JP2003298387A - Supporting structure for saw resonator - Google Patents

Supporting structure for saw resonator

Info

Publication number
JP2003298387A
JP2003298387A JP2002093683A JP2002093683A JP2003298387A JP 2003298387 A JP2003298387 A JP 2003298387A JP 2002093683 A JP2002093683 A JP 2002093683A JP 2002093683 A JP2002093683 A JP 2002093683A JP 2003298387 A JP2003298387 A JP 2003298387A
Authority
JP
Japan
Prior art keywords
saw
saw oscillator
substrate
oscillator
saw resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2002093683A
Other languages
Japanese (ja)
Inventor
Osamu Eguchi
治 江口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Crystal Device Corp
Original Assignee
Kyocera Crystal Device Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Crystal Device Corp filed Critical Kyocera Crystal Device Corp
Priority to JP2002093683A priority Critical patent/JP2003298387A/en
Publication of JP2003298387A publication Critical patent/JP2003298387A/en
Pending legal-status Critical Current

Links

Landscapes

  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a supporting structure for an SAW (surface acoustic wave) resonator, capable of solving the problem that distortion is generated in the SAW resonator made of a material different from a substrate made of a ceramic, etc., due to the difference in a linear expansion coefficient between a foreign substance, because the resonator is influenced in temperature by heat generated from an oscillator circuit mounted on a lower chamber through the substrate made of the ceramic, etc., or a partition wall, resulting in deteriorations in temperature characteristic and other characteristic of the SAW resonator, in a conventional method for bonding the SAW resonator on the substrate by applying an adhesive on the end of the SAW resonator. <P>SOLUTION: A gap is formed between the SAW resonator and the substrate on which the SAW resonator is mounted, by this supporting structure for SAW resonator. <P>COPYRIGHT: (C)2004,JPO

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術の分野】本発明はSAW(弾性表面
波)振動子の新しい支持構造を提供するSAW振動子の支
持構造に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support structure for an SAW (surface acoustic wave) oscillator, which provides a new support structure for the SAW oscillator.

【0002】[0002]

【従来の技術】従来は、発振回路とSAW振動子とが隔壁
または基板を用いて完全に分離され、それぞれセラミッ
クなどを用いた容器に収容されたいわゆるH型構造をし
たSAW発振器に搭載されるSAW振動子においては、図4の
様に発振器容器の材質にセラミックなどを用いてH型構
造を成したSAW発振器の図4における上方の容器、すな
わち上室の底面となるセラミック基板の上に、SAW振動
子の端部に接着剤を使用して前記のセラミックの基板に
密着するように固着するSAW振動子の支持構造をとるこ
とが一般的であった。
2. Description of the Related Art Conventionally, an oscillator circuit and a SAW oscillator are completely separated by using a partition wall or a substrate, and each is mounted on a SAW oscillator having a so-called H-shaped structure and housed in a container made of ceramic or the like. In the SAW oscillator, as shown in FIG. 4, on the upper container in FIG. 4 of the SAW oscillator in which an H-shaped structure is formed by using ceramic or the like for the material of the oscillator container, that is, on the ceramic substrate that is the bottom of the upper chamber, It was common to use a support structure for the SAW oscillator that is fixed to the ceramic substrate by using an adhesive at the end of the SAW oscillator.

【0003】また、前述のH型構造を成したSAW発振器の
上室に収容されるSAW振動子においては、SAW振動子
の容器の基板材質にセラミックなどを用いてそのセラミ
ック基板上にシールド効果を高めるために導電性の金属
メタライズ層を容器の内面の底板と側面に形成して、そ
の底板平面上にSAW振動子の端部に接着剤を使用してセ
ラミック基板上にSAW振動子を固着し、加えてろう材や
半田や導電性接着剤といった導電性の封止材を用いてリ
ッドと呼ばれる金属製の蓋を搭載してSAW振動子を封
止することが一般的であった。
Further, in the SAW oscillator housed in the upper chamber of the SAW oscillator having the above-mentioned H-shaped structure, ceramic or the like is used as the substrate material of the container of the SAW oscillator, and the shielding effect is provided on the ceramic substrate. In order to raise the height, a conductive metal metallization layer is formed on the bottom plate and side surface of the inner surface of the container, and the SAW oscillator is fixed on the ceramic substrate using an adhesive on the edge of the SAW oscillator on the plane of the bottom plate. In addition, it has been common to mount a metallic lid called a lid using a conductive sealing material such as a brazing material, solder or a conductive adhesive to seal the SAW oscillator.

