JP2007265717A - Long lamp container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent damage and luminance degradation of a lamp as to a long-sized glass excimer lamp. <P>SOLUTION: A long-size cylindrical inside tube 1 of glass and a cylindrical outside tube 2 of glass are coaxially fixed, and a retainer material is provided for retaining the inside tube 1 so as not to be bent. The retainer material 3 is a glass bar of the same material quality as the outside tube 2. Provided an inner diameter of the outer tube 2 is d<SB>1</SB>, and an outer diameter of the inside tube is d<SB>2</SB>, a length of the retainer material 3 is around (d<SB>1</SB><SP>2</SP>-d<SB>2</SB><SP>2</SP>)<SP>1/2</SP>. The retainer material 3 is fixed to an outer periphery cylindrical face of the inside tube 1 in a direction crossing the axis. Thus, even with an excimer lamp of a long-sized lamp vessel, the inner side tube 1 is made free from bending to secure an original discharge gap. Non-lighting due to damage or crack of the lamp can be avoided, unevenness in luminance of the lamp as a whole does not occur, and stable lighting is secured for a long period of time. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a long lamp vessel, and more particularly to a long lamp vessel in which an inner tube and an outer tube are coaxially formed in an excimer lamp used for a photochemical reaction.

  Excimer lamps are used to clean the surface of semiconductor wafers and the surface of glass for liquid crystal substrates in order to emit light having a strong detergency and a wavelength of 172 nm. The glass for liquid crystal substrates is steadily increasing in width, and has grown to 1870mm x 2200mm. Of course, the lamp that cleans the surface has also been extended to over 2000 mm. The excimer lamp has a double tube structure as shown in FIG. Excimer lamps, for example, two glass tubes, an outer tube with an outer diameter of 30 mm and a wall thickness of 1.2 mm, and an inner tube with an outer diameter of 18 mm and a wall thickness of 1.2 mm are coaxially combined with side walls at both ends. It is provided and sealed, electrodes are attached to the inner surface between the inside and the outside of the outer tube, and the excitation gas is sealed in a sealed glass space.

  In order to maintain stable discharge and light emission for an excimer lamp for a long time, the thin-walled inner tube has been meticulously designed so that it will not be scratched, deformed, or contaminated with foreign matter. Handled with care. The inner tube is sealed by being connected coaxially with the outer tube and the side walls at both ends. An excitation gas is sealed in this sealed space. An excimer lamp is completed by attaching electrodes to the inner surface between the inner sides and the outer peripheral portion of the outer tube. 4 (b) to 4 (d) show a conventional lamp assembly method. In this excimer lamp manufacturing process, the inner tube and the outer tube are easily damaged and distorted. Furthermore, an impact force is easily applied as vibration to the excimer lamp during the transport process and assembly work until the lamp house is discharged and light-emitted. During the manufacturing process, the inner tube and the outer tube may come into contact with each other and be damaged. The connection part between the side wall and the inner tube may be damaged by the vibration caused by the process of attaching to the apparatus or by conveyance.

  Since the inner tube is simply supported by the side walls at both ends, there is no mechanism for sufficiently holding the long tube. In particular, both ends of the inner tube are held by the side walls, and the central portion is not held at all. If the total length of the lamp exceeds 800 mm, it will bend several mm at the center of the holding interval. There is also a report that when the side walls on both sides are used as mounts, the position of 5/8 of the total length of the lamp is the most bent. The bending of the inner tube gives strain stress to the side walls and the joints at both ends. If this stress exceeds the limit due to the impact at the time of assembly or the heat at the time of lighting the lamp, the lamp will be broken. FIG. 4 (e) shows the situation of breakage of the side wall.

