JP4353499B2 - Rotary container delivery device and film deposition equipment delivery rotation structure - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a rotary container delivery device and a delivery rotation structure of a film forming apparatus, and more particularly to a rotary container delivery apparatus that performs a film forming process on the inner surface of a PET bottle and a delivery rotation structure of a film formation apparatus.
[0002]
[Prior art]
The PET bottle is an essential container in daily life as a container for enclosing various liquids. PET in PET bottles has poor air barrier properties. In order to prevent oxidation, an air barrier film is formed on the inner peripheral surface of the PET bottle. 2. Description of the Related Art A vacuum chamber is used for a film forming apparatus (for example, a DLC (Diamond Like Carbon) film forming apparatus) for forming a film. The gas molecules of the film forming raw material are ionized by an electrode connected to a high frequency power source or an ionization power source in the vacuum chamber, and are deposited on the inner peripheral surface of the PET bottle to form a film.
[0003]
As a film forming apparatus that uses a large number of chambers for mass production of PET bottles, it has a number of chambers that rotate on the same circumference, and the vacuum level is increased during one round to achieve the maximum vacuum level. Development of an apparatus (unpublished) that performs the membrane is in progress. A large number of PET bottles conveyed in a continuous flow (constant interval flow) are sequentially transferred or transposed to the rotary distributor.
[0004]
In the film deposition system under development, the transfer between the star wheel that forms a part of the transport system and the rotary disk of the rotary vacuum distributor is performed on the circumference of the pocket pitch circle that forms the star wheel. Is called. In the peripheral area of the rotary type vacuum distributor, receivers for supporting and receiving the bottom surface portion of the delivered bottle are essentially arranged on the same circumference. In the DLC apparatus, such a receiver also serves as an electrode for converting the material gas into plasma in the chamber. In order to displace the star bottle from the conveying surface of the star wheel to the pocket portion of the receiving member without interference, it is required to insert the rotating bottle into the receiving member pocket while lowering the rotating bottle. In the delivery on the pitch circle, it is difficult and practically impossible to avoid interference due to time constraints. It is important to rotate while lowering the depth of the pocket. It is important that a margin is provided for the synchronization time for reliably performing such delivery.
[0005]
Synchronous delivery is facilitated when delivering a processing object to be processed in one rotary conveyance system between two-rotation conveyance systems, particularly when containers are delivered from the rotary conveyance system to the rotary film forming apparatus. There is a need to facilitate synchronous delivery.
[0006]
[Patent Document 1]
Japanese Patent No. 2726759 [Patent Document 2]
Japanese Patent Laid-Open No. 11-322067
[Problems to be solved by the invention]
SUMMARY OF THE INVENTION An object of the present invention is to provide a rotary container transfer device capable of facilitating a synchronous transfer when transferring a processing object to be processed in one rotary transfer system between two rotary transfer systems, and a component. It is to provide a transfer rotating structure of a membrane device.
[0008]
[Means for Solving the Problems]
Means for solving the problem is expressed as follows. Technical matters appearing in the expression are appended with numbers, symbols, etc. in parentheses. The numbers, symbols, and the like are technical matters constituting at least one embodiment or a plurality of embodiments of the present invention or a plurality of embodiments, in particular, the embodiments or examples. This corresponds to the reference numbers, reference symbols, and the like attached to the technical matters expressed in the drawings corresponding to. Such reference numbers and reference symbols clarify the correspondence and bridging between the technical matters described in the claims and the technical matters of the embodiments or examples. Such correspondence or bridging does not mean that the technical matters described in the claims are interpreted as being limited to the technical matters of the embodiments or examples.
