JP2004079987A - Method for processing mask data and mask writing system - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for processing mask data capable of efficiently decreasing the data volume of mask data, and to provide a mask writing apparatus capable of writing a mask by taking in data which are compressed with a function description. <P>SOLUTION: A plurality of forms and arrangements of drawing written on a mask are expressed by a function definition and a function call to process data. The mask writing system comprises a data processing function part for generating pattern data by taking in the data described by those functions, and a writing function part for writing on the mask in accordance with the pattern data. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method of processing pattern data (mask data) drawn on a mask used in a lithography process of manufacturing a semiconductor device, and a mask drawing device for manufacturing a mask used in a lithography process.
[0002]
[Prior art]
Writing is performed on a mask used in a lithography process of manufacturing a semiconductor integrated circuit according to pattern data called mask data. The mask data has a rectangle and a trapezoid as graphic elements. For example, as shown in FIGS. 21A and 21B, a polygon layout pattern is represented by a combination of a rectangle 11 and a trapezoid 12. It is assumed that a triangle is included in a trapezoid.
[0003]
2. Description of the Related Art The size of mask data has been increasing with the increase in the degree of integration of semiconductor integrated circuits. If the mask data size is large, there arise problems that the data transfer time becomes longer and the data processing speed becomes slower. Therefore, in the conventional mask data, the following method has been considered as a method of reducing the data size.
[0004]
The first method is applied to a group of figures arranged in a matrix at equal intervals in the X direction and the Y direction, as shown in FIG. In the case of such an array, graphics are registered in a library, and the registered graphics are referenced (referenced) together with the number of arrays (NX, NY) and pitches (DX, DY), thereby compressing data and performing data processing. The amount can be reduced.
[0005]
FIG. 23A is a representation of the graphic group of FIG. 22 before compression. FIG. 23B is an expression after compression in which the data of FIG. 23A is registered in a library. As shown in FIG. 23A, the keyword “rectangle” is used for six rectangles in the mask data. The underlined portion indicates a keyword in the mask data format. The keyword “rectangle” indicates that a rectangle having a width W and a height H is arranged at the position (X, Y). X, Y, W, and H are variables. As shown in FIG. 23B, data is compressed by using the keywords “library” and “reference”.
[0006]
The keyword library represents the definition of a figure. FIG. 23B shows that one rectangle is included in the definition of the library 1. The keyword “reference” indicates that the graphic defined in the library 1 is arranged at the position (X1, Y1) by the number (NX, NY) and the pitch (DX, DY) with reference to the definition of the library 1. .
[0007]
The second method is applied to a group of figures in which homologous figures are arranged at a plurality of locations, as shown in FIG. In this example, two rectangles are arranged at the same position in each of three places. By registering such a group of figures having the same positional relationship in the library and referring to the registered group of figures, data can be compressed and the amount of data processing can be reduced.
[0008]
FIG. 25A is a representation of the graphic group of FIG. 24 before compression. FIG. 25B is an expression after compression in which the data of FIG. 24 is registered in a library. When compression is not performed, as shown in FIG. 25A, the rectangle of the keyword is used for six rectangles in the mask data. As shown in FIG. 25B, the data is compressed by using the keywords “library” and “reference”.
[0009]
FIG. 25B shows that the definition of the library 2 includes two rectangles. The keyword “reference” indicates that the graphic defined in the library 2 is arranged at three positions: (X1, Y3), (X3, Y1), and (X5, Y2).
[0010]
Conventional mask data compression methods include, for example, Japanese Patent Application Laid-Open No. 2000-106337, “Database Creation / Maintenance Method and Electron Beam Exposure System Using the Method”, and Japanese Patent Application Laid-Open No. H10-149378, “Data Processing Method, Mask Pattern Data Processing Method, Data Processing Apparatus, and Mask Pattern Data Processing Apparatus ". JP-A-2002-92063 discloses a data compression method using cells, and JP-A-2002-92064 discloses a data compression method using an array.
[0011]
[Problems to be solved by the invention]
Although the data amount is also reduced by the above-described conventional mask data compression method, it is desired to further reduce the data amount in order to cope with high integration of a semiconductor integrated circuit. According to the conventional method, a set of figures having regular shapes but not similar to each other, or a set of figures that are not arranged in a matrix as shown in FIG. Did not.
