JP2003532035A - Valve device - Google Patents

Abstract

(57) Abstract: The present invention relates to a valve device comprising several valve units (2) which are sequentially attached to each other in an arrangement direction (3). To achieve this arrangement, each valve unit (2) has a first mounting surface (5) and a second mounting surface (6) located on diametrically opposite surfaces. Inside each valve unit (2), at least one internal flow channel (32a, 32b) extends in a direction transverse to the arrangement direction (3). The longitudinal faces of the channels facing the first mounting surface (5) are bounded by the side channel walls (36a, 36b) of the respective valve unit (2). The channel is open at least partially in the opposite longitudinal plane. The open lengths (37a, 37b) are covered by the attached adjacent valve unit (2). As a result, a compact width is realized in the valve device.

Description

Detailed Description of the Invention

The present invention has a plurality of valve units, and the plurality of valve units each have a mounting surface on a surface facing away from each other, and are sequentially arranged in an array direction to form a subassembly. The invention relates to a valve arrangement which is arranged and faces the mutually opposite mounting surfaces, each valve unit comprising at least one internal flow duct extending transversely to the arrangement direction.

[0002] Valve devices of this kind are described, for example, in European Patent Publication 0 678 676 B.
1 is disclosed. This valve device includes a plurality of flat valve units. The plurality of valve units are fixed together as a subassembly by a tie. Further, the adjacent valve units are arranged with respect to the mounting surfaces facing each other. Each valve unit is provided with valve means capable of controlling a fluid flow in a power duct that is open to an outer surface and is arranged in a direction transverse to an arrangement direction of the valve unit. The supply and discharge of fluid in the valve units are performed via fluid ducts that extend through the individual valve units in the arrangement direction, and the fluid ducts that are aligned with each other.

When attempting to miniaturize a conventional type valve device, in order to secure a preferable flow rate cross-sectional area, the dimension in the arrangement direction cannot be reduced beyond a certain minimum dimension. Accordingly, one of the objects of the present invention is to create a valve device of the type described above which is capable of having a reduced overall size without compromising functionality.

To achieve this object, at least one internal flow duct is bounded in the first longitudinal surface facing the first mounting surface by the side duct wall of the respective valve unit, A second longitudinal surface facing the other second mounting surface opens along at least a length extending over a portion of the length of the duct, the open length being mounted on the second mounting surface. It is covered by the side duct walls of adjacent valve units.

This means that the flow duct extending inside the valve unit in a direction transverse to the arrangement direction can be manufactured as having a width larger than the conventional one. It is a direct component of this valve unit with a flow duct that only one of the two duct walls delimits the respective flow duct at the mounting surface on the longitudinal side. On the other hand, the opposite duct wall is at least partly constituted by the adjacent valve unit attached. Thereby, the flow duct can extend within the associated valve unit and is defined with respect to its longitudinal width in the adjacent valve unit. In this way, it is possible to reduce the overall width of the valve unit without reducing the flow cross section of each internal flow duct.
A further advantage of this special purpose construction is that even relatively complex non-linear internal flow ducts can be formed very easily. This is because such a flow duct can be formed as a grooved recess from the corresponding mounting surface, for example when casting the individual components of the valve unit.

For example, German Patent Publication 43 24 939 C2 and European Patent Publication 0
643 811 B1 has already been disclosed to provide a valve unit with a longitudinally split housing. The housing has groove-shaped recesses in the dividing plane, so that when the housing is assembled, the housings complement each other to form a flow duct. However, in this case, there is no interaction in which the valve housing simultaneously fulfills the housing function with respect to the adjacent valve unit. As disclosed in U.S. Pat. No. 5,341,846, in the case of a valve unit having a longitudinally separated housing, even when a plurality of valve units are assembled into a valve device of a subassembly,
Designers have sticked to individual legacy arrays.

Further advantageous developments of the invention are defined in the dependent claims. At least one internal flow duct with an open length preferably constitutes a power duct in each valve unit. The duct extends in a direction transverse to the arrangement direction, starting with one valve means and extending to the outer surface of the valve unit. A connecting means is attached to the duct, and the connecting means is connectable to a fluid duct connected to a load. Further, the open length portion may extend over the entire length of the duct, regardless of the type of flow duct involved, or may extend over only a portion of each flow duct. It may be. From this point of view, at least one flow duct may be provided with a length portion whose peripheral portion is completely closed, at a position following the open length portion. Via the length, for example, a direct or indirect connection of a fluid duct leading to another device is possible. Since the flow duct is completely closed in the vicinity of the peripheral portion of the connection opening, a sealed connection with another duct or conduit means connected to another device can be easily performed.

