JP2004068034A - Nozzle apparatus and intermetallic compound formation apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a nozzle apparatus in which clogging hardly occurs even on continuous operation for a long period of time, and the smooth and continuous discharge of a molten material is possible. <P>SOLUTION: A discharge nozzle 31 is formed of mutually separable inner cylinder part 32 and outer cylinder parts 33, 34 and 35. A space 370 is formed between the outer circumferential face of the inner cylinder part 32 and the inner circumferential faces of the outer cylinder parts 34 and 35. A flat space 371 is formed between the bottom face 324 of the circumferential wall part 320 in the inner cylinder part 32 and the upper face 353 of the bottom part 352 in the outer cylinder part 35. The center of the bottom part 352 in the outer cylinder part 35 is provided with a discharge hole 351. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a nozzle device for discharging a molten material to a substrate and an intermetallic compound forming device provided with the nozzle device.
[0002]
[Prior art]
It is essential to develop a light-weight and excellent heat-resistant material as a structural material for use in next-generation automobiles, ships, transportation equipment such as aerospace equipment, and heat engines of energy plants. Intermetallic compounds such as aluminides, which are expected as high-strength heat-resistant materials, are materials meeting such conditions. Intermetallic compounds such as NiAl and TiAl are expected to be applied to engine parts, space aircraft body parts, and the like as high-temperature materials that can be used at 800 ° C. to 1000 ° C.
[0003]
Therefore, researches for practical use, such as optimization of the composition or structure of the intermetallic compound and improvement in performance, development of a processing method for obtaining a desired structure, and the like have been conducted. JP-A-2002-30463 discloses a coating method and a coating apparatus for coating an intermetallic compound for the purpose of imparting corrosion resistance and wear resistance to the surface of a metal material. In the coating apparatus described in JP-A-2002-30463, powder metal such as nickel is deposited on a substrate surface from a deposition nozzle, and subsequently, molten metal such as aluminum is discharged from a discharge nozzle onto the substrate surface. A self-heating reaction between the powder metal and the molten metal forms a coating layer of an intermetallic compound on the substrate.
[0004]
FIG. 8 is a schematic sectional view of a discharge nozzle used in a conventional coating apparatus. A molten aluminum 302 is accommodated in the ejection nozzle 301. An argon gas 303 is supplied into the inside of the discharge nozzle 301, and the upper surface of the molten aluminum 302 is pressurized, so that an aluminum droplet 305 is discharged from the hole 304 at the tip of the discharge nozzle 301. As a result, aluminum droplets 305 are ejected onto the powdered nickel deposition layer 306 formed on the base material 2 in advance, and minute NiAl element pieces are formed by the firing synthesis reaction. By moving the discharge nozzle 301, a coating layer made of the intermetallic compound NiAl can be formed on the base material 2.
[0005]
[Problems to be solved by the invention]
In order to form a coating layer practically, it is necessary to continue the operation of the coating apparatus to some extent continuously. However, in the discharge nozzle 301 of FIG. 8, the hole 304 at the tip may be clogged due to friction or temperature gradient between the molten aluminum 302 and the inner surface of the nozzle. If the hole 304 at the distal end is clogged, it is necessary to stop the operation of the coating apparatus and perform cleaning and readjustment of the discharge nozzle 301 or replacement of the discharge nozzle 301. Therefore, it is difficult to continuously discharge molten aluminum for a long time. Also, when optimizing the size of the aluminum droplet 305 or the like according to the thickness of the coating layer or the moving speed of the discharge nozzle 301, adjustment of the hole 304 at the front end portion or adjustment of the discharge nozzle 301 is performed each time. Need to make a replacement and not productive.
[0006]
SUMMARY OF THE INVENTION An object of the present invention is to provide a nozzle device which is less likely to be clogged even when operated continuously for a long time and which can discharge a molten material smoothly and continuously.
[0007]
Another object of the present invention is to provide a nozzle device that can easily optimize droplets of a molten material to be discharged.
