JP2004045853A5 - - Google Patents

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JP2004045853A5
JP2004045853A5 JP2002204283A JP2002204283A JP2004045853A5 JP 2004045853 A5 JP2004045853 A5 JP 2004045853A5 JP 2002204283 A JP2002204283 A JP 2002204283A JP 2002204283 A JP2002204283 A JP 2002204283A JP 2004045853 A5 JP2004045853 A5 JP 2004045853A5
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thin film
layers
group
film group
optical
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JP2002204283A
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JP2004045853A (en
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Claims (14)

複数の膜を積層した光学多層膜において、設計波長をλ0とした時、光学的膜厚λ0/4の単層もしくは交互層からなる第1薄膜群と、2λ0/4の単層もしくはλ0/4と2λ0/4との交互層からなる第2薄膜群と、4λ0/4の単層もしくはλ0/4と4λ0/4との交互層からなる第3薄膜群との3つの薄膜群を、前記第3薄膜群、第2薄膜群、第1薄膜群の優先順位で各薄膜群の区切りは決定すると、少なくとも2種類の薄膜群を7群以上備え、かつ、単層からなる薄膜群同士が隣接していない基本構成をからなることを特徴とする光学多層膜。 In an optical multilayer film in which a plurality of films are laminated, when the design wavelength is λ0, a first thin film group consisting of a single layer or an alternating layer with an optical film thickness of λ0 / 4 and a single layer of 2λ0 / 4 or λ0 / 4 And a second thin film group consisting of alternating layers of 2λ0 / 4 and a third thin film group consisting of single layers of 4λ0 / 4 or alternating layers of λ0 / 4 and 4λ0 / 4 . When the division of each thin film group is determined by the priority order of the three thin film groups, the second thin film group, and the first thin film group, the thin film groups including at least two kinds of thin film groups and including a single layer are adjacent to each other. An optical multilayer film characterized by comprising a non-basic structure . 前記基本構成が、第1薄膜群と第2薄膜群、又は第1薄膜群と第3薄膜群、又は第1薄膜群と連続する第2薄膜群と第3薄膜群とが交互に設けられることを特徴とする請求項1記載の光学多層膜。  In the basic configuration, the first thin film group and the second thin film group, or the first thin film group and the third thin film group, or the second thin film group and the third thin film group continuous with the first thin film group are alternately provided. The optical multilayer film according to claim 1. 全薄膜群の総光学膜厚が前記基本構成の膜厚の総光学膜厚の0.9〜1.05倍の範囲であることを特徴とする請求項1記載の光学多層膜。2. The optical multilayer film according to claim 1, wherein the total optical film thickness of all the thin film groups is in the range of 0.9 to 1.05 times the total optical film thickness of the film thickness of the basic configuration . 前記第1薄膜群の総光学膜厚が、前記基本構成の第1薄膜群の総光学膜厚の0.9〜1.15倍の範囲であることを特徴とする請求項3記載の光学多層膜。4. The optical multilayer according to claim 3, wherein the total optical film thickness of the first thin film group is in the range of 0.9 to 1.15 times the total optical film thickness of the first thin film group having the basic configuration. film. 前記第2薄膜群と前記第3薄膜群との総光学膜厚の和が、前記基本構成の膜厚の第2薄膜群と第3薄膜群との総光学膜厚の和の0.85〜1.0倍の範囲であることを特徴とする請求項2記載の光学多層膜。The sum of the total optical film thicknesses of the second thin film group and the third thin film group is 0.85 to the sum of the total optical film thicknesses of the second thin film group and the third thin film group of the basic structure. 3. The optical multilayer film according to claim 2, wherein the optical multilayer film is in a range of 1.0 times. 前記基本構成が、3つのλ0/4層からなる第1薄膜群を有することを特徴とする請求項1記載の光学多層膜。  