In a particularly advantageous construction of the valve device, the valve units each comprise a body. The body portion is provided with valve means and internally extends at least one internal flow duct with an open length. In this case, the valve means is preferably integrated in the body.

If each valve unit has a flat plate shape or a plate shape, a particularly small size can be realized. Each valve unit may include one or more fluid ducts that pass through the valve unit in the arrangement direction. The fluid ducts each correspond on the one hand to the valve means of the respective valve unit on the one hand and on the other hand to the respective adjacent valve units to form a fluid connection extending through all the valve units. Communicates with the fluid duct. This allows
A common supply and discharge of the pressure medium required for operation is possible.

It is convenient to provide sealing means between adjacent valve units. The sealing means provides a hermetic seal between adjacent valve units around the opening of the fluid ducts communicating with each other and around the open length of at least one internal flow duct. These sealing means may, for example, be constituted by an integral sealing element arranged between adjacent valve units.

The provision of fixed alignment means in adjacent valve units facilitates giving these valve units the desired relative position. Furthermore, it is advantageous for the valve unit to be a flat and smooth surface on the first mounting surface used as a side duct wall, which allows a very simple manufacture. A groove-like recess is required to receive the sealing means, such recess being an open length or a second mounting surface of the respective valve unit provided with one or more internal flow ducts. Is preferred.

The present invention will now be described in detail with reference to the accompanying drawings. The illustrated valve device 1 comprises a plurality of valve units 2, which preferably have a flat plate shape. The plurality of valve units 2 are sequentially arranged in the arrangement direction 3 shown by the broken line to form a sub-assembly-like unit, and are firmly connected to each other.

The individual valve units 2 are arranged so that the extending surface 4 shown by the broken line in FIG. 1 is at a right angle to the arrangement direction. On the surface of the valve unit 2 facing the opposite position and having a large area,
Each valve unit 2 has a first mounting surface 5 and a second mounting surface 6, respectively. In this case, the valve units 2 that are immediately adjacent to each other in the arrangement direction 3 are attached to each other via the intermediate sealing means 7 on the attachment surfaces that face each other. The row of valve units 2 contacts the first terminal body 8 at one end and the second terminal body 9 at the other end. These terminators are attached to the respective outer ends of the valve units 2 on the outside, with their respective associated terminations facing the arrangement direction 3.

The outer shapes of the valve unit 2 and the end bodies 8 and 9 in the arrangement direction 3 are preferably the same. It is preferable that the valve device 1 has a rectangular outer shape so that the valve device 1 has a block shape, specifically, a rectangular parallelepiped shape. The components of the valve device 1 which are arranged side by side together in the manner described above are firmly connected to one another and at the same time removable. Preferably, the above components are clamped together in the alignment direction 3. Such a clamp may be provided by the tether 12 shown in FIG. The tethers extend through the individual plate-like components and are fixed to both end bodies 8,9.

Preferably, the flat plate-shaped or slab-shaped valve unit 2 has a structure including several parts in the embodiment. The main component is the main body 13.
The main body 13 is also flat and provided with valve means 14. Valve means 14
Is housed inside the main body 13 in this embodiment, and has an integrated structure in this respect.

Preferably, the valve means 14 has an elongated receptacle 15 configured as a cavity in the body 13. The valve portion 16 is dynamically received in this cavity. The valve portion 16 is shown by a broken line in FIG. Valve means 14
Are preferably longitudinally extended and arranged so that their longitudinal axis 17 extends in, or parallel to, the plane 4 extending in each valve unit 2. In this embodiment, the longitudinal axis 17 intersects the mutually facing outer surfaces, which are arranged in a staggered manner in the arrangement direction 3 of the associated valve unit 2. These outer surfaces are hereinafter referred to as front and rear outer surfaces 18a and 18b for convenience of description.

Since it has a rectangular shape, each valve unit 2 in the present embodiment is
It has two further outer surfaces extending in a direction perpendicular to the outer surfaces 18a and 18b described above. These outer surfaces are referred to as upper and lower outer surfaces 19a and 19b for convenience of description. These details regarding the arrangement relate only to the preferred arrangement of the valve device 1 and are therefore not to be understood as limiting interpretations.

