JP2004099304A - Delivery device for rotary vessel and delivery rotary structure of film forming device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To synchronously smoothly deliver a processing object for receiving processing by one rotary carrying system between two rotary carrying systems. <P>SOLUTION: This delivery device is provided with a second rotary board for receiving a vessel from a first rotary board. A first revolution track 51 for rotating the vessel 46 unitedly with the first rotary board and a second revolution track 56 for rotating the vessel 46 unitedly with the second rotary board cross each other. The vessel 46 lowering or lifting in a state of being fitted to a second support surface exists on one track of both tracks having an offset and is dislocated from the other track when transferring to the second revolution track from the first revolution track, and clearance S is arranged between a first support surface and the vessel so that the track can be smoothly transferred. The vessel transferring between the tracks does not lose its synchronization by synchronously fitting in the second support surface arranged in a position regulated by the second rotary board synchronously rotating with the first rotary board. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a rotary container transfer device and a transfer rotary structure of a film forming device, and more particularly, to a rotary container transfer device for performing a film forming process on an inner surface of a PET bottle and a transfer rotary structure of a film forming device.
[0002]
[Prior art]
PET bottles are containers that are indispensable in daily life as containers for enclosing various liquids. PET in PET bottles has poor air barrier properties. In order to prevent oxidation, an air barrier film is formed on the inner peripheral surface of the PET bottle. A vacuum chamber is used in a film forming apparatus (for example, DLC (Diamond Like Carbon) film forming apparatus) for forming a film. The gas molecules of the film forming raw material are ionized by an electrode connected to a high-frequency power supply or an ionization power supply in the vacuum chamber, deposited on the inner peripheral surface of the PET bottle, and formed into a film.
[0003]
For mass production of PET bottles, as a film forming apparatus that uses many chambers, it has a number of chambers that rotate on the same circumference, and the degree of vacuum is increased during one round so that it can be formed at the highest vacuum level. A device (not disclosed) for performing the film is under development. A large number of PET bottles conveyed while forming a continuous stream (at a constant interval) are individually transferred or transferred to a rotary distributor one by one.
[0004]
In the film forming apparatus under development, the transposition between the star wheel, which forms part of the transfer system, and the rotary disk of the rotary vacuum distributor is performed on the circumference of the pocket pitch circle that shapes the star wheel. Is In the peripheral region of the rotary vacuum distributor, receiving devices for fixedly supporting and receiving the bottom surface portion of the transferred bottle are indispensably arranged on the same circumference. In a DLC device, such a receiving member also serves as an electrode for converting a material gas into plasma in a chamber. In order to transfer the bottle from the transport surface of the starwheel to the pocket of the receiver without interference, it is required that the rotating bottle be lowered and inserted into the pocket of the receiver from the transport surface of the starwheel. In the delivery on the pitch circle, it is difficult to avoid interference due to time constraints, and it is practically impossible. It is important to rotate while lowering by the depth of the pocket. It is important that the synchronization time for ensuring such transfer is given a margin.
[0005]
Smooth synchronous transfer between the two-rotation transfer system and the transfer of the object to be processed which is processed by one of the rotation transfer systems, and particularly, when transferring the container from the rotary transfer system to the rotary film forming apparatus. There is a need to facilitate synchronous delivery.
[0006]
[Patent Document 1]
Japanese Patent No. 2726759 [Patent Document 2]
JP-A-11-322067
[Problems to be solved by the invention]
An object of the present invention is to provide a rotary container transfer device capable of facilitating synchronous transfer between a two-rotation transfer system and a processing target product to be processed in one rotation transfer system, and a rotary container transfer device. An object of the present invention is to provide a transfer rotation structure for a membrane device.
[0008]
[Means for Solving the Problems]
Means for solving the problem are expressed as follows. The technical items appearing in the expression are appended with numbers, symbols, etc. in parentheses (). The numbers, symbols, and the like are technical items that constitute at least one embodiment or a plurality of embodiments of the embodiments or the embodiments of the present invention, in particular, the embodiments or the embodiments. Corresponds to the reference numbers, reference symbols, and the like assigned to the technical matters expressed in the drawings corresponding to. Such reference numbers and reference symbols clarify the correspondence and bridging between the technical matters described in the claims and the technical matters of the embodiments or examples. Such correspondence / bridge does not mean that the technical matters described in the claims are interpreted as being limited to the technical matters of the embodiments or the examples.
