JP2003289178A - Method of forming conductive pattern - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of forming conductive pattern by which fine wiring (circuit) that is excellent in durability and conductive stability and is free from disconnection can be formed easily. <P>SOLUTION: On a hydrophobic substrate, a hydrophilic pattern is formed by immobilizing a hydrophilic polymer having a photoactive group in its side chain or end on a hydrophobic polymer-containing layer, by bringing a composition containing the hydrophilic polymer into contact with the hydrophobic polymer-containing layer, and imparting energy in an image-like state. Then the hydrophilic pattern is caused to adsorb a conductive material. <P>COPYRIGHT: (C)2004,JPO

Description

DETAILED DESCRIPTION OF THE INVENTION [0001] BACKGROUND OF THE INVENTION 1. Field of the Invention
Concerning the method, especially excellent conductivity and durability and conductivity stability
The pattern can be easily formed and the fine wiring board
The present invention relates to a method for forming a conductive pattern useful for formation. [0002] Conventionally, various conductive pattern materials have been used for wiring.
Used to form substrates. These representative ones
Is formed on the insulator by a known method such as vacuum deposition.
A thin film conductive material and resist processing it
Part of the resist prepared in advance by pattern exposure
After that, an etching process is performed to obtain a desired pattern.
At least four steps.
In short, when performing wet etching,
Since a waste liquid treatment process is also required,
I couldn't help it. As another pattern forming method
As for conductive pattern material using photoresist
Are known. This method uses a photoresist polymer
Apply or paste photoresist on dry film
The exposed substrate is UV exposed through an arbitrary photomask,
It is a method of forming a pattern such as a lattice, and it has high conductivity.
It is useful for forming an electromagnetic wave shield that requires high performance. Near
Progress of micromachine development and further miniaturization of VLSI
Along with the development of molds, these wiring structures are also finer in the nano unit.
The conventional metal etch has come to be required
There is a limit to miniaturization, and during thin line processing
There is also concern about disconnection. For this reason, finely controlled orientation
A method for forming a dense pattern has been desired. On the other hand, as a conductive pattern material in recent years,
Without using masks from digitized data
Direct pattern formation methods have attracted attention and various proposals have been made.
It is coming. Such digitized pattern formation
If a method is used, a fine pattern is arbitrarily formed.
It is expected. One such method is
Examples include a method using a self-assembled monolayer. this is,
When the substrate is immersed in an organic solvent containing surfactant molecules,
It uses molecular assemblies that form spontaneously, for example
For example, organosilane compounds and SiO₂, Al₂O_ThreeWith the substrate
Combination or combination of alcohol or amine and platinum substrate
Pattern formation by optical lithography
Is possible. Such monolayers are in the form of fine patterns.
Possible, but limited substrate and material combinations
Difficult to deploy to actual applications
However, there is no fine wiring pattern formation technology suitable for practical use.
It is not established yet. Furthermore, it is lightweight, flexible and environmentally friendly.
Organic using conductive polymer pattern from the viewpoint of
Research on transistors etc. has been done, but this
Supports using such organic materials are light, thin and flexible.
Flexible and easy for large area devices (printing at room temperature
It can be created with the same technology). these
The characteristics of the newly developed organic semiconductor, electric
Combined with the properties and optical properties,
Information parsing, which is most needed in information technology
Sonarization technology, for example, simple information processing function
Wearable mobile terminal with friendly input / output function
Can be expected to create new developments
The However, all have durability, large area, conductive stability,
It is not enough from a practical point of view such as manufacturing suitability.
It was. [0005] Disadvantages of the above prior art
The purpose of the present invention made in consideration of durability and stability
Easily form fine wiring (circuits) with excellent electrical characteristics and no disconnection
Provided is a conductive pattern forming method that can be formed
There is. [0006] [Means for Solving the Problems] The present inventors have made extensive studies.
As a result, a hydrophilic polymer having a photoactive group is exposed and heated.
