JP2003511750A - 統計的プロセス制御を使用してコントローラの性能を監視するための方法および装置 - Google Patents

統計的プロセス制御を使用してコントローラの性能を監視するための方法および装置

Info

Publication number
JP2003511750A
JP2003511750A JP2001528761A JP2001528761A JP2003511750A JP 2003511750 A JP2003511750 A JP 2003511750A JP 2001528761 A JP2001528761 A JP 2001528761A JP 2001528761 A JP2001528761 A JP 2001528761A JP 2003511750 A JP2003511750 A JP 2003511750A
Authority
JP
Japan
Prior art keywords
controller
manufacturing
processing
analysis
control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001528761A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003511750A5 (enExample
Inventor
トプラック，アンソニー・ジェイ
キャンベル，ウィリアム・ジェイ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Micro Devices Inc
Original Assignee
Advanced Micro Devices Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro Devices Inc filed Critical Advanced Micro Devices Inc
Publication of JP2003511750A publication Critical patent/JP2003511750A/ja
Publication of JP2003511750A5 publication Critical patent/JP2003511750A5/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41885—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by modeling, simulation of the manufacturing system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32017—Adapt real process as function of changing simulation model, changing for better results
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32191—Real time statistical process monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/32—Operator till task planning
    • G05B2219/32201—Build statistical model of past normal proces, compare with actual process
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42001—Statistical process control spc
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Factory Administration (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Feedback Control In General (AREA)
JP2001528761A 1999-10-05 2000-04-28 統計的プロセス制御を使用してコントローラの性能を監視するための方法および装置 Pending JP2003511750A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/412,679 1999-10-05
US09/412,679 US6560503B1 (en) 1999-10-05 1999-10-05 Method and apparatus for monitoring controller performance using statistical process control
PCT/US2000/011522 WO2001025865A1 (en) 1999-10-05 2000-04-28 Method and apparatus for monitoring controller performance using statistical process control

Publications (2)

Publication Number Publication Date
JP2003511750A true JP2003511750A (ja) 2003-03-25
JP2003511750A5 JP2003511750A5 (enExample) 2007-05-24

Family

ID=23633988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001528761A Pending JP2003511750A (ja) 1999-10-05 2000-04-28 統計的プロセス制御を使用してコントローラの性能を監視するための方法および装置

Country Status (6)

Country Link
US (1) US6560503B1 (enExample)
EP (1) EP1218806B1 (enExample)
JP (1) JP2003511750A (enExample)
KR (1) KR100708009B1 (enExample)
DE (1) DE60012762T2 (enExample)
WO (1) WO2001025865A1 (enExample)

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US7160739B2 (en) 2001-06-19 2007-01-09 Applied Materials, Inc. Feedback control of a chemical mechanical polishing device providing manipulation of removal rate profiles
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US7581140B1 (en) * 2002-12-18 2009-08-25 Advanced Micro Devices, Inc. Initiating test runs based on fault detection results
US6912433B1 (en) * 2002-12-18 2005-06-28 Advanced Mirco Devices, Inc. Determining a next tool state based on fault detection information
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US8036869B2 (en) * 2003-09-30 2011-10-11 Tokyo Electron Limited System and method for using first-principles simulation to control a semiconductor manufacturing process via a simulation result or a derived empirical model
US8073667B2 (en) * 2003-09-30 2011-12-06 Tokyo Electron Limited System and method for using first-principles simulation to control a semiconductor manufacturing process
US8032348B2 (en) * 2003-09-30 2011-10-04 Tokyo Electron Limited System and method for using first-principles simulation to facilitate a semiconductor manufacturing process
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JP7326344B2 (ja) 2018-05-24 2023-08-15 アプライド マテリアルズ インコーポレイテッド 空間分解ウエハ温度制御のための仮想センサ
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JPH06244261A (ja) * 1990-12-31 1994-09-02 Texas Instr Inc <Ti> 半導体装置製造プロセス制御用センサ
JPH05157449A (ja) * 1991-04-08 1993-06-22 Union Carbide Ind Gases Technol Corp 空気分離プロセスの統計的プロセス制御方法

Also Published As

Publication number Publication date
KR100708009B1 (ko) 2007-04-16
US6560503B1 (en) 2003-05-06
DE60012762T2 (de) 2005-08-11
KR20020047215A (ko) 2002-06-21
DE60012762D1 (de) 2004-09-09
EP1218806B1 (en) 2004-08-04
WO2001025865A1 (en) 2001-04-12
EP1218806A1 (en) 2002-07-03

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