[0009]
The rotary container delivery device according to the present invention includes a first rotating disk (13) and a second rotating disk (12) that receives the container from the first rotating disk (13). The first turntable (13) has a plurality of first support surfaces (35 or 49: pockets) that support the container (46) revolving coaxially with the first turntable (13) in the rotational direction. ing. The second turntable (12) has a plurality of second support surfaces (44: container receiver) for fixedly supporting the container (46) revolving coaxially with the second turntable (12) in the rotation direction. I have. A first pitch circle (51) in which the container (46) rotates in the same manner as the first rotating disk (13) and a second pitch circle (56) in which the container (46) rotates in the same manner as the second rotating disk (12). ) Cross each other. In this sense, both pitch circles (51, 56) cross and have an offset. A plurality of elevating mechanisms supported by the first turntable (13) to move the container (46) up and down in the axial direction of the first turntable (13) are added. In the crossing angle region (54), the container (46) is lowered in the axial direction of the second turntable (12) by the lifting mechanism in the vertical direction while being supported by the guide (45).
[0010]
The container (46) which descends or rises while being fitted to the second support surface (44) moves from the first pitch circle (51) to the second pitch circle (56) when the two orbits having offsets are shifted. Although it is on one track and deviates from the other track, a gap (S) is provided between the second support surface (44) and the container, so that a smooth track transition is possible. The container that transitions between the orbits fits in synchronization with the second support surface (44) arranged at a position defined on the second turntable (12) that rotates in synchronization with the first turntable (13). Without loss of synchronization.
[0011]
A guide (45) fixedly arranged around the first turntable (13) is added. The guide (45) has a guide surface (presentation: cylindrical surface) for guiding the revolving motion of the container (46) revolving while being supported by the first support surface (35). The guides (45-1 and 45-2) are formed from a first guide surface and a second guide surface. The first guide surface guides the container (46) in the cross angle region (54), and the second guide surface guides the container (46) in a region other than the cross angle region.
[0012]
The transfer rotating structure of the film forming apparatus according to the present invention includes a first rotating disk (13), a second rotating disk (12) that receives the container (46) from the first rotating disk (13), and a second rotating disk (12). ), A plurality of chambers (11) rotating in the same body, a plurality of vacuum lines for evacuating the plurality of chambers (11) with different degrees of vacuum, and And a vacuum distributor (8) for switchingably connecting the plurality of chambers (11) to the vacuum line. The first turntable (13) has a plurality of first support surfaces (49) that rotatably support a container (46) revolving coaxially with the first turntable (13) in the rotation direction. The second turntable (12) has a plurality of second support surfaces (44) for fixedly supporting the container (46) revolving coaxially with the second turntable (12) in the rotation direction. A first pitch circle (51) in which the container (46) rotates in the same manner as the first rotating disk (13) and a second pitch circle (56) in which the container (46) rotates in the same manner as the second rotating disk (12). ) Cross each other and are offset. A container (46) is supported by the first support surface (49) in a radial direction and reciprocates at an intersection angle region (54) where the first pitch circle (51) and the second pitch circle (56) intersect. A gap (S) is provided between the container (46) and the first support surface (49). A plurality of elevating mechanisms supported by the first turntable (13) to move the container (46) up and down in the axial direction of the first turntable (13) are added. In the intersection angle region (54), the container is vertically lowered by the elevating mechanism in the axial direction of the second turntable (12) while being supported by the second support surface (44), and is integrated with the second turntable (12). Further, a support (39) that rotates and supports a plurality of containers (46) is further added. The second support surface (44) is formed on the support (39). The support (39) is an electrode that supplies power to the plasma gas deposited on the container in the chamber (11). The support (39) also serves as an electrode.