To be fixed on the support by applying energy such as
The above-mentioned purpose is achieved by taking advantage of
As a result, the present invention has been completed. Snow
That is, the conductive pattern forming method of the present invention is a hydrophobic support.
On the parent having a photoactive group at least in the side chain or terminal
The composition containing the aqueous polymer is contacted and image-wise
The hydrophilic on the hydrophobic polymer-containing layer
Immobilize the polymer to form a hydrophilic pattern,
It is characterized by adsorbing a conductive material on the conductive pattern
The The conductive pattern forming method of the present invention is desired.
A hydrophobic polymer-containing layer is formed on the support substrate of
Alternatively, the hydrophobic polymer-containing layer itself is used as a support.
Composition comprising a hydrophilic polymer having a photoactive group
The hydrophilic polymer-containing group
Hydrophilic polymer by contacting the composition on the substrate by coating method
Since the inclusion layer can be formed, all physical properties are supported.
It can also be applied to a holder and is easy to manufacture. This conductive
By applying energy to the pattern forming material,
The side chain or terminal photoactive group of the aqueous polymer is decomposed and
Hydrophobic support surface by generating energy and applying energy
Directly bonded to active sites generated on the surface or hydrophilic polymer
The photoactive groups in the side chains of each other undergo a cross-linking reaction and are firmly bonded
Therefore, a hydrophilic pattern with excellent durability is formed
It is considered a thing. On the other hand, energy is not given
Unreacted polymer can be easily cleaned by washing the exposed area with water.
And the hydrophobic support surface is exposed to form a hydrophobic region.
Become. The conductive material used in the present invention is selected.
It has the property of selectively adsorbing to hydrophilic regions and is hydrophilic
The conductive material is adsorbed on the region to become a conductive region, which is hydrophobic
Conductive material is not adsorbed in the conductive region and becomes a non-conductive region.
Thus, a conductive pattern (circuit) is formed. For the present invention
The conductive material used is a functional group in the hydrophilic polymer.
Strongly ionically adsorbed, monomolecular film or polymer layer
The part where the conductive region is formed has a high strength.
It is thought that it has a degree and a conductive stability. [0009] DETAILED DESCRIPTION OF THE INVENTION [Hydrophobic Support] Conductivity of the Present Invention
The patterning method comprises at least a side on a hydrophobic support
Contains a hydrophilic polymer with a photoactive group at the chain or end
The composition to be brought into contact and image-wise energy
To form a hydrophilic pattern. Where the hydrophobic support and
The main component is hydrophobic polymer, and surface hydrophobicity
If it shows, there will be no restriction in particular, on a desired support substrate
Forming a hydrophobic polymer-containing layer or hydrophobic
The polymer-containing layer itself can also serve as a support. As a hydrophobic polymer applicable to the present invention
Polyethylene, polypropylene, polystyrene, two
Cellulose acetate, cellulose triacetate, propionic acid cell
Loin, cellulose butyrate, cellulose acetate butyrate, cellulose nitrate
Roulose, polyethylene terephthalate, polycarbonate
, Polyvinyl acetal, polyurethane, epoxy
Resin, polyester resin, acrylic resin, polyimide tree
Fats, etc., which are molded into a film
As a support (also includes a hydrophobic polymer-containing layer)
May be used. In addition, the above-mentioned substrate may be formed on another desired support substrate.
Such a hydrophobic polymer-containing layer can also be formed. Book
As a support substrate applicable to the invention, it is dimensionally stable.
If it is a plate-shaped object, there will be no restriction | limiting in particular, For example, paper, a metal plate
(For example, aluminum, zinc, copper, etc.), gold as described above
This includes paper with a genus laminated or vapor-deposited. This
To form the hydrophobic polymer-containing layer on the support substrate of
The film may be formed into a film by applying a known method.
