JP2003315002A - 3-dimensional cam shape measuring result correction method, and 3-dimensional cam profile measuring apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that a 3-dimension cam profile measuring apparatus provides variation in measuring results as no measurement error is considered for each apparatus. <P>SOLUTION: The 3-dimensional cam profile measuring apparatus 10 comprises a reference measurement value acquired by measuring the shape of a reference object having a prescribed shape using a 3-dimensional cam profile gauge-head 110, a data correction information storage 62 which stores the correction information that corrects a measurement error of the 3-dimensional cam profile gauge- head calculated based on a true value about the shape of the reference object, and a data correcting part 60 which corrects the measurement result of the three-dimensional cam based on the correction information. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for correcting a measurement error when a cam profile of a three-dimensional cam is measured by a three-dimensional cam profile measuring device, and a three-dimensional cam profile for measuring the cam profile of the three-dimensional cam. Regarding measuring device.

Japanese Patent Laid-Open No. 11-210427 discloses a three-dimensional cam profile measuring device for measuring the cam profile of a three-dimensional cam. In the measurement of the cam profile by the three-dimensional cam profile measuring device, the accuracy of the three-dimensional cam profile probe that comes into contact with the cam surface of the three-dimensional cam greatly affects the measurement accuracy.

[0003]

The error factor that affects the measurement accuracy is unique to each three-dimensional cam profile measuring device, and if the three-dimensional cam profile measuring device changes, the error factor also differs. However, in the conventional three-dimensional cam profile measuring device, since the error factor for each device is not taken into consideration, the measurement result varies depending on the device.

Therefore, it is an object of the present invention to provide a three-dimensional cam shape measurement result correction method and a three-dimensional cam profile measuring apparatus which can solve the above problems. This object is achieved by a combination of features described in independent claims of the invention. The dependent claims define further advantageous specific examples of the present invention.

[0005]

That is, according to the present invention, a probe having a flat measuring surface for contacting a cam surface of a three-dimensional cam, and a probe existing in the measuring surface are provided. With a three-dimensional cam profile probe including a support member swingably supported around the moving axis in contact with the cam surface of the three-dimensional cam, the rotational phase of the three-dimensional cam and the rotational axis direction of the three-dimensional cam are measured. A method for correcting the result of measuring the shape of the three-dimensional cam based on the position of the probe or the support member by changing the position, and using a predetermined profile using the three-dimensional cam profile probe. A measuring step of measuring the shape of a reference object having a shape; the three-dimensional measurement based on a difference between a reference measurement value obtained by measuring the shape of the reference object and a true value of the shape of the reference measurement object. Compensates for cam shape measurement error And a correction information calculating step for obtaining correction information for correcting the measurement result of the three-dimensional cam using the correction information when the shape of the three-dimensional cam is measured using the three-dimensional cam profile probe. Process,
Equipped with.

Further, the reference object of the present invention has a first reference surface parallel to the rotation axis and having a predetermined diameter, and a central axis of the first reference surface coincides with the rotation axis. A first cylindrical object and a second reference surface parallel to the swing axis and having a different diameter from the first cylindrical object;
A second cylindrical object whose central axis of the reference plane coincides with the rotation axis, and wherein the correction information calculation step is based on the measurement values of the first and second reference planes. And the correction information in the vertical direction may be calculated.

Further, the reference object of the present invention has a third reference surface inclined with respect to the rotation axis, and a third cone having a central axis of the third reference surface coinciding with the rotation axis. In the correction information calculating step, the correction information regarding the inclination in the rotation axis direction may be calculated based on the measurement values at two different positions on the third reference plane.

Further, the reference object of the present invention has a fourth reference surface parallel to the rotation axis and having a predetermined diameter, and the central axis of the fourth reference surface and the rotation axis are predetermined. Correction information relating to the horizontal inclination of the three-dimensional cam profile gauge based on the measurement value of the fourth reference plane, the correction information including a fourth cylindrical object displaced by May be calculated.

Further, the reference object of the present invention has a fifth reference surface inclined with respect to the rotation axis, and the central axis of the fifth reference surface and the rotation axis are displaced by a predetermined distance. And a correction information regarding the inclination of the three-dimensional cam profile gauge in the horizontal plane, based on the measurement value of the fifth reference plane. Good.

