JP2003326132A - Thermal decomposition processing device for organohalogen compound - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thermal decomposition processing device for organohalogen compounds to be attached to the end of an exhaust system of incineration facility and designed to prolong the service life of a heating unit and capable of raising temperature of a ceramic pipe to a temperature for thermal decomposition in a short time and adequately decomposing the organohalogen compounds such as dioxins. <P>SOLUTION: This thermal decomposition processing device for the organohalogen compounds is constituted of an inlet for exhaust gas, a thermal decomposition part to thermally decompose the introduced exhaust gas, and an outlet for discharging thermally decomposed gas. The thermal decomposition part is provided with a heating unit having a plurality of through-holes along the inner side of the outer periphery in radial direction thereof and a ceramic pipe which is inserted into the plurality of the through-holes and is supported by pipe support plates at both ends of the ceramic pipe. The thermal decomposition part is provided with an induction heating coil to heat the heating unit through supply of high frequency power, at the outer periphery thereof. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for thermally decomposing organic halogen compounds, and more particularly to an exhaust gas attached to an exhaust system of a refuse incinerator, a thermal power plant, a crematorium or other incinerator. The present invention relates to a thermal decomposition treatment device for organic halogen compounds that thermally decomposes organic halogen compounds such as dioxins.

[0002] In recent years, organic halogen compounds such as dioxins have been used in manufacturing plants for garbage incinerators, pesticides, bactericides, herbicides, etc., which are inseparable from our daily lives, pulp production for chlorine bleaching and chlorine sterilization, and paper mills. This treatment method has been widely considered and developed as a source of various kinds of chemicals. Of these dioxins, the toxicity of dioxins is generally twice that of sarin and 100 times that of potassium cyanide.
It is said to be 0 times.

As a method for treating dioxin, there are a thermal decomposition method, a plasma treatment method, a supercritical water decomposition method, a photodecomposition method (decomposition by irradiating laser or ultraviolet rays) and the like. However, among these treatment methods, the plasma treatment method has a problem that the plasma conversion efficiency with respect to the input power of the plasma generator is too small, although the plasma treatment method can be performed at an ultrahigh temperature. However, there is a problem that the equipment cost is high because the decomposition reaction is carried out, and there is a problem that the photolysis method takes a long reaction time although there are few side reaction products. Further, in order to operate these high-tech equipments, a high level of technology is required, and thus a skilled engineer is absolutely necessary. Therefore, in practice, the thermal decomposition method is most often used among these processing methods. As a conventional thermal decomposition method, for example, a thermal decomposition treatment device 10 for dioxin as shown in FIG.
0 is known. In this device 100, an electric resistor 102 is wound around a ceramic cylindrical furnace 101 as a heating element, electric power is supplied to heat the cylindrical furnace 101, and exhaust gas containing dioxins is circulated in the heating furnace. It is designed to be decomposed.

[Problems to be Solved by the Invention]

However, since such a furnace 101 is heated by the electric resistor 102 in the atmosphere, there is a problem that the electric resistor 102 is easily oxidized and corroded by oxygen in the atmosphere. In addition, since it takes time to raise the temperature of the cylindrical furnace 101, there is a problem that the temperature followability with respect to the load fluctuation of the exhaust gas containing dioxin to be introduced is poor, and it takes time to start up.

The present invention has been made in order to solve the above-mentioned problems, and it is attached to the end of the exhaust system of an incinerator, the life of the heating element can be extended, and the ceramic pipe is pyrolyzed. It is an object of the present invention to provide an organic halogen compound thermal decomposition treatment apparatus capable of suitably decomposing an organic halogen compound such as dioxin, which can be heated up to a predetermined temperature in a short time.

