JP2004020379A - Shape measuring apparatus and light source device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a shape measuring apparatus for allowing light from a linear light source section to efficiently contribute to the shape measurement of a body to be measured and for securing the degree of freedom to the deviation of a light axis, and to obtain the light source device. <P>SOLUTION: The shape measuring apparatus 1 comprises a linear light source section 103 where LEDs 102 are arranged straightly; an imaging section 104 for imaging light from the light source section 103 on an image forming surface; and a measurement section 106 for measuring the shape of a hot-rolled steel plate 105 between the linear light source section 103 and the imaging section 104 according to information from the imaging section 104. The shape measuring apparatus 1 has a polarizing means 6 arranged between the linear light source section 103 and the hot-rolled steel plate 105. The polarizing means 6 comprises: a first polarizing plate 2 having a first polarizing surface 4 for polarizing so that the quantity of light from the LEDs 102 is made uniform in the arrangement direction of the LEDs 102; and a second polarizing plate 3 having a second polarizing surface 5 for polarizing so that the quantity of light is made uniform in the direction vertical to the arrangement direction. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a shape measuring device that measures the shape of, for example, a rolled steel plate using light, and a light source device used for the shape measuring device, for example.
[0002]
[Prior art]
FIG. 5 is a perspective view showing a conventional shape measuring device. In FIG. 5, a conventional shape measuring apparatus 101 includes a linear light source section 103 having a plurality of LEDs 102, which are linearly arranged, and a light source section 103 disposed opposite to the linear light source section 103. The imaging unit 104 includes an imaging unit 104 on which light from the linear light source unit 103 is focused, and a measurement unit 106 electrically connected to the imaging unit 104. The linear light source unit 103 and the imaging unit 104 are both fixed to a mount made of steel or the like. In the shape measuring apparatus 101, for example, a hot rolled steel plate 105, which is an object to be measured, moves between the linear light source unit 103 and the imaging unit 104, and the hot rolled steel plate 105 Light from the linear light source unit 103 formed on the image forming plane is partially shielded.
[0003]
The LEDs 102 of the linear light source unit 103 are arranged at a center-to-center distance of, for example, 5 mm. The wavelength of the light from the LED 102 is in the blue range. The light of the LED 102 is blue, for example, even when the hot-rolled steel sheet 105 is heated red, the filter can easily remove the red light from the hot-rolled steel sheet 105 having a different wavelength from the blue light from the LED 102. This is because light from the LED 102 can be selected to form an image on the imaging surface of the imaging unit 104.
[0004]
A plurality of imaging units 104 are arranged along the direction in which the LEDs 102 are arranged. The light from the linear light source unit 103 is shared by the imaging units 104 and is formed on the respective imaging planes. That is, in each of the imaging units 104, the processing range determined by the angle of view is set to a part of the linear light source unit 103, and the processing range of each of the imaging units 104 is integrated to reduce the processing range of the entire linear light source unit 103. Is picked up.
[0005]
The measurement unit 106 includes, on the imaging plane of each imaging unit 104, a portion where light from the linear light source unit 103 reaches and forms an image, a portion where the light does not reach because the hot-rolled steel plate 105 blocks, That is, information obtained by detecting the silhouette portion of the hot-rolled steel sheet 105 is subjected to arithmetic processing to measure the edge shape, for example, the width of the hot-rolled steel sheet 105 and unevenness of the edge. . The measuring unit 106 obtains information from the imaging plane of each imaging unit 104 at a constant pulse cycle, and thereby measures the edge shape of the hot-rolled steel sheet 105 along the moving direction of the hot-rolled steel sheet 105. It has become.
[0006]
Accordingly, when measuring the shape of the hot-rolled steel sheet 105, the hot-rolled steel sheet 105 is moved between the linear light source unit 103 and the imaging unit 104, and the silhouette of the hot-rolled steel sheet 105 on the imaging plane of each imaging unit 104 is measured. The portion is detected by the measuring unit 106 and subjected to arithmetic processing.