Further, according to the present invention, a tracing stylus having a flat measuring surface for contacting a cam surface of a three-dimensional cam, and the tracing stylus are swung around a swinging axis existing in the measuring surface. A three-dimensional cam profile probe including a support member that supports the three-dimensional cam in contact with the cam surface of the three-dimensional cam,
A three-dimensional cam profile measuring device for measuring the shape of the three-dimensional cam based on the position of the tracing stylus or the support member by changing the rotational phase and the position of the three-dimensional cam in the rotational axis direction. The reference measurement value obtained by measuring the shape of a reference object having a predetermined shape using the three-dimensional cam profile gauge, and the true value of the shape of the reference measurement object, Three
A correction information storage unit that stores correction information that corrects the measurement error of the three-dimensional cam profile probe, and a data correction unit that corrects the measurement result of the three-dimensional cam based on the correction information.

The above summary of the invention does not enumerate all the necessary features of the present invention, and sub-combinations of these feature groups can also be the invention.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described through embodiments of the invention, but the following embodiments do not limit the claimed invention, and the features described in the embodiments Not all combinations are essential to the solution of the invention.

FIG. 1 is a block diagram showing the configuration of a cam profile measuring device 10 according to the embodiment. The cam profile measuring device 10 includes a measurement control unit 20, a rotation drive unit 30, a linear drive unit 32, a position movement / rotation phase measurement unit 4.
0, cam profile measurement unit 50, data correction unit 60,
The data correction information storage unit 62 and the display unit 70 are provided.

The measurement control unit 20 internally includes a CPU and RO.
It is configured as a computer system including M, RAM, an input / output interface, a bus line, an internal storage device, and the like. The CPU of the measurement control unit 20 accepts the detection data from the rotational phase measuring unit 40 and the cam profile measuring unit 50 via the input / output interface based on the program stored in the ROM, the RAM, etc. Perform predetermined arithmetic processing. The calculation result is sent to the data correction unit 6 via the input / output interface.
Sent to 0.

The rotation driving unit 30 is composed of a stepping motor, a servo motor, etc., and based on an instruction signal from the measurement control unit 20 at the time of measurement, and at the time of cam profile measurement, based on the instruction signal from the measurement control unit 20. The rotation phase of the rotating shaft 100 is adjusted.

The linear driving unit 32 is composed of a linear moving mechanism such as a linear solenoid or a motor using a ball screw, and adjusts the position of the rotating shaft 100 in the rotating shaft direction based on an instruction signal from the measurement control unit 20. To do.

The position movement / rotation phase measuring unit 40 includes a rotation position sensor using a synchro, a resolver or a rotary encoder, and a linear position sensor using a potentiometer, a differential transformer, a scale, or the like. The measurement control unit 2 measures an accurate rotation phase and an accurate position in the rotation axis direction of the rotary shaft 100 rotated and moved by the linear movement unit 30 and the linear drive unit 32.
It is transmitted to 0 as a measurement signal.

The cam profile measuring unit 50 includes a three-dimensional cam profile gauge 110, which will be described later, and a linear position sensor using a potentiometer, a differential transformer, a scale, or the like. This cam profile measuring unit 50
The parallel movement support portion 52 supports the three-dimensional cam profile gauge 110 so as to be movable in parallel along a movement axis G, which will be described later, and to urge it toward the cam 80.

As a result, the cam profile measuring unit 50 brings the three-dimensional cam profile probe 110 into contact with the cam surface 81 of the cam 80 mounted on the rotary shaft 100 rotated by the rotary drive unit 30. The three-dimensional cam profile gauge 110 is made to follow the change in the height of the cam surface 81, and is transmitted to the measurement control unit 20 as a measurement signal.

The data correction unit 60 sets correction information stored in a data correction information storage unit 62 (to be described later) as a parameter for the calculation result transmitted from the measurement control unit 20 (influence factor of the measurement error peculiar to the measuring device). Correction based on information). The corrected data is displayed on the display unit 70 or recorded in a storage device such as a hard disk (not shown).

The data correction information storage unit 62 stores the correction information obtained from the result of measuring the inspection tool having a predetermined shape using the three-dimensional cam profile probe 110.
The correction information includes “correction information regarding the linear scale radial direction”, “correction information regarding the shaft axis direction”, “correction information regarding a tracing stylus plane inclination”, and “correction information regarding a tracing stylus lateral inclination”. Details of each correction information and the calculation method thereof will be described later.

