JP2003302160A - Clean dry storage and method of controlling the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a clean dry storage capable of inhibiting penetration of outside humidity and storing articles with low humidity to be maintained at low cost without mounting a battery. <P>SOLUTION: In the clean dry storage, a door 4 for taking in/out an article is disposed in the front of a sealed internal space 3 and a main filter 6 is attached in the back to make a clean air outlet part 5. The clean dry storage also has air circulation pathways 11-7 for forcing air sucked/collected from an air collecting port 9 to the main filter 6 and a blower means 8. In addition, an air supply pipe 17 and an air dryer 21 are mounted on an air circulation pathway positive pressure part 7 for dehumidifying, drying and feeding the air compressed by a separate pressure source, and an exhaust pipe 13 is mounted for discharging air to the outside according to the pressure rise in the internal space 3. When the humidity of the collected air is a prescribed value which is a set humidity or lower, the dry air supply is suspended; when the humidity is increased at least to the set humidity, the dry air supply is restarted. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a clean dry storage and a control method thereof.

[0002]

2. Description of the Related Art Semiconductor parts, resin moldings, pharmaceuticals, etc.
Items that must avoid the effects of particle contamination are produced and managed in a contamination-controlled space such as a clean room. When moving to a clean room, mobile clean storage is used.

In this mobile clean storage cabinet, as shown in FIG. 8, the air sucked into the negative pressure section 82 through the pre-filter 81 is pressure-fed by the fan 83 to the positive pressure section 84, and HEP is used.
By constantly supplying the clean air filtered by the A filter 85 to the interior space 86 and maintaining the interior space 86 at a positive pressure, the entry of pollutant particles into the interior space 86 is prevented.
The exhaust from the internal space 86 is performed through the gap of the front door 87 and the exhaust filter 88, and a part of the exhaust is recirculated to the negative pressure portion 82.

Then, while it is left standing in the clean room, it is connected to an AC power source (not shown) and the battery 8
When the fan 83 is blown while the battery 9 is being charged, and when moving from the clean room to the outside, the internal cleanliness is maintained by disconnecting the AC power supply and switching to battery drive. Since such a clean storage room constantly sucks in the ambient air, it is difficult to store the article at a low humidity because the humidity inside the storage environment is affected by the humidity of the surrounding environment.

In addition, it is necessary to mount a converter and a charger for operating an AC fan with a battery, and the battery needs to be replaced periodically due to its life, which considerably affects the cost of installation and maintenance. Was there.

[0006]

SUMMARY OF THE INVENTION In view of the above-mentioned problems of the prior art, the present invention suppresses the ingress of moisture from the outside air, allows articles to be stored at low humidity, and does not require a battery for maintenance at low cost. The purpose of the present invention is to provide a mobile clean dry storage that is easy to operate.

[0007]

In order to solve the above problems, the clean dry storage of the present invention forms a hermetically sealed internal space inside a main body case, and articles are put in and taken out from the front of the internal space. While providing an opening and closing door to do so, a main filter is provided on the back side of the interior space to serve as a clean air outlet, and the air sucked and recovered from the air recovery port at the bottom of the interior space is sent to the main filter under pressure. An air supply line which includes a circulation path and a blowing means, and supplies dehumidified and dried compressed air from a pressure source different from the blowing means to a positive pressure part of the air circulation path on the discharge side of the blowing means. Further, an air dryer is provided, and an exhaust pipe line for discharging the air in the interior space to the outside of the interior according to the pressure increase in the interior space is provided. An exhaust relief valve that opens according to the pressure increase in the interior space and discharges the air in the interior space to the outside of the interior is provided in the exhaust pipe line. Further, on the discharge side of the blower means, a check valve is provided which opens when the blower blows and closes when the blower is stopped.

The internal space is divided into a plurality of small spaces by a shelf plate that can be pulled out forward and a partition plate that closes a gap generated behind the shelf plate when the shelf plate is pulled out. It is preferable that the front plate provided at the front end of the shelf plate is partitioned from the opening / closing door side, while the front plate near the front end of the shelf plate is connected to each other by a slit penetrating the shelf plate. Further, it is preferable that the front plate arranged at the front end of the shelf plate is attached so as to be able to be tilted to the front side.

