JP2004067456A - Apparatus and method of manufacturing multilayer quartz glass plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing an inexpensive multilayer quartz glass plate having an excellent structure which is simple and formed by satisfactorily fusing the same or different kinds of quartz glass materials to each other and to provide a method of manufacturing the multilayer quartz glass having the excellent structure formed by satisfactorily fusing the different or the same kinds of the quartz glass materials to each other with the setting of the plate thickness dimension or the degree of drawing freely changed. <P>SOLUTION: The apparatus for manufacturing the multilayer quartz glass plate is composed of: an upper supporting member for supporting the upper end part of unfused stacked quartz glass plates formed by stacking a plurality of the different or the same kinds of quartz glass plates; a lower supporting member for supporting the lower end part of the unfused stacked quartz glass plates; and a pair of gas burner means facing each other and provided to heat both sides of the unfused stacked quartz glass plates. The unfused stacked quartz glass plates passed through between the gas burner means are heated and fused by the flame of the gas burners to form fused stacked quartz glass plates. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an apparatus and a method for manufacturing a multilayer quartz glass plate used in a semiconductor manufacturing apparatus or the like.
[0002]
[Related technology]
There are various types of quartz glass plates with various characteristics depending on the purpose of use.Because no bubbles etc. enter inside, transparent quartz glass material with good light transmittance or conversely, bubbles etc. are actively put inside. There are opaque quartz glass materials with poor light transmittance and ultra-high purity products using synthetic quartz.
[0003]
In many cases, quartz glass for semiconductors uses a transparent quartz glass material that satisfies both high purity and high heat resistance properties, but uses an opaque quartz glass material because it is necessary to partially block light. In some cases.
[0004]
In the case of opaque quartz glass materials, most of them are made opaque by mixing fine bubbles inside the glass, so that after etching and cleaning after use, the fine bubbles on the quartz glass surface are opened and the surface becomes extremely rough, As a result, there is a disadvantage in use such as dust generation from the quartz glass surface.
[0005]
On the other hand, conventionally, in a semiconductor manufacturing process, for example, a semiconductor substrate is placed in a heating furnace surrounded by a heater, a source gas is flowed together with a predetermined carrier gas, and impurities are removed under a high temperature atmosphere in a range of about 400 to 1400 ° C. A boat supporting a substrate boat called a cassette boat for aligning and holding a large number of substrates, a mother boat mounting a plurality of the cassette boats, or a substrate supporting boat, in a heat treatment apparatus for performing a drive-in process for infiltrating the inside of the semiconductor substrate. Tools are used.
[0006]
At the lower end of the substrate support jig, there is provided a heat insulating member for shutting off the inside of the heating furnace from the outside and keeping the inside at a constant temperature. Inside the heat retaining member, a plurality of quartz glass jigs for heat shielding, that is, a quartz glass heat shielding plate, and a plurality of columns for horizontally supporting these quartz glass jigs at predetermined intervals in the vertical direction. Is provided. As this quartz glass jig, an opaque quartz glass material containing a large number of bubbles to suppress light transmittance is mainly used.
[0007]
As described above, this type of opaque quartz glass material has a large number of bubbles mixed therein, and these bubbles collapse during use in a semiconductor heat treatment apparatus, and the collapsed bubbles are generated as particles (quartz powder). However, the quality of the semiconductor substrate is adversely affected.
[0008]
Also, in the washing process that is performed as needed in the semiconductor manufacturing process, the surface of the opaque quartz glass material containing the opaque quartz glass material in which bubbles are collapsed is further roughened by washing, so that particles are generated. It occurs more and adversely affects the semiconductor substrate.
[0009]
As a means for preventing the generation of particles and the like from the surface of the opaque quartz glass material described above, quartz powder or a transparent quartz glass material is melted by using heat of electricity or hydrogen gas and the like, and is applied to the surface of the opaque quartz glass material. Welding is conceivable, but all are costly and time consuming, and are not effective methods.
