JP2004139889A

JP2004139889A - Excimer discharge lamp

Info

Publication number: JP2004139889A
Application number: JP2002304707A
Authority: JP
Inventors: Kenichi Hirose; 廣瀬　賢一
Original assignee: Ushio Denki KK; Ushio Inc
Current assignee: Ushio Denki KK; Ushio Inc
Priority date: 2002-10-18
Filing date: 2002-10-18
Publication date: 2004-05-13
Anticipated expiration: 2022-10-18
Also published as: TWI272637B; KR100720239B1; JP4029715B2; KR20040034392A; TW200406804A

Abstract

<P>PROBLEM TO BE SOLVED: To provide an excimer discharge lamp of which approximately cylindrical-shaped outer vessel and inner vessel are coaxially arranged, having a structure preventing breakage of discharge vessel during transportation. <P>SOLUTION: In the excimer discharge lamp, approximately cylindrical-shaped outer and inner vessels are arranged coaxially and discharge gas forming excimer molecules is enclosed between them. Both ends of the vessels are sealed to form a hollow cylinder. Supporting members are prepared between the inner and outer vessels around the center of the length direction of the discharge vessel. <P>COPYRIGHT: (C)2004,JPO

Description

【０００１】
【発明の属する技術分野】
本発明は外形が概略円筒状である外側管と内側管とを同軸に配置して、該外側管と内側管の間にエキシマ分子を形成する放電用ガスが封入され両端が封じられた中空円筒状の放電容器を備えたエキシマ放電ランプに関し、特に該エキシマ放電ランプの搬送時の放電容器割れを防止した構造に関する。
【０００２】
【従来の技術】
液晶基板パネルの大画面化に伴い、液晶基板の紫外線処理に供される放電ランプの長尺化が望まれるようになってきている。近年、液晶基板の光洗浄など紫外線処理用途にはエキシマ分子の発光を利用し、高効率で単一波長の紫外線を放射する、例えば特開平１０−２８３９９４号公報に示されるようなエキシマ放電ランプが使用されるようになってきている。
【０００３】
エキシマ放電ランプにおいては、全長が８００ｍｍを超えるもの、例えば１０００ｍｍのものもある。図１は従来のエキシマ放電ランプの概略断面図である。放電ランプ１は内側管２１と外側管２２が同軸に配置して二重円筒管を構成するとともに、両端を閉じたことから内側管２１と外側管２２の間に放電空間３が形成された放電容器２となる。放電空間３には誘電体バリア放電によってエキシマ分子を形成するとともに、このエキシマ分子からエキシマ光を放射するための放電ガス、例えばキセノンガスが封入されている。
【０００４】
外側管２２の外面には網状電極８が設けられ、内側管２１の内部に他方の電極である内側電極７が設けられる。網状電極８はシームレスに構成され、全体として伸縮性を有することから外側管２２への密着性を良くすることができる。内側電極７はパイプ状、あるいは断面において一部に切り欠きを有する概略Ｃ字状のものであり内側管２１に密着するように設けられる。
【０００５】
このような管軸方向の全長の長い放電ランプを、ダンボール等の梱包容器で概略水平に梱包してトラックなどで搬送した場合、ランプに与えられる大きな衝撃や振動で放電容器が割れるという不具合が起る場合があった。割れる場所は、図２に示すように両端部の内側管２１と外側管２２をシール（溶着）している側壁部２３やその近傍であった。割れる原因は以下のように考えられる。
【０００６】
衝撃がかかると外側管部は梱包材に固定されているために殆ど変形しないが、内側管部は両端で支持されており、中央部が撓む。撓みは管に応力を発生させる、と同時に両端の溶着している部位にも応力を発生させる。
【０００７】
両端の側壁部２３にかかる応力の方が、内側管２１自体にかかる応力より高いので、内側管２１自身より先に両端側壁部付近、特に内側管２１との接続部付近が破損するものと推測される。振動についても同様であり、さらにある周波数の振動がかかると、小さな振動でも内側管２１が両端を支点に共振して中央部が上下に変位（撓み）破損するものと推定される。
【０００８】
【特許文献１】
特開平１０−２８３９９４号公報
【０００９】
【発明が解決しようとする課題】
そこで本発明の目的は、概略ランプ管軸に垂直に衝撃や振動が加わった場合に、放電容器の破損を抑える構造を有する、外形が概略円筒状である外側管と内側管とを同軸に配置して該外側管と内側管の間にエキシマ分子を形成する放電用ガスが封入され両端が封じられた中空円筒状の放電容器を備えた、エキシマ放電ランプを提供することにある。
【００１０】
【課題を解決するための手段】
上記課題を解決するために、請求項１の発明は、外形が概略円筒状である外側管と内側管とを同軸に配置して、該外側管と該内側管の間にエキシマ分子を形成する放電用ガスが封入され両端が封じられた中空円筒状の放電容器を備えたエキシマ放電ランプであって、該内側管と該外側管の間に支持部材を前記放電容器の長さ方向で中央近傍に設けたことを特徴とするエキシマ放電ランプとする。
【００１１】
本発明において放電容器の長さ方向で中央近傍とは放電容器端部から容器全長の１／４長さよりも中央寄りのことをいう。
【００１２】
請求項２の発明は、前記支持部材を前記内側管および／または前記外側管と固定したことを特徴とする請求項１に記載のエキシマ放電ランプとする。
【００１３】
請求項３の発明は、前記支持部材を前記放電容器の管軸方向に移動可能としたことを特徴とする請求項１に記載のエキシマ放電ランプとする。
【００１４】
請求項４の発明は、前記支持部材は放電容器の外部に設けた保持部材の移動をすることで管軸方向に移動可能にしたことを特徴とする請求項３に記載のエキシマ放電ランプとする。
【００１５】
請求項５の発明は、前記支持部材の少なくとも一部および前記保持部材の少なくとも一部が磁力を有する材料からなっていることを特徴とする請求項４に記載のエキシマ放電ランプとする。
【００１６】
請求項６の発明は、前記支持部材の少なくとも一部が磁力を有する材料からなり、前記保持部材の少なくとも一部が強磁性体からなっていることを特徴とする請求項４に記載のエキシマ放電ランプとする。
【００１７】
請求項７の発明は、前記支持部材の少なくとも一部が強磁性体からなり、前記保持部材の少なくとも一部が磁力を有する材料からなっていることを特徴とする請求項４に記載のエキシマ放電ランプとする。
【００１８】
請求項８の発明は、前記支持部材が複数あり、該支持部材の少なくとも一つを中央近傍に設けることを特徴とする請求項１乃至請求項４に記載のエキシマ放電ランプとする。
【００１９】
【発明の実施の形態】
本発明における第１の実施例として図３（ａ）にエキシマ放電ランプ用の放電容器２の構造を示す。全長は例えば１０００ｍｍの放電容器である。
図３（ａ）では、放電容器２の中央部付近に支持部材４を挿入した。支持部材４は石英ガラス製で図３（ｃ）に示すようドーナツ状の円板形状をしたものを用いた。厚さは２ｍｍである。支持部材４は、輸送中の振動や衝撃、また放電容器２を垂直方向に傾けるときに管軸方向に移動しないように、放電容器２と溶着し固定した。具体的には、図３（ｂ）に示すように内側管２１と外側管２２に溶着させた。
【００２０】
支持部材４の固定方法について説明する。内側管２１と支持部材４の接合は、外側管２２との封止前に行う。まず内側管２１となるガラス管に支持部材４を固定位置まで通す。内側管２１を旋盤などで回転させながら支持部材４の両側から支持部材４と内側管２１の接触部を加熱し、内側管２１の中の圧力を少しずつ上げていくと、内側管２１は径方向に均一に広がり、支持部材４の外周は内側管２１と同軸上に固定される。
【００２１】
外側管２２と支持部材４の接合は、外側管２２と内側管２１を封止した後に行う。封止した放電容器２を旋盤などで回転させながら、支持部材４の真上の外側管を加熱する。ガラスがやわらかくなった時点で、少しずつ径方向に外側管２２を押さえと、外側管２２と固定される。また、放電空間部分を少し減圧状態にして旋盤を回転させながら加熱することだけでも外側管２２は均一に径が小さくなり、支持部材４は外側管２２と固定される。
【００２２】
このように放電容器２の中央部付近に支持部材４を固定することで、支点間の距離が短くなり、同じ衝撃が加わっても内側管２１の撓み量は大幅に減少する。したがって、両端の側板にかかる応力も大幅に減り、破損しにくくなる。
【００２３】
この実施例では支持部材４に図３（ｃ）のような構造のものを用いた。内側管２１と外側管２２を溶着すると放電容器２は支持部材４によって二つに仕切られるため、２度のガス封入工程が必要になる。しかし、図４（ａ）、図４（ｂ）のように支持部材４に穴４１や切れ込み４２を入れることで、放電ランプの製造工程において支持部材を挟んで両方の放電空間のガス流通が可能となり一度のガス封入工程で済む。
【００２４】
図５に本発明における第２の実施例としての放電容器の構造を示す。図５（ａ）は、前記第１実施例の放電容器において、支持部材４の固定を内側管２１だけに行ったものである。固定方法は前記第１実施例に記したものと同じである。衝撃が加わると内側管２１が撓み、放電容器中央部の支持部材４である円板付近が最も撓む。支持部材４が外側管２２と接触するまでは、両端部側壁を支点にして内側管２１が撓むが、外側管２２と接触すると、両端部側壁と支持部材４の３点が支点になるので、それ以上は撓みにくくなる。
【００２５】
図６は横軸に放電容器に加わる衝撃値、縦軸にそのとき端部に発生する応力を模式的に示したの一例である。図１のような従来の両端側壁部のみの放電容器では、衝撃値が高くなるに従い放電容器端部に発生する応力は増えつづけ、破壊応力に達する（ア）のようなグラフになると考えられる。