[0007]
Further, since the plurality of LEDs 102 of the linear light source unit 103 are arranged at intervals of, for example, 5 mm, light from each LED 102 is formed on the imaging plane of the imaging unit 104 at the arrangement interval of the LEDs 102. . That is, on the image forming surface, the luminance due to the light from the LEDs 102 increases at every arrangement interval of the LEDs 102, for example, at every 5 mm interval, and the luminance during that period becomes smaller. If the edge of the silhouette portion of the hot-rolled steel sheet 105 comes to this small luminance portion, the distinction between the silhouette portion and the small luminance portion is difficult to be made clear, so the accuracy of the arrangement interval of the LEDs 102, for example, in units of 5 mm, Only shape measurement is possible.
[0008]
In order to improve the accuracy of shape measurement, conventionally, there has been devised a method of arranging ground glass between the linear light source unit 103 and the hot-rolled steel plate 105. FIG. 6 is a perspective view of a main part of a conventional shape measuring apparatus to which frosted glass is applied. In FIG. 6, the frosted glass 107 is arranged in parallel to the direction in which the LEDs 102 are arranged. The ground glass 107 is disposed between the linear light source unit 103 and the hot-rolled steel plate 105 in FIG. It reaches the part 104.
[0009]
The ground glass 107 is configured to polarize and scatter light from the linear light source unit 103 in all directions. Since the frosted glass 107 also scatters light in the direction in which the LEDs 102 are arranged, the amount of light formed on the image plane of the imaging unit 104 is dispersed, and the difference in luminance along the direction in which the LEDs 102 are arranged on the image plane is obtained. Become smaller and closer to uniform. In other words, the difference in the magnitude of the luminance at, for example, every 5 mm on the image forming plane is reduced, and it is possible to secure such a luminance that the silhouette part of the hot-rolled steel sheet 105 can be distinguished even in a small luminance part.
[0010]
By doing so, the accuracy of shape measurement can be improved. However, since the ground glass 107 scatters light in all directions, light that can reach the imaging unit 104 from each LED 102, that is, Only a small portion of the light contributes to the shape measurement of the hot-rolled steel sheet 105, and most of the light does not contribute to the shape measurement. Therefore, it is necessary to intensify the light of each LED 102, and the power for emitting light increases.
[0011]
In order to suppress the electric power supplied to the LEDs 102, conventionally, instead of the frosted glass 107, a contrivance has been made in which a one-way polarizing plate that mainly polarizes on a plane including each LED 102 without scattering light is applied. . FIG. 7 is a side view of a main part of a conventional shape measuring apparatus to which a one-way polarizing plate is applied. 7, the one-way polarizing plate 108 has the same cross-sectional shape on any plane perpendicular to the one-way polarizing plate 108 and parallel to the arrangement direction of the LEDs 102. The cross-sectional shape is a substantially rectangular shape with a straight line 109 on the imaging unit 104 side and a curve 110 on the linear light source unit 103 side. The curved line 110 on the side of the linear light source unit 103 is constituted by a plurality of curved parts 111 whose central portions are gently raised toward the side of the linear light source unit 103 in the arrangement direction of the LEDs 102.
[0012]
Therefore, on a plane including each LED 102 and each imaging unit 104, light incident on the one-way polarizing plate 108 from each LED 102 is polarized in various directions on this plane without deviating from this plane. Since this polarized light is dispersed on this plane, the difference in luminance along the arrangement direction of the LEDs 102 on the image plane is reduced and approaches uniform, and even a portion of small luminance has a silhouette due to the hot-rolled steel sheet 105. It is possible to secure a luminance that can distinguish the portions. At the same time, the one-way polarizing plate 108 polarizes the light from the LED 102 mainly in the arrangement direction of the LED 102 without scattering the light from the LED 102 in all directions unlike the frosted glass 107. The proportion contributing to the shape measurement of the rolled steel sheet 105 increases.
[0013]
[Problems to be solved by the invention]
However, for example, the frame supporting the linear light source unit 103 is deformed by heat from the hot-rolled steel plate 105, or the linear light beam unit 103 vibrates due to the movement of the hot-rolled steel plate 105, so that each LED 102 and each imaging The part 104 may not be present on the same plane. In this case, since the one-way polarizing plate 108 does not disperse the light from the linear light source unit 103 in the moving direction of the hot-rolled steel plate 105, the relationship between each imaging unit 104 and the linear light source unit 103 is different. Even if the optical axis is slightly shifted, the light from the linear light source unit 103 does not enter the imaging range determined by the angle of view of each imaging unit 104, and the light does not form an image on the imaging plane. That is, when the one-way polarizing plate 108 is applied, the shape measuring apparatus has a small tolerance for the deviation of the optical axis in the relationship between the linear light source unit 103 and the imaging unit 104, There has been a problem that labor is expended and an optical axis adjustment operation is required for a slight optical axis deviation.