【0004】H型構造のSAW発振器では、上室に収容され
るSAW振動子と同様に先の図4の様にセラミックなどか
ら成る隔壁または基板を用いて下室には半導体を含む集
積回路(Integrated Circuit)で構成される発振回路が
収容される。上室のSAW振動子と下室の発振回路とはセ
ラミックの隔壁または基板を通して、セラミックの隔壁
または基板のなかに形成される積層メタライズ層を通し
て電気的に接続され、全体としてSAW発振器が構成され
る。
In the H-type SAW oscillator, like the SAW oscillator housed in the upper chamber, a partition or substrate made of ceramic or the like is used as shown in FIG. An oscillator circuit composed of an integrated circuit is housed. The SAW oscillator in the upper chamber and the oscillation circuit in the lower chamber are electrically connected through the ceramic partition or substrate, and through the laminated metallized layer formed in the ceramic partition or substrate, and the SAW oscillator is configured as a whole. .

【0005】[0005]

【発明が解決しようとする課題】しかしながら、近年電
子部品は搭載して使用される機器の小型化に伴っての極
めて急激なその容器形状の外形サイズの小型化、及び低
背化の市場からの要求があり、その結果としてセラミッ
クなどの基板または隔壁の厚さも極力薄くなっているの
が現状である。
However, in recent years, electronic parts are mounted on the market, and the size of the outer shape of the container is drastically reduced with the downsizing of the equipment to be used. There is a demand, and as a result, the thickness of the substrate such as ceramic or the partition wall is as thin as possible.

【0006】その為に、従来のSAW振動子のセラミック
基板上へのSAW振動子の端部に接着剤を使用してセラミ
ック基板上にSAW振動子を基板に密着するように固着す
るといった方法では、セラミックなどから成る基板また
は隔壁を通して下室に搭載される発振回路の発熱による
温度的な影響を受け、セラミックなどの基板とは異なる
材質から成るSAW振動子に、異物質の線膨張係数の差か
ら生じる歪みが発生し、その結果としてSAW振動子の温
度特性やその他の特性が悪化するという問題があった。
Therefore, in the conventional method of using an adhesive agent at the end portion of the SAW oscillator on the ceramic substrate of the SAW oscillator and fixing the SAW oscillator on the ceramic substrate so as to be in close contact with the substrate. The difference in the linear expansion coefficient of different substances is caused by a SAW oscillator made of a material different from that of the substrate, such as ceramic, which is affected by the temperature of the oscillator circuit mounted in the lower chamber through the substrate or partition made of ceramic, etc. However, there is a problem in that the temperature characteristics and other characteristics of the SAW oscillator deteriorate as a result.

【0007】本発明は、このような技術的背景のもとで
なされたものである。したがって本発明の目的は、先述
の問題を解決するSAW振動子の新しい支持構造を提供す
ることである。
The present invention has been made under such a technical background. Therefore, it is an object of the present invention to provide a new support structure for a SAW oscillator which solves the above mentioned problems.

【0008】[0008]

【課題を解決するための手段】上記の目的を達成するた
めに、本発明はSAW振動子とSAW振動子が搭載される基板
のあいだに隙間をもつことを特徴とする。
To achieve the above object, the present invention is characterized in that a gap is provided between a SAW oscillator and a substrate on which the SAW oscillator is mounted.

【0009】また、本発明は前記のSAW振動子と前記の
基板のあいだの隙間がアルミナセラミックスもしくはガ
ラスもしくは金属より成る第1の凸部でつくられ、前記
SAW振動子の長手方向の前記第1の凸部に対向する前記
のSAW振動子の端部にシリコン系樹脂などから成る第2
の凸部をもつことを特徴とする。
According to the present invention, the gap between the SAW oscillator and the substrate is made of a first convex portion made of alumina ceramic, glass or metal.
A second end made of silicon resin or the like at the end of the SAW oscillator facing the first convex portion in the longitudinal direction of the SAW oscillator.
It is characterized by having a convex part of.

