JP2003510194A - マイクロ加工構造用テンポラリーブリッジ - Google Patents

マイクロ加工構造用テンポラリーブリッジ

Info

Publication number
JP2003510194A
JP2003510194A JP2001527321A JP2001527321A JP2003510194A JP 2003510194 A JP2003510194 A JP 2003510194A JP 2001527321 A JP2001527321 A JP 2001527321A JP 2001527321 A JP2001527321 A JP 2001527321A JP 2003510194 A JP2003510194 A JP 2003510194A
Authority
JP
Japan
Prior art keywords
silicon wafer
temporary
upper silicon
mass
temporary bridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001527321A
Other languages
English (en)
Japanese (ja)
Other versions
JP2003510194A5 (https=
Inventor
ユ，リアンゾーン
ゴールドバーグ，ハワード，ディー．
デュリ ユ
Original Assignee
インプット／アウトプット，インコーポレーテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by インプット／アウトプット，インコーポレーテッド filed Critical インプット／アウトプット，インコーポレーテッド
Publication of JP2003510194A publication Critical patent/JP2003510194A/ja
Publication of JP2003510194A5 publication Critical patent/JP2003510194A5/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00142—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00865—Multistep processes for the separation of wafers into individual elements
    • B81C1/00896—Temporary protection during separation into individual elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0315—Cavities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/01—Packaging MEMS
    • B81C2203/0118—Bonding a wafer on the substrate, i.e. where the cap consists of another wafer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/033—Thermal bonding
    • B81C2203/036—Fusion bonding

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
  • Electrophonic Musical Instruments (AREA)
  • Bridges Or Land Bridges (AREA)
  • Golf Clubs (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Slide Fasteners, Snap Fasteners, And Hook Fasteners (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2001527321A 1999-09-27 2000-09-25 マイクロ加工構造用テンポラリーブリッジ Pending JP2003510194A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/406,158 1999-09-27
US09/406,158 US6458513B1 (en) 1999-07-13 1999-09-27 Temporary bridge for micro machined structures
PCT/US2000/026355 WO2001024228A2 (en) 1999-09-27 2000-09-25 Temporary bridge for micro machined structures

Publications (2)

Publication Number Publication Date
JP2003510194A true JP2003510194A (ja) 2003-03-18
JP2003510194A5 JP2003510194A5 (https=) 2007-11-22

Family

ID=23606774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001527321A Pending JP2003510194A (ja) 1999-09-27 2000-09-25 マイクロ加工構造用テンポラリーブリッジ

Country Status (9)

Country Link
US (1) US6458513B1 (https=)
EP (1) EP1252028B1 (https=)
JP (1) JP2003510194A (https=)
AT (1) ATE439249T1 (https=)
AU (1) AU7715200A (https=)
CA (1) CA2384889C (https=)
DE (1) DE60042757D1 (https=)
NO (1) NO20021507L (https=)
WO (1) WO2001024228A2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103149684A (zh) * 2013-02-07 2013-06-12 东南大学 可双向扭转的交错梳齿静电驱动可变光衰减器及制备方法
JP2023519917A (ja) * 2020-03-26 2023-05-15 ウィメムス カンパニー リミテッド 光スキャナーパッケージ及び製造方法

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6693245B2 (en) * 2000-09-29 2004-02-17 Anritsu Corporation Electronic balance which is easily assembled, maintained, downsized and improved with respect to weighing performance, and method for manufacturing the same
US6818464B2 (en) 2001-10-17 2004-11-16 Hymite A/S Double-sided etching technique for providing a semiconductor structure with through-holes, and a feed-through metalization process for sealing the through-holes
WO2003098302A2 (en) * 2002-05-15 2003-11-27 Hymite A/S Optical device receiving substrate and optical device holding carrier
US7681306B2 (en) 2004-04-28 2010-03-23 Hymite A/S Method of forming an assembly to house one or more micro components
JP4651476B2 (ja) * 2005-07-29 2011-03-16 株式会社リコー 光走査装置の組立方法および光走査装置ならびに画像形成装置
EP1967317A1 (en) * 2007-03-07 2008-09-10 Fujitsu Limited Method for separating a workpiece and laser processing apparatus

