CN1313331C - Clean container structure - Google Patents
Clean container structure Download PDFInfo
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- CN1313331C CN1313331C CNB2004100748837A CN200410074883A CN1313331C CN 1313331 C CN1313331 C CN 1313331C CN B2004100748837 A CNB2004100748837 A CN B2004100748837A CN 200410074883 A CN200410074883 A CN 200410074883A CN 1313331 C CN1313331 C CN 1313331C
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- clean container
- container body
- bracing frame
- container structure
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Abstract
The present invention relates to a clean container structure. A support frame is directly arranged inside through an opening on the front side of a clean container body and arranged at the inner part of an inner containing chamber of the clean container body, and an upper subplate and a lower subplate are respectively arranged above and below the clean container body and mutually assembled with the support frame. As no other position of the clean container body needs to be provided with holes for containing the support frame as the tradition, the clean container body has the advantages of convenient manufacture, convenient assembly, and no damage to the structural strength of the clean container body. Simultaneously, under the condition that the opening area of the clean container body is reduced, the air tightness of the inner containing chamber of the clean container body can be maintained, and outside water vapor or fine dust particles can be prevented from entering the clean container body.
Description
Technical field
The present invention relates to a kind of clean container structure, refer to especially a kind ofly be applicable to the loading carrying force transmission mode of rationalizing, and can improve structural strength and precision, air-tightness, reach the clean container structure of electrostatic defending.
Background technology
The wafer that present semiconductor factory is produced holds often and is horizontally arranged in the brilliant boat; this brilliant boat has a plurality of support lugns and can be in order to plant a plurality of wafers; this brilliant boat can be mounted on the lower side panel of a clean container body again; afterwards again the lid by the clean container body in addition cover cap to protect each wafer; make its transmission, store and carry in the process of unloading in the manufacturing; keep the environment of ultra-high purity, and can not be subjected to the pollution of particle dust.
See also Fig. 1, it is the three-dimensional exploded view of known clean container structure, wherein show a fetching plate 92 and a brilliant boat 93 on the clean container body 91,, and the epipleural 911 of clean container body 91 offers, and group is established hole 913 on one, lower side panel 912 offers to organize and establishes hole 914, brilliant boat 93 then is to be established in the internal capacity room 910 of inserting and being placed in clean container body 91 in hole 914 by following group, and goes up that fetching plate 92 passes that group is established hole 913 again and organize mutually with the top 931 of brilliant boat 93 and establish.
Yet, direct epipleural 911 in clean container body 91 directly offers to organize on one with lower side panel 912 to be established hole 913 and organizes the design of establishing hole 914 once, not only very difficult and with high costs on manufacturing is gone up and assembled, and also cause the structural strength of clean container body 91 to be damaged easily.In addition, the perforate of clean container body 91 is too much and area is excessive, and the air-tightness of its internal capacity room 910 also is affected easily, thereby causes extraneous aqueous vapor easily or micro dust particle enters, be not very good, only can set up Airtight gasket to strengthen its airtight effect.In addition, because the dead angle of clean container body 91 assemblies such as grade is too much, when causing it to utilize relevant cleaning apparatus to clean easily, clean and dry the phenomenon that is difficult for.
Summary of the invention
Main purpose of the present invention is that a kind of clean container structure is being provided, enable to improve clean container main body structure intensity, and the force transmission mode is preferable during the carrying loading, when clean container transmits in automation, can not influence precision because of loading produces distortion, can keep simultaneously the air-tightness of clean container body interior room, also can provide the effect of electrostatic defending, and be easy to upkeep operations such as cleaning, oven dry.
For achieving the above object, clean container structure of the present invention mainly includes on a clean container body, the bracing frame, fetching plate and fetching plate once.Wherein, the clean container body also includes an internal capacity room, a front openings, a upper plate and a lower plate, and has provided several through holes in upper plate, has provided several perforation in lower plate.