[0010]
[Problems to be solved by the invention]
In view of the above-mentioned problems, the present invention has been made as a result of various studies on a technique of combining different or similar quartz glass materials in order to compensate for the disadvantages of each type of quartz glass material, and has a simple structure. A device capable of producing a multilayer quartz glass plate of excellent structure, in which different or similar quartz glass materials are sufficiently welded to each other at a low cost, and where different or similar quartz glass materials are sufficiently welded to each other. It is an object of the present invention to provide a method capable of producing a multilayer quartz glass plate having an excellent structure and having a variable thickness and a degree of stretching.
[0011]
[Means for Solving the Problems]
In order to solve the above problems, a first embodiment of a multilayer quartz glass plate manufacturing apparatus according to the present invention is a quartz glass plate mounting laminate formed by laminating a plurality of different or similar quartz glass plates. An upper support member for supporting an upper edge portion of the quartz glass plate, a lower support member for supporting a lower edge portion of the plurality of quartz glass plates, and provided so as to heat both surfaces of the quartz glass plate mounting laminate. And a pair of opposed gas burner means, and the quartz glass plate-mounted laminate passing between the gas burner means is heated and welded by a gas burner flame to form a fused quartz glass plate welded laminate. It is characterized by the following.
[0012]
The gas burner means is provided so as to be capable of reciprocating in the horizontal direction, and the gas burner means is reciprocated in the horizontal direction when the quartz glass plate-mounted laminate passes between the gas burner means. It is preferable that the heating is performed uniformly on the plurality of quartz glass plates.
[0013]
By providing the upper support member and the lower support member so as to be vertically movable, it is possible to freely set a descent speed and a stretching speed of the quartz glass plate-mounted laminate, and a multilayer quartz glass plate as a final product. Performance and the like can be changed and set as needed.
[0014]
A second aspect of the apparatus for manufacturing a multilayer quartz glass plate of the present invention is a quartz glass plate mounting formed by laminating different or similar quartz glass plates and a plate-like body other than the different or similar quartz glass. An upper support member that supports an upper edge of the laminate, a lower support member that supports a lower edge of the quartz glass plate mounting laminate, and both surfaces of the quartz glass plate mounting laminate can be heated. And a pair of opposed gas burner means provided as described above, and the fused quartz glass plate mounted laminate passing between the gas burner means is heated and fused by a gas burner flame to form a fused quartz glass plate welded laminate. It is characterized by doing so. As a plate-like body other than quartz glass, a ceramic plate or the like can be given. Also in the apparatus according to the second aspect of the present invention, the gas burner means is provided so as to be capable of reciprocating in the horizontal direction, and the upper support member and the lower support member are provided so as to be vertically movable, respectively. The same operation as in the device of the embodiment can be performed.
[0015]
The first aspect of the method for manufacturing a multilayer quartz glass plate of the present invention includes a step of forming a quartz glass plate mounting laminate by laminating a plurality of different or similar quartz glass plates, A step of sequentially heating the mounted laminates by a gas burner flame and sequentially welding the quartz glass plates of the mounted quartz glass plate laminate to form a fused quartz glass plate laminated body. It is preferable that the fused quartz glass plate laminate is sequentially formed by welding and the fused quartz glass plate welded laminate is sequentially stretched to form a fused fused quartz glass plate laminate.
[0016]
The upper end edge and the lower end edge of the quartz glass plate mounting laminate are respectively supported by an upper support member and a lower support member which can be moved up and down, and the quartz glass plate support having the upper end edge and the lower end edge supported thereon It is preferable to form a fused quartz glass sheet laminate by sequentially heating the laminated body downward from the lower part to the upper part by a gas burner flame and sequentially welding the quartz glass plates of the quartz glass plate mounted laminated body layered body to each other. .
[0017]
By making the descending speed of the lower supporting member higher than the descending speed of the upper supporting member, it is possible to form the fused fused quartz glass plate by stretching the fused fused quartz glass plate laminate downward. It becomes.