Further, the present invention provides a method for controlling the above-mentioned clean dry storage, wherein a humidity sensor is provided in the negative pressure portion of the air circulation path, and when the air collected from the storage reaches a predetermined humidity below a set humidity, The solenoid valve provided in the air supply line to the positive pressure part of the air circulation path is closed to stop the supply of dry air, while the solenoid valve is opened and the supply of dry air is restarted when the collected air reaches or exceeds the set humidity. I did it. Further, when the opening / closing door in the front of the interior space is opened, the blowing means is stopped, and the solenoid valve is opened to continue the supply of dry air regardless of the humidity set by the humidity sensor.
Further, when the opening / closing door in the front of the interior space is once opened and the opening / closing door is closed after the air blowing means is stopped, the air blowing means is not immediately activated, and the operation of the air blowing means is restarted after a predetermined time has elapsed. did.

[0010]

1 and 2 show a clean dry storage according to an embodiment of the present invention. In the figure, a clean dry storage 1 has a sealed internal space 3 inside a main body case 2, and both side surfaces of the internal space 3 are made of tempered glass.
In addition to allowing the interior to be seen through, a door 4 is provided on the front surface of the interior space 3 so that it can be opened and closed.

An air flow diffusion member 5 such as a punch metal is provided on the back surface of the interior space 3, and a main filter 6 composed of a HEPA filter is provided behind the air flow diffusion member 5 to serve as an outlet for clean air. A discharge port of a fan 8 (blowing means) is connected to the positive pressure portion 7 (positive pressure chamber) behind the back pressure check valve 8a.

An air recovery port 9 is opened in the vicinity of the front end of the bottom surface of the interior space 3, and a negative pressure portion 11 is formed by partitioning with a partition wall 10 from the air recovery port 9 to the periphery of the fan 8. An air circulation path that circulates from the recovery port 9 through the negative pressure portion 11, the fan 8, the positive pressure portion 7, and the main filter 6 to the internal space 3 is formed. A humidity sensor 12 senses the humidity of the air collected from the air collecting port 10.

From the bottom of the interior space 3 to the main body case 2
An exhaust pipe 13 reaching the bottom of the exhaust pipe 13 is provided, the inside of the exhaust pipe 13 is filled with a porous material, and an exhaust relief valve 13a is provided at the lower end of the exhaust pipe 13. The exhaust relief valve 13a is biased by a biasing means (not shown) such as a spring, and opens when the atmospheric pressure of the interior space 3 becomes a critical value or more to perform exhaust, so that the interior space 3 becomes below a predetermined atmospheric pressure. Hold. In the clean dry storage 1 of the embodiment, for example, the critical value is 100 Pa.

The operation panel 14 is provided at the bottom of the main body case 2.
Dry air supply unit 1 together with a control unit (not shown) including
5 are arranged. The dry air supply unit 15 includes a solenoid valve 18, an air filter 19, and a mist separator 2 from a coupler 16 that detachably connects a compressed air supply pipe attached to equipment such as a clean room to an air supply pipe 17 that reaches the positive pressure unit 7.
0, an air dryer 21, a regulator 22, a flow meter 23, and a flow control valve 24, and a silencer 25 at the air blowing portion in the positive pressure portion 7. 26 is a drain pan and 27 is a monitor window. As the air dryer 21, a water vapor permeable membrane air dryer (hollow membrane air dryer) is suitable. The water vapor permeable membrane type air dryer does not require a power source and is easy to maintain, and therefore is most suitable for the mobile clean dry storage 1.

Further, the operation panel 14 arranged on the lower side surface of the main body case 2 is provided with a fan switch 41 for turning on / off the fan 8 and a dry switch 42 for turning on / off the dry air supply. It also serves as a driving indicator. Further, the flow rate abnormality lamp 43 is
Illuminates when the dry air flow rate measured by the flow meter 23 during the supply of dry air is below a set value. The humidity abnormality lamp 44 is lit when the humidity in the refrigerator measured by the humidity sensor 13 is equal to or higher than a set value, and displays the humidity abnormality. When the flow rate is abnormal and the humidity is abnormal, a buzzer (not shown) sounds together with the flow rate abnormal lamp 43 and the humidity abnormal lamp 44 to give an alarm.

