteristic measuring device for a piezoelectric vibrating plate according to any one of claims 1 to 3, the measurement electrode of the base is present on the cover member. It has a tapered arrangement hole formed toward a position, and the arrangement hole is configured to be detachable from the cover member.
[0011]
【The invention's effect】
As described above, according to the present invention, the frequency of the piezoelectric vibrating plate is measured while positioning the piezoelectric vibrating plate alone and the reference electronic component whose characteristics change according to the environmental temperature in the vacuum atmosphere on the cover member. The temperature inside the measurement space can be adjusted with high accuracy while preventing dew condensation, since it can be arbitrarily adjusted by the temperature adjustment means. The frequency temperature characteristics can be measured only by measuring the piezoelectric vibrating plate alone.
[0012]
In other words, it not only improves the reliability of the temperature characteristic measurement results of the piezoelectric diaphragm that is the measurement target, but also causes the piezoelectric diaphragm itself to have a problem such as a cutting angle deviation of the piezoelectric diaphragm or a failure due to coupling with unnecessary vibration. Problems can be prevented beforehand by recognizing the frequency temperature characteristics as a single piezoelectric vibration plate.
[0013]
Then, only the piezoelectric vibrating plate for which the desired temperature characteristic is recognized is assembled as a piezoelectric vibrator in a case body or the like, and a more reliable piezoelectric vibrator can be provided without waste.
[0014]
In particular, by using a reference electronic component whose characteristics change according to the environmental temperature, the environmental temperature is recognized without directly measuring the temperature of the measurement space. For this reason, the temperature characteristics of the piezoelectric vibration plate to be measured can be measured with high accuracy by adopting the reference electronic component having a high follow-up property change with respect to the temperature change.
[0015]
Further, when a Peltier element is employed as the temperature adjusting means, the temperature in the measurement space can be easily set to an arbitrary value, and the temperature can be easily set by using the base as a base. The size of the temperature characteristic measuring apparatus can be reduced by downsizing of the heat source and the cold heat source.
[0016]
When the reference electronic component uses the same type of piezoelectric diaphragm as the piezoelectric diaphragm to be measured, the temperature deviation in the measurement space is determined by recognizing the frequency deviation of the reference electronic component. Can be measured with high accuracy, and the temperature characteristics of the piezoelectric vibration plate to be measured can be measured with extremely high accuracy.
[0017]
Further, in this case, in the piezoelectric vibration device used as the reference electronic component, the frequency deviation is uniquely determined with respect to the environmental temperature, and the variation of the frequency deviation with respect to the variation of the environmental temperature is “zero frequency temperature”. It is desirable that the piezoelectric vibrating device having the characteristic of “coefficient” has a characteristic larger than the change amount thereof. The term "piezoelectric vibration device having the characteristic of" zero frequency temperature coefficient "as used herein means a characteristic in which the variation of the frequency deviation with respect to the variation of the environmental temperature becomes extremely small near a certain temperature (for example, 25 ° C.). In this case, the temperature coefficient when the characteristic is represented by a mathematical expression is “0”. An AT-cut quartz resonator having such characteristics is generally used. By adopting a reference electronic component having a large variation in the frequency deviation with respect to the variation in the environmental temperature as in the present solution, the temperature measurement in the measurement space by measuring the frequency deviation of the reference electronic component can be performed with high accuracy. You can do it.
[0018]
Further, as set forth in claim 4, the tapered arrangement hole allows positioning for guiding the piezoelectric vibration plate to the measurement electrode of the base. In addition, since the arrangement hole can be appropriately replaced according to the size of the piezoelectric vibration plate to be positioned and mounted, various sizes are available as compared with the case where the piezoelectric vibrator is stored in the case body. A configuration suitable for measuring the existing piezoelectric diaphragm alone can be obtained.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings. In this embodiment, a case will be described in which a quartz vibrating plate is applied as a piezoelectric vibrating plate whose temperature characteristic is to be measured.
