JP2004028629A - Temperature sensor and temperature measuring instrument using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a temperature sensor suitable for temperature measurement in an electric field and a magnetic field and facilitating preparation and calibration of a temperature characteristic curve, and to provide a temperature measuring instrument using it. <P>SOLUTION: The temperature sensor contains chloride as a matrix and consists of chloride phosphor containing erbium ions or thulium ions as an activator. The temperature measuring instrument comprises a means for exciting the temperature sensor; a means for detecting a phosphor spectrum generated by excitation of the temperature sensor; a means for calculating a temperature from the detected spectrum; and a means for indicating a calculated temperature. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a temperature sensor and a temperature measuring device using the same.
[0002]
[Prior art]
Conventionally, a thermocouple thermometer, a resistance thermometer, a mercury thermometer, or the like has been used for temperature measurement. The thermocouple thermometer calculates the temperature from the thermoelectromotive force value, and the resistance thermometer calculates the temperature from the electric resistance value. However, in thermocouple thermometers and resistance thermometers, irrelevant electromagnetic induction noise from the object to be measured or the outside is liable to occur, and there is a possibility of leakage at high voltage. There was a problem that it was unsuitable for temperature measurement. The mercury thermometer calculates the temperature by utilizing the thermal expansion of mercury. However, the mercury thermometer has a problem in that the object to be measured is limited because of its shape and the magnitude of heat capacity.
[0003]
For temperature measurement in a region where these thermometers cannot be used, a radiation thermometer, a temperature sensor using a phosphor or a semiconductor is used. The radiation thermometer calculates the temperature using the energy of the heat radiation emitted from the object to be measured. However, the radiation thermometer can only measure the temperature of the surface of the object to be measured, and it cannot measure the temperature accurately when there is a spectrum or reflection spectrum specific to the object in the low temperature range. there were.
[0004]
Japanese Patent Application Laid-Open No. 5-133819 discloses a temperature sensor using a phosphor containing a polypyridine metal complex or a derivative thereof. The temperature sensor using the phosphor calculates the temperature based on a temperature characteristic curve created by examining the relationship between the fluorescence intensity and the temperature. However, in the temperature sensor using this phosphor, the relationship between the fluorescence intensity and the temperature does not necessarily follow a clear mathematical formula such as a proportional relationship, so the relationship between the fluorescence intensity and the temperature is examined at many small intervals. There was a problem that an accurate temperature characteristic curve had to be created. Further, in a temperature sensor using this phosphor, it is necessary to frequently calibrate a temperature characteristic curve in order to cope with a temporal change such as deterioration of the temperature sensor. There is also a problem that the temperature characteristic curve must be calibrated by examining the relationship at a large number of points at fine intervals.
[0005]
Furthermore, Japanese Patent Application Laid-Open No. 58-39917 discloses a temperature sensor in which a semiconductor is attached to the tip of an optical fiber. The temperature sensor using this semiconductor calculates the temperature by utilizing the fact that the light transmittance changes depending on the temperature. However, in the temperature sensor using this semiconductor, there is a problem that a standard body having a standard transmittance is required when a temperature characteristic curve showing a relationship between temperature and light transmittance is created.
[0006]
[Problems to be solved by the invention]
In view of the above circumstances, an object of the present invention is to provide a temperature sensor suitable for temperature measurement under an electric field and a magnetic field, and which can easily create and calibrate a temperature characteristic curve, and a temperature measurement device using the same. .
[0007]
[Means for Solving the Problems]
In order to achieve the above object, the present inventors have conducted intensive studies.As a result, the fluorescence spectrum of erbium ions or thulium ions doped in a matrix made of chloride shows a relationship between fluorescence intensity and temperature before and after a specific wavelength. The inventors have found that the temperature sensor has a reversing property, conceived a temperature sensor that calculates the temperature using this property, and completed the present invention.
[0008]
That is, the present invention includes chloride as a matrix and erbium ion (Er) as an activator. ³⁺ ) Or thulium ion (Tm ³⁺ ) Is characterized in that it is a temperature sensor made of a chloride phosphor.
[0009]
Here, in the temperature sensor of the present invention, the chloride contained as the matrix may be a rare earth chloride represented by the following general formula (1).
