JP2003519373A - 検流計位置検出器 - Google Patents
検流計位置検出器Info
- Publication number
- JP2003519373A JP2003519373A JP2001549993A JP2001549993A JP2003519373A JP 2003519373 A JP2003519373 A JP 2003519373A JP 2001549993 A JP2001549993 A JP 2001549993A JP 2001549993 A JP2001549993 A JP 2001549993A JP 2003519373 A JP2003519373 A JP 2003519373A
- Authority
- JP
- Japan
- Prior art keywords
- capacitive sensing
- sensing system
- cylindrical pin
- strip
- shaped dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920006370 Kynar Polymers 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 229910052574 oxide ceramic Inorganic materials 0.000 claims description 2
- 239000011224 oxide ceramic Substances 0.000 claims description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 2
- 229910010293 ceramic material Inorganic materials 0.000 claims 1
- 230000005284 excitation Effects 0.000 abstract description 18
- 238000001514 detection method Methods 0.000 abstract description 6
- 230000035945 sensitivity Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 239000006091 Macor Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229940024548 aluminum oxide Drugs 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/2405—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by varying dielectric
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/475,464 US6426635B1 (en) | 1999-12-30 | 1999-12-30 | Galvanometer position detector |
| US09/475,464 | 1999-12-30 | ||
| PCT/US2000/020414 WO2001050092A1 (en) | 1999-12-30 | 2000-07-27 | Galvanometer position detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2003519373A true JP2003519373A (ja) | 2003-06-17 |
| JP2003519373A5 JP2003519373A5 (enExample) | 2007-09-13 |
Family
ID=23887676
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001549993A Pending JP2003519373A (ja) | 1999-12-30 | 2000-07-27 | 検流計位置検出器 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6426635B1 (enExample) |
| EP (1) | EP1242790A1 (enExample) |
| JP (1) | JP2003519373A (enExample) |
| WO (1) | WO2001050092A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012504760A (ja) * | 2008-10-02 | 2012-02-23 | セルノボ リミテッド | 変位センサ |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005537992A (ja) * | 2002-09-06 | 2005-12-15 | コンティネンタル・テーベス・アクチエンゲゼルシヤフト・ウント・コンパニー・オッフェネ・ハンデルスゲゼルシヤフト | 手放しを検出する自動車用のステアリングホイール |
| DE102004018106B4 (de) * | 2004-04-14 | 2008-08-07 | Markus Guggenmos | Hochgenauer optischer Positionsdetektor für Galvanometer-Drehantiebe |
| JP4567565B2 (ja) * | 2005-09-27 | 2010-10-20 | 本田技研工業株式会社 | 電動パワーステアリング装置 |
| US8174272B2 (en) * | 2007-12-23 | 2012-05-08 | Ypoint Capital, Inc. | Analysis of a material with capacitive technology |
| US8791707B2 (en) * | 2010-07-19 | 2014-07-29 | Iowa State University Research Foundation, Inc. | Concentric coplanar capacitive sensor system with quantitative model |
| US11175323B2 (en) * | 2017-03-17 | 2021-11-16 | Inficon, Inc. | Process monitoring using crystal with reactance sensor |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5995421A (ja) * | 1982-11-22 | 1984-06-01 | Tokyo Keiso Kk | 回転変位検出装置 |
| JPS6173036A (ja) * | 1984-09-14 | 1986-04-15 | イーエムアイ リミテツド | センサ・アレイ |
| GB2264784A (en) * | 1992-02-26 | 1993-09-08 | Kansei Kk | Rotation angle sensor of electrostatic capacitance type |
| JPH0755500A (ja) * | 1993-05-28 | 1995-03-03 | General Scanning Inc | 可変容量性トランスジューサ |
| JPH11271092A (ja) * | 1998-03-25 | 1999-10-05 | Yaskawa Electric Corp | 静電容量型エンコーダ |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4142144A (en) | 1977-11-07 | 1979-02-27 | General Scanning, Inc. | Position detector |
-
1999
- 1999-12-30 US US09/475,464 patent/US6426635B1/en not_active Expired - Fee Related
-
2000
- 2000-07-27 JP JP2001549993A patent/JP2003519373A/ja active Pending
- 2000-07-27 WO PCT/US2000/020414 patent/WO2001050092A1/en not_active Ceased
- 2000-07-27 EP EP00953694A patent/EP1242790A1/en not_active Withdrawn
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5995421A (ja) * | 1982-11-22 | 1984-06-01 | Tokyo Keiso Kk | 回転変位検出装置 |
| JPS6173036A (ja) * | 1984-09-14 | 1986-04-15 | イーエムアイ リミテツド | センサ・アレイ |
| GB2264784A (en) * | 1992-02-26 | 1993-09-08 | Kansei Kk | Rotation angle sensor of electrostatic capacitance type |
| JPH0755500A (ja) * | 1993-05-28 | 1995-03-03 | General Scanning Inc | 可変容量性トランスジューサ |
| JPH11271092A (ja) * | 1998-03-25 | 1999-10-05 | Yaskawa Electric Corp | 静電容量型エンコーダ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012504760A (ja) * | 2008-10-02 | 2012-02-23 | セルノボ リミテッド | 変位センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| US6426635B1 (en) | 2002-07-30 |
| EP1242790A1 (en) | 2002-09-25 |
| WO2001050092A1 (en) | 2001-07-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20070719 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20070719 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100115 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20100309 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20100803 |