[0009]
The rotary container delivery device according to the present invention comprises a first turntable (13) and a second turntable (12) for receiving containers from the first turntable (13). The first turntable (13) has a plurality of first support surfaces (35 or 49: pockets) that support the container (46) revolving coaxially with the first turntable (13) in a radial direction. ing. The second turntable (12) has a plurality of second support surfaces (44: container receivers) that support the container (46) revolving coaxially with the second turntable (12) in a radial direction. Yes. A first pitch circle (51) in which the container (46) rotates in unison with the first turntable (13) and a second pitch circle (56 in which the container (46) rotates in unison with the second turntable (12). ) Cross each other. In this sense, both pitch circles (51, 56) intersect and have an offset. A plurality of lifting mechanisms that are supported by the first rotating disk (13) and move the container (46) up and down in the axial direction of the first rotating disk (13) are added. In the crossing angle region (54), the container (46) is lowered in the vertical direction by the lifting mechanism in the axial direction of the second turntable (12) while being supported by the guide (45).
[0010]
The container (46) that descends or rises while being fitted to the second support surface (44) moves between the first or second trajectory having an offset when moving from the first pitch circle (51) to the second pitch circle (56). Although it is on one track and deviates from the other track, a gap (S) is provided between the first support surface and the container, and smooth track transition is possible. The container that makes the transition between the tracks fits in synchronization with the second support surface (44) disposed at a position defined by the second turntable (12) that rotates in synchronization with the first turntable (13). I won't lose my sync.
[0011]
A guide (45) that is fixedly arranged in the peripheral area of the first turntable (13) is added. The guide (45) has a guide surface (presentation: cylindrical surface) that guides the revolving motion of the container (46) that revolves while being supported by the first support surface (35). The guides (45-1, 2) are formed of a first guide surface and a second guide surface. The first guide surface guides the container (46) in the crossing angle region (54), and the second guide surface guides the container (46) in a region other than the crossing angle region.
[0012]
The transfer rotation structure of the film forming apparatus according to the present invention includes a first turntable (13), a second turntable (12) that receives a container (46) from the first turntable (13), and a second turntable (12 ), A plurality of chambers (11) rotating in the same body, a plurality of vacuum lines for evacuating the plurality of chambers (11) at different vacuum degrees, and a second rotating disk (12) rotating in the same body, And a vacuum distributor (8) for switching a plurality of chambers (11) to the evacuation line. The first turntable (13) has a plurality of first support surfaces (49) that support a container (46) revolving coaxially with the first turntable (13) in a radial direction. The second turntable (12) has a plurality of second support surfaces (44) that fixedly support the container (46) revolving coaxially with the second turntable (12) in the radial direction. A first pitch circle (51) in which the container (46) rotates in unison with the first turntable (13) and a second pitch circle (56 in which the container (46) rotates in unison with the second turntable (12). ) Cross each other and are arranged at an offset. The container (46) is supported by the first support surface (49) in the radial direction in a crossing angle region (54) where the first pitch circle (51) and the second pitch circle (56) intersect to reciprocate. A gap (S) is provided between the container (46) and the first support surface (49). A plurality of lifting mechanisms that are supported by the first rotating disk (13) and move the container (46) up and down in the axial direction of the first rotating disk (13) are added. In the crossing angle region (54), the container descends in the vertical direction by the lifting mechanism in the axial direction of the second turntable (12) while being supported by the second support surface (44), and is integrated with the second turntable (12). Further, a support (39) that rotates to support each of the plurality of containers (46) is further added. The second support surface (44) is formed on the support (39). The support (39) is an electrode that supplies power to the plasma gas deposited on the container in the chamber (11). The support (39) also serves as an electrode.
[0013]
As the chamber (11), a film forming apparatus is preferably exemplified. A large number of film forming apparatuses are arranged around the second rotating disk (12) at a specified angular position in the circumferential direction. For this reason, many containers (46) need to be positioned in the predetermined position in many chambers (11), and to rotate in synchronization with the rotation position of the second turntable (12). Due to the synchronicity, the container is reliably positioned and shifts from the first pitch circle to the second pitch circle. The film forming process is executed in synchronization with the introduction and derivation of the container.
[0014]
The lifting mechanism includes a vertical guide (24), a lift (25) that is guided by the vertical guide (24) to move up and down, and a rotational support (34) that supports the container (46) in the rotational direction. It consists of and. The first support surface (35) is formed on the rotational direction support (34). The rotation direction supporter (34) accommodates the container (46) on the first support surface (35), and the rotation direction supporter (34) supporting the rotation of the container (46) is replaced with an elevator (25). It is supported freely and can respond to changes in the type of container.