[0020]
-Explanation of the configuration of the temperature characteristic measuring device-
As shown in FIG. 1, the temperature characteristic measuring apparatus 1 accommodates a quartz plate B, a vacuum vessel 2 as a measuring space for measuring a change in the characteristic, and makes the inside of the measuring space a vacuum atmosphere. The apparatus includes a vacuum pump 3 as evacuation means, and a measuring instrument 5 such as a network analyzer as output means connected to a measurement part 4 described later inside the vacuum vessel. Hereinafter, the measurement portion 4 inside the vacuum vessel will be described.
[0021]
The measuring portion 4 includes a base 41 on which the quartz plate B to be measured and a reference vibrator 44 described later can be mounted together, and a cover member 42 disposed on the upper surface of the base and positioning the piezoelectric vibrating plate. And a probe terminal 43 which is closely arranged at a predetermined interval above the quartz plate B as the object to be measured.
[0022]
The base 41 is formed of a flat Peltier element, and the temperature of the measuring portion 4 can be arbitrarily adjusted. On the upper surface of the base, a measurement electrode 411 that can be brought into contact with the crystal vibrating plate and a reference Connection terminal electrodes 412 and 413 that can contact external terminals of the vibrator are formed. The measurement electrode 411 is disposed to face the probe terminal 43, and is configured to apply a high-frequency signal (a predetermined high-frequency voltage or the like) therebetween. It is preferable that a heat sink (not shown) is provided on the lower surface of the base. The heat sink promotes heat radiation on the lower surface side of the base 41 as a Peltier element.
[0023]
The Peltier device is a device in which a plurality of junction pairs of a P-type semiconductor or an N-type semiconductor are connected in series between insulating heat transfer plates made of ceramic or the like (not shown). Are configured such that heat is generated on the other surface. Then, it is possible to switch between the heat absorbing surface and the heat generating surface by switching the direction of the current, and thereby it is possible to switch between the cooling and the heating of the upper portion of the base 41. The relationship between the voltage applied to the Peltier element and the temperature difference generated on the front and back surfaces is adjusted, for example, by adjusting the applied voltage in the range of 0 to 15 V, so that the temperature difference generated on the front and back surfaces is controlled within a range of 0 to 90 deg. It can be set to the value of. Thereby, the temperature of the upper surface of the base can be set to an arbitrary value in the range of −20 ° C. to + 70 ° C.
[0024]
The cover member 42 is made of an insulating material such as ceramic or high-molecular-weight polyethylene. The cover member 42 positions and stores the quartz plate to be measured, and also serves as an invitation to the position where the measurement electrode 411 of the base is formed. A tapered arrangement hole 421 and an arrangement hole 422 for positioning and storing the reference oscillator 44 as a reference electronic component are formed respectively. Of the arrangement holes, the arrangement hole 421 for the quartz plate to be measured, as shown in FIG. 3, constitutes a cover dividing member 423 detachably formed as a part from the cover member 42. Therefore, the cover dividing member 423 can be appropriately replaced according to the size of the quartz plate B to be positioned and mounted. In addition, although the shape of the arrangement hole 421 is a square shape in order to correspond to a rectangular quartz plate, there is no particular problem even if it is a circular shape, an elliptical shape, or the like.
[0025]
A vacuum pump 3 is connected to the vacuum container 2 containing these components, and the internal space of the vacuum container 2 is evacuated by driving the vacuum pump.
[0026]
Next, the connection state between the temperature characteristic measuring device 1 configured as described above and the measuring device 5 such as a network analyzer will be described. The probe terminal 43 and the measurement electrode 411 on the measurement target side of the temperature characteristic measuring apparatus 1 and the connection terminal electrodes 412 and 413 on the reference vibrator side are connected to the measuring instrument 5 via the switching unit 6 as an output switching means.
[0027]
The switching unit 6 has a state in which the probe terminal 43 on the measurement target side and the measurement electrode 411 are connected to the measuring instrument 5 as shown by a solid line in the figure, and a connection terminal electrode 412 on the reference oscillator side as shown by a broken line in the figure. , 413 to the measuring instrument 5 can be switched. By this switching operation, in the former case, the frequency characteristic of the quartz plate B to be measured is displayed on the measuring device 5, whereas in the latter case, the frequency characteristic of the reference vibrator 11 is displayed on the measuring device 5. Will be displayed.