【００２６】
実施例１の放電容器では支持部材４があることにより支点間の距離が短いため撓みも小さく、発生する応力も小さくなる（ウ）のようなグラフになると考えられる。本実施例の内側管２１に支えを固定した場合は、衝撃値を高くしていくと、支持部材が外側管と接触するまでは、従来と同じ応力が生じるが、その衝撃値をこえると支点間隔が短くなり、撓み量の変化量が減る。例えば図５（ａ）の形態では、応力の変化量、すなわち傾きが小さく（イ）のようなグラフになると考えられる。
【００２７】
図５（ａ）の形態において、固定された支持部材４と外側管２２との隙間は極力狭い方がよい。隙間が広いと強い衝撃がかかると内側管２１は大きく撓み発生する応力が大きくなり（エ）のようなグラフになると考えられる。そのため隙間の間隔によっては両端部が破損する場合がある。また、支持部材４と外側管２２との衝撃が大きくなることで、固定部の破損、支持部材４自身の破損、内側管２１自身の破損になり、他の不具合も発生しやすくなる。反対に、図５（ａ）の形態において、間隔が狭い場合、弱い衝撃でも外側管と接触するので、撓み量が小さくなり両端部で発生する応力は小さくなり（オ）のようなグラフになると考えられる。
【００２８】
また、外側管２２又は内側管２１と支持部材４は極力同軸上に固定することが望ましい。固定後、支持部材４と外側管２２又は内側管２１との距離がばらつくので、ある径の方向に衝撃が加わった場合には内側管２１は撓まないが、ある径の方向では撓みが大きくなりすぎて、支持部材４の役目を果たさなくなり、放電容器２が破損することがある。
【００２９】
支持部材４と内側管２１や外側管２２とは必ずしも溶着固定されていなくても良い。この支持部材４は、決められた位置（軸方向）において内側管２１の変位量がある一定値以下にすることが目的であるため、図５（ｃ），（ｄ）のように内側管２１に突起４３を設けたり、内側管２１を変形させたりして、支持部材４が左右（軸方向）に移動しないようにしておいてもよい。
【００３０】
図５（ｂ）のように、支持部材４を外側管２２だけ溶着した場合も同様のメカニズムで破損しにくくなる。
【００３１】
実施例１、実施例２における支持部材４を設ける位置の放電容器２の中央部付近とは、必ずしも放電容器２の両端側壁の１／２の距離である必要はない。放電容器２の全長を４等分した時の中央の２／４分の範囲であればよい。または、３等分したときの１／３分の範囲などでもよい。両端で固定された内側管２１の撓みは中央（１／２の距離）が一番良く撓む。したがって、中央に支持部材４を設けると効果が大きい。
【００３２】
しかし、放電容器の管径、肉厚、支点間の間隔、支持部材を内側管又は外側管に設けた場合の他方の管との隙間などによって、上記の範囲で支持部材を管軸方向に移動させても破損しない範囲がある。支持部材を設けると支持部材の厚さの範囲は放電プラズマがなくなる。
【００３３】
したがって、支持部材の厚さによるが軸上の照度分布が悪くなる。例えば光透過性の石英ガラスからなる厚さ２ｍｍの支持部材を設けた場合、ランプから約２０ｍｍ離れた点で、５％出力が低下した。４ｍｍの場合９％出力が低下した。要求される光源の特性によって、中央に出力低下部を設けたくない場合は、中央から移動させて固定することが可能である。
【００３４】
さらにランプ長が長くなった場合などでは、中央に１点の支持部材を設けただけで支点間の距離が十分短くなく、破損することがある。この場合、例えば３点、５点と複数の支点を設けることで更に長いランプでも破損しないランプを作ることができる。図７は３点の支持部材を設けた例である。
【００３５】
第３の実施例を図８に示す。前述のように厚さ２ｍｍの光透過性の支持部材４を設けた場合、ランプから約２０ｍｍ離れた点で５％出力が低下した。この照度低下を無くするために、図８（ａ）のように輸送中は支持部材４を中央部に配置し、点灯中は端部（４´の位置）に移動させる構造にした。
【００３６】
具体的には、次のような構造にした。支持部材は内側管に通しただけで固定はしていない。支持部材を配置する位置には内側管に突起５を設け、図８（ａ）の軸方向の右側を上、左側を下に傾斜させることで支持部材を移動させ、突起５に引っ掛けることで中央部付近に配置する（図８（ｂ））。
【００３７】
そして、輸送中は軸方向右側を上、左側を下になるように傾斜させたまま梱包することで支持部材を配置し、輸送中の振動によって支持部材は端部に移動することはなく、大きな衝撃が加わっても支持部材と外側管が接触して撓みを抑え、破損を防止する。ランプを点灯する場合は一度軸方向右側を下、左側を上に傾斜させて支持部材を有効発光部の外の端部に移動させた後、装置に装着する。点灯中に支持部材は放電空間から外れた場所にある（図８（ａ））ために、ランプ軸方向で均一に放電し、照度低下はない。
【００３８】
中央部付近は図８（ｃ）のようになる。突起５は支持部材４が乗り越えて移動しなければ良いので、高さ１ｍｍ程度であり、点灯中の放電安定性にはほとんど影響しない。材質は内側管２１に石英ガラスを用いた場合には、同じ石英ガラス片等を溶着しても良い。また、金属線等を巻きつけても良い。
【００３９】
支持部材４は光透過性の石英ガラスやサファイア、ＭｇＦ_２などを用いても良いし、不透明であるアルミナ（Ａｌ_２Ｏ_３）やステンレスなどの金属板を用いても良い。
【００４０】
第４の実施例を図９に示す。この実施例も第３の実施例と同様に第１，２の実施例の照度分布を改善するものである。図９（ａ）のように輸送中は支持部材を中央部に配置し、点灯中は端部に移動させる構造にし、磁力によって移動、また保持を行った。図中４´は端部に移動させたときの支持部材を表す。
【００４１】
図９（ｂ）は、輸送時に中央付近に支持部材を保持したときの様子である。支持部材４の一部には強磁性体９を固定した。具体的には、図１０（ａ）に示したように石英ガラス製の支持部材４に穴４１を空け、強磁性体９であるニッケル線を巻きつけた。そして、外側管２２の外に保持材６（永久磁石）を配置して、支持部材４を保持した。保持材６は放電容器２又はランプの中央付近に梱包材と一緒に水平に梱包される。
【００４２】
輸送中の振動や衝撃が加わっても、支持部材は磁力によって保持されるので中央部付近から移動せず、また内側管が撓んでも支持部材が外側管と接触することで、放電容器は破損しない。ランプを点灯させる場合は、保持部材の磁力を使って放電空間から外れた場所の移動させたり、磁石を外した後、ランプを傾斜させて支持部材を放電空間から外れた場所に移動させ、その位置で再度磁力によって保持する。保持材は図示していないベースの一部にはめ込むように固定することで、ランプ点灯中も支持部材を保持することができる。中央部付近は図９（ｃ）のように何もないので、照度分布の低下はない。
【００４３】
支持部材４と保持材６は磁力によって保持することができればよいので、種々の形態が考えられる。▲１▼少なくとも支持部材の一部、保持材の一部の両方が磁力を有する材料でできている場合，▲２▼少なくとも支持部材の一部が磁力を有する材料でできていて、少なくとも保持材の一部が強磁性体でできている場合，▲３▼反対に、少なくとも支持部材の一部が強磁性体でできていて、少なくとも保持材の一部が磁力を有する材料でできている場合がある。
【００４４】
具体的な形状としては、支持部材４、保持材６全体を磁力を有する材料や強磁性体で作ったり、前述のように、石英ガラス製の部材に穴を空けてワイヤーを通したり（図１０（ａ））、支持部材４として強磁性体９を石英ガラス１０で覆う構造にしたり（図１０（ｂ））、石英ガラスと磁力を有する材料や強磁性体の混合した焼結体などであっても良い。当然、石英ガラスは別の誘電体材料であっても良い。
【００４５】
磁力を有する材料としては、永久磁石が考えられ、フェライト磁石、サマリウムコバルト磁石、アルニコ磁石が考えられる。表面の磁束密度が高い方が保持力が高く、支持部材を強固に固定することができ、望ましい。強磁性材料としては、鉄、ニッケル、ケイ素鋼、パーマロイ、商品名でアルパーム・アルフェ・センダスト・パーミンバー・イソパームなどの鉄系合金でも良い。
【００４６】
全長６００，８００，１０００，１２００，１４００，１６００，１８００，２０００ｍｍの放電容器を緩衝材とダンボールで二重に梱包した梱包容器で、高さ６０ｃｍからコンクリートの地面に落下させて割れるかどうかの比較を行った。結果を図１１の表に示す。従来の図１のランプでは、全長１０００ｍｍの放電容器で割れる放電容器が２本出た。それ以上の長さの放電容器では全数が割れた。しかし、支持部材を設けた図３，図５（ａ），図８，図９のランプでは、長さ１６００ｍｍの放電容器でも割れなかった。さらに図７のランプ（支持部材を３箇所入れた）では長さ２０００ｍｍの放電容器でも割れなかった。
【００４７】
【発明の効果】
本発明によれば、放電容器の中央部近傍に内側管と外側管の間に支持部材を入れることによって、衝撃、振動によって内側管が撓もうとする力を、支持部材に分散させることで、内側管の撓み量を抑えることができ、エキシマ放電ランプ用放電容器やエキシマ放電ランプの両端部に発生する応力を抑え、放電容器の端部からの破損を抑えることができる。また、撓み量をある一定値以下に抑えることで放電容器の破損を防ぐことができる。
【図面の簡単な説明】
【図１】従来のエキシマ放電ランプの概略断面図である。
【図２】従来のエキシマ放電ランプの破損部位を示す図である。
【図３】本発明のエキシマ放電ランプの放電容器の構造例である。
【図４】本発明に供される支持部材の構造例である。
【図５】本発明に供される支持部材の種々の固定例を示す。
【図６】ランプに与える衝撃値と端部の応力の関係を示す。
【図７】本発明のエキシマ放電ランプの放電容器の構造例である。
【図８】本発明のエキシマ放電ランプの放電容器の構造例である。
【図９】本発明のエキシマ放電ランプの放電容器の構造例である。
【図１０】本発明に供される支持部材の例を示す。
【図１１】本発明の効果を落下試験の結果で示した表である。
【符号の説明】
１　エキシマ放電ランプ
２　放電容器
３　放電空間
４、４´　支持部材
５　支持部材止め
６　保持材
７　内部電極
８　外部電極
９　強磁性体
１０　石英ガラス
２１　内側管
２２　外側管
２３　側壁部
４１　穴
４２　切れ込み
４３　突起[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention provides a hollow cylinder in which an outer tube and an inner tube each having a substantially cylindrical outer shape are arranged coaxially, and a discharge gas forming excimer molecules is sealed between the outer tube and the inner tube and both ends are sealed. TECHNICAL FIELD The present invention relates to an excimer discharge lamp having a discharge vessel in a shape of, and more particularly, to a structure for preventing the discharge vessel from cracking when the excimer discharge lamp is transported.