[0018]
By setting the ratio of the lowering speed of the lower supporting member to the lowering speed of the upper supporting member in a range of 1 to 10 times, the presence or absence of stretching, the degree of stretching and the thickness of the final product can be freely changed and set. it can. In the case of stretching, the ratio of the descending speed may be set in the range of 1.5 to 10 times, preferably 1.5 to 5 times.
[0019]
The second aspect of the method for producing a multilayer quartz glass plate of the present invention is a method of placing and laminating a quartz glass plate on a quartz glass plate of a different kind or the same kind and a plate made of a different kind or the same kind of non-quartz glass material. A step of forming a body, and sequentially heating the quartz glass plate-mounted laminate by a gas burner flame to sequentially weld the quartz glass plate and the plate-like body constituting the quartz glass plate-mounted laminate to weld the quartz glass plate. And forming a laminate. In this case, since it is not usually necessary to perform stretching, the ratio of the descending speed may be set to 1. However, if the plate-shaped body made of a non-quartz glass material is a stretchable material, the aforementioned It goes without saying that the stretching operation may be performed as described above.
[0020]
As the quartz glass plate of the different kind or the same kind, one or more kinds of a transparent quartz glass material, an opaque quartz glass material, a natural quartz glass material, a synthetic quartz glass material and the like can be used. Further, as the plate-like body made of the non-quartz glass material, a ceramic plate or the like can be given.
[0021]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an embodiment of a method for manufacturing a multilayer quartz glass plate of the present invention will be described with reference to the accompanying drawings, but it goes without saying that various modifications other than the illustrated examples are possible without departing from the technical idea of the present invention. Nor.
[0022]
FIG. 1 is a perspective explanatory view schematically showing an example of the structure of a multilayer quartz glass plate manufacturing apparatus of the present invention. In FIG. 1, reference numeral 20 denotes an apparatus for manufacturing a multilayer quartz glass plate according to the present invention. The manufacturing apparatus 20 has a base 22, and a block 24 is erected on the base 22. The block body 24 is divided into an upper block body 24a and a lower block body 24b. A pair of opposing upper and lower guide rails 26a, 26a and 26b, 26b are vertically mounted on the surfaces of the upper and lower block bodies 24a, 24b, respectively.
[0023]
28a is an upper support member having an upper main plate 30a. The upper main plate 30a is vertically movably attached to the upper block body 24a via the guide rails 26a, 26a. The upper main plate 30a is provided with two upper support arms 32a, 32a projecting sideways. On the other hand, 28b is a lower support member having a lower main plate 30b. The lower main plate 30b is vertically movably attached to the lower block body 26b via the lower guide rails 26b, 26b. The lower support member 28b is provided with two lower support arms 32b, 32b projecting laterally, and a lower support bar 34 is attached to the distal ends of the lower support arms 32b, 32b.
[0024]
A guide rod 36 is provided upright on the upper surface of the base 22 so as to be located at the center of the surface of the block body 24. Guide chips 40a, 40b having guide holes 38a, 38b are attached to the back surfaces of the upper and lower main plates 30a, 30b. The guide rod 36 is inserted into the guide holes 38a, 38b, and the upper and lower support members 28a, 28b are vertically movably guided by the guide rod 36 via the guide tips 40a, 40b. ing.
[0025]
On one side of the base 22, a column 42 is erected corresponding to the block body 24. Burner moving bases 44, 44 extending laterally are provided opposite to each other so as to be slidable in the horizontal direction on the upper portion of the column 42, and gas burner means 46, 46 are provided opposite to each other. The gas burners 46, 46 can reciprocate in the horizontal direction during operation to uniformly heat the quartz glass plate-mounted laminate 10A.