The interior space 3 includes four shelf plates 31 and a partition plate 3.
It is divided into four small spaces 3a, 3b, 3c and 3d by 2 and. The shelf plate 31 is slidably supported by guide rails (not shown) provided on both sides and can be pulled out forward, and the partition plate 32 is a gap generated behind the shelf plate 31 at that time. Is closed so that vertically adjacent small spaces do not communicate with each other at that portion, and a stopper 32a for preventing the shelf plate 31 from falling off is formed at the tip.

A front plate 33 is provided at the front end of the shelf plate 31. The front plate 33 divides the interior space 3 into the small spaces 3a to 3d side and the door 4 side, and the small spaces 3a to 3d are external. On the other hand, the door 4 and each front plate 33 are doubly shielded. Each front plate 3
As shown in FIGS. 3 and 4, the reference numeral 3 is attached to the front end of the shelf plate 31 by a hinge 35 so as to be tilted to the front side. Further, slits 34 extending continuously or intermittently over the entire width of the shelf plate 31 are provided near the front end of each shelf plate 31, and the shelf plate 3
In the stored state of 1, the small spaces 3a to 3d communicate with each other only by the slit 34.

Next, the operation of the clean dry storage 1 will be described with reference to the drawings based on the above embodiment. still,
In FIGS. 5 to 7 which are schematic diagrams, the lowermost shelf 31 and the small space 3d are omitted.

(1) Starting and basic operation At power-on, the fan switch 41 and the dry switch 4
Both 2 are turned on to clean up and dehumidify the interior space 3. That is, the fan 8 is operated by operating the fan switch 41, the air in the negative pressure portion 11 is pressure-fed by the fan 8 to the positive pressure portion 7, is filtered by the main filter 6, and the clean air is stored in the inside space 3 (3a). ~ 3d) is blown out. The clean air blown into each of the small spaces 3a to 3d of the internal space 3 flows forward and sequentially flows from the slit 34 to the lower small spaces to reach the bottom of the internal space 3 while forming an air curtain airflow. The air is recovered by the negative pressure portion 11 through the air recovery port 9 and recirculated.

In parallel with this, the solenoid valve 18 is opened by operating the dry switch 42, compressed air is supplied to the air supply pipe 17, the air filter 19 and the mist separator 20.
The particles and oil mist mixed in the compressed air are removed by the air conditioner, and the water vapor in the compressed air is separated into dry air by passing through the air dryer 21, and the reguulator 22, the flow meter 23, and the flow control valve 24 ,
It is blown out into the positive pressure portion 7 via the silencer 25.

The interior space 3 is supplied by the supply of the dry air.
When the humidity of the clean air circulated in the chamber decreases, the amount of circulating air increases with the supply of dry air, and the atmospheric pressure of the internal space 3 rises, and when the atmospheric pressure reaches a predetermined critical value, the exhaust relief valve 13a turns on. It opens and exhausts through the exhaust pipe 13, and the internal space 3 is maintained at a predetermined positive pressure. In this way, the interior space 3 is dehumidified, the humidity of the collected air reaches the set humidity, and when the humidity sensor 12 senses this, the humidity abnormality lamp 44 turns off, and the interior space 3 is dehumidified and cleaned. Complete.

Then, the humidity of the collected air is a predetermined humidity equal to or lower than the set humidity (for example, the relative humidity is from the set humidity minus 2 to the set humidity).
3%), and when the humidity sensor 12 senses this, the solenoid valve 18 is closed and the supply of dry air is stopped. Along with this, the exhaust relief valve 13a is also closed. After the supply of dry air is stopped, when the humidity of the interior space 3 rises and reaches the set humidity, the electromagnetic valve 18 is opened again and the supply of dry air is restarted. By the control as described above, the interior space 3 is maintained in a desired low humidity state. In the dry dry storage (cleanliness class 100 / M3.5) of the embodiment, the relative humidity is always 5 in a room of general air conditioning (22 ° C./60% relative humidity).
It can be kept below%.

(2) Storage and Removal of Articles In the case of storing articles in the storage space 3, it is performed after the dehumidification / cleaning of the storage space 3 is completed. First, when the door 4 is opened, the fan 8 is stopped by the interlock of a door switch (not shown), and suction of outside air moisture from the air recovery port 9 is prevented. Further, the check valve 8a is closed when the fan 8 is stopped. On the other hand, at the same time as the door 4 is opened, the solenoid valve 18 is opened regardless of the detection value of the humidity sensor 12, the supply of dry air is continued, and although the air volume is small, the dry air that has passed through the main filter 6 is supplied to the interior space 3. Then, the interior space 3 is cleaned.