[0002]
[Prior art]
With an increase in the screen size of the liquid crystal substrate panel, a longer discharge lamp for ultraviolet treatment of the liquid crystal substrate has been desired. In recent years, an excimer discharge lamp as disclosed in Japanese Patent Application Laid-Open No. 10-283994, which emits a single-wavelength ultraviolet ray with high efficiency by utilizing the light emission of excimer molecules for ultraviolet treatment such as light cleaning of a liquid crystal substrate, is used. Is being used.
[0003]
Some excimer discharge lamps have a total length exceeding 800 mm, for example, 1000 mm. FIG. 1 is a schematic sectional view of a conventional excimer discharge lamp. The discharge lamp 1 forms a double cylindrical tube in which an inner tube 21 and an outer tube 22 are coaxially arranged, and a discharge space 3 is formed between the inner tube 21 and the outer tube 22 because both ends are closed. Container 2 is obtained. In the discharge space 3, excimer molecules are formed by dielectric barrier discharge, and a discharge gas, for example, xenon gas, for emitting excimer light from the excimer molecules is sealed.
[0004]
The mesh electrode 8 is provided on the outer surface of the outer tube 22, and the inner electrode 7, which is the other electrode, is provided inside the inner tube 21. The reticulated electrode 8 is formed seamlessly and has elasticity as a whole, so that the adhesion to the outer tube 22 can be improved. The inner electrode 7 has a pipe shape or a substantially C-shape having a cutout in a section, and is provided so as to be in close contact with the inner tube 21.
[0005]
When such a discharge lamp having a long overall length in the tube axis direction is roughly horizontally packed in a packing container such as a cardboard and transported by a truck or the like, there is a problem that the discharge container is broken by a large shock or vibration given to the lamp. There was a case. As shown in FIG. 2, the cracked portion was the side wall portion 23 that seals (welded) the inner tube 21 and the outer tube 22 at both ends and the vicinity thereof. The cause of the crack is considered as follows.
[0006]
When an impact is applied, the outer tube portion is hardly deformed because it is fixed to the packing material, but the inner tube portion is supported at both ends and the center portion is bent. The flexure causes stress in the tube, as well as in the welded portions at both ends.
[0007]
Since the stress applied to the side wall portions 23 at both ends is higher than the stress applied to the inner tube 21 itself, it is presumed that the vicinity of the both end side wall portions, particularly the vicinity of the connection portion with the inner tube 21 is broken before the inner tube 21 itself. Is done. The same applies to the vibration. When a vibration of a certain frequency is further applied, it is presumed that even a small vibration causes the inner tube 21 to resonate around the both ends as a fulcrum and the center portion to be vertically displaced (bent) and damaged.
[0008]
[Patent Document 1]
JP-A-10-283994
[Problems to be solved by the invention]
Accordingly, an object of the present invention is to arrange a coaxially arranged outer tube and an inner tube that have a substantially cylindrical outer shape and have a structure that suppresses damage to the discharge vessel when shock or vibration is applied perpendicularly to the lamp tube axis. Another object of the present invention is to provide an excimer discharge lamp including a hollow cylindrical discharge vessel in which a discharge gas for forming excimer molecules is sealed between the outer tube and the inner tube and whose both ends are sealed.
[0010]
[Means for Solving the Problems]
In order to solve the above-mentioned problem, the invention according to claim 1 arranges an outer tube and an inner tube, each of which has a substantially cylindrical outer shape, coaxially, and forms excimer molecules between the outer tube and the inner tube. An excimer discharge lamp including a hollow cylindrical discharge vessel in which a discharge gas is sealed and both ends of which are sealed, wherein a support member is provided between the inner tube and the outer tube near a center in a length direction of the discharge vessel. An excimer discharge lamp is provided.
[0011]
In the present invention, the vicinity of the center in the length direction of the discharge vessel means a position closer to the center than a quarter of the entire length of the vessel from the end of the discharge vessel.
