JP2003308976A - Light-emitting device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a light-emitting device in which high definition and reduction of a manufacturing cost are available. <P>SOLUTION: The light-emitting device is so constituted that a pixel section is formed by arranging in the shape of a matrix TFTs and the light emitting elements in which an organic compound layer that has a light emitting property is formed between a pair of electrodes which consist of a translucent electrode and a non-translucent electrode, a coloring layer of a color filter prepared corresponding to each pixel is prepared in contact with a flat surface of a flattened insulator film which consists of an inorganic or an organic material between the light-emitting element and the TFT, and a boundary region of the adjoining coloring layer is prepared superimposing on a gate signal line or a data line which sends a signal to the TFT, and the translucent electrode is prepared superimposing on the inside of the coloring layer. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a light emitting device including a light emitting element having a layer made of an organic compound (hereinafter referred to as an organic compound layer), and more particularly to a multicolor display function.

[0002]

2. Description of the Related Art A self-luminous display device using a light emitting element in which an organic compound layer is interposed between a pair of electrodes has a wide viewing angle and is excellent in visibility, and is therefore attracting attention as a next-generation display device. .

A light emitting mechanism of a light emitting element is that a hole injected from an anode, which is one of a pair of electrodes, and an electron injected from a cathode, which is the other electrode, are recombined in a light emitting organic compound layer (light emitting layer). Is considered to be a phenomenon in which light is emitted when the excitons return to the ground state by forming excitons. This light emission is called electroluminescence. Electroluminescence includes fluorescence and phosphorescence, which include emission from a singlet state in an excited state (fluorescence) and emission from a triplet state (phosphorescence). Luminance due to light emission is several thousand
Since it reaches tens of thousands of cd / m ² , it is considered that it can be applied to display devices in principle.

In such a light emitting device, the organic thin film is usually formed as a thin film having a thickness of less than 1 μm. Further, since the light emitting element is a self-luminous element in which the organic thin film itself emits light, a backlight as used in a conventional liquid crystal display is not necessary. Therefore, it is a great advantage that the light emitting element can be manufactured to be extremely thin and lightweight.

Further, in the method called active matrix driving, a thin film transistor (TFT) is provided for each pixel and the light emission of the light emitting element is individually controlled to enable high definition and crosstalk-free image display.

In the color display system, the materials or additives of the light emitting layer are made different so that the light emitting color is red for each pixel.
A method of arranging differently for green and blue, a method of using a light emitting element which emits white light and combining with a color filter, and the like have been known.

[0007]

However, when the color filter and the pixel matrix in which the light emitting element is provided in each pixel are separately formed, it is necessary to align and assemble the both with high accuracy. When the accuracy is low, there is a problem in that the aperture ratio actually decreases.

Of course, it is possible to form the colored layers of the color filter with the same alignment accuracy in the process of manufacturing the TFT substrate, but since the heat resistant temperature is about 200 ° C.,
The TFT could not withstand a process temperature of about 450 ° C.

Further, the material called color resist used when forming the colored layer of the color filter is a considerably expensive material, and the process in which the yield of the TFT process and the yield of the color filter process are integrated increases the manufacturing cost. There was a problem that it became an increasing factor and was not suitable.

The present invention solves such problems, and an object of the present invention is to provide a light emitting device having high definition and capable of reducing the manufacturing cost.

[0011]

In order to solve the above problems, the structure of the present invention is such that a TFT, a colored layer of a color filter, and an organic compound layer having a light emitting property are provided between a pair of electrodes on a substrate. A light emitting device having a formed light emitting element, wherein the colored layer of the color filter is formed on a flat surface of an insulating film formed of an inorganic or organic material on the TFT, and the light emitted from the light emitting element passes through the colored layer. It is radiated.

According to the present invention, a flattening insulating film made of an inorganic or organic material is formed to cover a TFT formed on a substrate,
The colored layer of the color filter is provided on the flat surface of the insulating film, and the light-emitting element in which the organic compound layer having a light-emitting property is formed between the pair of electrodes is provided on the colored layer. It is radiated.