[0026]
A method of manufacturing the multilayer quartz glass plate 10 using the above-described multilayer quartz glass plate manufacturing apparatus 20 will be described with reference to FIGS. 2 to 4 are schematic perspective explanatory views showing a manufacturing procedure of the multilayer quartz glass plate in the manufacturing apparatus shown in FIG. 1, and FIG. FIG. 3 shows a state in which the lower side of the fused quartz glass sheet laminated body which is sequentially melt-formed in the course of manufacturing is extended downward by increasing the lowering speed of the lower supporting member, and FIG. At the end of the process, all of the fused quartz glass sheet laminate is stretched downward by the lower support member to produce the fused quartz glass sheet fused laminate, that is, the multilayer quartz glass sheet of the present invention. FIG. 5 is an explanatory view schematically showing a procedure for manufacturing a multilayer quartz glass plate together with a change in the shape of the quartz glass material. FIG. 6 is a flowchart showing an example of a process chart of the method for manufacturing a multilayer quartz glass plate of the present invention. FIG. 7 is an explanatory plan view schematically showing an example in which (a) the fused quartz glass plate mounted laminate is welded and stretched by the method of the present invention to form (b) the fused fused silica plate stretched laminate. . FIG. 8 is an explanatory sectional view of FIG. FIG. 9 is a plan explanatory view schematically showing another example in which (a) the fused and laminated quartz glass plate is welded and stretched by the method of the present invention to form (b) the fused and fused quartz glass plate laminated laminate. .
[0027]
First, a plurality of different or similar quartz glass plates (in the illustrated example, a case where transparent quartz glass materials 14a, 14a having substantially no air bubbles are arranged on both sides of an opaque quartz glass material 12a are shown) are overlapped with each other to form quartz. A glass plate-mounted laminate 10A is formed [Step 100 in FIG. 5A, FIG. 7A, FIG. 8A, FIG. 9A, and FIG. 6].
[0028]
Next, the upper and lower edges of the quartz glass plate-mounted laminate 10A are supported by upper and lower support members 28a and 28b [Step 102 in FIG. 2A and FIG. 6]. At this time, upper and lower quartz glass support plates 50a, 50a, 50b, 50b are attached to the upper and lower ends of the quartz glass plate mounting laminate 10A by welding, and the upper and lower quartz glass support plates are attached. By connecting 50a, 50a, 50b, 50b to the upper support arms 32a, 32a and the lower support bar 34, respectively, the quartz glass plate mounted laminate 10A was supported by the upper and lower support members 28a, 28b, respectively. State.
[0029]
Subsequently, while simultaneously moving (falling) the upper and lower supporting members 28a, 28b downward, the quartz glass plate-mounted laminate 10A is heated by the gas burner flames of the gas burner means 46, 46 and is sequentially melted [ Step 104 in FIG. 5B and FIG. 6].
[0030]
Further, the fused quartz glass plates of the fused quartz glass plate mounting laminated body 10A, that is, the transparent quartz glass material 14a, the opaque quartz glass material 12a, and the transparent quartz glass material 14a are sequentially welded to each other as they descend, and are sequentially welded. The fused quartz glass plate welded laminate is sequentially stretched to form a fused quartz glass plate welded stretched laminate 10B [FIGS. 5 (b), 7 (b), 8 (b), 9 (b) and 9 (b). 6, Step 106]. In this way, the multilayer quartz glass plate of the present invention, that is, the fused stretched laminate 10B of the quartz glass plate is formed.
[0031]
In this way, the combination of plate materials can be freely combined according to the demands of the user, and the thickness of the plate material at the start of work can be freely designed according to the ratio of the pulling down speed and the feed down speed It is possible to do. Furthermore, since there is no contact portion of the device with the plate-like material during the operation, there is an advantage that no stain is generated.
[0032]
The fused quartz glass sheet laminated laminate 10B formed by laminating the transparent quartz glass material 14a on both surfaces of the opaque quartz glass material 12a is used after being cut into a desired shape according to the purpose of use. As shown in FIG. 10, the multilayer quartz glass plate alone (in the illustrated example, a triple quartz glass plate alone) 10a in a cut state has the side surfaces of the opaque quartz glass layer 12 exposed, and the heat treatment is performed as it is. When used in an apparatus or the like, particles and the like are discharged from the exposed side surface portion 12b of the opaque quartz glass layer 12, thereby causing contamination.