[0012]
According to a second aspect of the present invention, there is provided the excimer discharge lamp according to the first aspect, wherein the support member is fixed to the inner tube and / or the outer tube.
[0013]
The invention according to claim 3 is the excimer discharge lamp according to claim 1, wherein the support member is movable in a tube axis direction of the discharge vessel.
[0014]
The invention according to claim 4 is the excimer discharge lamp according to claim 3, wherein the supporting member is movable in a tube axis direction by moving a holding member provided outside the discharge vessel. .
[0015]
The invention according to claim 5 is the excimer discharge lamp according to claim 4, wherein at least a part of the support member and at least a part of the holding member are made of a material having magnetic force.
[0016]
The excimer discharge according to claim 4, wherein at least a part of the supporting member is made of a material having a magnetic force, and at least a part of the holding member is made of a ferromagnetic material. Lamp.
[0017]
The excimer discharge according to claim 4, wherein at least a part of the supporting member is made of a ferromagnetic material, and at least a part of the holding member is made of a material having a magnetic force. Lamp.
[0018]
The invention according to claim 8 is the excimer discharge lamp according to any one of claims 1 to 4, wherein there are a plurality of the support members, and at least one of the support members is provided near the center.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 3A shows the structure of a discharge vessel 2 for an excimer discharge lamp as a first embodiment of the present invention. The discharge vessel has a total length of, for example, 1000 mm.
In FIG. 3A, the support member 4 is inserted near the center of the discharge vessel 2. The supporting member 4 was made of quartz glass and had a donut-shaped disk shape as shown in FIG. The thickness is 2 mm. The supporting member 4 was welded and fixed to the discharge vessel 2 so as not to move in the tube axis direction when the discharge vessel 2 was tilted in the vertical direction due to vibration or impact during transportation. Specifically, as shown in FIG. 3 (b), they were welded to the inner tube 21 and the outer tube 22.
[0020]
A method for fixing the support member 4 will be described. The joining of the inner tube 21 and the support member 4 is performed before the outer tube 22 is sealed. First, the support member 4 is passed through the glass tube serving as the inner tube 21 to a fixed position. When the contact portion between the support member 4 and the inner pipe 21 is heated from both sides of the support member 4 while rotating the inner pipe 21 with a lathe or the like, and the pressure in the inner pipe 21 is gradually increased, the inner pipe 21 has a diameter. The outer periphery of the support member 4 is fixed coaxially with the inner tube 21.
[0021]
The joining of the outer tube 22 and the support member 4 is performed after the outer tube 22 and the inner tube 21 are sealed. The outer tube directly above the support member 4 is heated while rotating the sealed discharge vessel 2 with a lathe or the like. When the glass becomes soft, the outer tube 22 is gradually pressed down in the radial direction and fixed to the outer tube 22. In addition, the diameter of the outer tube 22 is reduced uniformly even by heating while rotating the lathe while the discharge space is slightly depressurized, and the support member 4 is fixed to the outer tube 22.
[0022]
By fixing the support member 4 in the vicinity of the center of the discharge vessel 2 as described above, the distance between the fulcrums is shortened, and the amount of bending of the inner tube 21 is greatly reduced even when the same impact is applied. Therefore, the stress applied to the side plates at both ends is greatly reduced, and the side plates are less likely to be damaged.
[0023]
In this embodiment, a support member 4 having a structure as shown in FIG. When the inner tube 21 and the outer tube 22 are welded, the discharge vessel 2 is divided into two by the support member 4, so that two gas filling steps are required. However, as shown in FIGS. 4 (a) and 4 (b), by providing the holes 41 and the cuts 42 in the support member 4, gas can flow through both the discharge spaces with the support member interposed in the discharge lamp manufacturing process. Only one gas filling step is required.
[0024]