[0006]

The present invention has been made to solve the above-mentioned problems, and the apparatus for thermally decomposing organic halogen compounds according to claim 1 is a device for treating exhaust gas containing organic halogen compounds. By contacting with a gas flow path heated to a predetermined temperature by a heating means, in a thermal decomposition treatment apparatus for an organic halogen compound that thermally decomposes an organic halogen compound,
The thermal decomposition treatment apparatus, an introduction part for introducing the exhaust gas containing the organic halogen compound, a thermal decomposition part for thermally decomposing the exhaust gas containing the organic halogen compound introduced from the introduction part, and heat in the thermal decomposition part It is composed of a discharge part for discharging decomposed pyrolysis gas, and inside the pyrolysis part,
A heating element having a plurality of through holes along the inside of the outer circumference in the radial direction, and inserted into the plurality of through holes of the heating element,
A ceramic pipe as the gas flow path, both ends of which are supported by pipe support plates, is provided, and an induction heating coil for heating the heating element by supplying high frequency power is provided on the outer periphery of the thermal decomposition unit. It is characterized by being provided so as to be surrounded.

According to the first aspect of the present invention, (1) since induction heating is performed, the time required to raise the temperature to a predetermined temperature can be shortened as compared with resistance heating. Therefore, even if the thermal decomposition treatment apparatus of the present invention is attached to exhaust equipment, the time required for startup can be shortened. (2) Since the heating element is provided with a plurality of through holes along the inner side of the outer circumference in the radial direction, the heating element is heated from the outer side to the inner side when induction heating is performed. It is possible to shorten the time until it can be distributed.

The apparatus for thermally decomposing organic halogen compounds according to claim 2 is characterized in that the thermal decomposition section is provided with a pressure reducing means for reducing the pressure inside the main body of the thermal decomposition section. It is a thermal decomposition treatment apparatus of the described organic halogen compound.

According to the second aspect of the present invention, since the decompression means for decompressing the inside of the main body of the thermal decomposition section is provided, the heating element is consumed or corroded by oxygen and water in the atmosphere, which has been a problem in the past. Can be prevented. As a result, the life of the heating element is extended.

In the apparatus for thermally decomposing organic halogen compounds according to claim 3, the thermal decomposition section is provided with a pressurizing means for pressurizing the inside of the main body of the thermal decomposition section with an inert gas. The apparatus for thermally decomposing organic halogen compounds according to claim 1.

According to the third aspect of the present invention, by providing the pressurizing means for pressurizing the inside of the main body of the thermal decomposition section with the inert gas, the atmosphere inside the main body can be replaced with the inert gas. It is possible to prevent the consumption and corrosion of the heating element due to oxygen and moisture in the atmosphere, which has been a problem. As a result, the life of the heating element is extended.

In the apparatus for thermally decomposing organic halogen compounds according to claim 4, the pipe supporting plate is provided with a guide member for introducing exhaust gas containing the organic halogen compound into the ceramic pipe. It is a thermal decomposition treatment apparatus of the organic halogen compound according to claim 2 or claim 3 characterized.

According to the fourth aspect of the invention, the guide member for introducing the exhaust gas containing the organic halogen compound into the ceramic pipe is provided on the pipe support plate, so that the gas is suitably distributed in the ceramic pipe. Can be introduced.

In the apparatus for thermally decomposing organic halogen compounds according to claim 5, as a material for the ceramic pipe,
The thermal decomposition treatment apparatus for an organic halogen compound according to claim 4, wherein at least one of silicon carbide and alumina is used.

According to the fifth aspect of the present invention, by using at least one of silicon carbide and alumina, it is possible to form a gas flow path having high heat resistance which is not induced by high frequencies.

The apparatus for thermally decomposing organic halogen compounds according to claim 6 is characterized in that step portions for fitting with spacers are provided at both ends of the heating element. Thermal decomposition treatment equipment for organic halogen compounds.

According to the sixth aspect of the present invention, since the step portions for fitting with the spacers are provided at both ends of the heating element, the position of the heating element in the main body of the thermal decomposition portion is set to a predetermined position. Can be positioned. Therefore, it is possible to prevent the temperature inside the ceramic pipe from largely changing.