[0015]
A vertical guide rail (21) for guiding the elevator (25) in the vertical direction is added. The vertical guide rail 21 has a vertical guide track surface (21 ′) at the transfer insertion angle section (54) as its lower surface. The vertical guide rail (21) is fixedly arranged. The elevator (25) constitutes a rolling roller (31). The lifting mechanism includes a coil spring (27) that normally pushes the lift (25) upward in the vertical direction. The rolling roller (31) rolls on the lower surface (21 ′) of the vertical guide rail (21). Such a lifting mechanism is mechanical and enables strict position control and synchronous control without the need for an electronic control device.
[0016]
The second support surface (44) formed by the electrode has a bottom surface that supports the bottom surface of the container (46) and a surface that supports the outer peripheral surface of the container (46), and the position of the container (46) is determined. It can be reliably held on the track. The electrode (39) is exchangeable with respect to the second rotating plate (12), and can cope with a change in the type of the container.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
Corresponding to the drawing, the embodiment of the rotary container delivery apparatus according to the present invention is provided with a vacuum apparatus and a film forming apparatus arranged together with a transport system. The film forming apparatuses 1 are each connected to a vacuum apparatus 2 as shown in FIG. The conveyance system 3 includes an introduction conveyor 4 that forms a large number of PET bottles in a continuous flow, and a discharge conveyor 5 that discharges the PET bottles after film formation into a continuous flow.
[0018]
The film forming apparatus 1 includes a vacuum distributor 8 and a rotating chamber group 9. The chambers 11 that are elements of the chamber group 9 are arranged on one or more concentric circles at equiangular intervals in the outer annular region of the vacuum distributor 8. The vacuum device 2 is composed of two vacuum devices 2-1 and 2 having different degrees of vacuum. A vacuum pulling pipe group is interposed between the vacuum distributor 8 and the chamber group 9. One evacuation pipe 10 extends in the radial direction corresponding to one chamber 11.
[0019]
The plurality of chambers 11 are evacuated to a high vacuum level step by step in a film forming process executed while making a round with the vacuum distributor 8, and two vacuum capacities different from each other in the process. It is connected to one of the devices and evacuated. An article to be deposited (example: PET bottle) is placed on the rotating disk structure 12 and sealed in the chamber 11. The inside of the chamber 11 is evacuated, and a material gas is introduced into the chamber 11 to be turned into plasma. The chamber 11 is divided into an upper chamber and a lower chamber, and the lower chamber moves up and down as will be described later, and forms a sealed space together with the upper chamber when it is raised. The article to be deposited is held in the lower chamber and is stably supported in the chamber 11. In the chamber, a film is formed on the inner surface side of the container by a known technique. Such a film is in particular an oxygen-impermeable film.
[0020]
As shown in FIG. 1, an introduction-side star wheel 13 is interposed between the rotating disk structure 12 and the introduction conveyor 4. A discharge-side star wheel 13 ′ is interposed between the rotating disk structure 12 and the discharge conveyor 5. FIG. 2 shows an offset positioning structure for the rotating disk structure 12 and the introduction-side star wheel 13. The introduction side star wheel 13 constitutes a bearing cylinder 16 supported by the floor structure 15. A rotating base shaft 17 is rotatably supported by the bearing cylinder 16. A track support plate 18 is supported on the bearing cylinder 16.
