JP2004135196A - Manufacturing method for one-end supporting type piezoelectric vibrator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for a one-end supporting type piezoelectric vibrator, capable of forming a gap securely without contacting the other end bottom of a piezo-electric oscillating piece with an internal bottom surface of a package base (hereinafter referred to as vessel), for the one-end supporting type piezoelectric vibrator of which the one end (fixed end) of the piezo-electric oscillating piece is adhered and fixed to a vessel to be supported. <P>SOLUTION: A holster member 1 is arranged at the other end position different from a fixed end of a piezo-electric oscillating piece 20 on an internal bottom surface 11 of a vessel 10. A first heating process "adhesives drying stage" for fixing the fixed end by adhesives 30 is conducted under the condition that the piezo-electric oscillating piece 20 straddles over the holster member 1 and a level difference section 13 of the vessel 10. The holster member 1 is not contracted, at this time, but a second heating process "annealing stage" is performed after fixing the piezo-electric oscillating piece 20 to the vessel 10, and the holster member 1 is contracted at this time. According to this arrangement, an one-end supporting type piezoelectric vibrator, having the other end of piezo-electric oscillating piece 20 as a free end, can be manufactured. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method of manufacturing a one-end supporting type piezoelectric vibrator, and more particularly, to a technique for fixing a piezoelectric vibrating piece having an extremely small non-vibration area substantially horizontally by miniaturization.
[0002]
[Prior art]
2. Description of the Related Art Some electronic components having functions such as a frequency generation source and a filter use a piezoelectric material. For example, a quartz piece (piezoelectric vibrating piece) obtained by polishing a thin plate accurately cut out from a crystal of an artificially grown quartz crystal according to a certain rule is excellent among various piezoelectric materials because of its excellent resonance characteristics. It is frequently used as a vibrator.
Conventionally, as a holding structure of such a piezoelectric vibrating reed, there is a holding structure called a one-end support type or a cantilever type.
This is because one end at the edge of the piezoelectric vibrating reed is fixed to a package base (also called a base) by a conductive adhesive, and the other end is a free end. This structure is effective in avoiding the influence of the thermal expansion stress caused by the piezoelectric vibrating piece on the piezoelectric vibrating reed.
[0003]
As a method for holding this one-end supporting type piezoelectric vibrating reed, for example, a method disclosed in Japanese Patent Application Laid-Open No. 10-098349 has been proposed.
The method disclosed in this publication will be briefly described with reference to FIGS.
7 and 8 are cross-sectional views for explaining a method of manufacturing a conventional one-end supporting type piezoelectric vibrator. FIG. 7 shows a state before the adhesive is dried, and FIG. 8 shows a state after the adhesive is dried. .
[0004]
First, FIG. 7 shows a rectangular package base 10, a flat crystal vibrating piece 20 housed in an inclined state in the package base 10, and a method for fixing the crystal vibrating piece 20 to the package base 10. 2 shows an example of a crystal resonator including the applied conductive adhesive 30.
Although not shown here, as a final form of the crystal unit, the upper part of the package base 10 is covered with a lid and the inside is hermetically sealed.
The package base 10 forms an internal space with an inner bottom surface 11 and a peripheral wall 12 surrounding the inner bottom surface 11, and a step portion 13 is provided in a part around the inner bottom surface 11. A pair of electrode portions 14 are provided on the upper surface of the step portion 13, and one end of the crystal vibrating piece 20 is fixed to the electrode portion 14 by the conductive adhesive 30, so that one end is supported.
[0005]
As shown in this figure, before the conductive adhesive 30 is dried, the quartz-crystal vibrating piece 20 is placed in an inclined state in contact with the corner (fulcrum) 15 of the step portion 13 and the inner bottom surface 11. Is done. Then, a drying process is started. In the drying step, the package base 10 on which the quartz-crystal vibrating piece 20 is placed is placed in a cure furnace to cure the conductive adhesive 30. Here, since the conductive adhesive 30 is an epoxy-based thermosetting adhesive, it contracts due to a cross-linking reaction between molecules when cured. The amount of contraction of the conductive adhesive 30 at that time is proportional to the thickness of the conductive adhesive 30 interposed between the quartz-crystal vibrating piece 20 and the electrode portion 14. That is, since the thickness of the conductive adhesive 30 gradually increases as the distance from the corner 15 on the upper surface of the step portion 13 increases, the fixed side end of the crystal vibrating piece 20 is counterclockwise with the contact portion at the corner 15 as a fulcrum. Rotate slightly in the direction.