  Since the long inner tube supported by simple support always bends, the space with the outer tube is narrowed. In the most bent portion, the space of the excitation gas, that is, the discharge gap, becomes extremely narrower than the set gap. The convection of the excitation gas is deteriorated, and the discharge between the outer electrode and the inner electrode occurs in the narrowest part of the space. Discharge concentrates on this narrow gap. The electric power concentrates on the most bent portion of the inner tube, and the discharge becomes non-uniform when viewed from the whole lamp. Since the light emission varies, the illuminance becomes uneven. A phenomenon occurs in which the illuminance increases only at this location. As a result, the illuminance distribution of the entire lamp becomes non-uniform and eventually the life is shortened. That is, even after being installed in the apparatus, the gap between the inner tube and the outer tube is gradually narrowed, and discharge concentrates at that location, causing illuminance unevenness and shortening the illuminance maintenance period.

  Therefore, in order to maintain the discharge gap, as shown in FIGS. 5A to 5C, a support plate is attached to the center of the lamp to devise support for the inner tube and the outer tube. However, in this method, since the support plate connects the outer periphery of the inner tube and the inner periphery of the outer tube, no discharge occurs at this portion. For this reason, the illuminance of the lamp is extremely low in this vicinity. Therefore, as shown in FIGS. 5D and 5E, a part of the support plate is cut out to promote discharge and take measures to avoid a decrease in light emission. Further, as a method of holding the inner tube, as shown in FIG. 5 (f), the inner tube is held by a holding shaft made of a glass rod having a short difference between the radius of the inner tube and the radius of the outer tube. There is a way. Below are some examples of prior art related to this.

  The “excimer discharge lamp” disclosed in Patent Document 1 has a structure that suppresses breakage of the discharge vessel during transportation. An outer tube and an inner tube that are substantially cylindrical in outer shape are arranged coaxially. A discharge gas forming excimer molecules is sealed between the outer tube and the inner tube to form a hollow cylindrical discharge vessel sealed at both ends. A support member is provided between the inner tube and the outer tube in the vicinity of the center in the length direction of the discharge vessel.

The “excimer lamp” disclosed in Patent Document 2 is an excimer lamp that prevents a decrease in illuminance and a deterioration in uniformity due to a support plate for preventing the bending of the inner tube of the double cylindrical discharge vessel. A support plate for supporting the inner tube and preventing its deflection is provided between the inner tube and the outer tube constituting the discharge vessel. A notch is formed in the support plate in the light extraction direction.
JP 2004-139889 A Japanese Unexamined Patent Publication No. 2006-012554

  However, the conventional method for supporting the inner tube of the excimer lamp has the following problems. In the method in which the support plate is welded in an area corresponding to most of the outer periphery of the inner tube and the inner periphery of the outer tube, the flow of convection of the discharge excitation gas through the entire lamp is deteriorated. For this reason, the discharge is reduced in the vicinity of the support plate, and the illuminance distribution of the entire lamp is degraded. Further, in the assembly process of inserting the long inner tube into the outer tube, the support plate is mounted while being in contact with the inner tube and the outer tube, so that the surface of the inner tube and the inner surface of the outer tube that are in contact with each other are damaged. It is easy to enter and causes the lamp to break during transportation and lighting. Even if the step of attaching the support plate to the inner tube and inserting it into the outer tube is adopted, conversely, the step of attaching the support plate to the outer tube first and inserting the inner tube again is the same.

  Further, in the holding mechanism that secures a space between the outer tube and the holding shaft fixed to the inner tube, there is no gap between the tip of the holding shaft fixed to the inner tube and the outer tube. In the process of inserting the inner tube into the outer tube, the inner tube and the outer tube are often damaged, which causes the lamp to crack.

  An object of the present invention is to solve the above-mentioned conventional problems, and in an excimer lamp of a long glass lamp vessel, an inner tube holding mechanism component that prevents bending of a thin long inner tube is a glass tube and a discharge tube. In other words, the light emission is not adversely affected, so that breakage such as cracking of the lamp is prevented, and the illuminance distribution is made uniform, thereby shortening the life due to the decrease in illuminance.

