JP2004045057A - Electronic component testing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a testing device causing no increase of an installation area and a size of the device, to lengthen an aging time of workpiece. <P>SOLUTION: An odd number of trays placed with testing objects are arranged to a supporting member at certain pitches. When the trays are conveyed, the supporting member is driven to move double pitches of the certain pitches that the trays are arranged, and it is regarded as a unit conveyance quantity. In addition, the supporting member is formed to be able to rotate. An odd number of trays are circularly arranged around the member to form a certain angle to the center of the rotation. When the trays are conveyed, the supporting member is driven to move double angle of the certain angle, and it is regarded as a unit conveyance quantity. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an apparatus for testing a semiconductor element or an electronic circuit, a substrate, a part, etc. including the same, and more particularly, to a test apparatus for performing an environmental test while holding a large number of DUTs at a predetermined temperature for a predetermined time. It is about.
[0002]
[Prior art]
FIG. 3 is a view showing a test apparatus for performing an environmental test of electronic components and the like. In the figure, 1 is a test apparatus main body, 2 is a constant temperature bath, 3 is a pair of sprockets and a chain meshed with and wound around the sprockets. The transport mechanism, 4 is a tray, and 5 is a work. In this type of test apparatus, a work 5 is put into the thermostat 2 through an input port 21 of the test apparatus 1 so that a test can be performed during a production process of an electronic component or the like as a device under test (hereinafter referred to as a work). After being sequentially transported by the transport mechanism and exposed to a predetermined environment, the paper is discharged from the discharge port 22.
The tray 4 (shown in the lower part of FIG. 3) on which the work 5 is placed and conveyed in the thermostat 2 meshes with a pair of sprockets 31 and 32 provided on the inlet 21 and discharge outlet 22 sides of the thermostat 2. A plurality of workpieces 5 mounted on the tray 4 are conveyed from the input port 21 to the carry-out port 22 by rotating the sprockets 31 and 32 and rotating the sprockets 31 and 32. It is configured.
When an environmental test is performed using this test apparatus, the work 5 is placed on the tray 4 by means of a loader or a robot from the input port 21 of the thermostat 2 and the sprockets 31 and 32 are rotated by a predetermined amount, thereby making the tray 4 a unit. The workpiece 5 is transported by being moved by a distance. In addition, a new tray 4 is positioned near the input port 21 of the thermostat 2, and the work 5 following the input port 21 is placed on the tray 4 and the work 5 is discharged to the downstream side of the conveyance path. At the outlet 22, the work 5 exposed to the environment of the constant temperature bath 2 for a certain period every time the sprockets 31, 32 are rotated by a predetermined amount is taken out from the outlet 22 by means such as an unloader or a robot. , The next process in the production process of the work 5 or a characteristic test.
[0003]
[Problems to be solved by the invention]
When a test is performed by exposing a large number of works to a predetermined environment for a long time, a plurality of works can be arranged and placed in a direction perpendicular to the transport direction as shown in the plan view of the upper part of FIG. It is common to adopt a so-called multi-row transport structure in which trays are configured as a group and sequentially transported in the transport direction for each group. In the case where a high temperature characteristic test is performed on the other hand, it is necessary to store the work in a constant temperature bath for a long time in order to bring the work to a sufficient temperature, that is, it is necessary to lengthen the aging time. In the above-described test apparatus, it is conceivable to lengthen the transfer distance in the constant temperature bath by increasing the interval of the work transfer operation or increasing the number of trays arranged in the work transfer direction. However, in the former case, the number of works that can be processed per time decreases, resulting in a decrease in processing efficiency. In the latter case, a problem occurs that the test apparatus itself becomes extremely large in the work transfer direction. Was. Furthermore, since the work cannot be placed on the tray from the tray from which the work was taken out at the discharge port to the input port via a sprocket, the number of works to be processed increases. Accordingly, the number of parts is increased by about twice, which causes a problem that not only the size of the apparatus is increased but also the production cost is increased.
[0004]
The present invention has been made in order to solve these problems, and an object of the present invention is to provide a test apparatus that can increase the aging time for a work without increasing the installation area of the apparatus and the apparatus itself. .