[0006]
Due to the rotation of the crystal vibrating piece 20, the other end of the crystal vibrating piece 20 that has been in contact with the inner bottom surface 11 of the package base 10 is slightly lifted, and a gap is formed between the package bases 10 as shown in FIG.
Then, when the conductive adhesive 30 is cured by taking it out of the curing furnace, the state shown in FIG. 8 is maintained, and a one-end supporting type crystal unit in which the other end of the crystal unit 20 is completely free is obtained. Can be.
[0007]
[Problems to be solved by the invention]
However, the above-described conventional method for manufacturing a one-end supporting type piezoelectric vibrator has the following problems. That is, unless the components and the state of the conductive adhesive are controlled to a certain level, the degree of shrinkage in the drying step varies, and the gap length under the other end of the crystal vibrating piece varies.
In addition, it is required that the positional relationship between the step portion of the package base, the piezoelectric vibrating piece, and the conductive adhesive be extremely accurate. However, in actuality, the application accuracy of the conductive adhesive and the mounting accuracy of the piezoelectric vibrating piece are required. The gap length below the other end of the piezoelectric vibrating piece varies due to the synergistic error of.
If the gap length under the other end of the piezoelectric vibrating reed has a large variation, the gap length may disappear, and the lower end of the piezoelectric vibrating reed is fixed in contact with the inner bottom surface of the package base. May occur.
Due to recent miniaturization, the entire surface of the piezoelectric vibrating piece has become an effective vibration area, and the non-vibration area has become extremely small at the edge of the piezoelectric vibrating piece. Therefore, when the lower end of the piezoelectric vibrating reed contacts the inner bottom surface of the package base as described above, there is a problem that the vibration region is affected and the frequency characteristics may be deteriorated.
[0008]
The present invention has been made in order to solve such a problem, and a single-end supporting type that can reliably form a gap without the lower end of the piezoelectric vibrating piece contacting the inner bottom surface of the package base. An object of the present invention is to provide a method for manufacturing a piezoelectric vibrator.
[0009]
[Means for Solving the Problems]
In order to solve the above problems, a method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention is directed to a method of manufacturing a one-end supporting type piezoelectric vibrator for supporting one end of a piezoelectric vibrating piece by bonding and fixing the one end to a container. In the method, a pillow member made of a heat-shrinkable resin composition is arranged between the piezoelectric vibrating piece and the container at another end position different from the fixed end for fixing the piezoelectric vibrating piece and the container. Performing a first heating step for fixing the fixed end in a state where the piezoelectric vibrating reed is laid across the pillow member and the container, and after fixing the piezoelectric vibrating reed and the container, A second heating step for shrinkage is performed to form a gap between the piezoelectric vibrating reed and the pillow member.
[0010]
Further, the invention of claim 2 of the method for manufacturing a one-end supporting type piezoelectric vibrator according to the present invention is a method for manufacturing a one-end supporting type piezoelectric vibrator for supporting one end of a piezoelectric vibrating piece by bonding and fixing the one end to a container, A pillow member made of a thermoplastic resin composition is arranged between the piezoelectric vibrating piece and the container at another end position different from the fixed end for fixing the piezoelectric vibrating piece and the container, and the piezoelectric vibrating piece is A first heating step for fixing the fixed end is performed in a state where the pillow member is placed over the pillow member and the container, and a second heating step for deforming the pillow member after the piezoelectric vibrating reed is fixed to the container. And a gap is formed between the piezoelectric vibrating reed and the pillow member.
[0011]
Further, the invention of claim 3 of the method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention is directed to the method of manufacturing a single-end supporting type piezoelectric vibrator according to claim 1 or 2, wherein the second heating step is performed. The temperature is higher than in the first heating step.
[0012]
Further, the invention of claim 4 of the method for manufacturing a one-end supporting type piezoelectric vibrator according to the present invention is a method for manufacturing a one-end supporting type piezoelectric vibrator for bonding and fixing one end of a piezoelectric vibrating reed to a container, A pillow member made of a heat-shrinkable and thermoplastic resin composition is arranged between the piezoelectric vibrating piece and the container at another end position different from the fixed end for fixing the piezoelectric vibrating piece and the container, The pillow member maintains its shape in an adhesive drying step of fixing one end of the piezoelectric vibrating piece to the container, contracts and deforms the shape of the pillow member in an annealing step after the adhesive drying, and forms the pillow member between the piezoelectric vibrating piece and the pillow member. It is characterized in that a gap is formed between them.