Next, the three-dimensional cam profile probe 110
The configuration of will be described. FIG. 2 shows a perspective view of the three-dimensional cam profile probe 110. The three-dimensional cam profile probe 110 includes a probe 120 and support members 130 that support the probe 120 at both ends. Probe 120
As shown in the perspective view of FIG. 3 (however, it is arranged upside down with respect to FIG. 2), it has a cylindrical rod shape and has shaft portions 140 and 142 at both ends. This shaft 140, 1
At 42, the tracing stylus 120 is supported by the two arm portions 150 and 152 of the support member 130 so as to be swingable around the swing axis F.

The central portion 120a of the tracing stylus 120 has only one shape that is cut in half in a plane including the swing axis F, and is formed flat leaving only the central region including the swing axis F. There is. As a result, the measuring surface 120b including the swing axis F is entirely formed in the central portion 120a of the tracing stylus 120. The central portion 120a is made of cemented carbide, and the measurement surface 120b is finished with extremely high surface accuracy.

The support member 130 has a base portion 160 which supports the above-mentioned two arm portions 150 and 152.
At this base 160, the three-dimensional cam profile probe 110
The entire cam is prevented from rotating around a moving axis G orthogonal to the swing axis F, can be translated in the moving axis G direction, and is biased in the cam master 80 direction. The parallel movement support part 52 of the profile measuring part 50
Supported by.

At the time of measurement, the cam profile measuring section 50 is arranged so that the swing axis F of the tracing stylus 120 is orthogonal to the rotation axis A of the cam 80, and the cam profile measuring section 50 moves along the movement axis G as shown in FIG. The three-dimensional cam profile probe 110 is biased toward the cam 80, and the measurement surface 120b of the probe 120 is attached to the cam surface 81.
And the displacement of the support member 130 is measured.

The correction information stored in the data correction information storage unit 62 and the method of calculating the correction information will be described.

The correction information is created based on the result of actual measurement of the inspection tool having a predetermined shape with the three-dimensional cam profile probe 110.

FIG. 5 shows an inspection tool 2 used in this embodiment.
FIG. The inspection tool 200 includes the shaft 20.
2, a linear scale test unit 210 provided on the shaft 202, a linear scale test unit 212, a shaft axial direction test unit 214, a tracing stylus plane tilt test unit 216, and a tracing stylus horizontal tilt test unit 218.

The linear scale test section 210 and the linear scale test section 212 have a cylindrical shape, and the shaft axis H of the shaft 202 passes through the center thereof. Further, the surfaces of the test units 210 and 212 in contact with the tracing stylus 120 are parallel to the shaft 202. Linear scale test unit 210, linear scale test unit 212
Have diameters of Da and Db, respectively (where Db>
Da).

The shaft axial direction test portion 214 has a shape in which a part of a cone is cut off, and the surface in contact with the tracing stylus 120 is inclined with respect to the shaft 202. The center of the shaft axial direction test portion 214 coincides with the shaft axis H. The diameter of the shaft axial direction test portion 214 at the position from the minor diameter surface 215 to lc is DC, and the diameter at the position from the minor diameter surface 215 to ld is Dd (here, Dd).
> Dc).

The tracing stylus plane inclination test section 216 has a cylindrical shape, and its central axis I and the shaft axis H of the shaft 202 do not coincide with each other, and are separated by an offset amount S. That is, the tracing stylus plane inclination test unit 216 is eccentric with respect to the shaft 202. The surface where the tracing stylus plane inclination test unit 216 contacts the tracing stylus 120 is the shaft 2
It is parallel to 02. The diameter of the tracing stylus inclination test unit 216 is De.

The tracing stylus left / right tilt test section 218 has a shape in which a part of a cone is cut off, and the surface in contact with the tracing stylus 120 is tilted with respect to the shaft 202. The center axis J of the tracing stylus left / right tilt test unit 218 and the shaft axis H of the shaft 202 do not coincide with each other, but are apart from each other by an offset amount S. That is, the tracing stylus lateral inclination test unit 218 is eccentric with respect to the shaft 202. The diameter at the position of lf (= lc) from the minor axis surface 219 of the tracing stylus left / right tilt test unit 218 is Df.