In the apparatus for thermally decomposing organic halogen compounds according to claim 7, the spacer is formed of a non-dielectric material, and is formed of a flange having the plurality of through holes and a tubular body. It is a thermal decomposition treatment apparatus of the organic halogen compound of Claim 6 characterized by the above-mentioned.

According to the invention described in claim 7, by providing a spacer formed of a non-dielectric material and having a flange having the plurality of through holes and a cylindrical body, the ceramic pipe and the heating element are provided. It can be favorably supported from both sides.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION An embodiment of an apparatus for thermally decomposing organic halogen compounds according to the present invention will be described below with reference to the accompanying drawings. 1 is an external perspective view of an organic halogen compound thermal decomposition apparatus according to the present invention, FIG. 2 is a perspective view showing an internal structure of an organic halogen compound thermal decomposition processing apparatus according to the present invention, and FIG. It is a longitudinal cross-sectional view of FIG. FIG. 4 is a diagram showing another embodiment of the guide member for distributing / introducing the exhaust gas containing the organic halogen compound according to the present invention into the ceramic pipe. Incidentally, FIG.
(A) is a guide member provided with a groove along the slope of a cone,
FIG. 4B shows a guide member having a dome shape.

As shown in FIG. 1, an apparatus for thermally decomposing organic halogen compounds according to the present invention comprises an introducing section 2 for introducing a dioxin-containing gas and a thermal decomposition of the dioxin-containing gas introduced into the introducing section 2. Pyrolysis part 3 for discharging and a discharge part 4 for discharging the pyrolysis gas decomposed by the pyrolysis part 3
And an induction heating coil 5 that surrounds the main body 3a of the thermal decomposition unit 3 from the outside and heats the internal heating element 3f.

The introduction part 2 is mainly composed of an introduction port 2a for the dioxin-containing gas and a duct 2b whose diameter is expanded from the upstream side to the downstream side. A water-cooling type cooling jacket 2c for cooling the introduction portion 2 is provided on the outer circumference of the duct 2b. A flange 2d is provided on the large-diameter end of the duct 2b.
Is provided and is joined to a flange 3b provided at the end of the thermal decomposition section 3 described later by a plurality of sets of bolts B and nuts N. In addition, as shown in FIG. 2, inside the duct 2b, a guide for projecting from the central portion of the pipe supporting plate 3c of the thermal decomposition section 3 to the upstream side and facilitating the introduction of the dioxin-containing gas into the ceramic pipe 3d is provided. A member 3e is provided. The guide member 3e has a conical shape in this embodiment, but other embodiments will be described later.

As shown in FIG. 2, the thermal decomposition section 3 is provided in a cylindrical main body 3a and a substantially central portion inside the main body 3a.
Eight through holes 3h, 3h along the inside of the radial outer circumference
And a plurality of ceramic pipes 3 inserted into the eight through holes 3h, 3h of the heating element 3f.
d, 3d., pipe support plates 3c and 3g for supporting both ends of the ceramic pipes 3d and 3d, respectively, and spacers 3k and 3l for positioning the heating element 3f in the thermal decomposition section 3. The main part is composed.

The main body 3a is a cylindrical container made of alumina. As shown in FIG. 1, an induction heating coil 5 for heating the heating element 3f is provided so as to surround the outer peripheral surface of the main body 3a. In the present embodiment, alumina is used as the material of the main body 3a, but non-dielectric ceramics such as silica is used as a material other than alumina. The main body 3a of the present embodiment is provided with one nozzle 3a1 for connecting the inside of the main body 3a and a pressure reducing means, for example, a vacuum pump, by piping (see FIGS. 1 and 2). By thus connecting the main body 3a and the pressure reducing means, when the heating element is induction-heated,
Since the amount of oxygen in the atmosphere can be reduced by decompressing the inside of the main body 3a by the decompression means, the consumption amount of the combustion component, such as carbon, that constitutes the heating element 3f can be reduced.
The life of the heating element 3f can be extended. As another method, one nozzle 3a1 is additionally provided, and two nozzles are used as gas inlet and outlet, respectively, and an inert gas pressurizing means, for example, a gas cylinder and the nozzle 3a1 are connected to each other by an inert gas. If the gas in the main body 3a is replaced and then induction heating is performed, oxygen in the atmosphere is absent, so that the life of the heating element 3f can be further extended. It should be noted that nitrogen or carbon dioxide as an inert gas is preferably replaced with argon gas or helium gas because it produces nitrogen compounds and carbon compounds with ceramics at high temperatures.