[0008]
Still another object of the present invention is to provide an intermetallic compound forming apparatus capable of forming a high-quality intermetallic compound even when a long-time continuous operation is performed.
[0009]
Means for Solving the Problems and Effects of the Invention
A nozzle device according to the present invention is a nozzle device that discharges a molten material, and includes an outer cylinder portion and an inner cylinder portion that are configured to be separable from each other, and the outer cylinder portion discharges a peripheral wall portion having an inner peripheral surface. A bottom portion provided with a hole, the inner cylinder portion has a peripheral wall portion having an outer peripheral surface, and a bottom surface provided with a gas introduction hole, and an inner peripheral surface of the outer cylinder portion and an outer peripheral surface of the inner cylinder portion. And a first space for accommodating the material source is formed between the bottom surface of the outer cylinder portion and the bottom surface of the inner cylinder portion. A second space for holding the thin film layer is formed.
[0010]
In the nozzle device according to the present invention, the material source is accommodated in the first space between the inner peripheral surface of the outer cylindrical portion and the outer peripheral surface of the inner cylindrical portion, and the bottom upper surface of the outer cylindrical portion and the bottom surface of the inner cylindrical portion The thin film layer of the molten material supplied from the first space can be formed in the second space between the first and second spaces. The thin film layer is held in the second space by surface tension. By pressing the upper surface of the thin film layer with a gas through the gas introduction hole, droplets of the molten material can be discharged from the discharge hole. After the ejection of the droplets, the molten material is further supplied from the first space to the second space, and the molten material forms a thin film layer by surface tension. Therefore, the molten material does not remain in the discharge holes and clogging hardly occurs, so that the molten material can be smoothly and continuously discharged.
[0011]
Further, the outer tube portion and the inner tube portion can be separated from each other. Therefore, even if the discharge holes are clogged, only the outer tube portion can be removed and cleaned or replaced, so that the cleaning operation or replacement operation is easy. Also, the cost of replacement parts is reduced.
[0012]
The top surface of the bottom of the outer cylinder and the bottom surface of the inner cylinder may each be a flat surface. In this case, a flat second space is formed by the bottom upper surface of the outer cylinder portion and the bottom surface of the inner cylinder portion. Therefore, by supplying the molten material to the flat second space, a flat thin film layer of the molten material is formed.
[0013]
It is preferable that the discharge hole and the gas introduction hole are arranged so as to face each other. In this case, since the discharge hole and the gas introduction hole face each other, the gas introduced from the gas introduction hole can be smoothly discharged from the discharge hole together with the molten material. Therefore, by introducing the gas from the gas introduction hole, the droplet of the molten material can be smoothly discharged from the discharge hole.
[0014]
The outer cylinder may be constituted by a plurality of members that are separably connected to each other. In this case, a cleaning operation or an exchange operation can be easily performed by removing a plurality of members constituting the outer cylindrical portion from each other.
[0015]
The outer cylinder portion may be configured by a first member including a bottom portion and a second member including a peripheral wall portion, and the first member and the second member may be separably coupled to each other. In this case, even if the discharge hole is clogged, the first member including the bottom portion can be removed and cleaned or replaced, so that the cleaning operation or the replacement operation is easy. Also, the cost of replacement parts is reduced.
[0016]
Preferably, each of the discharge hole and the gas introduction hole has a diameter in the range of 0.1 mm or more and 1 mm or less. In this case, the thin film layer of the molten material formed in the second space between the bottom upper surface of the outer cylinder portion and the bottom surface of the inner cylinder portion is reliably held in the second space by surface tension. Therefore, the molten material does not remain in the discharge holes and clogging is unlikely to occur.
[0017]
The nozzle device may further include a storage unit that stores the molten material to be introduced into the first space. In this case, the molten material can be replenished from the storage section to the first space. Therefore, there is no need to stop the operation for replenishment of the molten material, which is efficient.
