JP2003288476A - A production line integrated line capability evaluation / management operation system and its integrated line capability evaluation / management / operation method - Google Patents

Abstract

(57) [Summary] In a simulation of a plurality of production lines, it is possible to perform a high-speed simulation while ensuring the accuracy. In addition, it is possible to secure the capacity of the entire system, evaluate the line capacity and production cost of the line group, evaluate the profit and loss, and perform the management in an integrated manner. A line capability evaluation unit for evaluating individual lines and an integrated line capability evaluation / management / operation evaluation unit for evaluating an entire line are provided. The integrated line capability evaluation / management / operation evaluation means is operated in consideration of the load of each individual line capability evaluation means. In addition, the line capacity and production cost of the line group are evaluated to evaluate profit and loss. The line capability evaluation means creates a base model for simulation based on data from the production line, and employs a technique for improving the accuracy of the base model. Then, the equipment that becomes the bottleneck and the management parameters at that time are pointed out.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an integrated line capacity evaluation / management operation system for a production line and an integrated line capacity evaluation / management operation method for the same, and particularly to thin film process products represented by semiconductor manufacturing. In a corporate group with multiple production lines, use the production simulator to evaluate individual line capacities, evaluate the line capacities and production costs of line groups, and perform profit / loss evaluation to determine the productivity of the entire corporate group. The present invention relates to an integrated line capacity evaluation / management operation technology capable of performing integrated management considering revenue.

[0002]

2. Description of the Related Art Conventionally, as a technique for simulating production in a factory to control production, for example, Japanese Patent Laid-Open No. 2000-
As described in Japanese Patent No. 173882, a technique for calculating the capacity of each line is known.

In this technique, a model for preparing data such as equipment and input plan required for the simulation of the production line is held as a template, and the operator manually describes the parameters in the template to perform the simulation. Create a model. Then, after the simulation was executed using the created simulation model, the result was presented as a graph. In addition, when the simulation model is generated, there are many setting items (processing time for each process, maintenance, setup, failure, etc.) of the processing time of the process equipment based on the manufacturing specifications, and the scale of model generation is large, so the simulation execution time It took a long time, and it took a lot of man-hours to adapt the simulation model to the actual production conditions of the dynamically changing production line.

By the way, in recent years, group management by subdividing companies has been required, and production lines are being organically combined to perform production. Therefore, for effective production management, it is necessary to evaluate the entire plurality of line groups in an integrated manner.

However, in the production simulation system of the prior art, only the simulation is performed for each line, and the method of evaluating the line group in an integrated manner has not been established.

[0006]

In the conventional method, in order to ensure the accuracy of the simulation, all the setting items of the processing time of the process equipment are collected and input, and the model is generated to perform the simulation. However, since the number of setting items increases, the simulation model becomes complicated, and the time required for one simulation process sometimes takes several hours. The problem was that it took several days.
In such a situation, it is very difficult to fit a model to an actual production form that fluctuates in real time until the simulation result has an accuracy close to the actual condition.

If a simulation model that deviates from the actual state is used, it is used only for macro line capacity evaluation in the long-term range, and bottlenecks in the production line can be extracted,
Even if a specific management parameter is given and a countermeasure plan is examined by simulation, an accurate evaluation result cannot be obtained in a time-consuming manner, and it cannot be applied to a production instruction in a production form that changes daily.

Similarly, by simulation,
Since it was difficult to identify the bottleneck of the production line when the target specifications were presented and the control parameters in production, it was not possible to present an efficient production form.

The present invention has been made to solve the above-mentioned problems, and its purpose is to ensure simulation accuracy even in a complicated simulation model in a system for performing production simulation of a plurality of production lines. However, it is possible to perform high-speed simulation, and while considering the current evaluation capacity of each simulator, the capacity of the entire system can be secured, and the line capacity / production cost of the line group can be evaluated. The objective is to provide an integrated line capacity evaluation / management operation system for production lines, which can perform profit / loss evaluation and perform integrated management that takes into consideration the productivity and profits of the entire corporate group.

[0010]

In the present invention, a line capacity evaluation means for evaluating individual line capacity and an integrated line capacity evaluation / management operation evaluation means for comprehensively evaluating the entire line group are provided.

The integrated line capacity evaluation / management operation evaluation means monitors the load applied to each line capacity evaluation means so that the line capacity evaluation means with a small load works. Also, the manufacturing cost and profit / loss of the entire line group are calculated.

The line capacity evaluation means performs the simulation by a method of changing the management parameter of the base model for the simulation based on the data acquired from the production system.

When creating the base model, production data is integrated except for the equipment of the bottleneck process. In addition, we will improve the accuracy by comparing the base model with the actual data of the production system.

Then, a simulation model is created by the base model, and the simulation model is used to perform the simulation.

The user can change and specify the simulation management parameters in various ways.

As a result of the simulation, the system identifies equipment and management parameters that are likely to become bottlenecks. Then, the measure plan is presented to the user.

[0017]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIGS. 1 to 34.

[First Embodiment] A first embodiment according to the present invention will be described below with reference to FIGS. 1 to 26. (I) Positioning of integrated line capacity evaluation / management / operation system in a company First, the positioning and concept of the integrated line capacity evaluation / management / operation system of the present invention in a company will be described with reference to FIG. FIG. 2 shows the integrated line capacity evaluation /
It is a figure for demonstrating the position in a company of a management operation system.

When manufacturing a semiconductor product, as shown in FIG.
As shown in FIG. 1, conventionally, one company Z manages a plurality of production lines A, B, C ... to produce various semiconductor products. However, due to the tendency of companies to spin off, companies AA, BB, and so on, which only produce products, are separated from the parent company Z, which formulates production plans. In many cases, the company group is the same but the management form is different. Came. In addition, a company that owns a production line and only performs production takes a form of joint investment with a plurality of companies, and may take a completely different management form from a company that makes a production plan.

In such a case, the parent company Z has a subsidiary AA,
The production capacity (process equipment capacity) of the line group owned by BB, ... Is collected, a production plan for the required quantity of products is prepared, the production plan is presented to the subsidiaries AA, BB ,.

The parent company is responsible for drafting and managing the production plan, and the subsidiary is responsible for the production amount, delivery date and cost.

However, with the diversification of current customer demand, there is a tendency for a large variety of products to be produced and the amount of production also to change greatly, and the fluctuation of production capacity due to the influence of product mix is increasing. Therefore, the subsidiary
It was not able to comply with the initially planned capacity value of the production line, resulting in delayed delivery and loss.