[0012]
The mask data is obtained by correcting layout data created by CAD, and the corrected mask data is transferred to a mask drawing apparatus. In order to transfer or correct data, a smaller amount of data is advantageous for speeding up processing. As described above, when data is compressed, if data is decompressed (decompressed) before data is transferred to the mask drawing apparatus, the data transfer time to the mask drawing apparatus becomes longer.
[0013]
The present invention has been made in view of the above-described problems, and accordingly, the present invention provides a mask data processing method capable of efficiently reducing the amount of mask data and speeding up data processing and data transfer. With the goal.
It is another object of the present invention to provide a mask drawing apparatus capable of transferring compressed data to a mask drawing apparatus in a short time and shortening the entire required time of mask drawing.
[0014]
[Means for Solving the Problems]
In order to achieve the above object, a mask data processing method according to the present invention is characterized in that shapes and arrangements of a plurality of figures drawn on a mask are represented by function definitions and function calls, and data processing is performed.
This makes it possible to compress pattern data of a group of figures that could not be compressed by the conventional compression method, further reducing the data amount and increasing the processing speed.
[0015]
In order to achieve the above object, the mask drawing apparatus of the present invention is a function defined in a shape and an arrangement of a plurality of figures drawn on a mask, wherein the function calls the function and specifies a value specifying the figure. By substituting into the variables of, recognizes the function generated by pattern data representing a plurality of figures, a data processing function unit that generates the pattern data, and according to the pattern data generated by the data processing function unit, A drawing function unit for drawing on a mask.
[0016]
This makes it possible to transfer the data compressed by the function description to the mask drawing apparatus and perform drawing. Therefore, the data transfer time to the mask drawing apparatus can be reduced, and the overall required time for mask drawing can be reduced.
[0017]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of a mask data processing method and a mask drawing apparatus according to the present invention will be described with reference to the drawings.
In the mask data processing method according to the present embodiment, the arrangement and shape of a figure are described as functions in mask data. Further, the mask drawing apparatus of the present embodiment has a function of drawing according to the mask data described as a function.
[0018]
Functions receive parameters as arguments and store variables in the function. In the function, processing procedures such as condition judgment and repetition are controlled. The processing result of the function is the arrangement and shape of the figure.
The amount of data can be reduced by describing a set of figures whose shape changes regularly or a set of figures whose arrangement is not a matrix but regular, using a function. According to such a function, it is possible to compress a figure which is not to be compressed by the conventional method, so that the size of the mask data can be further reduced as compared with the conventional method.
[0019]
[1. Function description method]
First, a function definition and a function call described in the mask data will be described. Function definitions include arguments that pass parameters. Items to be described in the function definition include variables, substitution and calculation of numbers using the variables, condition judgment, repetition, rectangular and trapezoidal generation functions, and the like.
[0020]
FIG. 1 shows the structure of the function definition and the function call described in the mask data. As shown in FIG. 1, the function definition includes a function identification indicator (function ID), an argument, and a processing unit. The processing unit is described using processing of variables, substitution / calculation, condition judgment, repetition, and figure generation.
[0021]
In the following description, an underlined portion indicates a keyword in the mask data format. The mask data is represented by a fixed data size. In addition, a portion enclosed by “” indicates that a numeral, a variable, a processing content, and the like are described.
[0022]
FIG. 2 shows the function definition (1) of FIG. FUNCTION From END-FUNCTION Indicates a function definition. FUNCTION Indicates the start of a function definition. END-FUNCTION Indicates the end of the function definition. 'FUNCTION-ID' is an ID for identifying a function. By changing the ID, a plurality of different functions can be defined.
[0023]
'PARAMETER' indicates an argument received by the function. A list of variable names such as P1, P2,... Is specified in parentheses. Variables in parentheses are used for assignment, calculation, and description of conditions. Variable types are integers and decimals.
'FUNCTION-BODY' indicates a processing part of the function. Describe the processing contents of the function in the processing unit.
[0024]
FIG. 3 shows (1-1) variables in FIG. 'VARIABLE' indicates a variable used in the processing section of the function. Variable names such as Q1, Q2,... Are used for substitution, calculation, and description of conditions. The type of the variable is an integer, a decimal number, or the like.
[0025]
FIG. 4 shows (1-2) substitution and calculation of FIG. In the processing section of the function, = is used to substitute for a variable. Perform calculations using operators and parentheses. Substitute the result of the calculation into a variable using =.
