JP2004065490A - Disaster prevention equipment of substance feeder - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide disaster prevention equipment of a substance feeder that can prevent a fire due to a dangerous substance in a protective enclosure wall, can easily extinguish the fire in the protective enclosure wall as an ordinary fire, and provides effective disaster prevention. <P>SOLUTION: When a leakage of a substance is detected in the protective enclosure wall 6 of the substance feeder to feed a pyrophoric substance or a water-prohibitive substance to semiconductor manufacturing equipment 2, or the like, from a substance storage tank 1 in the protective enclosure wall 6, the feed route 3 of the substance is blocked, and a neutralizer is sprayed to neutralize the wet substance, and a fire extinguishing agent is subsequently emanated in the protective enclosure wall 6 as an ordinary fire when necessary. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a disaster prevention facility of a substance supply device for supplying a pyrophoric substance and a water-prohibited substance, in particular, a silane-based substance to a semiconductor manufacturing apparatus or the like.
[0002]
[Prior art]
FIG. 2 shows a conventional disaster prevention facility of this type of substance supply apparatus. FIG. 2 is a schematic diagram showing the entire equipment.
[0003]
In FIG. 2, 1 is a substance storage tank for storing a silane-based substance, 2 is a semiconductor manufacturing apparatus, 3 is a pipe connecting the substance storage tank 1 and the semiconductor manufacturing apparatus 2, 4 is a pump provided on the pipe 3, and 5 is a pipe. An electromagnetic valve disposed at 3 is a protective enclosure surrounding the substance storage tank 1, piping 3, pump 4, electromagnetic valve 5, etc., thereby isolating a dangerous silane-based substance storage portion and providing a safe substance supply device. Is composed. Reference numeral 7 denotes a fire extinguishing system that emits a fire extinguishing agent, and includes a fire detecting sensor 7a, a fire extinguishing agent storage tank 7b, a discharge head 7c, a control panel 7d, and the like.
[0004]
[Problems to be solved by the invention]
Conventionally, as described above, a fire extinguishing system 7 is provided as a disaster prevention system for this kind of material supply device. Even if the fire extinguishing system 7 is provided, the protective enclosure 6 caused by a silane-based substance may be used. Since there is no effective fire extinguishing agent radiated from the discharge head 7c of the fire extinguishing equipment 7 for the fire inside, the fire extinguishing equipment 7 cannot actually extinguish the fire and the operation of the electromagnetic valve 5 inside the protective enclosure 6 At present, there is no effective fire extinguishing method, that is, no effective disaster prevention equipment, in which the leakage of the silane-based substance is interrupted and the fire is completely extinguished by protecting the substance storage tank 1 by hand.
[0005]
[Means for Solving the Problems]
The disaster prevention equipment of the substance supply device according to the present invention has been made in view of such a point. When leakage of a substance is detected in the protective enclosure, the supply path of the substance is shut off, and then a neutralizing agent is radiated to emit the substance. Neutralization of the hazardous substances can prevent fires caused by dangerous substances in the protective enclosure, and even if a fire subsequently occurs in the protective enclosure, it can easily become a normal fire and extinguish easily, that is, effective disaster prevention Equipment is obtained.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
One embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic diagram showing the entire equipment. In the figure, the same or corresponding parts as those of the above-mentioned conventional one are denoted by the same reference numerals, and description thereof is omitted.
[0007]
In FIG. 1, 8 is a gas detector, 9 is a neutralizing agent storage tank, 10 is a neutralizing agent discharging head, and a gas leak signal is input from the gas detector 8 to the control panel 7d, and the control panel 7d opens the valve 11. Then, the neutralizing agent in the neutralizing agent storage tank 9 is discharged into the protective enclosure 6.
[0008]
Now, when the silane-based substance leaks in the protective enclosure 6 and the silane-based substance lighter than air rises, the gas detector 8 senses this and sends a gas leak signal to the control panel 7d. When the control panel 7d confirms the gas leakage, it closes each electromagnetic valve 5 and shuts off the pipe 3, and then opens the valve 11 to discharge the neutralizing agent from the neutralizing agent discharging head 10 into the protective enclosure 6. The leaked neutralizing agent neutralizes the leaked silane-based material in the protective enclosure 6 and eliminates the dangerous spontaneous ignition property and the water prohibition property.
[0009]
Since the silane-based material leaking into the protective enclosure 6 is neutralized by the released neutralizing agent, there is no danger of fire due to the leaked silane-based material in the protective enclosure 6 and new water from the pipe 3 is removed. There is no concern about leakage of silane-based substances. However, if a fire occurs in the protective enclosure 6 later, the fire is not a fire caused by a dangerous substance but a normal fire, so that the fire extinguisher 7 can sufficiently cope with the fire.
[0010]
【The invention's effect】
As described above, according to the present invention, when a leak of a substance is detected in the protective enclosure, the leakage path is neutralized by radiating a neutralizing agent after the supply path of the substance is shut off. In addition, it is possible to prevent a fire caused by dangerous substances in advance and to easily extinguish the fire as a normal fire even if a fire subsequently occurs in the protective enclosure, that is, to obtain an effective disaster prevention facility.
[Brief description of the drawings]
FIG. 1 is a schematic diagram of an entire facility showing an embodiment of the present invention.
FIG. 2 is a schematic diagram showing the entire conventional equipment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Substance storage tank 2 Semiconductor manufacturing apparatus 3 Pipe 4 Pump 5 Solenoid valve 6 Protective enclosure 7 Fire extinguishing equipment 7a Fire detection sensor 7b Fire extinguisher storage tank 7c Discharge head 7d Control panel 8 Gas detector 9 Neutralizer storage tank 10 Neutralizer Discharge head

Claims (1)

When a leak of the substance is detected in the protective enclosure of a substance supply device for supplying a pyrophoric or water-prohibited substance from a substance storage tank in the protective enclosure to a semiconductor manufacturing device or the like, the supply path of the substance is changed. After shutting off, the neutralizing agent is radiated to neutralize the leaked material, and if necessary, the fire extinguishing agent is radiated as a normal fire in the protective enclosure later. Facility.

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