2. The optical multilayer film according to claim 1, wherein the basic configuration includes a first thin film group composed of three λ0 / 4 layers. 前記基本構成が、2つのλ0/4層と1つの2λ0/4層との3層からなる第2薄膜群を有することを特徴とする請求項1記載の光学多層膜。  2. The optical multilayer film according to claim 1, wherein the basic configuration includes a second thin film group composed of three layers of two λ0 / 4 layers and one 2λ0 / 4 layer. 前記2λ0/4層が屈折率2.0以上の屈折率を有することを特徴とする請求項7記載の光学多層膜。Optical multilayer film according to claim 7, wherein said 2λ0 / 4 layers and having a refractive index of 2.0 or more refractive index. 前記基本構成が、2つのλ0/4層と1つの4λ0/4層との3層からなる第3薄膜群を有することを特徴とする請求項1記載の光学多層膜。  2. The optical multilayer film according to claim 1, wherein the basic configuration includes a third thin film group composed of three layers of two λ0 / 4 layers and one 4λ0 / 4 layer. 前記4λ0/4層が屈折率2.0以上の屈折率を有することを特徴とする請求項7記載の光学多層膜。Optical multilayer film according to claim 7, wherein said 4λ0 / 4 layers and having a refractive index of 2.0 or more refractive index. 前記3層からなる第2薄膜群の3層の実際の光学膜厚の和が、2.5λ0/4〜5λ0/4の範囲であることを特徴とする請求項7記載の光学多層膜。  8. The optical multilayer film according to claim 7, wherein the sum of the actual optical film thicknesses of the three layers of the second thin film group consisting of the three layers is in the range of 2.5λ0 / 4 to 5λ0 / 4. 前記基本構成が前記3層からなる第1薄膜群と前記3層からなる第2薄膜群とを有し、前記3層からなる第2薄膜群とそれに隣接する2つの前記3層からなる第1薄膜群との3つの薄膜群の光学膜厚の和が8.5λ0/4〜11λ0/4の範囲であることを特徴とする請求項6又は7記載の光学多層膜。The basic structure includes a first thin film group consisting of the three layers and a second thin film group consisting of the three layers, and a first thin film group consisting of the three layers and two adjacent three layers. The optical multilayer film according to claim 6 or 7, wherein the sum of the optical film thicknesses of the three thin film groups with the thin film group is in the range of 8.5λ0 / 4 to 11λ0 / 4. 前記基本構成が前記3層からなる第1薄膜群と前記3層からなる第2薄膜群とを有し、前記3層からなる第1薄膜群とそれに隣接する2つの前記3層からなる第2薄膜群との3つの薄膜群の実際の光学膜厚の和が9.5λ0/4〜11.5λ0/4の範囲であることを特徴とする請求項6又は7記載の光学多層膜。  The basic configuration includes a first thin film group consisting of the three layers and a second thin film group consisting of the three layers, and a second thin film group consisting of the three layers and two adjacent three layers. The optical multilayer film according to claim 6 or 7, wherein the sum of the actual optical film thicknesses of the three thin film groups with the thin film group is in the range of 9.5λ0 / 4 to 11.5λ0 / 4. 基板上に請求項1〜13のいずれか1項に記載の光学多層膜が成膜され、緑帯域の光を反射し、青帯域及び赤帯域の光を透過することを特徴とする光学素子。14. An optical element, wherein the optical multilayer film according to any one of claims 1 to 13 is formed on a substrate , reflects green band light, and transmits blue band and red band light .
JP2002204283A 2002-07-12 2002-07-12 Optical multi-layered film and optical element Pending JP2004045853A (en)

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JP2004045853A JP2004045853A (en) 2004-02-12
JP2004045853A5 true JP2004045853A5 (en) 2005-10-27

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JP2008085232A (en) * 2006-09-28 2008-04-10 Casio Comput Co Ltd Liquid crystal display device
JP2011164549A (en) * 2010-02-15 2011-08-25 Kowa Co Color separation optical system excellent in color reproducibility
JP5341836B2 (en) * 2010-08-11 2013-11-13 株式会社東芝 Backlight and liquid crystal display device

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