[0033]
Therefore, when used in a semiconductor device or the like, the exposed side surface portion 12b of the opaque quartz glass layer 12 is covered with a transparent quartz glass material for a side surface to form a side transparent quartz glass layer 14B, thereby discharging particles and the like. It is necessary to finally obtain the structure of the multilayer quartz glass plate 10 shown in FIG. Techniques (1) to (3) for covering the side surface portion 12b will be described below with reference to FIGS.
[0034]
(1) As a first method, as shown in FIG. 11, a multilayer quartz glass plate 10a having exposed side portions 12b of an opaque quartz glass layer 12 [FIG. The side surface portion 12b is removed by performing an etching process or a mechanical grinding process to form the receding side surface portion 12c and the side surface space K, and the upper and lower edges of the transparent quartz glass layer 14 are extended outward. The upper and lower extending edge portions 14b are formed [FIG. 11B].
[0035]
Next, the upper and lower extending edge portions 14b, 14b are melt-bent to the side space K side of the opaque quartz glass layer 12 by fire finishing using a gas burner B (FIG. 11 (c)). The transparent quartz glass layer 14B is filled with the extending edge portion 14b to form the side transparent quartz glass layer 14B covering the receding side portion 12c. Thereby, the multilayer quartz glass plate 10 in which the entire surface of the opaque quartz glass layer 12 is covered with the transparent quartz glass layer 14 is formed (FIG. 11D).
[0036]
(2) As a second method, as shown in FIG. 9, the multilayer quartz glass plate 10a (FIG. 12A) is The side surface portion 12b is laser-cut by irradiating a laser beam from the upper surface side at an appropriate inclination angle θ (for example, about 45 °) to form an inclined side surface portion 12d and an upper edge of the transparent quartz glass layer 14 on the upper surface side. The upper extending edge portion 14b is formed with the portion extending outward [FIG. 12 (b)].
[0037]
Next, the upper extending edge portion 14b is melted and bent downward by fire finishing using a gas burner B [FIG. 12 (c)], and the slope side surface portion 12d of the opaque quartz glass layer 12 is removed from the transparent quartz glass layer. 14 to form a side transparent quartz glass layer 14B. Thus, the multilayer quartz glass plate 10 in which the entire surface of the opaque quartz glass layer 12 is covered with the transparent quartz glass layer 14 is formed (FIG. 12D).
[0038]
(3) As a third method, as shown in FIG. 13, the tip of the transparent glass welding rod D is fire-finished with the gas burner B for the multilayer quartz glass plate 10a (FIG. 13A). 13 (b)] to cover the side portion 12b of the opaque quartz glass layer 12 to form a side transparent quartz glass layer 14B. Thus, the multilayer quartz glass plate 10 in which the entire surface of the opaque quartz glass layer 12 is covered with the transparent quartz glass layer 14 is formed [FIG. 13 (c)].
[0039]
In the above-described embodiment, a case will be described in which the transparent quartz glass materials 14a, 14a are respectively superposed on the front and back surfaces of the opaque quartz glass material 12a to form a composite multilayer (three layers in the illustrated example) structure. However, it is of course possible to form a multilayer structure by other combinations, for example, a natural quartz glass material, a synthetic quartz glass material, a transparent quartz glass material, an opaque quartz glass material, etc. It can also be structured. Furthermore, it is also possible to form a multilayer structure including the non-quartz glass material by combining these quartz glass materials with a plate-like body made of a non-quartz glass material, for example, a ceramic material.
[0040]
【Example】
Hereinafter, the method of the present invention will be described in more detail with reference to examples. However, it is needless to say that these examples are illustrative and should not be construed as limiting.
[0041]
(Example 1)
An example in which a multilayer quartz glass plate is manufactured using an apparatus similar to the apparatus for manufacturing a multilayer quartz glass plate shown in FIG. 1 will be described below.