Then, as shown in FIGS. 3 and 6, the shelf board 31 in a small space (3b in the illustrated example) for housing the article is pulled out to house the article on the shelf board 31.
The air sent to the internal space 3 is switched so as to flow out of the internal space 3b from the opening of the small space 3b.
Ingress of outside air moisture into b and other small spaces 3a, 3
Suppresses the diffusion of moisture to c and 3d. Further, at the time of storing the article, the article can be easily stored by tilting the front plate 33 of the pulled-out shelf board 31 to the front (arrow in FIG. 3).

Next, the shelf board 31 that has been pulled out is returned to its original state. At this time, as shown in FIG. 4, the shelf board 31 is pushed back while the front board 33 is being laid down (arrow in FIG. 4), and then the front board 33.
(The arrow) causes the front plate 33 to prevent the outside air moisture from being pushed in. In addition, as for the taking in and out of article,
It is also possible to simply pull the front plate 33 forward without pulling out the shelf plate 31.

When the outer door 4 is closed after the articles are stored, the door switch is turned on again, but at this time, the fan 8 does not operate immediately, but operates after a lapse of a predetermined time (several seconds to 2 minutes). On the other hand, when the door 4 is closed, the supply of dry air is started, and during this time, the dry air stored in the positive pressure section 7 is blown out into the interior space 3 by restarting the operation of the fan 8, and the air in the interior space 3 is removed. By replacing all at once, a low humidity atmosphere can be obtained in a short time. Incidentally, when the article is taken out from the clean dry storage box 1, basically the same procedure as the above-mentioned storage is carried out.

(3) Movement of Storage Cabinet The clean dry storage cabinet 1 is moved after accommodating the goods and after confirming that the internal space 3 is below a predetermined humidity.
By stopping the operation of the fan 8 and stopping the supply of dry air, the exhaust relief valve 13a is closed and the invasion of the outside air is suppressed, and the infiltration of moisture from the outside air is suppressed by the porous material in the exhaust pipe 13. Next, the compressed air supply pipe attached to the equipment is removed from the coupler 16, the power cord is disconnected from the outlet, and the clean dry storage 1 is moved quickly.

In the above embodiment, the case where the exhaust pipe 13 is filled with the porous material has been described. However, priority is given to the exhaust efficiency, and only the exhaust relief valve 13a is used without using the porous material to remove the moisture content of the outside air. It can also be configured to suppress intrusion. On the contrary, the exhaust relief valve 13a may be omitted and only the porous material may be configured to suppress the ingress of outside air moisture. In that case, the moisture of the porous material is dissipated by the exhaust during the supply of dry air. The porous material is regenerated.

Further, in the above-mentioned embodiment, the case where each front plate 33 is attached to the front end of the shelf plate 31 is shown, but each front plate 33 can be tilted to the front side in the main body case 2 separately from the shelf plate 31. As described above, the front plate 33 may be tilted and then the shelf plate 31 may be pulled out, or the shelf plate 31 may be fixed. Further, in the above embodiment, the case where the clean dry storage of the present invention is carried out as the mobile clean dry storage 1 having casters at the lower part of the main body case is shown, but the present invention is not limited to this. Instead, it may be implemented as a stationary clean dry storage within the scope of the present invention.

[0030]

As described above in detail, the clean dry storage of the present invention forms a sealed internal space inside the main body case, and an opening / closing door for loading and unloading articles in front of the internal space. On the other hand, a main filter is provided on the back side of the interior space to serve as an outlet for clean air, and an air circulation path and a blower for sending air sucked and recovered from the air recovery port at the bottom of the interior space to the main filter. And a positive pressure portion of the air circulation path on the discharge side of the blower means is provided with an air supply pipeline and an air dryer for dehumidifying and drying compressed air from a pressure source different from the blower means, Moreover, since the exhaust pipe line for discharging the air in the internal space to the outside of the internal space according to the pressure increase in the internal space is provided, it is possible to store the article in a low humidity state while maintaining the internal space at a predetermined cleanliness level. , Semiconductor parts, resin moldings, pharmaceuticals, etc. Movement is possible to store and clean room outside of the article must be avoided the effects of humidity and particle pollution.

