JP2003332096A - Static electricity eliminating control device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a static electricity eliminating control device capable of thoroughly eliminating static with a stable movement even when the electrical potential is near zero, and appropriately eliminating an electrostatic charge with positive and negative electrification polarities having intricate patterns and complicatedly intermixed. <P>SOLUTION: The static electricity eliminating control device is equipped with: a static elimination electrode 2 for eliminating static of an electrified object 1 by generating positive and negative ions by discharging electricity; a positive high voltage-generating circuit 21 and a negative high voltage-generating circuit 22 capable of varying the applied voltage according to an input voltage and simultaneously applying each of the positive and negative high voltages to the static elimination electrode 2; and a static electricity measuring instrument 3 for detecting without contacting the electrical potential and the polarity of the electrified object 1 which has passed through a static elimination area where the static is eliminated by the static elimination electrode 2, and generating a detecting voltage of a polarity according to the electrical potential of the polarity; and a control circuit 19 and 20 for increasingly/ decreasingly controlling the input voltage to the positive high voltage-generating circuit 21 and the negative high voltage-generating circuit 22 separately until the detected voltage of the polarities outputted from the static electricity measuring instrument 3 is zero or nearly zero. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a static electricity removing device for removing static electricity from a charged object such as a running film, paper or semiconductor.
In particular, the present invention relates to a static electricity removal control device that feedback-controls a high voltage applied to a static elimination electrode.

[0002]

2. Description of the Related Art In Japanese Patent Publication No. 5-15040, a charged moving object is neutralized by a high-frequency corona discharge by a high-frequency static eliminator, and then the residual potential and polarity of the moving object after the high-frequency static neutralization are set to a potential. It is detected by the detector and the DC static eliminator is automatically controlled according to the detected potential and polarity.In other words, when the detection polarity is positive, a negative DC voltage is applied to the DC static eliminator, and when the detection polarity is negative, the DC static eliminator is applied. A static neutralization method is disclosed in which a positive DC voltage is applied to generate a DC corona discharge that cancels the residual potential, thereby neutralizing and discharging.

[0003]

However, this method has the following problems, and when a charged object has a finely mixed positive and negative charging polarities such as a resin film, the problem is The surface potential cannot be properly removed.

In the case of a resin film, in order to improve the wettability of the coating, surface treatment is often carried out by corona discharge.
The positive and negative charging polarities have a complicated pattern and are finely mixed. When measuring the potential and polarity of such a resin film with a potential detector, when the positive polarity as a whole of the charging polarity of the surface of the resin film is dominant, the polarity detected by the potential detector becomes a positive polarity, On the contrary, when the negative polarity is dominant as a whole, the polarity detected by the potential detector is the negative polarity.

Although the polarity detected by the potential detector shows only one of the dominant charging polarities as described above,
The static elimination method that switches the polarities as described above so that the polarity of the voltage applied to the DC static eliminator is reversed according to the positive or negative polarity and generates only ions of one polarity opposite to the polarity detected by the potential detector. Then, the charge of the charged portion having the same polarity as that of the generated ions remains, and it is not possible to sufficiently remove the static charge of the positive and negative charge polarities that are present in a complicated pattern and are minutely mixed. Also, when the charged potential is near zero, the polarity detected by the potential detector becomes unstable, and the positive and negative polarities are frequently inverted. However, the polarity of the voltage applied to the DC static eliminator is changed accordingly. When it is switched, the control becomes complicated and a stable static elimination effect cannot be obtained.

Therefore, an object of the present invention is to appropriately eliminate static electricity even when the positive and negative electrification polarities have a complicated pattern and are minutely mixed, and to perform stable operation even when the electrification potential is close to zero. An object of the present invention is to provide a static electricity elimination control device capable of precisely eliminating static electricity.

[0007]

The static electricity elimination control device according to the present invention is based on the fact that positive and negative high voltages are simultaneously applied to the static elimination electrodes to simultaneously generate positive and negative ions to eliminate static electricity. Obtain the detection voltage of the polarity according to the polarity potential of the charged object from the static electricity measurement device, and generate positive and negative ions at the same time until the voltage becomes zero or almost zero. The increase and decrease are controlled.