For this reason, in the actual production situation where the product mix is highly variable, the line capacity is evaluated with high accuracy, the bottleneck is grasped and an appropriate bottleneck countermeasure plan is dynamically presented, and in such a corporate form. As you can see, the capacity values and production costs of multiple line groups
There has been a demand for a system that can evaluate the productivity of the entire line group by collectively collecting and evaluating profits.

Therefore, in the integrated line capacity evaluation / management operation system of the present invention, the line capacity evaluation means 10 is provided for each line as shown in FIG. The integrated line capacity evaluation / management operation evaluation means 100 for evaluating the capacity of the entire system and managing the operation has been provided. (II) Configuration of Integrated Line Capacity Evaluation / Management Operation System Next, the configuration of the integrated line capacity evaluation / management operation system according to the present invention will be described with reference to FIGS. 1 and 3.
FIG. 1 is a functional configuration diagram of an integrated line capacity evaluation / management operation system 1 according to the present invention. FIG. 3 is a hardware configuration diagram of the integrated line capacity evaluation / management operation system 1 according to the present invention.

As shown in FIG. 1, the integrated line capacity evaluation / management operation system 1 of the present invention comprises an integrated line capacity evaluation means 10A (because it is the A line, it is described as 10A, and the same notation is used hereinafter) and the integrated line. It comprises a capability evaluation / management operation evaluation means 100.

The line capacity evaluation means 10 is for evaluating the capacity of each production line, and is roughly classified into a base model management section 11, a model registration section 112, and a model generation / generation history management section 114. The identification unit 12, the evaluation result tabulation display unit 13, and the simulator 20 are included.

The base model management unit 11 is a part that takes in data from the production system 2 and generates a base model 21 necessary for executing the simulation of the production line.

The model registration section 112 is a section for registering the base model created by the base model management section 11.

The model generation / generation history management means 114
This is a part for generating and registering a simulation model in which management parameter values are shunted as needed for generating a base model.

The identification section 12 identifies a plurality of bottlenecks and management parameters of the line A on the basis of the result of the simulation, and presents an appropriate countermeasure plan for the target specifications. Here, “identification” is to find out the equipment and management parameters to be taken as countermeasures, that is, the obstacles.

The evaluation result totaling display unit 13 is a part for totaling and displaying the simulation evaluation results in a predetermined format.

The simulator 20 is a part corresponding to an engine for executing a simulation, and stores a plurality of generated simulation models 21 and sequentially executes them.

Here, the base model management unit 11 includes a model data acquisition unit 110 and a base model creation basic unit 11
1a and base model creating means 111.

The model data acquisition means 110 acquires simulation model data required for simulation execution from the production performance data of the production system (MES) 2 for acquiring the production status of the production line A.

The base model creation basic section 111a creates a base model for executing a simulation based on the model data.

Further, the base model creating means 111 includes a base model creating basic unit 111a, a base model accuracy improving unit 111b for improving the accuracy of the base model, and a bottleneck for calculating a bottleneck facility. The model generation / generation history management means 114 includes an equipment capacity calculation unit 111d, and a management parameter definition unit 114.
a, a simulation model generation unit 114b, and a simulation model history DB 113g.
The simulation model generation unit 114b converts a defined management parameter value into a value as necessary to create a plurality of simulation models, and the created simulation model group is stored in the simulation model history DB 113g.

The evaluation result totaling / displaying unit 14 includes the evaluation result totaling / production cost calculating means 13a, the evaluation result displaying means 107 for displaying and outputting the evaluation result, and the evaluation result DB1.
3b, and in this part, the evaluation results are totaled to calculate the production cost, which is presented to the user.

Next, the integrated line capacity evaluation / management operation evaluation means 100 is a part that integrates individual lines to perform line capacity evaluation, and evaluates the capacity of the entire line and the entire system to manage operation. , Roughly, model data evaluation result transfer means 101 and profit and loss evaluation means 104.
It consists of and.

Here, the model data evaluation result transfer means 1
Reference numeral 01 is composed of a line capacity evaluation means operation monitor 103a, a model data / evaluation result transfer section 103b, and a line capacity evaluation processing distribution determination section 102.

The line capacity evaluation means operation monitor monitors the operation status of a plurality of line capacity evaluation means 10, and the line capacity evaluation processing distribution judgment unit 102 represents the capacity of each line and the operation load is low. Line capability evaluation means 10
Select. Then, the model data / evaluation result transfer unit 1
03b transfers the simulation model data and the evaluation result to the selected line capacity evaluation means 10. As described above, by operating the line capacity evaluation unit 10 which is not loaded so much at present, it is possible to shorten the plurality of simulation execution times.

The profit / loss evaluation means 104 is a part for evaluating the manufacturing cost and profit / loss based on the evaluation result of each line, and includes the production sales forecasting unit 106, the cost calculation / profit / loss evaluation unit 105, and the profit / loss. The evaluation result display unit 107 is included.

In the profit and loss evaluation means 104, the sales forecasting unit 10
The sales information is calculated according to 6. And cost calculation
The profit and loss evaluation function 105 is Coo that is acquired from the equipment manufacturer.
Information (basic data for calculating lifetime costs for each process equipment),
The manufacturing cost / revenue is calculated based on the sales information calculated from the sales forecasting function 106, and the evaluation result display unit 107 displays these results.

Next, the integrated line capacity evaluation /
The hardware configuration of the management operation system 1 is shown in FIG.

That is, as the configuration of the electronic computer, the electronic computer 1 equipped with the line capacity evaluation system 10A is used.
s, an electronic computer 50 equipped with a simulator 2, an electronic computer 52 equipped with a production system 2, an electronic computer 1c equipped with a terminal function for an operator to operate the line capacity evaluation system 1 Functions are shared, and these are organically connected by the network 4.

The operator can remotely operate the line capacity evaluation system 1 of the electronic computer 1s via the network 4 by using the electronic computer 1c. Then, the line capacity evaluation system 1 performs a line capacity evaluation process based on the operation of the operator. Line capability evaluation system 10
A is linked with the electronic computer 20, and the simulator 2
To activate the line capacity evaluation data. The latest production record information of the production line can be acquired from the production system 2. The computer 50 equipped with the integrated line capacity evaluation / management operation evaluation system 1 is a line capacity evaluation system for a plurality of production lines (10A, 10B, 10C ...).
, And is connected on the network 4,
The electronic computer 50 can automatically obtain the line capacity evaluation result of the production line group collectively. (III) Operation of Line Capacity Evaluation Means 10 Next, the operation of the line capacity evaluation means 10 of the integrated line capacity evaluation / management operation system of the present invention will be described with reference to FIGS. 4 to 13.