[0013]
A preferred example of the chamber (11) is a film forming apparatus. A large number of the film forming devices are circumferentially arranged around the second rotating disk (12) at predetermined angular positions. For this reason, a large number of containers (46) need to be positioned at specified positions in a large number of chambers (11), and rotate in synchronization with the rotational position of the second turntable (12). Because of the synchrony, the container is securely positioned and transitions from the first pitch circle to the second pitch circle. The film forming process is executed in synchronization with the introduction and derivation of the container.
[0014]
The lifting mechanism includes a vertical guide (24), a lift (25) that is guided by the vertical guide (24) to move up and down, and a rotation direction support (34) that supports the container (46) in the rotation direction. It is composed of The first support surface (35) is formed on the rotation direction support (34). The rotation direction supporter (34) accommodates the container (46) on the first support surface (35), and the rotation direction supporter (34) for supporting the rotation of the container (46) is replaced with an elevator (25). It is freely supported and can respond to changes in the type of container.
[0015]
A vertical guide rail (21) for vertically guiding the elevator (25) is added. The vertical guide rail 21 has a vertical guide track surface (21 ') as a lower surface thereof in the transfer insertion angle section (54). The vertical guide rail (21) is fixedly arranged. The elevator (25) forms a rolling roller (31). The lifting mechanism includes a coil spring (27) that normally pushes the lifting device (25) upward in the vertical direction. The rolling roller (31) rolls on the lower surface (21 ') of the vertical guide rail (21). Such a lifting mechanism is mechanical and allows strict position control and synchronous control without the need for electronic controls.
[0016]
The second support surface (44) formed by the electrode has a bottom surface that supports the bottom surface of the container (46) and a surface that supports the outer peripheral surface of the container (46). It can be securely held on track. The electrode (39) is replaceable with respect to the second rotating plate (12), and can respond to a change in the type of container.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Corresponding to the drawings, in the embodiment of the rotary container transfer device according to the present invention, a vacuum device and a film forming device are arranged and provided together with a transport system. As shown in FIG. 1, the film forming apparatuses 1 are respectively connected to a vacuum apparatus 2. The transport system 3 includes an introduction conveyor 4 for forming a large number of PET bottles in a continuous flow, and a discharge conveyor 5 for discharging the PET bottles after film formation to a continuous flow.
[0018]
The film forming apparatus 1 includes a vacuum distributor 8 and a rotating chamber group 9. The chambers 11, which are members of the chamber group 9, are arranged on one or a plurality of concentric circles at equal angular intervals in the outer annular region of the vacuum distributor 8. The vacuum device 2 is composed of two different vacuum devices 2-1 and 2 for different degrees of vacuum. A vacuum evacuation pipe group is interposed between the vacuum distributor 8 and the chamber group 9. One evacuation pipe 10 extends in the radial direction corresponding to one chamber 11.
[0019]
The plurality of chambers 11 are evacuated to a high vacuum in a stepwise manner during a film forming process performed during substantially one round with the vacuum distributor 8, and two vacuums having different degrees of vacuum capability from each other during the process. It is connected to one of the devices and evacuated. An article to be film-formed (for example, a PET bottle) is placed on the rotating disk structure 12 and sealed in the chamber 11. The inside of the chamber 11 is evacuated, and a material gas is introduced into the inside of the chamber 11 to be turned into plasma. The chamber 11 is divided into an upper chamber and a lower chamber, and the lower chamber moves up and down as described later, and forms a closed space together with the upper chamber when the lower chamber rises. The article to be deposited is held in the lower chamber and is stably supported in the chamber 11. In the chamber, a coating is formed on the inner surface side of the container by a known technique. Such a coating is, in particular, an oxygen impermeable membrane.
[0020]
As shown in FIG. 1, an introduction side star wheel 13 is interposed between the rotating disk structure 12 and the introduction conveyor 4. A discharge-side star wheel 13 ′ is interposed between the rotating disk structure 12 and the discharge conveyor 5. FIG. 2 shows an offset positioning structure between the rotating disk structure 12 and the introduction-side star wheel 13. The introduction-side star wheel 13 forms a bearing tube 16 supported by the floor structure 15. A rotation base shaft 17 is rotatably supported by the bearing cylinder 16. A track support plate 18 is supported by the bearing cylinder 16.