[0028]
Note that the frequency of the quartz plate B to be measured is measured by bringing the probe terminal 43 close to or in contact with the quartz plate B, and transmitting a high-frequency signal (from the high-frequency signal generator 7) between the probe terminal and the measurement electrode 411. When a predetermined high-frequency voltage or the like is applied, and the output signal is received by the measuring instrument 5, the frequency characteristic of the quartz plate B to be measured is displayed on the measuring instrument 5.
[0029]
In the above-described temperature characteristic measuring apparatus, since the measuring device is used as the output means, it is possible to continuously monitor the state of the change in the resonance characteristic due to the temperature change of the quartz plate to be measured. In addition, by repeating the operation of storing the resonance waveform measured by the measuring device at each predetermined temperature as numerical data in the vicinity of the temperature point to be measured, the state of the continuous resonance waveform change due to the temperature change can be obtained. Can be recorded and confirmed. As a result, it is possible to acquire effective data when specifying a failure mode or the like.
[0030]
Next, the reference oscillator 44 will be described. In the case where the quartz plate B to be measured in this embodiment is an AT-cut quartz oscillator, an AT-cut quartz oscillator is also used as the reference oscillator 44, and has the same material and the same shape as the quartz plate to be measured. Is provided.
[0031]
As the reference oscillator 44, one having the following frequency-temperature characteristics is employed. As shown by a broken line in FIG. 2 (a diagram showing a relationship between an environmental temperature and a frequency deviation), an AT-cut quartz resonator generally used has an ambient temperature near a certain temperature (25 ° C. in FIG. 2). The characteristic is such that the variation of the frequency deviation with respect to the variation of the temperature is small. This is because when used near this temperature, the fluctuation of the frequency deviation is suppressed even when the environmental temperature changes to some extent, so that the crystal resonator maintains stable performance. On the other hand, as shown by the solid line in FIG. 2, the AT-cut crystal resonator employed as the reference resonator 44 has the above-described general variation in frequency deviation with respect to the variation in environmental temperature in any temperature range. Those having characteristics that are larger than those of AT-cut quartz resonators are used. In other words, the characteristic has a characteristic in which the value of the frequency deviation and the value of the environmental temperature uniquely correspond with high accuracy. The characteristics of the above-mentioned general AT-cut quartz resonator have a temperature coefficient of “0” when this characteristic is expressed by a mathematical expression, and are generally called as having a characteristic of “zero frequency temperature coefficient”. . On the other hand, the AT-cut crystal resonator used as the reference resonator 44 uses a crystal piece having a different cutting angle from the crystal piece used for the general AT-cut crystal resonator. Frequency characteristic is uniquely determined with respect to temperature, and is called a characteristic rotated counterclockwise (or in the CCW direction) with respect to a vibrator having zero frequency temperature coefficient characteristics. .
[0032]
By employing such a reference oscillator 44, the temperature above the base 41 can be measured with high accuracy by measuring the frequency deviation of the reference oscillator 44.
[0033]
As described above, the reference oscillator 44 is preferably of the same type as the quartz-crystal vibrating plate B to be measured (in each of the above-described embodiments, an AT-cut quartz-crystal oscillator). May be a child. For example, while the quartz crystal plate B to be measured is an AT-cut quartz-crystal oscillator, a tuning-fork-type quartz oscillator, a BT-cut quartz-crystal oscillator, or the like may be adopted as the reference oscillator 44.
[0034]
-Explanation of measurement operation by temperature characteristic measuring device 1-
Next, a description will be given of an operation of measuring the frequency-temperature characteristic of the quartz plate B by the temperature characteristic measuring device 1 configured as described above. In this embodiment, the measurement temperature range is −20 ° C. to + 70 ° C., and the temperature of the frequency temperature characteristic is started after the upper temperature of the base 41 is set to −20 ° C. in a vacuum atmosphere in the vacuum vessel. Next, a description will be given of a case in which the measurement of the frequency temperature characteristic of the crystal diaphragm B is sequentially performed up to + 70 ° C.
[0035]
First, the quartz vibrating plate B and the reference vibrator 44 are placed on the base 41, respectively. After this mounting, the inside of the vacuum vessel 2 is brought into a vacuum atmosphere by the vacuum pump 3. Further, the switching unit 6 is set in a state where the reference vibrator side is connected to the measuring device 5 as shown by a broken line in FIG. 1, and the frequency characteristics of the reference vibrator 44 are displayed on the measuring device 5.
