JP2003502705A - 高解像度表面下画像作成用数値絞り増加レンズ（ｎａｉｌ）技術 - Google Patents

高解像度表面下画像作成用数値絞り増加レンズ（ｎａｉｌ）技術

Info

Publication number
JP2003502705A
JP2003502705A JP2001505221A JP2001505221A JP2003502705A JP 2003502705 A JP2003502705 A JP 2003502705A JP 2001505221 A JP2001505221 A JP 2001505221A JP 2001505221 A JP2001505221 A JP 2001505221A JP 2003502705 A JP2003502705 A JP 2003502705A
Authority
JP
Japan
Prior art keywords
lens
substrate
optical system
focal region
nail
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001505221A
Other languages
English (en)
Japanese (ja)
Inventor
イッポリト，スティーブン，ビー．
ウンル，エム．，セリム
ゴールドバーグ，ベネット，ビー．
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Boston University
Original Assignee
Boston University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boston University filed Critical Boston University
Publication of JP2003502705A publication Critical patent/JP2003502705A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/33—Immersion oils, or microscope systems or objectives for use with immersion fluids
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58—Optics for apodization or superresolution; Optical synthetic aperture systems
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1374—Objective lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B2007/13727—Compound lenses, i.e. two or more lenses co-operating to perform a function, e.g. compound objective lens including a solid immersion lens, positive and negative lenses either bonded together or with adjustable spacing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Lenses (AREA)
  • Microscoopes, Condenser (AREA)
JP2001505221A 1999-06-21 2000-06-20 高解像度表面下画像作成用数値絞り増加レンズ（ｎａｉｌ）技術 Pending JP2003502705A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14013899P 1999-06-21 1999-06-21
US60/140,138 1999-06-21
PCT/US2000/040253 WO2000079313A1 (en) 1999-06-21 2000-06-20 Numerical aperture increasing lens (nail) techniques for high-resolution sub-surface imaging

Publications (1)

Publication Number Publication Date
JP2003502705A true JP2003502705A (ja) 2003-01-21

Family

ID=22489921

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001505221A Pending JP2003502705A (ja) 1999-06-21 2000-06-20 高解像度表面下画像作成用数値絞り増加レンズ（ｎａｉｌ）技術

Country Status (5)

Country Link
EP (1) EP1196792A4 (de)
JP (1) JP2003502705A (de)
AU (1) AU6952700A (de)
CA (1) CA2375563A1 (de)
WO (1) WO2000079313A1 (de)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005083490A1 (ja) * 2004-02-27 2005-09-09 Hamamatsu Photonics K.K. 顕微鏡及び試料観察方法
US7221502B2 (en) 2003-03-20 2007-05-22 Hamamatsu Photonics K.K. Microscope and sample observation method
US7312921B2 (en) 2004-02-27 2007-12-25 Hamamatsu Photonics K.K. Microscope and sample observation method

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6621275B2 (en) 2001-11-28 2003-09-16 Optonics Inc. Time resolved non-invasive diagnostics system
US6594086B1 (en) 2002-01-16 2003-07-15 Optonics, Inc. (A Credence Company) Bi-convex solid immersion lens
US7012537B2 (en) 2004-02-10 2006-03-14 Credence Systems Corporation Apparatus and method for determining voltage using optical observation
JP4643994B2 (ja) 2005-01-19 2011-03-02 浜松ホトニクス株式会社 固浸レンズホルダ
WO2015138647A1 (en) 2014-03-11 2015-09-17 Dcg Systems, Inc. Self correcting floating sil tip

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5004307A (en) * 1990-04-12 1991-04-02 The Board Of Trustees Of The Leland Stanford Junior University Near field and solid immersion optical microscope
JPH05157701A (ja) * 1991-03-11 1993-06-25 Internatl Business Mach Corp <Ibm> 光学的内部検査援助装置及びその方法
US5497359A (en) * 1994-08-30 1996-03-05 National Business Machines Corporation Optical disk data storage system with radiation-transparent air-bearing slider
WO1998008219A1 (en) * 1996-08-21 1998-02-26 Polaroid Corporation Phase-controlled evanescent field systems and methods
JPH1145455A (ja) * 1997-01-29 1999-02-16 Ricoh Co Ltd 光ピックアップ用光学素子および光ピックアップ用光学素子の製造方法および光ピックアップ
WO1999026240A1 (en) * 1997-11-18 1999-05-27 Polaroid Corporation Optical recording systems and media with integral near-field optics

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08315404A (ja) * 1995-05-18 1996-11-29 Sony Corp 光学ピックアップ装置
ID16848A (id) * 1996-05-01 1997-11-13 Terastor Corp Kepala layang dengan lensa padat yang terbenam