[0021]
A cylindrical cam 21 is supported on the track support plate 18. An upper portion 22 of the rotating base shaft 17 protrudes upward from an upper end surface of the bearing cylinder 16. The rotation support plate 23 is supported on the upper part 22. The rotary cylinder 32 is attached to the rotary support plate 23 in the same manner. A lower first star wheel plate 33 and an upper second star wheel plate 34 are concentrically attached to the rotary cylinder 32. The lower first star wheel plate 33 and the upper second star wheel plate 34 respectively hold the container 46 to be processed between a guide rail 45 to be described later, and move rearward in the container advancing direction when the container is transported. A pocket (or support surface) 35 which is pressed and cut to a minimum so as not to disturb the trajectory of the container is formed as a part of the outer peripheral surface. A plurality of pockets 35 are arranged on the same circumference at equal angular intervals around the rotation axis L of the rotation shaft 7. Two vertical cylinders 24 are fixed to and supported on the outer peripheral surface of the rotation support plate 23 for one pocket 35.
[0022]
Each of the vertical guide cylinders 24 is guided vertically through a height direction elevating column 25. A coil spring 27 is interposed between the lower surface of the flange 26 at the upper end portion of the height direction elevating column 25 and the upper end surface of the vertical guide tube 24. A lower end portion of the height direction elevating column 25 is formed as a wheel supporting portion 28. The wheel 31 is rotatably supported by the wheel supporting portion 28. One of each of the collar 26, the wheel supporting portion 28, and the wheel 31 is provided for one pocket 35.
[0023]
A neck holder lower portion 36a having a shape that supports the lower surface of the circular protrusion of the neck of the processing target container 46 is fixed to the flange 26. To the neck holder lower part 36a, a neck holder upper part 36b having a shape for restricting the upward movement of the circular protrusion of the neck of the processing target container 46 is fixed. When the circular protrusion of the neck of the processing container 46 is inserted, a slight gap remains between the neck holder lower part 36a and the neck holder upper part 36b.
[0024]
The rotation axis of each of the plurality of wheels 31 forms radiation with respect to the rotation axis L. A rolling wheel 31 which is integral with the height direction elevating column 25 normally urged upward by the coil spring 27 is in contact with the annular raceway surface of the cylindrical cam 21. The cylindrical cam 21 is smoothly lowered to a lower position in an angle range in which the transfer is performed between the rotating disk structure 12 and the introduction-side star wheel 13, and at a transfer end position (a transfer execution end position 58 described later). , Is formed at the lowest rank. Thereafter, the lowest level is maintained until the interference between the neck holder lower part 36a, the neck holder upper part 36b, and the container is eliminated, and thereafter, it smoothly rises to the highest level, and receives the next processing object container 46 from the introduction conveyor 4. After receiving the container, it maintains the highest position and again reaches the transfer area between the rotating disk structure 12 and the inlet-side star wheel 13. The neck holder 36 is attached to the collar 26 in the radial direction.
[0025]
The rotating disk structure 12 forms a supporting cylindrical base 37 on the outer peripheral surface side thereof. Lower chambers 39 are individually attached to the flange portion 38 of the support cylindrical base 37, and a container receiver (or support surface) 44 for stably supporting the side surface and the bottom surface of the container is formed in the lower chamber 39. are doing. The container receiver 44 has a shape into which the processing target container 46 can be inserted.
[0026]
The rotating disk structure 12 non-rotatably forms the guide rail 45 in the outer peripheral region. The distance between the inner and outer inner peripheral surfaces of the guide rail 45 is substantially equal to the diameter of the container 46 to be processed. The lower chamber 39 is elevated to and joined to the upper chamber 70 in a rotation region where processing is performed, and a vacuum processing chamber is formed inside the upper chamber 70 and the lower chamber 39. The guide rail 45 includes a first guide 45-1 disposed in a container delivery area where the container 46 approaches the rotating disk structure 12, and a first guide 45-1 disposed in that area and the circumferential area of the star wheel 13 (or 13 ′). 2 guide 45-2.