In order to solve the above problems, in the present invention, a long glass cylindrical inner tube, a glass cylindrical outer tube having a larger diameter than the inner tube, and the inner tube and the outer tube are coaxial. The holding member of the long lamp vessel comprising means for fixing the inner tube and a holding member for holding the inner tube so as not to bend is shorter than the inner diameter of the outer tube and is perpendicular to the axis. It was set as the structure fixed to the outer periphery cylindrical surface. The length of the holding member was approximately (d ₁ ² -d ₂ ² ) ^1/2 when the inner diameter of the outer tube was d ₁ and the outer diameter of the inner tube was d ₂ .

  With the above configuration, even an excimer lamp of a long lamp vessel that can secure the original discharge gap without bending the inner tube can eliminate the risk of non-lighting due to breakage or cracking of the lamp. Furthermore, since there is no portion that hinders the convection of the excitation gas, the discharge and light emission are stabilized without being interrupted. Therefore, uneven illumination of the entire lamp does not occur and stable lighting for a long time can be secured.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to FIGS.

In Example 1 of the present invention, when the inner diameter of the outer tube is d ₁ and the outer diameter of the inner tube is d ₂ , a holding material having a length of approximately (d ₁ ² -d ₂ ² ) ^1/2 is obtained. This is a long lamp vessel that is fixed to the outer peripheral cylindrical surface of the inner tube in a direction perpendicular to the axis, and the inner tube and the outer tube are fixed coaxially.

  FIG. 1 is a conceptual diagram of a long lamp vessel in Example 1 of the present invention. In FIG. 1, the inner tube 1 is a glass cylindrical member. The outer tube 2 is a glass cylindrical member. The holding material 3 is a glass rod for holding the inner tube. The side wall 4 is a wall-like portion that connects and connects the inner tube and the outer tube coaxially. The discharge gap 5 is a space where excimer discharge is performed.

  The manufacturing method and function of the long lamp container in Example 1 of the present invention configured as described above will be described. In order to eliminate the harmful effects that occur when the long inner tube 1 is carried, the inner tube 1 is provided with one or a plurality of holding members 3 made of the same material as the outer tube 2. The holding member 3 is held in contact with the outer periphery of the inner tube 1 so as to be orthogonal to the central axis of the inner tube 1. “Long” means that the length is 800 mm or more.

A rod-shaped material made of the same glass material as that of the outer tube 2 is used as the holding material 3. The length of the holding member 3 is a length that reaches the inner surface of the outer tube 2. That is, when the inner diameter of the outer tube 2 is d ₁ and the outer diameter of the inner tube 1 is d ₂ , the length is approximately (d ₁ ² −d ₂ ² ) ^1/2 . In the center of the long inner tube 1 so as to be coaxial with the central axis of the outer tube 2 and the central axis of the inner tube 1, perpendicular to the direction of the central axis, The holding material 3 is fastened.

  The holding material 3 does not adhere to the inner surface of the outer tube 2. The holding material 3 and the outer tube 2 fixed to the inner tube 1 are movable in a direction orthogonal to the central axis, and are just laid on the inner surface of the outer tube 2. In FIG. 1, the holding material 3 is provided at one place in the center of the inner tube 1. However, if the lamp is very long, it may be provided at a plurality of places. Since the holding material 3 is shorter than the inner diameter of the outer tube 2, when assembling the excimer lamp container, the central axis of the inner tube 1 to which the holding material 3 is fixed in advance is inserted away from the central axis of the outer tube 2. You can work like that. By doing so, it can be avoided that the inside of the outer tube 2 and the holding member 3 come into contact with each other and are damaged. Even when the inner tube 1 and the outer tube 2 are assembled by a method in which the side walls 4 are formed at both ends of the inner tube 1 and fastened, the distance between the inner tube 1 and the outer tube 2 is restricted by the holding material 3. The space of the discharge gap 5 can be ensured accurately.