[0014]
Further, when the frosted glass 107 is applied, since the light from the linear light source unit 103 is scattered in all directions, the light is also dispersed in the moving direction of the hot-rolled steel sheet 105, and Even if the optical axis in relation to the imaging unit 104 is slightly shifted, light can enter the imaging range of each imaging unit 104. Therefore, in this case, the shape measuring apparatus has a large tolerance for the deviation of the optical axis in the relationship between the linear light source unit 103 and the imaging unit 104, and the shape measuring apparatus has a configuration similar to the case where the one-way polarizing plate 107 is applied. Although the problem can be solved, since the light from the linear light source unit 103 cannot be efficiently contributed to the shape measurement of the hot-rolled steel sheet 105, the problem that the power consumption increases as described above occurs. I do.
[0015]
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve the above-described problems, and to efficiently contribute light from a linear light source unit to shape measurement of an object to be measured, and to provide a degree of freedom with respect to optical axis deviation. It is an object of the present invention to obtain a shape measuring device that ensures the above, and a light source device that makes the light from the linear light source unit efficiently and uniform.
[0016]
[Means for Solving the Problems]
The shape measuring device according to the present invention is a linear light source unit having a plurality of light emitters arranged in a straight line, and is disposed so as to face the linear light source unit, and the light from the linear light source unit is formed on an imaging surface. An imaging unit that forms an image, and a measurement unit that measures the shape of the DUT interposed between the linear light source unit and the imaging unit, based on information from the imaging unit, and a measurement unit that measures the shape of the linear light source unit and the DUT. A first polarization plane that is arranged and polarizes light from the illuminants so that the amount of light from each illuminant is mainly uniform along the direction in which the illuminants are arranged; And a second polarization plane that polarizes the light from the light emitter so as to be uniform along a direction different from the direction.
[0017]
When the distance between the polarizing means and the light emitter is L, the interval between the adjacent light emitters is x, and the directional angle of the light emitter is θ, the relationship of L ≧ x / tan (θ / 2) is satisfied. It is arranged to satisfy.
[0018]
The polarizing means is a polarizing plate having a first polarizing plane and a second polarizing plane.
[0019]
Further, the angle of view of the imaging unit is smaller than the directional angle of the light emitter.
[0020]
In addition, a linear light source unit having a plurality of light emitters arranged in a straight line and a linear light source unit are disposed to face the linear light source unit, and the light amount from each light emitter is made uniform mainly along the direction in which the light emitters are arranged. The first polarization plane that polarizes the light from the linear light source unit, and the light from the luminous body so as to make the amount of light from each luminous body uniform mainly along a direction different from the arrangement direction of the luminous body. Polarizing means having a second polarization plane.
[0021]
BEST MODE FOR CARRYING OUT THE INVENTION
Embodiment 1 FIG.
FIG. 1 is a schematic side view of a shape measuring apparatus according to Embodiment 1 of the present invention, and FIG. 2 is a perspective view of a main part of FIG. 1 and 2, the shape measuring device 1 includes a linear light source unit 103, a plurality of imaging units 104, and a measuring unit 106 having the same configuration as the related art. Further, the hot-rolled steel plate 105 as the object to be measured also moves between the linear light source unit 103 and the imaging unit 104 as in the related art.
[0022]
Further, the shape measuring device 1 includes a first polarizing plate 2 and a second polarizing plate 3 disposed between the linear light source unit 103 and the hot-rolled steel plate 105. The first polarizing plate 2 is disposed between the linear light source 103 and the second polarizing plate 3. The first polarizing plate 2 has a first polarizing surface 4 for polarizing the light from the linear light source 103 so as to make the amount of light from each LED 102 uniform mainly along the arrangement direction of the LEDs 102. The second polarizing plate 3 has a second polarizing surface 5 that polarizes light from the linear light source unit 103 so as to make the amount of light from each LED 102 mainly uniform along a direction perpendicular to the arrangement direction of the LEDs 102. I have. The polarizing means 6 has a first polarizing plate 2 and a second polarizing plate 3.