LnCl ₃ … (1)
[In the formula (1), Ln represents any one rare earth element selected from the group consisting of scandium (Sc), yttrium (Y), lanthanum (La), gadolinium (Gd), and ytterbium (Yb). ]
Further, in the temperature sensor of the present invention, the chloride contained as the matrix may be a rare earth composite chloride represented by the following general formula (2).
AxByClz ... (2)
[In the formula (2), A represents an alkali metal or an alkaline earth metal, and B represents erbium ion (Er) contained as an activator. ³⁺ ) Or thulium ion (Tm ³⁺ ) Indicates a different kind of rare earth element. Also, x, y and z indicate real numbers in the ranges of 0.1 ≦ x ≦ 10, 0.1 ≦ y ≦ 10 and 0.4 ≦ z ≦ 60, respectively. ]
Further, in the temperature sensor of the present invention, in the above general formula (2), A is any one kind of alkali metal or alkaline earth metal selected from the group consisting of barium (Ba), potassium (K) and strontium (Sr). And B is preferably any one rare earth element selected from the group consisting of scandium (Sc), yttrium (Y), lanthanum (La), gadolinium (Gd) and ytterbium (Yb).
[0010]
In the temperature sensor according to the present invention, the chloride may include a chloride in a glassy state. Here, the chloride in the glass state is made of zinc (Zn), cadmium (Cd), copper (Cu), silver (Ag), lithium (Li), gadolinium (Gd), lead (Pb), and manganese (Mn). It is preferable to include a chloride of at least one element selected from the group consisting of:
[0011]
Also, the present invention provides a means for exciting the temperature sensor, a means for detecting a fluorescence spectrum generated by the excitation of the temperature sensor, a means for calculating a temperature from the detected spectrum, and a means for displaying the calculated temperature. And a temperature measuring device comprising:
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described.
[0013]
(matrix)
The chloride phosphor used in the present invention contains chloride as a matrix. The matrix means a structural base.
[0014]
(Rare earth chloride)
The rare earth chloride is represented by the general formula (1) LnCl ₃ Is the chloride represented by When this rare earth chloride is used in the present invention, since the fluorescence efficiency and the fluorescence intensity of the chloride phosphor used in the present invention are improved, the reliability of the temperature sensor of the present invention can be further improved. . Here, the general formula (1) LnCl ₃ In the formula, Ln represents any one rare earth element selected from the group consisting of Sc, Y, La, Gd and Yb.
[0015]
(Rare earth compound chloride)
The rare earth complex chloride is a chloride represented by the general formula (2) AxByClz. The rare earth complex chloride represented by the general formula (2) AxByClz is AxClz ₁ Alkali metal or alkaline earth metal chloride represented by ₂ And chlorides of rare earth elements represented by Note that z ₁ And z ₂ Is z ₁ + Z ₂ = Indicates a real number satisfying z. In the general formula (2) AxByClz, B is Er doped into the matrix as an activator. ³⁺ Or Tm ³⁺ And rare earth elements of different types. Accordingly, B not only represents a rare earth element other than Er or Tm, but also, for example, Tm as an activator. ³⁺ May show Tm if is not doped into the matrix.
[0016]
In the general formula (2) AxByClz, x represents a composition ratio of the alkali metal or alkaline earth metal represented by A in the matrix, and x is 0.1 ≦ x ≦ 10, preferably 0.5 ≦ x. ≦ 7, more preferably a real number in the range of 1 ≦ x ≦ 4. Y represents the composition ratio of the rare earth element ion represented by B in the matrix, and y is 0.1 ≦ y ≦ 10, preferably 0.3 ≦ y ≦ 5, and more preferably 0.5 ≦ y ≦ Indicates a real number in the range of 3. z represents the composition ratio of chloride ions in the matrix, and z is a real number in the range of 0.4 ≦ z ≦ 60, preferably 1.9 ≦ z ≦ 29, more preferably 3.5 ≦ z ≦ 17. Is shown.
[0017]
In the general formula (2) AxByClz, A represents any one of alkali metals or alkaline earth metals selected from the group consisting of Ba, K and Sr, and B represents the group consisting of Sc, Y, La, Gd and Yb. It is preferable to show any one rare earth element selected from the group consisting of: In this case, the reliability of the temperature sensor of the present invention is further improved.