In addition, bracing frame is the internal capacity room inside that is located in above-mentioned clean container body, and this bracing frame includes a upper cross plate and two side plates, two side plates wherein are to extend under two side direction by upper cross plate respectively, be provided with fixed sturcture on several and the top of upper cross plate is also convex, the bottom of two side plates also convexes with several down fixed sturctures respectively downwards, and two side plates also include a medial surface respectively, also is respectively equipped with several slots on two medial surfaces.
In addition, last fetching plate is the top that is arranged at above-mentioned clean container body upper plate, and fetching plate includes several top mounting subassemblies on this, and it is correspondingly respectively to pass several through holes of clean container body upper plate and be individually fixed in fixed sturcture on several of bracing frame upper cross plate.Following fetching plate then is the below that is arranged at above-mentioned clean container body lower plate, and this down the fetching plate include several fixation kits down, it is several fixed sturctures down that corresponding respectively several perforation that pass clean container body lower plate are individually fixed in bracing frame two side plates bottom.
From the above, the internal capacity room inside of clean container body can directly be inserted and be located in to bracing frame of the present invention by the front openings of clean container body, therefore, clean container body of the present invention also need not be as offering the usefulness of perforate with ccontaining bracing frame when assembling as the known technology again in other position, under this situation, the clean container body is not only very convenient on manufacturing is gone up and assembled, the force transmission mode is comparatively excellent during the carrying loading, and clean container main body structure intensity also can not be damaged, help clean container when automation transmits, can not influence bracing frame slot position precision because of loading produces distortion.Simultaneously, under the situation that clean container body perforated area reduces, also can keep the air-tightness of clean container body interior room, effectively isolate extraneous aqueous vapor or micro dust particle enters the clean container body, the maintenance effect in the time of also can improving clean container and the unreactable gas filling must be carried out because of function or manufacturing process demand.In addition, bracing frame is more established mode and innovation concept because of modular group, to the elasticity of clean container body single-piece fabricating quality, material selection, with the reduction of productive costs, significant benefit is all arranged.
In addition, above-mentioned in order to the carrying wafer bracing frame can use conductive material made, so can form an antistatic protection function (Electrostatic Discharge, ESD), therefore, the antistatic protection function for clean container body and bracing frame also can obtain good foundation.
Bracing frame of the present invention again still can be connected with a lower cross plate in the bottom of its two side plate.In addition, its upper cross plate of aforesaid bracing frame, two side plates, then can integrally formed mode make with lower cross plate.
Description of drawings
Fig. 1 is the three-dimensional exploded view of known clean container structure.
Fig. 2 is the three-dimensional exploded view of the present invention's first preferred embodiment.
Fig. 3 is the three-dimensional combination figure of the present invention's first preferred embodiment.
Fig. 4 is the fixed sturcture of Fig. 3 and the section-drawing of fixation kit.
Fig. 5 is the three-dimensional exploded view of the present invention's second preferred embodiment.
Fig. 6 is the three-dimensional combination figure of the present invention's second preferred embodiment.
Wherein, description of reference numerals is as follows:
1 clean container body, 11 internal capacity room, 12 front openings
13 upper plates, 131 through holes, 14 lower plates
141 perforation, 15 left side boards, 151 left side handles
16 right side boards, 2 bracing frames, 21 upper cross plates
Fixed sturcture 212 fastening holes 22 side plates on 211
222 times fixed sturcture 223 tops, 221 bottoms
224 buckling hooks, 225 medial surfaces, 226 slots
Bolt on fetching plate 31 top mounting subassemblies 311 on 3
41 times fixation kits of 4 times fetching plates of perforation on 312
412 times perforation 5 bracing frames of 411 times bolts
51 upper cross plates, 52 side plates, 521 bottoms
53 lower cross plates, 61,62 wafers, 7 O shapes ring
8 earthing members
The specific embodiment
For technology contents of the present invention is further understood, be described as follows especially exemplified by two preferred embodiment.