[0023]
As shown in FIG. 1, the angle of view θ of the imaging unit 104 ₀ Is smaller than the directional angle θ of each LED 102. As shown in FIG. 3, the first polarizing plate 2 has a distance L between the surface of the polarizing means 6 on the side of the linear light source 103 of the first polarizing plate 2 and the center point of the directivity angle of the LED 102, and is adjacent to each other. Assuming that the distance between the centers of the matching LEDs 102 is x and the directional angle of the LEDs 102 is θ,
L ≧ x / tan (θ / 2)
It is arranged to satisfy.
[0024]
The first polarizing plate 2 is arranged with the first polarizing surface 4 facing the imaging unit 104. The first polarizing surface 4 is formed by a plurality of first curved surface portions 7 having an arc-shaped cross section extending in a direction perpendicular to the arrangement direction of the LEDs 102 and being continuously arranged along the arrangement direction of the LEDs 102. Each first curved surface portion 7 has a cross section that is curved so as to protrude toward the imaging unit 104 side. The surface of the first polarizing plate 2 on the side of the linear light source 103 is a plane 8. The cross section of the first polarizing plate 2 is the same on any plane perpendicular to the first polarizing plate 2 and parallel to the arrangement direction of the LEDs 102.
[0025]
The second polarizing plate 3 is arranged with the second polarizing surface 5 facing the imaging unit 104. The second polarizing surface 5 is formed by arranging a plurality of second curved surface portions 9 having an arcuate cross section extending in the arrangement direction of the LEDs 102 continuously in a direction perpendicular to the arrangement direction of the LEDs 102. Each second curved surface portion 9 has a cross section that is curved so as to be convex toward the imaging unit 104 side. The surface of the second polarizing plate 3 on the side of the linear light source 103 is a flat surface 10. The second polarizing plate 3 has the same cross-sectional shape in any plane perpendicular to the second polarizing plate 3 and perpendicular to the direction in which the LEDs 102 are arranged.
[0026]
The shape of the hot-rolled steel sheet 105 is also measured in the shape measuring device 1 in the same manner as in the related art. That is, the hot-rolled steel sheet 105 is moved between the polarizing means 6 and the imaging unit 104, and a silhouette portion of the hot-rolled steel sheet 105 is formed on the imaging surface of each imaging unit 104. The information such as the width of the hot-rolled steel sheet 105 is measured by the information on the image forming plane being detected and processed by the measuring unit 106.
[0027]
Since the shape measuring apparatus 1 has such a configuration, when the light from each LED 102 passes through the first polarizing plate 2, the light from the LED 102 is converted into a plane including the LED 102 and each imaging unit 104 by the first polarization plane 4. Above, it is polarized without deviating from this plane. When the light passes through the second polarizing plate 3, the light is polarized by the second polarizing surface 5 on a plane perpendicular to the plane including the LEDs 102 and the imaging units 104 without deviating from this plane. . This polarized light indicates that the light is focused on a different portion of the imaging plane of the imaging unit 104 from the location where the light would be focused if the polarizing means 6 were not provided. The fact that the polarization direction differs depending on the position where the light reaches the means 6 indicates that the range in which the light is imaged on the imaging plane is widened. That is, the light from each LED 102 is dispersed by the first polarizing plate 2 along the arrangement direction of the plurality of first curved surface portions 7, and is dispersed by the second polarizing plate 3 along the arrangement direction of the plurality of second curved surface portions 9. Distributed. Therefore, the difference in luminance along the arrangement direction of the LEDs 102 on the imaging plane of each imaging unit 104 is reduced and approaches uniform, and the light is dispersed by the second polarizing plate 3 also in the direction perpendicular to the arrangement direction of the LEDs 102. Since the light is imaged on the image plane, the range of luminance that can be distinguished from the silhouette portion by the hot-rolled steel sheet 105 is widened.
[0028]
Therefore, according to the shape measuring apparatus 1 according to the first embodiment, the light from the linear light source 103 can be efficiently contributed to the shape measurement of the hot-rolled steel sheet 105, and is supplied to the linear light source 103. Power can be suppressed.
