JP2004012262A - Magnetic element and magnetism detection element, manufacturing method thereof, and azimuth sensor using magnetic detection element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To reduce the size of an azimuth sensor, and to constitute the sensor with one chip, using an MI element. <P>SOLUTION: This sensor has a large number of first bandlike magnetic cores arrayed in parallel on the same substrate, and second magnetic cores of which the longitudinal direction is right-angled to the first magnetic cores. First and second conductor wires are provided to be penetrated through the first and second magnetic cores respectively, one of orthogonal components in a magnetic field is detected by the first magnetic core based on a change of an impedance by a magnetic flux of each of the conductor wires, and the other is detected by the second magnetic core. Detected values of the impedances of the first and second conductor wires are synthesized to detect azimuth. <P>COPYRIGHT: (C)2004,JPO

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a magnetic sensing element utilizing the magnetic impedance effect, in which the impedance of a detection conductor is changed by magnetism or a magnetic field, a magnetic element used for the magnetic sensing element, a method for manufacturing the magnetic element and the magnetic sensing element, and a magnetic sensing element. Directional sensor.
[0002]
[Prior art]
2. Description of the Related Art As a magnetic detection element (magnetic sensor) for detecting a weak magnetism or a magnetic field, a magnetoresistance effect type magnetic sensor (hereinafter, referred to as an MR sensor) has been conventionally known. In an MR sensor, a magnetic field is detected using a magnetoresistance effect in which the resistance of a conductor of the MR sensor changes according to the strength of the magnetic field. Since the amount of change in the resistance value of the conductor due to the magnetoresistance effect is the same even when the direction of the magnetic field is reversed, the polarity (N or S) of the magnetic field cannot be detected. In order to detect the polarity of the magnetic field by the MR sensor, a bias magnetic field is applied to the MR sensor so that the change in resistance due to the magnetic field changes according to the polarity of the magnetic field. As a method of applying a bias magnetic field, there are a method of providing a conductor near the magnetic pole of the MR sensor and flowing a bias current through the conductor, and a method of disposing permanent magnet films at both ends of the magnetic pole. The MR sensor detects a magnetic field based on a change in DC resistance of the conductor due to an external magnetic field, and the change in DC resistance is greatly affected by a magnetic material. The magnetic field detection sensitivity of an MR sensor using a general magnetic material is about 0.1% to 3% / Oe, which is not very high.
[0003]
As a magnetic sensor having higher detection sensitivity than the MR sensor, there is a magnetic sensor that utilizes the magnetic impedance effect. In this type of magnetic sensor, a magnetic field is detected based on a phenomenon in which the magnetic permeability of a soft magnetic material changes due to magnetism, and the change in magnetic permeability changes the impedance of a conductor in a magnetic circuit. Typical detection sensitivity of this type of magnetic sensor is 6% / Oe or more.
An example of a magnetic sensor using the magnetic impedance effect is disclosed in Japanese Patent Application Laid-Open No. 7-63832 (hereinafter referred to as a conventional example). FIG. 22 is a plan view of the magnetic sensor 10 of the conventional example. FIG. 23 is a sectional view taken along the line XXIII-XXIII of FIG. 22 and 23, a magnetic body 3 formed on a substrate 4 has two laminated magnetic films 3A and 3B, and a conductor wire 2 is sandwiched between the two. Terminals 1 are arranged at both ends of the conductor wire 2. A high-frequency current is applied to the conductor wire 2, and the magnetic field 7 is detected based on a change in impedance of the conductor wire 2 due to the external magnetic field 7. To detect the polarity (N or S) of the magnetic field with the magnetic sensor 10, a bias magnetic field is applied in the same manner as in the above-described MR sensor.
[0004]
[Problems to be solved by the invention]
When the azimuth is detected by the conventional magnetic sensor 10, as shown in FIG. 24, two magnetic sensors 10A and 10B are arranged on a substrate 4A such that the respective magnetic bodies 3 are at right angles to each other. The azimuth detector 12 needs to be configured. In the direction detector 12 shown in FIG. 24, the magnetic sensor 10A detects a magnetic field component in the X direction, and the magnetic sensor 10B detects a magnetic field component in the Y direction. The azimuth detector 12 can detect the azimuth of the magnetic field by combining the detection outputs of the magnetic sensors 10A and 10B with a detection circuit (not shown). In order to accurately detect the direction of the magnetic field, it is important that the characteristics of the magnetic sensors 10A and 10B are uniform. Further, on the substrate 4A, the magnetic body 3 of the magnetic sensor 10A and the magnetic body 3 of the magnetic sensor 10B must be arranged so as to be perpendicular to each other.
[0005]
There are two methods for making the azimuth detector 12 shown in FIG.
In the first method, the magnetic sensors 10A and 10B individually manufactured are mounted on the substrate 4A with an adhesive or the like. In this method, when bonding, the magnetic body 3 of the magnetic sensor 10A and the magnetic body 3 of the magnetic sensor 10B must be mounted so as to be at right angles to each other, and high assembly accuracy is required. Therefore, a high skill is required for the assembling work. However, as the orientation detector 12 becomes smaller, it becomes more difficult to maintain high assembling accuracy, and an unavoidable error occurs.
[0006]
In the second method, the magnetic body 3, the conductor wires 2 and the terminals 1 of the magnetic sensors 10A and 10B are formed on a substrate 4A by a thin film forming process such as sputtering. According to the thin film forming process, the mutual positional relationship between the magnetic sensors 10A and 10B on the substrate 4A is maintained with high accuracy, so that there is no problem in terms of accuracy. In the thin film forming process, a plurality of azimuth detectors 12 are usually formed on a large-sized substrate (wafer), and after the film is formed, the individual azimuth detectors 12 are separated to form many azimuth detectors 12 at once. However, the azimuth detector 12 of FIG. 24 has a lot of useless space on the upper surface of the substrate 4A, and the dimension of the azimuth detector 12 is large. Therefore, the number of azimuth detectors 12 that can be formed on one wafer is reduced, resulting in a high manufacturing cost. Unnecessary space on the upper surface of the substrate 4A is an obstacle in reducing the size of the azimuth detector 12, and cannot meet the demand for a small azimuth detector.
An object of the present invention is to provide an inexpensive azimuth detector based on a small and highly accurate magnetic impedance effect.
[0007]
[Means for Solving the Problems]
The magnetic element according to the present invention includes a first magnetic core in which a plurality of strip-shaped soft magnetic films are arranged on a non-magnetic substrate in parallel with each other by sequentially shifting a predetermined distance in a longitudinal direction of the strip, and the substrate. On the second, a plurality of strip-shaped soft magnetic films having a longitudinal direction in a direction different from the longitudinal direction of the first magnetic core are sequentially displaced by a predetermined distance in the longitudinal direction of the strip and arranged in parallel. It has a magnetic core.