[0027]
FIG. 3 shows the neck holder 36. Each neck holder 36 has a first gripping surface 48. The outer peripheral surface of the mouth part forming the upper part of the processing target container 46 and the first gripping surface 48 are circumscribed at two points or two vertical lines. FIG. 4 shows the lower first star wheel plate 33 or the lower second star wheel plate 34.
[0028]
FIG. 5 shows the geometric and mechanical actions of the transfer. The rotation support plate 23 and the rotating disk structure 12 mesh with each other with gears (not shown) and rotate in a mechanically synchronized manner. The pitch circle 51 of the rotary support plate 23 rotates mechanically synchronously at the same peripheral speed as the pitch circle 56 of the rotary disk structure 12.
[0029]
The processing target container 46 is guided by the inner peripheral surface of the guide rail 45 and the inner peripheral surface 49 of the pocket 35, is pushed by the rotating inner peripheral surface 49, and revolves in the rotation direction A. The processing target container 46 located in the non-transfer transition angle section 53 is guided by the guide rail 45-2 in a state where it is pushed to the outer peripheral side by the centrifugal force due to the rotation of the star wheel 13, and its center line becomes the pitch circle 51. It is revolving in unison. When the processing target container 46 reaches the transfer operation start angle position 55 approaching the transfer insertion angle section 54 (= 2θ), the height direction elevating column 25 is regulated by the cam profile of the cylindrical cam 21 and starts to descend. I do. The locus through which the center line of the processing target container 46 passes is then guided by the guide rails 45-1 and 45-2 and moves on to the pitch circle 56.
[0030]
At this time, the pitch circle 51 and the pitch circle 56 through which the center line of the processing target container 46 passes do not circumscribe each other but intersect at two points P and Q. The center line of the processing target container 46 which starts to descend at the transfer operation start angle position 55 coincides with the center line of the container receiver 44 at the transfer execution start angle position 57 advanced to the point P. A section proceeding from the delivery execution start angle position 57 within the range of the angle 2θ in the same manner as the rotation support plate 23 is set as a delivery insertion angle section 54.
[0031]
The transfer insertion angle section 54 is an angle region between the transfer execution start angle position 57 and the transfer execution end angle position 58. The center line of the container 46 to be processed moves from the pitch circle 51 to the pitch circle 56 at the point P, and then revolves around the pitch circle 56.
[0032]
In the transfer insertion angle section 54 between the transfer execution start angle position 57 and the transfer execution end angle position 58, the distance between the center line of the processing target container 46 and the rotation axis L of the rotation support plate 23 is continuous. Decrease and increase again. At the intermediate angular position 59 of the transfer insertion angle section 54 where the processing target container 46 comes closest to the rotary support plate 23, the decrease distance is the minimum decrease distance, and the minimum decrease distance is set as the offset amount D. .
[0033]
In the range of the transfer insertion angle section 54, the container 46 to be processed is inserted into the container receiver 44 and moves to just before contacting the bottom surface of the container receiver 44. Thereafter, the container 46 to be processed rotates in the rotation direction B in the same manner as the rotating disk structure 12, and reaches the bottom of the container receiver 44 when the constraint of the neck holder 36 is released. Further, after the star wheel plates 33 and 34 are released from the restraint of the guide rails 45-1 and 45-2, the lower chamber 39 is raised by the groove cams 76 and 77 (see FIG. 2), and the next sealing and sealing is performed. The process proceeds to a film forming process.
[0034]
At the transfer execution start angle position 57, the processing target container 46 is separated from the pocket 35 in the maximum radial direction (radially outward), and the gap S between the processing target container 46 and the pocket 35 is maximized in the radial direction. are doing. At the intermediate angular position 59, the container 46 to be processed approaches the pocket 35 maximally in the centripetal direction (radially inward), the gap S between the container 46 to be processed and the pocket 35 is reduced to the minimum in the radial direction, In particular, the gap S is zero in the radial direction.
