JP2003504886A5 - - Google Patents
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- Publication number
- JP2003504886A5 JP2003504886A5 JP2001509652A JP2001509652A JP2003504886A5 JP 2003504886 A5 JP2003504886 A5 JP 2003504886A5 JP 2001509652 A JP2001509652 A JP 2001509652A JP 2001509652 A JP2001509652 A JP 2001509652A JP 2003504886 A5 JP2003504886 A5 JP 2003504886A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14283199P | 1999-07-08 | 1999-07-08 | |
US60/142,831 | 1999-07-08 | ||
PCT/US2000/018511 WO2001004022A1 (en) | 1999-07-08 | 2000-07-06 | Transport module with latching door |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2003504886A JP2003504886A (en) | 2003-02-04 |
JP2003504886A5 true JP2003504886A5 (en) | 2007-08-30 |
JP4549595B2 JP4549595B2 (en) | 2010-09-22 |
Family
ID=22501466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2001509652A Expired - Lifetime JP4549595B2 (en) | 1999-07-08 | 2000-07-06 | Wafer container with latching door |
Country Status (8)
Country | Link |
---|---|
EP (1) | EP1218264A4 (en) |
JP (1) | JP4549595B2 (en) |
KR (1) | KR100747041B1 (en) |
CN (1) | CN1169696C (en) |
AU (1) | AU6341900A (en) |
DE (1) | DE10084776T5 (en) |
MY (1) | MY128807A (en) |
WO (1) | WO2001004022A1 (en) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2002093622A2 (en) * | 2001-05-17 | 2002-11-21 | Ebara Corporation | Substrate transport container |
US6749067B2 (en) * | 2002-01-16 | 2004-06-15 | Entegris, Inc. | Wafer carrier door with form fitting mechanism cover |
US7325698B2 (en) | 2004-04-18 | 2008-02-05 | Entegris, Inc. | Wafer container door with particulate collecting structure |
JP4573566B2 (en) | 2004-04-20 | 2010-11-04 | 信越ポリマー株式会社 | Storage container |
CN1313331C (en) * | 2004-08-30 | 2007-05-02 | 财团法人工业技术研究院 | Clean container structure |
JP4540529B2 (en) | 2005-04-18 | 2010-09-08 | 信越ポリマー株式会社 | Storage container |
JP6544128B2 (en) * | 2015-08-07 | 2019-07-17 | シンフォニアテクノロジー株式会社 | Storage container lid and storage container |
CN114628292B (en) * | 2022-05-16 | 2022-07-29 | 上海果纳半导体技术有限公司武汉分公司 | Wafer transmission box |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5173273A (en) * | 1990-10-11 | 1992-12-22 | Brewer Charles A | Cassette for dental instruments |
US5915562A (en) * | 1996-07-12 | 1999-06-29 | Fluoroware, Inc. | Transport module with latching door |
US5711427A (en) * | 1996-07-12 | 1998-01-27 | Fluoroware, Inc. | Wafer carrier with door |
JP3476052B2 (en) * | 1997-09-01 | 2003-12-10 | 信越ポリマー株式会社 | Transport container |
JP3722604B2 (en) * | 1997-11-13 | 2005-11-30 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
US6704998B1 (en) * | 1997-12-24 | 2004-03-16 | Asyst Technologies, Inc. | Port door removal and wafer handling robotic system |
-
2000
- 2000-07-06 CN CNB008115826A patent/CN1169696C/en not_active Expired - Lifetime
- 2000-07-06 WO PCT/US2000/018511 patent/WO2001004022A1/en active Application Filing
- 2000-07-06 AU AU63419/00A patent/AU6341900A/en not_active Abandoned
- 2000-07-06 JP JP2001509652A patent/JP4549595B2/en not_active Expired - Lifetime
- 2000-07-06 DE DE10084776T patent/DE10084776T5/en not_active Withdrawn
- 2000-07-06 EP EP00950296A patent/EP1218264A4/en not_active Withdrawn
- 2000-07-06 KR KR1020027000227A patent/KR100747041B1/en active IP Right Grant
- 2000-07-07 MY MYPI20003119A patent/MY128807A/en unknown