According to the present invention, a first magnetic core in which strip-shaped soft magnetic films are sequentially shifted in the longitudinal direction by a predetermined distance and arranged in parallel, and a strip-shaped soft magnetic film whose longitudinal direction is different from the first magnetic core. The film is combined with a second magnetic core in which the films are sequentially shifted in the longitudinal direction by a predetermined distance and arranged in parallel. Thereby, the area of the first and second magnetic cores occupying the substrate is reduced, and a small-sized magnetic element can be obtained.
[0008]
A magnetic element according to another aspect of the present invention includes a first magnetic core in which a plurality of strip-shaped soft magnetic films are arranged in parallel on a non-magnetic substrate, and a plurality of strip-shaped orthogonal to the first magnetic core. Has a second magnetic core made of a soft magnetic film.
According to the present invention, since the first magnetic core and the second magnetic core are orthogonal to each other, the area of the first and second magnetic cores occupying on the substrate is minimized, and the size of the magnetic element can be further reduced. realizable.
The magnetic sensing element of the present invention is a first magnetic core in which a plurality of strip-shaped soft magnetic films are arranged on a non-magnetic substrate in parallel with each other by sequentially shifting a predetermined distance in the longitudinal direction of the strip and the substrate. On the second, a plurality of strip-shaped soft magnetic films having a longitudinal direction in a direction different from the longitudinal direction of the first magnetic core are sequentially displaced by a predetermined distance in the longitudinal direction of the strip and arranged in parallel. Magnetic core. A first conductor wire penetrating through the plurality of first magnetic cores, and a second conductor wire penetrating through the plurality of second magnetic cores and having electrode terminals at both ends, respectively. Have.
According to the present invention, a first magnetic core in which strip-shaped soft magnetic films are sequentially shifted in the longitudinal direction by a predetermined distance and arranged in parallel, and a strip-shaped soft magnetic film whose longitudinal direction is different from the first magnetic core. The film is combined with a second magnetic core in which the films are sequentially shifted in the longitudinal direction by a predetermined distance and arranged in parallel. Thereby, the area of the first and second magnetic cores occupying on the substrate is reduced. By providing conductor wires on the first and second magnetic cores, a small-sized magnetic sensing element can be obtained.
[0009]
According to another aspect of the present invention, there is provided a magnetic sensing element comprising: a first magnetic core in which a plurality of strip-shaped soft magnetic films are arranged in parallel on a non-magnetic substrate; a plurality of strip-shaped orthogonal to the first magnetic core; A second magnetic core made of a soft magnetic film, a first conductor line penetrating the first magnetic core, penetrating the second magnetic core at both ends, and a second conductor having electrode terminals at both ends. It has two conductor wires.
According to the present invention, since the first magnetic core and the second magnetic core are orthogonal to each other, the area of the first and second magnetic cores occupying the substrate shape is minimized. By providing the first and second magnetic cores with the conductor wires, further downsizing of the magnetic sensing element can be realized.
[0010]
The method for manufacturing a magnetic sensing element according to the present invention includes the steps of: forming a soft magnetic film on a non-magnetic substrate; forming a strip-shaped first magnetic core pattern by ion milling; Forming a non-magnetic and non-conductive film thereon and forming a pattern of a first insulating film by ion milling; forming a conductive film on the first insulating film by ion milling; Forming a first conductor line of at least one desired shape, forming a non-magnetic and non-conductive film on the first conductor line, and forming a pattern of a second insulating film by ion milling Forming a soft magnetic film on the second insulating film, forming a pattern of the second magnetic core by ion milling, and forming a non-conductive protective film on the entire surface of the substrate. Forming a shape.
According to the present invention, since the first and second magnetic cores and the conductor wires are manufactured by the pattern forming method, a magnetic sensing element having uniform characteristics can be manufactured at low cost.
[0011]
The azimuth sensor according to the present invention includes a magnetic detection element according to any one of claims 7 to 17, a high-frequency current source that supplies a high-frequency current to a first conductor wire and a second conductor wire of the magnetic detection element, DC bias applying means for applying a DC bias magnetic field in a direction parallel to the direction of the detected magnetic field to the magnetic core and the second magnetic core, and detecting a high frequency voltage generated at the electrode terminals of the first and second conductor wires. High-frequency amplifier.
According to the present invention, since the magnetic detection element formed small is used, the size of the direction sensor can be reduced.
[0012]
BEST MODE FOR CARRYING OUT THE INVENTION
A preferred embodiment of the present invention will be described in detail with reference to FIGS.
[0013]
<< 1st Example >>
FIG. 1 is a plan view of a magnetic element according to a first embodiment of the present invention. In FIG. 1, on a non-magnetic substrate 100, one opposing side is a magnetic core 21, 22, 23, 24, 25, of a rectangular (strip-shaped) soft magnetic film much longer than the other opposing side. 26 and 27 are arranged in parallel at a constant distance and sequentially shifted by a predetermined distance in the longitudinal direction. The magnetic cores 21 to 27 are provided in the left region of the substrate 100, and the longitudinal direction is, for example, at 45 ° to the side of the substrate 100. In the right side region of the substrate 100, magnetic cores 31, 32, 33, 34, 35, 36 and 37 of soft magnetic films having the same shape as the magnetic cores 21 to 27 are kept at regular intervals and sequentially in the longitudinal direction. They are displaced by a predetermined distance and arranged in parallel. The angle between the longitudinal direction of the magnetic cores 31 to 37 and the longitudinal direction of the magnetic cores 21 to 27 is 90 degrees or less. In the central region of the substrate 100, the tips of the magnetic cores 21 to 27 are made to approach the tips of the magnetic cores 31 to 37, respectively. The magnetic cores 21 to 27 are called a magnetic core group 20, and the magnetic cores 31 to 37 are called a magnetic core group 30. The magnetic member shown in FIG. 1 and including the magnetic core group 20 and the magnetic core group 30 formed on the substrate 100 is referred to as a “magnetic element 190”.
[0014]
FIG. 2 shows a magnetic detection system in which each of the magnetic cores 21 to 27 of the magnetic element 190 shown in FIG. FIG. 3 is a plan view of an element 200. The conductor wires 81 and 82 are electrically conductive films such as copper. Both ends of the conductor wire 81 are connected to electrode terminals 83 and 84, respectively, and both ends of the conductor wire 82 are connected to electrode terminals 85 and 86, respectively. In the configuration of FIG. 2, the conductor wires 81 and 82 may be provided on the magnetic cores 21 to 27 and the magnetic cores 31 to 37, respectively. Alternatively, the conductor wires 81 and 82 may be formed first on the surface of the substrate 100, and the magnetic cores 21 to 27 and 31 to 37 may be formed thereon. Further, as described below with reference to FIG. 19, the conductor wires 81 and 82 may pass through the respective magnetic cores 21 to 27 and 31 to 37.