A method of laminating a hydrophobic polymer
A melt extrusion method or the like can be used. Used in the present invention
As the support, polyester film or aluminum
Preferable plate, among which the hydrophobic polymer is contained
Polyester film that can also serve as a layer is particularly preferred
Good. [Formation of hydrophilic pattern] (Hydrophilic polymer having a photoactive group) Conductive buffer of the present invention
The turn forming method comprises at least the hydrophobic support on the hydrophobic support.
Contains hydrophilic polymer with photoactive group in side chain or terminal
The composition to be contacted to impart imagewise energy.
And form a hydrophilic pattern. Such hydrophilic patterns
A parent with a photoactive group used to form
To obtain an aqueous polymer, a general hydrophilic polymer
A photoactive group may be introduced. The general hydrophilic polymer in the present invention and
Is obtained by polymerizing the following hydrophilic monomers:
Can be applied. As such a hydrophilic monomer
(Meth) acrylic acid or its alkali metal salt
And amine salts, itaconic acid or alkali metal salts thereof
And amine salt, 2-hydroxyethyl (meth) acryl
Rate, (meth) acrylamide, N-monomethylol
(Meth) acrylamide, N-dimethylol (meth) a
Kurylamide, allylamine or its halogenated water
Borate, 3-vinylpropionic acid or its alkali
Metal salts and amine salts, vinyl sulfonic acid or its
Alkali metal salts and amine salts, 2-sulfoethyl (medium
) Acrylate, polyoxyethylene glycol mono
(Meth) acrylate, 2-acrylamide-2-methyl
Ruprobansulfonic acid, acid phosphooxypolyoxy
Such as polyethylene glycol mono (meth) acrylate
Carboxyl group, sulfonic acid group, phosphoric acid group, amino group
Or their salts, hydroxyl groups, amide groups and ether groups
And other monomers having a hydrophilic group. One above
Typical hydrophilic polymers include these hydrophilic monomers.
Homopo obtained using at least one selected from
Limer or copolymer with two or more types copolymerized
May be selected according to the purpose. When copolymerizing
May be random copolymerization or block copolymerization. The photoactive group in the present invention is 150 nm.
Decomposed by light irradiation in the region of ~ 1200nm,
Refers to the group that generates Specifically, light nitrene is emitted.
Azide group generated, and dia which generally generates radicals by light
Zo group, benzophenone group, trichloromethyl group, α-
Droxyacetophenone group, α-alkoxyacetophene
Non group etc. are mentioned. These photoactive groups can be
As a method for introducing into a remer, a compound having a photoactive group is used.
A method of reacting a product with the hydrophilic polymer.
Or Macromolecules 1997 3
The method described in 0,7001 (Ito et al.) Is used.
be able to. Examples of compounds having a photoactive group include
And azo compounds. Also photoactive
A hydrophilic group in a hydrophilic polymer having a group, and a photoactive group
As a composition ratio of 10^Five: 1 to 1:10 are preferable,
10^Four: 1-1: 1 are more preferable. In addition, these
The composition ratio is determined by the above general hydrophilic polymer during synthesis.
Adjust the amount of compound with photoactive group to
Can be controlled. Also, in the present invention
The position where the photoactive group is introduced can be either the side chain or the terminal.
The terminal is preferred from the viewpoint of hydrophilic expression. here
A hydrophilic polymer in which a photoactive group is introduced into a side chain or a terminal.
Specific examples (hydrophilic polymer 1 to hydrophilic polymer 14)
Are shown below together with the composition ratio, but the present invention is not limited to these.
Is not something [0015] [Chemical 1] [0016] [Chemical 2]Hydrophilic polymer having such a photoactive group
-Can be synthesized by a known method. As an example,
A synthesis example of the hydrophilic polymer 12 of the above specific example is shown below.