As the material of the heating element 3f, in the present embodiment, as shown in FIG. 2, a cylindrical clay carbon similar to briquettes is used. The heating element 3f is provided with eight through holes 3h, 3h along the inside of the outer circumference in the radial direction. By providing the eight through holes 3h, 3h along the inner side of the outer circumference in the radial direction of the heating element, when the heating element 3f is induction-heated, the heating element 3f is heated from the outer side to the inner side. Immediately through the gas containing 8 through holes 3
h, 3h. The heating element 3f
Materials such as dielectric ceramics can be used, but it is more preferable to use carbon-based materials such as graphite in order to increase the rate of temperature rise during heating. As the shape of the heating element 3f, a prismatic shape can be used in addition to the cylindrical shape, but the electric current is concentrated at the corners and the temperature distribution is likely to be non-uniform.

As the ceramic pipe 3d, a circular pipe made of a non-dielectric material such as alumina is used. Silicon carbide can also be used as a usable material other than alumina. Ceramic pipes 3d is eight through-hole 3h that is provided on the heating element 3f, is inserted into 3h ·, both end portions of two pipe support plate 3c, a through hole 3H ₁ of 3 g, 3H ₁ · and 3
It is supported by H ₂ and 3H ₂ . Also, the duct 2b
By reducing the cross-sectional area of the gas flow path in the inside by the guide member 3e to increase the flow velocity, even if the dioxin-containing gas contains solids such as unburned carbon, the inside of the ceramic pipe 3d is It is possible to prevent the blockage.

The pipe support plates 3c and 3g are disc plates made of metal, for example, aluminum, and have eight through holes 3H.
₁ , 3H ₁ · and 3H ₂ , 3H ₂ · are provided along the inner side of the outer circumference in the radial direction. Each of the central portions of the pipe support plates 3c, 3g is provided with a conical projection as guide members 3e, 3i for distributing / introducing the dioxin-containing gas into each ceramic pipe 3d. By providing such a conical projection and changing the flow passage cross-sectional area, it is possible to suitably introduce and discharge the dioxin-containing gas and the pyrolysis gas in the ducts 2b and 4b. The guide member 3i is attached to the upstream side of the pipe support plate 3c in the introduction part 2, but is attached to the downstream side of the pipe support plate 3g in the discharge part 4. still,
The guide member 3i on the discharge unit 4 side can be omitted.

The spacers 3k and 3l are composed of cylindrical pipes 3k ₁ and 3l ₁ and flanges 3k ₂ and 3l ₂ which are cylindrical bodies, and the open ends of the pipes 3k ₁ and 3l ₁ have the open ends. The inner surface of the portion and the stepped portions 3f ₁ and 3f ₂ provided at both ends of the heating element 3f are detachably fitted to each other so that the fitting portion can support the heating element 3f. Further, each of the flanges 3k ₂ and 3l ₂ has eight through holes (3kh, 3kh.) For inserting a ceramic pipe,
(3lh, 3lh.) Are provided. By supporting both ends of the heating element 3f from both sides with the two spacers 3k and 3l, the position of the heating element 3f in the thermal decomposition section 3 can be fixed at the approximate center of the main body 3a. As a result, the position heated by the induction heating coil 5 is always the heating element 3
Since it can be located in the central portion of f, the position where the heating element 3f is heated does not shift and the temperature inside the ceramic pipe 3d does not change significantly. In this embodiment, a non-dielectric material such as aluminum is used as the material for the spacers 3k and 3l.