[0018]
(Glass chloride)
Chloride in a glassy state is a chloride which is solidified by cooling a melt of the chloride so as not to be crystallized in a supercooled state. , Cd, Cu, Ag, Li, Gd, Pb, and Mn. The content of the chloride is not particularly limited, but is usually 30 to 70 mol%, and preferably 40 to 60 mol%. In addition, in this specification, mol% means the molar fraction when the total composition of the chloride phosphor is 100 mol%.
[0019]
Further, the chloride in the glassy state may include a chloride of at least one element selected from the group consisting of K, Na, Rb and Cs. The content of the chloride is not particularly limited, but is usually 0 to 70 mol%, preferably 30 to 60 mol%.
[0020]
Further, the chloride in the glassy state may include a chloride of at least one element selected from the group consisting of Ba, Ca and Sr. The content of the chloride is not particularly limited, but is usually 0 to 40 mol%, preferably 5 to 20 mol%.
[0021]
(Activator)
The activator doped in the matrix includes Er ³⁺ Or Tm ³⁺ Is used. These ions are very easy to emit light in a matrix composed of chloride, and the temperature sensor of the present invention reverses the relationship between fluorescence intensity and temperature before and after a certain wavelength of the fluorescence spectrum of these ions. This is because the temperature is calculated using the property. Although the content of the activator in the chloride phosphor is not particularly limited, when the matrix contains the chloride in the glassy state, the content is 0.1 to 5 mol% in 100 mol% of the chloride phosphor. Is more preferable, and it is more preferable that it is 0.2 to 2 mol%. The activator is Er. ³⁺ It is preferable to use
[0022]
(Chloride phosphor)
As a chloride phosphor containing a rare earth chloride as a matrix, for example, ScCl 2 ₃ : Er ³⁺ , YCl ₃ : Er ³⁺ , LaCl ₃ : Er ³⁺ , GdCl ₃ : Er ³⁺ , YbCl ₃ : Er ³⁺ , ScCl ₃ : Tm ³⁺ , YCl ₃ : Tm ³⁺ , LaCl ₃ : Tm ³⁺ , GdCl ₃ : Tm ³⁺ Or YbCl ₃ : Tm ³⁺ And the like.
[0023]
Examples of the chloride phosphor containing a rare-earth complex chloride as a matrix include, for example, K ₂ YCl ₅ : Er ³⁺ , Ba ₃ Y ₂ Cl ₁₂ : Er ³⁺ , Sr ₃ Y ₂ Cl ₁₂ : Er ³⁺ , K ₂ GdCl ₅ : Er ³⁺ , Ba ₃ Gd ₂ Cl ₁₂ : Er ³⁺ , Sr ₃ Gd ₂ Cl ₁₂ : Er ³⁺ , Ba ₃ Sc ₂ Cl ₁₂ : Er ³⁺ , K ₂ YbCl ₅ : Er ³⁺ , Ba ₃ Yb ₂ Cl ₁₂ : Er ³⁺ , Sr ₃ Yb ₂ Cl ₁₂ : Er ³⁺ , K ₂ YCl ₅ : Tm ³⁺ , Ba ₃ Y ₂ Cl ₁₂ : Tm ³⁺ , Sr ₃ Y ₂ Cl ₁₂ : Tm ³⁺ , K ₂ GdCl ₅ : Tm ³⁺ , Ba ₃ Gd ₂ Cl ₁₂ : Tm ³⁺ , Sr ₃ Gd ₂ Cl ₁₂ : Tm ³⁺ , Ba ₃ Sc ₂ Cl ₁₂ : Tm ³⁺ , K ₂ YbCl ₅ : Tm ³⁺ , Ba ₃ Yb ₂ Cl ₁₂ : Tm ³⁺ Or Sr ₃ Yb ₂ Cl ₁₂ : Tm ³⁺ And the like.
[0024]
Examples of the chloride phosphor containing chloride in a glassy state as a matrix include, for example, CdCl. ₂ -KCl-BaCl ₂ : Er ³⁺ , ZnCl ₂ -KCl-BaCl ₂ : Er ³⁺ , CdCl ₂ -KCl-BaCl ₂ : Tm ³⁺ , ZnCl ₂ -KCl-BaCl ₂ : Tm ³⁺ And the like.