(III-1) Creation of Base Model First, the procedure for creating a base model will be described with reference to FIGS. 4 to 13. FIG. 4 is a diagram illustrating a list of files in a model file group for creating a base model. FIG. 5 is a schematic diagram showing the contents of the input plan file and the input plan model file and their relationships. Figure 6
FIG. 4 is a schematic diagram showing the contents of an equipment model file. FIG. 7 is a schematic diagram showing the contents of the recipe model file. FIG. 8 is a schematic diagram showing the contents of the initial work-in-progress model file. FIG. 9 is a schematic diagram showing the contents of the construction format file. FIG. 10 is a schematic diagram showing the contents of the model description file. FIG. 11 is a diagram for explaining the process of integrating the equipment model file and the recipe model file. FIG. 12 is a diagram showing an outline of a processing procedure for generating a base model. FIG. 13 is a graph illustrating the relationship between the model accuracy α value, the number of bottleneck facilities, and the number of convergences n.

(1) Contents of the model file group The model file group 111C is a file which is original data for creating a model for simulation generated inside the base model creating basic section 111a, and is shown in FIG. Input plan model file 11 as shown
3a, an equipment model file 113b, an initial work-in-progress model file 113c, a recipe model file 113d, a construction method file 113e, and a model explanation file 113f.

FIG. 5 shows the input plan model file 113.
The relationship between a and the input plan file 31 is illustrated.

The input plan file 31 is used in the production system 2
It is a file that is stored in the and that plans the input of raw materials and resources for the production planning of products.

The input planning file 31 is stored in the input planning unit 31.
a, a parameter definition section 31b, and a work completion rate definition section 31c.

The input planning unit 31a uses the physical time for each product,
It defines the input amount and the ratio of the limited express item ratio during the input.

The parameter defining section 31b defines an input coefficient for each model ID. The input coefficient indicates the ratio of input for each model.

The work completion ratio defining section 31c is for changing the delivery time according to the priority order of the products. When the delivery time is advanced, the work completion ratio is reduced, and when the delivery time is delayed,
Increase the completion rate.

The input plan model file 113a is obtained by converting the input plan file 31 into the model file group 1
11c is a file edited again and shows a model showing a concrete production line resource and raw material input plan.

In the input plan model file 113a, data including lot ID, product name, input date, delivery date, priority, lot size (sheet / lot) is registered for each model ID. Input plan model file 11 of the example shown in FIG.
The registration content of 3a is, for example, the lot ID registered in the input plan model with the model ID MP1 is LotX.
Lot 1, Lot Y1, Lot X2, Lot ID
As the detailed information of tX1, the product name is X1 and the input date is 9 /
1, delivery date is 10/1, priority is express, lot size is 2
There are 5 and so on.

The equipment model file 113b is a file of the contents of modeling the equipment for production, and is the equipment name, the time and frequency spent for failure and maintenance, the time for restoring it, the equipment to which the equipment belongs. Facility specifications such as groups are described.

In the example of FIG. 6, equipment specifications such as equipment name, equipment group to which the equipment belongs, maintenance time, etc. are registered for each model. In this registered example, the model whose model ID is MS1 has A and B as equipment groups, and the equipment constituting the equipment group A is equipment a1 and equipment a2.
It is 2 units.

The recipe model file 113c is a key file for linking the data of the input plan defined in the input plan model file 113a with the data on the equipment defined in the equipment model file 113b.

In the example of FIG. 7, the production process of the product, the equipment group used, and the required time are registered for each model. The unit of processing time in this example is [min]. The registered contents of FIG. 7 are, for example, model ID M
In the model of R1, the processing time and the utilization equipment in each process of the product X and the product Y are registered, which indicates that the production process of the product X includes the process 1 and the process 2. Also, step 1
The equipment group used in is equipment group A, and its processing time is 10 [min]. Similarly, the equipment group used in step 2 is equipment group B,
The processing time is 20 [min].

The initial work-in-progress model file 113d is a file showing the status of the initial work-in-process of the production line. The lot ID, lot size, product name, and process number of the initial work-in-process of the production line at the start of the simulation are model IDs.
It is registered for each. The registration contents of FIG. 5 are, for example, for the in-process lot with the model ID MW1, the lot ID is LotW.
It can be seen that the lot size of the lot X1 is 25 lots, the product name is X, and the process No. is in the second process.

The construction method file 113e is a file that describes a construction method for production, that is, a dispatching rule of equipment and work in progress, and defines the construction method for each model ID. In the example shown in FIG. 9, the model ID
As for the construction method of MC1, “first-in first-out” is selected, and similarly, for the construction method of model ID MC2, “delivery priority” is selected.

The model explanation file 113f is a file for describing explanations regarding the model, and comments for explaining the model creation date and the contents of the model are registered for each model.

In the example shown in FIG. 10, the model ID is MS.
Models such as 1, MP1, and MP2 are registered.

(2) The base data for constructing the operation-based model 113 of the system for creating the model file group is
It is stored in the production system 2. Although not shown in detail in FIG. 1, the model data acquisition unit 110 includes in-process information for a predetermined period in addition to delivery date information, recipe information, equipment information, process yield information of the work in the production line from the production system 2. The information is acquired every time, and the base model management unit 11 updates and stores the base model 113. The base model creating means 111 converts the obtained data into each file format and registers it in the base model 113, and at the same time,
A comment explaining the contents of the model and the creation date are recorded in the model explanation file 113f. As a result, the latest data can be acquired and the accumulated data can be managed, so that accurate simulation can be realized and the data can be accumulated efficiently and easily.

(3) Model File Aggregation Next, the process of aggregating a part of the model files will be described with reference to FIG.

The input data amount of the equipment model file 113b and the recipe model file 113c is very large because the number of semiconductor manufacturing process steps and the type and number of equipment are very large.
It tends to be large compared to other model files. Therefore, the simulation execution time may take several hours and the simulation model construction man-hour may take one month or more.

In view of this, the present invention focuses on the fact that the line capacity is restricted by the bottleneck equipment, and that the simulation accuracy does not have much relation with the increase or decrease of the input data of equipment other than the bottleneck process equipment. Input data for equipment other than process equipment should be consolidated and simplified.

