JP2004113931A - Film-forming apparatus and film-forming method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To stably produce an aerosol by preventing huge agglomerate particles of μm-mm orders formed in producing the aerosol from staying on a part of a container in a film-forming apparatus using an aerosol deposition method. <P>SOLUTION: The film-forming apparatus comprises an aerosol producing container 11 wherein a raw material powder is placed and an aerosol is produced; a gas introduction section 13 for producing the aerosol by blowing up the raw material powder with a gas in the aerosol producing container; a jet nozzle 23 for jetting the aerosol produced in the aerosol producing container toward a substrate; a vibration section 35 for very slightly vibrating the aerosol producing container; and a drive section 35 for driving the aerosol producing container to move it as specified. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a film forming apparatus and a film forming method for forming a film by spraying and depositing powder on a substrate at high speed.
[0002]
[Prior art]
In recent years, in the field of micro electro mechanical systems (MEMS), it has been considered to further integrate sensors and actuators using piezoelectric ceramics, and to fabricate these elements by film formation for practical use. Has been. As one of them, an aerosol deposition method, which is known as a film forming technique for ceramics, metals, or the like, has attracted attention (see Non-Patent Document 1). The aerosol deposition method is a method of forming a film by generating an aerosol from raw material powder, injecting the aerosol onto a substrate, and depositing the powder by collision energy at that time. Here, the aerosol refers to solid or liquid fine particles suspended in a gas.
[0003]
FIG. 11A is a schematic diagram showing an aerosol generation unit included in a film forming apparatus using the aerosol deposition method. In this aerosol generation unit, an aerosol generation container 101 for generating aerosol, a lid 102, a carrier gas introduction unit 103 for introducing a carrier gas into the aerosol generation container, and the generated aerosol are formed into a film. And an aerosol deriving unit 104 for delivery to the chamber. In the aerosol deposition method, a fine powder 106 of submicron order is used as a raw material. Such a powder 106 is placed in the aerosol generation container 101, and from a carrier gas introduction unit 103 embedded in the powder, for example, nitrogen (N ₂ When a carrier gas such as) is ejected, the raw material powder is ejected and floats in the carrier gas. When this aerosol is sucked from the aerosol deriving unit 104 and sprayed toward the substrate using a nozzle or the like, the raw material powder is accelerated by the high-speed air flow, collides with the substrate, and accumulates.
[0004]
As shown to (a) of FIG. 11, in the general film-forming apparatus by the aerosol deposition method, the aerosol generating part is provided with the vibration table. For example, the vibration table applies minute vibrations having an amplitude of 0.1 mm and a frequency of about 50 Hz to the aerosol generation container. Due to this minute vibration, kinetic energy for rising is given to the powder in the aerosol generation container 101, and the powder is successively supplied to the vicinity of the gas outlet of the carrier gas inlet 103.
[0005]
By the way, as shown in FIG. 11A, immediately after starting the generation of the aerosol, a lot of powder is spouted by ejecting the carrier gas, so that the concentration of the aerosol becomes high. However, these powders (primary particles) 106 agglomerate over time due to electrostatic force, van der Waals force, moisture cross-linking effect, etc., and agglomerated particles having a diameter of several μm to several mm. Will be formed. Among these agglomerated particles, the giant agglomerated particles 107 of micron order or larger are affected by gravity due to their large mass, and as shown in FIG. Will remain part of. In such a state, the sub-micron particles 106 cannot be brought close to the vicinity of the carrier gas ejection port, so that the sub-micron particles 106 cannot be ejected, and the aerosol concentration is lowered. For this reason, the aerosol deposition method has a problem that the deposition rate decreases with time.