[0005]
[Means for Solving the Problems]
In order to solve the above-mentioned problems, in the electronic component test apparatus of the present invention, an odd number of trays on which test objects are placed are arranged on a support member at predetermined pitches, and when the trays are transported, the support members are provided. Is driven to move by a double pitch of a predetermined pitch on which the trays are arranged, and this is set as a unit transport amount. Further, the support member is formed so as to be rotatable, and the odd number of trays are annularly supported so as to form the same predetermined angle with respect to the center of rotation. When the trays are transported, the support member is doubled at a predetermined angle. The apparatus is configured to be driven to rotate by an angle and set this as a unit transport amount.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, an electronic component test apparatus of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a diagram showing a configuration of an electronic component test apparatus according to the present invention, and components equivalent to those of the above-described conventional test apparatus are denoted by the same reference numerals.
In the drawing, reference numeral 6 denotes a tray support provided in the thermostat 2, which is formed in a disk shape fixed to both ends of the rotation shaft 61 driven by a rotation drive mechanism (not shown). It is constituted by a pair of tray support members 60. In the electronic component test apparatus of the present invention, as shown in the side view of the lower diagram of FIG. 1, a plurality of trays 4 on which a work as a test object is placed are annularly arranged on a tray support member 60. Further, the trays 4 are mounted in a gondola shape so as to be rotatably hung on the support member 60, so that the tray support 6 can be rotated and positioned in any position regardless of the position. Is configured to be maintained. Further, an odd number of the plurality of trays 4 are annularly mounted on the support member 60 so as to form a predetermined angle θ with respect to the rotation shaft 61. In this embodiment, nine trays 4 are attached to the support member 60, and each of the trays 4 is configured such that the predetermined angle θ is 40 °.
[0007]
Next, the operation of the electronic component test apparatus of the present invention will be described.
In the state shown in the lower diagram of FIG. 1 (that is, in a state in which one of the trays 4 is positioned at the uppermost position of the support member 60), the position of the tray 4 on which the work 5 is placed facing the insertion port 21 is changed. A, the position of the tray facing the discharge port 22 where the work 5 is taken out is B.
Here, for convenience of explanation, consider an operation from an initial state in which no work 5 is placed on any of the trays 4 as shown in FIG. In this state, the work 5 is placed on the tray 40 located at the position A from the input port 21 by using a means such as a loader or a robot. (At this time, since the work 5 is not placed on the tray 4 at the position B, the unloading operation is not performed.)
In the electronic component test apparatus of the present invention, in order to transport the tray 4 on which the work 5 is placed, the tray support 6 is rotated by an angle twice the predetermined angle θ, that is, in this embodiment, 80 °. This is configured to be a unit transport operation. As a result, the tray 40 is positioned at the position shown in FIG. 2B, and at this time, the tray 4 positioned at the position B in FIG. Done. Thereafter, similarly, the tray 4 is rotated and moved by 2θ, that is, 80 ° in the case of the present embodiment, by the unit transport operation. When the transport operation is performed twice from the state of FIG. 2B, the tray 40 on which the work 5 is first placed is positioned at the position shown in FIG. 2C, and the transport operation is performed once more. 2D, the tray 40 is further rotated by 80 °, passes through the work take-out position B, and is positioned at the highest position of the support member 60 as shown in FIG. 2D, and further the unit transport operation is performed. Then, the tray 40 passes through the work placement position A (FIG. 2E). That is, even if the transfer operation is performed so that the support member 60 makes one rotation after the work 5 is placed on the tray 40, the transfer operation is shifted to the second rotation transfer operation without performing the work 5 removal operation. It is configured.
Subsequently, the unit transport operation is performed three times, whereby the tray 40 is positioned at the work takeout position B (FIG. 2F). At this position B, an operation of taking out the work 5 placed on the tray 40 is performed by means such as an unloader or a robot.
[0008]
As described above, in the electronic component test apparatus of the present invention, an odd number of the trays on which the workpieces are placed are annularly supported at a predetermined angle, and the trays are rotated by a predetermined angle by a unit transport operation. As a result, the support member makes approximately two rotations in the thermostat from the placement of the work to the removal of the work, and the work can be sufficiently exposed to the environment in the thermostat. That is, as compared with the above-described conventional apparatus, the apparatus shown in FIG. 3 also has eight trays on which the work can be placed in the constant temperature bath, and the transfer operation from the placement of the work to the removal of the work. According to the present invention, the space required for the apparatus in the direction of the transport path, that is, the direction from the input port 21 to the discharge port 22 of the work, may be small, and the aging is sufficient (equal). Time can be secured. Further, it is possible to reduce the number of trays on which a work cannot be placed in the thermostat, that is, to reduce the number of parts.