[0015]
FIG. 19 is a sectional view taken along line XIX-XIX in FIG. In the configuration of the magnetic detection element 200 shown in FIG. 19, the conductor wire 82 passes through the inside of the magnetic core 37. Similarly, the conductor wire 82 penetrates the magnetic cores 31 to 36, and the conductor wire 81 penetrates the magnetic cores 21 to 27. When manufacturing the magnetic sensing element 200 shown in FIG. 19, first, a soft magnetic film 37A is formed on the surface of the substrate 100. An insulating film 87 made of a silicon oxide film or the like is formed at the center of the soft magnetic film 37A. A conductor line 82 is formed of copper or the like on the insulating film 87, and an insulating film 88 is formed so as to cover the conductor line 82. Finally, a soft magnetic film 37B is further formed on the soft magnetic film 37A and the insulating film 88. As described above, it is desirable that the conductor wires 82 be insulated from the soft magnetic films 37A and 37B by the insulating films 87 and 88. However, when the structure is to be simplified, the insulating films 87 and 88 need not be provided. As will be described later in detail, when the azimuth sensor is configured using the magnetic detection element 200 of the present embodiment, even if the conductor wires 81 and 82 are formed on the magnetic cores 21 to 27 and 31 to 37, respectively, Function can be obtained. However, when an azimuth sensor having high sensitivity is to be obtained, as shown in FIG. 19, it is desirable that the conductor wires 81 and 82 have a structure penetrating the respective magnetic cores 21 to 27 and 31 to 37. Accordingly, in each of the following embodiments, a description will be given of a case where the conductor wire has a structure penetrating the magnetic core.
[0016]
FIG. 3 is a plan view of a magnetic sensing element 200A according to another example of the present embodiment. 3, the magnetic core groups 20 and 30 of the magnetic sensing element 200A are the same as those in FIG. In the magnetic sensing element 200A, the conductor lines 101 and 102 that intersect the magnetic core groups 20 and 30, respectively, are formed in a zigzag shape. The conductor wire 101 has five conductor wires 101A, 101B, 101C, 101D, and 101E that are arranged in parallel and intersect with the magnetic core group 20 at a plurality of positions.
[0017]
The conductor wires 101A and 101B are connected at the lower end in the drawing, and the conductor wires 101B and 101C are connected at the upper end. The conductor wires 101C and 101D are connected at the lower end in the figure, and the conductor wires 101D and 101E are connected at the upper end in the figure. The upper end of the conductor wire 101A is connected to the electrode terminal 84, and the lower end of the conductor wire 101E is connected to the electrode terminal 83. The conductor wires 101A to 101E pass through the magnetic cores 21 to 27 at the intersections with the magnetic cores 21 to 27 in the same manner as shown in the cross-sectional view of FIG.
[0018]
The conductor wire 102 that intersects the magnetic core group 30 has a shape symmetrical to the conductor wire 101 with respect to the center line C of the magnetic sensing element 200A, and the relationship between the conductor wire 102 and the magnetic core group 30 is This is the same as the relationship with the core group 20. Both ends of the conductor wire 102 are connected to respective electrode terminals 85 and 86.
[0019]
FIG. 4 is a plan view of a magnetic sensing element 200B of still another example of the present embodiment. 4, the magnetic core groups 20 and 30 of the magnetic detection element 200B are the same as those in FIG. In the magnetic sensing element 200B, the conductor lines 111 and 112 intersecting the magnetic core groups 20 and 30, respectively, are formed in a zigzag shape, but the intersections with the magnetic core groups 20 and 30 are different from those in FIG. ing.
[0020]
The conductor wire 111 of the magnetic core group 20 has five conductor wires 111A, 111B, 111C, 111D and 111E arranged in parallel. The conductor wire 111A penetrates through the magnetic cores 21 to 27 of the magnetic core group 20, is led downward from the magnetic core 21, and is connected to the lower end of the conductor wire 111B. The conductor wire 111B does not penetrate the magnetic cores 21 to 27 of the magnetic core group 20, passes through the upper portions of the magnetic cores 21 to 27, reaches above the magnetic core 27, and is connected to the upper end of the conductor wire 111C. It constitutes a coil. The conductor wire 111C penetrates the magnetic cores 21 to 27, is led out from the magnetic core 21, and is connected to the lower end of the conductor wire 111D. The conductor wire 111D passes above the magnetic cores 21 to 27 and reaches above the magnetic core 27 similarly to the conductor wire 111B, and is connected to the upper end of the conductor wire 111E. The conductor wire 111 </ b> E penetrates the magnetic cores 21 to 27, is led out downward from the magnetic core 21, and is connected to the electrode element 83. The upper end of the conductor wire 111A is connected to the electrode terminal 84. In the magnetic detecting element of FIG. 4, the conductor wires 111 and 112 each have a coil structure.
[0021]
The conductor line 112 that intersects with the magnetic core group 30 has a shape symmetrical to the conductor line 111 with respect to the center line C of the magnetic detection element 200B, and the relationship between the conductor line 112 and the magnetic core group 30 is This is the same as the relationship with the magnetic core group 20. The conductor wires 111 and 112 are preferably electrically insulated from the magnetic cores 21 to 27 and 31 to 37 at the penetrating portions of the magnetic cores 21 to 27 and 31 to 37.
[0022]
A configuration example and operation of an azimuth sensor that detects the strength and direction of a magnetic or magnetic field using any one of the magnetic detection elements 200, 200A, and 200B of the first embodiment will be described with reference to FIGS. .
In the example of FIG. 5, the magnetic detection element 200B shown in FIG. 4 is used. An azimuth sensor is configured by connecting the magnetic detection element 200B to a detection circuit as shown in FIG. In FIG. 20, the electrode terminals 84, 86, 83 and 85 of the magnetic detection element 200B are connected to the terminals 311, 312, 313 and 314 of the detection circuit, respectively. With this connection, the conductor wire 111 is connected between the connection points 320 and 330 of the detection circuit via the switches 311A and 313A. Similarly, the conductor line 112 is connected between the connection points 320 and 330 via the switches 312A and 314A. A high frequency current source 241 (frequency is, for example, 10 MHz) and a DC power source 248 connected in parallel are connected to the connection points 320 and 330 via a resistor 242.
[0023]
By connecting the DC power supply 248 in parallel with the high-frequency current source 241 of the AC current source, the DC current is superimposed on the high-frequency current that is the AC carrier signal. A DC bias magnetic field can be applied to the magnetic core groups 20 and 30 by flowing a high-frequency current on which a DC current is superimposed through conductor lines of the magnetic detection element. The connection points 320 and 330 are connected to both input terminals of the high frequency amplifier 247.
In FIG. 5, the magnetic sensing element 200B is placed in a magnetic field H whose direction is indicated by an arrow 210 and whose strength is indicated by the length of the arrow 210. The magnetic field H is divided into x and y components of x, y rectangular coordinates on the paper of the drawing, and these components are represented as magnetic field components Hx, Hy, respectively. Since the magnetic flux easily passes in the longitudinal direction of the magnetic core having a small demagnetizing field, the magnetic flux Bx due to the magnetic field component Hx flows into the magnetic core group 20 of the magnetic detection element 200B, and the magnetic flux By due to the magnetic field component Hy flows into the magnetic core group 30. Inflow.
