JP2004045060A - Sheath cable connecting sensor head - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sensor head easy in manufacture, obtaining high reliability, easy in replacement, and detachably connectable to sheath cables. <P>SOLUTION: This sensor head has a sensor head body 6 housed in a ceramic case 1, an insulator 2 fixed to one end so as to close an opening part of the case 1 and sleeve contacts 9 and 9 fitted in the insulator 2, connected to lead wires 8a and 8b of the sensor head body 6 and detachably fitted with pins 11 and 11 of a pair of ceramic terminals 10 and 10 respectively connected with the sheath cables 12 and 12 from an end part of the insulator 2. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a sensor head capable of detachably connecting a sheath cable having a structure in which a conductive wire is housed in a metal sheath such as stainless steel and filled with an inorganic insulating material powder such as magnesia and insulated. In particular, the present invention relates to a small sensor head which is suitable for use in a vacuum or in a radiation environment, and at the same time ensures both ease of manufacture and reliability.
[0002]
[Prior art]
A sensor head (temperature-sensitive switch) such as a thermostat using bimetal or the like is mainly used as a switch for temperature adjustment in various devices. Conventional sensor heads of this type include only metal, but a resin material is used for a case, a sealing material, and cables to be connected to the sensor head.
[0003]
In addition, there is a disk-shaped sensor head, which is made of an inorganic material for high temperature use. A dedicated flat connection terminal is required for the connection for this electrical wiring. However, this type of sensor head has a drawback in that the number of times of opening and closing that reaches the end of its life is extremely short, that is, about 1/100 or less of that of the aforementioned type.
[0004]
In a vacuum chamber of a vacuum apparatus such as a semiconductor manufacturing apparatus, temperature control of a substrate, a heat source of a molecular beam source, and the like is required. Heretofore, temperature control in a vacuum chamber has used an electric temperature measuring means and a power adjusting means using a circuit like a thermocouple. However, depending on the purpose of temperature control, it may be more convenient to apply temperature control means using a sensor head as a thermal switch.
[0005]
In a vacuum chamber, the molecular density decreases, and as the gas partial pressure decreases, the release of molecules from the material surface cannot be ignored. Therefore, so-called baking is performed, in which the molecules in the vacuum chamber are exhausted by a turbo molecular pump or the like, and the vacuum chamber is heated at a high temperature to release the molecules from the solid surface existing inside the vacuum chamber in advance. Therefore, the material used in the vacuum chamber is required to have heat resistance.
[0006]
[Problems to be solved by the invention]
As described above, the sensor head for temperature control, which has a long open / close life and high control accuracy, does not use a material that is used in a high-temperature environment or an environment exposed to radiation. For example, it is not configured to easily connect a sheath cable having high temperature resistance and radiation resistance. If the sheath cable is directly connected to the sensor head by welding or the like, it can be easily replaced when the sensor head is out of service, such as when special tools and equipment or special welding techniques are required. There is a problem that there is no.
[0007]
Also, when the above-mentioned conventional sensor head is used in a vacuum chamber where radiation cannot be avoided, such as in a fusion device or accelerator, the electrical and mechanical properties of the resin insulator can be rapidly increased due to radiation exposure. It deteriorates and loses its function as a sensor head within a short period of time. As a result, it is necessary to frequently replace the sensor head, and there is an inconvenience that maintenance is troublesome.
[0008]
For these reasons, the above-described sensor head was not suitable for use in a vacuum chamber.
The present invention has been made in view of the above-described problems in the conventional sensor head, and can be easily manufactured, has high reliability, can be easily replaced, and can be detachably connected to a sheath cable. The purpose is to provide.
[0009]
[Means for Solving the Problems]
In the present invention, in order to achieve the above object, the sensor head 6 is housed in the ceramic case 1 and the ceramic insulator 2 provided to close the end of the ceramic case 1 is also provided. Pins 11, 11 protruding from ceramic terminals 10, 10 connected to the ends of sheath cables 12, embed and fixed sleeve contacts 9, 9 connected to the lead wires 8 a, 8 b of the sensor head 6. Can be detachably connected to the sleeve contacts 9 and 9 described above.