As described above, in Example 1 of the present invention, when the long lamp vessel has an inner diameter of the outer tube as d ₁ and an outer diameter of the inner tube as d ₂ , it is substantially (d ₁ ² -d ₂ ² ). ^{A 1 / 2-} length holding material is fixed to the outer cylindrical surface of the inner tube in a direction perpendicular to the axis, and the inner tube and outer tube are fixed coaxially, preventing damage to the lamp. And stable lighting for a long time can be secured.

In Example 2 of the present invention, when the inner diameter of the outer tube is d ₁ and the outer diameter of the inner tube is d ₂ , a holding material having a length of approximately (d ₁ ² -d ₂ ² ) ^1/2 is obtained. This is a long lamp vessel in which the inner tube and the outer tube are coaxially fixed by crossing and fixing two outer cylindrical surfaces of the inner tube in a direction perpendicular to the axis.

  FIG. 2 is a conceptual diagram of a long lamp vessel in Embodiment 2 of the present invention. In FIG. 2, the holding members 6 and 7 are glass rods for holding the inner tube. Other configurations are the same as those in the first embodiment.

  The manufacturing method and function of the long lamp vessel in the second embodiment of the present invention configured as described above will be described. In the center of the long inner tube 1 so as to be coaxial with the central axis of the outer tube 2 and the central axis of the inner tube 1, perpendicular to the direction of the central axis, The holding members 6 and 7 are crossed and fixed. The two holding members 6 and 7 cross each other so as to sandwich the inner tube 1 at approximately 120 degrees. When the lamp is installed, the intersection should be located directly below the central axis. The holding members 6 and 7 are fixed in advance to predetermined portions of the inner tube 1, and then inserted into the outer tube 2.

  The holding members 6 and 7 do not adhere to the inner surface of the outer tube 2. The holding members 6 and 7 and the outer tube 2 fixed to the inner tube 1 are movable in a direction perpendicular to the central axis, and are just laid on the inner surface of the outer tube 2. Since the holding members 6 and 7 are shorter than the inner diameter of the outer tube 2, when assembling the excimer lamp container, the central axis of the inner tube 1 to which the holding members 6 and 7 are fixed in advance is changed from the central axis of the outer tube 2. It can be operated to be inserted away. By doing so, it is possible to avoid the inside of the outer tube 2 and the holding members 6 and 7 from coming into contact and being damaged. Even when the inner tube 1 and the outer tube 2 are assembled by a method in which side walls 4 are formed at both ends of the inner tube 1 and fastened, the distance between the inner tube 1 and the outer tube 2 is regulated by the holding members 6 and 7. Therefore, the space of the discharge gap 5 can be ensured accurately.

  The angle at which the holding members 6 and 7 intersect may not be 120 degrees. It may be an angle from 120 degrees to nearly 180 degrees. The holding members 6 and 7 may be provided at only one location in the center of the central axis, or may be provided at a plurality of locations when the lamp is very long.

As described above, in Example 2 of the present invention, when the long lamp vessel has an inner diameter of the outer tube as d ₁ and an outer diameter of the inner tube as d ₂ , it is almost (d ₁ ² −d ₂ ² ). ^Since the holding material having a length of ^1/2 is fixed to the inner tube and the outer tube in a coaxial manner by two crossing the outer cylindrical surface of the inner tube in the direction perpendicular to the axis and fixing them. The lamp can be prevented from being damaged, and stable lighting for a long time can be secured.

In Example 3 of the present invention, when the inner diameter of the outer tube is d ₁ and the outer diameter of the inner tube is d ₂ , a holding material having a length of approximately (d ₁ ² -d ₂ ² ) ^1/2 is obtained. This is a long lamp vessel in which the inner tube and the outer tube are fixed coaxially by crossing and fixing the outer tube to the outer peripheral cylindrical surface of the inner tube in a direction perpendicular to the axis.

  FIG. 3 is a conceptual diagram of a long lamp vessel in Example 3 of the present invention. In FIG. 3, the holding members 8 to 11 are glass rods for holding the inner tube. Other configurations are the same as those in the first embodiment.