FIG. 5 shows the structure of a discharge vessel according to a second embodiment of the present invention. FIG. 5A shows a case where the support member 4 is fixed only to the inner tube 21 in the discharge vessel of the first embodiment. The fixing method is the same as that described in the first embodiment. When an impact is applied, the inner tube 21 bends, and the vicinity of the disk serving as the support member 4 at the center of the discharge vessel is bent the most. Until the support member 4 comes into contact with the outer tube 22, the inner tube 21 bends around the both end side walls, but when it comes into contact with the outer tube 22, the three end points of the both end side walls and the support member 4 become fulcrums. , And it becomes difficult to bend.
[0025]
FIG. 6 is an example in which the horizontal axis schematically shows the impact value applied to the discharge vessel, and the vertical axis schematically shows the stress generated at the end at that time. In the conventional discharge vessel having only both side wall portions as shown in FIG. 1, it is considered that the stress generated at the end portion of the discharge vessel increases as the impact value increases, and a graph as shown in FIG.
[0026]
In the discharge vessel of Example 1, the distance between the fulcrum points is short due to the presence of the support member 4, so that the bending is small and the generated stress is small, as shown in the graph of (c). In the case where the support is fixed to the inner tube 21 of the present embodiment, if the impact value is increased, the same stress as before occurs until the support member comes into contact with the outer tube. The interval is shortened, and the amount of change in the amount of deflection is reduced. For example, in the form of FIG. 5A, the amount of change in stress, that is, the slope is considered to be small and a graph as shown in FIG.
[0027]
In the embodiment shown in FIG. 5A, the gap between the fixed support member 4 and the outer tube 22 is preferably as small as possible. When the gap is wide, when a strong impact is applied, the inner pipe 21 is greatly bent, and the stress generated is considered to be large. Therefore, both ends may be damaged depending on the gap. In addition, when the impact between the support member 4 and the outer tube 22 is increased, the fixing portion is damaged, the support member 4 itself is damaged, and the inner tube 21 itself is damaged. Conversely, in the embodiment of FIG. 5A, when the interval is narrow, even a weak impact makes contact with the outer tube, so that the amount of bending is reduced, and the stress generated at both ends is reduced, resulting in a graph as shown in FIG. Conceivable.
[0028]
Further, it is desirable that the outer tube 22 or the inner tube 21 and the support member 4 are fixed as coaxially as possible. After the fixing, the distance between the support member 4 and the outer tube 22 or the inner tube 21 varies, so that when an impact is applied in a certain diameter direction, the inner tube 21 does not bend, but the deflection is large in a certain diameter direction. It becomes too much, and does not serve the role of the support member 4, and the discharge vessel 2 may be damaged.
[0029]
The support member 4 and the inner tube 21 and the outer tube 22 do not necessarily have to be welded and fixed. Since the purpose of this support member 4 is to reduce the displacement of the inner tube 21 at a predetermined position (axial direction) to a certain value or less, as shown in FIGS. The support member 4 may be prevented from moving left and right (axial direction) by providing a projection 43 on the base member or deforming the inner tube 21.
[0030]
As shown in FIG. 5B, even when the support member 4 is welded only to the outer tube 22, it is hardly damaged by the same mechanism.
[0031]
The vicinity of the center of the discharge vessel 2 at the position where the support member 4 is provided in the first and second embodiments is not necessarily required to be a distance of 両端 of both side walls of the discharge vessel 2. It may be in a range of 2/4 of the center when the entire length of the discharge vessel 2 is divided into four equal parts. Alternatively, it may be a range of 1/3 that is obtained by dividing into three equal parts. The bending of the inner tube 21 fixed at both ends is best bent at the center (a distance of １／). Therefore, providing the support member 4 at the center has a large effect.
[0032]
However, the support member is moved in the tube axis direction within the above range due to the tube diameter and wall thickness of the discharge vessel, the distance between fulcrums, the gap between the support tube and the other tube when the support tube is provided on the inner tube or the outer tube, and the like. There is a range that does not break even if it is made to do. When the support member is provided, discharge plasma is eliminated in the thickness range of the support member.