[0042]
First, a transparent quartz glass material 14a of 400 mm (width) × 300 mm (length) × 3 mm (thickness) is formed on both sides of an opaque quartz glass material 12 a of 400 mm (width) × 300 mm (length) × 6 mm (thickness). , 14a are stacked to form a sandwiched quartz glass plate-mounted laminate 10A. The size of the quartz glass plate-mounted laminate 10A is 400 mm (width) × 300 mm (length) × 12 mm (thickness) [states of FIGS. 7A and 8A].
[0043]
As shown in FIG. 2, the quartz glass plate-mounted laminate 10A is supported by upper and lower support members 28a and 28b. The quartz glass plate stack 10A is heated from the lower end of the supported quartz glass plate stack 10A by the gas burner flame of the gas burner means 46, 46. At this time, the feed lowering speed of the upper supporting member 28a was set at 3 mm / min, and the pulling down speed of the lower supporting member 28b was set at 9 mm / min.
[0044]
In this manner, the quartz glass plate-mounted laminated body 10A descends while being heated and melted by the gas burner flame, and at the same time, the lower supporting member 28b descends at a speed three times as high as the upper supporting member 28a. The transparent quartz glass materials 14a, 14a and the opaque quartz glass material 12a that have been melted and welded to each other are lowered while being stretched.
[0045]
In this state, the lower end of the quartz glass plate-mounted laminate 10A is lowered to the position of the gas burner means 46, 46, and all of the quartz glass plate-mounted laminate 10A is melted, and the transparent quartz glass material is melted. All of 14a, 14a and the opaque quartz glass material 12a are welded to each other and stretched to form a fused and fused quartz glass laminate 10B (the state shown in FIGS. 7B and 8B).
[0046]
At this time, the gas burner means 46, 46 are stopped, and the lowering of the upper and lower support members 28a, 28b is stopped. The size of the fused and stretched opaque quartz glass material 12a in the fused and stretched fused quartz glass laminate 10B (that is, the multilayered fused quartz glass plate 10) obtained in this experiment has a width of 400 mm, which is the same as before the fusion stretching, but has a length of The thickness was 900 mm, three times that before welding and stretching, and the thickness was 2 mm, one third that before welding and stretching.
[0047]
Also, the size of the fused transparent quartz glass material 14a is 400 mm in width and the same as that before welding and stretching, the length is 900 mm, which is three times that before welding and stretching, and the thickness is 1/3 of that before welding and stretching. It was 1 mm. That is, the size of the whole fused and stretched fused quartz glass plate 10B was 400 mm (width) × 900 mm (length) × 4 mm (thickness). A disc of a predetermined size was cut out from the fused and stretched fused quartz glass plate 10B, and the opaque glass layer exposed on the side was covered with a transparent glass layer by welding with a welding rod to produce a quartz glass jig.
[0048]
When this quartz glass jig was used as a heat shielding plate in a semiconductor heat treatment apparatus, no generation of particles was observed, and it was confirmed that an extremely excellent heat shielding effect was exhibited.
[0049]
(Example 2)
300 mm (width) x 300 mm (length) x 3 mm (thickness) transparent quartz glass materials 14a, 14a are overlaid on both front and back surfaces of a disc-shaped opaque quartz glass material 12a of 300 mm (diameter) x 6 mm (thickness). A quartz glass plate welded stretched laminate 10B [FIG. 9 (b)] was formed in the same manner as in Example 1 except that a quartz glass plate mounting laminate 10A (the state shown in FIG. 9 (a)) having a sandwich structure was formed. State] was created. As shown in FIG. 9 (b), the disc-shaped opaque quartz glass material 12a is elongated in the longitudinal direction to have an elliptical shape. It could be manufactured in the same manner as in Example 1.
[0050]
【The invention's effect】
As described above, according to the apparatus of the present invention, it is possible to manufacture a multilayer quartz glass plate having an excellent structure in which different or similar quartz glass materials are sufficiently welded to each other at a simple structure and at low cost. .
[0051]
According to the method of the present invention, it is possible to manufacture a multilayer quartz glass plate having an excellent structure, in which different or similar quartz glass materials are sufficiently welded to each other, by freely changing the plate thickness and the degree of stretching. .