The discharge part 4 is mainly composed of a discharge port 4a for the pyrolysis gas of dioxin and a duct 4b whose diameter is reduced from the upstream side to the downstream side. As shown in FIG.
As shown in FIG. 3, a water-cooling type cooling jacket 4c for cooling the duct 4b is provided as in the introduction section 2.
A flange 4d is provided at the large-diameter end of the duct 4b, and is joined to the flange 3j provided at the end of the thermal decomposition section 3 by a bolt B and a nut N. Further, inside the duct 4b, the pyrolysis gas that projects from the central portion of the pipe support plate 3g of the pyrolysis unit 3 to the downstream side and pyrolyzes the dioxin-containing gas in the pyrolysis unit 3 is discharged from the ceramic pipe 3d. A guide member 3i is provided to facilitate the process.

The operation of the apparatus for thermally decomposing organic halogen compounds according to the present invention having the above structure will be described with reference to FIG. Note that FIG. 3 is partially simplified for easy understanding of the constituent members of FIGS. 1 and 2. (1) Cooling water is caused to flow in the induction heating coil 5 to supply electric power to heat the heating element 3f housed in the thermal decomposition section 3. (2) The heating element 3f is heated, the heat of the heating element 3f is transferred to the ceramic pipe 3d, and the ceramics pipe 3d is heated to a predetermined temperature, for example, 1400 ° C. in a few seconds. (3) The dioxin-containing gas is introduced into the duct 2b through the introduction port 2a of the introduction part 2. (4) The dioxin-containing gas introduced is in the duct 2b.
A conical guide member 3e provided inside accelerates along a conical inclined surface by receiving shearing force, and the cylindrical heating element 3f is inserted into each of the eight through holes 3H ₁ and 3H ₁ , respectively, and both ends thereof are inserted. Are distributed and introduced into the eight ceramic pipes 3d, 3d, which are fixed by the pipe support plates 3c, 3g. (5) The dioxin-containing gas introduced into each ceramic pipe 3d is preferably thermally decomposed by coming into contact with the inner wall surface of the ceramic pipe 3d heated to 1400 ° C. (6) The thermally decomposed gas is discharged to the discharge part 4. At this time, due to the guide member 3i provided in the duct 4b of the discharge part 4, the pyrolysis gas is converted into eight ceramic pipes 3
It is suitably discharged to the discharge port 4a from inside d, 3d. (7) dioxin pyrolysis gas discharged from the discharge port 4a is discharged to the atmosphere after removal of the harmful components of the human body is treated with gas purifying equipment for removing halogen gas, NO _X and the like at a later stage It As the gas purification facility, for example, a wet alkali cleaning facility or a dry adsorption device may be used.

The guide members 3e and 3i described above are conical in this embodiment, but another embodiment will be described with reference to FIG. In order to make it easier to introduce the dioxin-containing gas into the ceramic pipe than the conical guide member, the guide member 6e of the other first embodiment, as shown in FIG. A plurality of trenches GT are provided along it. The shape of the groove GT is preferably provided such that the width of the groove GT is increased from the apex of the cone toward the bottom of the cone. By thus providing the gas guide member 6e having the plurality of grooves GT along the conical slope in the duct of the introduction portion, the cross-sectional area of the gas passage in the duct becomes smaller toward the downstream side. , Pressure energy is converted into velocity energy of gas. Then, by pushing the gas into the ceramic pipe along the groove GT, the gas can be suitably distributed, and the gas flow velocity can be increased to allow the gas to flow in the ceramic pipe.

The guide member 7e of the other second embodiment may be provided with a dome-shaped projection as shown in FIG. 4 (b). The protrusion may be, for example, a 2: 1 elliptical end plate or a dish shape. By forming the guide member 7e in this manner, the dioxin-containing gas can be easily introduced into the ceramic pipe.