The shape of each test portion of the inspection tool 200 has been accurately measured. The correction information can be obtained by comparing the accurate measurement data in each test unit with the actual measurement value by the cam profile measuring unit 50. The method of calculating each correction information will be described below.

"Correction Information Regarding Radial Scale of Linear Scale" FIG. 6 is a diagram for explaining a measurement error in the radial direction of the linear scale. The measurement error in the radial direction of the linear scale is an error in the detected amount of movement of the three-dimensional cam profile probe 110 in the movement axis G direction. FIG. 6 shows a case where the actual movement amount should be 10 mm, but is detected as 10.1 mm.

FIG. 7 is a flowchart showing a process of calculating correction information in the radial direction of the linear scale. First, at the measurement point K (see FIG. 5), the measurement of the linear scale test unit 210 is performed a predetermined number of times (for example, 25 times) in consideration of the statistical error, and the measured value Da ′ is obtained (S10). Next, the average value of the obtained measured values Da 'is calculated (S20).

Subsequently, at the measurement point L, the measurement of the linear scale test unit 212 is performed a predetermined number of times (for example, 25 times) in consideration of the statistical error, and the measured value Db 'is obtained (S30). Next, the average value of the obtained measured values Db 'is calculated (S40).

Using the measured values Da 'and Db' (both are average values), the correction information in the radial direction of the linear scale is calculated (S50). FIG. 8 is a diagram illustrating a method of calculating correction information regarding the radial direction of the linear scale. From the true value Da at the measurement point K, the true value Db at the measurement point L, and the measured values Da ′ and Db ′, the relational expression represented by the slope (Db′−Da ′) / (Db−Da) is obtained. . By using this relational expression, it is possible to correct an actual measurement value in an arbitrary linear scale radial direction.

"Correction information about shaft axial direction" FIG.
FIG. 6 is a diagram illustrating a measurement error in the shaft axis direction. The measurement error in the shaft axis direction is caused by the deviation ΔDd in the measurement value when there is a difference in the direction of the shaft axis H between the original measurement point N and the actual measurement point N ′. . This gap is mainly due to
Shaft axis H of the shaft 202 by the linear drive unit 32
It is a deviation caused by inaccuracy in directional position adjustment.

FIG. 10 is a flowchart showing a process of calculating correction information regarding the shaft axis direction. First,
The measurement point M of the shaft axial direction test unit 214 (see FIG.
In reference), the measurement is performed a predetermined number of times (for example, 25 times), and the measured value Dc ′ is obtained (S60). Next, the average value of the obtained measured values Dc 'is calculated (S70).

Then, at the measurement point N of the shaft axial direction test section 214, a predetermined number of times (for example, 25 times).
Is measured, and the measured value Dd 'is obtained (S80).
Next, the average value of the obtained measured values Dd ′ is calculated (S
90).

Using the measured values Dc 'and Dd' (both are average values), the correction information in the shaft axial direction is calculated (S100). FIG. 11 is a diagram illustrating a method of calculating correction information regarding the shaft axis direction. The true values of the measurement points M and N are Dc and Dd, respectively. On the other hand, the fact that the measured values Dc ′ and Dd ′ do not match the true value means that the measurement is performed at a position deviated from the original measurement points M and N. Therefore, the coordinates (l
c, Dc) and a coordinate (ld, Dd) connecting the straight line 300, the coordinates (lc, Dc ′) are projected horizontally (lc ′, Dc ′), and the straight line 300 is coordinated. A point (ld ′, D) obtained by horizontally projecting (ld, Dd ′)
By determining d ′), it can be seen that the actual measurement points were located on lc ′ and ld ′ from the minor axis surface 215. That is, for the measurement points M and N,
Regarding the shaft axial direction, lc'-lc and l
The error can be removed by correcting only d′-ld (both take the distance from the minor axis surface 215 positive).

Further, with respect to points other than the measurement points M and N, correction can be performed by utilizing the fact that the distance from the minor diameter surface 215 and the correction amount are in a proportional relationship.

The inclination of the measurement surface of the shaft axial direction test portion 214 is matched with the shape of the cam or the like (measurement object product) that is actually the measurement object, and the distances of the measurement points M and N from the minor axis surface 215. It is desirable to match lc and ld with the measurement position of the measurement target product. This makes it possible to optimize the correction when the measurement target product is actually measured.