That is, a discharging electrode for discharging positive and negative ions by discharging to discharge a charged object and a high positive and negative voltage are simultaneously applied to the discharging electrode, and the applied voltage is varied according to the input voltage. Positive and negative high voltage generation circuits that can be performed, and the potential of the charged object that has passed through the static elimination area by the static elimination electrode is detected in a non-contact manner with its polarity, and a detection voltage of the polarity corresponding to the potential of that polarity is generated. The input voltage to the positive high voltage generation circuit and the negative high voltage generation circuit is controlled to increase or decrease separately according to the static electricity measurement device and the polarity detection voltage output from the static electricity measurement device until it becomes zero or almost zero. And a control circuit.

Even if the detected voltage from the electrostatic measuring device becomes zero (or almost zero), the minimum positive and negative reference voltages are applied to the static elimination electrode, and positive and negative ions are always generated in the minimum amount or more. In order to do so, the control circuit always controls the input voltage to the positive high voltage generation circuit and the negative high voltage generation circuit to be the minimum reference voltage or higher, and controls the increase and decrease at voltages higher than that.

The control circuit is classified into an analog control type and a digital control type. In the former case, by inputting the polarity detection voltage output from the static electricity measuring device and performing the proportional operation and the integral operation, A PI control unit that outputs a polarity voltage corresponding to the polarity change and voltage change amount of the input polarity detection voltage, and an output from this PI control unit is distributed to a positive high voltage generation circuit and a negative high voltage generation circuit, respectively. , When the output from the PI control unit is a negative voltage, the input voltage to the positive high voltage generation circuit is increased or decreased by the increase or decrease in that voltage, and when the output from the PI control unit is a positive voltage, the increase or decrease in the voltage is increased or decreased. And a voltage distribution unit that increases or decreases the input voltage to the negative high voltage generation circuit.

In the case of the digital control type, an AD converter for analog / digital converting the polarity detection voltage output from the static electricity measuring device and the converted digital signal are input, and the voltage change of the changed polarity is calculated. , The control amount for the high-voltage generation circuit of the polarity to be controlled among the positive high-voltage generation circuit and the negative high-voltage generation circuit is calculated, and it is output as a digital signal, and its operation is detected by the polarity output from the static electricity measuring device A microcomputer that repeats until the voltage becomes zero or almost zero, and a D / A conversion unit that performs digital / analog conversion on the output from the microcomputer to increase / decrease the input voltage to the high voltage generation circuit of the polarity to be controlled. Have.

As the static electricity measuring device, the electrostatic capacitance generated between the charged object and the detection electrode is periodically changed by mechanical means to generate an AC voltage, which is chopper-processed, and then rectified and DC amplified. By doing so, it is preferable to generate a detection voltage having a polarity according to the polarity and potential of the charged object.

As a countermeasure when the polarity detection voltage output from the static electricity measuring device has an abnormal value, an abnormality detection circuit for detecting the abnormality may be provided. The abnormality detection circuit outputs an alarm signal when the absolute value of the polarity detection voltage output from the static electricity measurement device exceeds a predetermined setting range, or it outputs the alarm voltage of the polarity detection voltage output from the static electricity measurement device. When the absolute value exceeds the predetermined limit range, the outputs from the positive high voltage generation circuit and the negative high voltage generation circuit are stopped.

In addition to the static elimination electrode which controls the positive high voltage generation circuit and the negative high voltage generation circuit by the control circuit to control the amount of positive and negative ions, a preliminary static elimination electrode for preliminary static elimination of the charged object is provided before that. Is also good.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows an embodiment of the present invention in the case of analog control type. A charged object 1 such as a resin film, which is an object of static elimination, travels in the direction of the arrow, is neutralized by positive and negative ions from the static elimination electrode 2, and then the electrostatic potential is detected by the static electricity measuring device 3 together with the charge potential. The static electricity measuring device 3 non-contactly detects the potential of the charged object 1 which has passed through the static elimination region by the static elimination electrode 2 together with its polarity, and generates a detection voltage of the polarity corresponding to the potential of the polarity. The polarity detection voltage output from the static electricity measuring device 3 is input to the controller A, and the voltage applied to the static elimination electrode 2 is feedback-controlled by the controller A as described later. In the same figure, the positive and negative electrodes are shown as the static elimination electrodes 2, but the positive and negative electrodes may be separated.