[0036]
In this state, power is supplied to a Peltier element as the base 41 from a power supply control device (not shown) so that the upper surface thereof performs a heat absorbing operation and the lower surface thereof performs a heat releasing operation. Thereby, the upper part of the base 41 is cooled. In this case, the voltage applied to the Peltier element is a value at which the lower surface temperature becomes −20 ° C. With this cooling operation, the resonance frequency of the reference oscillator 44 changes. The state of this change is displayed on the measuring device 5.
[0037]
Then, when the frequency deviation of the reference oscillator 44 matches the value at the ambient temperature of −20 ° C., the measurement of the frequency temperature characteristic is started.
That is, as shown by the solid line in FIG. 1, the switching unit 6 is set in a state where the quartz plate to be measured is connected to the measuring instrument 5, and the probe terminal 43 is brought close to or in contact with the quartz plate B to A high-frequency signal (predetermined high-frequency voltage or the like) is applied between the probe terminal and the measurement electrode 411 from the signal generator 7, and the output signal is received by the measuring device 5, whereby the frequency characteristic of the quartz plate B to be measured is measured. Is displayed on the measuring instrument 5. Then, this state is stored in the storage device of the measuring instrument 5 or output.
[0038]
Thereafter, the switching unit 6 is switched again as shown by the broken line in FIG. 1 and a voltage at which the upper surface temperature becomes -18 ° C. is applied to the Peltier element (base 41). As a result, the temperature of the upper surface of the base rises, and the resonance frequency of the reference oscillator 44 changes accordingly. The state of this change is displayed on the measuring device 5.
[0039]
When the frequency deviation of the reference vibrator 44 matches the value at the ambient temperature of −18 ° C., the switching unit 6 is switched to the state shown by the solid line in FIG. 1 to change the frequency characteristic of the quartz plate B to be measured. The state is displayed on the measuring device 5, and this state is stored or output in the storage device of the measuring device 5.
[0040]
After that, the switching unit 6 is switched again as shown by the broken line in FIG. 1, and a voltage at which the lower surface temperature becomes -16 ° C. is applied to the Peltier element.
[0041]
The measurement of the frequency deviation of the reference vibrator 44 and the measurement of the frequency characteristics of the quartz vibrating plate accompanying the switching of the applied voltage to the Peltier element are performed alternately, and the temperature of the upper portion of the base 41 becomes + 70 ° C. The frequency characteristics of the quartz vibrating plate B are measured every 2 deg while gradually increasing the environmental temperature above the base.
When the environmental temperature of the upper part of the base is raised to room temperature or higher, the upper surface of the Peltier element performs a heat radiation operation and the lower surface performs a heat absorption operation. When the measurement of the frequency characteristics of the quartz vibrating plate B at + 70 ° C. is completed, the power supply to the Peltier element is stopped, the inside of the vacuum vessel is returned to the atmospheric pressure, the quartz vibrating plate B is taken out from the base 41, and the frequency temperature is measured. The characteristic measuring operation is completed.
[0042]
-Other embodiments-
In the above-described temperature characteristic measuring device, only the probe terminal 43 is in non-contact with the quartz plate B to be measured. More preferable characteristic measurement that does not hinder the vibration of. For example, in FIG. 4, an upper Peltier element 81 (corresponding to a cover member) and a lower Peltier element 82 (base) are arranged in the measurement portion, and measurement electrodes 811 and 821 are provided on the opposing surface of each Peltier element. Quartz diaphragm holding spacers 812, 812, 822, and 823 are formed. When the quartz plate B is measured at this measurement portion, the quartz crystal plate holding spacer is sandwiched between the ends of the quartz plate in the up and down direction, and the measuring electrodes are used to transmit a high frequency signal from the up and down direction of the central portion of the quartz plate. Since the voltage is applied, the frequency can be measured in a non-contact state at the central portion of the quartz vibrating plate.