According to the present invention, a flattening insulating film made of an inorganic or organic material is formed to cover a TFT formed on a substrate,
The colored layer of the color filter is provided on the flat surface of the insulating film, and the light emitting element in which the organic compound layer having a light emitting property is formed between the pair of electrodes is provided on the colored layer. And are electrically connected by a wiring penetrating the colored layer, and the light emitted from the light emitting element is emitted through the colored layer.

According to the present invention, a light emitting element in which an organic compound layer having a light emitting property is formed between a pair of electrodes and a TFT are arranged in a matrix to form a pixel portion, and a color is provided corresponding to each pixel. The colored layer of the filter is composed of the light emitting element and the T
It is provided in contact with the flat surface of the flattening insulating film made of an inorganic or organic material between the TFT and FT, and the boundary region between the adjacent colored layers is provided so as to overlap with the gate signal line or the data line for sending a signal to the TFT. It is what has been.

According to the present invention, a light emitting element in which an organic compound layer having a light emitting property is formed between a pair of electrodes composed of a light transmissive electrode and a non-light transmissive electrode and a TFT are arranged in a matrix. The colored layer of the color filter in which the pixel portion is formed and provided corresponding to each pixel is provided in contact with the flat surface of the planarization insulating film made of an inorganic or organic material between the light emitting element and the TFT, and is adjacent to the flat surface. The boundary area of the colored layer
Is provided so as to be overlapped with a gate signal line or a data line for transmitting a signal, and the light-transmitting electrode is provided so as to be overlapped with the inside of the coloring layer.

The flattening insulating film made of an inorganic or organic material is formed of an inorganic insulating film such as silicon oxide, or polyimide or acrylic. The colored layer may be formed on this flattening insulating film, or an inorganic insulating film such as silicon nitride may be interposed therebetween. A transparent electrode (anode) formed as an individual electrode is formed for each pixel on the colored layer of the color filter. Further, an inorganic insulating film such as a silicon nitride film may be formed between the translucent electrode (anode) and the colored layer.

In the light-emitting element, an organic compound layer is laminated using this transparent electrode (anode) as one electrode, and the other electrode facing the transparent electrode (anode) is formed on the organic compound layer. With such a structure of the light emitting element, light emission can be emitted from the transparent electrode (anode) side, that is, transmitted through the colored layer of the color filter and taken out to the outside.

The boundary area between the adjacent colored layers is provided at a position overlapping the gate signal line or the data line which is arranged in the pixel portion, and the wiring can be used as a light-shielding film to improve the aperture ratio. You can

The organic compound layer has a structure in which a hole injecting and transporting layer on the anode side, an electron injecting and transporting layer on the cathode side, a light emitting layer and the like are appropriately combined. The hole injecting / transporting layer or the electron injecting / transporting layer is noted as properties in which the hole or electron injecting efficiency from the electrode and the transportability (mobility) are particularly important. A light-emitting electron injecting and transporting layer having the above function may be combined.

As the organic compound forming each of these layers, both a short molecular organic compound and a high molecular organic compound are known. An example of a short molecule organic compound is α-NPD (4,4′-bis- [N- (naphthyl) -N-phenyl-amino) which is a copper phthalocyanine (CuPc) aromatic amine material as a hole injecting and transporting layer. ] Biphenyl), MTDATA (4,4 ', 4 "-tris (N-3-methylphenyl-N-phenyl-amino) triphenylamine), Tris-8- as an electron injecting / transporting layer or a luminescent electron injecting / transporting layer Known are quinolinolato aluminum complexes (Alq ₃ ), etc. For polymer organic light emitting materials, polyaniline and polythiophene derivatives (PEDO) are known.
T) etc. are known.

The colored layer of the color filter is formed by coating a pigment and a dye dispersed in a resin binder by a coating method, and is formed into a predetermined pattern by a light exposure process.
In this case, by forming a colored layer of a color filter for each color on the flattened surface made of an inorganic or organic material,
The colored layers can be arranged with high alignment accuracy.

Further, by arranging the colored layer which is patterned by the alkaline water-soluble developing solution before forming the contact hole in the planarization insulating layer, the semiconductor film is contaminated by the alkaline component, pigment or dye. There is no.