【0010】さらに、本発明は前記第1の凸部の厚さが
40μm〜200μm程度であり、かつ第1と第2の凸部がそ
れぞれ前記SAW振動子の長手方向の端部で前記SAW振動子
に形成される反射器幅の二分の一の位置よりも外側に在
ることを特徴とする。
Further, according to the present invention, the thickness of the first convex portion is
40 μm to 200 μm, and the first and second convex portions are located outside the half of the width of the reflector formed on the SAW oscillator at the longitudinal ends of the SAW oscillator. It is characterized by being present.

【0011】[0011]

【本発明の実施の形態】以下、添付の図面を参照しなが
ら、本発明の実施の一形態について説明する。なお、各
図においての同一の符号は同じ対象を示すものとする。
DETAILED DESCRIPTION OF THE INVENTION An embodiment of the present invention will be described below with reference to the accompanying drawings. The same reference numerals in each drawing indicate the same object.

【0012】図1は本発明の、基板1の表裏に発振回路
2とSAW振動子3を設けて、かつ基板1の表裏から形成
した壁4で容器構造を成すSAW発振器6において、前記
のSAW振動子3と前記の基板1とのあいだに隙間5をも
たせたSAW発振器6の構造を示す概略の側面図である。
FIG. 1 shows an SAW oscillator 6 according to the present invention in which an oscillation circuit 2 and a SAW oscillator 3 are provided on the front and back of a substrate 1, and a wall 4 formed from the front and back of the substrate 1 forms a container structure. FIG. 3 is a schematic side view showing the structure of a SAW oscillator 6 in which a gap 5 is provided between the vibrator 3 and the substrate 1.

【0013】図1のように、H型構造をしたSAW発振器6
では、上室に収容されるSAW振動子3とセラミックなど
から成る基板1を用いて下室には半導体を含む集積回路
で構成される発振回路2が収容される。上室のSAW振動
子3と下室の発振回路2とはそれぞれワイヤー13を介
し、セラミックの基板1を通して形成される積層メタラ
イズ層で電気的に接続され、全体としてSAW発振器6が
構成される。また上室と下室は、それぞれ蓋12により
気密的に封止される。
As shown in FIG. 1, an SAW oscillator 6 having an H-shaped structure
In the above, the SAW oscillator 3 housed in the upper chamber and the substrate 1 made of ceramic or the like are used, and the oscillator circuit 2 composed of an integrated circuit containing a semiconductor is housed in the lower chamber. The SAW oscillator 3 in the upper chamber and the oscillating circuit 2 in the lower chamber are electrically connected to each other via wires 13 by a laminated metallization layer formed through the ceramic substrate 1, and the SAW oscillator 6 is configured as a whole. The upper chamber and the lower chamber are hermetically sealed by the lid 12.

【0014】本発明は、図1のように絶縁体であるアル
ミナセラミックスもしくはガラスもしくは金属より成る
第1の凸部7により、基板1とSAW振動子3の下面との
あいだに40μm〜200μm程度の隙間5をもたせる。ま
た同時にシリコン系樹脂など軟らかな材質から成る第2
の凸部8を形成する。この第2の凸部8は、第1の凸部
7によってSAW振動子を片持ちの状態で支持した形のSAW
振動子3に衝撃が加わった場合その衝撃を緩和する働き
をもつものである。この第2の凸部8の厚さは基板1と
SAW振動子3の下面とのあいだの本発明の隙間5と同じ
間隔40μm〜200μm程度のものである。
According to the present invention, as shown in FIG. 1, the first convex portion 7 made of an alumina ceramic, glass or metal which is an insulator has a thickness of about 40 μm to 200 μm between the substrate 1 and the lower surface of the SAW vibrator 3. Make a gap 5. At the same time, a second material made of a soft material such as silicone resin is used.
The convex portion 8 is formed. The second convex portion 8 is a SAW oscillator in a cantilevered state supported by the first convex portion 7.
When a shock is applied to the vibrator 3, it has a function of alleviating the shock. The thickness of this second convex portion 8 is the same as that of the substrate 1.
The gap between the lower surface of the SAW oscillator 3 and the gap 5 of the present invention is about 40 μm to 200 μm.