In addition, the shape measuring device 1 can reduce the difference in luminance along the arrangement direction of the LEDs 102 on the image plane of each imaging unit 104 and make the difference close to uniform. From this, the accuracy of the shape measurement of the hot-rolled steel sheet 105 is improved.
Furthermore, the shape measuring apparatus 1 can keep the second polarizing plate within a certain range even when the optical axis shifts in the relationship between the linear light source unit 103 and each imaging unit 104 due to thermal deformation of the gantry or the like. 3, the brightness which can be distinguished from the silhouette portion by the hot-rolled steel sheet 105 can be secured also in the direction perpendicular to the arrangement direction of the LEDs 102, so that the tolerance to cope with this optical axis shift becomes large.
[0029]
Further, the angle of view θ of the imaging unit 104 ₀ Is smaller than the directivity angle θ of each LED 102, so that the polarization unit 6 sets the angle of view θ ₀ If the angle of view θ is within the imaging range determined by ₀ Light from the outer LED 102, which should not enter if the LED has the same or smaller directivity angle, enters, so that it is possible to suppress a decrease in the amount of light at the periphery of the imaging range.
[0030]
Further, the polarizing means 6 has a relation L ≧ x, where L is the distance between the surface of the LED 102 closest to the LED 102 and the center point of the directional angle of the LED 102, x is the distance between the centers of the LEDs 102 adjacent to each other, and θ is the directional angle of the LED 102. / Tan (θ / 2). From this, in the first polarizing plate 2, light from at least two or more LEDs 102 overlaps at a position along the arrangement direction of the LEDs 102, so that the brightness of the imaging surface of each There is no extremely small portion along the arrangement direction, and the whole is improved.
[0031]
As described above, the shape measuring apparatus 1 simultaneously achieves efficient use of light from the linear light source unit 103, improvement of the shape measurement accuracy of the hot-rolled steel sheet 105, and increase in tolerance for optical axis deviation. Can be.
[0032]
The polarizing means 6 has a configuration in which the first polarizing plate 2 is disposed between the linear light source unit 103 and the second polarizing plate 3, but the present invention is not limited to this arrangement. The polarizing plate 3 may be arranged between the linear light source unit 103 and the first polarizing plate 2.
[0033]
In addition, if the first polarizing plate 2 and the second polarizing plate 3 exist between the linear light source unit 103 and the hot-rolled steel plate 105, the light from each LED 102 is arranged in the arrangement direction of the LED 102 and the arrangement direction thereof. The first polarization plane 4 and the second polarization plane 5 may be located on either the imaging unit 104 side or the linear light source unit 103 side, respectively. In this case, the first curved surface portion and the second curved surface portion on the side of the linear light source 103 have a cross section that is curved so as to be convex toward the side of the linear light source 103.
Furthermore, the first polarizing plate 2 and the second polarizing plate 3 can be dispersed even if both surfaces are the first polarizing surface 4 and the second polarizing surface 5, respectively.
[0034]
Further, the direction in which the second curved surface portion 9 of the second polarizing plate 3 extends need not be the same as the direction in which the LEDs 102 are arranged, and may be different from the direction in which the first curved surface portion 7 extends. For example, the light from each LED 102 can be dispersed in a direction different from the arrangement direction of the LEDs 102 to increase the tolerance for the optical axis deviation, so that any direction is acceptable.
[0035]
Further, the first polarization surface 4 and the second polarization surface 5 do not need to have a plurality of first curved surface portions 7 and second curved surface portions 9 respectively, and even if only one, the light from each LED 102 can be used. Since it can be dispersed, it does not matter.
[0036]
Further, the number of the second polarizing plate 3 does not need to be one, but may be plural. In this case, if the arrangement directions of the second curved surface portions 9 in the respective second polarizing plates are different from each other, light from the LEDs 102 can be dispersed in the respective arrangement directions.
[0037]
Embodiment 2 FIG.
FIG. 4 is a perspective view of a polarizing means in the shape measuring apparatus according to Embodiment 2 of the present invention. The shape measuring apparatus according to the second embodiment is obtained by replacing the polarizing means 6 in the shape measuring apparatus 1 according to the first embodiment with a polarizing plate 20 as the polarizing means in FIG. In FIG. 4, the polarizing plate 20 has a first polarizing surface 21 on the side of the linear light source unit 103 and a second polarizing surface 22 on the side of the imaging unit 104. The first polarization plane 21 polarizes the light from the linear light source unit 103 so that the amount of light from each LED 102 is mainly uniform along the direction in which the LEDs 102 are arranged. The second polarization plane 22 polarizes the light from the linear light source unit 103 so that the amount of light from each LED 102 is mainly made uniform along a direction perpendicular to the arrangement direction of the LEDs 102.