[0021]
A cylindrical cam 21 is supported on the track support plate 18. The upper portion 22 of the rotating base shaft 17 protrudes upward from the upper end surface of the bearing cylinder 16. A rotation support plate 23 is supported on the upper portion 22. A rotary cylinder 32 is attached to the rotary support plate 23 in the same body. A lower first star wheel plate 33 and an upper second star wheel plate 34 are concentrically attached to the rotating cylinder 32. The lower first star foil plate 33 and the upper second star wheel plate 34 respectively hold the processing target container 46 with a guide rail 45 (described later), and rearward toward the container traveling direction when the container is transported. A pocket (or support surface) 35 that is pushed and is cut to a minimum so as not to disturb the trajectory of the container is formed as a part of the outer peripheral surface. A plurality of pockets 35 are arranged on the same circumference around the rotation axis L of the rotation base shaft 17 at equal angular intervals. Two vertical cylinders 24 are fixed to and supported by the outer peripheral surface of the rotation support plate 23 with respect to one pocket 35.
[0022]
The vertical direction guide cylinders 24 are each guided by a height direction elevating column 25 in the vertical direction. A coil spring 27 is interposed between the lower surface of the flange 26 at the upper end portion of the height direction lifting column 25 and the upper end surface of the vertical guide tube 24. A lower end portion of the height direction lifting column 25 is formed as a wheel support portion 28. A wheel 31 is rotatably supported by the wheel support portion 28. One of the collar 26, the wheel support part 28, and the wheel 31 is provided for each pocket 35.
[0023]
A neck holder lower portion 36 a having a shape that supports the lower surface of the circular protruding portion of the neck portion of the processing target container 46 is fixed to the collar 26. A neck holder upper portion 36b having a shape for restricting the upward movement of the circular protruding portion of the neck portion of the processing target container 46 is fixed to the neck holder lower portion 36a. When the circular protruding portion of the neck of the processing target container 46 is inserted, a slight gap remains between the neck holder lower part 36a and the neck holder upper part 36b.
[0024]
The rotation axis of each of the plurality of roller wheels 31 forms radiation with respect to the rotation axis L. A roller 31, which is the same body as the height elevating column 25 that is normally urged upward by the coil spring 27, is in contact with the annular raceway surface of the cylindrical cam 21. The cylindrical cam 21 is smoothly lowered to a lower position in an angle range in which the transfer is performed between the rotating disk structure 12 and the introduction-side star wheel 13, and at a transfer end position (a transfer execution end position 58 described later). , Formed in the lowest position. After that, the lowest position is maintained until there is no interference between the neck holder lower part 36a, the neck holder upper part 36b, and the container, and then it is smoothly raised to the highest position, and the next container 46 to be processed is received from the introduction conveyor 4. After receiving the container, the highest position is maintained, and the transfer area between the rotating disk structure 12 and the introduction side star wheel 13 is reached again. The neck holder 36 is attached to the collar 26 in the radial direction.
[0025]
The rotating disk structure 12 constitutes a supporting cylindrical base 37 on the outer peripheral surface side thereof. The lower chambers 39 are individually attached to the eaves portions 38 of the support cylindrical base 37, and a container receiver (or support surface) 44 that stably supports the side surface of the container and the bottom surface of the container is formed in the lower chamber 39. is doing. The container receiver 44 has a shape into which the processing target container 46 can be inserted.
[0026]
The rotating disk structure 12 forms a guide rail 45 in a non-rotating manner in the outer peripheral side region. The distance between the inner and outer peripheral surfaces of the guide rail 45 is approximately equal to the diameter of the processing target container 46. The lower chamber 39 is joined to the upper chamber 70 in a rotating region where processing is performed, and a vacuum processing chamber is formed inside the upper chamber 70 and the lower chamber 39. The guide rail 45 is arranged in a first guide 45-1 disposed in a container delivery area where the container 46 approaches the rotating disk structure 12, and in a first area disposed in the area and the circumferential area of the star wheel 13 (or 13 ′). 2 guide 45-2.
[0027]
FIG. 3 shows the neck holder 36. Each neck holder 36 has a first gripping surface 48. The outer peripheral surface of the mouth portion that forms the upper part of the processing target container 46 and the first gripping surface 48 are circumscribed at two points or two vertical lines. FIG. 4 shows the lower first star foil plate 33 or the lower second star foil plate 34.