【0015】第1の凸部7と第2の凸部8は、それぞれ
SAW振動子3長手方向の両端部の下部に位置する。 図2
はSAW発振器6の上室に収容されるSAW振動子3のSAW振
動子の概略の上面図である。SAW振動子にはIDT10の左
右に反射器9が形成されているが、本発明において第1
の凸部7と第2の凸部8は図3のSAW振動子の斜視図に
図示されている反射器9の幅の二分の一の位置よりもSA
W振動子の長手方向の端部の下部に位置する。また、SAW
振動子は非導電性のエポキシ系樹脂の固定用接着剤11
により第1の凸部7上に固定されるが、この時この固定
用接着剤11はSAW振動子上のパターン、即ち図2及び
図3の反射器9にはかからない振動子チップ端部に塗布
する。
The first convex portion 7 and the second convex portion 8 are respectively
The SAW oscillator 3 is located below both ends in the longitudinal direction. Figure 2
FIG. 3 is a schematic top view of the SAW oscillator of the SAW oscillator 3 housed in the upper chamber of the SAW oscillator 6. Reflectors 9 are formed on the left and right sides of the IDT 10 on the SAW oscillator.
The convex portion 7 and the second convex portion 8 of the SAW are closer to the SA than the half position of the width of the reflector 9 shown in the perspective view of the SAW oscillator of FIG.
It is located below the longitudinal end of the W oscillator. Also, SAW
The vibrator is a non-conductive epoxy resin fixing adhesive 11
The fixing adhesive 11 is applied to the pattern on the SAW vibrator, that is, to the end of the vibrator chip that does not hang on the reflector 9 of FIGS. To do.

【0016】本実施例は、下室に半導体を含む集積回路
(Integrated Circuit)で構成される発振回路を搭載し
たH型構造をしたSAW発振器におけるSAW振動子の支持構
造として説明したが、図1のようなSAW振動子単体にお
いてのSAW振動子の支持構造が本発明の技術的範囲には
いることは言うまでもない。
In the present embodiment, the SAW oscillator supporting structure in the SAW oscillator having the H-shaped structure in which the oscillation circuit constituted by the integrated circuit including a semiconductor is mounted in the lower chamber has been described. It goes without saying that such a support structure of the SAW vibrator in the SAW vibrator alone falls within the technical scope of the present invention.

【0017】[0017]

【発明の効果】本発明により、H型構造をしたSAW発振器
において下室に収容されたICを含む発振回路の発熱によ
る上室に収容されるSAW振動子への基板または隔壁を通
した温度的な影響を大幅に軽減することが可能となっ
た。
According to the present invention, in the SAW oscillator having the H-shaped structure, the temperature of the SAW oscillator housed in the upper chamber due to the heat generated by the oscillation circuit including the IC housed in the lower chamber is passed through the substrate or the partition wall. It has become possible to significantly reduce the impact.

【0018】また、本発明によりセラミックなどの基板
とは異なる材質から成るSAW振動子に異物質の線膨張係
数の差から生じる歪みが発生し、その結果としてSAW振
動子の温度特性やその他の特性を悪化するという問題を
解決するSAW振動子の支持構造を実現することが出来
た。
Further, according to the present invention, the SAW vibrator made of a material different from that of the substrate such as ceramics is distorted due to the difference in the linear expansion coefficient of different substances, and as a result, the temperature characteristics and other characteristics of the SAW vibrator are generated. We were able to realize a support structure for the SAW oscillator that solves the problem of aggravation.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明であるSAW振動子の支持構造をしめす概
略の側面図である。
FIG. 1 is a schematic side view showing a support structure for a SAW oscillator according to the present invention.

【図2】本発明を含むSAW発振器の構造を示す概略の側
面図である。
FIG. 2 is a schematic side view showing the structure of a SAW oscillator including the present invention.

【図3】SAW振動子の概略の上面図である。FIG. 3 is a schematic top view of a SAW oscillator.

【図4】SAW振動子の概略の斜視図である。FIG. 4 is a schematic perspective view of a SAW vibrator.

【図5】従来のSAW発振器の構造を示す概略の側面図で
ある。
FIG. 5 is a schematic side view showing the structure of a conventional SAW oscillator.

