JP2003507759A5 - - Google Patents
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- Publication number
- JP2003507759A5 JP2003507759A5 JP2001517217A JP2001517217A JP2003507759A5 JP 2003507759 A5 JP2003507759 A5 JP 2003507759A5 JP 2001517217 A JP2001517217 A JP 2001517217A JP 2001517217 A JP2001517217 A JP 2001517217A JP 2003507759 A5 JP2003507759 A5 JP 2003507759A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14883699P | 1999-08-13 | 1999-08-13 | |
| US60/148,836 | 1999-08-13 | ||
| US14962299P | 1999-08-16 | 1999-08-16 | |
| US60/149,622 | 1999-08-16 | ||
| PCT/US2000/022314 WO2001013179A1 (en) | 1999-08-13 | 2000-08-14 | Water-processable photoresist compositions |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003507759A JP2003507759A (ja) | 2003-02-25 |
| JP2003507759A5 true JP2003507759A5 (ja) | 2007-09-20 |
| JP4666859B2 JP4666859B2 (ja) | 2011-04-06 |
Family
ID=26846216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001517217A Expired - Fee Related JP4666859B2 (ja) | 1999-08-13 | 2000-08-14 | 水処理可能なフォトレジスト組成物 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6399273B1 (ja) |
| EP (1) | EP1240552B1 (ja) |
| JP (1) | JP4666859B2 (ja) |
| WO (1) | WO2001013179A1 (ja) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6811961B2 (en) * | 2001-02-25 | 2004-11-02 | Shipley Company, L.L.C. | Photoacid generator systems for short wavelength imaging |
| TWI317365B (en) * | 2002-07-31 | 2009-11-21 | Jsr Corp | Acenaphthylene derivative, polymer, and antireflection film-forming composition |
| US7090963B2 (en) * | 2003-06-25 | 2006-08-15 | International Business Machines Corporation | Process for forming features of 50 nm or less half-pitch with chemically amplified resist imaging |
| KR100682165B1 (ko) | 2004-06-18 | 2007-02-12 | 주식회사 하이닉스반도체 | 수용성 네가티브 포토레지스트 중합체 및 이를 포함하는조성물 |
| KR100680425B1 (ko) * | 2004-06-18 | 2007-02-08 | 주식회사 하이닉스반도체 | 수용성 네가티브 포토레지스트 중합체 및 이를 포함하는조성물 |
| US7399570B2 (en) * | 2004-06-18 | 2008-07-15 | Hynix Semiconductor Inc. | Water-soluble negative photoresist polymer and composition containing the same |
| TW200715067A (en) | 2005-09-06 | 2007-04-16 | Koninkl Philips Electronics Nv | Lithographic method |
| US8263539B2 (en) * | 2005-10-28 | 2012-09-11 | Dynaloy, Llc | Dynamic multi-purpose composition for the removal of photoresists and methods for its use |
| US9329486B2 (en) | 2005-10-28 | 2016-05-03 | Dynaloy, Llc | Dynamic multi-purpose composition for the removal of photoresists and method for its use |
| US7632796B2 (en) | 2005-10-28 | 2009-12-15 | Dynaloy, Llc | Dynamic multi-purpose composition for the removal of photoresists and method for its use |
| US7300741B2 (en) * | 2006-04-25 | 2007-11-27 | International Business Machines Corporation | Advanced chemically amplified resist for sub 30 nm dense feature resolution |
| US20070287766A1 (en) * | 2006-06-08 | 2007-12-13 | International Business Machines Corporation | Easily removable uv degradable paint and process for applying the same |
| EP1906249A3 (en) * | 2006-09-26 | 2008-12-24 | Rohm and Haas Electronic Materials, L.L.C. | Antireflective coating compositions for photolithography |