Specifically, the required time for each wafer required for maintenance, setup, etc. of equipment other than the bottleneck process equipment is
The processing time for each wafer in the recipe model file 113c is added to the processing time, and the processing time is aggregated to be registered again as the average processing capacity for each wafer.

In the bottleneck process equipment, all the data of predetermined input items are stored in the equipment model file 11 as usual.
3b, the recipe model file 113c will be prepared.

This makes it possible to improve the calculation speed in the simulation while maintaining the simulation accuracy.

(4) Base Model Accuracy Improvement Processing Next, processing for improving the accuracy of the base model will be described with reference to FIGS. 12 and 13.

First, the outline of the processing for improving the accuracy of the base model will be described with reference to FIG.

The base model is a basic model for performing a simulation. By giving a base model and changing the control parameters in various ways,
Create a simulation model and output the results for each model. Therefore, it is desirable that the base model reflects the actual production system as faithfully as possible.
By the way, since a part of the information of the model file is collected in the process of (3), there is a possibility that a deviation from the actual production system may occur.

Therefore, in this embodiment, not only the base model is created from the model file, but also the accuracy is improved by checking it with the data of the actual production system.

The model file group shown in FIG. 4 is obtained based on the production information obtained from the production system 2 via the model data obtaining means 110, and the base model 1 is generated by the base model creation basic unit 111a.
13 is made. Then, the simulator 20 takes in the base model 113 and creates a simulation model 21 inside.

At this time, the recipe model file 113d
Is described on the basis of the average processing capacity as described above, and the equipment model file 113b value may be regarded as an empty input item.

After that, the simulator 20 is executed, and the base model precision improving section 111b attempts to improve the precision of the base model based on the result of the simulation.

The base model precision improving section 111b realizes the precision improvement of the base model by the following processing.

First, for each of the actual line performance data and the simulation result, equipment with a high operation rate, a high in-process increase rate, and a high process lead time (LT), that is,
Extract the worst equipment on the production line. Then, after identifying the common bottleneck process equipment, the model accuracy α is calculated. The model accuracy α is calculated by the following (formula 1).

[0080]

[Equation 1] That is, the closer the actual value is to the simulated value, the smaller the value of the model accuracy α.

When the model accuracy α is 10% or more, the bottleneck facility capacity calculation unit 111d of the base model
Calculate the correction value for the bottleneck facility capacity. The correction value is calculated by the following (formula 2). Here, CT (cycle time) is an index representing the facility capacity.

[0082]

[Equation 2] The base model creation basic unit 111a reflects the value obtained by incorporating the correction value into the data on the bottleneck process facility of the base model. Then, this process is repeated until the number of times of convergence is exceeded and the model accuracy α becomes 10% or less.

The allowable range of the model accuracy α value varies depending on the characteristics of each production line and the purpose of simulation.
In this embodiment, it is set to 10%.

FIG. 13 illustrates the relationship between the model accuracy α, the number of equipment units that are bottlenecks, and the number of convergences n.

In the equipment which becomes the bottleneck, since it is not integrated, detailed data is input as the data of the model file as described above. Therefore, it can be understood that the model accuracy improves and the α value becomes smaller as the number of bottlenecks increases and the bottleneck facility capacity calculation is repeated.

In this embodiment, using such a method,
By setting the number of convergences (number of simulations), the accuracy of the base model is automatically improved to within the allowable accuracy range.

(III-2) Execution of Simulation Next, the procedure until the simulation is executed will be described with reference to FIGS. 14 to 15. FIG. 14 shows a simulation model generation and simulation start screen 1
It is a figure which shows 14a. FIG. 15 is a diagram showing the contents of the simulation model history DB 113g.

When a base model suitable for simulation is generated according to the above procedure, the user is prompted by FIG.
The simulation model generation / simulation activation screen 114a shown in (1) is activated to create a simulation model of a production line for which a new capability evaluation is to be performed, and the simulation is executed.

Specifically, a newly created simulation model name is entered in the simulation model name input box 112b, and the model configuration of the simulation model (equipment model file, input planning model, initial work-in-progress model) is selected from the configuration model selection menu 112e. , Recipe model). Here, the configuration model selection menu 1
The content displayed in the selection menu 12e is the model ID of the model description file 113f and a comment explaining the model content. The simulation model 21 can be easily created by this menu selection.

After selecting the constituent model, the simulation period and, if necessary, the description of the simulation model are input to the comment 112d in the simulation period column 112c.

The simulation model generation / simulation activation screen 114a is also provided with a management parameter definition (/ change) 11b column for executing the simulation, and the predetermined configuration model 11
It is possible to copy the contents of 2e automatically or intentionally and perform a simulation with changed management parameters.

In the example shown in FIG. 14, the management parameters of the input plan model and the recipe model are selected by the definition flag. Furthermore, enter the values of 10% and 2% in the "Amplitude" and "Tick" item fields of the input planning model, and set the "None" value in the "Amplitude" and "Tick" item fields of the recipe model. You have selected.

On this screen, if you enter data in the "Amplitude" and "Tick" item fields, the base model is automatically copied, and the total input amount of the base model value is (± amplitude) ) Creates an input plan model that is swayed with the parameters changed according to the values. For example, if the total input amount is 1000 sheets / day, the "amplitude" is 10
%, The number of simulation models is 10 to 10 sheets / day, and the increment is 20%, and therefore, 20 simulation models / day each have different simulation models, and 10 simulation models are automatically generated.

If there is no value in the item column of amplitude and unit, the management parameter of the corresponding configuration model 112e is displayed to the user, and the user is allowed to change it, and the simulation is performed with the value. .

Finally, when the user clicks the simulation start button 112a, the simulation process is performed. The simulation is executed by copying the original simulation model, allocating the management parameters specified to it, and generating a plurality of simulation models.

In the example shown in FIG. 14, the simulation model name is S2, the simulation period is 90 days, and in the selection of the constituent model, the equipment model is MS1, the input planning model is MP2, and the initial work-in-progress model is MW1. . Subsequently, when the simulation button 112e is clicked, the simulation is executed and at the same time, the simulation model history DB 113g is updated.

Simulation model history DB 113g
Is a database that stores the contents of the simulation model and the simulation model history file 113h in which the simulation was executed.