In particular, the internal space is kept at a positive pressure only with the supply of compressed air, and the moisture load is kept to a minimum without taking in the outside air. In addition, the air blowing capacity of the air blowing means can be reduced, and basically, the airtightness of the interior space is high, and the cleanliness and low humidity state of the interior space can be maintained without blowing operation for a short time. Since it is not necessary to mount a charger, a converter, or the like, manufacturing and maintenance costs can be reduced, and maintenance is easy.

The exhaust pipe is provided with an exhaust relief valve that opens in response to the pressure increase in the internal space and discharges the air in the internal space to the outside of the internal space. It can prevent invasion and increase in humidity in the interior space due to this, can reduce the frequency of supplying compressed air and reduce the consumption of compressed air, and also has a function as a safety valve that prevents pressurization of the interior space.

Further, even if compressed air for dehumidification is supplied when the blower is stopped, the compressed air is supplied to the discharge side of the blower by a backflow preventive valve which is opened when the blower is blown and closed when the blower is stopped. Does not flow back into the air blowing means, and the air blowing means can be stopped at the time of containing and taking out the article to suppress the ingress of outside air moisture from the air recovery port.

Further, in the clean dry storage of the present invention, the interior space is provided with a plurality of shelves which can be pulled out forward and a partition plate which closes a gap formed behind the shelves when the shelves are pulled out. It is partitioned into a small space, and the small space is further partitioned from the opening / closing door side by a front plate provided at the front end of the shelf board,
In the vicinity of the front end of the shelf board, the slits penetrating the shelf board communicate with each other, and the double door of the outside opening and closing door and the front board of the shelf board enhances the tightness of the interior space. In addition, by closing the shelves where articles are not taken in and out even if the outside opening / closing door is opened, it is possible to suppress the ingress of moisture from the outside air, and at the same time from the shelves pulled out by the partition plate to other shelves. The diffusion of moisture can be prevented.

Further, during storage of the articles, an air curtain airflow is formed by the slits provided near the front end of the shelves, so that the articles to be stored are kept clean and the shelves are pulled out in order to take in and out the articles. First, the air curtain airflow is switched to the airflow that flows out from the drawn-out shelf portion, and suppresses the invasion of outside air moisture and the resulting increase in humidity.

Further, by making the front plate arranged at the front end of the shelf plate foldable to the front side, when the drawn shelf plate is returned to its original position, the shelf plate is pushed back with the front plate laid down, and then By raising the front plate, pushing of outside air moisture by the front plate can be suppressed. Further, the articles can be taken in and out only by pulling the front plate forward without pulling out the shelf plate.

According to the present invention, a humidity sensor is provided in the negative pressure portion of the air circulation passage of the clean dry storage, and when the air collected from the inside reaches a predetermined humidity below the set humidity, the positive pressure of the air circulation passage is increased. By closing the solenoid valve provided in the air supply line to the section to stop the supply of dry air, the control of opening the solenoid valve and restarting the supply of dry air when the collected air exceeds the set humidity The space can be automatically maintained in a predetermined low humidity state, and the amount of compressed air consumed can be reduced.

When the opening / closing door in the front of the interior space is opened, the blowing means is stopped, and the solenoid valve is opened to continue the supply of dry air regardless of the humidity set by the humidity sensor. At the same time, the blowing means is automatically stopped to suppress the ingress of outside air moisture from the air recovery port, and the dry air is supplied to clean the interior space even when the door is opened.

Further, when the opening / closing door in the front of the interior space is once opened and the opening / closing door is closed after the blowing means is stopped, the blowing means is not immediately activated, and the operation of the blowing means is restarted after a lapse of a predetermined time. As a result, dry air is stored in the positive pressure portion of the air circulation path while the air blowing means is stopped, and when the operation of the air blowing means is restarted, the air in the interior space is replaced all at once, and a low humidity atmosphere can be obtained in a short time. Thereby, even if the door is frequently opened and closed, the interior space can be maintained in a low humidity state.

[Brief description of drawings]

FIG. 1 is a side view showing a clean dry storage according to an embodiment of the present invention.

FIG. 2 is a side sectional view showing a clean dry storage according to an embodiment of the present invention.

FIG. 3 is a side sectional view of an essential part showing a process of pulling out a shelf board in the clean dry storage according to the embodiment of the present invention.