[0025]
The structure of the chloride phosphor may be a crystal structure, an amorphous structure, or a structure in which both are mixed.
[0026]
(Production method)
The chloride phosphor used in the present invention can be prepared, for example, as follows. First, an anhydrous chloride salt as a matrix and ErCl as an activator ₃ Or TmCl ₃ And the anhydrous salt of Next, the above mixture is uniformly dissolved by baking or melt-mixing in a high-purity dry inert gas atmosphere, and then cooled to room temperature, followed by pulverization, classification and the like.
[0027]
Here, an additive can be added to the mixture. Among them, dry NH is used as an additive. ₄ Preferably, Cl is added. In this case, Er which is a rare earth element ion serving as an activator ³⁺ Or Tm ³⁺ Are easily dissolved into the matrix, and by-products of oxychloride, which is an impurity, are eliminated as compared with other additives. Also, dry NH 4 added with anhydrous chloride salt mixed as matrix ₄ The molar ratio with Cl is preferably 5: 1 to 1:10, and more preferably 2: 1 to 1: 7. When the matrix contains chloride in a glassy state, the above anhydrous salt is used. And dry NH ₄ The molar ratio with Cl is preferably from 8: 1 to 1: 2, and more preferably from 5: 1 to 1: 1. In addition, conventionally known sensitizers and the like can be added.
[0028]
When the matrix is a rare earth chloride or a rare earth complex chloride, the molar ratio of the anhydrous salt of the chloride and the anhydrous salt of the activator to be mixed is not particularly limited, but 1500: 1 to 10: 1, preferably from 1000: 1 to 30: 1, and more preferably from 500: 1 to 40: 1. In this case, since the probability that the activator captures the excitation energy and the concentration quenching are well-balanced, the fluorescence intensity of the chloride phosphor can be improved, so that the reliability of the temperature sensor of the present invention is improved. It can be further improved.
[0029]
When the matrix is a rare earth chloride or a rare earth complex chloride, the calcination is preferably performed at 600 to 900 ° C, more preferably at 700 to 900 ° C.
[0030]
When the matrix contains a chloride in a glassy state, the heating temperature and the heating time in the melt mixing can be appropriately set according to the raw materials and the like. The above-mentioned melt mixing is usually performed at 400 to 700 ° C, more preferably 700 to 900 ° C, for 5 to 100 minutes, preferably 10 to 50 minutes. After the melt-mixing, rapid cooling can be performed if necessary. The cooling rate at this time is preferably 5 to 100 ° C./sec.
[0031]
When an oxide is used as the matrix, firing at a high temperature of about 1100 to 1600 ° C. is required. However, when chloride is used as the matrix as described above, the energy required for firing can be reduced. . The high purity dry inert gas includes, for example, argon or nitrogen having a purity of 99.99% or more.
[0032]
In addition, the anhydrous salt is, for example, a hydrate obtained by dissolving an oxide or carbonate of a rare earth element, an alkali metal or an alkaline earth metal, or another metal in hydrochloric acid, heating the mixture under normal pressure, and evaporating water. Can be obtained by drying under reduced pressure and heating in a dry hydrogen chloride gas atmosphere for dehydration.
[0033]
(Temperature calculation principle)
An example of the temperature calculation principle of the temperature sensor of the present invention will be described below. For example, Er ³⁺ FIG. 1 shows a fluorescence spectrum obtained by irradiating an ultraviolet ray having an excitation wavelength of 381 nm to a chloride phosphor using as an activator. As shown in FIG. 1, in the wavelength range of 520 to 540 nm and 540 to 560 nm of the fluorescence spectrum, three sharp peaks with large fluorescence intensity can be observed. FIGS. 2A and 2B are enlarged views of these peaks.