Simulation model history file 11
In 3h, the creation date for each simulation model ID,
Simulation period and simulation model 2
1 configuration contents (equipment model to be used, input planning model,
The initial work-in-progress model and recipe model) are registered. For example, the simulation model of S2 registered on the simulation model generation / simulation activation screen 114a shown in FIG. 14 is created in H13.8.16,
The simulation period is 90 days.
It can be seen that the equipment model is registered as MS1, the input planning model is MP1, the initial work-in-progress model is MW1, and the recipe model is registered as MR1.

Simulation model history file 11
Since a configuration model is recorded in 3h, this makes it easy to manage a plurality of models.

(III-3) Identification of Bottleneck / Control Parameter Based on Simulation Results Identification of bottleneck / control parameters means the production of bottleneck equipment and barriers in the production line according to simulation results. Is to point out the management parameters of. Then, in this system, a countermeasure plan is presented so that the target specifications finally desired by the user can be realized.

The process of identifying the simulation result by the identifying unit 15 will be described below with reference to FIGS. 16 to 19. FIG. 16 is a schematic diagram showing the work-in-progress file 22. FIG. 17 is a schematic diagram showing the operation rate transition file 23. FIG. 18 is a schematic diagram showing the volume / lead time transition file 24. FIG. 19 is a diagram for explaining the outline of the simulation result identification processing. FIG. 20 is a schematic diagram showing the target aggregation file 123 and the simulation result aggregation file.

FIG. 21 is a schematic diagram showing a bottleneck countermeasure effect display screen.

As a result of the simulator performed as described above, a work-in-progress transition file 22, an operating rate transition file 23, and a volume / lead time transition file 24 are output.

The work-in-progress transition file 22 is a file in which work-in-progress transitions at each time point (Period) during the simulation period are collectively registered. In the example shown in FIG. 16, for example, when Period is 1, there are 300 work-in-progress,
This means that there were 350 sheets when Period was 2.

The operating rate transition file is a file that stores the transition of the operating rate of equipment at each time point (Period) during the simulation period of each equipment group registered in the equipment model file 113b. In the example shown in FIG.
For example, if the equipment group is the equipment Gr. The operating rate of A is Pe
90% when riod is 1 and 9 when Period is 2
This means that it was 6%.

Volume / Lead Time Transition File 24
Is each time point (Period) during the simulation period
This is a file that stores the changes in trading volume and lead time. In the example shown in FIG. 18, for example, the volume is Peri
100 when od is 1 and 11 when Period is 2
It means that it was 0, and likewise, the lead time is
When Period is 1, it means that it was 20 days, and when Period was 2, it was 22 days.

The identification section 12 includes a process / equipment extraction / countermeasure model file creation means 121 and an identification effect display means 122.
Reference is made to the target specification file 123 and the simulation result totaling file 124 shown in FIG.

The target specification file 123 is a file in which specifications set as the current target of the production system 2 are stored.

Simulation result totaling file 124
Is a work-in-progress transition file 22, an operation rate transition file 23,
This is a file in which the simulation results aggregated from files such as the volume / lead time transition file 24 are stored.

First, each data of the in-process transition file 22, the operating rate transition 23, and the production lead time transition 24 obtained by the simulation evaluation result by the simulator 20 is identified as a bottleneck by the process / equipment extraction and the countermeasure model file creation means 121. The process and equipment are extracted and specified, and the management parameters are specified to create a model file as a measure.

After creating the model file,
Compare the target specifications with the actual simulation results, select equipment that is likely to become a bottleneck, and based on the predefined defined management parameters,
The identification is started based on the setting of "step".

When a plurality of management parameters are defined, the fluctuations (sensitivity) of the simulation result totaling results for each pitch of each management parameter value that has been shunted are totaled, and identification is continued from the highest sensitivity. To do so.
When the identification is completed, the identification effect display means 122 outputs and displays the result.

By identifying the simulation result as described above, this system can evaluate the line capacity, automatically identify the bottleneck equipment, and present the improvement plan and the improvement effect. Also, the number of simulations can be reduced as compared with the method of randomly allocating control parameters.

As a method of identifying the bottleneck, the average volume / average lead time stored in the simulation result tabulation file shown in FIG. 20 is compared with the target volume / the target lead time described in the target specification file. As a result, when the target is not reached and the increased work in process stored in the simulation result totalization file is within the upper limit of the increased work in progress described in the target specification file, the operation rate transition file of FIG. 17 describes. A method can be considered in which the identified equipment or equipment group with the highest average operating rate is identified as the bottleneck.

The present system identifies the bottleneck in this way and displays a measure for eliminating it on the bottleneck measure effect display screen shown in FIG.

When a countermeasure plan is created, the capacity increase / decrease rate of the identified bottleneck equipment or equipment group is defined, and the equipment model file shown in FIG. This is done by creating the input plan file of FIG.

In the example shown in the screen of FIG. 21, the target shown in the target specification 126 is the simulation result 122.
As shown in b, the simulation model "S2"
Indicates that the target could not be achieved, but the simulation model “S2Ver2” in which the management parameters were changed indicates that the target could be achieved. Items that have not reached their targets are displayed in different colors to make them easier to understand. (IV) Operation of integrated line capacity evaluation / management operation evaluation means 100 Next, with reference to FIGS. 1 and 22 to 24, integrated line capacity evaluation / management operation evaluation means of the integrated line capacity evaluation / management operation system of the present invention. The operation of 100 will be described.
FIG. 22 is a schematic diagram showing a line capacity evaluation processing distribution determination file. FIG. 23 is a detailed block diagram of the profit and loss evaluation means 104. FIG. 24 is a schematic diagram showing a processing file for each process.

Integrated line capacity evaluation / management operation evaluation means 1
00 comprises model data evaluation result transfer means 101 and profit and loss evaluation means 104 as shown in FIG. 1, and manages the line capacity of the entire system in an integrated manner.
It has the function of managing it.

That is, the individual line capacity evaluation means 10
The operating load situation of the line group is analyzed, the load is appropriately distributed, and the simulation evaluation of the line group is speeded up.
The line capacity, the manufacturing cost and the profit of the entire line group are evaluated from the line capacity and the manufacturing cost obtained by the line capacity evaluation means 10.

The model data evaluation result transfer means 101 is
It comprises a line capacity evaluation means operation monitor 103a, a model data / evaluation result transfer section 103b, and a line capacity evaluation processing distribution judgment section 102. The line capacity evaluation means operation monitor 103a indicates the operation status of a plurality of line capacity evaluation means 10. Monitoring and line capacity evaluation processing distributed determination unit 1
The model data / evaluation result transfer unit 103 selects the line capacity evaluation unit 10 with a low operating load in order to shorten the plurality of simulation execution times based on the result.
b, the simulation model data and the evaluation result are transferred.