By interposing an inorganic insulating film such as silicon nitride between the flattening film and the colored layer, it is possible to prevent components such as pigment contained in the colored layer from diffusing to the TFT side. Further, by forming an inorganic insulating film such as a silicon nitride film between the translucent electrode (anode) and the colored layer, it is possible to prevent components such as pigments contained in the colored layer from diffusing on the light emitting element side. be able to.

The surface of the colored layer of the color filter may be polished to flatten it. As a result, the yield of the color filter can be improved, and at the same time, the flatness of the surface of the transparent electrode (anode) formed thereon can be improved, and the short circuit of the light emitting element can be prevented.

In any case, by forming the colored layer of the color filter on the flattening layer, it is possible to perform pinhole inspection of the colored layer at this stage. Can be peeled off and reworked. The peeling method may be carried out by washing and removing with a solvent, or mechanically polishing and scraping off. In any case, the presence of the flattening film enables reprocessing without damaging the TFT.

[0026]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In FIG. 5, a substrate 900 includes a pixel portion 902, gate signal side driving circuits 901a and 901b,
A data signal side drive circuit 901c, an input / output terminal portion 935,
11 illustrates one mode of a light-emitting device provided with a wiring or a wiring group 917. The seal pattern 940 includes the gate signal line side drive circuits 901a and 901b and the data signal line side drive circuit 9
01c and the wiring or the wiring group 917 that connects the driving circuit portion and the input terminal may partially overlap. By doing so, the area of the frame region (the peripheral region of the pixel portion) of the display panel can be reduced. An FPC 936 is fixed to the external input terminal section.

The pixel portion 902 is configured by providing TFTs and light emitting elements for each pixel and arranging them in a matrix. A top view of the pixel is shown in FIG. Incidentally, FIG.
For the sake of explanation, the layers and partition layers forming the light emitting element are omitted.

FIG. 6 shows an example of a pixel array for R (red), G (green), and B (blue) color display, and shows an array of R pixels 10, G pixels 20, and B pixels 30. T for each pixel
FT13,23,33 and wiring 110-112 T
Translucent electrodes (anodes) 113 to 115 connected to the FT are provided. Colored layers of color filter 107-10
9 (R filter 107, G filter 108, B filter 109) are gate signal lines (scanning signal lines) 102 to
The data signal lines 11, 12, and 2 are located above 104.
It is formed on the lower layer side than 1, 22, 31. The boundary area between adjacent colored layers is provided so as to overlap the gate signal line and the data line signal line. The translucent electrodes 113 to 115 are provided so as to overlap with the inside of each of the colored layers 107 to 109. In this pixel structure, A
A longitudinal sectional view corresponding to line -A 'is shown in FIG.

In FIG. 1, R pixel 10, G pixel 20,
In the B pixel 30, the TFTs 13, 23 and 33 and the light emitting element 1
5, 25 and 35 are provided, and the planarization insulating film 105 made of an inorganic or organic material is formed between them. The planarization insulating film 105 has a flat surface, and coloring layers 107 to 109 of color filters are formed on the surface. The colored layer of the color filter is formed by coating a pigment and a dye in a resin binder dispersed by a coating method and forming a predetermined pattern by a light exposure process.

An insulating film 1 having a barrier property, such as silicon nitride, is provided between the colored layers 107 to 109 and the planarizing insulating film 105.
06 is formed. This can prevent components such as pigments contained in the colored layer from diffusing to the TFT side. Further, it is possible to prevent the flattening insulating film 105 and the TFTs thereunder from being deteriorated by an alkaline component when forming a pattern with an alkaline water-soluble developer. Furthermore, by forming the colored layers of the color filter for each color on the flattened surface made of an inorganic or organic material, the colored layers can be arranged with high alignment accuracy. The function of the barrier insulating film here has a function of blocking ionic impurities, moisture, metal impurities, alkali metals and the like to prevent diffusion.

Further, the flattening insulating film 105 and the TFT 13,
An inorganic insulating film 103 made of a material selected from silicon nitride, silicon oxynitride, aluminum nitride, and aluminum oxynitride is formed between 23 and 33. This can prevent the components of the color layer of the color filter from diffusing into the TFT.