In FIG. 20, first, the switches 311A and 313A are closed, and the switches 3122A and 314A are opened. As a result, the conductor wire 111 is connected between the connection points 320 and 330.
[0024]
5, the magnetic permeability of the magnetic cores 21 to 27 changes due to the magnetic flux Bx flowing into the magnetic core group 20, and the impedance of the conductor wire 111 changes due to the magnetic impedance effect. The high-frequency voltage between the terminal 320 and the terminal 330 changes due to the impedance change of the conductor wire 111. By detecting the change in the high-frequency voltage by the high-frequency amplifier 247, a detection signal indicating the magnetic flux density, that is, the strength of the magnetic field component Hx can be obtained. A detection signal indicating the strength of the magnetic field component Hx is input to the azimuth magnetic field strength detection circuit 248 and is temporarily stored in an internal memory.
Next, the switches 311A and 313A are opened, and the switches 312A and 314A are closed. Thereby, the conductor wire 111 is separated from the terminals 320 and 330, and the conductor wire 112 is connected between the terminals 320 and 330 instead. As a result, as shown in FIG. 5, the magnetic flux By due to the magnetic field component Hy flows into the magnetic core group 30, and the magnetic flux density, that is, the strength of the magnetic field component Hy is detected by the same magnetic impedance effect as in the case of the conductor wire 111. Is done. The direction of the magnetic field H and the magnetic field strength are obtained from the magnetic field components Hx and Hy. The azimuth and the magnetic field strength are displayed on, for example, the display device 249 as necessary. In the magnetic sensing elements 200, 200A, and 200B of the present embodiment, the magnetic core groups 20 and 30 have seven magnetic cores 21 to 27 and 31 to 37, respectively. Is not limited to seven, but may be a larger number.
[0025]
As the number of magnetic cores increases, the number of locations through which the conductor wire penetrates increases, so that the detection sensitivity as an azimuth sensor increases, but the outer dimensions increase. Further, in the magnetic detection element 200A, the number of the conductor wires 101A to 101E arranged in a zigzag is not limited to the number shown in FIG. 3, and more conductor wires may be arranged in parallel. The impedance change of the conductor wires 101 and 102 due to the external magnetic field is substantially proportional to the number of intersections between the conductor wires and the magnetic core. Therefore, as the number of intersections between the conductor wire and the magnetic core increases, the magnetic field detection sensitivity increases. In the detection circuit of FIG. 20, the direction is detected by alternately switching the conductor wires 111 and 112 by the switches 311A, 312A, 313A, and 314A, but two high-frequency current sources 241, two DC power sources 248, and two high-frequency amplifiers 247 are provided. May be provided so as to be dedicated to each of the conductor wires 111 and 112.
[0026]
In the magnetic element 190 shown in FIG. 1, each of the rectangular magnetic cores 21 to 27 of the magnetic core group 20 whose one opposing side is longer than the other opposing side is sequentially displaced by a predetermined distance in the longitudinal direction of the rectangle and arranged in parallel. are doing. Similarly, the magnetic cores 31 to 37 of the magnetic core group 30 are sequentially shifted by a predetermined distance in the longitudinal direction of the rectangle, and are arranged in parallel so that the longitudinal direction is perpendicular to the longitudinal direction of the magnetic cores 21 to 27. Therefore, when the magnetic core group 20 and the magnetic core group 30 are arranged on the substrate such that one end of each of the magnetic cores 21 to 27 and one end of each of the magnetic cores 31 to 37 are close to each other. The area occupied by the magnetic core groups 20 and 30 on the substrate is minimized. Furthermore, by arranging the electrode terminals 83 to 86 of the conductor wires in a substantially triangular region generated when the magnetic core groups 20 and 30 are formed on the rectangular substrate 100, the surface of the substrate 100 can be effectively used. This makes it possible to reduce the size of the magnetic detection element.
[0027]
<< 2nd Example >>
A magnetic element 290 according to a second embodiment of the present invention will be described with reference to FIG.
In the magnetic element 290 shown in FIG. 6, a magnetic core 41, 42, 43, 44, 45, 46 and 47 of a band-shaped soft magnetic film is provided on the left region of the non-magnetic substrate 100 at a constant interval and in a longitudinal direction. They are arranged in parallel in such a manner that they are sequentially shifted by a predetermined distance in the direction. The magnetic cores 41 to 47 are referred to as a magnetic core group 40. In the region on the right side of the substrate 100, magnetic cores 51, 52, 53, 54, 55, 56 and 57 of strip-shaped soft magnetic films connected to the magnetic cores 41 to 47 near the center line C of the substrate 100, respectively. Are arranged in parallel at predetermined intervals and sequentially shifted by a predetermined distance in the longitudinal direction. The magnetic cores 51 to 57 are referred to as a magnetic core group 50. The longitudinal direction of the magnetic cores 51 to 57 is 90 ° or less with respect to the longitudinal direction of the magnetic cores 41 to 47.
[0028]
FIG. 7 is a plan view of a magnetic sensing element 300 configured by providing conductor lines 81 and 82 on the magnetic element 290 shown in FIG. Electrode terminals 83 and 84 are provided at both ends of the conductor wire 81, and electrode terminals 85 and 86 are provided at both ends of the conductor wire 82. The conductor wires 81 and 82 pass through the magnetic cores 41 to 47 and 51 to 57, respectively, similarly to the conductor wires 81 and 82 of the magnetic detection element in FIG.
FIG. 8 is a plan view of a magnetic sensing element 300A according to another example of the second embodiment. 8, the configurations of the conductor wires 101 and 102 and the electrode terminals 83, 84, 85 and 86 are the same as those in FIG.
[0029]
FIG. 9 is a plan view of a magnetic sensing element 300B of still another example of the second embodiment. In FIG. 9, the configurations of the conductor lines 111 and 112 and the electrode terminals 83, 84, 85 and 86 are the same as those in FIG.
In the magnetic sensing elements 300, 300A, and 300B of the second embodiment, since the magnetic cores 41 to 47 and the magnetic cores 51 to 57 are respectively connected, the lengths of the magnetic cores 41 to 47 and the magnetic cores 51 to 57 are set. Are slightly longer than the magnetic cores 21 to 27 and 31 to 37 of the first embodiment. In general, as the length of the magnetic core is longer, the density of the magnetic fluxes Bx and By (FIG. 5) flowing into the magnetic core in the same magnetic field increases, and as a result, the detection sensitivity of the magnetic field increases. In the present embodiment, the detection sensitivity can be further improved by connecting the magnetic cores 41 to 47 and the magnetic cores 51 to 57 to make the length of each magnetic core longer than that of the first embodiment.