[0026]
FIG. 5 shows the (1-3) condition determination in FIG. IF ( 'CONDITION' ) From ELSE Through END-IF Until the condition 'CONDITION' is satisfied, the processing content 'IF-BODY' is processed, and when the condition 'CONDITION' is not satisfied, the processing content 'ELSE-BODY' is processed.
'CONDITION' indicates a condition. Conditions are described using variables, constants, equal signs, inequalities, and the like.
[0027]
FIG. 6 shows a condition (1-4a) in (1-4) repetition of FIG. WHILE From END-WHILE Indicates that the processing content 'WHILE-BODY' is processed while the condition 'CONDITION' is satisfied.
[0028]
FIG. 7 shows (1-4b) counts among (1-4) repetitions of FIG. The processing from FOR to END-FOR is performed by substituting the initial value 'START-I' for the variable 'I' and increasing the variable 'I' by one until the variable 'I' becomes the final value 'END-I'. Indicates that 'FOR-BODY' is to be processed.
[0029]
FIG. 8 shows the (1-5) graphic generation function of FIG. RECTANGLE Indicates that a rectangle having a width of “W” and a height of “H” is arranged at a position of “(X, Y)”. 'X', 'Y', 'W', 'H' are variables.
X-TRAPEZOID Indicates that a trapezoid of four vertices (X1, Y1), (X2, Y1), (X3, Y2), and (X4, Y2) is arranged. 'X1', 'Y1', 'X2', 'X3', 'X4', 'Y2' are variables.
Y-TRAPEZOID Indicates that a trapezoid of four vertices (X1, Y1), (X1, Y2), (X2, Y3), and (X2, Y4) is arranged. 'X1', 'Y1', 'Y2', 'Y3', 'X2', 'Y4' are variables.
[0030]
FIG. 9 shows (2) the function call of FIG. FUNCTION-CALL From END-FUNCTION-CALL Calls and executes the function definition corresponding to the function ID 'FUNCTION-ID'.
FUNCTION-CALL Indicates a function call. END-FUNCTION-CALL Indicates the end of a function call, that is, the end of a parameter.
The parameter 'PARAMETER' indicates an argument to be passed in the function definition.
[0031]
[2. Function description example]
According to the present invention, the function definition is executed at the location of the function call to generate a rectangular or trapezoidal graphic pattern. Here, an example of a function definition and a function call described in the mask data is shown.
[0032]
(Description example 1)
Description example 1 is a function definition of a pattern having a rectangular hole in a rectangle. FIG. 10 shows a graphic pattern described in the description example 1. As shown in FIG. 10, a pattern having a rectangle in a rectangle is called a donut-shaped pattern.
[0033]
The basic pattern drawn by the mask drawing apparatus is a rectangle or a trapezoid. Thus, such a donut-like pattern is divided into a plurality of rectangles or trapezoids.
[0034]
In the example of FIG. 10, four donut-like patterns I, II, III, and IV are indicated by oblique lines. The line dividing each donut-shaped pattern is shown by a solid line. The donut-shaped pattern I is divided into four rectangles a to d. The other patterns II to IV are similarly divided into four rectangles a to d, respectively.
[0035]
FIG. 11 shows the function definition according to the description example 1, and FIG. 12 shows the correspondence between the variables described in FIG. 11 and the graphics. The first line in FIG. 11 shows variables of the function 1. As shown in FIG. 12, the position of the rectangle outside the donut-shaped pattern is indicated by (X1, Y1), the width is indicated by W1, and the height is indicated by H1. The position of the rectangle inside the donut pattern is indicated by (X2, Y2), the width is indicated by W2, and the height is indicated by H2.
[0036]
The second line in FIG. 11 indicates that the position of the rectangle a when each of the donut-shaped patterns in FIG. 10 is divided is (X1, Y1), the width is X2-X1, and the height is H1. The third line in FIG. 11 indicates that the position of the rectangle b when each donut-shaped pattern in FIG. 10 is divided is (X2, Y1), the width is W2, and the height is Y2-Y1.