Each of the light emitting elements 15, 25 and 35 has an organic compound layer 118 having a light emitting property between the translucent electrodes (anode) 113 to 115 and the non-translucent electrode (cathode) 119.
Is formed. Translucent electrode (anode) 113-1
15 is indium tin oxide (ITO), zinc oxide (Zn)
O), indium zinc oxide (IZO), or other light-transmitting conductive film is formed by a resistance heating evaporation method. Non-translucent electrode (cathode) 1
18 is formed of a fluoride of an alkali metal or an alkaline earth metal.

The organic compound layer can have various structures, but has a structure in which a hole injecting and transporting layer on the anode side, an electron injecting and transporting layer on the cathode side, a light emitting layer and the like are appropriately combined. The hole injecting / transporting layer or the electron injecting / transporting layer is noted as properties in which the hole or electron injecting efficiency from the electrode and the transportability (mobility) are particularly important. It is said that there is also a luminescent electron injecting and transporting layer that also has the above.

These organic light emitting mediums or organic layers are formed of one or more kinds of organic materials, and a mixture of the organic light emitting material and the electron injecting / transporting material and / or the hole injecting / transporting material, or the mixture thereof. Alternatively, it may be formed of an organic light emitting material or a polymer material in which a metal complex is dispersed.

As the organic compounds forming each of these layers, both short molecular organic compounds and high molecular organic compounds are known. An example of a short molecule organic compound is α-NPD (4,4′-bis- [N- (naphthyl) -N-phenyl-amino) which is a copper phthalocyanine (CuPc) aromatic amine material as a hole injecting and transporting layer. ] Biphenyl) and MTDATA (4,4 ', 4 "-tris (N-3-methylphenyl-N-phenyl-amino) triphenylamine), Tris-8- as an electron injecting / transporting layer or a luminescent electron injecting / transporting layer Known are quinolinolato aluminum complexes (Alq ₃ ), etc. As polymer organic compound materials, polyaniline and polythiophene derivatives (PED) are used.
OT) etc. can be applied.

When the light emitting layer is formed of a high molecular weight organic compound material, a π-conjugated material is used. Typical materials are polyparaphenylene vinylene (PPV) type, polyvinyl carbazole (PVK) type, polyfluorene type, and the like. Specifically, the R pixel is cyanopolyphenylene vinylene, the G pixel is cyanopolyphenylene vinylene, and the B pixel is
Cyanopolyphenylene vinylene or polyalkylphenylene may be used for the pixel. The above materials are examples applicable to the light emitting layer, and the material is not limited to these. Of course, the light emitting layer may be formed of a white light emitting material.

As a method of obtaining white light emission, a method of stacking light emitting layers which emit respective colors of R (red), G (green) and B (blue) which are the three primary colors of light, and performing additive color mixing, and two complementary colors are used. There is a method that uses a relationship. When using complementary colors, a combination of blue-yellow or blue-green-orange is known. In particular, the latter is considered to be advantageous in that it can utilize light emission in a wavelength region having relatively high visibility.

As an example of a light emitting device which emits white light, an electron injecting and transporting layer, a red light emitting layer, a green light emitting layer, a hole transporting layer, a blue light emitting layer and a second electrode are laminated between a pair of a cathode and an anode. It is a structure. 1,2,4-triazole derivative (p-EtTAZ) is used as a hole transport layer, tris (8-quinolinato) aluminum (Alq ₃ ) is used as a green light emitting layer, and blue of Alq ₃ is mixed with blue of TPD as a blue light emitting layer. A blue-green emission is obtained. To add red light to this light emission to achieve white light emission, it is sufficient to dope the red light emitting dye into either Alq ₃ or TPD as the red light emitting layer. Nile red or the like can be applied as the red light emitting dye.