[0030]
<< 3rd Example >>
The magnetic elements 350 and 360 according to the third embodiment of the present invention will be described with reference to FIGS. 10A and 10B, respectively.
In FIG. 10A, on a non-magnetic substrate 340, magnetic cores 61, 62, 63, 64 of a rectangular (strip-shaped) soft magnetic film whose one opposite side is much longer than the other opposite side. , 65 and 66 (magnetic core group 60) are formed in parallel at a predetermined interval. Further, orthogonal to the magnetic cores 61 to 66, magnetic cores 71, 72, 73, 74, 75 and 76 (magnetic core group 70) having the same shape as the magnetic cores 61 to 66 are formed. The overlapping portion (for example, the region 61A) of the magnetic cores 61 to 66 and the magnetic cores 71 to 76 is shared by the magnetic cores 61 to 66 and 71 to 76. The thickness of the magnetic cores 61 to 66 and the magnetic cores 71 to 76 may be the same in all parts, and the thickness of the overlapping part may be large.
[0031]
FIG. 10B is a plan view of an example of the magnetic element 320 in which the interval between the magnetic cores 63 and 64 and the interval between the magnetic cores 73 and 74 are wider than other portions. The magnetic core groups 60 and 68 in FIGS. 10A and 10B correspond to the magnetic core group 20 in FIG. 1, and the magnetic core groups 70 and 78 correspond to the magnetic core group 30.
FIG. 11 is a plan view of a magnetic detection element 361 in which conductor lines 141 and 142 and electrode terminals 83, 84, 85, and 86 are provided on the magnetic element 360 in FIG. The conductor wires 141 having both ends connected to the electrode terminals 83 and 84 penetrate the magnetic cores 61 to 66 (shown in FIG. 10) of the magnetic core group 68 with the same configuration as the conductor wire 82 shown in FIG. . Similarly, the conductor wires 142 having both ends connected to the electrode terminals 85 and 86 pass through the magnetic cores 71 to 76 (shown in FIG. 10) of the magnetic core group 78.
[0032]
FIG. 12 is a plan view of a magnetic detection element 351 according to another example of the present embodiment. The magnetic detection element 351 is similar to the magnetic element 350 shown in FIG. 10A except that conductor lines 151 and 152 and electrode terminals 83, 84, 85 and 86 are provided. The conductor wire 151 having both ends connected to the electrode terminals 83 and 84 is formed in a zigzag manner and intersects with the magnetic cores 71 to 76 at five points. At the intersection, the conductor 151 penetrates the magnetic cores 71 to 76 in the same manner as the conductor wire 82 in FIG. Similarly, the conductor wires 152 whose both ends are connected to the electrode terminals 85 and 86 are formed in a zigzag manner and intersect with the magnetic cores 61 to 66 at five points. At the intersection, the conductor wire 152 passes through each of the magnetic cores 61 to 66.
[0033]
The intersection of the conductor wire 151 and the conductor wire 152 overlaps with an insulating film interposed therebetween, and the conductor wire 151 and the conductor wire 152 are electrically insulated.
An example of the configuration of the azimuth sensor using the magnetic sensor 361 of the present embodiment shown in FIG. 11 and its operation will be described with reference to FIGS.
The magnetic detection element 361 shown in FIG. 11 is connected to a detection circuit as shown in FIG. That is, the electrode terminals 83, 84, 85, 86 of the magnetic detection element 361 are connected to the terminals 314, 311, 312, 313, respectively. 13, when the magnetic detection element 361 is placed in a magnetic field H indicated by an arrow 210, a magnetic flux Bx due to an x-axis component Hx of the magnetic field H passes through the magnetic core group 78, and a magnetic flux By due to a y-axis component Hy becomes a magnetic core group 68. Pass through. In FIG. 21, when the switches 311A and 314A are first closed and the switches 312A and 313A are opened, the conductor wire 141 is connected between the connection points 320 and 330. Thus, the strength of the y-axis component Hy of the magnetic field H passing through the magnetic core group 68 is detected. Next, when the switches 311A and 314A are opened and the switches 312A and 313A are closed, the conductor wire 142 is connected between the connection points 320 and 330. Thereby, the intensity of the x-axis component Hx passing through the magnetic core group 78 is detected. The processing for obtaining the azimuth and the magnetic field strength based on the detection result is the same as that in the first embodiment.
[0034]
According to the present embodiment, for example, as shown in FIG. 10A, the magnetic core group 60 and the magnetic core group 70 are orthogonal to each other, so that the area occupied by the magnetic core groups 60 and 70 is equal to the first and second areas. Significantly less than in the second embodiment. As a result, the size of the magnetic sensing element can be reduced. Even if the magnetic core groups 60 and 70 are perpendicular to each other as in the present embodiment, the magnetic flux flowing into the magnetic core is likely to pass in the longitudinal direction where the demagnetizing field is small. , The magnetic flux due to the y-axis component Hy passes through the magnetic core group 78. Therefore, the function as the direction sensor is the same as that of the first and second embodiments.
[0035]
<< 4th Example >>
The fourth embodiment of the present invention is a method for manufacturing the magnetic sensing element 300A of the second embodiment of the present invention shown in FIG. 8, and will be described below with reference to FIG.
(A), (b), (c) and (d) of FIG. 14 are plan views of the magnetic sensing element in each step of manufacturing.
In FIG. 14A, a nonmagnetic ceramic substrate 100 represented by NiTiMg is prepared. In FIG. 14B, after forming an amorphous first soft magnetic film on the entire surface of the substrate 100 and performing a predetermined heat treatment to adjust the magnetic characteristics, the ion milling process used in the semiconductor processing process is performed. The other portions are removed except for the inverted V-shaped soft magnetic film shown in FIG. 14B to form magnetic cores 271 to 277.
[0036]
A first silicon oxide film as an insulating film is formed on the magnetic cores 271 to 277 (not shown). A copper film is formed on the first silicon oxide film, and zigzag conductor lines 101 and electrode terminals connected to both ends of the conductor lines 101 by patterning the copper film as shown in FIG. 83, 84 and zigzag conductor lines 102 and electrode terminals 85, 86 connected to both ends of the conductor lines 102 are formed. At this time, the first silicon oxide film is left over the entire surface without pattern formation. Next, a second silicon oxide film is formed on the entire surface (not shown), and the first and second silicon oxide films are removed by pattern formation except for the silicon oxide films on the conductor lines 101 and 102. It is desirable that the remaining pattern of the first and second silicon oxide films be only in the vicinity of the conductor lines 101 and 102 and not so large. This is because it is desirable that the area of the silicon oxide film existing between the second magnetic core formed in the next step and the first magnetic core formed earlier be as small as possible to increase the detection output. With the above configuration, the conductor wire and the magnetic core are electrically insulated.