FIG. 4 is a side sectional view of an essential part showing a process of returning the shelf board pulled out in the clean dry storage according to the embodiment of the present invention.

FIG. 5 is a side sectional view showing an operation and a flow of air when the door is closed in the clean dry storage according to the embodiment of the present invention.

FIG. 6 is a side sectional view showing the operation and air flow when the door is opened in the clean dry storage according to the embodiment of the present invention.

FIG. 7 is a side sectional view showing an operation and a flow of air when the door is closed / air is stopped in the clean dry storage according to the embodiment of the present invention.

FIG. 8 is a side sectional view showing a conventional clean storage cabinet.

[Explanation of symbols]

1 Clean dry storage 2 body case 3 Inside space 3a, 3b, 3c, 3d Small space 4 doors 5 Clean air outlet 6 Main filter 7 Positive pressure part 8 fans (blowing means) 8a Check valve 9 Air recovery port 11 Negative pressure part 12 Humidity sensor 13 Exhaust pipe 13a Exhaust relief valve 16 coupler 17 Air supply pipe 18 Solenoid valve 21 air dryer 31 shelves 32 partition boards 33 front plate 34 slits

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Chihara Mihara             2-10-20 Aoyagi, Soka-shi, Saitama Japan Air             Inside Tech Co., Ltd. (72) Inventor Ichio Suzuki             2-10-20 Aoyagi, Soka-shi, Saitama Japan Air             Inside Tech Co., Ltd. F-term (reference) 3L058 BE08 BG04                 3L113 AA03 AB09 AC25 AC67 CA09                       CA11 CB37 DA22

Claims (8)

[Claims] 1. A closed interior space is formed inside a main body case, and an opening / closing door for loading and unloading articles is provided on the front side of the interior space, while a main filter is provided on the back side of the interior space. While providing a clean air outlet, an air circulation path and an air blower for sending the air sucked and recovered from the air recovery port at the bottom of the interior space to the main filter, and
An air supply conduit and an air dryer for supplying dehumidified and dried compressed air from a pressure source different from the air supply means are provided in the positive pressure part of the air circulation path on the discharge side of the air supply means, and A clean dry storage cabinet characterized by being provided with an exhaust pipe line for discharging the air in the cabinet space to the outside of the cabinet according to the pressure rise. 2. The clean dry storage cabinet according to claim 1, wherein the exhaust pipe line is provided with an exhaust relief valve that opens in response to a pressure increase in the interior space and discharges air in the interior space to the outside of the interior. 3. On the discharge side of the air blowing means, the air is opened when the air is blown,
The clean dry storage according to claim 1 or 2, further comprising a check valve which is closed when the ventilation is stopped. 4. The interior space is divided into a plurality of small spaces by a shelf plate that can be pulled out forward and a partition plate that closes a gap generated behind the shelf plate when the shelf plate is pulled out. The space is partitioned from the opening / closing door side by a front plate provided at the front end of the shelf plate, and is communicated with each other by a slit penetrating the shelf plate near the front end of the shelf plate. Clean dry storage. 5. The interior space is divided into a plurality of small spaces by a shelf plate, and the small space is separated from the opening / closing door side by a front plate arranged at the front end of the shelf plate, and the front plate is It is attached so that it can be laid down to the front side.
Alternatively, the clean dry storage described in 4. 6. A humidity sensor is provided in the negative pressure part of the air circulation path,
When the air collected from the inside of the storage reaches a specified humidity below the set humidity, the solenoid valve provided in the air supply line to the positive pressure part of the air circulation path is closed to stop the supply of dry air, while collecting the air. 6. The method for controlling a clean dry storage according to claim 1, 2, 3, 4, or 5, wherein when the air exceeds a set humidity, the solenoid valve is opened to restart the supply of dry air. 7. The clean dry storage according to claim 6, wherein when the opening / closing door on the front side of the interior space is opened, the blowing means is stopped and the solenoid valve is opened to continue supplying dry air regardless of the humidity set by the humidity sensor. How to control the warehouse. 8. When the opening / closing door in the front of the interior space is once opened and the opening / closing door is closed after the blowing means is stopped, the blowing means is not immediately actuated, and the operation of the blowing means is restarted after a lapse of a predetermined time. The method for controlling a clean dry storage according to claim 7.