[0033]
Therefore, the illuminance distribution on the axis is deteriorated depending on the thickness of the support member. For example, when a support member made of light-transmitting quartz glass and having a thickness of 2 mm was provided, the output decreased by 5% at a point about 20 mm away from the lamp. In the case of 4 mm, the output decreased by 9%. If it is not desired to provide a power reduction section at the center depending on the required characteristics of the light source, the light source can be fixed by moving from the center.
[0034]
Further, when the lamp length is increased, the distance between the fulcrums may not be sufficiently short by providing only one support member at the center, and the lamp may be damaged. In this case, by providing a plurality of fulcrums, for example, three or five points, it is possible to produce a lamp that is not damaged even with a longer lamp. FIG. 7 shows an example in which three support members are provided.
[0035]
FIG. 8 shows a third embodiment. As described above, when the light-transmitting supporting member 4 having a thickness of 2 mm was provided, the output decreased by 5% at a point approximately 20 mm away from the lamp. In order to eliminate this decrease in illuminance, the support member 4 is arranged at the center during transportation as shown in FIG. 8A, and is moved to the end (position 4 ') during lighting.
[0036]
Specifically, the structure was as follows. The support member was not fixed but merely passed through the inner tube. At the position where the support member is arranged, a protrusion 5 is provided on the inner tube, and the support member is moved by tilting the right side in the axial direction upward and the left side downward in FIG. (FIG. 8B).
[0037]
During transportation, the support member is arranged by packing while being inclined such that the right side in the axial direction is up and the left side is down, and the support member does not move to the end due to vibration during transportation, and is large. Even if an impact is applied, the support member and the outer tube come into contact with each other to suppress bending and prevent breakage. When turning on the lamp, the support member is moved to the end outside the effective light emitting portion by inclining the right side in the axial direction downward and the left side upward, and then mounting the device on the device. Since the support member is located outside the discharge space during lighting (FIG. 8A), the discharge is uniform in the lamp axis direction and there is no decrease in illuminance.
[0038]
The vicinity of the center is as shown in FIG. The projection 5 is only required to be about 1 mm in height, as long as the support member 4 does not move over the support member 4, and has little effect on the discharge stability during lighting. When quartz glass is used for the inner tube 21, the same quartz glass piece may be welded. Further, a metal wire or the like may be wound.
[0039]
The support member 4 may use light-transmitting quartz glass, sapphire, MgF _2, or the like, or may use an opaque metal plate such as alumina (Al ₂ O ₃ ) or stainless steel.
[0040]
FIG. 9 shows a fourth embodiment. This embodiment also improves the illuminance distribution of the first and second embodiments as in the third embodiment. As shown in FIG. 9A, the supporting member was arranged at the center during transportation, and moved to the end during lighting, and moved and held by magnetic force. In the figure, 4 'represents a support member when moved to the end.
[0041]
FIG. 9B shows a state where the support member is held near the center during transportation. A ferromagnetic material 9 was fixed to a part of the support member 4. Specifically, as shown in FIG. 10A, a hole 41 was made in the support member 4 made of quartz glass, and a nickel wire as the ferromagnetic material 9 was wound. Then, the holding member 6 (permanent magnet) was arranged outside the outer tube 22 to hold the support member 4. The holding material 6 is horizontally packed together with the packing material near the center of the discharge vessel 2 or the lamp.
[0042]
Even if vibration or shock is applied during transportation, the support member is held by the magnetic force and does not move from the vicinity of the center, and even if the inner tube is bent, the support member contacts the outer tube, so the discharge vessel is damaged do not do. When turning on the lamp, use the magnetic force of the holding member to move the place away from the discharge space, or remove the magnet, then tilt the lamp to move the support member to the place outside the discharge space, Hold again by magnetic force at the position. By fixing the holding member so as to fit into a part of the base (not shown), the supporting member can be held even while the lamp is turned on. Since there is nothing near the center as shown in FIG. 9C, there is no decrease in the illuminance distribution.