  The manufacturing method and function of the long lamp vessel in Example 3 of the present invention configured as described above will be described. The central axis of the long inner tube 1 is perpendicular to the central axis so that the central axis of the outer tube 2 and the central axis of the inner tube 1 coincide with each other, and the outer tube 2 The two holding members 8 to 11 are fastened so as to cross the inner pipe 1 so as to surround the inner pipe 1. The holding members 8 to 11 are fixed in advance at predetermined positions of the inner tube 1 and then inserted into the outer tube 2.

  The holding members 8 to 11 do not adhere to the inner surface of the outer tube 2. If the diameter of the minimum circumscribed circle of the holding members 8 to 11 is made slightly shorter than the inner diameter of the outer tube 2, the holding members 8 to 11 and the outer tube 2 fixed to the inner tube 1 are orthogonal to the central axis. It becomes the state which can be moved to the direction which carries out, and it will be in the state constructed just on the inner surface of the outer side pipe | tube 2. When the inner tube 1 and the outer tube 2 are assembled by a method in which the side walls 4 are formed at both ends of the inner tube 1 and fastened, the distance between the inner tube 1 and the outer tube 2 is regulated by the holding materials 8 to 11. Therefore, the space of the discharge gap 5 can be ensured accurately. The holding members 8 to 11 may be provided only at one central portion of the central axis, or may be provided at a plurality of locations when the lamp is very long.

As described above, in Example 3 of the present invention, when the long lamp vessel is d ₁ as the inner diameter of the outer tube and d _{2 as} the outer diameter of the inner tube, it is substantially (d ₁ ² -d ₂ ² ). ^{A structure} in which the inner pipe and the outer pipe are fixed coaxially by fixing a holding material having a length of ^{1/2 to} the outer peripheral cylindrical surface of the inner pipe in a direction perpendicular to the axis in a quadruple shape and fixing it. As a result, the lamp can be prevented from being damaged, and stable lighting for a long time can be secured.

  The long lamp container of the present invention is an excimer lamp used for a photochemical reaction, and is optimal as a long lamp container in which an inner tube and an outer tube are coaxial.

It is a conceptual diagram of the elongate lamp container in Example 1 of this invention. It is a conceptual diagram of the elongate lamp container in Example 2 of this invention. It is a conceptual diagram of the elongate lamp container in Example 3 of this invention. It is a conceptual diagram which shows the structure etc. of the conventional glass excimer lamp. It is a conceptual diagram which shows the inner tube | pipe support structure of the conventional long glass excimer lamp.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Inner tube 2 Outer tube 3 Holding material 4 Side wall 5 Discharge gap 6 Holding material 7 Holding material 8 Holding material 9 Holding material
10 Holding material
11 Holding material

Claims (6)

A long glass cylindrical inner tube, a glass cylindrical outer tube having a diameter larger than that of the inner tube, means for fixing the inner tube and the outer tube coaxially, and the inner tube A long lamp vessel having a holding material for holding the inner tube so as not to bend, wherein the holding material is shorter than the inner diameter of the outer tube and is an outer peripheral cylindrical surface of the inner tube in a direction perpendicular to the axis. A long lamp vessel characterized by being fixed to The long lamp vessel according to claim 1, wherein the holding member is a glass rod made of the same material as the outer tube. The length of the holding member is approximately (d ₁ ² −d ₂ ² ) ^1/2, where d ₁ is the inner diameter of the outer tube and d ₂ is the outer diameter of the inner tube. The long lamp vessel according to claim 1. The long lamp vessel according to claim 1, wherein one holding member is provided at a central portion in an axial direction. The long lamp vessel according to claim 1, wherein two holding members are provided so as to intersect with each other at a central portion in the axial direction. The long lamp vessel according to claim 1, wherein four holding members are provided in a cross beam shape so as to cross four central portions in the axial direction.

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