[0018]
The nozzle device may further include a gas supply device that supplies gas to the internal space of the inner cylinder. In this case, by supplying gas to the inner space of the inner cylinder, the thin film layer of the molten material held in the second space between the bottom upper surface of the outer cylinder and the bottom of the inner cylinder is pressurized, Droplets of the molten material can be discharged from the discharge holes.
[0019]
The gas supply device may supply gas to the first space. In this case, after the liquid surface of the molten material accommodated in the first space is pressurized by gas, after the molten material is discharged into the second space between the bottom upper surface of the outer cylinder portion and the bottom surface of the inner cylinder portion, Molten material can be supplied reliably.
[0020]
The apparatus may further include a controller that controls the pressure of the gas supplied by the gas supply device in a pulsed manner. In this case, the pressure of the gas introduced from the gas introduction hole is controlled in a pulsed manner. Therefore, the droplets of the molten material can be discharged continuously or intermittently.
[0021]
The control device may control at least one of a time width and a time interval of the pulse. In this case, the supply time and supply interval of the gas supplied by the gas supply device can be controlled. Therefore, the size and the discharge speed of the droplet of the molten material discharged from the discharge hole can be controlled. As a result, it is possible to easily optimize the droplet to be discharged.
[0022]
An intermetallic compound forming apparatus according to the present invention includes a deposition apparatus that deposits a first substance on a base material, and discharges a molten material including a second substance onto the first substance on the base material. A nozzle device for forming an intermetallic compound layer of the first and second substances.
[0023]
In the apparatus for forming an intermetallic compound according to the present invention, a deposited layer made of the first substance is formed on the base material, and the molten material made of the second substance is discharged to the deposited layer on the base material by the nozzle device. Is done. Thereby, an intermetallic compound composed of the first and second substances is formed on the base material. Since the above-described nozzle device is used, clogging hardly occurs even when the nozzle device is operated for a long time, and the molten material can be smoothly and continuously discharged. As a result, a high-quality intermetallic compound can be formed even when a long-time continuous operation is performed.
[0024]
BEST MODE FOR CARRYING OUT THE INVENTION
ADVANTAGE OF THE INVENTION According to the intermetallic compound formation apparatus which concerns on this invention, the coating layer of an intermetallic compound can be efficiently formed on a base material by depositing a 1st substance and discharging a 2nd substance. The intermetallic compound means a compound in which a plurality of metal elements are bonded and have new properties different from those of the component metal elements. Here, the “coating layer” is referred to as a “build-up coating layer” when covering a base material, and is referred to as a “build-up welded portion” when welding a plurality of base materials. The first substance and the second substance are appropriately selected according to the desired properties of the intermetallic compound (for example, heat resistance, durability, environmental resistance, slidability, etc.).
[0025]
Hereinafter, an intermetallic compound forming apparatus according to an embodiment of the present invention will be described. Note that in this embodiment, nickel is used as the first substance and aluminum is used as the second substance.
[0026]
FIG. 1 is a schematic diagram showing an intermetallic compound forming apparatus according to one embodiment of the present invention.
[0027]
The intermetallic compound forming apparatus 1 includes a chamber 60. The XY table 10 is provided in the chamber 60 so as to be movable in two directions orthogonal to each other in a horizontal plane. On the XY table 10, elevating devices 12a and 12b for vertically moving the bases 11a and 11b are provided. The base material 2 is placed on each of the bases 11a and 11b. Thereby, the base material 2 on the bases 11a and 11b can move in the front-rear, left-right, and up-down directions. Thereby, the base 11a can be moved below the discharge unit 30 and the base 11b can be moved below the deposition unit 20.
[0028]
Further, in the chamber 60, a deposition unit 20 for depositing the powdered nickel 21 on the base material 2 placed on the base 11a, and molten aluminum can be discharged onto the base material 2 placed on the base 11b Discharge unit 30 is provided. The XY table 10 is configured to be rotatable around a vertical axis by a rotating device (not shown), for example.