[0043]
Since the support member 4 and the holding member 6 need only be able to be held by magnetic force, various forms can be considered. (1) When at least a part of the support member and a part of the holding member are both made of a material having magnetic force, (2) At least a part of the support member is made of a material having magnetic force and at least the holding material (3) Conversely, at least a part of the support member is made of a ferromagnetic material, and at least a part of the holding material is made of a material having magnetic force. There is.
[0044]
As a specific shape, the entire support member 4 and the holding member 6 are made of a material having magnetic force or a ferromagnetic material, or a hole is made in a quartz glass member and a wire is passed therethrough as described above (FIG. 10). (A)) The support member 4 may have a structure in which the ferromagnetic material 9 is covered with quartz glass 10 (FIG. 10B), or may be a sintered material in which quartz glass and a magnetic material or a ferromagnetic material are mixed. May be. Of course, the quartz glass may be another dielectric material.
[0045]
As a material having a magnetic force, a permanent magnet can be considered, and a ferrite magnet, a samarium-cobalt magnet, and an alnico magnet can be considered. The higher the magnetic flux density on the surface is, the higher the holding force is, and the support member can be firmly fixed. As the ferromagnetic material, iron-based alloys such as iron, nickel, silicon steel, permalloy, and trade names Alpalm-Alfe-Sendust-Palminver-Isoparm may be used.
[0046]
A comparison of whether or not a discharge vessel with a total length of 600, 800, 1000, 1200, 1400, 1600, 1800, and 2000 mm is double-packed with cushioning material and cardboard. Was done. The results are shown in the table of FIG. In the conventional lamp shown in FIG. 1, two discharge vessels were split by a discharge vessel having a total length of 1000 mm. All the discharge vessels with a longer length were broken. However, in the lamps of FIGS. 3, 5 (a), 8 and 9 provided with the support member, the lamp did not crack even in the discharge vessel having a length of 1600 mm. Further, in the lamp of FIG. 7 (with three supporting members), the lamp did not crack even in a discharge vessel having a length of 2000 mm.
[0047]
【The invention's effect】
According to the present invention, by inserting a support member between the inner tube and the outer tube near the center of the discharge vessel, impact, the force of the inner tube to bend due to vibration, by dispersing the support member, The amount of bending of the inner tube can be suppressed, the stress generated at both ends of the discharge vessel for the excimer discharge lamp and the excimer discharge lamp can be suppressed, and breakage from the ends of the discharge vessel can be suppressed. In addition, by suppressing the amount of deflection to a certain fixed value or less, it is possible to prevent the discharge vessel from being damaged.
[Brief description of the drawings]
FIG. 1 is a schematic sectional view of a conventional excimer discharge lamp.
FIG. 2 is a view showing a broken part of a conventional excimer discharge lamp.
FIG. 3 is a structural example of a discharge vessel of an excimer discharge lamp of the present invention.
FIG. 4 is a structural example of a support member provided in the present invention.
FIG. 5 shows various fixing examples of the support member provided in the present invention.
FIG. 6 shows the relationship between the impact value applied to the lamp and the stress at the end.
FIG. 7 is a structural example of a discharge vessel of an excimer discharge lamp of the present invention.
FIG. 8 is a structural example of a discharge vessel of an excimer discharge lamp of the present invention.
FIG. 9 is a structural example of a discharge vessel of an excimer discharge lamp of the present invention.
FIG. 10 shows an example of a support member provided in the present invention.
FIG. 11 is a table showing the effects of the present invention based on the results of a drop test.
[Explanation of symbols]
REFERENCE SIGNS LIST 1 excimer discharge lamp 2 discharge vessel 3 discharge space 4, 4 ′ support member 5 support member stopper 6 holding member 7 internal electrode 8 external electrode 9 ferromagnetic material 10 quartz glass 21 inner tube 22 outer tube 23 side wall portion 41 hole 42 cut 43 Protrusion