Please consult simultaneously three-dimensional exploded view that Fig. 2 is the present invention's first preferred embodiment, three-dimensional combination figure that Fig. 3 is the present invention's first preferred embodiment, and Fig. 4 be the fixed sturcture of Fig. 3 and the section-drawing of fixation kit, wherein show a clean container structure, it includes on a clean container body 1, the bracing frame 2, fetching plate 3 and fetching plate 4 once.
Clean container body 1 in the appended accompanying drawing also includes an internal capacity room 11, a front openings 12, a upper plate 13, a lower plate 14, a left side board 15 and a right side board 16, be provided with a left side handle 151 in the outside of left side board 15 group, be provided with a right hand grip (figure does not show) in the relative group in the outside of right side board 16, and provided several through holes 131 in upper plate 13, provided several perforation 141 in two sides of lower plate 14.
In addition, bracing frame 2 in the accompanying drawing is to be a brilliant boat in order to plant wafer 61 in present embodiment, and it is internal capacity room 11 inside of directly being inserted and be located in clean container body 1 by the front openings 12 of clean container body 1, and this bracing frame 2 includes a upper cross plate 21 and two side plates 22, two side plates 22 wherein are to extend under two side direction by upper cross plate 21 respectively, and this two side plate 22 includes a medial surface 225 respectively, then be respectively equipped with several slots 226 on two medial surfaces 225, it is in order to several wafers 61 of planting.And the convex bottom 221 that is provided with fixed sturcture 211, two side plates 22 on several, the top of upper cross plate 21 convexes with several fixed sturctures 222 down respectively downwards, and in present embodiment, last fixed sturcture 211 uses a screw respectively with following fixed sturcture 222.
In addition, last fetching plate 3 in the accompanying drawing is arranged at the top of clean container body 1 upper plate 13, and fetching plate 3 includes several top mounting subassemblies 31 on this, in present embodiment, each top mounting subassembly 31 includes on one perforation 312 on the bolt 311 and respectively, 311 on bolt passes each through hole 131 of perforation on each 312 and clean container body 1 upper plate 13 respectively on each, and the screw of corresponding again screw lock fixed sturcture 211 on each of bracing frame 2 upper cross plates 21.
Same, following fetching plate 4 is the belows that are arranged at clean container body 1 lower plate 14, and two sides of fetching plate 4 include several fixation kits 41 down respectively under this, in present embodiment, fixation kit 41 includes bolt 411 and once perforation 412 respectively under each, each down 411 on bolt pass each each perforation 141 of perforation 412 and clean container body 1 lower plate 14 down respectively, and corresponding again screw lock is in each screw of fixed sturcture 222 down of bracing frame 2 two side plates 22 bottoms 221.
In above-mentioned assembling process, left side handle 151 and right hand grip (figure does not show) are respectively and be connected with a left earthing member 8 and a right earthing member (scheming not show) between the following fetching plate 4, it is respectively made by conductive material, and left side handle 151, right hand grip (figure does not show) are also made by conductive material.In addition, descend between the fixed sturcture 222 between the fixed sturcture 211 and in each top mounting subassembly 31 and on each in each following fixation kit 41 and each, can organize respectively and be provided with three O shape rings 7, it can form airtight in order to the internal capacity room 11 of sealing clean container body 1.
Said structure is after assembling is finished in addition, upper and lower fetching plate 3,4 and bracing frame 2 between be each other directly group establish and can form the stressed situation of one, so when forcing in fetching plate 3, be directly stressed and irrelevant, influence the precision function of bracing frame or the problem of damage so can avoid clean container body 1 to cause being out of shape because being subjected to improper external force with clean container body 1 by bracing frame 2.