[0029]
The deposition unit 20 functions as a powder nickel supply device. The deposition unit 20 contains powdered nickel inside. In addition, a sieve (sieving) machine 23 for appropriately dropping and supplying powdered nickel 21 having a predetermined particle size is provided below the deposition unit 20. By vibrating the sieving machine 23 with the vibrator 22, the powder nickel 21 drops from the deposition unit 20, and a powder deposition layer 80 is formed on the base material 2.
[0030]
The discharge unit 30 has a discharge nozzle 31 and functions as a molten aluminum droplet discharge device. Details of the structure of the discharge nozzle 31 will be described later. In order to heat and melt the molten aluminum in the discharge nozzle 31, a heat source 35 such as a resistance heater is provided so as to surround the periphery of the discharge nozzle 31.
[0031]
The inside of the chamber 60 is kept airtight under a vacuum state or an atmosphere of an inert gas such as argon or a reactive gas such as nitrogen (hereinafter, referred to as a “gas body”). Outside the chamber 60, a pressure reducing device 62 including a pump or the like for evacuating the inside of the chamber 60 to a vacuum state is provided. Further, in the chamber 60, a heater 61 composed of a high-frequency heat source or the like, a gas circulation device 63 composed of a blower or the like, a temperature detector 64, and a pressure gauge 65 are provided. The inside of the chamber 60 is heated by the heater 61, and the gas body in the chamber 60 is circulated by the gas circulation device 63. Further, the temperature of the substrate 2 on the bases 11 a and 11 b is detected by the temperature detector 64, and the pressure in the chamber 60 is measured by the pressure gauge 65.
[0032]
A gas pipe 51 for supplying a gas body into the chamber 60 is provided outside the chamber 60. The gas pipe 51 branches into a gas pipe 52 that directly guides the gas body to the chamber 60 and a gas pipe 53 that guides the gas body to the discharge nozzle 31. When the inside of the chamber 60 is evacuated, no gas is supplied from the gas pipe 52 to the chamber 60. Further, the gas pipe 51 is provided with a gas supply device 54 for controlling the pressure of the gas supplied to the gas pipe 53.
[0033]
A control unit 70 and a computer unit 71 are provided outside the intermetallic compound forming apparatus 1, and the intermetallic compound forming apparatus 1 is automatically controlled.
[0034]
The computer unit 71 is used to create design data such as coordinate data based on a design pattern for covering the substrate 2 two-dimensionally or three-dimensionally. The control unit 70 is based on the design data obtained by the computer unit 71, the temperature detected by the temperature detector 64, and the pressure measured by the pressure gauge 65, based on the XY table 10, the elevating devices 12 a and 12 b, 22, a heat source 35, a gas supply device 54, a heater 61, a decompression device 62, and a gas circulation device 63 are controlled.
[0035]
First, the powder nickel 21 is deposited from the deposition unit 20 on the base material 2 placed on the base 11a, and the powder deposition layer 80 is formed. The XY table 10 is moved back and forth and left and right so that the powder deposition layer 80 is obtained in a desired area. Next, the base 11a moves below the discharge unit 30. Next, molten aluminum is discharged from the discharge unit 30 to the powder deposition layer 80 on the base material 2. Thus, the NiAl coating layer 81 is formed on the substrate 2 while generating heat. The XY table 10 moves back and forth and left and right so that a desired coating layer 81 is obtained in a region on the base material 2. When a plurality of intermetallic compound coating layers are stacked, the same operation is repeated. Thereby, the coating layer formed on the substrate 2 can be thickened. Further, a pattern of the coating layer having a three-dimensional shape can be formed.
[0036]
FIG. 2 is a sectional view of a discharge nozzle 31 used in the intermetallic compound forming apparatus 1 of FIG. 1, and FIG. 3 is an exploded sectional view of the discharge nozzle 31 used in the intermetallic compound forming apparatus 1 of FIG. 4 is a cross-sectional view of the discharge nozzle 31 of FIG.