The line capacity evaluation processing distribution determination unit 102
By referring to the information of the line capacity evaluation processing distribution judgment file shown in FIG. 22, the simulation load and the remaining HDD capacity for each line are measured, and the computer equipped with which line capacity evaluation means is currently executing the simulation. If so, it has a function to determine whether it is effective.

As shown in FIG. 24, the profit / loss evaluation means 104 comprises a cost calculation / profit / loss evaluation unit 105, a sales forecasting unit 106, and a profit / loss evaluation result display unit 107.

The sales forecasting unit 106 forecasts sales information based on Coo information (basic data for calculating lifetime costs for each process facility) acquired from the facility manufacturer.

The cost calculation / profit and loss evaluation unit 105 calculates the manufacturing cost / revenue based on the sales information,
The profit / loss evaluation result display unit 107 displays it.

The cost calculation / profit and loss evaluation unit 105 can be roughly divided into a manufacturing cost calculation unit for calculating a manufacturing cost and a profit / loss evaluation unit.

When the manufacturing cost is calculated, as shown in FIG. 24, the Coo information (component material cost per wafer, utility cost, jig cost,
… By calculating costs such as running cost, facility cost specifications (equipment depreciation cost), personnel cost, CR cost, etc., work machining cost can be calculated, and total machining by process is performed by throughput for each type of product process equipment for each line. Expenses can be calculated. The manufacturing cost can be calculated by aggregating this for each process.

The profit / loss evaluation unit totals the manufacturing costs of the lines as described above, and the profit / loss can be calculated by calculating the difference with the sales cost acquired from the sales prediction function 106. (V) Example of application of this embodiment Next, an example of application of this embodiment to corporate activities will be briefly described with reference to FIGS. 25 and 26. FIG. 25 shows
Integrated line capacity evaluation / management operation system 1 of the present embodiment
FIG. 8 is an explanatory diagram of a case where is applied to verification of a process type input plan. FIG. 26 shows the integrated line capability evaluation /
It is explanatory drawing at the time of applying the management operation system 1 to the facility plan verification of a line.

The integrated line capacity evaluation / management operation system 1 of the present embodiment is utilized for the process type input plan verification, and it is verified whether the production plan presented by the parent company can actually be produced due to the influence of the product mix fluctuation. can do.

Conventionally, as shown in FIG. 25 (a), even if an input plan is determined for each production line, no mechanism for integrally verifying the input plan has been prepared.

In the present embodiment, the integrated line capacity evaluation / management operation system 1 is provided with a line capacity evaluation means 10 for evaluating individual line capacities and integrated line capacity evaluation / evaluation means 10 for evaluating them in an integrated manner. Management operation evaluation means 10
0 is set. This allows the parent company to dynamically grasp and analyze the actual state of line capacity and make a review of the input plan. The manufacturing contract company 910 (subsidiary) can also follow the production instructions given in real time while confirming the plan of the manufacturing contract company 920 (parent company).

In addition, the integrated line capability evaluation of this embodiment
The management and operation system 1 can be used to verify the facility plan of the line. In the past, planning such as new purchase, relocation, and disposal of equipment between many lines required a great deal of effort. In the present embodiment, the integrated line capacity evaluation / management operation system 1 makes it possible to verify a plan and its operation with an eye on the entire line.

[Embodiment 2] Next, referring to FIGS.
A second embodiment according to the present invention will be described using. FIG. 27 is a schematic diagram for explaining a business model using the integrated line capacity evaluation / management operation system 1 of the second embodiment according to the present invention. FIG. 28 is an outline of the processing of the integrated line capacity evaluation / management operation system 1 according to the second embodiment of the present invention. FIG. 29 is a schematic diagram showing an example of the line capacity evaluation analysis report order operation screen. FIG. 30 is a schematic diagram showing an example of the line capability evaluation report (No. 1). FIG. 31 is a schematic diagram showing an example of the line capability evaluation report (No. 2). 32 shows
It is a schematic diagram which shows an example of a line capability evaluation report (the 3). FIG. 33 is a schematic diagram showing an example of the line capability evaluation report (No. 4).

In this embodiment, by utilizing the integrated line capacity evaluation / management operation system 1 described in the first embodiment, each manufacturing consignment company is presented with an evaluation plan, a countermeasure plan, and a proper plan for entering the target specifications. Then, it presents a business model for a consulting business using a network.

Contract manufacturing companies (AA, BB, CC,
...) uses each management server to request work, receive consulting, present the financial institution in return for productivity improvement by optimizing the line, and pay consulting costs.

When a consultation order is received, the computer 50 equipped with the integrated line capacity evaluation / management operation system 1 issues an order reply, starts simulation evaluation, and creates a work report. To create a work report, analyze the customer's line status and wishes, select the required report on the line capability evaluation analysis report order operation screen as shown in Fig. 29, and select what kind of report to issue. decide. On the line capacity evaluation analysis report ordering operation screen, the necessary report is selected, and the consideration to be charged to the customer is displayed.

When the evaluation is completed, a work report is sent by e-mail and the debit from the financial institution is confirmed.

This work report is a report relating to line capacity (equipment capacity) evaluation analysis by simulation.

The line capability evaluation analysis report has a format as shown in FIGS. 30 to 33.

Also, a service for sending the specifications of the base model for simulation evaluation may be added.

Since each subsidiary can receive the specifications of the base model and perform re-simulation, there is an advantage that it is easy to change the production plan of itself and evaluate the movement or change of the line or equipment.

The flow of business will be briefly described below with reference to the flowchart of FIG.

It is assumed that BB company places an order for a consulting service.

Then, the electronic computer 50 of the integrated line capacity evaluation / management operation system performs the charging process (S1).
1) Collect data for line capacity evaluation (S1
2), model creation, correction (S13), each capability of the production line is evaluated (S14), and a report is created and presented (S15).

Assuming that the above is the basic service, it is possible to provide a service with a higher added value when the client further desires.

For example, when the customer requests optimization of the line capacity (S16), an appropriate model is created (S17), evaluated (S18), and a report is created and presented (S19).

Here, the report, as stated above,
Details of the data and specifications of the base model and simulation model will be sent.

Further, when the consulting regarding the capacity evaluation of the entire integrated line and the management operation is received (S2
0), trial calculation of integration cost, profit (S21),
Evaluation is performed when the capacity of the production line is redistributed (S22), and a report is presented (S23).