[0035]
The radial length of the gap S is equal to or slightly larger than the offset amount D. FIG. 2 shows such an offset amount D. The delivery on the derivation side is the same as the delivery on the introduction side described above in terms of the geometric and mechanical actions described above. The drawing in which the rotation direction A and the rotation direction B are respectively reversed and FIG. 5 is drawn symmetrically with the intermediate angular position 59 as a mirror-symmetrical plane describes the delivery on the outlet side.
[0036]
In the delivery on the delivery side, the container 46 to be processed is in a state in which the container 46 is fitted in the container receiver 44 while the pitch circle corresponding to the delivery insertion angle section 54 on the introduction side overlaps, that is, in the delivery removal angle section, The height elevating column 25 rises and is pulled out of the container receiver 44. Thereafter, a transfer motion is performed to smoothly move on the orbit of the pitch circle of the discharge star wheel 13 '.
[0037]
In such a delivery described above, the control of the synchronization of the delivery is reliably performed mechanically without using the electronic control, and as a result, an increase in cost is suppressed. Synchronous rotation of the rotation support plate 23 and the rotating disk structure 12 is possible by gears.
[0038]
As shown in FIG. 2, when the track on the bottom surface of the processing target container 46 in the non-transfer transition angle section 53 is a track surface 62, the track surface 62 is located at a position slightly higher than the upper end surface 63 of the lower chamber 39. is there.
[0039]
In FIG. 2, a plurality of star wheel plates 33, 34 having different shapes of pockets 35 are exchangeably attached to the height-direction elevating column 25 so that the height position with respect to the height-direction elevating column 25 can be adjusted, and a container receiver is provided. By attaching a plurality of lower chambers 39 having different dimensions 44 to the rotating disk structure 12 interchangeably, a film forming process can be performed on a plurality of containers having different lengths and thicknesses.
[0040]
Example:
In a design example where the pitch circle 56 is about 1000 mmφ, the pitch circle 51 is about 640φ, and the angle between the point P and the point Q is about 3 ° to about 6 ° (synchronous angle) with respect to the pitch circle 56, At a certain rotation speed, the following calculation result is obtained.
Offset amount (mm) 2 3 4 5 6
Length of line segment PQ (mm) 57.4 70.0 80.7 90.2 98.8
Synchronization angle (゜) 3.2 3.9 4.5 5.0 5.5
[0041]
As described above, an appropriate parameter is determined within a range where the synchronization time, the synchronization angle, and the synchronization time are not too large and the offset amount is not too small. It is proper that the offset amount is 5 mm.
[0042]
【The invention's effect】
The rotary container transfer device and the transfer rotary structure of the film forming device according to the present invention mechanically and smoothly execute transfer for transferring a container from the track on one track surface to the other track on the lower track surface. can do.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of a rotary container delivery device according to the present invention.
FIG. 2 is a sectional view showing a transport system.
FIG. 3 is a plan view showing a part of FIG. 2;
FIG. 4 is a plan view showing another part of FIG. 2;
FIG. 5 is a geometrical action diagram showing delivery.
[Explanation of symbols]
8 Vacuum distributor 11 Chamber 12 Second turntable 21 Vertical guide rail 21 'Lower surface 23 First turntable 24 Vertical guide 25 Lifter 27 Coil spring 31 Rolling roller 34 ... Tooth surface forming plate 35. First support surfaces 39 and 41. Support device 42. Electrode 44. Second support surfaces 45, 45-1 and 2... Guide 46 46 Container 49 First support surface 51. 54 crossover angle area 56 second pitch circle S gap

Claims (13)

A first turntable,
A second turntable for receiving a container from the first turntable,
The first turntable has a plurality of first support surfaces for floatingly supporting a container that revolves coaxially with the first turntable in a rotation direction,
The second turntable has a plurality of support surfaces that fixedly supports the container that revolves coaxially with the second turntable in a rotation direction,
A first orbital rotation of the container and the second rotating disk of the container intersect with each other with the first rotating disk and the container rotating with the second rotating disk.