2 and 3 show a configuration example of the static electricity measuring device 3. The static electricity measuring device 3 includes a tuning fork type vibrator 7 in which a pair of piezoelectric elements 6 are attached in a sensor case 5 having a detection hole 4.
Also, the detection electrode 8 is built in, and the electric force line from the object to be measured, which is directed to the detection electrode 8 through the detection hole 4, is chopped by the vibration of the tuning fork vibrator 7, and the bandpass filter AC amplification unit is passed through the impedance conversion unit 9. It is designed to be taken out as an AC voltage by 10. The AC voltage has a phase difference of 180 degrees depending on whether the detection polarity of the detection electrode 8 is positive or negative. Therefore, the AC voltage is rectified by the rectification unit 11 and then amplified by the DC amplification unit 12. ,
As shown in FIG. 4, the static electricity measuring device 3 outputs a DC detection voltage having a polarity corresponding to the polarity potential of the charged object 1. That is, when the charged object 1 has a positive charging potential,
The detection voltage changes linearly with the positive voltage in proportion to the change in the positive charging potential, and when the charged object 1 has the negative charging potential, the detection voltage is proportional to the change in the negative charging potential. Changes linearly with negative voltage.

The tuning fork type vibrator 7 vibrates when an oscillating voltage (self-excited oscillation) from the piezoelectric tuning fork oscillator 13 is applied to the piezoelectric element 6. The oscillation signal due to this self-excited oscillation is monitored, and when there is an abnormality, it is displayed on the failure display unit 14.

The band-pass filter AC amplification section 10, rectification section 11, DC amplification section 12, and piezoelectric tuning fork oscillation section 13 are supplied with power stabilized by the stabilizing power supply section 15. The band-pass filter AC amplification unit 10 can change the range stepwise by the range change switch 16, and the DC amplification unit 12 enables the zero adjustment unit 17 to perform zero adjustment of the detection voltage which is the output. Has become.

The positive or negative detection voltage output from the static electricity measuring device 3 is input to the control unit A from its input terminal 18 in FIG. The control device A has a PI control circuit 19, a voltage distribution circuit 20, a positive high voltage generation circuit 21, a negative high voltage generation circuit 22 in order to perform feedback control of the voltage applied to the static elimination electrode 2, and also has an abnormal voltage. For control, it has an absolute value circuit 23, comparators 24 and 25, a timer 26, an abnormal time control circuit 27, and a display 28.

The PI control circuit 19 is composed of a proportional controller 29, an integral controller 30, and an adder 31, and performs a proportional operation with respect to the positive or negative detection voltage from the static electricity measuring device 3. By adding the output from 29 and the output from the integration controller 30 that performs the integration operation with the adder 31, the polarity change of the detection voltage from the electrostatic measuring instrument 3 and the voltage of the polarity corresponding to the voltage change amount are obtained. Output.

The voltage distribution circuit 20 to which such a voltage is input has a filter circuit 3 corresponding to positive and negative polarities.
It is composed of 2.33 and a pair of adders 34 and 35. The filter circuit 32 on the positive side takes out a voltage that linearly changes in proportion to the voltage change when the detection voltage of the static electricity measuring device 3 is negative, and the filter circuit 33 on the negative side extracts the voltage of the static electricity measuring device 3. When the detected voltage is positive, a voltage that linearly changes in proportion to the voltage change is extracted. Adder 34
The lowest reference voltage is input to 35, and the adder 34 on the positive side inputs the voltage obtained by adding the lowest reference voltage to the voltage extracted by the filter circuit 32 to the positive high voltage generation circuit 21, and the negative side. The adder 35 inputs the voltage obtained by adding the lowest reference voltage to the voltage extracted by the filter circuit 33 to the negative high voltage generation circuit 22.