[0037]
The fourth line in FIG. 11 indicates that the position of the rectangle c when each donut-shaped pattern in FIG. 10 is divided is (X2, Y2 + H2), the width is W2, and the height is H1-H2-Y2 + Y1. The fifth line in FIG. 11 indicates that the position of the rectangle d when each donut-shaped pattern in FIG. 10 is divided is (X2 + W2, Y1), the width is W1-W2-X2 + X1, and the height is H1.
[0038]
FIG. 13 shows a function call according to description example 1. The first line in FIG. 13 calls the donut-shaped pattern I in FIG. The called function generates data of four rectangles a to d obtained by dividing the donut pattern. Similarly, the second row of FIG. 13 calls the donut-shaped pattern II of FIG. 10 specified by the function 1, and the called function generates data of four rectangles a to d.
[0039]
Further, the donut-shaped pattern III of FIG. 10 designated by the function 1 is called by the third line of FIG. 13, and the called function generates data of four rectangles a to d. According to the fourth line in FIG. 13, the donut-shaped pattern IV of FIG. 10 specified by the function 1 is called, and the called function generates data of four rectangles a to d.
[0040]
For comparison, FIG. 14 shows an example in which the graphic pattern of FIG. 10 is described by a conventional method. rectangle XYWH indicates that a rectangle having a width W and a height H is arranged at the position (X, Y). X, Y, W, and H are variables. The four patterns I to IV shown in FIG. 10 are common in that they are all donut-shaped patterns, but the shape and size of each donut-shaped pattern or the shape and size of a rectangle obtained by dividing each donut-shaped pattern are different from each other. . Therefore, data cannot be compressed by the method described with reference to FIGS. When all the division patterns shown in FIG. 10 are described, data of 16 rows is obtained as shown in FIG.
[0041]
As can be seen from a comparison between the description example 1 (FIGS. 11 and 13) according to the present invention and the description example (FIG. 14) according to the conventional method, the pattern represented as four rectangles in the conventional method is different from the description example 1 in FIG. Expressed as a function call. For example, the pattern data represented by the first to fourth lines in FIG. 14 is represented by a function call on the first line in FIG.
[0042]
Here, the data sizes of the above description example 1 (FIGS. 11 and 13) and the conventional description example (FIG. 14) will be compared. To simplify the comparison, assume that the underlined keywords, variables, operators and parentheses are represented by one word (= 2 bytes). In one word, a variable is represented by a character string of 1 to 4 characters. Keywords, operators, and parentheses are represented by binary codes. It is also assumed that values (integers or decimals) such as coordinates and lengths are represented by two words (= 4 bytes).
[0043]
Based on the above assumptions, in the description example 1 according to the present invention, the first line of FIG. 11 showing the function definition is 12 words, the second line is 9 words, the third line is 9 words, and the fourth line is Are 17 words, the fifth row is 17 words, and the sixth row is 1 word. Therefore, the data size of the function definition is estimated to be 65 words in total.
[0044]
The first line in FIG. 13 showing the function call has 19 words. Of these 19 words, the keyword and the function ID are 3 words each for one word, and the eight values of coordinates, width and height are 16 words for each 2 words. The second to fourth rows in FIG. 13 have 19 words, like the first row. Therefore, the data size of the function call is estimated to be 76 words in total. The sum of the data size of the function definition and the data size of the function call is 141 words.
[0045]
On the other hand, the first line in FIG. 14 showing a description example according to the conventional method has 9 words. Out of these nine words, one keyword is used, and four values of coordinates, width, and height are each two words, that is, eight words in total. The second to sixteenth rows in FIG. 14 have nine words, like the first row. Therefore, the data size of the conventional example is estimated to be 144 words in total.
[0046]
As described above, when the number of donut-shaped patterns having a rectangle in a rectangle is N, the data size is 65 + 19 × N (word) in the present invention. On the other hand, in the case of the conventional method, it becomes 36 × N (word). Therefore, if N is 4 or more, the description example 1 according to the present invention is more advantageous in reducing the data amount.
[0047]
(Description example 2)
The description example 2 is a function description of a set of rectangles having the same shape and arranged at equal intervals in an oblique direction. FIG. 15 shows a graphic pattern described in the description example 2.
FIG. 16 shows a function definition according to the description example 2, and the first line in FIG.