[0006]
[Non-Patent Document 1]
Jun Akira, “The 3rd exploration of next-generation mechanical design, high-speed ceramic coating using the impact adhesion phenomenon of ultrafine particles”, Mechanical Design, Nikkan Kogyo Shimbun, Volume 45, No. 6 (May 2001) No.), p. 92-96
[0007]
[Problems to be solved by the invention]
Therefore, in view of the above points, the present invention provides a film forming method and apparatus using an aerosol deposition method in which the aggregated particles of micron to millimeter order that are formed when generating aerosol remain in a part of the container. It aims to prevent and generate aerosol stably.
[0008]
[Means for Solving the Problems]
In order to solve the above-described problems, a film forming apparatus according to a first aspect of the present invention includes an aerosol generation container in which raw material powder is arranged and aerosol is generated, and the raw material powder in the aerosol generation container. Gas introduction means for generating aerosol by blowing up the body with gas, nozzles for injecting aerosol generated in the aerosol generation container toward the substrate, vibration means for giving minute vibration to the aerosol generation container, and aerosol generation container Driving means for driving the aerosol generating container so that the apparatus performs a predetermined motion.
[0009]
In addition, the film forming apparatus according to the second aspect of the present invention arranges raw material powder, and generates an aerosol in an aerosol generating container in which the aerosol is generated, and in the aerosol generating container, the raw material powder is spouted with gas. Gas introducing means for generating an aerosol by means of, a nozzle for injecting the aerosol generated in the aerosol generating container toward the substrate, a vibrating means for giving minute vibrations to the aerosol generating container, and a raw material powder in the aerosol generating container And a drive means for driving the stirrer.
[0010]
The film forming method according to the first aspect of the present invention is a method in which a raw material powder is gasified while driving the container to perform a predetermined motion while giving a minute vibration to the container in which the raw material powder is disposed. A step of generating an aerosol by spraying, and a step of depositing raw material powder on the substrate by spraying the generated aerosol toward the substrate.
[0011]
The film forming method according to the second aspect of the present invention includes a step of generating an aerosol by spraying a raw material powder with a gas while stirring the raw material powder while giving a minute vibration to a container in which the raw material powder is arranged. And depositing raw material powder on the substrate by spraying the generated aerosol toward the substrate.
[0012]
According to the present invention, since a predetermined motion is given along with minute vibrations to a container in which aerosol generation is performed, the aggregated particles do not stay in a part of the container, and the aerosol can be generated stably.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The same constituent elements are denoted by the same reference numerals, and the description thereof is omitted.
FIG. 1 is a schematic view showing a film forming apparatus according to the first embodiment of the present invention. The film forming apparatus includes an aerosol generating unit 10, a film forming chamber 20, and an aerosol generating auxiliary unit 30.
[0014]
The aerosol generation unit 10 generates an aerosol using the fine powder 1 of a raw material that is a film forming material. The aerosol generating unit 10 includes an aerosol generating container 11 and a lid 12, and the lid 12 is provided with a carrier gas introducing unit 13, an aerosol deriving unit 14, and a pressure adjusting nozzle 15.
The aerosol generation container 11 is a container in which the raw material powder 1 is disposed, and aerosol is generated therein.
The lid 12 has a flange, a port, a joint, and the like for fixing the carrier gas introduction part 13 and the aerosol lead-out part 14. These flanges, ports, joints, and the like may be formed integrally with the lid 12.
[0015]
The carrier gas introduction unit 13 introduces a gas used for carrier of the raw material powder, that is, a carrier gas into the aerosol generation container 11. The carrier gas introduction unit 13 is produced, for example, by passing one tube outside and inside the aerosol generation container 11 and fixing it to the lid 12 or by connecting two tubes at the lid 12 portion. The As a material of the carrier gas introduction part 13, a material having a predetermined elasticity such as Teflon (registered trademark) is used at least for the outer part of the aerosol generation container 11. In this outer portion, the carrier gas introduction part 13 has a sufficient length so as not to hinder the movement of the aerosol generation container 11. In addition, in the inner portion of the aerosol generation container 11, a material such as metal may be used in addition to Teflon (registered trademark). As the carrier gas, dry air, nitrogen gas, argon gas, oxygen gas, helium gas or the like is used.