"Correction information regarding the inclination of the tracing stylus plane" FIG.
2 shows a three-dimensional cam profile probe 110 with the axis of movement G tilted with respect to the appropriate axis of movement G '. Thus, the inclination of the movement axis G with respect to the appropriate movement axis G ′ is
For example, when the weight of the 3D cam profile gauge 110 itself causes the 3D cam profile gauge 110 to tilt, or the 3D cam profile gauge 1
It is possible that the mounting accuracy of 10 is insufficient.

FIG. 13 shows a measurement result when the measurement point O of the tracing stylus plane inclination test unit 216 is measured using the three-dimensional cam profile tracing stylus 110 in which the moving axis G is tilted. Since the moving axis G is inclined,
One end of the measurement surface 1 when the moving axis G is appropriate
20b protrudes toward the tracing stylus plane inclination test unit 216 side with respect to the reference plane, and the other end projects toward the side opposite to the tracing stylus plane inclination test unit 216 with respect to the reference plane. Therefore, FIG.
As shown in FIG.
When the tracing stylus plane inclination test unit 216 is rotated when it is tilted so as to project to the side, depending on the measurement position, it may come into contact with the tracing stylus plane tilt test unit 216 earlier than when it is not tilted. The actual measurement value becomes larger than the true value, or conversely, the actual measurement value becomes smaller than the true value by contacting the tracing stylus plane inclination test unit 216 later than when there is no inclination.

FIG. 14 is a flow chart showing the processing for calculating the correction information regarding the tilt of the tracing stylus plane. First,
Measurement point O of the tracing stylus plane inclination test unit 216 (see FIG.
In the reference), measurement by the tracing stylus plane inclination test unit 216 is performed a predetermined number of times (for example, 25 times), and an actual measurement value De ′ is obtained (S110). Next, the average value at each measurement angle is calculated based on the obtained measured value De ′ (S1
20). Next, the difference ΔDe between the measured value De ′ (average value) and the true value De at the measurement point O is calculated as the measurement angle (θ).
The correction amount ΔDe (θ) depending on the measurement angle is obtained by calculating in (S130). This allows
It is possible to correct the measurement error due to the inclination of the tracing stylus plane based on the measurement angle of the measurement target product.

"Correction information regarding tilt of the tracing stylus" Fig. 1
FIG. 5 is a diagram showing a mounting failure of the three-dimensional cam profile gauge 110. The three-dimensional cam profile probe 110 shown in FIG. 15 is mounted with its central axis T inclined with respect to the proper mounting axis U. As a result, FIG.
As shown in, the difference between the true value Df and the actually measured value Df 'changes from 0-maximum-0 in one cycle at an angle of 180 °.

FIG. 17 is a flow chart showing the processing for calculating the correction information relating to the horizontal tilt of the tracing stylus. First,
Measuring point P of the horizontal stylus test unit 218 (see FIG.
In the reference), measurement of the tracing stylus left / right tilt test unit 218 is performed a predetermined number of times (for example, 25 times), and an actual measurement value Df ′ is obtained (S140). Next, the average value at each measurement angle is calculated based on the obtained measured value Df ′ (S1
50). Next, the difference ΔDf between the measured value Df ′ (average value) and the true value Df at the measurement point P is calculated as the measurement angle (θ).
The correction amount ΔDf (θ) depending on the measurement angle is obtained by calculating in (S160). This allows
It is possible to correct the measurement error due to the tilt of the tracing stylus based on the measurement angle of the measurement object.

In the above description, "correction information regarding the radial direction of the linear scale", "correction information regarding the axial direction of the shaft", "correction information regarding the inclination of the tracing stylus plane" and "correction information regarding the inclination of the tracing stylus left and right" are different from each other. Although it is determined that the correction information is obtained independently of the correction information, the measurement error can be corrected more accurately by considering the order of obtaining the correction information, as described below.

[Correction Information Acquisition Procedure] As shown in the flowchart of FIG. 18, first, the correction information in the radial direction of the linear scale is acquired in accordance with the procedure described above (S170).
Next, the correction information regarding the shaft axial direction is acquired according to the procedure described above (S180). Next, the correction information regarding the inclination of the tracing stylus plane is acquired (S190). However,
At this time, the correction information is acquired in consideration of the already acquired correction information in the radial direction of the linear scale. A specific example will be described later. Next, the correction information regarding the horizontal tilt of the tracing stylus is acquired (S200). However, at this time, the correction information is acquired in consideration of the already acquired correction information in the radial direction of the linear scale and the correction information in the shaft axis direction.