From the above, bracing frame 2 is directly to insert and be located in internal capacity room 11 inside of clean container body 1 by the front openings 12 of clean container body 1, therefore, clean container body 1 need not be offered perforate with the usefulness as ccontaining bracing frame 2 in other position again as known technology, under this situation, clean container body 1 is not only all very convenient on manufacturing is gone up and assembled, and the structural strength of clean container body 1 also can not be damaged, simultaneously, under the situation that clean container body 1 perforated area reduces, also can keep the air-tightness of clean container body 1 internal capacity room 11, and can avoid extraneous aqueous vapor or micro dust particle to enter clean container body 1.In addition, bracing frame 2 is more established mode and innovation concept because of modular group, to the elasticity of clean container body 1 single-piece fabricating quality, material selection, with the reduction of productive costs, significant benefit is all arranged.In addition,, make it can not produce the too much problem in dead angle relatively, therefore when utilizing relevant cleaning apparatus to clean, can be easy to clean and oven dry because the perforated area of clean container body 1 greatly reduces.
Please consult Fig. 2 again, in present embodiment, two sides of the upper cross plate 21 of above-mentioned bracing frame 2 are to include two fastening holes 212 respectively, and the top 223 of two side plates 22 includes two buckling hooks 224 respectively, it is can be respectively corresponding two fastening holes 212 that are fastened on upper cross plate 21 2 sides, that is upper cross plate 21 and two side plates 22 are to adopt the bulk-breaking mode to design in present embodiment, can also integrally formed mode design certainly.
Please consult Fig. 3 again, above-mentioned bracing frame 2 in order to carrying wafer 61 is to use polyetherimide to add carbon fibre (Polyetherimide, PEI ﹠amp in present embodiment; Carbon Fiber) conductive material is made, and (Electrostatic Discharge ESD), also can use polyetheretherketone to add carbon fibre (Polyetheretherketon, PEEK ﹠amp certainly can to form an antistatic protection function whereby; Carbon Fiber) waits other equivalent material.By the previous designs mode, clean container body 1 also can obtain good foundation with the antistatic protection function of bracing frame 2.Certainly, upper and lower fetching plate 3,4 also can use conductive material made, so can further increase antistatic protection function.Simultaneously, left side handle 151 and right hand grip (figure does not show) also can cooperate increases its antistatic protection function by the made left and right earthing member 8 of conductive material.
Please consult simultaneously three-dimensional exploded view that Fig. 5 is the present invention's second preferred embodiment, and Fig. 6 be the three-dimensional combination figure of the present invention's second preferred embodiment, its keystone configuration is all identical with above-mentioned first preferred embodiment, difference only is that the bracing frame 5 in order to carrying wafer 62 also includes a lower cross plate 53 in the present embodiment, this lower cross plate 53 is the bottoms 521 that are connected in bracing frame 5 two side plates 52, and the upper cross plate 51 of this bracing frame 5, two side plates 52, with lower cross plate 53 be to make in integrally formed mode.Certainly, aforesaid upper cross plate 51, two side plates 52, also can make in the bulk-breaking mode with lower cross plate 53 as above-mentioned first preferred embodiment.
The foregoing description only is to give an example for convenience of description, and the interest field that the present invention advocated should be as the criterion so that claim is described certainly, but not only limits to the foregoing description.Carrier of the present invention also is not limited to quartz conductor naturally, and as wafer, other product as the clean manufacturing process environment of needs such as light shield, glass substrate all is its application.
Claims (20)
1. clean container structure comprises:
One clean container body includes an internal capacity room, a front openings, a upper plate, an and lower plate, and this upper plate provided several through holes, and this lower plate has provided several perforation;
One bracing frame, be located in the internal capacity room inside of this clean container body, and this bracing frame includes a upper cross plate, it is respectively by extending under these upper cross plate two side direction to reach two side plates, the top of this upper cross plate is convex to be provided with fixed sturcture on several, the bottom of this two side plate convexes with several fixed sturctures down respectively downwards, and this two side plate includes a medial surface respectively, and this two medial surface is respectively equipped with several slots;
Fetching plate on one, be arranged at the top of this clean container body upper plate, and should go up the fetching plate and include several top mounting subassemblies it is the described fixed sturcture of going up that the corresponding respectively described through hole that passes this clean container body upper plate is individually fixed in this bracing frame upper cross plate; And
Fetching plate once, be arranged at the below of this clean container body lower plate, and this time fetching plate includes several following fixation kits, and it is the described fixed sturcture down that the corresponding respectively described perforation that passes this clean container body lower plate is individually fixed in this bracing frame two side plates bottom.