[0048]
The position of each rectangle shown in FIG. 15 is (X, Y), the width is W, the height is H, the pitch in the X direction is P1, and the pitch in the Y direction is P2. The number of rectangles is indicated by N. The second line in FIG. 16 shows that I is changed from 0 to N−1 by one. The third line in FIG. 16 indicates that the position of the rectangle is (X + P1 * I, Y + P2 * I), the width is W, and the height is H.
FIG. 17 shows a function call according to description example 2. In one function call shown in FIG. 17, ten rectangles shown in FIG. 15 are called.
[0049]
For comparison, FIG. 18 shows an example in which the graphic pattern of FIG. 15 is described by a conventional method. In the pattern shown in FIG. 15, since ten rectangles have the same shape, a figure can be registered in the library. The first line in FIG. 18 indicates that the library 1 arranges a rectangle having a width of 10 and a height of 10 at the position (0, 0). The second to eleventh lines in FIG. 18 indicate the positions of the graphics registered in the library 1. When such registration is performed, the data is compressed as compared to a case where the position, width, and height are described for all rectangles, as shown in FIG. 14, for example.
[0050]
Based on the same assumption as in the above description example 1, the data size of the description example 2 (FIGS. 16 and 17) and the corresponding conventional description example (FIG. 18) are compared. In the description example 2 according to the present invention, the first line of FIG. 16 showing the function definition is 11 words, the second line is 8 words, the third line is 17 words, the fourth line is 1 word, and the fifth line The eye is one word. Therefore, the data size of the function definition is estimated to be 38 words in total.
[0051]
FIG. 17 showing a function call is roughly estimated to be 17 words per line. Of these 17 words, the keyword and the function ID are 3 words in each one word, and the seven values of coordinates, width, height, pitch, and rectangle number are 14 words in total, 2 words each. The sum of the data size of the function definition and the data size of the function call is 55 words.
[0052]
On the other hand, the first line of FIG. 18 showing a description example according to the conventional method has 11 words. Of these 11 words, the keyword is 2 words, the library ID is 1 word, and the four values of coordinates, width and height are 2 words, each of which is 8 words in total. The second line in FIG. 18 has six words. Of these six words, the keyword is one word, the library ID is one word, and the two values of coordinates are two words each, for a total of four words. The third to eleventh rows in FIG. 18 have six words, similar to the second row. Therefore, the data size of the conventional example is estimated to be 71 words in total.
[0053]
As described above, the data size when the number of rectangles of the same shape arranged at equal intervals in the oblique direction is N is 38 + 17 = 55 (words) in the case of the present invention, and is constant. On the other hand, in the case of the conventional method, it is 11 + 6 × N (word). Therefore, if N is 8 or more, the description example 2 according to the present invention is more advantageous in reducing the data amount.
[0054]
[3. Mask drawing equipment]
Inside the mask drawing apparatus of the present embodiment, there are a data processing function section for processing mask data and a drawing function section for drawing a pattern on a mask. The data processing function unit reads the mask data in which the function is described, and outputs data for controlling the drawing. The drawing function unit draws a pattern according to the output data of the data processing function unit. The drawing function unit performs drawing by, for example, irradiating the mask with an electron beam.
[0055]
As a method of processing the mask data including the function description of the present invention by the data processing function unit, there are real-time processing and batch processing. FIG. 19 shows the configuration of a mask drawing apparatus compatible with real-time processing. FIG. 20 shows the configuration of a mask drawing apparatus that supports batch processing.
[0056]
In the mask drawing apparatus shown in FIG. 19, the data processing function unit 1 processes the description contents of the mask data in real time. That is, when drawing a mask, mask data including a function description is executed and interpreted in real time. The pattern data for drawing as a result of execution and interpretation is transferred to the drawing function unit 2, and the operation of the drawing function unit 2 is controlled. The real-time execution interpretation includes execution interpretation while buffering mask data including a function description.
[0057]
In the mask drawing apparatus shown in FIG. 20, the data processing function unit 1 collectively converts the description contents of the mask data into drawing pattern data. When performing drawing, the converted drawing pattern data is transferred to the drawing function unit 2, and the operation of the drawing function unit 2 is controlled.
[0058]
According to the mask drawing apparatus of the present embodiment, since it is possible to take in the mask data in which the function is described and perform drawing, the time for transferring the mask data to the mask drawing apparatus can be reduced. Therefore, the overall required time for mask drawing can be reduced.