A gap is provided between the container and the first support surface for allowing the container to reciprocate while being supported by the guide in the radial direction in an intersection angle region where the first orbit and the second orbit intersect. And
The apparatus further includes a plurality of elevating mechanisms supported by the first turntable and supporting the container in the axial direction of the first turntable in the vertical direction and vertically moving the container up and down.
A rotary container delivery device in which the container is vertically lowered by the lifting mechanism in the axial direction of the second turntable while being supported by the second support surface in the intersection angle region. The rotary container transfer device according to claim 1, wherein the contact surface of the container that contacts the first support surface is a cylindrical surface. 2. The rotary container transfer device according to claim 1, wherein the first support surface is formed on an elevating part of the elevating mechanism. A guide fixedly disposed in a peripheral area of the first turntable;
2. The rotary container transfer device according to claim 1, wherein the guide has a guide surface that guides the revolving motion of the container that revolves while being supported by the first support surface. 3. The guide is
A first guide surface;
A second guide surface,
The rotary container transfer device according to claim 4, wherein the first guide surface guides the container in the cross angle region, and the second guide surface guides the container in a region other than the cross angle region. A first turntable,
A second turntable for receiving a container from the first turntable;
A plurality of chambers rotating in the same manner as the first turntable;
A plurality of evacuation lines for performing evacuation at different degrees of vacuum to the plurality of chambers,
A vacuum distributor that rotates integrally with the second turntable and connects the plurality of chambers to the plurality of vacuum lines in a switchable manner;
The first turntable has a plurality of first support surfaces for floatingly supporting a container that revolves coaxially with the first turntable in a rotation direction,
The second turntable includes a plurality of second support surfaces that fixedly support the container that revolves coaxially with the second turntable in a rotation direction,
A first orbital rotation of the container and the second rotating disk of the container intersect with each other with the first rotating disk and the container rotating with the second rotating disk.
In a crossing angle region where the first orbit and the second orbit cross each other, a gap for the container to reciprocate while being supported by the first support surface in the radial direction is formed between the container and the first support surface. Given between
The apparatus further includes a plurality of elevating mechanisms supported by the first turntable and supporting the container in the axial direction of the first turntable in the vertical direction and vertically moving the container up and down.
In the crossing angle region, the container descends vertically in the axial direction of the second turntable by the lifting mechanism while being supported by the second support surface,
The second turntable further includes a supporter that rotates in the same body and supports a plurality of the containers, respectively.
The second support surface is formed on the support;
The transfer rotary structure of a film forming apparatus, wherein the support is an electrode for supplying power to a plasma gas deposited on the container in the chamber. The lifting mechanism,
A vertical guide,
An elevator that is guided by the vertical guide and moves up and down,
A rotation direction supporter that is supported by the elevator and supports the container in the rotation direction,
The transfer rotation structure of the film forming apparatus according to claim 6, wherein the first support surface is formed on the rotation direction support. The transfer rotation structure of a film forming apparatus according to claim 7, wherein the rotation direction supporter is exchangeably supported by the elevator. Further comprising a vertical guide rail for guiding the elevator vertically.
The vertical guide rail is fixedly arranged,
The elevator includes rolling rollers,
The elevating mechanism further includes a coil spring that normally pushes the elevator vertically upward.
9. The transfer rotating structure according to claim 8, wherein the rolling roller rolls on a lower surface of the vertical guide rail. The second support surface formed by the electrode,
A bottom surface supporting a bottom surface of the container,
The transfer rotary structure of the film forming apparatus according to claim 8, further comprising a surface that supports an outer peripheral surface of the container. The transfer rotary structure of the film forming apparatus according to claim 10, wherein the electrode is exchangeably supported on the second rotating disk. A guide fixedly disposed in a peripheral area of the first turntable;
12. The transfer rotary structure of the film forming apparatus according to claim 6, wherein the guide has a guide surface that guides the revolving motion of the container that revolves while being supported by the first support surface. 13. 13. The transfer rotary structure of a film forming apparatus according to claim 12, wherein the guide has a track surface for guiding a bottom surface of the container, and the track surface is formed in a horizontal plane in a region other than the cross angle region.

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