Therefore, even when the positive or negative detection voltage from the static electricity measuring device 3 is zero, the positive high voltage generating circuit 21 and the negative high voltage generating circuit 22 are always applied with a voltage higher than the minimum reference voltage. When the detection voltage from the static electricity measuring device 3 is negative, the input voltage to the positive high voltage generating circuit 21 (minimum reference voltage or higher) increases / decreases in proportion to the increase / decrease in the negative detection voltage. When the detection voltage is positive, the input voltage to the negative high voltage generating circuit 22 (minimum reference voltage or higher)
However, it increases / decreases in proportion to the increase / decrease in the positive detection voltage.

FIG. 5 shows such control characteristics of the voltage distribution circuit 20 for the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22. In the figure, now, the potential after static elimination is zero on the straight line of c, that is, the detection voltage of the static electricity measuring device 3 becomes zero, and at this time, the positive output voltage from the positive high voltage generating circuit 21 is at point (1). Value, the negative output voltage from the negative high voltage generation circuit 22 is controlled to the minimum voltage, which is the value at point (2), and is stable in a state in which the positive ion amount is larger than the negative ion amount. To do. From this state, when the detection voltage of the static electricity measuring device 3 shifts to the positive side, the control point moves on the straight line indicated by d, and the positive output voltage from the positive high voltage generation circuit 21 decreases to the value at the point (3). On the other hand, the negative output voltage from the negative high voltage generation circuit 22 maintains the minimum voltage which is the value at point (4), and only the amount of positive ions decreases.

When the detected voltage of the static electricity measuring device 3 further shifts to the positive side, the control point moves on the straight line indicated by e, and the positive output voltage from the positive high voltage generating circuit 21 is the value at point (5). In contrast to the lowest voltage, the negative output voltage from the negative high voltage generation circuit 22 rises to the value at point (6), and this time the negative ion amount becomes larger than the positive ion amount. Such control is performed in the range from Vpmax on the positive side to Vnmax on the negative side.

In FIG. 1, the absolute value circuit 23 outputs the absolute value of the detected voltage from the static electricity measuring device 3 and inputs it to the two comparators 24 and 25. An abnormal reference voltage set by the abnormal voltage setting device 36 is input to one comparator 24, and the other reference voltage adjusted to an abnormal reference voltage by the voltage adjuster 37 is input to the other comparator 25, for example, 80% thereof. Voltage, that is, the reference voltage for alarm is input. FIG. 6 shows the relationship.

The abnormal condition control circuit 27 gives an alarm by issuing an alarm signal when the absolute value of the detected voltage from the static electricity measuring device 3 exceeds the reference voltage for issuing an alarm, and further, from the static electricity measuring device 3 When the absolute value of the detected voltage exceeds the reference voltage to be abnormal, that is, the limit range, the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22 are stopped from outputting after the time set by the timer 26.

The display 28 displays the detected voltage of the static electricity measuring device 3 together with its polarity, and the display changeover switch 38.
The set voltage of the abnormal voltage setting device 36 is displayed by switching.

Next, FIG. 7 shows an embodiment of the present invention in the case of a digital control type. The detection voltage of the polarity output from the static electricity measuring device 3 is shaped by the voltage conversion circuit 39 into separate positive and negative analog data suitable for analog / digital conversion, and then converted into digital data by the A / D conversion circuit 40 to be converted into the microcomputer 41. Entered in. Further, the voltages output from the lowest output voltage setting device 42 and the abnormal voltage setting device 43 are also converted into digital data by the A / D conversion circuit 40 and input to the microcomputer 41.

The microcomputer 41 detects the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22 from the digital data of the positive or negative detection voltage output from the static electricity measuring device 3 based on the change in polarity and potential. The control amount for the high-voltage generating circuit of the polarity to be controlled is calculated and output as a digital signal. This digital signal is converted to analog by the D / A conversion circuits 44 and 45 for positive and negative polarities, and then input to the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22 and applied to the static elimination electrode 2. The positive high voltage and the negative high voltage are controlled in the same manner as above.

Further, the microcomputer 41 determines whether or not the absolute value of the digital data of the positive or negative detection voltage output from the static electricity measuring device 3 exceeds the reference value for issuing an alarm, and further abnormalities. It is determined whether or not the limit range is exceeded, and a signal is output to the abnormal time control circuit 46 when the former and the latter are exceeded. The abnormal time control circuit 46 performs an alarm operation in the former case, and stops the output to the positive high voltage generation circuit 21 and the negative high voltage generation circuit 22 in the latter case.