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62190748A (ja) * 1986-02-17 1987-08-20 Nissan Motor Co Ltd 半導体加速度センサ組立方法
US5060039A (en) * 1988-01-13 1991-10-22 The Charles Stark Draper Laboratory, Inc. Permanent magnet force rebalance micro accelerometer
JPH06123632A (ja) * 1992-10-13 1994-05-06 Nippondenso Co Ltd 力学量センサ
US5364497A (en) * 1993-08-04 1994-11-15 Analog Devices, Inc. Method for fabricating microstructures using temporary bridges
JPH06350105A (ja) * 1993-06-07 1994-12-22 Nec Corp マイクロマシンとその製造方法
JPH0792188A (ja) * 1993-09-20 1995-04-07 Yorisuke Nakada 加速度センサとその製造方法
JPH07240395A (ja) * 1994-02-28 1995-09-12 Matsushita Electric Works Ltd 半導体装置の製造方法
JPH1096744A (ja) * 1996-09-20 1998-04-14 Zexel Corp 容量型加速度センサの製造方法
JPH10163505A (ja) * 1996-11-29 1998-06-19 Mitsubishi Materials Corp 半導体慣性センサ及びその製造方法
JPH1140820A (ja) * 1997-07-18 1999-02-12 Denso Corp 半導体力学量センサの製造方法
JPH1172505A (ja) * 1997-06-17 1999-03-16 Denso Corp 加速度センサおよびその製造方法
JP2000340804A (ja) * 1999-05-26 2000-12-08 Matsushita Electric Works Ltd 半導体加速度センサの製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5534111A (en) * 1988-02-29 1996-07-09 Honeywell Inc. Thermal isolation microstructure
JPH04258175A (ja) * 1991-02-12 1992-09-14 Mitsubishi Electric Corp シリコン半導体加速度センサの製造方法
US5369057A (en) * 1993-12-21 1994-11-29 Delco Electronics Corporation Method of making and sealing a semiconductor device having an air path therethrough
US5481102A (en) * 1994-03-31 1996-01-02 Hazelrigg, Jr.; George A. Micromechanical/microelectromechanical identification devices and methods of fabrication and encoding thereof
US6153524A (en) * 1997-07-29 2000-11-28 Silicon Genesis Corporation Cluster tool method using plasma immersion ion implantation
EP1031736B1 (en) * 1999-02-26 2004-04-28 STMicroelectronics S.r.l. Process for manufacturing mechanical, electromechanical and opto-electromechanical microstructures having suspended regions subject to mechanical stresses during assembly

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62190748A (ja) * 1986-02-17 1987-08-20 Nissan Motor Co Ltd 半導体加速度センサ組立方法
US5060039A (en) * 1988-01-13 1991-10-22 The Charles Stark Draper Laboratory, Inc. Permanent magnet force rebalance micro accelerometer
JPH06123632A (ja) * 1992-10-13 1994-05-06 Nippondenso Co Ltd 力学量センサ
JPH06350105A (ja) * 1993-06-07 1994-12-22 Nec Corp マイクロマシンとその製造方法
US5364497A (en) * 1993-08-04 1994-11-15 Analog Devices, Inc. Method for fabricating microstructures using temporary bridges
JPH0792188A (ja) * 1993-09-20 1995-04-07 Yorisuke Nakada 加速度センサとその製造方法
JPH07240395A (ja) * 1994-02-28 1995-09-12 Matsushita Electric Works Ltd 半導体装置の製造方法
JPH1096744A (ja) * 1996-09-20 1998-04-14 Zexel Corp 容量型加速度センサの製造方法
JPH10163505A (ja) * 1996-11-29 1998-06-19 Mitsubishi Materials Corp 半導体慣性センサ及びその製造方法
JPH1172505A (ja) * 1997-06-17 1999-03-16 Denso Corp 加速度センサおよびその製造方法
JPH1140820A (ja) * 1997-07-18 1999-02-12 Denso Corp 半導体力学量センサの製造方法
JP2000340804A (ja) * 1999-05-26 2000-12-08 Matsushita Electric Works Ltd 半導体加速度センサの製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103149684A (zh) * 2013-02-07 2013-06-12 东南大学 可双向扭转的交错梳齿静电驱动可变光衰减器及制备方法
JP2023519917A (ja) * 2020-03-26 2023-05-15 ウィメムス カンパニー リミテッド 光スキャナーパッケージ及び製造方法

Also Published As

Publication number Publication date
CA2384889C (en) 2010-05-04
EP1252028A2 (en) 2002-10-30
WO2001024228A3 (en) 2002-03-14
NO20021507D0 (no) 2002-03-26
EP1252028B1 (en) 2009-08-12
DE60042757D1 (de) 2009-09-24
ATE439249T1 (de) 2009-08-15
CA2384889A1 (en) 2001-04-05
EP1252028A4 (en) 2006-03-01
US6458513B1 (en) 2002-10-01
WO2001024228A2 (en) 2001-04-05
NO20021507L (no) 2002-03-26
AU7715200A (en) 2001-04-30

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