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5004307A (en) * 1990-04-12 1991-04-02 The Board Of Trustees Of The Leland Stanford Junior University Near field and solid immersion optical microscope
JPH05157701A (ja) * 1991-03-11 1993-06-25 Internatl Business Mach Corp <Ibm> 光学的内部検査援助装置及びその方法
US5497359A (en) * 1994-08-30 1996-03-05 National Business Machines Corporation Optical disk data storage system with radiation-transparent air-bearing slider
WO1998008219A1 (en) * 1996-08-21 1998-02-26 Polaroid Corporation Phase-controlled evanescent field systems and methods
JPH1145455A (ja) * 1997-01-29 1999-02-16 Ricoh Co Ltd 光ピックアップ用光学素子および光ピックアップ用光学素子の製造方法および光ピックアップ
WO1999026240A1 (en) * 1997-11-18 1999-05-27 Polaroid Corporation Optical recording systems and media with integral near-field optics

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7221502B2 (en) 2003-03-20 2007-05-22 Hamamatsu Photonics K.K. Microscope and sample observation method
WO2005083490A1 (ja) * 2004-02-27 2005-09-09 Hamamatsu Photonics K.K. 顕微鏡及び試料観察方法
US7110172B2 (en) 2004-02-27 2006-09-19 Hamamatsu Photonics K.K. Microscope and sample observation method
JPWO2005083490A1 (ja) * 2004-02-27 2007-11-22 浜松ホトニクス株式会社 顕微鏡及び試料観察方法
US7312921B2 (en) 2004-02-27 2007-12-25 Hamamatsu Photonics K.K. Microscope and sample observation method
US7576910B2 (en) 2004-02-27 2009-08-18 Hamamatsu Photonics K.K. Microscope and sample observation method
JP4584917B2 (ja) * 2004-02-27 2010-11-24 浜松ホトニクス株式会社 顕微鏡及び試料観察方法

Also Published As

Publication number Publication date
WO2000079313A1 (en) 2000-12-28
EP1196792A4 (de) 2008-08-27
CA2375563A1 (en) 2000-12-28
WO2000079313A9 (en) 2002-08-01
AU6952700A (en) 2001-01-09
EP1196792A1 (de) 2002-04-17

Similar Documents

Publication Publication Date Title
US6778327B2 (en) Bi-convex solid immersion lens
Ippolito et al. High spatial resolution subsurface microscopy
Liron et al. Laser autofocusing system for high‐resolution cell biological imaging
US7738113B1 (en) Wafer measurement system and apparatus
US6831782B2 (en) Solid immersion lens array and methods for producing a solid immersion lens array
US5796487A (en) Dark field, photon tunneling imaging systems and methods for optical recording and retrieval
WO2008032100A1 (en) Calculating a distance between a focal plane and a surface
Kavaldjiev et al. Subpixel sensitivity map for a charge-coupled device
US8767199B2 (en) Inspection system utilizing solid immersion lenses
US6687058B1 (en) Numerical aperature increasing lens (nail) techniques for high-resolution sub-surface imaging
JP2003502705A (ja) 高解像度表面下画像作成用数値絞り増加レンズ（ｎａｉｌ）技術
Quinten A practical guide to surface metrology
US5715059A (en) Dark field, photon tunneling imaging systems and methods
Michaels Surface‐sensitive Raman microscopy with total internal reflection illumination
US5719677A (en) Dark field, photon tunneling imaging systems and methods for measuring flying height of read/write heads
JP2004144839A (ja) 光走査装置
De Wolf et al. High-resolution stress and temperature measurements in semiconductor devices using micro-Raman spectroscopy
US20080037009A1 (en) Spectrometer system with IR microscope and electronically switchable detectors
Ippolito et al. High-resolution IC inspection technique
US8094384B2 (en) Camera, handlens, and microscope optical system for imaging and coupled optical spectroscopy
Lavalle et al. A comparison of immersion infrared microspectroscopy to attenuated total internal reflection microspectroscopy
Plane High Resolution Subsurface Microscopy Technique
Aplin New development in confocal scanning optical microscopy and its application to the study of electrically active defects in semiconductors
APLIN HH Wills Physics Laboratory, TyndallAvenue, GB-Bristol BS8 TL, Great-Britain
La Padula et al. First results from a 30 cm prototype of the IAS-TRT (Two Mirrors Three-Reflection Telescope)-presented by CD La Padula

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050610

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20080918

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20081028

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090126

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090210

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090224

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20090327

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090327

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090420

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20090501

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100608

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20100908

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20100915

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101008

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20110802

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111202

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20111202

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20111226

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20120629

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20121225

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20121228

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20130117

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20130122

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20130225

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20130228