Next, an explanation will be given of a comparative experiment example with a conventional case where feedback control as in the present invention is not performed.

FIG. 8 is a block diagram of the system used in the experiment, in which the resin film 1 is used as a charged object, and the resin film 1 is unwound from the unwinding roll 50 and wound around the winding roll 51 via a number of guide rollers. While traveling at, the charging electrode 52 was forcibly charged, the charging potential measuring sensor 53 was used to measure the charging potential, the static elimination electrode 54 was used for static elimination, and the residual potential measuring sensor 55 was used to measure the residual potential.

In FIG. 9, the traveling speed of the resin film 1 is 10
The voltage applied to the charging electrode 52 was kept constant at 0 m / min, and the applied voltage was +10 kV, -10 kV, +20 kV, -20 kV, +.
30 kV and -30 kV, and in each case, the distance (hereinafter, referred to as static elimination distance) L of the static elimination electrode 54 to the resin film 1 is changed, the residual potential is measured by the residual potential measuring sensor 55, and the static elimination distance L It is a graph of the experimental data which measured the relationship with a residual potential. A positive and negative DC high voltage was applied to the static elimination electrode 54. In addition, FIG.
Is a graph similarly measured with the traveling speed of the resin film 1 set to 200 m / min.

In the result of FIG. 9, the residual potential after static elimination becomes zero when the static elimination distance L is 100 mm, and when the distance is reduced to 70 mm, the residual potential is ± 1 k.
At V, the measured value is oppositely charged. Further, in the result of FIG. 10, the residual potential after static elimination becomes zero when the static elimination distance L is about 95 mm, and the distance is close to, for example, 70 mm.
When set to, the residual potential is ± 2 kV, which is a measured value of reverse charging.

In FIG. 11, a high alternating voltage of 8.5 kV is applied to the static elimination electrode 54 and the voltage applied to the charging electrode 52 is +20 kV.
V, -20kV, changing the running speed of resin film 1 to 1
6 is a graph of experimental data obtained by measuring the residual potential with the residual potential measuring sensor 55 while changing the static elimination distance L for the cases of 00 m / min and 300 m / min. In addition, FIG. 12 is a graph similarly measured after using the static elimination electrode 54 for 5000 hours.

In the result of FIG. 11, the traveling speed is 100 m /
The residual potential after static elimination becomes zero when min is set,
Static elimination distance L is 110 mm, traveling speed is 300 m / min
In this case, the residual potential after static elimination becomes zero when the static elimination distance L is about 70 mm. Further, in the result of FIG. 12, the residual potential after static elimination becomes zero when the traveling speed is 100 m / min because the static elimination distance L is 70 mm and the residual potential after static elimination is set when the traveling speed is 300 m / min. The potential becomes zero when the static elimination distance L is about 30 mm, which is shorter than that in the case of FIG. 11 by the time the static elimination electrode 54 is used for a long time (5000 hours).

From these results, in the case where the feedback control as in the present invention is not carried out, in order to make the residual potential after static elimination become zero, the charging potential, the running speed of the resin film 1 and the use of the static elimination electrode are used. The static elimination distance L has to be changed each time according to the time and the material of the resin film.

On the other hand, by applying the present invention to the system of FIG. 8, the residual potential after static elimination by the static elimination electrode 54 (corresponding to the static elimination electrode 2 of FIG. 1) is measured by the static electricity measuring device 3 which is a feedback sensor. , The voltage applied to the static elimination electrode 54 is
Experimental data when feedback control is performed by the apparatus of the embodiment of the present invention shown in FIG. 1 are shown in FIGS. 13 and 14.

In FIG. 13, the traveling speed of the resin film 1 is 1.
The voltage applied to the charging electrode 52 is kept constant at 00 m / min, and the applied voltage is +10 kV, -10 kV, +20 kV, -20 kV,
9 is a graph of experimental data obtained by measuring the residual potential with the residual potential measuring sensor 55 while changing the static elimination distance L while performing feedback control while changing to +25 kV and −25 kV. Further, FIG. 14 is a graph similarly measured with the traveling speed of the resin film 1 set to 200 m / min.