In this embodiment, the front and rear additional bodies 2 are provided on the front and rear surfaces of the main body 13 having a narrow width.
2a and 22b are each firmly attached in place. These attachments are made, for example, using the attachment screws shown in broken line 23 in FIG. The front and rear outer surfaces 18a and 18b of each valve unit 2 are located on the outer surfaces of the front and rear additional bodies 22a and 22b opposite to the main body portion 13.

In FIGS. 3 and 4, only the main body 13 of the valve unit 2 is shown. The rear addition body 22a constitutes a support for the valve drive means 24. The valve drive means 24 are shown only in dashed lines and are electrically driven. By using this, it is possible to operate the valve means 14 as required, specifically to arrange the valve part 16 not shown in FIGS. 3 and 4 in the receiving port 15 at different switching positions. Become.

If desired, the valve drive means 24 may be provided wholly or partly in or on the front adder 22a. The valve driving means 24 is, for example, an extremely small size micro valve and / or
Alternatively, it may have one or more control valves in the form of piezoelectric actuated valves.

In each valve unit 2, in a manner that depends on the switching state of the valve means 14, the pressure medium, in particular compressed air, is linked to one another in different ways between different ducts 25. It is possible to lead to. In such a duct 25, several fluid ducts 26a, 26b, 26c that penetrate the valve unit 2 in the main body 13 in the arrangement direction 3 and open at the two mounting surfaces 5, 6 of each valve unit 2 are provided. , Three ducts in this embodiment,
There is. When the valve units 2 are attached to each other, the openings of the fluid ducts in the adjacent valve units 2 face each other in a straight line.
As a result, the number of through ducts corresponding to the number of the fluid ducts 26a, 26b, 26c becomes a through duct that penetrates all the valve units 2. The sealing means 7 described above makes it possible to ensure a transition between the individual valve units 2 that is sealed to the outside. The sealing means 7 comprises individual valve units 2
Of the respective associated fluid ducts 26a, 26b, 26c are arranged at the periphery of the openings that communicate with each other and surround the periphery.

In the illustrated embodiment, the first fluid duct 26 a is in the form of a supply duct which allows a central supply to all valve units 2 with respect to the pressure medium to be distributed. The pressure medium is supplied, for example, via the fluid line 27. The fluid line 27 is connectable to the first terminal body 8 and is attached to the through opening 28 of the terminal body 8. The through opening 28 communicates with the supply duct 26a of the first valve unit 2.

The other two fluid ducts 26 b, 26 c are in the present embodiment configured in the form of ventilation ducts and communicate with the through openings 29 of the first terminal body 8. The fluid ducts 26b and 26c communicate with the outside air through the through opening 29. In this case, the through opening 29 of the first terminal body 8 can be further connected to the muffler 32 for noise reduction of the exhaust flow.

The second terminal body 9 arranged on the opposite side has only a cover function in this embodiment. However, it is obvious that the through openings 28, 29 may be provided in at least a part of the second terminal body 9. The fluid ducts 26a and 26b are directly connected to the receiving ports 15 of the respective valve means 14 in the respective body portions 13.

Among the ducts 25 in each valve unit 2 which are connected at one end to the receiving port 15 are at least one, preferably a plurality of internal flow ducts 32a, 32b (two ducts in this embodiment). Thus, there is a flow duct that extends in the valve unit 2 in a direction crossing the arrangement direction 3. Depending on the design, the longitudinal shape of these ducts may be linear, or at least partially non-linear. Specifically, these ducts extend in the extending direction of the surface 4 as long as the front outer surface 18a is arranged in a staggered manner with respect to the arrangement direction 3. In the present embodiment, the internal flow ducts 32a and 32b constitute an output duct, and the output ducts
A load adapted to the fluid dynamics is operated. Therefore, the connecting means 33 is provided in the openings of these ducts located on the front outer surface 18a. This means 33 allows a removable connection of the fluid ducts leading to the individual loads. Connection means 3
3 may be specifically in the form of a plug connecting means.

Supply of the pressure medium to the connected load by appropriate operation of the valve means 14,
Alternatively, it is possible to selectively connect the internal flow ducts 32a, 32b to the supply ducts 26a or the ventilation ducts 26b, 26c for discharging the pressure medium. The entire cross section of the internal flow ducts 32a, 32b is the individual associated valve unit
Located inside. However, by using a special technique, even if the individual valve units 2 have a small overall width "B", the internal flow ducts 32a,
32b may have a relatively large duct width "b". It should be understood that the width dimension in this case is measured along the arrangement direction 3. By taking appropriate measures, it is possible to provide a sufficient flow cross section even when the individual valve units 2 have a small overall width "B". Thereby, it is possible to provide the valve device 1 with a very small size. For example, the overall width "B" can be on the order of 7 mm.