As another structure, an electron injecting and transporting layer,
An electron transport layer, a light emitting layer, a hole transport layer, and a hole injection transport layer can also be used. A suitable combination of materials in this case is
Alq ₃ is used as the electron injecting and transporting layer, and a phenylanthracene derivative is formed as the electron transporting layer. The light emitting layer comprises a first light emitting layer in which a tetraarylbenzidine derivative and a phenylanthracene derivative are mixed at a volume ratio of 1: 3, and a styrylamine derivative is contained in an amount of 3% by volume, a tetraarylbenzidine derivative and 10,10′-bis [ 2-biphenylyl]
-9,9'-Bianthril (phenylanthracene derivative)
And a volume ratio of 1: 3, and a naphthacene derivative of 3
The second light emitting layer, which is included by weight, is laminated.
The hole transport layer is N, N, N ', N'-tetrakis- (3-biphenyl-
1-yl) benzidine (tetraarylbenzidine derivative) is formed, and N, N'-diphenyl-N,
N'-Bis [N-phenyl-N-4-tolyl (4-aminophenyl)] benzidine is formed.

As another structure, Alq ₃ having a high electron transporting property is used as an electron injecting and transporting layer, a polymer organic light emitting medium is used thereon, and TAZ and PVK (poly (N-vinylcarbazole)) are used. The formed three-layer structure is used. Recombination of the injected electrons and holes occurs in PVK, and the carbazole group having a peak at a short wavelength is excited to emit light. White light emission can be obtained by doping a suitable dye for adding long-wavelength light emission. For example, 1,1,4,4-
Tetraphenyl-1,3-butadienin (TPB) 2-3m
Emission of 450 nm is obtained by ol% doping, and green and red can be obtained by doping coumarin 6 and DCM1. In any case, in order to obtain white light emission, various dyes may be doped into PVK to cover the entire visible light range. In this structure, the electron injection transport layer 203
Alternatively, an inorganic electron injecting and transporting layer may be used. As the inorganic electron transport layer, n-type diamond-like carbon (DL
C) can be applied. To make the DLC film n-type, phosphorus or the like may be appropriately doped. In addition, one kind of oxide selected from alkali metal elements, alkaline earth metal elements, and lanthanoid elements, Zn, Sn, V, and R
One or more inorganic materials selected from u, Sm and In can be applied.

As another constitution, 4,4'-bis- [N- (naphthyl) -N-phenyl-amino] biphenyl (α-NPD)
A hole injecting and transporting layer consisting of only N is formed, and α-N is formed thereon.
It is also possible to form a light emitting layer in which PD and BAlq that is an electron transporting material are mixed, and to form an electron injecting and transporting layer composed only of BAlq on the light emitting layer. Since this light-emitting layer emits blue light, it forms a region to which rubrene, which is a yellow fluorescent dye, is added as the second light-emitting material. Thereby, white light emission can be obtained.

In any case, in order to realize visually natural white light emission and to achieve higher quality multicolor display, the combination of the organic light emitting element emitting each color and the color filter is optimized. It is necessary to consider the color balance. Further, it is necessary for the drive circuit side to provide convenience in response to the case where the emission luminance changes with time.

In the method utilizing the relationship of the two complementary colors, a combination of blue-yellow or blue-green-orange is usually applied, and therefore, the organic light-emitting element which emits light of each color is deteriorated with time. Therefore, there is a problem that the color balance is lost. In addition, since the light emitting efficiency of each organic light emitting element is different, there is a problem in that the color balance is lost if the same driving voltage or driving current is applied.

Usually, there is a method of controlling the amount of transmitted light by changing the thickness of the colored layer of the color filter or controlling the amount of light by changing the area of the pixel. However, when changing the thickness of the colored layer, it is necessary to change the thickness at a rate of several μm, and when fixing as a counter substrate, it is necessary to increase the thickness of the flattening film or the thickness of the sealing material. There is a possibility that the reliability of the sealing structure will be impaired. Further, when the area of the pixel is changed, there is a problem that the arrangement and size of the TFT are limited and the area cannot be effectively used.