The Acrylamide 30g, 3-mercaptopropion
After dissolving 3.8 g of acid in 70 g of ethanol, under a nitrogen atmosphere
The temperature was raised to 60 ° C. and AIBN (2,2-azobisisobutyrate
Runitrile) 300 mg was added and reacted for 6 hours. reaction
The white precipitate was then filtered, washed thoroughly with methanol, and the terminal carbo
28.7 g of acid acrylamide polymer was obtained (acid value
0.787 meq / g molecular weight 1.29 × 10^Three). Above
20 g prepolymer and 0.2 g 4-azidoaniline
And WSC (water-soluble carbodiimide, Wako Pure Chemical Industries, Ltd.)
(Compared with 0.45 g) of water (200 g), hydrochloric acid water and water
The pH was adjusted to 7.0 with an aqueous sodium oxide solution. Room
After stirring for 48 hours at temperature, the reaction solution is cellulose film
Dialysis was performed for 48 hours. Then, the reaction solution is
In addition to seton, the polymer is precipitated, washed well and the end
Azido acrylamide polymer (hydrophilic polymer 1
2) 18.4 g (molecular weight 1.68 × 10^Three) Na
About other hydrophilic polymers with photoactive groups
Can be synthesized in the same way by changing the starting materials.
it can. The hydrophilic polymer having a photoactive group is
Dissolved in a solvent and used as a hydrophilic polymer-containing composition
The The solvent used is the hydrophilic polymer as the main component
Is not particularly limited as long as it is soluble, but water, water-soluble solvents, etc.
Any aqueous solvent is preferred. These mixtures contain solvent
In order to improve coatability and adhesion as well as surfactants
A known additive such as can be used in combination. Water soluble
Agent refers to a solvent that is miscible with water in any proportion.
Examples of such water-soluble solvents include methanol and ethanol.
Propanol, ethylene glycol, glycerin
Alcohol solvents such as acetic acid, acids such as acetic acid, acetone
Ketone solvents, amide solvents such as formamide,
And so on. If necessary, it can be added to the solvent.
The surfactant only needs to be soluble in the solvent.
Examples of such surfactants include n-dodecylben.
Anionic surfactants such as sodium zensulfonate
Or n-dodecyltrimethylammonium chloride
Cationic surfactant such as polyoxyethylene nonyl
Phenyl ethers (for example, commercially available
910, manufactured by Kao Corporation, etc.), polyoxyethylene
Rubitan monolaurate (commercially available products such as
Product name "Tween 20", etc.), polyoxyethylene laur
Nonionic surfactants such as ril ether
The When contacting the composition in a liquid state, it is optional.
The hydrophilic polymer composition can be applied by a coating method.
The coating amount when forming the coating layer is 0.1 to 0.1 in terms of solid content.
10 g / m²Is preferred, in particular 1 to 5 g / m²Is preferred
Yes. 0. lg / m²If it is less than 1, sufficient surface hydrophilicity can be obtained.
10g / m²Uniform coating film exceeding
Is not preferred because it is difficult to obtain. (Energy Application) In the method of the present invention
Energy applying method for forming the hydrophilic pattern
There is no particular limitation on the photoactive group, and the
If desired, an active site is generated on the surface of the hydrophobic polymer-containing layer.
Energy capable of binding to a hydrophilic polymer having a photoactive group
If it is a method that can provide rugi, either exposure or heating
This method can also be used, but is it from the viewpoint of cost and simplicity of equipment?
And the like are preferably irradiated with actinic rays. For image-like exposure
When applying actinic radiation, it is based on digital data.
Scan exposure, pattern exposure using lith film
These can also be used. For forming the hydrophilic pattern
As a method of writing, it is possible to write by radiation irradiation such as heating and exposure.
There is a method of performing the indentation. For example, infrared
The light from the UV lamp, visible light, γ rays
Which electron beam irradiation, thermal recording with thermal head, etc.