[0013]
The invention of claim 5 of the method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention is the method of manufacturing a one-end supporting type piezoelectric vibrator according to any one of claims 2 to 4, wherein the pillow member The present invention is characterized in that the thermoplastic resin composition to be used has been subjected to stretching beforehand.
[0014]
Further, according to a sixth aspect of the present invention, there is provided a method of manufacturing a one-end supporting type piezoelectric vibrator according to the fifth aspect, wherein the pillow member is inflated by supplying air pressure. It is a spherical pillow member subjected to stretching.
[0015]
Further, according to a seventh aspect of the present invention, there is provided a method for manufacturing a one-end supporting type piezoelectric vibrator according to the fifth aspect, wherein the pillow member is pulled at least in a penetrating direction. It is a cylindrical pillow member that has been subjected to a stretching process.
[0016]
Also, the invention of claim 8 of the method for manufacturing a one-end supporting type piezoelectric vibrator according to the present invention is the method for manufacturing a one-end supporting type piezoelectric vibrator according to claim 5, wherein the pillow member extrudes a central portion. It is a cup-shaped pillow member that has been subjected to a stretching process.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described in detail based on the illustrated embodiment.
FIG. 1 is a sectional view of a piezoelectric vibrator showing a state configuration example before a final heating step (second heating step) in a method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention. Note that the same components as those shown in the above-described conventional example are denoted by the same reference numerals, and description thereof will be omitted.
[0018]
The piezoelectric vibrator shown in this example includes a pillow member 1 in addition to the package base 10, the piezoelectric vibrating reed 20, and the conductive adhesive 30.
The pillow member 1 is made of a synthetic polymer compound (a so-called plastic), and is particularly made of a resin composition having a property of shrinking by heating (heat shrinkability). The case where an unsaturated polyester resin is used will be described as an example.
Although there are various types of unsaturated polyester resins, many of them have a large shrinkage upon curing, and can be said to be a material suitable for the present invention utilizing shrinkage. Since the shrinkage tends to greatly affect the type and content of the monomer compounded as a cross-linking agent, the stress strength required for the pillow member, the external state, and the like (for example, sufficient for supporting the piezoelectric vibrating reed 20) It is preferable to increase the shrinkage ratio in light of the condition (to the extent that a flexible elastic body can be formed). In addition, it is necessary to have physical properties such that the piezoelectric vibrator 20 and the pillow material 1 do not adhere to each other.
In addition, in the same figure, the pillow member is shown as 1a in order to represent the shape of the pillow member before contraction.
[0019]
That is, in the piezoelectric vibrator in a state before the final heating step shown in this figure, the piezoelectric vibrating reed 20 is supported at two points on the upper surface of the stepped portion 13 and the pillow member 1a. It is held substantially horizontally with respect to the inner bottom surface 11 of the base 10.
[0020]
From such a state, for example, an adhesive drying step (heating to a temperature of about 180 ° C.) for curing the conductive adhesive 30 to fix the fixed end of the piezoelectric vibrating reed 20 is performed. After a subsequent annealing step (heating to a temperature of about 270 ° C.) for annealing and removing the residual stress strain on the entire constituent member including the conductive adhesive 30 later, the cap (not shown) is finally finished. It is completed through an airtight sealing step of covering the lid.
[0021]
Next, FIG. 2 is a cross-sectional view of the piezoelectric vibrator showing a state configuration example after a final heating step (second heating step) in the method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention. It should be noted that the last heating step here will be described in association with the above-described annealing step.
The piezoelectric vibrator in the state after the annealing step shown in this figure becomes the contracted pillow member 1b, and the other end of the piezoelectric vibrating reed 20 (the side facing the fixed end fixed on the step portion 13) is located below it. A gap is formed on the side, and there is a free state without contact.
That is, at the temperature of about 180 ° C. in the adhesive drying step (first heating step) for drying the conductive adhesive 30, the pillow member 1 maintains its shape without accelerating shrinkage, and the subsequent annealing step Shrinkage is accelerated during the temperature rise to about 270 ° C. by the (second heating step). Therefore, it is necessary to pay attention to the shrinkage starting point temperature of the unsaturated polyester resin used as an example of the material of the pillow material 1. Therefore, the heat resistance is adjusted by, for example, using an additive in combination, and in this case, a desired shrinkage starting point temperature set at, for example, 200 ° C. to 250 ° C. is used.
[0022]
Next, FIG. 3 is a cross-sectional view of the piezoelectric vibrator showing a state configuration transition in a process sequence according to the present invention.