2. clean container structure as claimed in claim 1, wherein, this upper cross plate of this bracing frame and this two side plate are to make in integrally formed mode.
3. clean container structure as claimed in claim 1, wherein, the described upward fixed sturcture of this bracing frame upper cross plate is to be respectively a screw, and the described top mounting subassembly that should go up the fetching plate include respectively bolt on, and one on perforation, described go up bolt pass respectively described go up perforation and corresponding screw lock in described screw.
4. clean container structure as claimed in claim 1, wherein, the described fixed sturcture down of this bracing frame two side plates bottom is respectively a screw, and the described down fixation kit of this time fetching plate includes bolt, and perforation once respectively, described bolt down pass described perforation down respectively and corresponding screw lock in described screw.
5. clean container structure as claimed in claim 1, wherein, described top mounting subassembly and describedly go up that group is provided with at least one O shape ring between the fixed sturcture, and described fixation kit down with described down between the fixed sturcture also group be provided with at least one O shape and encircle.
6. clean container structure as claimed in claim 1, wherein, two sides of the upper cross plate of this bracing frame include at least one fastening hole respectively, and the top of this two side plate includes at least one buckling hook respectively, and it is corresponding respectively this at least one fastening hole that is fastened on these upper cross plate two sides.
7. clean container structure as claimed in claim 1, wherein, this bracing frame, fetching plate on this, and this time fetching plate be made by conductive material.
8. clean container structure as claimed in claim 1, wherein, this clean container body also includes a left side board, an and right side board, and the outside group of this left side board is provided with a left side handle, and the outside group of this right side board is provided with a right hand grip.
9. clean container structure as claimed in claim 8, wherein, this clean container body also includes a left earthing member, reaches a right earthing member, and this left side earthing member is to be connected between this left side handle and this time fetching plate, and this right side earthing member is to be connected between this right hand grip and this time fetching plate.
10. clean container structure as claimed in claim 9, wherein, this left side handle, this right hand grip, this left side earthing member, and this right side earthing member be made by conductive material respectively.
11. a clean container structure comprises:
One clean container body includes an internal capacity room, a front openings, a upper plate, an and lower plate, and this upper plate provided several through holes, and this lower plate has provided several perforation;
One bracing frame, be the internal capacity room inside that is located in this clean container body, and this bracing frame includes a upper cross plate, two side plates, reaches a lower cross plate, wherein this two side plate is respectively by extending under these upper cross plate two side direction, this lower cross plate is the bottom that is connected in this two side plate, the top of this upper cross plate is convex to be provided with fixed sturcture on several, the bottom of this two side plate convexes with several fixed sturctures down respectively downwards, and this two side plate includes a medial surface respectively, and this two medial surface is respectively equipped with several slots;
Fetching plate on one, be the top that is arranged at this clean container body upper plate, and upward the fetching plate include its corresponding respectively described fixed sturcture of going up that passes the described through hole of this clean container body upper plate and be individually fixed in this bracing frame upper cross plate of several top mounting subassemblies; And
Fetching plate once, be arranged at the below of this clean container body lower plate, and this time fetching plate includes several following fixation kits, and it is the corresponding respectively described fixed sturcture down that passes the described perforation of this clean container body lower plate and be individually fixed in this bracing frame two side plates bottom.
12. clean container structure as claimed in claim 11, wherein, the upper cross plate of this bracing frame, two side plates, with lower cross plate be to make in integrally formed mode.
13. clean container structure as claimed in claim 11, wherein, the described fixed sturcture of going up of this bracing frame upper cross plate is respectively a screw, and the described top mounting subassembly that should go up the fetching plate include respectively bolt on, and one on perforation, described go up bolt pass respectively described go up perforation and corresponding screw lock in described screw.