Is possible. As these light sources, for example, mercury
Lamp, metal halide lamp, xenon lamp, chemical
There are lamps and carbon arc lamps. As radiation,
There are electron beams, X-rays, ion beams, far-infrared rays, and the like. Ma
G-line, i-line, Deep-UV light, high-density energy beam
A laser beam is also used. Commonly used
As a specific mode, a thermal recording head or the like directly
Image-like recording, infrared laser scanning exposure, xenon release
High-illuminance flash exposure such as electric lamps and infrared lamp exposure
Are preferred. Computer digital data
To perform direct image formation by laser exposure
It is preferable to apply energy. With laser
Carbon dioxide laser, nitrogen laser, Ar laser, H
e / Ne laser, He / Cd laser, Kr laser, etc.
Body laser, liquid (pigment) laser, ruby laser, Nd /
Solid state laser such as YAG laser, GaAs / GaAlA
s, semiconductor laser such as InGaAs laser, KrF laser
The, XeCl laser, XeF laser, Ar₂Exci
A ma laser or the like can be used. Above all, wavelength 7
A semiconductor laser emitting an infrared ray of 00 to 1200 nm,
Exposure by solid high power infrared laser such as YAG laser
Is preferred. After this, unexposed by washing with water
Part of the polymer is dissolved and removed. In this way, Enel
In the Gee imparting region, a hydrophilic polymer having a photoactive group is added.
Thus a hydrophilic pattern is formed and energized.
In areas where the hydrophobic polymer-containing layer is exposed
It becomes a hydrophobic region. [Conductive Material] In the present invention, the above
Adsorbing conductive material to the obtained hydrophilic pattern
A conductive pattern is obtained and a circuit is formed. In addition,
As a method for adsorbing such a conductive material, (A) the above
A method of adsorbing conductive fine particles on the hydrophilic pattern;
(B) Forming a conductive polymer layer on the hydrophilic pattern
And a method for appropriately selecting according to the application.
Can be. Below, how to absorb these conductive materials
The method will be described in detail. (A) Adsorption of conductive fine particles The conductive material adsorption method (A) in the present invention is as follows.
The conductive fine particles described are hydrophilic with the above photoactive group
The functional group in the polymer (hydrophilic pattern)
Accordingly, it is a method of ionically adsorbing. Adsorb here
The molecules are firmly fixed in a state close to a monolayer.
Therefore, even a small amount has sufficient conductivity and can be applied to fine circuits.
Has the advantage of gaining. Conductivity applicable to this method
Fine particles are particularly limited as long as they have conductivity
Randomly select fine particles made of known conductive materials
Can be used. For example, Au, Ag, Pt,
Metal fine particles such as Cu, Rh, Pd, Al, Cr, In
₂O_Three, SnO₂, ZnO, Cdo, TiO₂, CdIn₂
O_Four, Cd₂SnO₂, Zn₂SnO_Four, In₂O_Three-ZnO
Oxide semiconductor fine particles
Fine particles using a material doped with a material, MgIn
Spinel compound fine particles such as O and CaGaO, Ti
Conductive nitride fine particles such as N, ZrN, HfN, LaB
Conductive boride fine particles such as, and organic materials
Suitable examples include conductive polymer fine particles.
The -Hydrophilic compound binding type hydrophilic group electrode
Between conductivity and conductive fine particles The hydrophilic region obtained in the present invention is a carboxyl group,
Anio such as sulfonic acid group or phosphonic acid group
The pattern portion is selectively negatively charged.
And has a positive charge here (Kachio
Conductive region by adsorbing conductive fine particles
(Wiring) is formed. Such cationic conductive fine particles are used.
Examples include positively charged metal (oxide) particles.
It is done. Fine particles with high density and positive charge on the surface
For example, the method of Toru Yonezawa et al. Yonezaw
a, Chemistry Letters. , 1999
  page 1061, T.I. Yonezawa, Lang
umir 2000, vol16,5218 and rice
Toru Sawa, Polymerpreprints, Japan
  vol. Those described in 49.2911 (2000)
Can be created by law. Yonezawa et al. Metal-sulfur bond
And chemically modified with a positively charged functional group at high density
It shows that the surface of the metal particles formed can be formed. On the other hand, the hydrophilic region obtained is disclosed in
Such as the ammonium group described in Japanese Patent No. 296895.