[0037]
As shown in FIG. 2 or FIG. 3, the discharge nozzle 31 includes an inner cylindrical portion 32 and outer cylindrical portions 33, 34, and 35. The inner cylindrical portion 32 and the outer cylindrical portions 33, 34, 35 are formed of, for example, ceramics such as graphite, alumina, and silicon carbide.
[0038]
The inner cylindrical portion 32 has a cylindrical peripheral wall portion 320, and a cylindrical passage 321 is provided inside the peripheral wall portion 320. The lower end of the peripheral wall 320 is gradually reduced in diameter. The bottom surface 324 of the peripheral wall portion 320 is formed flat, and an ejection hole (gas introduction hole) 322 communicating with the passage 331 is opened at the center of the bottom surface 324. The diameter of the ejection hole 322 is preferably about 0.1 mm to 1 mm. A large-diameter cylindrical fitting part 325 is integrally provided outside the peripheral wall part 320. A plurality of passages 323 are formed in the fitting portion 325 so as to penetrate vertically. A male screw 326 is formed on the outer peripheral surface of the fitting portion 325.
[0039]
The outer cylinder part 33 has a cylindrical peripheral wall part 330, and a cylindrical passage 331 is provided inside the peripheral wall part 330. A male screw 332 is formed at the lower end of the outer peripheral surface of the peripheral wall 330.
[0040]
The outer cylinder part 34 has a cylindrical peripheral wall part 340. The peripheral wall portion 340 has a large-diameter inner peripheral surface at an upper end portion, an intermediate-diameter inner peripheral surface at a central portion, and a small-diameter circular peripheral surface at a lower end portion. The peripheral wall portion 340 has a small diameter outer peripheral surface at the lower end. A female screw 341 is formed on a large-diameter inner peripheral surface on the upper end portion side, a female screw 342 is formed on an intermediate peripheral inner peripheral surface at a central portion, and a male screw 343 is formed on a small-diameter outer peripheral surface at the lower end portion. ing.
[0041]
The outer cylinder 35 has a cylindrical peripheral wall 350 and a bottom 352. The peripheral wall portion 350 has a large-diameter inner peripheral surface on the upper end portion side and a small-diameter internal peripheral surface on the lower end portion side. A female screw 354 is formed on the inner peripheral surface on the upper end side of the peripheral wall portion 350. The upper surface 353 at the center of the bottom 352 is formed flat. A discharge hole 351 is provided at the center of the bottom 352. The diameter of the discharge hole 351 is preferably about 0.1 mm to 1 mm.
[0042]
The male screw 326 of the inner cylinder part 32 is screwed into the female screw 342 of the outer cylinder part 34, the male screw 332 of the outer cylinder part 33 is screwed with the female screw 341 of the outer cylinder part 34, and the male screw 343 of the outer cylinder part 34 is screwed into the outer cylinder. By screwing into the female screw 354 of the part 35, the discharge nozzle 31 can be assembled.
[0043]
As shown in FIG. 2, when the inner cylindrical portion 32 and the outer cylindrical portions 33, 34, 35 are assembled, a space 370 is provided between the outer peripheral surface of the inner cylindrical portion 32 and the inner peripheral surfaces of the outer cylindrical portions 34, 35. Is formed. In addition, a flat space 371 is formed between the bottom surface 324 of the inner cylinder portion 32 and the upper surface 353 of the bottom portion 352 of the outer cylinder portion 35. The space 370 communicates with the passage 331 of the outer cylinder 33 through the passage 323 of the inner cylinder 32. Further, the discharge hole 351 communicates with the ejection hole 322, the passage 321, and the passage 331 through the space 371. The distance between the bottom surface 324 of the inner cylinder portion 32 and the upper surface 353 of the bottom portion 352 of the outer cylinder portion 35 is preferably 0.1 mm or more and 1 mm or less.