[0043]
In the above embodiment, the temperature of the upper portion of the base is once decreased to the lower limit of the measurement temperature range, and then the temperature characteristics are measured while increasing the temperature of the upper portion of the base. After the temperature of the upper portion of the base is once increased to the upper limit value of the measurement temperature range, the temperature characteristic may be measured while lowering the temperature of the upper portion of the base. In order to further improve the accuracy of the temperature characteristic measurement, it is preferable to measure the temperature characteristics by both of these operations. Further, the measurement temperature range is not limited to the above-described range.
[0044]
Furthermore, in the above-described embodiment, a Peltier element was used as a means for adjusting the temperature of the upper portion of the base. However, the present invention is not limited to this, and a separate cooling source and a heating source are provided. The temperature of the upper part of the base may be adjusted by the operation described above. However, it is most preferable to employ the above-mentioned Peltier element in order to reduce the size of the entire apparatus.
[0045]
Further, in the above embodiment, the connection state between the reference oscillator 44 and the quartz plate B is switched by the switching unit 6 for one measuring instrument 5. May be connected to a measuring instrument. According to this, the resonance frequency of the crystal diaphragm B can be constantly monitored.
[0046]
In the above embodiment, the case where the crystal resonator is applied as the electronic component whose temperature characteristic is to be measured has been described. The present invention is not limited to this, and can be applied to temperature characteristic measurement of various electronic components such as a crystal filter and an IC.
[Brief description of the drawings]
FIG. 1 is a diagram showing a schematic configuration of a temperature characteristic measuring device according to the present invention.
FIG. 2 is a graph showing a relationship between an ambient temperature and a frequency deviation in an AT-cut quartz resonator, wherein a characteristic of a general AT-cut quartz resonator is indicated by a broken line, and an AT-cut quartz resonator adopted as a reference resonator. It is a figure which shows the characteristic of a child with a solid line, respectively.
FIG. 3 is a perspective view of a base and a cover member in the temperature characteristic measuring device according to the present invention.
FIG. 4 is a cross-sectional view showing a measurement portion of another temperature characteristic measurement device of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Temperature characteristic measuring device 2 Vacuum container 3 Vacuum pump 4 Measurement part 41 Base (Peltier element)
42 cover member 43 probe terminal 44 reference oscillator (reference electronic component)
5 Measuring instrument 6 Switching unit (output switching means)
7 High-frequency signal generator B Quartz resonator (measurement target)

Claims (4)

A temperature characteristic measuring device used for measuring a characteristic change of a piezoelectric diaphragm accompanying a change in an environmental temperature,
There is a measurement space for accommodating the piezoelectric vibration plate and measuring a change in the characteristics thereof, and a vacuuming means for making the inside of the measurement space a vacuum atmosphere.
Inside the measurement space, a base on which the piezoelectric diaphragm is mounted, a cover member arranged on the upper surface of the base and positioning the piezoelectric diaphragm, and a base similar to the piezoelectric diaphragm to be measured. There is a reference electronic component that is placed and whose characteristics change according to the environmental temperature,
A measurement electrode for measuring the frequency of the piezoelectric diaphragm is formed on the base, and the base has a temperature adjustment unit that can arbitrarily adjust the temperature in the measurement space,
Measure the characteristics of the reference electronic component, recognize the environmental temperature corresponding to the characteristic that is the measurement result as the environmental temperature of the piezoelectric diaphragm to be measured, and associate the characteristic with the recognized environmental temperature to determine the characteristic of the piezoelectric diaphragm to be measured. An apparatus for measuring a temperature characteristic of a piezoelectric vibrating plate, wherein the apparatus is configured to execute a measuring operation. The apparatus for measuring temperature characteristics of a piezoelectric diaphragm according to claim 1,
A temperature characteristic measuring device for an electronic component, wherein the base having the temperature adjusting means comprises a Peltier element. The temperature characteristic measuring device for a piezoelectric vibrating plate according to any one of claims 1 and 2,
The reference electronic component is a piezoelectric vibration device using the same type of piezoelectric vibration plate as the above-mentioned piezoelectric vibration plate to be measured. The temperature characteristic measuring device for a piezoelectric diaphragm according to any one of claims 1 to 3,
The cover member has a tapered arrangement hole formed toward a position where the measurement electrode of the base exists, and the arrangement hole is configured to be detachable from the cover member. A temperature characteristic measuring device for a piezoelectric vibrating plate.

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