[Third Embodiment] Next, a third embodiment of the present invention will be described with reference to FIG. FIG. 34 shows
It is a schematic diagram for demonstrating the business model using the integrated line capability evaluation and management operation system 1 of 3rd embodiment which concerns on this invention.

The present embodiment presents a business model in which used equipment (line) sales are developed in the used equipment (line) market by using the integrated line capacity evaluation / management operation system of the first embodiment. It is a thing.

That is, the integrated line capability evaluation of the present invention
When selling unnecessary equipment extracted by the management operation system, or when a manufacturer who has insufficient process capacity and cannot allocate it within the line group and purchases equipment It is applied to a system for trading.

For example, when selling unnecessary equipment to the used equipment market, by presenting equipment cost, Coo information, performance, and specifications (capability evaluation result is also added), and when the contract is completed on the Internet, In addition to the procedure for responding to requests for purchasing and selling equipment, after confirming withdrawal of charges, the work (capacity evaluation) report when this equipment is used is transferred. That is, the details of the equipment capacity evaluation value in the variable environment during product mix production, and the simulation evaluation example of the base model data of the integrated line capacity evaluation / management operation system are provided.

As a result, in addition to the actual performance of the equipment under the product mix environment required to operate the sold equipment, the manufacturer who purchased the equipment to be sold also conducts a simulation evaluation study on the line that he owns when using the target equipment. It can be done easily.

Since the data of the target equipment is included in the integrated line capacity evaluation / management / operation system, the purchasing maker can utilize the integrated line capacity evaluation / management / operation system when developing the data on its own line. It will be easier.

[0154]

According to the present invention, in a system for performing production simulation of a plurality of production lines, it is possible to perform high-speed simulation while ensuring simulation accuracy even with a complicated simulation model. It is possible to secure the capacity of the entire system while taking into consideration the current evaluation capacity of the simulator, and to evaluate the line capacity and production cost of the line group and perform the profit and loss evaluation to improve the productivity of the entire corporate group. It is possible to provide an integrated line capacity evaluation and management operation system for production lines that can perform integrated management that takes into account profits and profits.

[Brief description of drawings]

FIG. 1 is a functional configuration diagram of an integrated line capacity evaluation / management operation system 1 according to the present invention.

FIG. 2 is a diagram for explaining the positioning of the integrated line capacity evaluation / management operation system of the present invention in a company.

FIG. 3 is a hardware configuration diagram of an integrated line capacity evaluation / management operation system 1 according to the present invention.

FIG. 4 is a diagram illustrating a list of files in a model file group for creating a base model.

FIG. 5 is a schematic diagram showing the contents of the input plan file and the input plan model file and their relationships.

FIG. 6 is a schematic diagram showing the contents of an equipment model file.

FIG. 7 is a schematic diagram showing the contents of a recipe model file.

FIG. 8 is a schematic diagram showing the contents of an initial work-in-progress model file.

FIG. 9 is a schematic diagram showing the contents of a construction format file.

FIG. 10 is a schematic diagram showing the contents of a model description file.

FIG. 11 is a diagram for explaining a process of integrating an equipment model file and a recipe model file.

FIG. 12 is a diagram showing an outline of a processing procedure for generating a base model.

FIG. 13 is a graph illustrating the relationship between the model accuracy α value, the number of bottleneck facilities, and the number of convergences n.

FIG. 14 is a diagram showing a simulation model generation / simulation activation screen 114a.

FIG. 15 is a diagram showing the contents of a simulation model history DB 113g.

16 is a schematic diagram showing a work-in-progress file 22. FIG.

FIG. 17 is a schematic diagram showing an operation rate transition file 23.

FIG. 18 is a schematic diagram showing a volume / lead time transition file 24.

FIG. 19 is a diagram for explaining the outline of the identification process of the simulation result.

FIG. 20 is a schematic diagram showing a target totaling file 123 and a simulation result totaling file.

FIG. 21 is a schematic diagram showing a bottleneck countermeasure effect display screen.

FIG. 22 is a schematic diagram showing a line capability evaluation processing distributed determination file.

FIG. 23 is a detailed block diagram of profit and loss evaluation means 104.

FIG. 24 is a schematic diagram showing a processing file for each process.

FIG. 25 is an explanatory diagram of a case where the integrated line capacity evaluation / management operation system 1 of the present embodiment is applied to verification of a process type input plan.

FIG. 26 is an explanatory diagram of a case where the integrated line capacity evaluation / management operation system 1 of the present embodiment is applied to line facility plan verification.

FIG. 27 is a schematic diagram for explaining a business model using the integrated line capacity evaluation / management operation system 1 according to the second embodiment of the present invention.

FIG. 28 is an outline of processing of the integrated line capacity evaluation / management operation system 1 according to the second embodiment of the present invention.

FIG. 29 is a schematic diagram showing an example of a line capacity evaluation analysis report order operation screen.

FIG. 30 is a schematic diagram showing an example of a line capability evaluation report (No. 1).

FIG. 31 is a schematic diagram showing an example of a line capability evaluation report (No. 2).

FIG. 32 is a schematic diagram showing an example of a line capability evaluation report (No. 3).

FIG. 33 is a schematic diagram showing an example of a line capability evaluation report (No. 4).

FIG. 34 is a schematic diagram for explaining a business model using the integrated line capacity evaluation / management operation system 1 according to the third embodiment of the present invention.

[Explanation of symbols]

10: Line capability evaluation means 10 100 ... Integrated line capacity evaluation / management operation evaluation means 110 ... Model data acquisition means 110 111a ... Base model creation basic section 111a 111b ... Base model high precision part 111d ... Bottleneck facility capacity calculation unit 111 ... Base model creating means 11 ... Base model management unit 112 ... Model registration section 114a ... Management parameter definition section 114b ... Simulation model generation unit 113g ... Simulation model history DB 114 ... Model generation / generation history management means 20 ... Simulator 12 ... Identification section 13 ... Evaluation result total display section 13a ... Evaluation result collection / production cost calculation means 13b ... Evaluation result DB 107 ... Evaluation result display section 101 ... Model data evaluation result transfer means 103a ... Line capacity evaluation means operation monitor 103b ... Model data / evaluation result transfer unit 102 ... Line capacity evaluation processing distributed determination unit 104 ... Profit and loss evaluation means 105 ... Cost calculation / profit and loss evaluation department 106 ... Production Sales Forecasting Department 107 ... Profit and loss evaluation result display section