[Brief description of the drawings]
FIG. 1 is a perspective explanatory view schematically showing an example of the structure of an apparatus for manufacturing a multilayer quartz glass plate of the present invention.
FIG. 2 is a schematic perspective explanatory view showing a mode of use of the apparatus of the present invention and showing a state in which a quartz glass plate-mounted laminate is supported by an upper support member and a lower support member at the start of production.
FIG. 3 shows a mode of use of the apparatus of the present invention, in which the lower side of a fused quartz glass sheet laminated body which is sequentially melt-formed in the course of manufacturing is extended downward by increasing the lowering speed of a lower support member. It is a schematic perspective explanatory view showing a state.
FIG. 4 shows a mode of use of the apparatus of the present invention, in which, at the end of production, all of the fused quartz glass laminate is stretched downward by a lower support member, that is, the fused fused quartz glass laminate, that is, the multilayer of the present invention. It is a schematic perspective explanatory view which shows the state which manufactured the quartz glass plate.
FIG. 5 is an explanatory view schematically showing a procedure for manufacturing a multilayer quartz glass plate together with a change in the shape of a quartz glass material.
FIG. 6 is a flowchart showing an example of a process chart of a method for manufacturing a multilayer quartz glass plate of the present invention.
FIG. 7 is an explanatory plan view schematically showing an example in which (a) a fused silica glass plate-mounted laminate is welded and stretched by the method of the present invention to form (b) a fused silica glass plate-welded stretched laminate. .
FIG. 8 is an explanatory sectional view of FIG. 7;
FIG. 9 is a plan explanatory view schematically showing another example in which (a) a fused quartz glass plate-mounted laminate is welded and stretched by the method of the present invention to form (b) a fused fused glass plate-stretched laminate. is there.
FIG. 10 is an enlarged cross-sectional view showing one example of the structure of the multilayer quartz glass plate alone.
FIG. 11 is a schematic explanatory view showing an example of a method of forming a side transparent quartz glass layer of a multilayer quartz glass plate.
FIG. 12 is a schematic explanatory view showing another example of a method for forming a transparent quartz glass layer on the side surface of a multilayer quartz glass plate.
FIG. 13 is a schematic explanatory view showing another example of a method for forming a side transparent quartz glass layer of a multilayer quartz glass plate.
[Explanation of symbols]
10: multilayer quartz glass plate, 10A: laminated quartz glass plate, 10a: multilayer quartz glass plate alone, 10B: fused fused glass laminate, 12: opaque quartz glass layer, 12a: opaque quartz glass material, 12b : Side portion, 12c: receding side portion, 12d: slope side portion, 14B: side transparent quartz glass layer, 14b: extended edge, 14: transparent quartz glass layer, 14a: transparent quartz glass material, 20: multilayer quartz Glass plate manufacturing apparatus, 22: base, 24: block body, 24a: upper block body, 24b: lower block body, 26a: upper guide rail, 26b: lower guide rail, 28a: upper support member, 28b: lower support Member, 30a: upper main plate, 30b: lower main plate, 32a: upper support arm, 32b: lower support arm, 34: lower support bar, 36: guide , 38a, 38b: guide hole, 40a, 40b: guide tip, 42: support, 44: burner moving table, 46: gas burner means, 50a, 50b: quartz glass support plate, B: gas burner, D: welding Rod, K: side space, R: laser processing means.