FIG. 19 is a diagram showing a method of acquiring the correction information regarding the tracing stylus plane inclination by adding the correction information in the radial direction of the linear scale. The profile 300 shows a profile (raw data) when the measurement point O is measured. Profile 310 is the same as Profile 300
It can be obtained by correcting the linear scale in the radial direction. The true value 320 is the true value (theoretical value) of the measurement point O
Indicates. The correction value 330 regarding the tilt of the tracing stylus plane can be obtained by obtaining the difference between the profile 310 and the true value 320 at each measurement angle.

FIG. 20 is a diagram showing a method of acquiring the correction information on the lateral inclination of the tracing stylus by adding the correction information in the radial direction of the linear scale and the correction information in the axial direction of the shaft. The profile 400 shows a profile (raw data) when the measurement point P is measured. The profile 410 is obtained by correcting the profile 400 in the radial direction of the linear scale. The profile 420 is obtained by correcting the profile 410 in the shaft axial direction. The true value 430 is
The true value (theoretical value) of the measurement point P is shown. The correction value 440 regarding the horizontal tilt of the tracing stylus can be obtained by obtaining the difference between the profile 420 and the true value 430 at each measurement angle.

According to this, since the correction information about the tilt of the tracing stylus plane and the correction information about the tilt of the tracing stylus left and right are obtained after removing other error factors, the accuracy of the obtained correction information can be improved. .

Although the present invention has been described with reference to the embodiments, the technical scope of the present invention is not limited to the scope described in the above embodiments. Various changes or improvements can be added to the above-described embodiment. A mode in which such changes or improvements are added may be included in the technical scope of the present invention.
It is clear from the description of the claims.

[0055]

As is apparent from the above description, according to the present invention, the measurement result is corrected based on the measurement error of each three-dimensional cam profile measuring device. Variation can be reduced.

[Brief description of drawings]

FIG. 1 is a cam profile measuring device 1 according to an embodiment.
It is a block diagram which shows the structure of 0.

FIG. 2 is a perspective view of a three-dimensional cam profile probe 110.

FIG. 3 is a perspective view of a tracing stylus 120.

4 is a perspective view showing a contact state between a tracing stylus 120 of a three-dimensional cam profile tracing stylus 110 and a cam 80. FIG.

FIG. 5 is a plan view of an inspection tool 200 used in this embodiment.

FIG. 6 is a diagram for explaining a measurement error in the radial direction of the linear scale.

FIG. 7 is a flowchart showing a process of calculating correction information regarding a radial direction of a linear scale.

FIG. 8 is a diagram illustrating a method of calculating correction information in the radial direction of the linear scale.

FIG. 9 is a diagram illustrating a measurement error in the shaft axis direction.

FIG. 10 is a flowchart showing a process of calculating correction information about a shaft axis direction.

FIG. 11 is a diagram illustrating a method of calculating correction information regarding a shaft axis direction.

FIG. 12 is a diagram showing a three-dimensional cam profile probe 110 in which a movement axis G is inclined with respect to an appropriate movement axis G ′.

FIG. 13 is a diagram showing a measurement result when a measurement point O of a tracing stylus plane inclination test unit 216 is measured using a three-dimensional cam profile tracing stylus 110 in which a movement axis G is inclined.

FIG. 14 is a flowchart showing a process of calculating correction information regarding a tracing stylus plane inclination.

FIG. 15 is a diagram showing a mounting failure of the three-dimensional cam profile probe 110.

FIG. 16 is a diagram showing a measurement result when a measurement point P is measured by a three-dimensional cam profile probe 110 having a tilted central axis T.

FIG. 17 is a flowchart illustrating a process of calculating correction information regarding a horizontal tilt of a tracing stylus.

FIG. 18 is a flowchart showing a correction information acquisition procedure.

FIG. 19 is a diagram showing a method of acquiring correction information regarding a tracing stylus plane inclination by adding correction information in a radial direction of a linear scale.

FIG. 20 is a diagram showing a method of acquiring correction information regarding a horizontal tilt of a tracing stylus by adding correction information regarding a radial direction of a linear scale and correction information regarding a shaft axis direction.