[0016]
Various shapes of the carrier gas introduction part 13 are conceivable. For example, as shown in FIG. 1, the vicinity of the jet port of the carrier gas introduction unit 13 may be curved along the circumference, and the carrier gas may be jetted in the tangential direction. Alternatively, the carrier gas may be ejected toward the bottom surface of the aerosol generation container 11 simply by a linear shape. Alternatively, the vicinity of the jet port of the carrier gas introduction unit 13 may be bent like a “<” and the carrier gas may be jetted from the bottom of the aerosol generation container 11.
[0017]
It is necessary to consider the arrangement of the carrier gas introduction part 13 so that the raw material powder 1 can be efficiently ejected. For example, the carrier gas introduction part 13 may be disposed so that the jet outlet of the carrier gas introduction part 13 is away from the bottom part of the aerosol generation container 11, and the carrier gas may be sprayed from the raw material powder 1. Alternatively, the carrier gas introduction unit 13 may be disposed at a low position in the aerosol generation container 11 so that the jet outlet of the raw material powder 1 is buried in the raw material powder 1, and the carrier gas may be jetted out of the raw material powder 1. . In the latter case, aerosol is generated more efficiently than in the former case, which is more desirable. That is, if the carrier gas is ejected while the ejection port is buried in the powder, the aerosol concentration can be increased even if the gas having the same flow rate is ejected. Further, since a substantially constant amount of powder is spouted for a constant gas flow rate, the concentration of aerosol can be kept substantially constant, and unevenness occurring during film formation can be reduced.
[0018]
The aerosol deriving unit 14 sucks the generated aerosol and guides it to the film forming chamber 20. The pressure adjusting nozzle 15 is used when adjusting the pressure difference between the aerosol generating container 11 and the film forming chamber 20. Similar to the carrier gas introduction part 13, the aerosol lead-out part 14 and the pressure adjustment nozzle 15 are formed of an elastic material such as Teflon (registered trademark) at least outside the lid 12, and the aerosol generation container 11. It has a sufficient length so as not to hinder the movement of the body. The aerosol lead-out portion 14 and the pressure adjustment nozzle 15 may be formed of a material such as metal inside the lid 12.
[0019]
In the film formation chamber 20, film formation is performed by an aerosol deposition method. The film forming chamber 20 is provided with an exhaust pipe 21, an aerosol introduction part 22, a nozzle 23, and a movable stage 24. The exhaust pipe 21 is connected to a vacuum pump and exhausts the film forming chamber 20. The aerosol introducing unit 22 is connected to the aerosol deriving unit 14 of the aerosol generating unit 10, and introduces the aerosol generated in the aerosol generating unit 10 into the film forming chamber 20. The nozzle 23 deposits the raw material powder 1 on the substrate 2 by spraying the aerosol introduced through the aerosol introduction part 22 onto the substrate 2. The movable stage 24 is a three-dimensionally movable stage for controlling the relative position between the substrate and the nozzle 24.
[0020]
The aerosol generation auxiliary unit 30 applies minute vibrations and predetermined motion to the aerosol generation unit 10 including the aerosol generation container 11 in order to agitate the raw material powder 1 arranged inside the aerosol generation container 11. Here, the minute vibration is a vibration of a high frequency (for example, 50 Hz) given with a small amplitude (for example, an amplitude of about 0.1 mm), and imparts kinetic energy to the raw material powder and easily floats in the carrier gas. In addition, it is given to supply powder one after another to the vicinity of the gas outlet of the carrier gas inlet 13. Further, the predetermined motion is a low-frequency (for example, 3 Hz) motion that is given with a large amplitude (for example, an amplitude of 2 to 3 cm) compared to the minute vibration described above. Examples include parallel movement, rotational movement including rotation and revolution.