Claims (15)

An upper support member that supports an upper edge of a quartz glass plate mounting laminate formed by stacking a plurality of different or similar quartz glass plates, and a lower edge of the quartz glass plate mounting laminate. A lower supporting member for supporting, and a pair of opposed gas burner means provided so as to be able to heat both surfaces of the quartz glass plate-mounted laminate, wherein the quartz passing between the gas burner means; An apparatus for manufacturing a multilayer quartz glass plate, wherein a glass plate mounted laminate is heated and welded by a gas burner flame to form a fused quartz glass plate welded laminate. The gas burner means is provided so as to be capable of reciprocating in the horizontal direction, and the gas burner means is reciprocated in the horizontal direction when the quartz glass plate-mounted laminate passes between the gas burner means. 2. The apparatus for manufacturing a multilayer quartz glass plate according to claim 1, wherein the heating is performed uniformly on the plurality of quartz glass plates. 3. The apparatus for manufacturing a multilayer quartz glass plate according to claim 1, wherein the upper support member and the lower support member are provided so as to be vertically movable. By making the descending speed of the lower support member higher than the descending speed of the upper support member, the quartz glass plate welded laminate is stretched downward to form a quartz glass plate welded stretched laminate. The apparatus for manufacturing a multilayer quartz glass plate according to claim 3, wherein: The apparatus for manufacturing a multilayer quartz glass plate according to claim 4, wherein a ratio of a lowering speed of the lower supporting member to a lowering speed of the upper supporting member is 1.5 to 10 times. An upper support member that supports an upper edge of a quartz glass plate-mounted laminate formed by laminating a different or similar quartz glass plate and a plate of a different or similar non-quartz glass material, A lower support member that supports a lower edge portion of the quartz glass plate mounting laminate, and a pair of opposed gas burners provided so as to be able to heat both surfaces of the quartz glass plate mounting laminate. Wherein the quartz glass plate mounted laminate passing between the gas burner means is heated and welded by a gas burner flame to form a fused quartz glass plate laminate. . The gas burner means is provided so as to be capable of reciprocating in the horizontal direction, and the gas burner means is reciprocated in the horizontal direction when the quartz glass plate-mounted laminate passes between the gas burner means. 7. The apparatus for manufacturing a multilayer quartz glass plate according to claim 6, wherein the heating is performed uniformly on the plurality of quartz glass plates. 8. The apparatus for manufacturing a multilayer quartz glass plate according to claim 6, wherein the upper support member and the lower support member are respectively provided so as to be vertically movable. A step of forming a quartz glass plate mounting laminate by laminating a plurality of different or similar quartz glass plates, and sequentially heating the quartz glass plate mounting laminate by a gas burner flame to place the quartz glass plate Forming a fused quartz glass plate welded laminate by sequentially fusing the quartz glass plates of the laminate to each other. The multilayer quartz glass according to claim 9, wherein the fused quartz glass sheet laminate is sequentially formed by welding, and the fused quartz glass sheet welded laminate is sequentially stretched to form a fused fused quartz glass sheet stretched laminate. Board manufacturing method. The upper end edge and the lower end edge of the quartz glass plate mounting laminate are respectively supported by an upper support member and a lower support member that can be moved up and down, and the upper end edge portion and the lower end edge portion are supported. While moving the laminate downward, the gas burner flame sequentially heats from the lower part to the upper part, and the quartz glass plates of the quartz glass plate mounted laminate are sequentially welded to form a fused quartz glass plate laminated body. The method for producing a multilayer quartz glass plate according to claim 9 or 10, wherein: The method according to claim 11, wherein a ratio of a lowering speed of the lower supporting member to a lowering speed of the upper supporting member is 1 to 10 times. By making the descending speed of the lower support member higher than the descending speed of the upper support member, the quartz glass plate welded laminate is stretched downward to form a quartz glass plate welded stretched laminate. The method for producing a multilayer quartz glass plate according to claim 12, wherein: A step of forming a quartz glass plate-mounted laminate by laminating a different kind or the same kind of quartz glass plate and a plate-like body made of a different kind or the same kind of non-quartz glass material; Forming a quartz glass plate welded laminate by sequentially heating a quartz glass plate and a plate made of a non-quartz glass material by sequentially heating with a burner flame to form the quartz glass plate mounting laminate. A method for producing a multilayer quartz glass plate, which is a feature. The different type or the same type of quartz glass plate is made of one or more materials selected from the group consisting of a transparent quartz glass material, an opaque quartz glass material, a natural quartz glass material, and a synthetic quartz glass material. The method for producing a multilayer quartz glass plate according to any one of claims 9 to 14.

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