As a result, if the static elimination distance L is 100 mm or less, the residual potential after static elimination can be always zero without being affected by the running speed of the resin film 1 and the charging potential. Naturally, if the static elimination electrode is used for a long period of time, the amount of positive and negative ions generated will decrease due to contamination of the electrode, but in the case of the device according to the present invention, the primary high voltage generation circuit 21 and the negative high voltage generation circuit 22 By monitoring the voltage on the side, it is possible to generate an alarm for the maintenance time of the static elimination electrode.

Further, a normal static elimination electrode not performing feedback control is installed as a preliminary static elimination electrode on the upstream side of the static elimination electrode 2 in FIG. 1, and static elimination is performed to some extent before static elimination by the static elimination electrode 2 performing feedback control. If so, the static elimination accuracy can be further improved.

[0043]

As described above in detail, according to the present invention, a positive and negative high voltage is simultaneously applied to the static elimination electrode to simultaneously generate positive and negative ions to eliminate static electricity. Obtain the detection voltage with the polarity according to the polarity potential of the charged object from the measuring instrument, and separately generate the positive and negative voltages to the static elimination electrode while simultaneously generating positive and negative ions until it becomes zero or almost zero. Since the increase / decrease control is performed, it is not affected by changes in the moving speed or charging potential of the charged object, and it is possible to properly eliminate static charges even if the positive and negative charging polarities have a complicated pattern and are minutely mixed. At the same time, even when the charging potential is close to zero, the static charge can be removed precisely by the stable operation.

[Brief description of drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention in the case of an analog control type.

FIG. 2 is a schematic perspective view showing a configuration example of a static electricity measuring device used in the present invention.

FIG. 3 is a block diagram thereof.

FIG. 4 is an output characteristic diagram of the static electricity measuring device.

5 is a control characteristic diagram of the voltage distribution circuit in FIG. 1. FIG.

FIG. 6 is a diagram showing an abnormal voltage setting relationship with respect to a detected voltage.

FIG. 7 is a block diagram showing an embodiment of the present invention in the case of a digital control type.

FIG. 8 is a configuration diagram of a system used in a comparative experiment with conventional static elimination without feedback control.

FIG. 9 is a graph showing the relationship between the static elimination distance and the residual potential when the static charge of the resin film is kept constant at 100 m / min and the static charge is changed according to the conventional experimental data. .

FIG. 10: Running speed of resin film is 200 m / min
6 is a graph similar to the case where the charging potential is changed to be constant and the conventional static elimination is performed.

FIG. 11 is a similar graph in the case where conventional high voltage is applied by applying an AC high voltage to the charge removing electrode.

FIG. 12 is a similar graph showing the data after using the static elimination electrode for 5000 hours in the same as above.

FIG. 13: Running speed of resin film is 100 m / min
6 is a graph showing the relationship between the static elimination distance and the residual potential when the static potential is changed to be constant and static elimination according to the present invention is performed.

FIG. 14: Running speed of resin film is 200 m / min
6 is a graph similar to the case where the charging potential is changed to be constant and charge elimination according to the present invention is performed.

[Explanation of symbols]

A control device 1 charged object 2 Static elimination electrode 3 static electricity measuring instrument 4 detection holes 5 sensor case 6 Piezoelectric element 7 Tuning fork vibrator 8 detection electrodes 9 Impedance converter 10 Bandpass filter AC amplifier 11 Rectifier 12 DC amplifier 13 Piezoelectric tuning fork oscillator 14 Fault display 15 Stabilized power supply section 16 Range switch 17 Zero adjuster 18 input terminals 19 PI control circuit 20 voltage distribution circuit 21 Positive high voltage generation circuit 22 Negative high voltage generator 23 Absolute value circuit 24 ・ 25 comparator 26 timer 27 Abnormal control circuit 28 Display 29 Proportional controller 30 Integral controller 31 adder 32/33 filter circuit 34/35 adder 36 Abnormal voltage setting device 37 Voltage regulator 38 Display changeover switch 39 Voltage conversion circuit 40 A / D conversion circuit 41 Microcomputer 42 Minimum output voltage setting device 43 Abnormal voltage setting device 44/45 D / A conversion circuit 46 Abnormal control circuit

