JP2003516100A5 - - Google Patents

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Publication number
JP2003516100A5
JP2003516100A5 JP2001542400A JP2001542400A JP2003516100A5 JP 2003516100 A5 JP2003516100 A5 JP 2003516100A5 JP 2001542400 A JP2001542400 A JP 2001542400A JP 2001542400 A JP2001542400 A JP 2001542400A JP 2003516100 A5 JP2003516100 A5 JP 2003516100A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001542400A
Other languages
Japanese (ja)
Other versions
JP2003516100A (ja
JP4795596B2 (ja
Filing date
Publication date
Priority claimed from CH02178/99A external-priority patent/CH694540A5/de
Application filed filed Critical
Priority claimed from PCT/CH2000/000636 external-priority patent/WO2001041228A1/de
Publication of JP2003516100A publication Critical patent/JP2003516100A/ja
Publication of JP2003516100A5 publication Critical patent/JP2003516100A5/ja
Application granted granted Critical
Publication of JP4795596B2 publication Critical patent/JP4795596B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001542400A 1999-11-29 2000-11-29 圧電ドライブ Expired - Lifetime JP4795596B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
CH02178/99A CH694540A5 (de) 1999-11-29 1999-11-29 Piezoelektrische Antriebe.
CH2178/99 1999-11-29
CH1041/00 2000-05-24
CH10412000 2000-05-24
PCT/CH2000/000636 WO2001041228A1 (de) 1999-11-29 2000-11-29 Piezoelektrischer antrieb

Publications (3)

Publication Number Publication Date
JP2003516100A JP2003516100A (ja) 2003-05-07
JP2003516100A5 true JP2003516100A5 (enExample) 2011-07-07
JP4795596B2 JP4795596B2 (ja) 2011-10-19

Family

ID=25689730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001542400A Expired - Lifetime JP4795596B2 (ja) 1999-11-29 2000-11-29 圧電ドライブ

Country Status (7)

Country Link
US (1) US6768245B2 (enExample)
EP (1) EP1234346B1 (enExample)
JP (1) JP4795596B2 (enExample)
AT (1) ATE370519T1 (enExample)
AU (1) AU1377801A (enExample)
DE (1) DE50014572D1 (enExample)
WO (1) WO2001041228A1 (enExample)