Claims

An outer tube and an inner tube each having a substantially cylindrical outer shape are arranged coaxially, and a discharge gas for forming excimer molecules between the outer tube and the inner tube is sealed, and both ends are sealed. An excimer discharge lamp having a discharge vessel,
An excimer discharge lamp, wherein a support member is provided between the inner tube and the outer tube near the center in the length direction of the discharge vessel.

The excimer discharge lamp according to claim 1, wherein the support member is fixed to the inner tube and / or the outer tube.

The excimer discharge lamp according to claim 1, wherein the support member is movable in a tube axis direction of the discharge vessel.

The excimer discharge lamp according to claim 3, wherein the support member is movable in a tube axis direction by moving a holding member provided outside the discharge vessel.

The excimer discharge lamp according to claim 4, wherein at least a part of the support member and at least a part of the holding member are made of a material having a magnetic force.

The excimer discharge lamp according to claim 4, wherein at least a part of the support member is made of a material having magnetic force, and at least a part of the holding member is made of a ferromagnetic material.

The excimer discharge lamp according to claim 4, wherein at least a part of the support member is made of a ferromagnetic material, and at least a part of the holding member is made of a material having a magnetic force.

The excimer discharge lamp according to claim 1, wherein there are a plurality of the support members, and at least one of the support members is provided near a center.