[0059]
Embodiments of the mask data processing method and the mask drawing apparatus of the present invention are not limited to the above description. For example, in the above description example, a rectangle is shown, but when a figure includes a trapezoid, [1. Function description method], and data can be compressed by performing a function description in the manner described in [1. Further, the mask data processing method of the present invention can be applied not only to a stencil mask for electron beam lithography but also to the manufacture of a mask used in other processes such as ion beam lithography and ion implantation. In addition, various changes can be made without departing from the spirit of the present invention.
[0060]
【The invention's effect】
According to the mask data processing method of the present invention, the amount of mask data can be efficiently reduced.
According to the mask drawing apparatus of the present invention, it is possible to take in data compressed by a function description, and it is possible to shorten the data transfer time.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of a function description according to a mask data processing method of the present invention.
FIG. 2 shows a method of describing a function definition by a mask data processing method according to the present invention.
FIG. 3 shows a method of describing a function definition according to the mask data processing method of the present invention.
FIG. 4 shows a method of describing a function definition by the mask data processing method of the present invention.
FIG. 5 shows a method of describing a function definition according to the mask data processing method of the present invention.
FIG. 6 shows a method of describing a function definition according to the mask data processing method of the present invention.
FIG. 7 shows a method of describing a function definition according to the mask data processing method of the present invention.
FIG. 8 shows a method of describing a function definition according to the mask data processing method of the present invention.
FIG. 9 shows a method of describing a function call according to the mask data processing method of the present invention.
FIG. 10 shows a graphic pattern described as a function in the description example 1 of the mask data processing method of the present invention.
FIG. 11 shows a function definition of a description example 1 of the mask data processing method of the present invention.
FIG. 12 is a diagram illustrating a relationship between the graphic pattern in FIG. 10 and the variables in FIG. 11;
FIG. 13 shows a function call of a description example 1 of the mask data processing method of the present invention.
FIG. 14 is a conventional example as a comparative example of the description example 1 of the mask data processing method of the present invention.
FIG. 15 shows a graphic pattern described by a function in a description example 2 of the mask data processing method of the present invention.
FIG. 16 shows a function definition of a description example 2 of the mask data processing method of the present invention.
FIG. 17 shows a function definition of a description example 2 of the mask data processing method of the present invention.
FIG. 18 is a conventional example as a comparative example of the description example 2 of the mask data processing method of the present invention.
FIG. 19 is a configuration diagram of a mask drawing apparatus of the present invention.
FIG. 20 is a configuration diagram of a mask drawing apparatus of the present invention.
FIGS. 21A and 21B show an example of division of a layout pattern.
FIG. 22 shows an example of a graphic pattern whose pattern data can be compressed by a conventional mask data compression method.
23 (a) shows a description of the pattern data of FIG. 22 before compression, and FIG. 23 (b) shows a description of the pattern data of FIG. 22 after compression.
FIG. 24 shows another example of a graphic pattern in which pattern data can be compressed by a conventional mask data compression method.
25 (a) shows a description of the pattern data of FIG. 24 before compression, and FIG. 25 (b) shows a description of the pattern data of FIG. 24 after compression.
[Explanation of symbols]
1 ... data processing function unit, 2 ... drawing function unit, 11 ... rectangle, 12 ... trapezoid.

Claims (5)

A mask data processing method in which the shapes and arrangements of a plurality of figures drawn on a mask are represented by function definitions and function calls, and data processing is performed. 2. The mask data processing method according to claim 1, wherein the function definition includes a function identification indicator, an argument, and a processing unit. 3. The processing unit according to claim 2, wherein the processing unit includes a variable, a calculation formula in which the value is substituted and calculated, a condition determination unit that controls execution of the calculation process, and a repetition unit that specifies repetition of the calculation process. Mask data processing method. The plurality of figures each include a plurality and the same number of figure elements,
The graphic element is a rectangle or a trapezoid,
The arrangement of the graphic elements is common among all figures,
2. The mask data processing method according to claim 1, wherein the sizes of the graphic elements are different between the respective graphics. A function defined for the shape and arrangement of a plurality of figures to be drawn on a mask, wherein the pattern data representing the plurality of figures is obtained by calling the function and assigning a value specifying the figure to a variable of the function. A data processing function unit that recognizes the function to be generated and generates the pattern data;
A drawing function unit configured to draw on a mask in accordance with the pattern data generated by the data processing function unit.

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