FIG. 2A shows an example of a state in which the conductive adhesive 30 is applied to the package base 10 and the pillow portion 1a is placed as a “placement of the adhesive and the pillow portion”. A conductive adhesive 30 is applied to an electrode portion 14 provided on an upper surface of the step portion 13 of the package base 10, and a pillow member is provided at a lower portion of the other end different from the fixed end of the piezoelectric vibrating piece 20. 1a is arranged.
FIG. 5B shows an example of a state in which the piezoelectric vibrating reed 20 is mounted as a “mounting stage of the piezoelectric vibrating reed”. At this stage, the piezoelectric vibrating reed 20 is supported at both ends. That is, one support end (fixed end) is placed on the upper surface of the step portion 13 to which the conductive adhesive 30 is applied, and the other support end (the other end) is placed on the pillow member 1a. . In this manner, the piezoelectric vibrating reed 20 is stably held substantially horizontally with respect to the inner bottom surface of the package base 10 by being placed across the step portion 13 of the package base 10 and the pillow member 1a. In state.
[0023]
FIG. 3C shows an example of a state in which the conductive adhesive 30 is dried by heating and cured as an “adhesive drying step” (first heating step). Here, the conductive adhesive 30 is an epoxy-based conductive adhesive similar to that shown in the above-described conventional example, or a silicon-based conductive adhesive that is commonly used. This heating and drying is set in an environment according to the curing conditions of the conductive adhesive 30. Here, the organic solvent dissolved in the adhesive is heated to a temperature of about 180 ° C. to evaporate and accelerate volatilization. To cure. Although the conductive adhesive 30 is shrunk when it is cured, the shrinkage is small.
On the other hand, the pillow material 1a does not shrink at this stage and maintains its shape, so the adhesive is cured while the other end of the piezoelectric vibrating piece 20 is supported by the pillow material 1a. It is reliably fixed in a substantially horizontal state without tilting.
[0024]
FIG. 4D shows an example of a state in which the residual stress strain is released by annealing and the pillow member is contracted at the same time as the “annealing step” (second heating step). Accordingly, the pillow member 1b contracts, so that a gap corresponding to the contracted height of the pillow member is formed below the other end of the piezoelectric vibrator 20.
[0025]
As described above, the pillow member 1 made of the heat-shrinkable resin composition is disposed below the other end of the piezoelectric vibrating reed 20, and first, the piezoelectric vibrating reed 20 is fixed in the first heating step. By fixing the end, and then contracting the pillow member 1 in the second heating step, the piezoelectric vibrating reed 20 does not incline, so that a single-end supporting type piezoelectric vibrator in which a gap is reliably formed under the other end. Obtainable.
[0026]
In the embodiment of the present invention described above, an example in which a heat-shrinkable resin composition is used as the material used for the pillow member has been described. However, the present invention is not limited to this example. For example, it may be configured using a resin composition having thermoplasticity. Since the thermoplastic resin has a property of being softened by heating and being deformed by an external force, the pillow member in this case is softened in, for example, the above-described second heating step, and collapses due to the weight of the pillow member itself. In this case, the height direction may be reduced. As the thermoplastic resin, a polyester-based thermoplastic elastomer, polyethylene terephthalate, or the like can be said to be a material that can be easily applied in terms of heat resistance (softening point temperature adjustment).
Furthermore, in order to increase the reduction ratio in the height direction, it is preferable to devise the shape of the pillow member. Hereinafter, an application example of the shape processing of the pillow member used in the method of manufacturing the one-end supporting type piezoelectric vibrator according to the present invention will be illustrated and described.
[0027]
FIG. 4 is a diagram showing a first embodiment of the stretching process of the pillow member. FIG. 3A shows that the original form 2 of the pillow member is attached to the tip of the metal pipe 40, the air pressure is supplied to the original form 2 of the pillow member through the metal pipe 40 to inflate it, and then cut from the metal pipe 40. A pillow member having a spherical shape with one point opened is formed.
The pillow member 2a thus obtained has a thickness that is elongated by the stress applied inside.
[0028]
The pillow member 2a is disposed between the piezoelectric vibrating piece 20 and the package base 10 so as to support the other end of the piezoelectric vibrating piece 20, as shown in FIG.
In addition, it is also preferable to provide a concave groove on the package base 10 side at which the bottom of the pillow member 2a fits, at a position where the pillow member is arranged.