[0044]
FIG. 5 is a schematic diagram illustrating a state in which the molten aluminum 38 is discharged from the discharge holes 351 of the discharge nozzle 31.
[0045]
The molten aluminum 38 is stored in the space 370 in the discharge nozzle 31. The molten aluminum 38 is filled into the space 370 through the passage 323 of the inner cylindrical portion 32 in the form of, for example, powdered aluminum or solid aluminum pieces, and is obtained by being heated and melted by the heating source 35 in FIG. In a flat space 371 between the bottom surface 324 of the inner cylinder portion 32 and the upper surface 353 of the bottom portion 352 of the outer cylinder portion 35, a thin film layer 381 of molten aluminum is formed by the molten aluminum 38 supplied from the space 370. The thin film layer 381 is held in a flat space 371 by surface tension. In this state, a gas body is supplied to the passage 331 by the gas supply device 54 of FIG.
[0046]
The gas supplied to the passage 331 presses the molten aluminum thin film layer 381 from the ejection hole 322 through the passage 321 of the inner cylindrical portion 32. As a result, the molten aluminum droplet 382 is discharged from the discharge hole 351 of the outer cylindrical portion 35.
[0047]
Further, the gas supplied to the passage 331 presses the liquid surface of the molten aluminum 38 through the passage 323 of the inner cylindrical portion 32. Thus, even after the ejection of the molten aluminum droplet 382, the molten aluminum 38 is constantly supplied to the flat space 371, and the thin film layer 381 of molten aluminum is held in the space 371. Therefore, it is possible to continuously discharge the molten aluminum droplets 382.
[0048]
In this manner, the thin film layer 381 of molten aluminum is held in the flat space 371 between the bottom surface 324 of the inner cylinder portion 32 and the upper surface 353 of the bottom portion 352 of the outer cylinder portion 35, and the discharge holes 351 are pressurized by the gas. , The ejection holes 351 are not easily clogged.
[0049]
Further, even when the discharge hole 351 is clogged, only the outer cylinder 35 can be removed from the discharge nozzle 31 for cleaning or replacement, so that cleaning or replacement is easy. Also, the cost of replacement parts is reduced.
[0050]
The gas supply device 54 shown in FIG. 1 allows the gas body to be intermittently pressurized in a pulsed manner at short time intervals. In this case, it is possible to discharge the molten aluminum droplets 382 continuously or intermittently by intermittent gas supply. Further, by controlling at least one of the time width and the time interval of the pulse, the size and ejection speed of the molten aluminum droplet 382 can be controlled.
[0051]
FIG. 6 is a diagram showing a change in pressure of the gas supplied by the gas supply device 54 of FIG. The vertical axis represents the pressure of the gas supplied from the gas supply device 54, and the horizontal axis represents time. The pulse time width OP is the time during which the gas is supplied from the gas supply device 54, and the pulse time interval CL is the time during which the gas is not supplied from the gas supply device 54.
[0052]
FIG. 6A shows a case where the pulse time width OP is large and the pulse time interval CL is small, and FIG. 6B shows a case where the pulse time width OP is small and the pulse time interval CL is large.
[0053]
In the case of FIG. 6A, the supply time of the gas body is long and the supply interval is short. Thus, large-sized droplets 382 are continuously discharged from the discharge nozzle 31 at short intervals.
[0054]
In the case of FIG. 6B, the supply time of the gas body is short and the supply interval is long. Thus, the small-sized droplets 382 are intermittently ejected.
[0055]
By controlling the time width OP of the pulse and the time interval CL of the pulse, the size and the discharge speed of the droplet 382 discharged from the discharge nozzle 31 can be controlled. Therefore, by optimizing the droplet size and ejection speed according to the thickness of the coating layer and the moving speed of the XY table 10, control of the reaction zone and reaction phase between the molten aluminum droplet and the nickel powder deposition layer Can be easily performed. As a result, the porosity and structure of the coating layer made of an intermetallic compound can be optimized, and a high-quality coating layer can be formed.