[0034]
As shown in FIG. 2A, in the fluorescence spectrum of the chloride phosphor in the wavelength range of 520 to 540 nm, the fluorescence intensity increases as the temperature increases. On the other hand, as shown in FIG. 2B, in the fluorescence spectrum in the wavelength range of 540 to 560 nm, the fluorescence intensity decreases as the temperature increases. Therefore, the maximum fluorescence intensity I at a wavelength of 527 nm having the maximum peak among the three peaks in the wavelength range of 520 to 540 nm. ₁ Increases with increasing temperature, and has the maximum fluorescence intensity I at a wavelength of 550 nm having the maximum peak among three peaks in the wavelength range of 540 to 560 nm. ₂ Decreases with increasing temperature. Therefore, these fluorescence intensity ratios R (= I ₂ / I ₁ ) Decreases with increasing temperature.
[0035]
Also, the fluorescence intensity I ₁ And I ₂ Is at the excitation level that emits the fluorescence ³⁺ Increases as the concentration of Therefore, the above-mentioned fluorescence intensity ratio R depends on Er at the excitation level for emitting these fluorescence. ³⁺ Therefore, the following equation (3) is established.
R = I ₂ / I ₁ = CN ₂ / N ₁ … (3)
In the above equation (3), N ₁ Is the maximum fluorescence intensity I at a wavelength of 527 nm shown in FIG. ₁ Excited level ² H _11/2 Er ³⁺ Concentration, N ₂ Is the maximum fluorescence intensity I at a wavelength of 550 nm ₂ Excited level ⁴ S _3/2 Er ³⁺ Shows the concentration of C is a proportional constant.
[0036]
Er at each excitation level ³⁺ Concentration N ₁ And N ₂ Follows the Boltzmann distribution in the measurement temperature region. Therefore, Er ³⁺ Concentration ratio N ₂ / N ₁ Is represented by the following equation (4).
N ₂ / N ₁ = Exp (-△ E / KT) (4)
In Equation (4), ΔE is Er at a wavelength of 527 nm shown in FIG. ³⁺ Excited level of ² H _11/2 Energy level and Er at a wavelength of 550 nm ³⁺ Excited level of ⁴ S _3/2 2 shows the energy difference from the energy level. K indicates Boltzmann's constant and T indicates absolute temperature.
[0037]
By substituting the above equation (4) into the above equation (3), the following equation (5) can be obtained.
R = Cexp (−ΔE / KT) (5)
By taking the logarithm of the left side and the right side in the above equation (5), the following equation (6) can be obtained.
lnR = lnC- △ E / KT (6)
By modifying the above equation (6), the following equation (7) can be obtained.
lnR = (− △ E / K) × (1 / T) + lnC (7)
In the above equation (7), it can be seen that the slope with lnR on the vertical axis and 1 / T on the horizontal axis represents a straight line of-△ E / K. Therefore, for example, as shown in FIG. ₁ Intensity ratio R at ₁ Of the coordinate (1 / T ₁ , LnR ₁ ), A temperature characteristic curve of the temperature sensor of the present invention can be easily obtained by drawing a straight line having a slope of-△ E / K. Therefore, the temperature characteristic curve of the temperature sensor of the present invention can be easily derived by examining the relationship between the temperature at one point and the fluorescence intensity ratio. No need to look up.
[0038]
Further, in the temperature sensor according to the present invention, by examining the relationship between the temperature and the fluorescence intensity ratio at two points and creating a temperature characteristic curve, it is possible to measure the temperature with higher accuracy.
[0039]
In the above, the maximum fluorescence intensity I ₁ And I ₂ The temperature was calculated by calculating the fluorescence intensity ratio R with respect to the area S. The area S surrounded by the fluorescence spectrum within the wavelength range of 520 to 540 nm was obtained. ₁ And the area S surrounded by the fluorescence spectrum within the wavelength range of 540 to 560 nm. ₂ Ratio S (= S ₂ / S ₁ ), The temperature can be calculated in the same manner as described above.
[0040]
Further, in the above description, the chloride phosphor is excited by using ultraviolet rays, but it can be excited by infrared rays or electron beams. In the above description, ultraviolet light having an excitation wavelength of 381 nm is used, but any ultraviolet light having an excitation wavelength in the range of 381 to 382 nm can be used.