In a suitable manner, the inner flow ducts 32a, 32b are provided with side duct walls 36a, 36 at their first longitudinal faces 34a, 34b facing the first mounting surface 5.
bounded by b. In this case, this wall is a direct component of the valve unit 2 through which the respective internal flow ducts 32a, 32b extend.

On the other hand, in the second longitudinal surfaces 35a, 35b facing the second mounting surface 6 on the other side, the internal flow ducts 32a, 32b open as a length portion at least in a part of these lengths, and correspond to each other. The duct portions to be opened are referred to as open length portions 37a and 37b. At the open lengths 37a, 37b, the respective internal flow ducts 32a, 3b
2b is in the form of a groove-shaped recess opening in the direction of the second mounting surface 6. Therefore, as a part of the manufacturing by casting or injection molding, the internal flow ducts 32a, 32b can be manufactured relatively easily because they have a complicated shape in the longitudinal direction. Specifically, selecting the shape of the duct so that the volume of the valve unit 2 is optimally utilized, that is, having a compact external dimension,
Is possible.

The internal flow ducts 32a, 32b are also provided along the open lengths 37a, 37b.
In order to ensure that the open length 3 is secured by the side duct walls 36a, 36b of the adjacent valve units 2 mounted on the second mounting surface 6.
7a and 37b are covered. Thus, the side duct walls 36a and 36b of each valve unit 2 perform two functions. Because the side duct walls 36a, 36b serve, on the one hand, to delimit along the sides of the internal flow ducts 32a, 32b of the associated valve unit 2 and, on the other hand, the neighbors attached to the first mounting surface 5. This is because it also functions as a duct wall for the open length of the internal flow duct of the matching valve unit 2. This means that in each valve unit 2, only the thickness of one wall is equal to the internal flow duct 32.
Advantageously in that it is necessary to demarcate the longitudinal faces of a, 32b, so that the duct width "b" can occupy a larger part of the overall width "B" of the valve unit 2. is there.

The sealing means 7 provided between the adjacent valve units 2 functions for hermetically sealing the peripheral portions of the open lengths 37 a and 37 b between the adjacent valve units 2. In this connection, the respective sealing means are associated with the fluid ducts 26a, 26b.
, 26c are integrally formed with a sealing means provided to seal the transition between the two valve units 2 and 26c, and as shown in the drawing, one sealing element 38 arranged between adjacent valve units 2 constitutes the sealing means 7. It would be beneficial if done so. The sealing element 38 may be constructed in the form of a gasket and may also be a sealing board.

Preferably, each individual valve unit 2 has a receiving part 42 for inserting the sealing means 7 on the second mounting surface 6. On the other hand, as shown in FIG. 4, the first mounting surface 5 is preferably smooth and flat as far as its surface is concerned.

In order to allow the valve unit 2 to be easily placed in the proper position, the first and second mounting surfaces 5 and 6 have first and second fixed alignment means 43, which are complementary to each other.
44 is provided, and when the adjacent valve units 2 are attached to each other, they engage with each other. In this embodiment, one of the set of constant alignment means is in the form of a protrusion and the other is a complementary shaped recess.

The valve unit 2 is preferably a first and a second fixed alignment means 43, 44.
A passage 45 extending inward may be provided so that the connecting member 12 can be attached through the passage 45. This means a coaxial arrangement of the tether 12 and the alignment means 43, 44, which further saves the overall volume.

In principle, the open lengths 37a, 37b may extend over the entire length of the flow ducts 32a, 32b. However, considering that the connecting means 33, which allows a sealed connection of the lines leading to the fluid ducts or other equipment, are usually provided at the outer ends of the inner flow ducts 32a, 32b, at least at the inside of each of them. The outer ends of the flow ducts 32a, 32b opposite to the valve means 14 are expediently configured to be completely closed over their entire length so that the duct walls are completely constituted by the associated valve unit 2. good. Here, the corresponding portions are referred to as closed length portions 46a and 46b, and this portion may be connected to the connection opening over the entire length, or this portion itself may be the connection opening. In any case, the open lengths 37a, 37b are connected to the respective inner flow ducts 32a,
The shorter the length of the closed lengths 46a, 46b, the more convenient it is to extend along a wide length of 32b.

