JP2004030616A5 - - Google Patents
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- Publication number
- JP2004030616A5 JP2004030616A5 JP2003128227A JP2003128227A JP2004030616A5 JP 2004030616 A5 JP2004030616 A5 JP 2004030616A5 JP 2003128227 A JP2003128227 A JP 2003128227A JP 2003128227 A JP2003128227 A JP 2003128227A JP 2004030616 A5 JP2004030616 A5 JP 2004030616A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003128227A JP4280543B2 (ja) | 2002-05-08 | 2003-05-06 | 移動体機構および露光装置 |
DE60317008T DE60317008T2 (de) | 2002-05-08 | 2003-05-07 | Mechanismus für ein bewegliches Teil und Steuerungsverfahren für den selben |
US10/430,333 US7154242B2 (en) | 2002-05-08 | 2003-05-07 | Moving member mechanism and control method therefor |
EP03252844A EP1361486B1 (en) | 2002-05-08 | 2003-05-07 | Moving member mechanism and control method therefor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002132560 | 2002-05-08 | ||
JP2003128227A JP4280543B2 (ja) | 2002-05-08 | 2003-05-06 | 移動体機構および露光装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009001066A Division JP4841008B2 (ja) | 2002-05-08 | 2009-01-06 | 移動体機構 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2004030616A JP2004030616A (ja) | 2004-01-29 |
JP2004030616A5 true JP2004030616A5 (ja) | 2006-06-15 |
JP4280543B2 JP4280543B2 (ja) | 2009-06-17 |
Family
ID=29253672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003128227A Expired - Fee Related JP4280543B2 (ja) | 2002-05-08 | 2003-05-06 | 移動体機構および露光装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7154242B2 (ja) |
EP (1) | EP1361486B1 (ja) |
JP (1) | JP4280543B2 (ja) |
DE (1) | DE60317008T2 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060061218A1 (en) * | 2004-09-21 | 2006-03-23 | Nikon Corporation | Dual force wafer table |
JP4541849B2 (ja) | 2004-11-22 | 2010-09-08 | キヤノン株式会社 | 位置決め装置 |
JP2006211873A (ja) | 2005-01-31 | 2006-08-10 | Canon Inc | 移動体制御装置及び移動体制御方法 |
JP2008153546A (ja) * | 2006-12-19 | 2008-07-03 | Canon Inc | 移動体機構 |
US8279399B2 (en) | 2007-10-22 | 2012-10-02 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method |
JP5308249B2 (ja) * | 2009-06-22 | 2013-10-09 | 三菱重工業株式会社 | サーボ制御装置 |
JP5855341B2 (ja) | 2010-12-28 | 2016-02-09 | ローム株式会社 | レンズ制御装置及びこれを用いた撮像装置 |
JP6282256B2 (ja) * | 2015-12-09 | 2018-02-21 | ローム株式会社 | レンズ制御装置及びこれを用いた撮像装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8877A (en) * | 1852-04-13 | Improvement in seed-planters | ||
US3015768A (en) * | 1959-01-14 | 1962-01-02 | Bailey Meter Co | Positioning motor control system |
US4270073A (en) * | 1979-02-28 | 1981-05-26 | Persci, Inc. | Position control in disk drive system |
US5684856A (en) * | 1991-09-18 | 1997-11-04 | Canon Kabushiki Kaisha | Stage device and pattern transfer system using the same |
US5917580A (en) * | 1996-08-29 | 1999-06-29 | Canon Kabushiki Kaisha | Scan exposure method and apparatus |
JP3745167B2 (ja) * | 1998-07-29 | 2006-02-15 | キヤノン株式会社 | ステージ装置、露光装置およびデバイス製造方法ならびにステージ駆動方法 |
DE69943311D1 (de) * | 1998-12-24 | 2011-05-12 | Canon Kk | Trägerplattesteuerungsvorrichtung, Belichtungsapparat und Verfahren zur Herstellung einer Halbleitervorrichtung |
JP3720613B2 (ja) * | 1999-02-03 | 2005-11-30 | キヤノン株式会社 | 位置決め装置、露光装置およびデバイス製造方法ならびに位置決め方法 |
US6227817B1 (en) * | 1999-09-03 | 2001-05-08 | Magnetic Moments, Llc | Magnetically-suspended centrifugal blood pump |
JP3728180B2 (ja) * | 2000-06-01 | 2005-12-21 | キヤノン株式会社 | 干渉計搭載ステージ |
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2003
- 2003-05-06 JP JP2003128227A patent/JP4280543B2/ja not_active Expired - Fee Related
- 2003-05-07 EP EP03252844A patent/EP1361486B1/en not_active Expired - Lifetime
- 2003-05-07 US US10/430,333 patent/US7154242B2/en not_active Expired - Lifetime
- 2003-05-07 DE DE60317008T patent/DE60317008T2/de not_active Expired - Lifetime