[0038]
The first polarizing surface 21 is configured by a plurality of first curved surface portions 23 having an arc-shaped cross section extending in a direction perpendicular to the arrangement direction of the LEDs 102 continuously arranged in the arrangement direction of the LEDs 102. Each of the first curved surface portions 23 has a cross section that is curved so as to protrude toward the linear light source 103 side. Further, the second polarization surface 22 is configured by arranging a plurality of second curved surface portions 24 having an arc-shaped cross section extending along the arrangement direction of the LEDs 102 continuously in a direction perpendicular to the arrangement direction of the LEDs 102. Each second curved surface portion 24 has a cross section that is curved so as to be convex toward the imaging unit 104 side.
[0039]
Therefore, the first polarization plane 21 has the same function as the first polarization plane 4 of the first embodiment, and the second polarization plane 22 has the same function as the second polarization plane 5 of the first embodiment. . That is, the light from each LED 102 can be dispersed by the polarizing plate 20 in the direction in which the LEDs 102 are arranged, and also in the direction perpendicular to the arrangement direction. As a result, the shape measuring apparatus 1 according to the second embodiment has the same effects as the first embodiment, and the polarizing means can be a single polarizing plate 20. Costs are reduced and assembly time is reduced.
[0040]
The extending direction of the second curved surface portion 24 does not need to be the same as the direction in which the LEDs 102 are arranged. Since the light from each LED 102 can be dispersed in a direction different from the above, any direction may be used.
[0041]
Further, the first polarization surface 21 and the second polarization surface 22 do not need to have a plurality of first curved surface portions 23 and a plurality of second curved surface portions 24, respectively. Since it can be dispersed, it does not matter.
[0042]
The polarizing plate 20 may be arranged such that the first polarizing surface 21 is on the imaging unit 104 side and the second polarizing surface 22 is on the linear light source unit 103 side.
[0043]
In each of the above embodiments, the number of the imaging units 104 does not need to be plural, and the angle of view θ ₀ As long as the entire linear light source unit 103 exists within the imaging range determined by the above, the number may be one.
[0044]
In each of the above embodiments, the measured object does not need to be limited to the hot-rolled steel sheet 105, and may be shaped by irradiating light, such as a rod-shaped member or a member having a through-hole through which light passes. Any object can be used as long as the shadow can be specified.
[0045]
Further, in each of the above-described embodiments, it is not necessary for the light from the LED 102 to make the luminance on the imaging surface of the imaging unit 104 completely uniform. If the brightness is such that the silhouette part can be distinguished, the accuracy of the shape measurement of the hot-rolled steel sheet 105 is improved, so that it does not matter.
[0046]
In each of the above embodiments, the arrangement pitch of the first curved surface portion and the arrangement pitch of the second curved surface portion may be different. This makes it possible to adjust the tolerance for the optical axis deviation or the degree of uniformity of the light amount along the arrangement direction of the LEDs 102.
[0047]
In addition, the light source is not limited to the shape measuring device that measures the shape of the object to be measured, and includes the linear light source unit 103 in each of the above-described embodiments, and a polarizing unit disposed to face the linear light source unit 103. The apparatus can be used in any equipment that requires a uniform light source, such as a copier or a scanner.
[0048]
【The invention's effect】
As is apparent from the above description, the shape measuring apparatus according to the present invention includes a linear light source section having a plurality of light emitting elements arranged in a straight line, and a linear light source An imaging unit that forms light from the imaging unit on an imaging surface; a measurement unit that measures the shape of an object to be measured interposed between the linear light source unit and the imaging unit based on information from the imaging unit; A first polarization plane disposed between the light source unit and the object to be measured, and configured to polarize light from the light emitters so as to make the amount of light from each light emitter mainly uniform along the direction in which the light emitters are arranged; A polarizing means having a second polarization plane for polarizing the light from the illuminant so as to make the amount of light from the illuminant mainly uniform along a direction different from the arrangement direction of the illuminant. As the part approaches clearly, the measurement accuracy of the shape improves, The energy supplied to the luminous body to generate light from the luminous body can be efficiently used for measuring the shape of the measured object, and the tolerance for optical axis deviation in the relationship between the linear light source unit and the imaging unit. Also increases.