In the illustrated embodiment, the inner end portions of the inner flow ducts 32a and 32b extend from one surface in the longitudinal direction of the valve means 14 or the receiving port 15 thereof, and reach the front outer surface 18a (not shown). Internal flow duct 3 so that it extends non-linearly to
2a and 32b are arranged and configured. Here, the extension of the duct in the longitudinal direction is specifically formed with a sharp bend or an arch shape, and at least the non-linear portion is in the form of open length portions 37a, 37b. These open lengths 37a, 3
7b is limited to the main body portion 13, and the internal flow ducts 32a, 3
It extends from the inner end of 2b to a position that does not reach the front outer surface 47 of the main body 13 to which the front additional body 22a is attached. At the short closed lengths 46a, 46b, the inner flow ducts 32a, 32b open at the front outer surface 47. From there, the inner flow ducts 32a, 32b are extended as additional closed lengths 46a, 46b.
The additional closed lengths 46a, 46b each extend through the additional body 22a and are provided with connecting means 33. An annular seal 48 is arranged in the transition region between the body 13 and the front adder 22a between the mutually arranged closed lengths 46a, 46b for a gas-tight connection. The front attachment surface 47 has a closed length 46a, 4
An annular protrusion 49 is provided to receive the seal 48 on the periphery of 6b.

It is of course possible to connect the connecting means 33 directly to the closed lengths 46a, 46b located next to the inner flow ducts 32a, 32b on the front outer surface 47 of the body 13 without using any additional body 22a. It is possible. After all, in the case of the valve arrangement 1, the overall width of the individual valve units 2 should preferably be chosen for the internal flow duct extending in the plane in which the respective valve unit 2 extends. Here, the longitudinal direction of the internal flow duct is transverse to the arrangement direction 3, and is specifically parallel to the mounting surfaces 5 and 6. The internal flow ducts 32a and 32b open in a longitudinal surface facing the one mounting surface 6, and adjacent valve units mounted on the mounting surface perform a cover function, and the opened portion serves as the mounting surface 5 Cover with and seal. In this embodiment, when the valve unit 2 is attached with the side duct walls 36a and 36b formed integrally with the respective main body portions 13, the side duct walls 36a and 36b perform two functions. This is because the inner surface of this duct wall delimits the inner flow ducts 32a, 32b of the associated valve unit 2, while the outer surface of this duct wall, which coincides with the first mounting surface 5, is the interior of the adjacent valve unit 2. Flow duct 32a
, 32b to define the boundary in the longitudinal direction.

The configuration of the internal flow duct that is at least partially open in the longitudinal plane is not limited to the flow duct that functions as a power duct in this embodiment. This principle can also be applied to other functions of similar construction, for example in a pilot control duct used to actuate a pressure medium on the valve part 16 to change the switching position of the valve part 16. You may apply.

At least with respect to the body portion 13, the valve unit 2 is preferably made of a plastic material or a metal such as an aluminum material. Use of such a material is advantageous for production by injection or casting.

[Brief description of drawings]

FIG. 1 is a front view of a valve device according to a first embodiment of the present invention as indicated by an arrow I in FIG.

2 is a cross-sectional view of the valve device of FIG. 1 taken along a cutting line II-II at a joint portion of two valve units arranged together, and a viewing direction is indicated by an arrow III in FIG. It is the figure made into the same direction.

FIG. 3 shows a portion of the valve device of FIGS. 1 and 2 as an exploded view of a flat body of three partially cut valve units, with a preferred sealing element arranged between adjacent valve units. It is the figure where the example was shown.

4 shows the device consisting of two valve units, shown on the left side in FIG. 3, with an intermediately arranged sealing element, generally arrow IV in FIG.
It is a rear view seen from the direction.

[Procedure for Amendment] Submission for translation of Article 34 Amendment of Patent Cooperation Treaty

[Submission date] April 18, 2002 (2002.4.18)

[Procedure Amendment 1]

[Document name to be amended] Statement

[Name of item to be amended] Claims

[Correction method] Change

[Contents of correction]

[Claims]

Claims (18)