The partition layer 116 is for separating adjacent pixels, and also prevents the light emitting element from causing a short circuit defect at the end portions of the translucent electrodes 113 to 115. A suitable organic compound layer configuration in this form is PEDOT /
Apply a conductive polymer 117 such as PSS to the entire surface,
An organic compound layer 118 including a light emitting layer is formed thereon. In this case, the thickness shape of the conductive polymer 117 is thin above the partition wall 116 due to the influence of the partition wall 116.
16 ends (that is, the portion where the partition layer and the translucent electrode are in contact)
Thickens. This increases the lateral resistance in the upper part of the partition layer and prevents crosstalk. Further, since the thickness becomes thicker in the vicinity of the end portion, electric field concentration can be relaxed and deterioration from the pixel end portion can be prevented. Further, by using a conductive polymer such as PEDOT / PSS here, the hole injection characteristics are improved and the light emission efficiency can be improved.

In the light emitting elements 15, 25 and 35, the wirings 110 to 112 penetrate the colored layers 107 to 109 and the planarization insulating films 105 and 106, and the TFTs 13, 23 and 33.
Is connected to each.

Further, the protective film 1 is formed on the non-translucent electrode 119.
20 is silicon nitride or diamond-like carbon, hydrogenated or halogenated amorphous carbon (a-
C: H) film, amorphous silicon (a-Si) film, diamond-like carbon (DLC) film, amorphous silicon nitride film, etc., and at the same time, these films are formed by the plasma CVD method, and hydrogen in plasma or By using halogen, the organic compound layer can be hydrogenated or halogenated to compensate for and stabilize defects.

The light emitted from the light emitting element passes through the colored layer of the color filter, is emitted from the substrate 101 side and can be visually recognized. Various substrates can be applied as long as they can transmit emitted light. As the glass, a transparent glass such as a commercially available non-alkali glass is preferable, and an alkali glass whose surface is coated with a silicon oxide film can also be applied. When using plastics, polyethylene naphthalate (PEN), polyethylene terephthalate (PET), polyether sulfone (PES),
A light-transmitting polyimide or the like can be applied. In addition, transparent ceramics such as translucent alumina and ZnS sintered body can be applied. The form of the substrate may be any of a plate-like material, a film-like material, and a sheet-like material,
It may have either a single-layer structure or a laminated structure.

When the organic compound layer having a light emitting property is caused to emit light, its spectral spectrum is distributed over a relatively wide wavelength range and the color purity is lowered. By using a color filter to correct this, the color purity can be improved. Of course, when the light emitting element emits white light, color display can be performed by this color filter. Further, by providing the color filter, it is possible to prevent the pixel portion from being mirror-finished in the light emitting device having the configuration shown in FIG. 5 due to the light reflection of the non-translucent electrode.

FIG. 4 shows an example in which the barrier insulating film 121 is formed on the colored layers 107 to 109 in the structure of FIG. By forming the barrier insulating film 121 on the colored layer, the colored layer is less likely to be scratched in the subsequent steps, and the pigment component can be prevented from diffusing into the light emitting element and deteriorating the element.

On the other hand, on the surface of the colored layer of the color filter, fine projections or a boundary region where adjacent colored layers overlap with each other have a thickness thicker than other regions and a convex portion is formed. Particularly when the former is on the light emitting element formation region, that is, in the pixel surface, undesired phenomena such as short circuit failure and black dot failure occur due to it, and particularly when forming a high-definition display screen, display quality is deteriorated. Cause to bring.

FIG. 2A shows a state in which the colored layers 107 to 109 are formed on the flattening insulating film 105 and the barrier insulating film 106 made of an inorganic or organic insulating material, and the above-mentioned protrusions and projections are formed. Is shown. In order to remove the above-mentioned protrusions and protrusions, it is desirable to remove the protrusions and protrusions by mechanical polishing or chemical mechanical polishing in combination with slurry after forming the colored layer. FIG. 2B shows a state after polishing.

In this state, the colored layer can be inspected for pinholes, cracks, chips, pattern shifts, etc., and defective products can be selected and reprocessed.

After that, as shown in FIG. 3A, a barrier inorganic insulating film 121 made of silicon nitride or the like is formed by a high frequency sputtering method using silicon as a target. By forming this silicon nitride film, it is possible to prevent impurities such as pigment contained in the coloring layer from diffusing into the organic compound layer of the light emitting element and deteriorating the element characteristics.