[0021]
Here, in the film forming apparatus using the usual aerosol deposition method, the raw material powder (primary particles) initially placed in the container is bonded by the electrostatic force or van der Waals force with the passage of time. Then, huge aggregated particles of several μm to several mm are formed. Since such agglomerated particles have a large mass, they accumulate at the bottom of the container. However, if they remain in the vicinity of the ejection port of the carrier gas introduction part 13, primary particles cannot be ejected by the carrier gas, and the concentration of the aerosol decreases. As a result, the film forming speed falls. Therefore, in the present embodiment, the aerosol generation unit 10 is given a relatively slow and large motion so that the aggregated particles do not stay in one place.
[0022]
The aerosol generation assisting unit 30 includes a pressing ring 31, two support pillars 32, a support base 33, a drive unit 34, and a vibration unit 35.
The holding ring 31 holds the aerosol generation container 11 from the outside, and transmits the movement given by the drive unit 34 to the aerosol generation container 11.
[0023]
As shown in FIG. 2A, the holding ring 31 includes a ring portion 31a that holds the aerosol generating container 11 from the outside, and ring supports 31b that are formed at two opposing sides of the ring portion 31a. It is out. As shown in FIG. 1, the two support columns 32 are fixed to the upper surface of the support base 33 so as to face each other. As shown in (b) or (c) of FIG. 2, a through hole 32 a or a groove 32 b is formed in the upper part of the support column 32. The ring support 31b of the pressing ring 31 shown in FIG. 2A is passed through the through hole 32a or passed to the groove 32b, and a drop-off prevention nut 31c is fixed to one of the ring supports 31b. Thereby, the pressing ring 31 is supported by the support column 32 in a movable state. The other ring support 31b is connected to the drive unit 34 (see FIG. 1).
[0024]
The drive unit 34 is fixed to one support column 32. The drive unit 34 causes the aerosol generating unit 10 to perform a pendulum motion by rotating the ring support 31b of the holding ring 31 by a predetermined angle α at a predetermined cycle (for example, 3 Hz). At this time, the drive unit 34 may rotate the ring support 31b by ± α degrees, or may rotate α direction only in one direction and use a force that naturally returns for rotation in the opposite direction.
[0025]
The support base 33 is connected to the vibration part 35. The vibration unit 35 includes a vibrator that vibrates at a predetermined frequency (for example, 50 Hz). When the vibration unit 35 itself vibrates, the aerosol generation unit 10 is moved via the support base 33 and the pressing ring 31. Vibrate.
[0026]
As shown in FIG. 3, the aerosol generation assisting unit 30 is configured as described above, so that the aerosol generation unit 10 performs a pendulum motion while slightly vibrating. In the present application, the pendulum motion and other motions given to the aerosol generation unit 10 in addition to the minute vibrations in this way are referred to as auxiliary motions. The carrier gas introduction part 13, the aerosol lead-out part 14, and the pressure adjustment nozzle 15 are formed of an elastic material and have a sufficient length, so that the aerosol generation auxiliary part 30 performs auxiliary movement. There is no hindrance, and the auxiliary movement does not affect the supply of carrier gas or the derivation of aerosol.
[0027]
Next, the film forming method according to the present embodiment will be described with reference to FIGS. In the film forming method according to the present embodiment, films can be formed using various materials such as metals, alloys, and ceramics. Here, PZT (lead zirconate titanate: Pb (lead) zirconate titanate) is used. The description will be made assuming that a film is formed.
[0028]
First, in step S1, a raw material and a substrate are set in a film forming apparatus. That is, the PZT powder 1 is placed in the aerosol generation container 11. The particle diameter of the powder used for film formation is desirably on the order of submicrons, and in this embodiment, a powder having an average particle diameter of 0.3 μm is used. Further, the substrate 2 on which the film is to be formed is set on the movable stage 24 in the film forming chamber 20. In this embodiment, a glass substrate is used. Next, in step S2, the inside of the film forming chamber 20 is evacuated.