[0056]
FIG. 7 is a schematic view showing another example of the discharge nozzle used in the intermetallic compound forming apparatus 1 of FIG.
[0057]
The discharge nozzle 31a includes an inner cylinder 32a and an outer cylinder 35a.
The inner cylindrical portion 32a has a cylindrical peripheral wall portion 320a, and has an outer peripheral surface with a large diameter on the upper end side of the peripheral wall portion 320a and an outer peripheral surface with a small diameter on the lower end side. A cylindrical passage 321a is provided inside the peripheral wall 320a, and the lower end of the passage 321a is gradually reduced in diameter. The bottom surface 324a of the peripheral wall 320a is formed flat, and a male screw 326a is formed at the lower end of the outer peripheral surface of the peripheral wall 320a. The inner cylindrical portion 32a has an ejection hole 322a at the center of the bottom surface 324a. The diameter of the ejection hole 322a is preferably about 0.1 mm to 1 mm.
[0058]
The outer cylinder 35a has a cylindrical peripheral wall 350a and a bottom 352a. A female screw 354a is formed on the inner peripheral surface on the upper end side of the peripheral wall portion 350a. The upper surface 353a at the center of the bottom 352a is formed flat. An ejection hole 351a is provided at the center of the bottom 352a. The diameter of the discharge hole 351a is preferably about 0.1 mm to 1 mm.
[0059]
By screwing the male screw 326a of the inner cylinder part 32a with the female screw 354a of the outer cylinder part 35a, the discharge nozzle 31a can be assembled.
[0060]
When the inner cylinder part 32a and the outer cylinder part 35a are assembled, a space 370a is formed between the outer peripheral surface on the lower end side of the inner cylinder part 32a and the inner peripheral surface of the outer cylinder part 35a. In addition, a flat space 371a is formed between the bottom surface 324a of the inner cylinder portion 32a and the upper surface 353a of the bottom portion 352a of the outer cylinder portion 35a. The discharge hole 351a communicates with the ejection hole 322a and the passage 321a through the space 371a.
[0061]
In addition, a storage tank 91 for storing the molten aluminum 38 is provided on a side portion of the discharge nozzle 31a. The inside of the storage tank 91 communicates with the space 370a. The storage tank 91 includes an inlet 92 to which a gas body is supplied, and an inlet 93 to which the aluminum powder material 39 is supplied.
[0062]
In the flat space 371a, a thin layer 381a of molten aluminum is formed by the molten aluminum 38a supplied from the space 370a. The thin film layer 381a is held in a flat space 371a by surface tension.
[0063]
The gas supplied to the passage 321a presses the thin film layer 381a of molten aluminum from the ejection hole 322a through the passage 321a of the inner cylindrical portion 32a. Thus, a droplet 382a of molten aluminum is discharged from the discharge hole 351a of the outer cylindrical portion 35a.
[0064]
The gas supplied from the inlet 92 pressurizes the liquid surface of the molten aluminum 38 a in the storage tank 91. Thus, even after the ejection of the molten aluminum droplet 382a, the molten aluminum 38a is constantly supplied from the storage tank 91 to the flat space 371a, and the thin film layer 381a of molten aluminum is held in the space 371a. Therefore, it is possible to continuously discharge the molten aluminum droplet 382a.
[0065]
Since the molten aluminum 38a can be supplied from the storage tank 91 to the space 370a, it is not necessary to stop the intermetallic compound forming apparatus to replenish the space 370a with the aluminum powder material, and the productivity is improved.
[0066]
Further, it is possible to supply the aluminum powder material from the inlet 93 into the storage tank 91, and the molten aluminum 38a in the storage tank 91 is always supplied.
[0067]
In the above-described embodiment, the case where the ejection holes 351 and 351a of the ejection nozzles 31 and 31a are circular has been described. Or a slit shape. In these cases, the length of the short side or short axis of the discharge hole is preferably 0.1 mm or more and 1.0 mm or less.