[Claims] 1. A plurality of valve units (2), each of which has mounting surfaces (5, 6) on opposite sides thereof to form a subassembly. The valve units (2) are sequentially arranged in the arrangement direction (3), and are mounted side by side while facing the mounting surfaces (5, 6) facing each other, and the respective valve units (2) are arranged in a direction transverse to the arrangement direction (3). A valve device comprising at least one internal flow duct (32a, 32b) extending, wherein at least one internal flow duct (32a, 32b) comprises a first mounting surface (
5) The first longitudinal surface (34a, 34b) facing towards 5) is delimited by the side duct walls (36a, 36b) of the respective valve unit (2) and at least one internal flow duct (34a, 36b). On the second longitudinal surface (35a, 35b) of which 32a, 32b) faces the other second mounting surface (6), a length portion (37a, 37b) extending at least a part of the length of the duct. The opening lengths (37a, 37b) are covered by side duct walls (36a, 36b) of adjacent valve units (2) attached to the second attachment surface (6). Valve device to do. 2. At least one internal flow duct (32a, 32b) having an open length (37a, 37b) is constructed in the form of a power duct, which duct comprises:
Arranged transversely to the arrangement direction (3), starting from the valve means (14) of the respective valve unit (2) and extending to the outer surface (18a) of the valve unit (2), connecting the duct to other equipment. Connection means (3) for connection with the fluid duct
The valve device according to claim 1, wherein 3) is attached. 3. An open length (37a, 37b) and preferably two power ducts leading to a similar outer surface (18a) in each valve unit (2). The valve device according to. 4. At least one internal flow duct (32a, 32b) has a length (4) with its perimeter completely closed at a location following the open length (37a, 37b).
6a, 46b), the length of which is connected to or constitutes a connection opening. 5. The open length portion (37a, 37b) extends along a major portion of the length of the respective inner flow duct (32a, 32b). The valve device according to claim 1. 6. The valve units (2) each comprise a body (13), said body being provided with valve means (14) and having at least one open length (37a, 37b) therein. The valve device according to any one of claims 1 to 5, further comprising an internal flow duct (32a, 32b) provided with. 7. At least one internal flow duct (32a, 32b) with an open length (37a, 37b) extending between the valve means (14) and the front outer surface (47), 7. Valve device according to claim 6, characterized in that it is arranged in a direction transverse to the arrangement direction (3) of the parts (13). 8. The valve means (14) has an elongated shape and has an open length (37).
a, 37b) with at least one internal flow duct (32a, 32b) extending laterally from the valve means (14), the at least partially non-linearly extending portion extending to the outer surface, the outer surface comprising: 8. Valve arrangement according to claim 7, characterized in that the normal to the outer surface is arranged parallel to the longitudinal axis (17) of the valve means (14). 9. A length in which the add-on body (22a) is attached to the outer surface (47) of the main body part (13) and the inner flow ducts (32a, 32b) are closed in the peripheral part in the add-on body (22a). Valve arrangement according to claim 7 or 8, characterized in that it is extended in the form of parts (46a, 46b). 10. A valve device according to any one of claims 6 to 9, characterized in that the valve means (14) is housed inside the body (13) of each valve unit (2). 11. The valve unit (2) has a flat plate shape, and a surface (4) on which they extend extends in a direction perpendicular to the arrangement direction (3). 10. The valve device according to any one of 10 to 10. 12. Each valve unit (2) has one or more fluid ducts (26a, 26b, 2) extending in the arrangement direction (3) within the valve unit.
6c), the fluid duct communicating with the valve means (14) of the respective valve unit (2), and the fluid ducts (26a, 26a of the adjacent valve units (2)).
b, 26c) to form a through duct interconnected with the valve device according to any one of claims 1 to 11. 13. Sealing means (7) between adjacent valve units (2).
And the sealing means is provided between adjacent valve units (2),
Peripheral portions of openings of fluid ducts (26a, 26b, 26c) communicating with each other and open length portions (37a, 37) of at least one internal flow duct (32a, 32b).
13. The valve device according to claim 12, wherein the peripheral portion of b) is hermetically sealed. 14. Valve device according to claim 13, characterized in that the sealing means (7) is constituted by a sealing element (38) arranged between adjacent valve units (2). 15. The valve device according to claim 1, further comprising fixed alignment means (43, 44) which are engaged with each other with respect to adjacent valve units (2). 16. The valve unit (2) has a smooth and flat first mounting surface (5).
The valve device according to any one of claims 1 to 15, further comprising: 17. At least one internal flow duct (32a, 32b)
The valve according to any one of claims 1 to 16, characterized in that the open length portion (37a, 37b) is formed in the form of a groove-shaped recess opening in the direction of the second mounting surface (6). apparatus. 18. The terminator (8, 9) is in contact with the outer surface of the two outer valve units (2), according to any one of the preceding claims. Valve device.