[0029]
In step S3, the drive unit 34 and the vibration unit 35 are driven. Thereby, the aerosol production | generation part 10 performs auxiliary exercise | movement, vibrating minutely.
In step S <b> 4, the carrier gas is introduced from the carrier gas introduction unit 13 into the aerosol generation container 11. In the present embodiment, nitrogen gas (N ₂ ) Is used. As a result, the carrier gas is ejected in the tangential direction from the ejection port of the carrier gas introduction unit 13, and a spiral airflow is generated inside the aerosol generation container 11 to wind up the raw material powder 1. In this way, an aerosol is generated.
[0030]
In step S <b> 5, the generated aerosol is introduced into the film forming chamber and sprayed from the nozzle 23 toward the substrate 2. As a result, the PZT powder contained in the aerosol collides with the substrate or the PZT film already deposited on the substrate, and is crushed and deposited. At this time, a film having a desired thickness can be formed in a desired region of the substrate 2 by controlling the moving direction and moving speed of the movable stage 24.
[0031]
FIG. 5 is a result of an experiment in which film formation is performed using the film formation method according to this embodiment, and is a diagram illustrating a relationship between the film formation time and the film thickness. A straight line (1) shows a case where film formation is performed using the film formation method according to the present embodiment, that is, a case where film formation is performed with an auxiliary motion, and a curve (2) is a comparative example. For this reason, the case where film formation is performed without giving an auxiliary motion is shown. In both cases, the aerosol generating unit 10 is vibrated with an amplitude of 0.1 mm and a frequency of 50 Hz. Further, in the case of the straight line (1), as an auxiliary motion, the frequency is 3 Hz and the amplitude is 2 to 3 cm. Giving exercise.
[0032]
As is apparent from the curve (2), when the auxiliary motion is not given, the film formation speed (= film thickness / film formation time) decreases with time. This is because the position of huge aggregated particles in the order of microns to millimeters is not moved, so that the aggregated particles remain in the vicinity of the carrier gas outlet and the submicron particles cannot be ejected. On the other hand, as shown by the curve (1), when the auxiliary motion is given, the film forming speed is not changed over time, and is almost constant. This is because huge particles are removed from the vicinity of the carrier gas ejection port by the auxiliary motion, and submicron particles can be stably supplied.
[0033]
As described above, according to the present embodiment, film formation can be performed efficiently without decreasing the film formation speed even if time elapses.
In the present embodiment, the drive unit 34 is driven from the beginning. However, in the beginning, only the vibration is given to the aerosol generation unit 10 by the vibration unit 35, and when the aggregated particles increase, the drive unit 34 is driven. You may make it give auxiliary exercise.
[0034]
Next, a film forming apparatus according to a second embodiment of the present invention will be described with reference to FIG. The film forming apparatus according to the present embodiment gives a pendulum motion as an auxiliary motion, and has a drive unit 40 instead of the drive unit 34 shown in FIG. Other configurations are the same as those of the film forming apparatus shown in FIG.
[0035]
The drive unit 40 includes a coil 41 disposed on the back side of the aerosol generation container 11 and a magnet 42 disposed on the support base 33. By passing a current through the coil 41, the coil 41 works as an electromagnet. For this reason, when a current is passed through the coil 41 in a predetermined direction, the coil 41 and the magnet 42 repel each other, and the aerosol generating unit 10 is shaken as shown in FIG. At this time, when the current is cut, the repulsive force between the coil 41 and the magnet 42 disappears, and the aerosol generating unit 10 performs a normal pendulum motion. Furthermore, immediately after the coil 41 passes right above the magnet 42, a current is again passed through the coil 41 in the same direction as before. Then, the aerosol generating unit 10 is again shaken by the repulsive force between the coil 41 and the magnet 42 as shown in FIG. Thus, by controlling the switch of the current flowing through the coil 41 and the direction of the current, the aerosol generating unit 10 can be caused to perform a pendulum motion.