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US6690101B2 (en) 2000-03-23 2004-02-10 Elliptec Resonant Actuator Ag Vibratory motors and methods of making and using same
DE10227509A1 (de) * 2002-04-22 2003-11-06 Elliptec Resonant Actuator Ag Piezomotor
US7187103B2 (en) * 2001-06-06 2007-03-06 Miniswys Sa Piezoelectric drive
DE10141820A1 (de) * 2001-08-27 2003-03-20 Elliptec Resonant Actuator Ag Piezomotor mit Kupferelektroden
DE10146703A1 (de) 2001-09-21 2003-04-10 Elliptec Resonant Actuator Ag Piezomotor mit Führung
EP1438754B1 (de) * 2001-10-22 2005-12-28 miniswys SA Piezoelektrischer antrieb
ATE335302T1 (de) 2002-03-15 2006-08-15 Miniswys Sa Piezoelektrischer motor und verfahren zum antrieb desselben
US7368853B2 (en) 2002-04-22 2008-05-06 Elliptec Resonant Actuator Aktiengesellschaft Piezoelectric motors and methods for the production and operation thereof
US7224099B2 (en) * 2004-04-20 2007-05-29 Elliptec Resonant Actuator Aktiengesellschaft Molded piezoelectric apparatus
CH696993A5 (de) 2004-06-24 2008-02-29 Miniswys Sa Antriebseinheit.
DE102004059429B4 (de) * 2004-09-03 2006-07-27 Physik Instrumente (Pi) Gmbh & Co. Kg Linearer Ultraschall-Piezomotor
US7157831B2 (en) * 2004-09-30 2007-01-02 Quality Research, Development & Consulting, Inc. Energy efficient vibration driven motor
WO2006050759A1 (de) * 2004-11-15 2006-05-18 Physik Instrumente (Pi) Gmbh & Co. Kg Linearer ultraschallmotor
EP1801628A1 (en) 2005-12-23 2007-06-27 STMicroelectronics (Research & Development) Limited Focussing System
DE102006017666A1 (de) * 2006-04-12 2007-11-08 Siemens Ag Anzeigevorrichtung, bei der die Position oder Geometrie der wahrnehmbaren Anzeige mittels eines Motors verstellbar ist
US7681290B2 (en) * 2006-10-20 2010-03-23 The Boeing Company Piezoelectric bimorph beam manufacturing method
US7915787B2 (en) * 2007-07-20 2011-03-29 Canon Kabushiki Kaisha Actuator
DE102008005165A1 (de) 2008-01-19 2009-07-23 Carl Zeiss Microlmaging Gmbh Piezomotorischer Z-Trieb für Mikroskope
US8674586B2 (en) * 2008-12-26 2014-03-18 Nikon Corporation Motor device, apparatus and driving method for rotor
WO2011125719A1 (ja) * 2010-03-31 2011-10-13 株式会社ニコン モータ装置及び回転子の駆動方法並びにロボット装置
JP5641041B2 (ja) 2010-03-31 2014-12-17 株式会社ニコン モータ装置、モータ装置の製造方法及びロボット装置
US9293685B2 (en) 2010-05-28 2016-03-22 Piezomotor Uppsala Ab Rotating load bearer
JP5621350B2 (ja) * 2010-06-25 2014-11-12 株式会社ニコン モータ装置、回転子の駆動方法、及びロボット装置
JP2012023939A (ja) * 2010-07-16 2012-02-02 Olympus Corp 超音波モータユニット
DE102010035045A1 (de) 2010-08-20 2012-02-23 Aspre Ag Piezomotor
DE102011089202B4 (de) 2011-12-20 2019-03-21 Aspre Ag Piezoantrieb
CN103326615B (zh) * 2013-06-09 2016-01-13 上海大学 基于不对称振动模态的三棱柱形直线超声电机
CN106171666A (zh) * 2016-08-30 2016-12-07 龙南县格林庭园用品有限公司 新型双向自锁省力卷膜器
EP3468028A1 (en) 2017-10-04 2019-04-10 miniswys SA Piezoelectric drive unit
EP3537591B1 (fr) * 2018-03-09 2020-11-18 ETA SA Manufacture Horlogère Suisse Moteur piezoelectrique rotatif a precontrainte axiale
EP3537594A1 (fr) * 2018-03-09 2019-09-11 ETA SA Manufacture Horlogère Suisse Moteur piezoelectrique rotatif a precontrainte radiale
EP3537232B1 (fr) * 2018-03-09 2025-11-19 ETA SA Manufacture Horlogère Suisse Moteur piezoélectrique rotatif pour disque
EP3537595A1 (fr) * 2018-03-09 2019-09-11 ETA SA Manufacture Horlogère Suisse Moteur piezoélectrique linéaire à course allongée
EP3537593B1 (fr) * 2018-03-09 2024-04-24 ETA SA Manufacture Horlogère Suisse Dispositif de rotation d'une roue dentée
US20220216851A1 (en) * 2019-05-10 2022-07-07 Miniswys Sa Drive unit and method for operating a drive unit
EP3787178A1 (en) 2019-08-30 2021-03-03 Miniswys Sa Piezoelectric drive unit
EP3836390A1 (en) * 2019-12-13 2021-06-16 Miniswys Sa Method for operating a drive unit and drive unit
EP4136744B1 (en) 2020-04-16 2024-06-05 Miniswys Sa Drive unit
WO2022218989A1 (en) 2021-04-15 2022-10-20 Miniswys Sa Oscillating drive element and drive unit
EP4075661A1 (en) 2021-04-15 2022-10-19 Miniswys Sa Oscillating drive element and drive unit
JP2023043037A (ja) * 2021-09-15 2023-03-28 エスゼット ディージェイアイ テクノロジー カンパニー リミテッド 超音波モータ
EP4478600A1 (en) 2023-06-16 2024-12-18 Miniswys Sa Oscillating drive element and drive unit

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US5146129A (en) * 1986-12-01 1992-09-08 Canon Kabushiki Kaisha Vibration wave motor
US4959580A (en) * 1987-02-28 1990-09-25 Kievsky Politekhnichesky Institut Imeni Piezoelectric motor
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DE3920726A1 (de) 1988-06-29 1990-01-04 Olympus Optical Co Ultraschalloszillator
US5216313A (en) * 1988-12-16 1993-06-01 Alps Electric Co., Ltd. Ultrasonic wave linear motor
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US5191688A (en) * 1989-07-27 1993-03-09 Olympus Optical Co., Ltd. Method for producing a superior longitudinal vibrator
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JPH04197087A (ja) * 1990-11-27 1992-07-16 Ricoh Co Ltd 超音波アクチユエータ
CH680487B5 (enExample) * 1991-03-28 1993-03-15 Ebauchesfabrik Eta Ag
JP3182540B2 (ja) * 1992-05-16 2001-07-03 川崎重工業株式会社 振動素子を用いた移送装置およびその製造法
US5616980A (en) * 1993-07-09 1997-04-01 Nanomotion Ltd. Ceramic motor
JP2980541B2 (ja) * 1994-06-28 1999-11-22 ナノモーション・リミテッド マイクロモータ
US5561337A (en) * 1995-04-13 1996-10-01 Toda; Kohji Ultrasonic vibrating actuator
JP3184117B2 (ja) * 1997-05-23 2001-07-09 セイコーインスツルメンツ株式会社 超音波モータ及び超音波モータ付き電子機器
JPH10337057A (ja) * 1997-06-02 1998-12-18 Minolta Co Ltd 駆動装置
JP2000060163A (ja) * 1998-02-10 2000-02-25 Nikon Corp 振動アクチュエ―タ
JP3190634B2 (ja) * 1999-01-05 2001-07-23 セイコーインスツルメンツ株式会社 圧電アクチュエータおよび圧電アクチュエータの駆動方法並びに圧電アクチュエータの駆動方法をコンピュータに実行させるプログラムを格納した、コンピュータが読取可能な記憶媒体

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