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Kenji Horikiri             3-78-11-Oppama Higashi-cho, Yokosuka City, Kanagawa Prefecture             204 (72) Inventor Kazuro Nakajima             821-25 Tai, Tsukui-cho, Tsukui-gun, Kanagawa Prefecture F term (reference) 5G067 AA23 AA42 DA01 DA18 EA01

Claims (8)

[Claims] 1. A static elimination electrode for generating positive and negative ions by discharge to neutralize a charged object, and high positive and negative voltages are simultaneously applied to the static elimination electrode, and the applied voltage is variable according to the input voltage. Positive high voltage generation circuit and negative high voltage generation circuit that can be, and the potential of the charged object that has passed through the static elimination region by the static elimination electrode is detected in a non-contact manner with its polarity, and the detection voltage of the polarity according to the potential of that polarity is detected. The input voltage to the positive high voltage generating circuit and the negative high voltage generating circuit are increased or decreased separately according to the generated static electricity measuring device and the polarity detection voltage output from the static electricity measuring device until it becomes zero or almost zero. A static electricity elimination control device comprising a control circuit for controlling. 2. The control circuit according to claim 1, wherein the input voltage to the positive high voltage generation circuit and the negative high voltage generation circuit is always higher than or equal to the minimum reference voltage, and is controlled to increase or decrease at voltages higher than the minimum reference voltage. Static electricity removal control device. 3. The control circuit inputs the detection voltage of the polarity output from the static electricity measuring device, and performs proportional operation and integration operation to respond to the polarity change and the voltage change amount of the input detection voltage of the polarity. A PI control unit that outputs a voltage of different polarity, and the output from this PI control unit is distributed to the positive high voltage generation circuit and the negative high voltage generation circuit, respectively, and when the output from the PI control unit is a negative voltage, that voltage is output. A voltage distribution unit that increases / decreases the input voltage to the positive high voltage generation circuit by an increase / decrease amount, and increases / decreases the input voltage to the negative high voltage generation circuit by an increase / decrease amount of the voltage when the output from the PI control unit is a positive voltage. The static electricity removal control device according to claim 1 or 2, further comprising: 4. The control circuit inputs an AD conversion unit for analog / digital conversion of the polarity detection voltage output from the static electricity measuring device and the converted digital signal, and detects the positive / high voltage from the voltage change amount of the changed polarity. Obtain the control amount for the high-voltage generation circuit of the polarity to be controlled between the voltage generation circuit and the negative high-voltage generation circuit and output it as a digital signal. It has a microcomputer that repeats until it becomes zero or almost zero, and a D / A conversion unit that performs digital / analog conversion of the output from the microcomputer to increase / decrease the input voltage to the high voltage generation circuit of the polarity to be controlled. The static electricity elimination control device according to claim 1 or 2, characterized in that. 5. A static electricity measuring device, wherein a capacitance generated between a charged object and a detection electrode is periodically changed by mechanical means to generate an AC voltage, which is chopper-processed, and then rectified and rectified. 2. Amplification produces a detection voltage having a polarity depending on the polarity and potential of the charged object.
2. The static electricity removal control device described in 2, 3 or 4. 6. An abnormality detection circuit for inputting a detection voltage of a polarity output from the static electricity measuring device and outputting an alarm signal when its absolute value exceeds a predetermined setting range. Item 11. The static electricity elimination control device according to item 1, 2, 3, 4 or 5. 7. An abnormality in which the polarity detection voltage output from the static electricity measuring device is input and the output from the positive high voltage generation circuit and the negative high voltage generation circuit is stopped when the absolute value exceeds a predetermined limit range. The static electricity removing control device according to claim 1, 2, 3, 4, or 5, comprising a detection circuit. 8. In addition to the static elimination electrode for controlling a positive high voltage generation circuit and a negative high voltage generation circuit by a control circuit to control the amount of positive and negative ions, a preliminary static elimination electrode for preliminary static elimination of a charged object is provided before that. Claims 1 and 2 characterized by comprising
The static electricity elimination control device according to 3, 4, 5, 6 or 7.