[0037]
In FIG. 14D, a second soft magnetic film is formed on magnetic cores 271 to 277 including a silicon oxide film, and magnetic cores 281 to 287 are formed by ion milling. The magnetic core groups 40 and 50 shown in FIG. 8 are formed by the magnetic cores 271 to 277 and the magnetic cores 281 to 287.
Finally, an alumina film is formed as a surface protection film on the entire surface (not shown), and the alumina film at the electrode terminals 83 to 86 is removed by ion milling to complete the magnetic sensing element 300A.
[0038]
According to the manufacturing method of this embodiment, the magnetic cores 271 to 277 and 281 to 287, the conductive wires 101 and 102, and the electrode terminals 83 to 86 can be manufactured by using a processing device for manufacturing a semiconductor element. In the manufacture of semiconductor devices, a large number of devices can be patterned on a large wafer to produce devices with many characteristics at once. According to the manufacturing method of this embodiment, by forming and processing a large number of patterns of magnetic sensing elements on a large wafer, it is possible to mass-produce magnetic sensing elements with uniform characteristics. The detection element can be provided at low cost.
In the fourth embodiment, the method of manufacturing the magnetic sensing element 300A shown in FIG. 8 has been described. However, the manufacturing method of the present embodiment corresponds to the method of manufacturing the magnetic sensing elements 200, 200A, and 300 shown in FIGS. The same applies to manufacturing.
[0039]
<< 5th Example >>
The fifth embodiment of the present invention is a method of manufacturing the magnetic sensing element 300B of the second embodiment of the present invention shown in FIG. 9, and will be described below with reference to FIG. (A) to (e) of FIG. 15 are plan views of the magnetic sensing element in each step of the manufacturing.
An amorphous soft magnetic film is formed on the entire surface of a nonmagnetic ceramic (NiTiMg) substrate 100. After a predetermined heat treatment is performed on the soft magnetic film to adjust the magnetic characteristics, the magnetic cores 271 to 277 are formed by ion milling while leaving the inverted V-shaped soft magnetic film shown in FIG. A first silicon oxide film is formed on the magnetic cores 271 to 277. The processing of the first silicon oxide film is the same as in the fourth embodiment.
As shown in FIG. 15C, the conductor lines 111A, 111B, 111C and the conductor lines 112A, 112B, 112C are formed of a copper film, and the electrode terminals 83 to 86 are formed. The upper end of the conductor wire 111A is connected to the electrode terminal 84, and the lower end of the conductor wire 111C is connected to the electrode terminal 83. The upper end of the conductor wire 112A is connected to the electrode terminal 86, and the lower end of the conductor wire 112C is connected to the electrode terminal 85.
[0040]
At this stage, the conductor wires 111B and 112B are not connected anywhere. The conductor lines 111A to 111C and 112A to 112C provided on the magnetic cores 271 to 277 are formed on the first silicon oxide film.
Next, a second silicon oxide film is formed over the entire surface of the substrate 100, and the silicon oxide film other than the regions of the conductor lines 111A to 111C and the conductor lines 112A to 112C is removed by ion milling. The pattern of the remaining silicon oxide film is not so much larger than the regions of the conductor lines 111A to 111C and 112 to 112C. In FIG. 15D, other magnetic cores 281 to 287 are formed of an amorphous soft magnetic film on the magnetic cores 271 to 276, and the magnetic characteristics are adjusted by heat treatment.
The magnetic cores 40 and 50 shown in FIG. 9 are formed by the magnetic cores 271 to 277 and the magnetic cores 281 to 287. A third silicon oxide film is formed on the magnetic cores 281 to 287. The connection portions are connected to the third silicon oxide film by ion milling so that the respective ends of the conductor lines 111A, 111B and 111C and the respective ends of the conductor lines 111D and 111E to be formed next are connected to form a coil. To form a window.
[0041]
In FIG. 5E, conductor lines 111D, 111E and 121D, 121E are formed by patterning a copper film on the third silicon oxide film. At this time, the film is formed such that the lower end of the conductor line 111D is connected to the lower end of the conductor line 111A, and the upper end of the conductor line 111D is connected to the upper end of the conductor line 111B.
The lower end of the conductor line 111E is connected to the lower end of the conductor line 111B, and the upper end of the conductor line 111E is connected to the upper end of the conductor line 111C. Similarly, the conductor lines 121D and 121E are formed so as to be connected to the conductor lines 112A, 112B and 112C, respectively. As a result, a coil-shaped conductor line 111 extending from the electrode terminal 83 to the electrode terminal 84 is formed, and a coil-shaped conductor line 112 extending from the electrode terminal 85 to the electrode terminal 86 is formed.
Finally, an alumina film is formed on the entire surface as a protective film, and the alumina film in the electrode terminals 83 to 36 is removed by ion milling to complete the process.
[0042]
<< Sixth Embodiment >>
The sixth embodiment of the present invention is a method of manufacturing the magnetic sensing element 361 of FIG. 11 described in the third embodiment, and will be described below with reference to FIG.
An amorphous first soft magnetic film is formed on a nonmagnetic substrate 340 using a NiTiMg ceramic shown in FIG. As shown in FIG. 11B, the first magnetic core 140A, which is a well-shaped aggregate, is patterned. A first silicon oxide film is formed as an insulating film on the first magnetic core 140A (not shown), a first copper film is formed thereon, and ion milling is performed as shown in FIG. As shown, the conductor line 142 and the electrode terminals 85 and 86 are patterned. At this time, the first silicon oxide film is left without pattern formation.
[0043]
Next, a second silicon oxide film (not shown) is formed on the entire surface of the substrate 340. A second copper film is formed on the second silicon oxide film, and a conductor line 141 and electrode terminals 83 and 84 are patterned as shown in FIG. At this time, the second silicon oxide film is left without pattern formation. Further, a third silicon oxide film is formed on the entire surface (not shown), and the first, second, and third silicon oxide films are patterned so that the conductor lines 141 and 142 do not contact the magnetic core to be formed next. What is important here is that the pattern of silicon oxide is not too large than the pattern of the conductor lines 141 and 142. The output increases as the area of the insulating layer existing between the second magnetic core formed later and the first magnetic core formed earlier is smaller. Next, after forming an amorphous second soft magnetic film and controlling magnetic properties by heat treatment, the second magnetic core 140B is patterned by ion milling in a semiconductor process. Finally, an alumina film as a protective film is formed on the entire surface, and windows are opened at the electrode terminals 83 to 86 by ion milling to complete the magnetic sensing element 361.