[0041]
In addition, Tm as an activator ³⁺ Is used even when Er is used. ³⁺ The temperature can be calculated in the same manner as in the above case. Tm ³⁺ Is used, the temperature is calculated using the fact that the relationship between the fluorescence intensity and the temperature is reversed in the range of the wavelength 670 to 690 nm and the range of 690 to 710 nm of the fluorescence spectrum. Here, as shown in FIG. ³⁺ Is used, the maximum fluorescence intensity I within the wavelength range of 670 to 690 nm is used. ₁ Represents the fluorescence intensity at a wavelength of 680 nm, and the maximum fluorescence intensity I in the wavelength range of 690 to 710 nm. ₂ Is the fluorescence intensity at a wavelength of 704 nm. ΔE is the Tm at a wavelength of 680 nm as shown in FIG. ³⁺ Excited level of ³ F ₂ Energy level and Tm at a wavelength of 704 nm ³⁺ Excited level of ³ F ₃ 2 shows the energy difference from the energy level. Also, Tm ³⁺ When ultraviolet light is used, ultraviolet light having an excitation wavelength in the range of 358 to 360 nm, 456 to 458 nm, or 679 to 681 nm can be used. Others are Er ³⁺ Is the same as
[0042]
(Temperature measuring device)
The temperature measuring device of the present invention includes a unit for exciting the temperature sensor, a unit for detecting a fluorescence spectrum generated by the excitation of the temperature sensor, a unit for calculating a temperature from the detected spectrum, and displaying the calculated temperature. Means.
[0043]
Here, as a means for exciting the temperature sensor, for example, there is a method of irradiating the temperature sensor with ultraviolet rays, infrared rays, or an electron beam. As a method of irradiating the temperature sensor with ultraviolet light, for example, a method using a light source such as a hydrogen discharge tube, a xenon discharge tube, a mercury lamp, a ruby laser, an excimer laser or a dye laser, or a visible ultraviolet spectroscope or an ultraviolet filter, etc. There is a method of extracting ultraviolet rays by using a method.
[0044]
As a method of irradiating the temperature sensor with infrared rays, for example, there is a method using a light source such as a Glover lamp, a Nernst lamp, a carbon dioxide laser, a krypton laser, or a semiconductor laser. Further, as a method of irradiating the temperature sensor with an electron beam, for example, a method using a conventionally known electron gun and the like are available.
[0045]
The means for detecting the fluorescence spectrum generated by the excitation of the temperature sensor is not particularly limited, and a conventionally known method can be used. For example, there is a method using a spectrophotometer or a photodiode.
[0046]
The means for calculating the temperature from the detected spectrum is not particularly limited, and a conventionally known method can be used. For example, there is a method in which information of the detected fluorescence spectrum is input to a microcomputer or the like, and the temperature is calculated in cooperation with the microcomputer and a read-only memory in which a temperature characteristic curve is recorded. Also, the means for displaying the calculated temperature is not particularly limited, and a conventionally known device such as an LED display or a liquid crystal display may be used.
[0047]
Here, in the temperature measuring device of the present invention, it is preferable to provide a protective coating around the temperature sensor in order to avoid contact between the temperature sensor and the outside air. In this case, since the humidity resistance of the temperature sensor is improved, the durability of the temperature measuring device of the present invention is improved. As the protective coating, for example, there is a method of installing a plastic film or resin made of glass, polyimide, aramid, or the like around the temperature sensor.
[0048]
Further, in the temperature measuring device of the present invention, a transmission means such as an optical fiber is provided between the means for exciting the temperature sensor and the temperature sensor, between the temperature sensor and the means for detecting the fluorescence spectrum, or between both. It is preferable to have In this case, since the influence of the external environment on the fluorescence spectrum is small, the accuracy of the temperature measurement is improved.
[0049]
FIG. 6 shows a schematic conceptual diagram of an example of the temperature measuring device of the present invention. In FIG. 6, the excitation light emitted from the ultraviolet laser 1 is applied to the temperature sensor 4 in contact with the measurement object 3 through the optical fiber 2A, and the temperature sensor 4 emits light. Here, the temperature sensor 4 is Er ³⁺ Is an activator and is protectively coated with glass 6. A part of the generated light is reflected by the insulator mirror 5, and the generated light and the reflected light pass through the optical fiber 2B and the fluorescence spectrum thereof is detected by the spectrophotometer 7. The detected optical output is converted into a digital signal by an A / D converter (not shown), and the information is input to the computer 8.