[0036]
Next, a film forming apparatus according to a third embodiment of the present invention will be described with reference to FIG. The film forming apparatus according to the present embodiment causes the aerosol generating unit to revolve as an auxiliary motion.
As shown in FIG. 7, the film forming apparatus according to the present embodiment includes an aerosol generation auxiliary unit 50. The aerosol generation assisting unit 50 includes a pressing ring 51, two support columns 52, a support base 53, and a drive unit 54. About another structure, it is the same as that of the film-forming apparatus which concerns on the 1st Embodiment of this invention.
[0037]
In the present embodiment, the pressing ring 51 is fixed to the two support columns 52 at a predetermined angle. These two support columns 52 are fixed to one surface of the support base 53. The drive unit 54 causes the revolving motion by driving the support base 53 along a circumferential path while vibrating the support base 53 minutely. At this time, the drive unit 54 may rotate the support base 53 only in one direction, or may change the rotation direction for each predetermined angle.
[0038]
By configuring the aerosol generation auxiliary unit 50 in this way, as shown in FIGS. 7A to 7D, the aerosol generation unit 10 performs a revolving motion while slightly vibrating. In this embodiment, by fixing the holding ring to the support base, the inclination of the aerosol generating unit 10 is kept constant with respect to the horizontal plane, so the carrier gas outlet is kept at the lowest position in the bottom of the container. I can keep it. As a result, the carrier gas ejection port is always buried in the raw material powder, and the powder can be efficiently ejected.
In addition, by changing the path | route which drives the support stand 53 by the drive part 54, the reciprocation motion to one direction or multiple directions to the support stand 53 and the aerosol production | generation part 10, and the movement along various other paths are carried out. It is also possible to make it.
[0039]
Next, a film forming apparatus according to a fourth embodiment of the present invention will be described with reference to FIG. The film forming apparatus according to the present embodiment causes the aerosol generating unit to rotate as an auxiliary motion.
As shown in FIG. 8, the film forming apparatus according to the present embodiment includes an aerosol generation auxiliary unit 60. The aerosol generation assisting unit 60 includes a pressing ring 61, two support columns 62, a turntable 63, a driving unit 64, and a vibrating unit 65. About another structure, it is the same as that of the film-forming apparatus which concerns on the 1st Embodiment of this invention.
[0040]
In the present embodiment, the holding ring 61 is fixed at a predetermined angle to two support columns 62 fixed to one surface of the turntable 63. In addition, the rotating table 63 is provided with a vibrating portion 65. The vibration part 65 vibrates the aerosol generation part 10 via the turntable 63 by itself vibrating slightly. Furthermore, the drive unit 64 rotates the turntable 63.
[0041]
Here, as shown in FIG. 1, since the carrier gas introducing part 13 and the aerosol deriving part 14 are connected to the lid 12 of the aerosol generating part 10, piping becomes a problem when the aerosol generating part 10 is rotated. . Therefore, in the present embodiment, the rotation direction of the turntable 63 is changed at a predetermined cycle so that the turntable 63 and the aerosol generation unit 10 can rotate only up to 180 degrees.
[0042]
By configuring the aerosol generation assisting unit 60 in this way, as shown in FIGS. 8A to 8D, the aerosol generating unit 10 rotates around the center of the turntable 63 while vibrating. Also in this embodiment, by fixing the holding ring to the support base, the inclination of the aerosol generating unit 10 is always kept constant with respect to the horizontal plane, so the carrier gas outlet is kept at the lowest position among the container bottoms. You can keep it. Thereby, the carrier gas outlet is always buried in the raw material fine particles, and the raw material fine particles can be efficiently ejected.
[0043]
Next, a fifth embodiment of the present invention will be described with reference to FIG.
The film forming apparatus according to the present embodiment causes the aerosol generating unit to rotate as an auxiliary motion.