If it has a cationic group, the pattern part is selectively
Has a positive charge, and here has a negative charge
Conductive area (wiring) by adsorbing conductive fine particles
Is formed. Negatively charged metal particles include citric acid
The gold or silver particles obtained by reduction can be mentioned.
The Particle size of conductive fine particles used in the present invention
Is preferably in the range of 0.1 nm to 1000 nm.
Preferably, it is in the range of 1 nm to 100 nm.
Is preferred. When the particle size is smaller than 0.1 nm,
Conductivity caused by continuous contact between particles
Tends to decrease. Also larger than 1000nm
The adhesion between the hydrophilic surface and the particles decreases, and
The strength of the sex region tends to deteriorate. These fine particles are composed of hydrophilic groups on the hydrophilic surface.
In view of durability, the maximum amount that can be adsorbed on
That's right. From the viewpoint of ensuring conductivity, the dispersion concentration of the dispersion liquid
The degree is preferably about 0.001 to 20% by weight. Method for adsorbing conductive fine particles on hydrophilic group
As an example, a conductive fine particle having a charge is dissolved or dissolved on the surface.
Has an image-like hydrophilic pattern.
A method of applying to the surface of the support, and solutions or
A support with an image-like hydrophilic pattern formed in the spray.
The method of immersing is mentioned. Either application or immersion
Even in the case of supplying an excessive amount of conductive fine particles,
In order to introduce sufficient ionic bonds during
Contact time between solution or dispersion and pattern forming material surface
Is preferably about 10 seconds to 24 hours.
More preferably, it is about 180 minutes. There are not only one kind of conductive fine particles, but if necessary
Multiple types can be used together. Also, the desired conductivity
It is also possible to use a mixture of multiple materials in advance in order to obtain performance
it can. (B) Formation of conductive polymer layer The conductive material adsorption method (B) in the present invention is as follows.
Conductive monomers that are precursors of conductive polymers to be described
In the hydrophilic polymer having the photoactive group (hydrophilic polymer).
Ionic adsorption to the functional group of the
Causes a reaction to form a polymer layer (conductive polymer layer)
It is a method to do. Conductive polymer obtained in this way
-Layer is strong and excellent in durability, monomer supply rate, etc.
It is possible to form a very thin film by adjusting the conditions of
And even for thin films, it is uniform and the film thickness is uniform.
It has the advantage of being. Conductivity applicable to this method
As a conductive polymer, 10^-6s · cm^-1Above, preferably
10^-1s · cm^-1Polymer compound with the above conductivity
Anything can be used, but
Specifically, for example, substituted and unsubstituted conductive poly
Nilin, polyparaphenylene, polyparaphenylenevini
Len, polythiophene, polyfuran, polypyrrole, poly
Riselenophene, polyisothianaphthene, polyphenyle
Sulfide, polyacetylene, polypyridyl vinyle
And polyazine. These use only one kind
You may also combine two or more types according to the purpose
May be used. Moreover, the range which can achieve desired electroconductivity
A mixture with other polymers that do not have electrical conductivity
Can be used as well as these monomers and conductivity
Copolymers with other monomers that do not have
You can. By using such a conductive polymer,
The method for forming the conductive polymer layer is not particularly limited, but it is uniform.
From the standpoint that a single thin film can be formed,
A method using a monomer having conductivity is preferred.
Yes. First, a support on which the hydrophilic pattern is formed,
Polymerization catalysts such as potassium persulfate and iron (III) sulfate and heavy
Immerse in a solution containing a compound with a
Monomer capable of forming a conductive polymer while stirring the liquid
-For example, 3,4-ethylenedioxythiophene, etc.
Gradually add. In this way, the photoactive group is present.