[0009]
In this embodiment, the tray support is constituted by a rotary shaft 61 driven by a rotary drive mechanism and a pair of disk-shaped tray supports 60 fixed to both ends of the tray support. Although an odd number of trays 4 are attached to the portion 60 in a gondola shape so as to be rotatably suspended in a ring shape, the present invention is not limited to this. For example, as shown in FIG. The turntable is formed by arranging the provided support members rotatably in the horizontal direction. On the turntable as the tray support member, an odd number of annular trays on which the workpieces are placed are arranged with respect to the rotation shaft 61. And may be supported at the same predetermined angle. Further, if a turntable as a tray support member is formed in multiple stages as shown in the figure, it becomes possible to test a larger amount of works. Further, the trays arranged in a turntable shape may be configured in a magazine shape that can be placed in multiple stages in the direction of the rotation shaft 61.
[0010]
Further, instead of forming the tray supporting member in a disk shape as in this embodiment, the tray supporting member may be formed by a chain as shown in FIG. 3 and a pair of sprockets wound around and meshing with the chain. That is, in this case, the tray 4 is attached in a gondola shape so as to be rotatably suspended from the tray supporting member, that is, the chain, as in the present embodiment, and the sprocket is rotationally driven to position the chain (tray) at any position. Even if it is, it is constituted so that the horizontal posture is maintained. This makes it possible to place the work on the tray while being conveyed from the carry-out port shown in FIG. 3 to the input port via the sprocket. Further, an odd number of the trays are attached to the chain at a predetermined pitch, and the chain is driven by a pitch twice as large as the predetermined pitch at the time of transporting the work, and this is set as a unit transport amount, and an input port and a discharge port provided at a predetermined position are provided. It is configured to load and unload workpieces through the exit. As a result, the support member makes substantially two rounds in the thermostat from the placement of the work to the removal thereof, so that the work can be sufficiently exposed to the environment in the thermostat and the space required in the direction of the transport path can be saved. Therefore, the size can be reduced.
[0011]
As described in detail above, in the electronic component test apparatus of the present invention, an odd number of trays on which the test object is placed are arranged on the support member at a predetermined pitch, and when the trays are transported, the support members are placed on the trays. Is configured to be driven to move by a pitch twice as long as the predetermined pitch at which it is disposed, and to be a unit transport amount. Therefore, the installation area of the apparatus can be reduced, and the apparatus itself can be reduced in size. There is an effect that the aging time for the work can be lengthened without requiring control and management.
【The invention's effect】
As described in detail above, in the electronic component test apparatus of the present invention, a plurality of trays on which a device under test is placed and conveyed in the apparatus are annularly disposed on a support member, and the support member is rotated. As a result, the device under test placed on the tray is sequentially conveyed through the inside of the apparatus, so that the installation area of the apparatus can be reduced and the apparatus itself can be reduced in size. Since an odd number of trays are annularly supported at the same angle, and when the trays are transported, the support member is rotated by a multiple of the above-described predetermined angle, so that this is set as the unit transport amount. There is an effect that the aging time for the work can be lengthened without requiring complicated control.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of an electronic component test apparatus of the present invention.
FIG. 2 is an explanatory diagram showing an operation of the electronic component test apparatus of the present invention.
FIG. 3 is a diagram illustrating a configuration of a conventional electronic component test apparatus.
FIG. 4 is a diagram showing another embodiment of the tray support.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Test apparatus main body 2 Constant temperature bath 3 Transport mechanism 4 Tray 5 Work 6 Tray support

Claims (2)

In an electronic component testing apparatus having a tray on which a test object is placed and conveyed in the apparatus,
An odd number of the trays includes a support member provided at a predetermined pitch, and driving means for transporting the tray by driving the support member. When the tray is transported, the support member is An electronic component test apparatus comprising a transport mechanism driven by a double pitch of a predetermined pitch to make the unit a unit transport amount. The support member is formed so as to be rotatable, and an odd number of trays are annularly supported so as to form the same predetermined angle with respect to the center of rotation. 2. The electronic component test apparatus according to claim 1, wherein the apparatus is driven to rotate by a double angle of a predetermined angle, and sets the rotation as a unit conveyance amount.

Images