As shown to (a) of FIG. 9, the film-forming apparatus which concerns on this embodiment is an aerosol production | generation container 71, the lid | cover 73, the support ring 76, the two support pillars 77, the turntable 78, and a drive. Part 79. Other configurations of the film forming chamber and the like are the same as those of the film forming apparatus according to the first embodiment of the present invention.
[0044]
The aerosol generation container 71 is provided with a rotation groove 72. Further, as shown in FIG. 9B, the lid 73 includes a central portion 73a and a frame portion 73b around the central portion 73a, and both have a relatively rotatable structure. In the central portion 73a, a carrier gas introduction part 74, an aerosol lead-out part 75, and a pressure adjustment nozzle 76 are provided. The frame portion 73b is fixed to the aerosol generation container 71 after the raw material powder is disposed. With the lid 73 having such a structure, the aerosol generation container 71 can be rotated without changing the directions of the carrier gas introduction part 74, the aerosol lead-out part 75, and the pressure adjustment nozzle 76.
[0045]
The support ring 76 is fixed so as to have a predetermined angle with respect to the two support columns 77. The aerosol generation container 71 is supported by the support ring 76 in a rotatable state. Further, a rotation groove 78 a is formed on the upper surface of the turntable 78 so as to mesh with the rotation groove 72 provided at the bottom of the aerosol generation container 71. The turntable 78 is connected to the drive unit 79 and is driven by the drive unit 79 to perform a rotational motion.
[0046]
As shown in FIG. 9A, by rotating the turntable 78, the aerosol generation container 71 rotates in the direction opposite to the rotation direction of the turntable 78. At this time, as described above, even if the aerosol generation container 71 rotates, the central portion 73a including the carrier gas introduction part 74, the aerosol lead-out part 75, and the pressure adjustment nozzle 76 is kept in the initial orientation. Try to sag. Thereby, the aerosol generation container 71 can be rotated without causing a twist of the pipe or the like in the carrier gas introduction part 74 or the like provided in the central portion 73a. In addition, since the relative position of the aerosol generation container 71 and the carrier gas introduction part 74 changes inside the aerosol generation container 71, even if the aerosol generation container 71 is rotated, the ejection port of the carrier gas introduction part 74 is not in the container. It can be kept at the lowest position in the bottom and buried in the raw material powder.
[0047]
In the present embodiment, no vibration unit is provided, but by adjusting the number and shape of the rotation grooves 72 a provided in the aerosol generation container 71 and the rotation grooves 78 a provided in the turntable 78. The microvibration can be given to the aerosol generation container 71.
[0048]
Next, a sixth embodiment of the present invention will be described with reference to FIG. In this embodiment, instead of giving an auxiliary motion to the aerosol generating unit 10, the raw material arranged in the container is directly stirred.
As shown in FIG. 10A, this film forming apparatus includes a stirrer 81, a drive unit 82, and a vibration unit 83. The stirrer 81 and the drive unit 82 are provided on the lid 12. The stirrer 81 has, for example, a wing shape and is rotated by the drive unit 82 to stir the aggregated particles remaining in a part of the aerosol generation container 11. The drive unit 82 rotates the stirring bar 81 at a low frequency (for example, about 3 Hz). The vibration unit 83 gives minute vibrations to the aerosol generation unit 10.
Alternatively, as shown in FIG. 10B, a stirrer 84 may be provided at the bottom of the aerosol generation container 11 and rotated from the lower part of the aerosol generation container 11 using the drive unit 85. Moreover, you may make it rotate a stirring bar remotely by using electromagnetic force.
[0049]
The film forming apparatuses according to the first to sixth embodiments have been described above. However, a plurality of auxiliary movements performed in each embodiment may be combined. That is, the powder of the raw material arranged in the aerosol generation container is given to the aerosol generation container by combining two or more movements among a pendulum movement, a rotational movement including revolution and rotation, and a movement by a stirrer. The body can be agitated and the giant aggregated particles can be moved more effectively.