[0010]
That is, the sensor head according to the present invention includes a sensor head body 6 housed in a ceramic case 1, an insulator 2 fixed to one end of the case 1 so as to close an opening of the case 1, and an insulator 2 The pins 11, 11 of a pair of ceramic terminals 10, 10 connected to the lead wires 8 a, 8 b of the sensor head body 6 and connected to the sheath cables 12, 12 from the end of the insulator 2, respectively, And a sleeve contact 9 which is detachably fitted.
[0011]
The insulator 2 is fitted into the case 1 so as to close an opening of the case 1 for inserting the sensor head main body 6 into the case 1. Further, the case 1 and the insulator 2 are filled with a ceramic adhesive 5 and cured, whereby the case 1 and the insulator 2 are fixed to each other, and the sleeve contacts 9 and 9 are connected to the insulators 2 and 2. Fixed to.
[0012]
In such a sensor head, since all the constituent members are made of an inorganic material, the sensor head has heat resistance, and can maintain a stable state even in an environment where radiation is irradiated. Furthermore, since the ceramic terminals 10 and 10 to which the sheath cable 12 is connected and the sleeve contacts 9 and 9 connected to the lead wires 8a and 8b of the sensor head body 6 are connected in the insulator 2, these ceramic terminals 10 and 10 are connected. No short-circuit occurs due to the contact of 10 with other conductors.
[0013]
BEST MODE FOR CARRYING OUT THE INVENTION
Next, embodiments of the present invention will be described specifically and in detail with reference to the drawings.
1 and 2 are sectional views showing a sensor head according to an embodiment of the present invention, and are a side view and a plan view, respectively.
[0014]
The case 1 is made of a sintered body such as alumina. The case 1 has a horizontally long cubic shape in the illustrated example, has a hollow sensor head housing 4 inside, and has an open end.
As the sensor head body 6, for example, a commercially available thermostat or the like is used, but a sensor head body 6 entirely made of an inorganic material such as a metal plate is used.
[0015]
The sensor head main body 6 is inserted into the sensor head storage section 4 from an open end of the case 1, and a pair of lead wires 8 a and 8 b is drawn out to the opening side of the case 1. The pair of lead wires 8a and 8b are connected to a stepped cylindrical metal sleeve contact 9 having a step in the middle.
[0016]
The insulator 2 is also made of a sintered body such as alumina and has through holes 3 for fitting the sleeve contacts 9 therein. The through holes 3, 3 have a step in the middle corresponding to the step in the middle of the sleeve contacts 9, 9 and are provided at the tip end of the insulator 2 fitted into the opening of the case 1. The diameters of the through holes 3 are slightly larger in correspondence with the diameters of the steps at the intermediate portions of the parts 9 and 9.
[0017]
An adhesive 5 made of ceramic is filled from the opening of the case 1 into the insulator accommodating portion 4 therein. The adhesive 5 is filled from the opening of the case 1 to a portion reaching the sensor head body 6 housed in the insulator housing 4.
[0018]
The tip of the insulator 2 is fitted into the opening at the end of the case 1, and the sleeve contacts 9 are fitted into the through holes 3 of the insulator 2. The front end portion of the insulator 2 is coated with a ceramic adhesive beforehand at the fitting portion, fitted into the opening of the case 1 like an inlay joint, and the inside thereof is filled with the ceramic adhesive 5 described above. I have. Further, the sleeve contacts 9, 9 are in contact with the ceramic adhesive 5 at the end of the case 1, and the steps of the through holes 3, 3 are brought into contact with the steps of the through holes 3, 3. It is fitted inside. In this state, the above-mentioned ceramic adhesive 5 is cured, so that the insulator 2 is fixed to the end of the case 1 and the sleeve contacts 9, 9 in the through holes 3, 3 of the insulator 2 are formed. Is fixed. The contacts 9, 9 are inserted in advance into the through holes 3, 3, and are fixed by the reverse method of filling the tip of the insulator 2 with the adhesive.
[0019]
Further, a pair of ceramic terminals 10, 10 which are detachably connected to the sleeve contacts 9, 9 are prepared. Sheath cables 12 are connected to the ceramic terminals 10.