[0029]
The pillow member 2a thus arranged supports the piezoelectric vibrating piece 20 without being softened and deformed in the “adhesive drying step” (first heating step), and in the “annealing step” (second heating step) It is softened and deformed as shown in FIG. That is, the pillow member 2b shown in this figure contracts while deflating as a whole, so that a gap is formed between the piezoelectric vibrating reed 20 and the pillow member 2b.
[0030]
Next, FIG. 5 is a view showing a second embodiment of the stretching process of the pillow member. FIG. 7A shows a state in which the tip of a right circular cone is sandwiched between the drawing heads 50a and 50b arranged opposite to each other in accordance with the through hole of the prototype 3 of the cylindrical pillow member.
FIG. 2B shows a state where the drawing heads 50a and 50b are approached from the state shown in FIG. 2A to push out both ends of the original form 3 of the pillow member and abut the slopes of the drawing heads 50a and 50b. The state in which the end of the pillow member 3 is pressed and fixed by the holding rings 60a and 60b is shown.
[0031]
FIG. 3C shows a state in which the body portion of the pillow member 3 is stretched by separating the heads 50a and 50b from the state of FIG. The pillow member 3a thus obtained is formed in a shape as shown in FIG.
[0032]
The pillow member 3a is disposed between the piezoelectric vibrating piece 20 and the package base 10 so as to support the other end of the piezoelectric vibrating piece 20, as shown in FIG. The pillow member 3a thus arranged supports the piezoelectric vibrating piece 20 without being softened and deformed in the “adhesive drying step” (first heating step), and in the “annealing step” (second heating step) It is softened and deformed as shown in FIG. That is, the pillow member 3b shown in this figure contracts while shrinking, particularly in the direction of the through hole (height direction), so that a gap is formed between the piezoelectric vibrating reed 20 and the pillow member 3b.
[0033]
Next, FIG. 6 is a view showing a third embodiment of the stretching process of the pillow member. FIG. 7A shows a state in which a prototype 4 of a circular flat pillow member is placed on an upper part of a mold base 70 having an inverted truncated cone-shaped hole.
FIG. 2B shows a state in which the pillow member in the state shown in FIG. The cup-shaped pillow member 4a thus obtained is disposed between the piezoelectric vibrating piece 20 and the package base 10 so as to support the other end of the piezoelectric vibrating piece 20, as shown in FIG. The pillow member 4a thus arranged supports the piezoelectric vibrating reed 20 without being softened and deformed in the “adhesive drying step” (first heating step), and in the “annealing step” (second heating step) It is softened and deformed as shown in FIG. That is, the pillow member 4b shown in this figure contracts while shrinking, particularly in the depth direction (height direction) of the cup, so that a gap is formed between the piezoelectric vibrating reed 20 and the pillow member 3b.
[0034]
As described above, if the pillow member used in the method of manufacturing the one-end supporting type piezoelectric vibrator according to the present invention is made of a thermoplastic resin, the fixed end of the piezoelectric vibrating piece 20 is bonded and fixed in the first heating step. At this time, the pillow member maintains the shape while supporting the other end of the piezoelectric vibrating piece 20, and is softened or deformed in the next second heating step, so that the piezoelectric vibrating piece 20 is inclined. Thus, it is possible to obtain a one-end supporting type piezoelectric vibrator in which a gap is reliably formed under the other end without performing.
[0035]
【The invention's effect】
As described above, in the method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention, the pillow member is disposed on the inner bottom surface of the package base (container) at the other end position different from the fixed end of the piezoelectric vibrating reed, In a state where the vibrating reed is placed over the pillow member and the step portion of the container, a first heating step for fixing the fixed end with an adhesive is performed. At this time, the pillow member contracts or Then, after fixing the piezoelectric vibrating reed and the container, a second heating step is performed which is higher in temperature than the first heating step. At this time, the pillow member is contracted or deformed. Therefore, it is possible to obtain a one-end supporting type piezoelectric vibrator in which the other end of the piezoelectric vibrating piece is surely a free end.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a piezoelectric vibrator showing a state configuration example before a final heating step (annealing step) in a method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention.
FIG. 2 is a cross-sectional view of the piezoelectric vibrator showing a state configuration example after a final heating step (annealing step) in the method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention.
FIG. 3 is a cross-sectional view of the piezoelectric vibrator showing a state configuration transition in a process sequence according to the present invention.
FIG. 4 is a view showing a first embodiment of a stretching process for a pillow member used in the method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention.
FIG. 5 is a view showing a second embodiment of the stretching process for the pillow member used in the method of manufacturing the one-end supporting type piezoelectric vibrator according to the present invention.