[0044]
Another manufacturing method of the magnetic sensing element 361 will be described with reference to FIG. An amorphous soft magnetic film is formed on a NiTiMg ceramic non-magnetic substrate 340 shown in FIG. 17A, and its magnetic properties are controlled by heat treatment. Then, by ion milling in a semiconductor process, FIG. The first magnetic core 140A of a large number of well-shaped aggregates shown in FIG. A first silicon oxide film is formed on the entire surface as an insulating film (not shown). Further, a copper film is formed thereon, and the conductor lines 141 and 142 and the electrode terminals 83 to 86 are pattern-formed. At this time, the first silicon oxide film is left without pattern formation. Next, a second silicon oxide film is formed on the entire surface (not shown), and the first and second silicon oxide films are patterned so that the conductor wires 141 and 142 do not contact the magnetic core to be formed next. . What is important here is that the pattern of silicon oxide is not too large than the pattern of the conductor lines 141 and 142. This is because the output is improved when the area of the insulating layer existing between the second magnetic core to be formed next and the first magnetic core formed earlier is small. Next, an amorphous second soft magnetic film is formed, the magnetic properties are controlled by heat treatment, and the second magnetic core 140B is patterned by ion milling in a semiconductor process. Finally, an alumina film is formed on the entire surface as a protective film (not shown), and windows are opened at the electrode terminals 83 to 86 by ion milling to complete the magnetic detection element 361A.
In the magnetic detection element 361A of this embodiment, the conductor lines 141 and 142 are electrically connected. Therefore, as shown in FIG. 21, it is suitable for use in a configuration in which the conductors 141 and 142 are alternately energized by switching with switches 311A, 312A, 313A, and 314A.
[0045]
FIG. 18 shows a method of manufacturing the magnetic sensing element 351 shown in FIG. In FIG. 18, an amorphous first soft magnetic film is formed on a NiTiMg ceramic non-magnetic substrate 340, and the magnetic properties are controlled by heat treatment. Then, as shown in FIG. The first magnetic core 150A of a large number of well-shaped aggregates is patterned by ion milling. A first silicon oxide film is formed over the entire surface as an insulating film. A conductor copper film is formed on the first silicon oxide film, and the conductor lines 152 and the electrode terminals 85 and 86 are patterned. At this time, the first silicon oxide film is left without pattern formation. A second silicon oxide film is formed on the entire surface, a second copper film as a conductor is formed thereon, and the conductor lines 151 and the electrode terminals 83 and 84 are pattern-formed. At this time, the second silicon oxide film is left without pattern formation. Next, a third silicon oxide film is formed, and the first, second, and third silicon oxide films are patterned so that the conductor lines 151 and 152 do not contact the magnetic core to be formed next. What is important here is that the pattern of the silicon oxide should not be too large than the pattern of the conductor lines 151 and 152. This is because the output increases as the area of the insulating layer existing between the second magnetic core and the first magnetic core to be formed next decreases. After forming an amorphous second soft magnetic film and controlling magnetic properties by heat treatment, the second magnetic core 150B is patterned by ion milling in a semiconductor process. Finally, an alumina film is formed as a protective film on the entire surface, and windows are opened in the electrode terminals 83 to 86 by ion milling to complete the magnetic sensing element 351.
[0046]
In each of the above embodiments, an amorphous soft magnetic film is used, but a magnetic material such as an Fe-based, Co-based metal magnetic film, or an oxide magnetic film having an excellent effective magnetic permeability can also be used. Although copper is used as the conductive metal film, a metal film such as gold (Au) or silver (Ag) having a small specific resistance may be used. Different kinds of metal films may be combined. Although silicon oxide is used as the insulating film, an inorganic dielectric film such as alumina or glass may be used. Although the substrate used was a NiTiMg ceramic substrate, another ceramic such as AlTiC, a glass-based material, or a carbon substrate may be used. Although alumina was used as the protective film, SiO 2 was used. ₂ Other dielectrics, resins, etc. may be used. Although a method of superimposing a direct current on a carrier current is used as a method for applying a direct current bias magnetic field, a permanent magnet or an external coil may be used.
In the manufacturing method, an ion milling process is mainly used as an etching method, but another etching method such as wet etching may be used. Although the film formation method was mainly performed by sputtering, a method such as vapor deposition or plating may be used.
There is no problem even if the configuration such as the number of magnetic cores and conductor wires is changed.
Further, it goes without saying that the magnetic detection element of the present invention can be used as a magnetic detection sensor other than the direction sensor.
[0047]
【The invention's effect】
As will be apparent from the detailed description of each of the above embodiments, when the present invention is configured with a magnetic element used for an MI magnetic detecting element, two sets of cores having different longitudinal directions of the magnetic cores are simultaneously formed on the same substrate. Form a pattern. Thus, the size and structure of the magnetic sensing element can be reduced. If the high-frequency oscillator, high-frequency amplifier, and other components of the azimuth sensor are simultaneously configured on the substrate of the magnetic sensing element by a semiconductor manufacturing process, the azimuth sensor can be made into one chip, which can further reduce the size and cost, resulting in practical effects. large.
[Brief description of the drawings]
FIG. 1 is a plan view of a magnetic element according to a first embodiment of the present invention.
FIG. 2 is a plan view of a magnetic detection element using the magnetic element according to the first embodiment of the present invention.
FIG. 3 is a plan view of another example of the magnetic sensing element of the first embodiment.
FIG. 4 is a plan view of still another example of the magnetic sensing element of the first embodiment.
FIG. 5 is a plan view showing the operation of the magnetic sensor of the first embodiment.
FIG. 6 is a plan view of a magnetic element according to a second embodiment of the present invention.
FIG. 7 is a plan view of a magnetic sensing element using a magnetic element according to a second embodiment of the present invention.
FIG. 8 is a plan view of another example of the magnetic sensing element of the second embodiment.
FIG. 9 is a plan view of still another example of the magnetic sensing element of the second embodiment.
FIGS. 10A and 10B are plan views of a magnetic element according to a third embodiment of the present invention.
FIG. 11 is a plan view of a magnetic sensing element according to a third embodiment of the present invention.
FIG. 12 is a plan view of another example of the magnetic sensor of the third embodiment.
FIG. 13 is a plan view showing the operation of the magnetic sensor of the third embodiment.
14 (a) to (d) are plan views showing a method for manufacturing a magnetic sensing element according to a fourth embodiment of the present invention.
FIGS. 15A to 15E are plan views showing a method for manufacturing a magnetic sensing element according to a fifth embodiment of the present invention.
16 (a) to (e) are plan views showing a method for manufacturing a magnetic sensing element according to a sixth embodiment of the present invention.
17 (a) to (d) are plan views showing another method for manufacturing the magnetic sensing element according to the sixth embodiment of the present invention.
FIGS. 18A to 18E are plan views showing another method for manufacturing the magnetic sensing element according to the sixth embodiment of the present invention.
FIG. 19 is a partial sectional view of a magnetic sensing element common to the first to sixth embodiments of the present invention.
FIG. 20 is a circuit block diagram of a direction sensor using the magnetic detection elements according to the first and second embodiments of the present invention.
FIG. 21 is a circuit block diagram of a direction sensor using a magnetic detection element according to a third embodiment of the present invention.
FIG. 22 is a plan view of a conventional magnetic sensing element.
