JP2004006300A5 - - Google Patents
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- Publication number
- JP2004006300A5 JP2004006300A5 JP2003104066A JP2003104066A JP2004006300A5 JP 2004006300 A5 JP2004006300 A5 JP 2004006300A5 JP 2003104066 A JP2003104066 A JP 2003104066A JP 2003104066 A JP2003104066 A JP 2003104066A JP 2004006300 A5 JP2004006300 A5 JP 2004006300A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003104066A JP4308564B2 (en) | 2002-04-09 | 2003-04-08 | Plasma processing apparatus and plasma processing tray |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002106164 | 2002-04-09 | ||
| JP2003104066A JP4308564B2 (en) | 2002-04-09 | 2003-04-08 | Plasma processing apparatus and plasma processing tray |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2004006300A JP2004006300A (en) | 2004-01-08 |
| JP2004006300A5 true JP2004006300A5 (en) | 2006-04-20 |
| JP4308564B2 JP4308564B2 (en) | 2009-08-05 |
Family
ID=30446786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2003104066A Expired - Fee Related JP4308564B2 (en) | 2002-04-09 | 2003-04-08 | Plasma processing apparatus and plasma processing tray |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4308564B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100739890B1 (en) * | 2003-05-02 | 2007-07-13 | 동경 엘렉트론 주식회사 | Process gas introducing mechanism and plasma processing device |
| JP4622764B2 (en) * | 2005-09-15 | 2011-02-02 | パナソニック株式会社 | Plasma processing method |
| JP5131762B2 (en) * | 2008-05-09 | 2013-01-30 | サムコ株式会社 | Plasma processing method, plasma processing apparatus, and plasma processing tray |
| JP4709945B2 (en) * | 2009-04-13 | 2011-06-29 | パナソニック株式会社 | Plasma processing apparatus and plasma processing method |
| EP2649218B1 (en) * | 2010-12-08 | 2017-08-23 | Evatec AG | Apparatus and method for depositing a layer onto a substrate |
| JP7002302B2 (en) * | 2016-12-13 | 2022-02-10 | 芝浦メカトロニクス株式会社 | Film forming equipment |
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2003
- 2003-04-08 JP JP2003104066A patent/JP4308564B2/en not_active Expired - Fee Related