FIG. 4 is a sectional view of the ceramic terminal 10. The ceramic terminal 10 has metal cylindrical pins 11 and 31 fitted and fixed to both ends of a cylindrical ceramic sleeve 33 made of alumina or the like. Specifically, both end surfaces of the ceramic sleeve 33 are metallized with Ni or the like, and the flange-shaped portions of the pins 11 and 31 are fixed thereto by means such as welding. A metal rod 34 serving as a core is fitted into one of the pins 11, and the distal ends 34 of the rods are aligned with the distal ends of the pins 11, and are fixed by brazing so as to cover the distal ends of the pins 11. Have been. The sheath cable 12 is inserted into the other pin 31, and a portion near the tip of the sheath cable 12 is fixed to the tip of the pin 31 by welding or the like. Then, the conductive wire 32 therein is exposed from the distal end of the sheath cable 12 inserted into the ceramic sleeve 33, and this is connected to the metal rod 34 in the ceramic sleeve 33 directly or through another conductor. It is connected.
[0020]
As shown in FIG. 3, the ceramic terminal 10 has a pin 11 at the tip end thereof, which can be inserted into the sleeve contacts 9 fitted in the through holes 3 of the insulator 2, respectively. As a result, the sheath cables 12, 12 are connected to the sensor head body 6 via the ceramic terminals 10, 10, the sleeve contacts 9, 9 and the lead wires 8a, 8b. Also, as shown in FIGS. 1 and 2, the connection is released by pulling out the pin 11 at the tip of the ceramic terminal 10 from the above-mentioned sleeve contacts 9, 9.
[0021]
【The invention's effect】
As described above, the sensor head according to the present invention has a heat resistance because all the constituent members are made of an inorganic material, and can secure a stable state even in an environment where radiation is irradiated. . Further, since the sleeve contacts 9 and 9 and the ceramic terminals 10 and 10 are connected in the ceramic insulator 2, short-circuiting due to contact between the sleeve contacts 9 and 9 and other conductors of the ceramic terminals 10 and 10 is performed. Can also be reliably prevented. Further, since the cable can be detachably connected to the sheath cables 12, 12, the exchange is easy.
[Brief description of the drawings]
FIG. 1 is a vertical sectional side view showing a state in which a ceramic terminal is pulled out of a sleeve contact in a sensor head according to an embodiment of the present invention.
FIG. 2 is a cross-sectional plan view showing a state where a ceramic terminal is pulled out of a sleeve contact in the sensor head according to the embodiment.
FIG. 3 is a cross-sectional plan view showing a state where a ceramic terminal is inserted into and connected to a sleeve contact in the sensor head according to the embodiment.
FIG. 4 is a vertical side view showing an example of a ceramic terminal used in the sensor head according to the embodiment.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Case 2 Insulator 5 Ceramic adhesive 6 Sensor head main body 8a Sensor head main body lead wire 8b Sensor head main body lead wire 9 Sleeve contact 10 Ceramic terminal 11 Ceramic terminal pin 12 Sheath cable

Claims (5)

A sensor head that operates according to a change in temperature or the like and is fixed to one end of a sensor head body (6) housed in a ceramic case (1) so as to close an opening of the case (1). The insulator (2) is fitted into the insulator (2) and connected to the lead wires (8a) and (8b) of the sensor head body (6). Sleeve contacts (9), (9) into which the pins (11), (11) of the pair of ceramic terminals (10), (10) to which the cables (12), (12) are respectively connected are detachably fitted. And a sensor head for connecting a sheath cable. The insulator (2) according to claim 1, wherein the insulator (2) is fitted into the case (1) so as to close an opening of the case (1) for inserting the sensor head body (6). Sensor head for sheath cable connection. The case (1) and the insulator (2) are fixed to each other by filling and hardening a ceramic adhesive (5) between the case (1) and the insulator (2). The sensor head according to claim 1, wherein (9) and (9) are fixed to the insulator (2). The sensor head according to any one of claims 1 to 3, wherein the sensor head can be changed to various sensors such as a thermostat, a thermocouple, and a magnetic detector. 5. The sensor head for connecting a sheath cable according to claim 4, wherein the sensor head has a structure capable of heating by using a sensor as a heating body and has both a sensor and a heating body by increasing connection terminals.

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