FIG. 23 is a sectional view taken along the line XXIII-XXIII of FIG. 22;
FIG. 24 is a plan view of a conventional magnetic sensing element.
[Explanation of symbols]
20, 30, 40, 50, 60, 70, 68, 78: magnetic core group
21 to 27, 31 to 37, 41 to 47, 51 to 57, 61 to 66, 71 to 76, 271-277, 281-287: Magnetic core
81, 82, 101, 102, 111, 112, 141, 142, 151, 152: conductor wire
83, 84, 85, 86: electrode terminals
100, 340: Substrate
190, 290, 350, 360: magnetic element
200, 200A, 200B, 300, 300A, 300B, 351, 361, magnetic detection element

Claims (23)

A first magnetic core in which a plurality of strip-shaped soft magnetic films are sequentially arranged in parallel in the longitudinal direction of the strip by a predetermined distance on a non-magnetic substrate, and the first magnetic core on the substrate; A magnetic element having a second magnetic core in which a plurality of strip-shaped soft magnetic films having a longitudinal direction different from the longitudinal direction of the magnetic core are arranged in parallel in the longitudinal direction of the strip by being shifted sequentially by a predetermined distance. The magnetic element according to claim 1, wherein an angle between a longitudinal direction of the first magnetic core and a longitudinal direction of the second magnetic core is 90 degrees or less. 2. The method according to claim 1, wherein the first and second magnetic cores are arranged on the substrate such that one end of the first magnetic core and one end of the second magnetic core are close to each other. 2. The magnetic element according to claim 1. 4. The magnetic element according to claim 3, wherein one end of the first magnetic core is connected to one end of the second magnetic core. A first magnetic core in which a plurality of strip-shaped soft magnetic films are arranged in parallel on a non-magnetic substrate; and a second magnetic core formed by a plurality of strip-shaped soft magnetic films orthogonal to the first magnetic core. Magnetic element. The magnetic element according to claim 5, wherein the first magnetic core and the second magnetic core are integrally formed of a soft magnetic film having the same thickness. A first magnetic core in which a plurality of strip-shaped soft magnetic films are arranged in parallel on a non-magnetic substrate by being sequentially shifted by a predetermined distance in the longitudinal direction of the strip,
On the substrate, a plurality of strip-shaped soft magnetic films having a longitudinal direction different from the longitudinal direction of the first magnetic core are arranged in parallel in such a manner that they are sequentially shifted by a predetermined distance in the longitudinal direction of the strip. 2 magnetic cores.
A first conductor wire penetrating through the plurality of first magnetic cores, and a second conductor wire penetrating through the plurality of second magnetic cores and having electrode terminals at both ends, respectively. Magnetic detecting element. The magnetic sensing element according to claim 7, wherein an angle between a longitudinal direction of the first magnetic core and a longitudinal direction of the second magnetic core is 90 degrees or less. 2. The method according to claim 1, wherein the first and second magnetic cores are arranged on the substrate such that one end of the first magnetic core and one end of the second magnetic core are close to each other. 7. The magnetic detection element according to 7. 10. The magnetic sensing element according to claim 9, wherein one end of the first magnetic core and one end of the second magnetic core are connected. The first conductor wire penetrates each of the plurality of first magnetic cores at a plurality of positions, and the second conductor wire penetrates each of the plurality of second magnetic cores at a plurality of positions. The magnetic sensing element according to any one of claims 7, 8, 9, and 10, wherein: The magnetic detecting element according to claim 11, wherein the first and second conductor lines are formed in a zigzag manner. The first conductor wire penetrates each of the plurality of first magnetic cores at a plurality of positions and forms a coil that winds the first magnetic core;
9. The coil according to claim 7, wherein the second conductor wire penetrates each of the plurality of second magnetic cores at a plurality of field positions and forms a coil that winds the second magnetic core. The magnetic sensing element according to any one of claims 9 and 10. The said 1st conductor wire and 2nd conductor wire respectively penetrate the said 1st magnetic core and a 2nd magnetic core at an arbitrary angle with respect to each longitudinal direction, The Claims 7 characterized by the above-mentioned. The magnetic sensing element according to any one of 8, 9, and 10. A first magnetic core in which a plurality of strip-shaped soft magnetic films are arranged in parallel on a non-magnetic substrate;
A second magnetic core composed of a plurality of strip-shaped soft magnetic films orthogonal to the first magnetic core;
A magnetic sensing element having a first conductor line penetrating the first magnetic core and having electrode terminals at both ends and a second conductor line penetrating the second magnetic core and having electrode terminals at both ends. The first conductor wire passes through each of the plurality of first magnetic cores at a plurality of positions, and the second conductor wire passes through each of the plurality of second magnetic cores at a plurality of positions. 16. The magnetic sensing element according to claim 15, wherein: 17. The magnetic sensing element according to claim 16, wherein the first and second conductor lines are formed in a zigzag manner. Forming a film of a soft magnetic material on a non-magnetic substrate and forming a strip-shaped first magnetic core pattern by ion milling;
Forming a non-magnetic and non-conductive film on the first magnetic core and forming a pattern of the first insulating film by ion milling;
Forming a conductive film on the first insulating film and forming at least one first conductor line of a desired shape by ion milling;
Forming a non-magnetic and non-conductive film on the first conductor line, and forming a pattern of a second insulating film by ion milling;
Forming a soft magnetic film on the second insulating film, forming a pattern of the second magnetic core by ion milling, and forming a non-conductive protective film in a desired shape on the entire surface of the substrate; A method for manufacturing a magnetic sensing element, comprising: 19. The method for manufacturing a magnetic sensing element according to claim 18, further comprising a step of forming another conductor film for forming a return coil by connecting a terminal of the conductor wire on the second magnetic core. Forming a conductive film on the second insulating film, and forming a second conductive line having a desired shape by ion milling;
Forming a non-magnetic and non-conductive film on the second conductor line to form a pattern of a third insulating film; and forming a second soft magnetic material on the third insulating film. 19. The method for manufacturing a magnetic sensing element according to claim 18, further comprising a step of forming a film and forming a pattern of the second magnetic core by ion milling. The magnetic detection element according to any one of claims 7 to 17,
An AC current source that supplies an AC carrier signal to each of the first conductor line and the second conductor line of the magnetic detection element in a direction intersecting the direction of the detection magnetic field;
DC bias applying means for applying a DC bias magnetic field in a direction parallel to the direction of the detection magnetic field to the first magnetic core and the second magnetic core, and a high frequency generated at the electrode terminals of the first and second conductor wires. A direction sensor having a high-frequency amplifier for detecting a voltage. 22. The azimuth sensor according to claim 21, wherein the DC bias applying means is a DC power supply connected to the electrode terminal. 22. The azimuth sensor according to claim 21, further comprising a changeover switch for alternately passing an AC carrier signal to the first conductor line and the second conductor line.

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