FIG. 3B shows a state in which even the light emitting element is formed, and its configuration is the same as that in FIG. The difference is PE
An organic compound layer 118 including a light emitting layer formed on a conductive polymer 117 such as DOT / PSS is separately provided from a red light emitting organic compound layer 130, a green light emitting organic compound layer 131, and a blue light emitting organic compound layer 132. You may form.
The configurations of the non-translucent electrode (cathode) 119 and the protective film 120 are the same as in FIG.

[0056]

As described above, in the present invention, the light emitting device is integrally formed on the substrate by combining the TFT, the color filter and the light emitting element, and the maximum temperature process is 600 ° C. for crystallizing the semiconductor layer which is a constituent member of the TFT. Or a temperature of 350 to 450 ° C. at which hydrogenation is performed,
That is, before the flattening film is formed. Therefore, the heat resistance is 200
The colored layer of the color filter having a temperature of only about ℃ can be formed without any problem. Further, it is possible to provide a light emitting device which has high definition and can reduce the manufacturing cost without accumulating the yields of the TFT process and the color filter process.

[Brief description of drawings]

FIG. 1 is a vertical cross-sectional view showing the configuration of a light emitting device including a color filter colored layer of the present invention.

FIG. 2 is a vertical cross-sectional view showing a manufacturing process of a light emitting device having a color filter colored layer of the present invention.

FIG. 3 is a vertical cross-sectional view showing a manufacturing process of a light emitting device having a color filter colored layer of the present invention.

FIG. 4 is a vertical cross-sectional view showing the configuration of a light emitting device including a color filter colored layer of the present invention.

FIG. 5 is a top view illustrating a structure of a light emitting device.

FIG. 6 is a top view showing a pixel configuration of a light emitting device including a color filter colored layer of the present invention.

Claims (5)

[Claims] 1. A thin film transistor on a substrate, a colored layer of a color filter, and a light emitting element in which an organic compound layer having a light emitting property is formed between a pair of electrodes, wherein the colored layer of the color filter is A light emitting device, which is formed on a flat surface of an insulating film formed of an inorganic or organic material in an upper layer of a thin film transistor, and light emitted from the light emitting element is emitted through the colored layer. 2. A flattening insulating film made of an inorganic or organic material covering a thin film transistor is formed on a substrate, a colored layer of a color filter is provided on a flat surface of the insulating film, and a pair of colored layers is provided on the colored layer. A light-emitting device comprising a light-emitting element in which an organic compound layer having a light-emitting property is formed between electrodes, and light emitted from the light-emitting element is emitted through the colored layer. 3. A flattening insulating film made of an inorganic or organic material covering a thin film transistor is formed on a substrate, a colored layer of a color filter is provided on a flat surface of the insulating film, and a pair of colored layers is provided on the colored layer. A light emitting element in which an organic compound layer having a light emitting property is formed between electrodes is provided, the thin film transistor and the light emitting element are electrically connected by a wiring penetrating the insulating film and the coloring layer, and the light emission of the light emitting element is performed. Is emitted through the colored layer. 4. A color filter provided corresponding to each pixel in which a light emitting element in which an organic compound layer having a light emitting property is formed between a pair of electrodes and a thin film transistor are arranged in a matrix to form a pixel portion. The colored layer is provided in contact with a flat surface of a planarization insulating film made of an inorganic or organic material between the light emitting element and the thin film transistor, and a boundary region between adjacent colored layers is a gate signal which sends a signal to the thin film transistor. A light-emitting device, which is provided so as to overlap with a line or a data signal line. 5. A pixel portion in which light-emitting elements each having a light-emitting organic compound layer formed between a pair of electrodes including a light-transmitting electrode and a non-light-transmitting electrode and thin film transistors are arranged in matrix. The colored layer of the color filter provided corresponding to each pixel is formed in contact with the flat surface of the flattening insulating film made of an inorganic or organic material between the light emitting element and the thin film transistor, and is adjacent to the flat surface. A boundary region of the colored layer is provided so as to overlap with a gate signal line or a data signal line for sending a signal to the thin film transistor, and the light-transmitting electrode is provided so as to overlap with the inside of the colored layer. Characterized light emitting device.