[0033]

EXAMPLES Next, examples in which the apparatus for thermally decomposing organic halogen compounds according to the present invention is applied to the treatment of dioxin-containing gas will be described with reference to Table 1. 1. Experimental condition (a) high frequency power source; 50 kW, 200 V × 3φ, frequency f = 10 kHz (b) Pyrolysis treatment apparatus size: 465 L × 170 W ×
170H (c) analyzer: high resolution gas chromatography, high resolution mass spectrometer 2. Experimental method (1) The power of the high frequency power supply is supplied to the induction heating coil.
At this time, cooling water is circulated in the coil. (2) The center temperature of the heating element in the main body of the pyrolysis unit is 1400 ° C.
Heat until. (3) 100 mg of dioxin and 50 g of vinyl chloride are placed in a stainless steel container, and the dioxin-containing gas obtained by heating and evaporating the dioxin in the atmosphere is supplied to the introduction part of the thermal decomposition apparatus. (4) The dioxin-containing gas suitably distributed by the guide member in the introduction part comes into contact with the inner wall of the ceramic pipe heated to 1400 ° C. and is thermally decomposed. In addition, as the thermal decomposition temperature of dioxins, the low temperature thermal decomposition temperature is 800
~ 1000 ° C (when only chlorine is desorbed, that is, when the benzene ring is not decomposed) and high temperature pyrolysis temperature 1400
There is a temperature equivalent to ° C (desorption of chlorine and decomposition of benzene ring), but in this example, data when the thermal decomposition was performed at a temperature of 1400 ° C is shown as an example (see Table 1). (5) The pyrolysis gas discharged from the pyrolysis unit to the discharge unit is collected by the guide member in the discharge unit and discharged from the discharge port.

[0034]

[Table 1]

[0035]

[Table 2]

As can be seen from Table 1, dioxin, dibenzofuran and coplanar P at the outlet of the thermal decomposition apparatus
The measured value of CB was a value that sufficiently satisfied the environmental standards.
In addition, except for three kinds of organochlorine compounds in the coplanar PCB, dioxin, dibenzofuran, coplanar PCB and all the compounds had concentrations below the detection limit (quantification limit). The toxic equivalent (TEQ) in Table 1 is
The strongest 2,3,7,8-TC among dioxins
The amount converted to the toxicity of DD (dibenzoparadioxin tetrachloride) is shown. In addition, the constant shown on the left side of the column of toxic equivalent (TEQ) in Table 1 is called the toxicity equivalent coefficient, which indicates the toxicity of the most toxic 2,3,7,8-TCDD (dibenzoparadioxin tetrachloride). The toxicity when 1 is shown.

[0037]

Effect of the Invention According to the invention described in claim 1, (1) since induction heating is performed, the time until the temperature is raised to a predetermined temperature can be shortened as compared with resistance heating. Therefore, even if the thermal decomposition treatment apparatus of the present invention is attached to exhaust equipment, the time required for startup can be shortened. (2) Since the heating element is provided with a plurality of through holes along the inner side of the outer circumference in the radial direction, the heating element is heated from the outer side to the inner side when induction heating is performed. It is possible to shorten the time until it can be distributed. 2. According to the invention as set forth in claim 2, since the decompression means for decompressing the inside of the main body of the thermal decomposition section is provided, consumption and corrosion of the heating element due to oxygen and water in the atmosphere, which has been a conventional problem, are prevented. can do. As a result, the life of the heating element is extended. 3. According to the invention as set forth in claim 3, since the atmosphere inside the main body of the thermal decomposition unit is provided with the inert gas, the atmosphere inside the main body can be replaced with the inert gas.
It is possible to prevent consumption and corrosion of the heating element due to oxygen and moisture in the atmosphere, which has been a problem in the past. As a result, the life of the heating element is extended. 4. According to the invention described in claim 4, the guide member for introducing the exhaust gas containing the organic halogen compound into the ceramic pipe is provided on the pipe support plate, so that the gas is suitably distributed in the ceramic pipe. Can be introduced. 5. According to the invention described in claim 5, by using at least one of silicon carbide and alumina, it is possible to form a gas channel having high heat resistance which is not induced by a high frequency. 6. According to the invention as set forth in claim 6, since the step portions for fitting with the spacers are provided at both ends of the heating element, the position of the heating element in the main body of the thermal decomposition section is positioned at a predetermined position. can do. Therefore, it is possible to prevent the temperature inside the ceramic pipe from largely changing. 7. According to the invention described in claim 7, by providing a spacer formed of a non-dielectric material and formed of a flange having the plurality of through holes and a tubular body, the ceramic pipe and the heating element are provided from both sides. It can be favorably supported.