[0028]
FIG. 5 shows the geometric and mechanical effects of delivery. The rotating support plate 23 and the rotating disk structure 12 are meshed with each other by gears (not shown) and rotate in synchronization with each other. The pitch circle 51 of the rotary support plate 23 rotates mechanically and synchronously at the same peripheral speed as the pitch circle 56 of the rotary disk structure 12.
[0029]
The processing target container 46 is guided by the inner peripheral surface 49 of the guide rail 45 and the inner peripheral surface 49 of the pocket 35, and is revolved in the rotation direction A by being pushed by the rotating inner peripheral surface 49. The processing target container 46 located in the non-delivery transition angle section 53 is guided by the guide rail 45-2 while being pushed to the outer peripheral side by the centrifugal force due to the rotation of the star wheel 13, and the center line thereof becomes the pitch circle 51. Revolved in unison. When the processing target container 46 reaches the delivery operation start angle position 55 approaching the delivery insertion angle section 54 (= 2θ), the height elevating column 25 is regulated by the cam profile of the cylindrical cam 21 and starts to descend. To do. The trajectory through which the center line of the processing target container 46 passes is subsequently guided by the guide rails 45-1 and 45-2 and changes to the pitch circle 56.
[0030]
At this time, the pitch circle 51 and the pitch circle 56 through which the center line of the processing target container 46 passes do not circumscribe each other and intersect at two points P and Q. The processing target container 46 that starts to descend at the delivery operation start angle position 55 has its center line coincident with the center line of the container receiver 44 at the delivery execution start angle position 57 that has advanced to the point P. A section that advances from the delivery execution start angle position 57 within the range of the angle 2θ in the same body as the rotation support plate 23 is set as a delivery insertion angle section 54.
[0031]
The delivery insertion angle section 54 is an angle region between the delivery execution start angle position 57 and the delivery execution end angle position 58. The center line of the processing target container 46 changes from the pitch circle 51 to the pitch circle 56 at the point P, and then revolves in accordance with the pitch circle 56.
[0032]
In the transfer insertion angle section 54 between the transfer execution start angle position 57 and the transfer execution end angle position 58, the distance between the center line of the processing target container 46 and the rotation axis L of the rotation support plate 23 is continuous. Decrease and increase again. At the intermediate angular position 59 of the transfer insertion angle section 54 where the processing target container 46 is closest to the rotation support plate 23, the reduction distance is the minimum reduction distance, and the minimum reduction distance is set as the offset amount D. .
[0033]
In the range of the delivery insertion angle section 54, the processing target container 46 is inserted into the container receiver 44 and moves to a position just before contacting the bottom surface of the container receiver 44. After that, the processing target container 46 rotates in the rotation direction B together with the rotating disk structure 12 and reaches the bottom surface of the container receiver 44 when the restraint of the neck holder 36 is released. Further, after the star wheel plates 33 and 34 are released from the restraint of the guide rails 45-1 and 45-2, the lower chamber 39 is raised by the groove cams 76 and 77 (see FIG. 2), and the next sealing / The process proceeds to the film forming process.
[0034]
At the delivery execution start angle position 57, the processing target container 46 is separated in the radial direction (radially outward) at the maximum with respect to the pocket 35, and the gap S between the processing target container 46 and the pocket 35 is expanded in the radial direction to the maximum. is doing. At the intermediate angular position 59, the processing target container 46 approaches the centripetal direction (radially inward) to the maximum with respect to the pocket 35, and the gap S between the processing target container 46 and the pocket 35 decreases to the minimum in the radial direction. In particular, the gap S is zero in the radial direction.
[0035]
The radial length of the gap S is equal to the offset amount D or slightly larger than the offset amount D. FIG. 2 shows such an offset amount D. The delivery on the derivation side is the same as the delivery on the introduction side described above in terms of the geometric and mechanical actions described above. FIG. 5 in which the rotation direction A and the rotation direction B are reversed to each other is drawn symmetrically with the intermediate angular position 59 as a mirror plane, describes the delivery on the derivation side.