14. clean container structure as claimed in claim 11, wherein, the described fixed sturcture down of this bracing frame two side plates bottom is respectively a screw, and the described down fixation kit of this time fetching plate includes bolt, and perforation once respectively, described bolt down pass described perforation down respectively and corresponding screw lock in described screw.
15. clean container structure as claimed in claim 11, wherein, described top mounting subassembly and describedly go up that group is provided with at least one O shape ring between the fixed sturcture, and described fixation kit down with described down between the fixed sturcture also group be provided with at least one O shape and encircle.
16. clean container structure as claimed in claim 11, wherein, two sides of the upper cross plate of this bracing frame include at least one fastening hole respectively, and the top of this two side plate includes at least one buckling hook respectively, and it is corresponding respectively this at least one fastening hole that is fastened on these upper cross plate two sides.
17. clean container structure as claimed in claim 11, wherein, this bracing frame, fetching plate on this, and this time fetching plate be made by conductive material.
18. clean container structure as claimed in claim 11, wherein, this clean container body also includes a left side board, an and right side board, and the outside group of this left side board is provided with a left side handle, and the outside group of this right side board is provided with a right hand grip.
19. clean container structure as claimed in claim 18, wherein, this clean container body also includes a left earthing member, reaches a right earthing member, and this left side earthing member is connected between this left side handle and this time fetching plate, and this right side earthing member is connected between this right hand grip and this time fetching plate.
20. clean container structure as claimed in claim 19, wherein, this left side handle, this right hand grip, this left side earthing member, and this right side earthing member made by conductive material respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100748837A CN1313331C (en) | 2004-08-30 | 2004-08-30 | Clean container structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100748837A CN1313331C (en) | 2004-08-30 | 2004-08-30 | Clean container structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1743248A CN1743248A (en) | 2006-03-08 |
| CN1313331C true CN1313331C (en) | 2007-05-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100748837A Expired - Fee Related CN1313331C (en) | 2004-08-30 | 2004-08-30 | Clean container structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1313331C (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109841548B (en) * | 2017-11-27 | 2021-09-17 | 北京北方华创微电子装备有限公司 | Transfer chamber and semiconductor processing equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5482161A (en) * | 1994-05-24 | 1996-01-09 | Fluoroware, Inc. | Mechanical interface wafer container |
| CN1378515A (en) * | 1999-07-08 | 2002-11-06 | 恩特格里斯公司 | Transport module with latching door |
| WO2003042073A1 (en) * | 2001-11-14 | 2003-05-22 | Entegris, Inc. | Wafer support attachment for a semi-conductor wafer transport container |
| EP1339097A2 (en) * | 1999-04-20 | 2003-08-27 | Shin-Etsu Polymer Co., Ltd. | Wafer container box |
| US20040074808A1 (en) * | 2002-07-05 | 2004-04-22 | Entegris, Inc. | Fire retardant wafer carrier |
-
2004
- 2004-08-30 CN CNB2004100748837A patent/CN1313331C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5482161A (en) * | 1994-05-24 | 1996-01-09 | Fluoroware, Inc. | Mechanical interface wafer container |
| EP1339097A2 (en) * | 1999-04-20 | 2003-08-27 | Shin-Etsu Polymer Co., Ltd. | Wafer container box |
| CN1378515A (en) * | 1999-07-08 | 2002-11-06 | 恩特格里斯公司 | Transport module with latching door |
| WO2003042073A1 (en) * | 2001-11-14 | 2003-05-22 | Entegris, Inc. | Wafer support attachment for a semi-conductor wafer transport container |
| US20040074808A1 (en) * | 2002-07-05 | 2004-04-22 | Entegris, Inc. | Fire retardant wafer carrier |
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| Publication number | Publication date |
|---|---|
| CN1743248A (en) | 2006-03-08 |
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