Form conductive polymer with functional group in hydrophilic polymer
That can be strongly adsorbed by interaction
In addition, the polymerization reaction between the monomers proceeds, and the hydrophilicity on the support
An extremely thin film of conductive polymer is formed on the conductive pattern
This becomes a conductive polymer layer. Using the polymerization reaction on the surface of the support
For example, directly on the surface of a support such as a resin such as PET.
A thin film of conductive polymer can also be formed but supported
Conductive polymer film that can not interact with the body is easy
Film strength at a level where there is no practical problem.
It is not possible to form a thin film. In the present invention, the conductive monomer itself is
Functional groups and electrostatic properties of hydrophilic polymers with photoactive groups
Or by forming a polar interaction strongly
Polymer film formed by polymerizing them to adsorb
Forms a strong interaction with the hydrophilic surface
Therefore, even for thin films, it is sufficient for rubbing and scratching.
It will have a strong strength. In addition, with conductive polymers
Hydrophilic functional groups are adsorbed in the relationship between cation and anion
By selecting such materials, hydrophilic functional groups are introduced.
Adsorbing as a counter anion of a conductive polymer
Because it functions as a kind of dopant,
That the conductivity of the turn material can be further improved
You can also get the effect. Specifically, for example, hydrophilic
Styrene sulfonic acid as a conductive group
When thiophene is selected as the material,
At the interface between the hydrophilic surface and the conductive polymer layer.
Has a sulfonic acid group (sulfo group) as a teranion
There is polythiophene, which is a conductive polymer
It will function as a powder agent. Conductivity formed on the surface of the hydrophilic pattern material
The film thickness of the conductive polymer layer is not particularly limited, but is 0.01 μm
m to 10 μm, preferably 0.1 μm
More preferably, it is in the range of ˜5 μm. Conductive poly
If the thickness of the polymer layer is within this range, sufficient conductivity and transparency can be achieved.
Clarity and can be achieved. 0.01 μm or less
Then, there is a concern that the conductivity will be insufficient.
Yes. Obtained by the above conductive pattern forming method
In addition, the conductive pattern has excellent strength and durability.
Can easily form a conductive region of the tool,
Wide use including circuit formation for micromachines and VLSI
Expected. In addition, a transparent film such as PET is used on the support.
If a film is used, a patterned transparent
It can be used as an electric film. like this
Transparent conductive film can be used for display transparency.
Bright electrodes, light control devices, solar cells, touch panels,
Examples of other transparent conductive films include CRT and plasma display.
Especially as an electromagnetic shielding filter for spraying
Useful. Such electromagnetic shielding filters are high
In order to require high conductivity and transparency,
It is preferable to provide in a child shape. Such grid line width is
20 to 100 μm and the opening is preferably about 50 to 600 μm.
Good. This grid is not necessarily regular and consists of straight lines.
It may not be provided and may be configured in a curved shape.
In the present invention, such an arbitrary conductive pattern is used.
Since it can be easily formed, various settings can be made according to the purpose.
It is. [0036] EXAMPLES The present invention will be specifically described with reference to the following examples.
However, the present invention is not limited to these. [Example 1] (Formation of hydrophilic pattern) 188μ corona treatment
Hydrophilic polymer 1 having photoactive groups on PET film
Apply a 5% aqueous solution using a # 10 coating bar.
Fabricate and dry at 80 ° C. for 5 minutes to form conductive pattern
Got. Next, a squirrel film printed with a black pattern
The light of a 400 W high pressure mercury lamp was irradiated for 5 minutes.
Then wash and remove the unexposed areas, and follow the squirrel film.
A hydrophilic pattern film was obtained. (Adsorption of conductive material) Next, this hydrophilic buffer is used.