| US7785983B2 (en) * | 2007-03-07 | 2010-08-31 | Freescale Semiconductor, Inc. | Semiconductor device having tiles for dual-trench integration and method therefor |
| US8362106B2 (en) * | 2007-12-04 | 2013-01-29 | E I Du Pont De Nemours And Company | Decarboxylating block copolymers |
| TWI450052B (zh) * | 2008-06-24 | 2014-08-21 | Dynaloy Llc | 用於後段製程操作有效之剝離溶液 |
| US7951525B2 (en) * | 2008-09-08 | 2011-05-31 | International Business Machines Corporation | Low outgassing photoresist compositions |
| US8987181B2 (en) | 2011-11-08 | 2015-03-24 | Dynaloy, Llc | Photoresist and post etch residue cleaning solution |
| US9158202B2 (en) | 2012-11-21 | 2015-10-13 | Dynaloy, Llc | Process and composition for removing substances from substrates |
| US9029268B2 (en) | 2012-11-21 | 2015-05-12 | Dynaloy, Llc | Process for etching metals |
| EP3304197A4 (en) | 2015-06-04 | 2019-01-23 | Kateeva, Inc. | METHOD FOR PRODUCING AN ESTETRESIST PATTERN ON A METALLIC SURFACE |
| US10806035B2 (en) | 2015-08-13 | 2020-10-13 | Kateeva, Inc. | Methods for producing an etch resist pattern on a metallic surface |
| US10398034B2 (en) | 2016-12-12 | 2019-08-27 | Kateeva, Inc. | Methods of etching conductive features, and related devices and systems |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5071731A (en) * | 1990-04-10 | 1991-12-10 | E. I. Du Pont De Nemours And Company | Aqueous processable photosensitive element with an elastomeric layer |
| US5496678A (en) * | 1993-04-16 | 1996-03-05 | Kansai Paint Co., Ltd. | Photosensitive compositions containing a polymer with carboxyl and hydroxyphenyl groups, a compound with multiple ethylenic unsaturation and a photo-acid generator |
| JPH08240907A (ja) * | 1995-03-06 | 1996-09-17 | Hitachi Ltd | レジスト組成物およびそれを用いたパタン形成方法 |
| US5648196A (en) | 1995-07-14 | 1997-07-15 | Cornell Research Foundation, Inc. | Water-soluble photoinitiators |
| KR0164981B1 (ko) | 1995-11-28 | 1999-03-20 | 김흥기 | 아세탈기를 함유하는 알콕시-스틸렌 중합체와 그의 제조방법 및 알콕시-스틸렌 중합체를 주요 구성성분으로 하는 화학증폭형 포토레지스트 재료 |
| JP3383564B2 (ja) * | 1997-12-26 | 2003-03-04 | 株式会社東芝 | パターン形成方法および感光性組成物 |
| KR19990081722A (ko) * | 1998-04-30 | 1999-11-15 | 김영환 | 카르복실기 함유 지환족 유도체 및 그의 제조방법 |
| US5998092A (en) * | 1998-05-27 | 1999-12-07 | Clariant International, Ltd. | Water soluble negative-working photoresist composition |
| US6060212A (en) | 1998-06-11 | 2000-05-09 | Clariant Finance (Bvi) Limited | 193 nm positive-working photoresist composition |
| JP2002521706A (ja) | 1998-07-23 | 2002-07-16 | クラリアント・インターナシヨナル・リミテッド | 水溶性ポジ型フォトレジスト組成物 |
| US6242155B1 (en) * | 1998-08-14 | 2001-06-05 | Fuji Photo Film Co., Ltd. | Method of making lithographic printing plate and photopolymer composition |
-
2000
- 2000-08-14 WO PCT/US2000/022314 patent/WO2001013179A1/en active Application Filing
- 2000-08-14 JP JP2001517217A patent/JP4666859B2/ja not_active Expired - Fee Related
- 2000-08-14 EP EP00955540A patent/EP1240552B1/en not_active Expired - Lifetime
- 2000-08-14 US US09/639,382 patent/US6399273B1/en not_active Expired - Fee Related