FIG. 6 is a view showing a third embodiment of a stretching process for a pillow member used in the method of manufacturing a one-end supporting type piezoelectric vibrator according to the present invention.
FIG. 7 is a cross-sectional view of a piezoelectric vibrator showing a state configuration example before a heating step (adhesion drying step) in a conventional method of manufacturing a one-end supporting type piezoelectric vibrator.
FIG. 8 is a cross-sectional view of a piezoelectric vibrator showing a state configuration example after a heating step (adhesion drying step) in a method of manufacturing a one-end supporting type piezoelectric vibrator according to a conventional technique.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Pillow member 1a ... Pillow member 1b before contraction ... Pillow member after contraction 2 ... Original shape of the pillow member 2a ... Pillow member 2b before contraction / deformation ... Contraction / deformation Pillow member 3 after ... Pillow member original form 3a ... Pillow member 3b before contraction / deformation Pillow member 4 after contraction / deformation 4 ... Pillow member original form 4a ... Before contraction / deformation Pillow member 4b: Pillow member 10 after contraction / deformation: Package base (container)
11 Internal bottom surface 12 Peripheral wall 13 Step 14 Electrode 15 Corner (fulcrum)
20: Crystal vibrating piece (piezoelectric vibrating piece)
Reference numeral 30: conductive adhesive 40: metal pipes 50a, 50b: drawing heads 60a, 60b: holding ring 70: mold base 80: pressing head

Claims (8)

A method of manufacturing a one-end supporting type piezoelectric vibrator for supporting one end of a piezoelectric vibrating piece by bonding and fixing the one end to a container,
At the other end position different from the fixed end that fixes the piezoelectric vibrating piece and the container, a pillow member made of a resin composition having heat shrinkage is arranged between the piezoelectric vibrating piece and the container,
The piezoelectric vibrating piece performs a first heating step for fixing the fixed end in a state of being placed over the pillow member and the container,
After fixing the piezoelectric vibrating reed and the container, perform a second heating step for contraction of the pillow member,
A method of manufacturing a one-end supporting type piezoelectric vibrator, wherein a gap is formed between the piezoelectric vibrating piece and the pillow member. A method of manufacturing a one-end supporting type piezoelectric vibrator for supporting one end of a piezoelectric vibrating piece by bonding and fixing the one end to a container,
At the other end position different from the fixed end that fixes the piezoelectric vibrating reed and the container, a pillow member made of a resin composition having thermoplasticity is arranged between the piezoelectric vibrating reed and the container,
The piezoelectric vibrating piece performs a first heating step for fixing the fixed end in a state of being placed over the pillow member and the container,
After fixing the piezoelectric vibrating piece and the container, perform a second heating step for deformation of the pillow member,
A method of manufacturing a one-end supporting type piezoelectric vibrator, wherein a gap is formed between the piezoelectric vibrating piece and the pillow member. In claim 1 or 2,
The method of manufacturing a one-end supporting type piezoelectric vibrator, wherein the temperature of the second heating step is higher than that of the first heating step. A method of manufacturing a one-end supporting type piezoelectric vibrator for supporting one end of a piezoelectric vibrating piece by bonding and fixing the one end to a container,
At the other end position different from the fixed end that fixes the piezoelectric vibrating piece and the container, a pillow member made of a resin composition having heat shrinkability and thermoplasticity is arranged between the piezoelectric vibrating piece and the container,
The pillow member maintains a shape in an adhesive drying step of fixing one end of the piezoelectric vibrating piece to the container,
Shrinking and deforming the shape of the pillow member in the annealing step after the adhesive drying,
A method of manufacturing a one-end supporting type piezoelectric vibrator, wherein a gap is formed between the piezoelectric vibrating piece and the pillow member. In any one of claims 2 to 4,
A method of manufacturing a one-end supporting type piezoelectric vibrator, wherein a stretching process is performed in advance on a thermoplastic resin composition used for the pillow member. In claim 5,
The method for manufacturing a one-end supporting type piezoelectric vibrator, wherein the pillow member is a spherical pillow member which is expanded and stretched by supplying air pressure. In claim 5,
The method for manufacturing a single-end support type piezoelectric vibrator, wherein the pillow member is a cylindrical pillow member that is stretched by being pulled at least in a penetrating direction. In claim 5,
The method for manufacturing a one-end support type piezoelectric vibrator, wherein the pillow member is a cup-shaped pillow member in which a central portion is extruded and subjected to a stretching process.

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