[Explanation of symbols]

10 3 dimensional cam profile measuring device, 20 measurement control unit, 30 rotation drive unit, 32 linear drive unit, 40
Position movement / rotation phase measurement unit, 50 Cam profile measurement unit, 52 Parallel movement support unit, 60 Data correction unit, 6
2 data correction information storage section, 70 display section, 80 cam, 81 cam surface, 100 rotating shaft, 110 3
Dimensional cam profile probe, 120 probe, 120a
Central part, 120b measurement surface, 130 support member, 1
40, 142 shaft part, 150, 152 arm part, 16
0 base, 200 inspection tool, 202 shaft, 21
0,212 Linear scale test section, 214 Shaft axis direction test section, 215 Short diameter surface, 216 Stylus plane tilt test section, 218 Stylus horizontal tilt test section.

Claims (6)

[Claims] 1. A measuring element having a flat measuring surface for contacting a cam surface of a three-dimensional cam, and the measuring element which is swingably supported around a swing axis existing in the measuring surface. A three-dimensional cam profile gauge including a support member;
The shape of the three-dimensional cam is changed based on the position of the probe or the supporting member by changing the rotation phase and the position of the rotation axis of the three-dimensional cam in a state of being in contact with the cam surface of the three-dimensional cam. Is a method of correcting the result of measuring, and is obtained by measuring the shape of a reference object having a predetermined shape using the three-dimensional cam profile probe, and measuring the shape of the reference object. Correction information calculating step for obtaining correction information for correcting the measurement error of the shape of the three-dimensional cam based on the difference between the reference measurement value and the true value of the shape of the reference measurement object, and the three-dimensional cam profile sensor When the shape of the three-dimensional cam is measured by using the correction information, a correction step of correcting the measurement result of the three-dimensional cam using the correction information is included. Result correction method. 2. The reference object has a first reference plane parallel to the rotation axis and having a predetermined diameter, and a central axis of the first reference plane coincides with the rotation axis. A cylindrical object and a second reference surface parallel to the swing axis and having a diameter different from that of the first cylindrical object, and a central axis of the second reference surface coincides with the rotation axis. A second cylindrical object, wherein the correction information calculation step calculates correction information in a direction perpendicular to the swing axis based on the measurement values of the first and second reference planes. The three-dimensional cam shape measurement result correction method according to claim 1. 3. The reference object has a third reference surface inclined with respect to the rotation axis, and a third conical object having a central axis of the third reference surface coinciding with the rotation axis. And the correction information calculation step is different from the third reference plane.
The three-dimensional cam shape measurement result correction method according to claim 1, wherein the correction information regarding the inclination in the rotation axis direction is calculated based on the measurement values at one position. 4. The reference object has a fourth reference plane that is parallel to the rotation axis and has a predetermined diameter, and the central axis of the fourth reference plane and the rotation axis have a predetermined distance. Including the displaced fourth cylindrical object, the correction information calculation step calculates correction information regarding a horizontal tilt of the three-dimensional cam profile gauge based on the measurement value of the fourth reference surface. The method for correcting a three-dimensional cam shape measurement result according to claim 1, wherein: 5. The reference object has a fifth reference surface inclined with respect to the rotation axis, and a center axis of the fifth reference surface and the rotation axis are displaced from each other by a predetermined distance. 5, wherein the correction information calculation step calculates correction information regarding an inclination of the three-dimensional cam profile gauge in the horizontal plane based on the measurement value of the fifth reference surface. The three-dimensional cam shape measurement result correction method according to claim 1. 6. A tracing stylus having a planar measuring surface for contacting a cam surface of a three-dimensional cam, and the tracing stylus supported so as to be swingable around a swinging axis existing in the measuring surface. A three-dimensional cam profile gauge including a support member;
The shape of the three-dimensional cam is changed based on the position of the probe or the supporting member by changing the rotation phase and the position of the rotation axis of the three-dimensional cam in a state of being in contact with the cam surface of the three-dimensional cam. A three-dimensional cam profile measuring device for measuring a reference measurement value obtained by measuring a shape of a reference object having a predetermined shape using the three-dimensional cam profile probe, and the reference measurement object. A correction information storage unit that stores correction information that corrects a measurement error of the three-dimensional cam profile probe calculated based on the true value of the shape, and a measurement result of the three-dimensional cam based on the correction information. A three-dimensional cam profile measuring device comprising: a data correcting unit for correcting.