Turn the film to the positive charge obtained as follows:
Immerse in the Ag particle dispersion and then surface with running water
Thoroughly clean to remove excess fine particle dispersion and
A turn forming material 1 was obtained. <Preparation of Ag particle dispersion> Ethanol solution of silver perchlorate
(5mM) 50ml bis (1,1-trimethylammo
Nitrodecanoylaminoethyl) disulfide 3g added
Yes, sodium borohydride solution with vigorous stirring
(0.4M) Slowly drop 30 ml to reduce ions
And a dispersion of silver particles coated with quaternary ammonium is obtained.
It was. The size of the silver particles was measured with an electron microscope.
The average particle size was 5 nm. Conductive pattern shape in which conductive fine particles are adsorbed
The surface of the material 1 is transmitted through a transmission electron microscope (JEOL JEM).
-200CX) was observed at a magnification of 100,000 times.
Even on the surface of Ag, Ag fine particles adsorbed only in the exposed area
It is certain that a dense uneven shape due to the child is formed.
It has been certified. [Evaluation of conductive stability] Ag fine particles obtained
The surface conductivity of the pattern part of LORESTA-FP
(Mitsubishi Chemical Co., Ltd.) was measured by the four-probe method
However, it showed 10Ω / □. Also patterned
The transmittance of the entire film was measured to be 58%.
It was. From this, it is highly transparent and has excellent conductivity.
It can be seen that a sex pattern is formed. [Evaluation of wear resistance] Adsorption of conductive fine particles
A cloth in which the surface of the conductive pattern forming material 1 is moistened with water
(BEMOT, manufactured by Asahi Kasei Kogyo Co., Ltd.)
Rubbed 0 times. After rubbing, transmissive type as above
Using an electron microscope (JEOL JEM-200CX)
When the surface of the film was observed at a magnification of 100,000 times, it was rubbed.
As before, dense due to fine particles only in the exposed area
Uneven shape is observed, and fine uneven shape of the surface is rubbed
It was confirmed that it was not impaired. (Example 2) Hydrophilic buffer prepared in Example 1
Turn film with anthraquinone-2-sulfonic acid
Thorium monohydrate 1.23g, 5-sulfosalicylic
7.20 g of sodium luate hydrate and iron trichloride
A solution of 4.38 g of hexahydrate dissolved in 125 ml of water
0.75 ml of pyrrole and water 12 with stirring
5 ml of solution was added. After one hour, the hydrophilic pattern
Remove the rum, rinse with water, then rinse with acetone.
The polypyrrole layer is on the surface of the hydrophilic pattern film.
Obtained conductive pattern forming material 2 of Example 2 formed
It was. [Evaluation] Obtained conductive pattern forming material
2 was evaluated in the same manner as in Example 1 for the evaluation of the conductive stability and resistance.
Abrasion was evaluated. In the evaluation of conductivity stability,
The surface conductivity of the polymer layer portion is 950Ω / □,
It is clear that a conductive pattern with excellent electrical properties is formed.
won. In the evaluation of wear resistance, the area of the exposed area after rubbing
The presence of a resin film that is thought to be solely due to the conductive polymer
Was observed and no peeling was observed.
It was confirmed that the mer layer was not damaged by rubbing.
It was. As described above, according to the embodiment of the present invention, the method of the present invention is used.
The conductive pattern material formed in this way shall be a conductive material.
Using conductive fine particles or conductive polymers
Even in cases, excellent conductivity stability and wear resistance can be obtained
It was confirmed. [0044] According to the conductive pattern forming method of the present invention,
For example, fine wiring with excellent durability and conductivity stability and no disconnection
It was found that (circuit) can be easily formed.

Claims (1)

What is claimed is: 1. A composition containing a hydrophilic polymer having a photoactive group at least in a side chain or a terminal is brought into contact with a hydrophobic support, and image-wise energy is imparted. A method for forming a conductive pattern, comprising immobilizing the hydrophilic polymer on a hydrophobic polymer-containing layer to form a hydrophilic pattern, and adsorbing a conductive material on the hydrophilic pattern.