[0049]
When the distance between the polarizing means and the light emitter is L, the interval between the adjacent light emitters is x, and the directional angle of the light emitter is θ, the relationship of L ≧ x / tan (θ / 2) is satisfied. , Light from at least two or more light emitters overlaps in the polarizing means, and it is possible to reduce portions where the amount of light is extremely small.
[0050]
Further, since the polarizing means is a polarizing plate having a first polarizing surface and a second polarizing surface, the number of parts is reduced, the production cost is reduced, and the production time is shortened.
[0051]
Further, since the angle of view of the imaging unit is smaller than the directional angle of the light-emitting body, it is possible to suppress a decrease in the amount of light at the periphery in the imaging range determined by the angle of view.
[0052]
In addition, a linear light source unit having a plurality of light emitters arranged in a straight line and a linear light source unit are disposed to face the linear light source unit, and the light amount from each light emitter is made uniform mainly along the direction in which the light emitters are arranged. The first polarization plane that polarizes the light from the linear light source unit, and the light from the luminous body so as to make the amount of light from each luminous body uniform mainly along a direction different from the arrangement direction of the luminous body. Since it is provided with a polarizing means having a second polarizing plane, even when applied to a device requiring a uniform light source such as a copier, the accuracy of the device is improved and the light is supplied to the luminous body to generate light. Energy can be used efficiently.
[Brief description of the drawings]
FIG. 1 is a schematic side view of a shape measuring apparatus according to Embodiment 1 of the present invention.
FIG. 2 is a perspective view of a main part of FIG.
FIG. 3 is a side view illustrating an arrangement relationship between a polarizing unit and a light emitting body.
FIG. 4 is a perspective view of a polarizing means in the shape measuring apparatus according to Embodiment 2 of the present invention.
FIG. 5 is a perspective view showing a conventional shape measuring device.
FIG. 6 is a perspective view of a main part of a conventional shape measuring apparatus to which frosted glass is applied.
FIG. 7 is a side view of a main part of a conventional shape measuring apparatus to which a one-way polarizing plate is applied.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Shape measuring device, 4 1st polarizing surface, 5 2nd polarizing surface, 6 polarizing means, 20 polarizing plate (polarizing means), 21 1st polarizing surface, 22 2nd polarizing surface, 102 LED (light emitting body), 103 straight line Shape light source unit, 104 imaging unit, 106 measuring unit.

Claims (5)

A linear light source unit having a plurality of light emitters arranged in a straight line, and an imaging unit arranged to face the linear light source unit and imaging light from the linear light source unit on an imaging surface,
With the information from the imaging unit, a measurement unit that measures the shape of the measured object interposed between the linear light source unit and the imaging unit,
A first polarization plane disposed between the linear light source unit and the object to be measured, and configured to polarize the light so as to equalize the amount of light from each of the light emitters mainly along the arrangement direction; A polarizing means having a second polarizing surface for polarizing the light so as to make the amount of light from the body mainly uniform along a direction different from the arrangement direction. The polarizing means,
When the distance between the polarizing means and the light emitter is L, the interval between the light emitters adjacent to each other is x, and the directional angle of the light emitter is θ,
L ≧ x / tan (θ / 2)
2. The shape measuring device according to claim 1, wherein the shape measuring device is arranged so as to satisfy the following relationship. The shape measuring apparatus according to claim 1, wherein the polarization unit is a polarizing plate having the first polarization plane and the second polarization plane. The shape measuring apparatus according to claim 1, wherein an angle of view of the imaging unit is smaller than a directional angle of the light emitter. A linear light source section having a plurality of light emitters arranged in a straight line,
A first polarizing surface that is disposed to face the linear light source unit, and that polarizes light from the linear light source unit so as to make the amount of light from each of the light emitters mainly uniform along the arrangement direction; and A light source device, comprising: a polarizing unit having a second polarization surface that polarizes the light so that the amount of light from the light emitter is mainly uniform along a direction different from the arrangement direction.

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