JP2004014902A - 半導体製造装置 - Google Patents

半導体製造装置 Download PDF

Info

Publication number
JP2004014902A
JP2004014902A JP2002168192A JP2002168192A JP2004014902A JP 2004014902 A JP2004014902 A JP 2004014902A JP 2002168192 A JP2002168192 A JP 2002168192A JP 2002168192 A JP2002168192 A JP 2002168192A JP 2004014902 A JP2004014902 A JP 2004014902A
Authority
JP
Japan
Prior art keywords
temperature
semiconductor manufacturing
thermocouple
temperature controller
thermocouples
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002168192A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004014902A5 (enrdf_load_stackoverflow
Inventor
Hideto Yamaguchi
山口　英人
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP2002168192A priority Critical patent/JP2004014902A/ja
Publication of JP2004014902A publication Critical patent/JP2004014902A/ja
Publication of JP2004014902A5 publication Critical patent/JP2004014902A5/ja
Pending legal-status Critical Current

Links

Images

JP2002168192A 2002-06-10 2002-06-10 半導体製造装置 Pending JP2004014902A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002168192A JP2004014902A (ja) 2002-06-10 2002-06-10 半導体製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002168192A JP2004014902A (ja) 2002-06-10 2002-06-10 半導体製造装置

Publications (2)

Publication Number Publication Date
JP2004014902A true JP2004014902A (ja) 2004-01-15
JP2004014902A5 JP2004014902A5 (enrdf_load_stackoverflow) 2005-10-13

Family

ID=30435168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002168192A Pending JP2004014902A (ja) 2002-06-10 2002-06-10 半導体製造装置

Country Status (1)

Country Link
JP (1) JP2004014902A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007112181A3 (en) * 2006-03-24 2007-11-22 Tokyo Electron Ltd Method of monitoring a semiconductor processing system using a wireless sensor network
CN100456187C (zh) * 2006-08-03 2009-01-28 上海交通大学 热处理无线虚拟仪表集中控制系统

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0931656A (ja) * 1995-07-24 1997-02-04 Ebara Corp 薄膜気相成長装置
JP2001126997A (ja) * 1999-10-29 2001-05-11 Hitachi Kokusai Electric Inc 縦型半導体製造装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0931656A (ja) * 1995-07-24 1997-02-04 Ebara Corp 薄膜気相成長装置
JP2001126997A (ja) * 1999-10-29 2001-05-11 Hitachi Kokusai Electric Inc 縦型半導体製造装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007112181A3 (en) * 2006-03-24 2007-11-22 Tokyo Electron Ltd Method of monitoring a semiconductor processing system using a wireless sensor network
US8026113B2 (en) 2006-03-24 2011-09-27 Tokyo Electron Limited Method of monitoring a semiconductor processing system using a wireless sensor network
CN100456187C (zh) * 2006-08-03 2009-01-28 上海交通大学 热处理无线虚拟仪表集中控制系统

Similar Documents

Publication Publication Date Title
US10841874B2 (en) Embedded internet of things (IoT) hub for integration with an appliance and associated systems and methods
WO2019225842A1 (ko) 무선 통신 시스템에서 빔포밍을 적용한 통신 방법 및 장치
US20180108973A1 (en) Modular antenna for integration with an internet of things (iot) hub and associated systems and methods
US10776080B2 (en) Integrated development tool for an internet of things (IOT) system
JP2005538636A (ja) 学習リモートコントロールを用いた無線家庭用電子機器のセットアップ
JP2009165090A (ja) 通信装置、通信方法、プログラムおよびコンピュータ読み取り可能な記録媒体
US10194392B2 (en) Terminal device, wireless device wirelessly communicating with the same, and wireless communication system including the terminal device and wireless device
US20120116694A1 (en) Method and Apparatus for Tire Pressure Monitoring
JP2015170937A (ja) 無線通信装置、無線通信方法、プログラム、無線通信システム、ペリフェラル及びセントラル
EP2478823A1 (en) Portable wireless terminal, wireless terminal, wireless communication system and wireless communication method
CN108885139A (zh) 用于可旋转晶圆支承组件的温度感测系统
CN106557311A (zh) 电子装置及其执行无线通信的方法
CN110146183A (zh) 用于食物的无线探头以及无线温度实时监测系统
JP2004014902A (ja) 半導体製造装置
US20160348935A1 (en) System And Method For Controlling Ducted Air-Conditioning System
KR20120010723A (ko) 체온 관리 시스템 및 방법
CN103841098B (zh) 通信设备、无线电开关和通信方法
JP2001004453A (ja) 自動検温システム
TW202002540A (zh) 照明器具、終端器、照明系統、資訊終端機、照明器具之配對方法及程式
KR20160024152A (ko) 웨어러블 디바이스의 발열 측정장치
US20130076305A1 (en) Wireless charger system with radio controlled clock
JP5850025B2 (ja) 無線通信システム、無線機、アンテナ側装置
JP2007171046A (ja) ウェハ型温度センサとこれを用いた温度測定装置、温度測定機能を有する熱処理装置および温度測定方法
JP2013187722A (ja) 通信装置、通信システム及び通信プログラム
JP2006339806A (ja) ホームネットワークシステム

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050329

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050422

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050601

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20060912

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060919

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20070206