JP2004011535A5 - - Google Patents

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Publication number
JP2004011535A5
JP2004011535A5 JP2002166249A JP2002166249A JP2004011535A5 JP 2004011535 A5 JP2004011535 A5 JP 2004011535A5 JP 2002166249 A JP2002166249 A JP 2002166249A JP 2002166249 A JP2002166249 A JP 2002166249A JP 2004011535 A5 JP2004011535 A5 JP 2004011535A5
Authority
JP
Japan
Prior art keywords
pump
chamber
flow path
pressure chamber
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002166249A
Other languages
English (en)
Japanese (ja)
Other versions
JP3870847B2 (ja
JP2004011535A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2002166249A priority Critical patent/JP3870847B2/ja
Priority claimed from JP2002166249A external-priority patent/JP3870847B2/ja
Priority to US10/430,314 priority patent/US7011507B2/en
Priority to EP03010687A priority patent/EP1369584A3/de
Priority to CNB031363938A priority patent/CN1307367C/zh
Publication of JP2004011535A publication Critical patent/JP2004011535A/ja
Publication of JP2004011535A5 publication Critical patent/JP2004011535A5/ja
Application granted granted Critical
Publication of JP3870847B2 publication Critical patent/JP3870847B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2002166249A 2002-06-04 2002-06-06 ポンプ Expired - Fee Related JP3870847B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002166249A JP3870847B2 (ja) 2002-06-06 2002-06-06 ポンプ
US10/430,314 US7011507B2 (en) 2002-06-04 2003-05-07 Positive displacement pump with a combined inertance value of the inlet flow path smaller than that of the outlet flow path
EP03010687A EP1369584A3 (de) 2002-06-04 2003-05-13 Membranpumpe
CNB031363938A CN1307367C (zh) 2002-06-04 2003-06-04 泵

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002166249A JP3870847B2 (ja) 2002-06-06 2002-06-06 ポンプ

Publications (3)

Publication Number Publication Date
JP2004011535A JP2004011535A (ja) 2004-01-15
JP2004011535A5 true JP2004011535A5 (de) 2005-04-21
JP3870847B2 JP3870847B2 (ja) 2007-01-24

Family

ID=30433881

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002166249A Expired - Fee Related JP3870847B2 (ja) 2002-06-04 2002-06-06 ポンプ

Country Status (1)

Country Link
JP (1) JP3870847B2 (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5828372B2 (ja) 2010-09-21 2015-12-02 セイコーエプソン株式会社 冷却装置及びプロジェクター
JP5776447B2 (ja) 2011-08-30 2015-09-09 セイコーエプソン株式会社 噴射した流体によって生体組織を切除するための流体噴射装置に接続して用いられる制御装置および切除装置
US9243619B2 (en) 2011-09-13 2016-01-26 Seiko Epson Corporation Liquid feed pump and circulation pump with detection units to detect operating states of the pumps
CN110541807A (zh) * 2018-05-29 2019-12-06 哈尔滨工业大学 一种单阀双腔压电泵及其工作方法

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