[Brief description of drawings]

FIG. 1 is an external perspective view of an organic halogen compound thermal decomposition apparatus according to the present invention.

FIG. 2 is a perspective view showing an internal structure of an organic halogen compound thermal decomposition treatment apparatus according to the present invention.

FIG. 3 is a vertical cross-sectional view of FIG.

FIG. 4 is a view showing another embodiment of the guide member for distributing / introducing the exhaust gas containing the organic halogen compound according to the present invention into the ceramic pipe. (A) It is a perspective view which shows the guide member of other 1st embodiment which provided the groove | channel along the slope of a cone. (B) It is a perspective view which shows the guide member of another 2nd embodiment which has a dome-shaped protrusion.

FIG. 5 is a diagram showing an example (cylindrical furnace) of a conventional thermal decomposition treatment apparatus for thermally decomposing an organic halogen compound.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Pyrolysis treatment apparatus for organic halogen compounds 2 Introduction section 2d, 4d Flange 3 Pyrolysis section 3a Main body 3b, 3j Flange 3c, 3g Pipe support plate 3d Ceramic pipe 3e, 3i Guide member 3f Heating element 3h, 3H ₁ , 3H ₂ , 3kh, 3lh Through hole 3k, 3l Spacer 4 Discharge part 5 Induction heating coil

   ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 3K059 AA08 AB17 AD02 AD07 CD52                       CD72                 4D002 AA21 AC04 AC10 BA12 CA20                       EA05 HA03                 4H006 AA05 AC13 AC26 BC10 BC11                       BD80 BD83 EA22

Claims (7)

[Claims] 1. An apparatus for thermally decomposing an organic halogen compound, which comprises subjecting an exhaust gas containing an organic halogen compound to a gas flow path heated to a predetermined temperature by a heating means to thermally decompose the organic halogen compound, The decomposition treatment device, an introduction part for introducing the exhaust gas containing the organic halogen compound, a thermal decomposition part for thermally decomposing the exhaust gas containing the organic halogen compound introduced from the introduction part, and thermally decomposed in the thermal decomposition part. And a heat-generating body having a plurality of through-holes along the inner side of the outer circumference in the radial direction, and a plurality of the heat-generating bodies. A ceramic pipe serving as the gas flow path, which is inserted into the through hole and whose both ends are supported by pipe support plates, is provided, and high frequency power is supplied to the outer periphery of the thermal decomposition unit. An apparatus for thermally decomposing an organohalogen compound, which is provided by surrounding an induction heating coil for heating the heating element. 2. The apparatus for thermally decomposing organic halogen compounds according to claim 1, wherein the thermal decomposition section is provided with decompression means for decompressing the inside of the main body of the thermal decomposition section. 3. The thermal decomposition treatment of an organohalogen compound according to claim 1, wherein the thermal decomposition section is provided with a pressurizing means for pressurizing the inside of the main body of the thermal decomposition section with an inert gas. apparatus. 4. The organic material according to claim 2, wherein the pipe supporting plate is provided with a guide member for introducing the exhaust gas containing the organic halogen compound into the ceramic pipe. Thermal decomposition treatment equipment for halogen compounds. 5. The pyrolysis treatment apparatus for an organic halogen compound according to claim 4, wherein at least one of silicon carbide and alumina is used as a material for the ceramic pipe. 6. A step portion for fitting with a spacer is provided at both ends of the heating element.
An apparatus for thermally decomposing an organic halogen compound according to 1. 7. The heat of an organohalogen compound according to claim 6, wherein the spacer is formed of a non-dielectric material, and is formed of a flange having the plurality of through holes and a cylindrical body. Decomposition equipment.