[0068]
Further, in the above embodiment, the case where the first substance is nickel and the second substance is aluminum has been described, but any metal material can be used as the first and second substances. Alternatively, a mixture of any metal material and any ceramic material can be used.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing an intermetallic compound forming apparatus according to an embodiment of the present invention.
FIG. 2 is a cross-sectional view of a discharge nozzle used in the intermetallic compound forming apparatus of FIG.
FIG. 3 is an exploded sectional view of a discharge nozzle used in the intermetallic compound forming apparatus of FIG.
FIG. 4 is a sectional view taken along line AA of the discharge nozzle of FIG. 2;
FIG. 5 is a schematic diagram illustrating a state in which molten aluminum is discharged from a discharge hole of a discharge nozzle.
FIG. 6 is a diagram showing a change in pressure of a gas body supplied by the gas supply device of FIG. 1;
FIG. 7 is a schematic view showing another example of a discharge nozzle used in the intermetallic compound forming apparatus of FIG.
FIG. 8 is a schematic sectional view of a discharge nozzle used in a conventional coating apparatus.
[Explanation of symbols]
1 Intermetallic compound forming equipment
2 Base material
10 XY table
11a, 11b base
12a, 12b lifting device
20 Deposition unit
22 Exciter
23 sieve machine
30 Discharge unit
31, 31a discharge nozzle
32, 32a Inner cylinder
33, 34, 35, 33a, 34a, 35a Outer cylinder
35 heat source
54 Gas supply device
60 chambers
61 heating machine
62 decompression device
63 Gas circulation device
64 temperature detector
65 Pressure gauge
70 Control unit Computer unit
71 Computer Unit
91 storage tank
351,351a Discharge hole
322,322a Vent hole

Claims (12)

A nozzle device for discharging molten material,
Comprising an outer tube portion and an inner tube portion configured to be separable from each other,
The outer cylinder has a peripheral wall having an inner peripheral surface and a bottom provided with a discharge hole,
The inner cylinder portion has a peripheral wall portion having an outer peripheral surface and a bottom surface provided with a gas introduction hole,
A first space for accommodating a material source is formed between an inner peripheral surface of the outer cylindrical portion and an outer peripheral surface of the inner cylindrical portion, and a bottom upper surface of the outer cylindrical portion and the inner cylindrical portion are formed. A second space formed between the first space and a bottom surface for holding a thin film layer of a molten material based on a material source in the first space; 2. The nozzle device according to claim 1, wherein a bottom upper surface of the outer cylinder portion and a bottom surface of the inner cylinder portion are respectively flat surfaces. The nozzle device according to claim 1, wherein the discharge hole and the gas introduction hole are arranged to face each other. The nozzle device according to any one of claims 1 to 3, wherein the outer cylinder portion includes a plurality of members that are separably coupled to each other. The outer cylindrical portion is configured by a first member including the bottom portion and a second member including the peripheral wall portion, and the first member and the second member are separably coupled to each other. The nozzle device according to any one of claims 1 to 4, wherein The nozzle device according to any one of claims 1 to 5, wherein each of the discharge hole and the gas introduction hole has a diameter in a range of 0.1 mm or more and 1 mm or less. The nozzle device according to any one of claims 1 to 6, further comprising a storage unit that stores the molten material to be introduced into the first space. The nozzle device according to claim 1, further comprising a gas supply device that supplies gas to an internal space of the inner cylinder portion. The nozzle device according to claim 8, wherein the gas supply device supplies a gas to the first space. The nozzle device according to claim 8, further comprising a control device that controls a pressure of the gas supplied by the gas supply device in a pulse shape. The nozzle device according to claim 10, wherein the control device controls at least one of a time width and a time interval of the pulse. A deposition device for depositing a first substance on a substrate;
The intermetallic compound layer of the first and second substances is formed by discharging a molten material composed of a second substance onto the first substance on the base material. Apparatus for forming an intermetallic compound, comprising:

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