【符号の説明】[Explanation of symbols]

1 基板 3 SAW振動子 5 隙間 7 第1の凸部 8 第2の凸部 9 反射器 1 substrate 3 SAW transducer 5 gap 7 First convex part 8 Second convex part 9 reflector

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】SAW振動子であって、該SAW振動子と該SAW
振動子が搭載される基板のあいだに隙間をもつことを特
徴とするSAW振動子の支持構造。
1. A SAW oscillator, comprising the SAW oscillator and the SAW oscillator.
SAW oscillator support structure characterized by having a gap between the substrates on which the oscillator is mounted.
【請求項2】請求項1に記載の該SAW振動子と該基板の
あいだの隙間が第1の凸部でつくられ、該SAW振動子の
長手方向の該第1の凸部に対向する該SAW振動子の端部
に第2の凸部をもつことを特徴とするSAW振動子の支持
構造。
2. A gap between the SAW oscillator according to claim 1 and the substrate is formed by a first convex portion, and the gap faces the first convex portion in the longitudinal direction of the SAW oscillator. A support structure for an SAW oscillator, characterized in that it has a second convex portion at the end of the SAW oscillator.
【請求項3】請求項2に記載の該第1の凸部の厚さが40
μm〜200μm程度であり、かつ該第1と該第2の凸部
がそれぞれ該SAW振動子の長手方向の端部で該SAW振動子
に形成される反射器の幅の二分の一の位置よりも外側に
在ることを特徴とするSAW振動子の支持構造。
3. The thickness of the first convex portion according to claim 2,
from about half the width of the reflector formed on the SAW oscillator at the longitudinal ends of the SAW oscillator. SAW oscillator support structure characterized by being on the outside.
JP2002093683A 2002-03-29 2002-03-29 Supporting structure for saw resonator Pending JP2003298387A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2002093683A JP2003298387A (en) 2002-03-29 2002-03-29 Supporting structure for saw resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002093683A JP2003298387A (en) 2002-03-29 2002-03-29 Supporting structure for saw resonator

Publications (1)

Publication Number Publication Date
JP2003298387A true JP2003298387A (en) 2003-10-17

Family

ID=29386806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002093683A Pending JP2003298387A (en) 2002-03-29 2002-03-29 Supporting structure for saw resonator

Country Status (1)

Country Link
JP (1) JP2003298387A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012160963A (en) * 2011-02-01 2012-08-23 Kyocera Crystal Device Corp Saw oscillator
JP2016139896A (en) * 2015-01-27 2016-08-04 京セラクリスタルデバイス株式会社 Package for mounting piezoelectric element and piezoelectric device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012160963A (en) * 2011-02-01 2012-08-23 Kyocera Crystal Device Corp Saw oscillator
JP2016139896A (en) * 2015-01-27 2016-08-04 京セラクリスタルデバイス株式会社 Package for mounting piezoelectric element and piezoelectric device

Similar Documents

Publication Publication Date Title
US5250870A (en) Ultra-thin surface mount crystal package
JP2004343541A (en) Tuning fork piezoelectric vibrating reed and tuning fork piezoelectric vibrator
JP2008131549A (en) Quartz oscillation device
JP2009267888A (en) Crystal resonator and crystal oscillator
JP2004229255A (en) Crystal oscillator ceramic package
US7116039B2 (en) Crystal unit and holding structure of crystal unit
JP2006303761A (en) Surface mount piezoelectric oscillator
JP2003298387A (en) Supporting structure for saw resonator
JP2020123874A (en) Vibrator, and oscillator
JP2002171150A (en) Structure of package of piezoelectric device
KR100501194B1 (en) crystal oscillator
JP2002026656A (en) Saw oscillator
JP2003298388A (en) Supporting structure for saw resonator and oscillator using the same
JP2002158557A (en) Holding structure for piezoelectric vibrating device
JP4587730B2 (en) Piezoelectric vibrator storage package and piezoelectric device
JP2003133886A (en) Crystal oscillator
JP4587728B2 (en) Piezoelectric vibrator storage package and piezoelectric device
JP4587727B2 (en) Piezoelectric vibrator storage package and piezoelectric device
JP2004328553A (en) Package for electronic components and piezoelectric vibration device using the package
JP2006041924A (en) Package for housing piezoelectric resonator, and piezoelectric device
JP7462882B2 (en) Piezoelectric vibrator and its manufacturing method
JP2004356912A (en) Surface mount type piezoelectric oscillator
JP7312060B2 (en) Circuit board with surface mount crystal oscillator
JP7094777B2 (en) Pedestal, oscillator and oscillator for vibrating elements
JP2007142947A (en) Surface-mounting piezoelectric oscillator

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050324

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20070511

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070515

A521 Written amendment

Effective date: 20070717

Free format text: JAPANESE INTERMEDIATE CODE: A523

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20070911