[0036]
In the delivery on the derivation side, the processing target container 46 is fitted in the container receiver 44 while the pitch circle corresponding to the introduction side delivery insertion angle section 54 overlaps, that is, in the delivery take-out angle section. The height elevating column 25 rises and is extracted from the container receiver 44. Thereafter, a transfer movement is performed in which the transfer star wheel 13 'smoothly transfers to the orbit of the pitch circle.
[0037]
In the delivery described above, the delivery synchronization control is mechanically performed reliably without using the electronic control, and as a result, an increase in cost is suppressed. Synchronous rotation of the rotary support plate 23 and the rotary disk structure 12 is possible by gears.
[0038]
As shown in FIG. 2, when the track of the bottom surface of the processing target container 46 in the non-transfer transition angle section 53 is a track surface 62, the track surface 62 is positioned slightly above the upper end surface 63 of the lower chamber 39. is there.
[0039]
In FIG. 2, a plurality of star wheel plates 33 and 34 having different shapes of pockets 35 are attached to the height elevating column 25 in a replaceable manner so that the height position with respect to the height elevating column 25 can be adjusted. By attaching a plurality of lower chambers 39 having different dimensions 44 to the rotating disk structure 12 in a replaceable manner, a film forming process can be performed on a plurality of containers having different lengths and thicknesses.
[0040]
Example:
In a design example in which the pitch circle 56 is about 1000 mmφ, the pitch circle 51 is about 640φ, and the angle between the point P and the point Q is about 3 ° to about 6 ° (synchronous angle) with respect to the pitch circle 56, At a certain rotational speed, the following calculation result is obtained.
Offset amount (mm) 2 3 4 5 6
Length of line segment PQ (mm) 57.4 70.0 80.7 90.2 98.8
Synchronization angle (°) 3.2 3.9 4.5 5.0 5.5
[0041]
In this way, appropriate parameters are determined within a range in which the synchronization time, the synchronization angle, and the synchronization time are not too large and the offset amount is not too small. It is appropriate that the offset amount is 5 mm.
[0042]
【The invention's effect】
The rotary container transfer device and the transfer rotation structure of the film forming apparatus according to the present invention mechanically and smoothly execute transfer of the container from the track of one track surface to the other track of the lower track surface. can do.
[Brief description of the drawings]
FIG. 1 is a plan view showing an embodiment of a rotary container delivery device according to the present invention.
FIG. 2 is a cross-sectional view showing a transport system.
FIG. 3 is a plan view showing a part of FIG. 2;
4 is a plan view showing another part of FIG. 2; FIG.
FIG. 5 is a geometric action diagram showing delivery.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 8 ... Vacuum distributor 11 ... Chamber 12 ... 2nd turntable 21 ... Vertical direction guide rail 21 '... Lower surface 23 ... 1st turntable 24 ... Vertical direction guide 25 ... Elevator 27 ... Coil spring 31 ... Rolling roller 34 ... tooth surface forming plate 35 ... first support surfaces 39, 41 ... support device 42 ... electrode 44 ... second support surfaces 45, 45-1, 2 ... guide 46 ... container 49 ... first support surface 51 ... first pitch circle 54 ... Crossing angle area 56 ... Second pitch circle S ... Gap

Claims (12)

A first turntable;
A second turntable for receiving a container from the first turntable;
The first turntable has a plurality of first support surfaces that dynamically support a container that revolves coaxially with the first turntable in a radial direction,
The second turntable has a plurality of second support surfaces that fixedly support the container revolving coaxially with the second turntable in a radial direction,
A first revolving track on which the container rotates in unison with the first rotating disk and a second revolving track on which the container rotates in unison with the second rotating disk cross each other;
A gap is provided between the container and the first support surface for reciprocating movement of the container supported by the guide in the radial direction in a crossing angle region where the first revolution track and the second revolution track intersect. And
The guide guides the container into the gap and transfers from the first revolution track to the second revolution track,
A plurality of lifting mechanisms supported by the first rotating disk and further supporting the container in the vertical direction on the first rotating disk and moving up and down in the vertical direction in the axial direction of the first rotating disk;
The container that revolves in conformity with the second revolving trajectory in the crossing angle region is lowered in the vertical direction by the elevating mechanism in the axial direction of the second turntable while being supported by the first support surface ,