[0050]
【The invention's effect】
As described above, according to the present invention, the aerosol is generated while giving minute vibration and auxiliary motion to the aerosol generation unit. It is possible to continuously supply micron particles and stably generate an aerosol. Accordingly, the film formation speed does not decrease over time, and the total film formation time can be shortened and film formation with stable quality can be performed.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a configuration of a film forming apparatus according to a first embodiment of the present invention.
FIG. 2 is a diagram showing a part of an aerosol generation auxiliary unit of the film forming apparatus shown in FIG.
3 is a schematic diagram showing an auxiliary motion in the film forming apparatus shown in FIG. 1. FIG.
FIG. 4 is a flowchart showing a film forming method according to the first embodiment of the present invention.
FIG. 5 is a diagram showing a relationship between a film formation time and a film thickness when film formation is performed by the film formation method according to the first embodiment of the present invention.
FIG. 6 is a schematic view showing a part of a film forming apparatus according to a second embodiment of the present invention.
FIG. 7 is a schematic view showing a part of a film forming apparatus according to a third embodiment of the present invention.
FIG. 8 is a schematic view showing a part of a film forming apparatus according to a fourth embodiment of the present invention.
FIG. 9 is a schematic view showing a part of a film forming apparatus according to a fifth embodiment of the present invention.
FIG. 10 is a schematic view showing a part of a film forming apparatus according to a sixth embodiment of the present invention.
FIG. 11 is a schematic view showing a part of a conventional film forming apparatus.
[Explanation of symbols]
1 Raw material powder
2 Substrate
10 Aerosol generator
11, 71, 101 aerosol generation container
12, 73, 102 lid
13, 74, 103 Carrier gas introduction part
14, 75, 104 Aerosol outlet
15, 76, 105 Pressure adjustment nozzle
20 Deposition chamber
21 Exhaust pipe
22 Aerosol introduction part
23 nozzles
24 movable stage
30, 40, 50, 60, 70 Aerosol production assistant
31, 51, 61 Holding ring
31a Ring part
31b Ring support
31c nut
32, 52, 62, 77 Support pillar
32a through hole
32b groove
33, 53 Support stand
34, 40, 54, 64, 79, 82, 85 Drive unit
35, 65, 83, 110 Vibrating part
41 coils
42 Magnet
63, 78 turntable
72, 78a Groove for rotation
76 Support ring
81, 84 Stir bar
106 primary particles
107 Agglomerated particles

Claims (5)

An aerosol generation container in which raw material powder is arranged and aerosol generation is performed,
In the aerosol generation container, gas introduction means for generating aerosol by blowing up the raw material powder with gas;
A nozzle for injecting the aerosol generated in the aerosol generation container toward the substrate;
Vibration means for applying minute vibrations to the aerosol generating container;
Drive means for driving the aerosol generating container so that the aerosol generating container performs a predetermined motion;
A film forming apparatus comprising: The driving means drives the aerosol generating container so that the aerosol generating container rotates or swings;
The film forming apparatus according to claim 1. An aerosol generation container in which raw material powder is arranged and aerosol generation is performed,
In the aerosol generation container, gas introduction means for generating aerosol by blowing up the raw material powder with gas;
A nozzle for injecting the aerosol generated in the aerosol generation container toward the substrate;
Vibration means for applying minute vibrations to the aerosol generating container;
In the aerosol generating container, a stirrer for stirring the raw material powder;
Driving means for driving the stirring bar;
A film forming apparatus comprising: Generating aerosol by blowing up the raw material powder with a gas while driving the container to perform a predetermined motion while giving a minute vibration to the container in which the raw material powder is disposed;
Depositing raw material powder on the substrate by injecting the generated aerosol toward the substrate;
A film forming method comprising: A step of generating an aerosol by spraying with a gas while stirring the powder of the raw material while giving a minute vibration to the container in which the powder of the raw material is disposed;
Depositing raw material powder on the substrate by injecting the generated aerosol toward the substrate;
A film forming method comprising:

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