[0050]
The following processing is performed in the computer 8. First, the maximum fluorescence intensity I in the wavelength range of 520 to 540 nm ₁ 'And the maximum fluorescence intensity I in the wavelength range of 540 to 560 nm. ₂ The value of the 'ratio R' is calculated, and then the value of lnR ', the logarithm of this R', is calculated. Next, the value of the temperature T ′ is calculated from the value of the lnR ′ and the temperature characteristic curve equation lnR = (− △ E / K) × (1 / T) + lnC recorded in the read-only memory 9 in advance. The information on the calculated temperature T 'is converted into a digital signal and output. The output information on the temperature T ′ is displayed on the liquid crystal display 10.
[0051]
Such a temperature measuring device of the present invention can measure not only the surface temperature of an object as described above but also the temperature inside the object. Further, the temperature sensor and the temperature measuring device of the present invention can measure the temperature not only under an electric field and a magnetic field but also in a vacuum, and can be suitably used in a semiconductor and LCD manufacturing process.
[0052]
The embodiments disclosed this time are to be considered in all respects as illustrative and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.
[0053]
【The invention's effect】
As described above, according to the present invention, a temperature sensor capable of measuring a temperature with high accuracy even under an electric field and a magnetic field, and capable of easily performing temperature characteristic curve creation and temperature calibration, and using the same. A temperature measurement device can be provided.
[Brief description of the drawings]
FIG. 1 is a fluorescence spectrum diagram of the temperature sensor of the present invention.
FIG. 2 is an enlarged view of a fluorescence spectrum of the temperature sensor of the present invention.
FIG. 3 is an energy level diagram of erbium ions used in the temperature sensor of the present invention.
FIG. 4 is a graph showing the relationship between the fluorescence intensity and the temperature of the temperature sensor of the present invention.
FIG. 5 is an energy level diagram of thulium ions used in the temperature sensor of the present invention.
FIG. 6 is a schematic conceptual diagram of an example of a temperature measuring device according to the present invention.
[Explanation of symbols]
1. Ultraviolet laser, 2A, 2B optical fiber, 3 measuring object, 4 temperature sensor, 5 insulating mirror, 6 glass, 7 spectrophotometer, 8 computer, 9 read-only memory, 10 liquid crystal display.

Claims (7)

A temperature sensor comprising a chloride phosphor containing a matrix as a matrix and erbium ions or thulium ions as an activator. The temperature sensor according to claim 1, wherein the chloride is a rare earth chloride represented by the following general formula (1).
LnCl ₃ ... (1)
[In the formula (1), Ln represents any one rare earth element selected from the group consisting of scandium, yttrium, lanthanum, gadolinium, and ytterbium. ] The temperature sensor according to claim 1, wherein the chloride is a rare earth complex chloride represented by the following general formula (2).
AxByClz ... (2)
[In the formula (2), A represents an alkali metal or an alkaline earth metal, and B represents a rare earth element different from erbium ion or thulium ion contained as an activator. Also, x, y and z indicate real numbers in the ranges of 0.1 ≦ x ≦ 10, 0.1 ≦ y ≦ 10 and 0.4 ≦ z ≦ 60, respectively. ] In the general formula (2), A represents any one kind of alkali metal or alkaline earth metal selected from the group consisting of barium, potassium and strontium, and B represents the group selected from the group consisting of scandium, yttrium, lanthanum, gadolinium and ytterbium. The temperature sensor according to claim 3, wherein the temperature sensor indicates any one kind of rare earth element. The temperature sensor according to claim 1, wherein the chloride includes chloride in a glassy state. 6. The chloride according to claim 5, wherein the chloride in a glassy state contains a chloride of at least one element selected from the group consisting of zinc, cadmium, copper, silver, lithium, gadolinium, lead and manganese. Temperature sensor. A means for exciting the temperature sensor according to claim 1, a means for detecting a fluorescence spectrum generated by the excitation of the temperature sensor, a means for calculating a temperature from the detected spectrum, and a means for displaying the calculated temperature. Temperature measuring device equipped with.

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