The lifting mechanism is a rotary container delivery device that supports the lower surface of the circular protruding portion of the neck of the container. The rotary container delivery device according to claim 1, wherein a contact surface of the container that contacts the first support surface is a cylindrical surface. The apparatus for transferring a rotary container according to claim 1, wherein the first support surface is formed in an elevating portion of the elevating mechanism. Further comprising the guide fixedly arranged in the circumferential region of the first rotating disk,
The rotary container delivery device according to claim 1, wherein the guide has a guide surface that guides the revolving motion of the container that revolves while being supported by the first support surface. The guide is
A first guide surface;
A second guide surface,
The rotary container delivery device according to claim 4, wherein the first guide surface guides the container in the crossing angle region, and the second guide surface guides the container in a region other than the crossing angle region. A first turntable;
A second turntable for receiving containers from the first turntable;
A plurality of chambers rotating together with the second turntable;
A plurality of evacuation lines for evacuating the plurality of chambers with different degrees of vacuum;
A vacuum distributor that rotates together with the second turntable and connects the plurality of chambers to the plurality of evacuation lines in a switchable manner ;
Comprising a guide fixedly arranged in a peripheral area of the first rotating disk ,
The first turntable has a plurality of first support surfaces that dynamically support a container that revolves coaxially with the first turntable in a radial direction,
The second turntable has a plurality of second support surfaces that fixedly support the container revolving coaxially with the second turntable in a radial direction,
The guide has a guide surface that guides the revolving motion of the container that revolves while being supported by the first support surface;
A first revolving track on which the container rotates in unison with the first rotating disk and a second revolving track on which the container rotates in unison with the second rotating disk cross each other;
A gap for reciprocating movement of the container supported by the first support surface in the radial direction in a crossing angle region where the first revolution track and the second revolution track cross each other is provided between the container and the first support surface. Given during
The guide guides the container into the gap and transfers from the first revolution track to the second revolution track,
A plurality of lifting mechanisms supported by the first turntable and supported by the first turntable in the vertical direction and vertically moved in the axial direction of the first turntable, and further in the crossing angle region . The container that revolves so as to coincide with the two orbits is lowered in the vertical direction by the elevating mechanism in the axial direction of the second rotating disk while being supported by the first support surface ,
The second rotating disk further includes a support that rotates in the same body and supports the plurality of containers respectively.
The second support surface is formed on the support,
The support is an electrode that supplies power to a plasma gas deposited on the container in the chamber,
The elevating mechanism is a delivery rotation structure of a film forming apparatus that supports the lower surface of the circular protruding portion of the neck portion of the container. The lifting mechanism is
A vertical direction guide,
An elevator which is guided by the vertical direction guide and moves up and down;
A rotation direction supporter supported by the elevator to support the container in the rotation direction;
The delivery rotation structure of the film forming apparatus according to claim 6, wherein the first support surface is formed on the rotation direction supporter. 8. The film forming apparatus delivery rotating structure according to claim 7, wherein the rotation direction supporter is supported by the elevator in a replaceable manner. Further comprising a vertical guide rail for guiding the elevator vertically.
The vertical guide rail is fixedly arranged,
The elevator comprises a rolling roller;
The elevating mechanism further includes a coil spring that normally pushes the elevator upward in the vertical direction,
9. The film forming apparatus delivery rotating structure according to claim 8, wherein the rolling roller rolls on a lower surface of the vertical guide rail. The second support surface formed by the electrode is:
A bottom surface supporting the bottom surface of the container;
10. The transfer rotation structure for a film forming apparatus according to claim 8, further comprising a surface that supports an outer peripheral surface of the container. The transfer rotating structure of the film forming apparatus according to claim 10, wherein the electrodes are exchangeably supported by the second turntable. The said guide has a raceway surface that guides the bottom surface of the container, and the raceway surface is formed in a horizontal plane in a region other than the crossing angle region. The transfer rotation structure of the film-forming apparatus of the term.

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