Continued front page    (72) Inventor Yasuhiro Hamazuka             292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa             Inside the Hitachi, Ltd. production technology laboratory (72) Inventor Kazuo Horiguchi             5-20-1 Kamimizuhonmachi, Kodaira-shi, Tokyo Stock             Ceremony Company within Hitachi Semiconductor Group (72) Inventor Kazuhiko Maeda             5-20-1 Kamimizuhonmachi, Kodaira-shi, Tokyo Stock             Ceremony Company within Hitachi Semiconductor Group

Claims (14)

[Claims] 1. A line capacity evaluation means for evaluating the line capacity of each production line in a production line integrated line capacity evaluation / management operation system for evaluating the line distribution of a plurality of production lines of a production system by computer simulation. A production line characterized by having an integrated line capacity evaluation / management operation evaluation means for evaluating the production capacity of the entire line, the manufacturing cost of the entire line, and the profit / loss evaluation of the production based on the output results of the individual line capacity evaluation means. Integrated line capacity evaluation and management operation system. 2. The line capacity evaluation means, a simulator for evaluating the capacity of the production line, a base model management unit for acquiring data of the production line and generating a simulation base model, and a simulation result of the simulator. A bottleneck / control parameter identification unit for identifying bottlenecks in the production line and control parameters for the production system based on the above, and an evaluation result total / cost calculation means for totaling the line evaluation results and calculating the production cost. The integrated line capacity evaluation / management operation system for a production line according to claim 1, further comprising: an evaluation result database that stores the evaluation result of the line. 3. The integrated line capacity evaluation / management operation evaluation means analyzes the operation status of the line capacity evaluation means in each production line, selects the line capacity evaluation means of the production line with few operations, and Model data / evaluation result transfer means for transferring model data for generating the base model for performing capacity evaluation, and for receiving and transferring evaluation results sent from the line capacity evaluation means; and the line The integrated line capacity evaluation / management operation system for a production line according to claim 1, further comprising: a profit / loss evaluation means for performing profit / loss evaluation in production based on the evaluation result sent from the capacity evaluation means. 4. The line capacity evaluation means operation monitor for monitoring the operation status of the line capacity evaluation means in each production line by the model data / evaluation result transfer means, and the line capacity evaluation from the operation status of each production line. A line capacity evaluation processing distribution determination unit for selecting a line capacity evaluation means for performing processing, and a model data / evaluation result transfer unit for transferring model data and receiving / transferring evaluation results. Item 3 integrated line capacity evaluation of production line
Management operation system. 5. The profit and loss evaluation means, when the integrated evaluation of all production lines is performed by a demand fluctuation prediction function for predicting product price fluctuations due to demand fluctuations and the aggregation of line capacity evaluation results of individual production lines. The integrated line capacity evaluation / management operation system for a production line according to claim 4, further comprising a cost calculation / profit / loss evaluation function for calculating costs and performing profit / loss evaluation, and an evaluation result display function for displaying evaluation results. . 6. The base model management unit describes an equipment model file in which equipment for production is described, an input plan model file in which an input plan for a production line is described, and an initial work in progress in the production line. It has an initial in-process model file, a recipe model file that describes the relationship between equipment and production processes, a start-up method file that describes the in-process start-up method, and a model explanation file that describes the contents of the model used for simulation. By generating a base model from each of these files and inputting the base model, the simulator generates a simulation model and stores the result of the simulation model generation in a file as a history. The integrated line capacity evaluation / management operation system of the production line according to claim 2. Tem. 7. The base model management unit has model data acquisition means for acquiring production data of a production line through a network and acquiring model data for creating a base model. Production line integrated line capacity evaluation and management operation system. 8. The bottleneck / control parameter identifying unit, in-process transition file in which the total in-process of the production line of the simulation result is described in time series, and the operating rate of the equipment or equipment group constituting the production line An operation rate transition file described in time series, a production / lead time transition file in which production volume and lead time are described in time series, target production volume, target lead time, and increase in-process cap are described. It has a target specification file and a simulation result tabulation file that stores the average volume / average lead time calculated from the volume / lead time transition file and the increased work in progress calculated from the work in progress transition file. Stored average volume, average lead time and the target As a result of comparison with the target volume described in the pec file and the target lead time, the target has not been reached, and the increased work in progress stored in the simulation result aggregation file is the upper limit of the increased work described in the target specification file. If it is within the range, the equipment or equipment group with the highest average operation rate described in the operation rate transition file is identified as a bottleneck, and the capacity increase / decrease rate of the identified bottleneck equipment or equipment group is defined. 7. The integrated line capacity evaluation / management operation system for a production line according to claim 6, wherein the equipment model file or the input plan file for bottleneck measures is newly created according to the capacity increase / decrease rate. 9. The bottleneck / management parameter identifying unit extracts the equipment or equipment group determined to be the bottleneck equipment by simulation, and changes the management parameters of the equipment model of the equipment or equipment group. 10. The integrated line capacity evaluation of the production line according to claim 9, wherein the re-simulation is performed, and the average production volume and the average lead time are compared and displayed as the results before and after the bottleneck countermeasure. Management operation system. 10. In an integrated line capacity evaluation / management operation method of a production line for evaluating line distribution of a plurality of production lines of a production system by computer simulation, a procedure for evaluating a line capacity of each production line, and an individual line An integrated line capacity evaluation / management operation method for a production line, comprising: a production capacity of the entire line, a manufacturing cost of the entire line, and a procedure for evaluating profit / loss of the production based on the output result of the capacity evaluation. 11. In the procedure of evaluating the line capacity of each production line, the simulation is performed by a procedure of acquiring production line data and generating a simulation base model, and a simulation model generated by the base model. The procedure to perform, the feedback procedure to optimize the base model according to the result of the simulation, the simulation is performed using the optimized base model as a simulation model, and the management parameters of the bottleneck equipment or equipment group or production line are set. The integrated line capacity evaluation / management operation method for a production line according to claim 11, characterized in that an identification procedure is performed. 12. The equipment model when the production line data is described by an equipment model file in which equipment for production is described and a recipe model file in which a relationship between equipment and a production process is described. The control model described in the file is averaged to obtain a throughput value applied to each product, and the base model is optimized based on the throughput value. Integrated line capacity evaluation and management operation method for the production lines described. 13. An integrated line capacity evaluation / management operation method for a production line for evaluating line distribution of a plurality of production lines of a production system by computer simulation, wherein the integrated line capacity evaluation for executing this integrated line capacity evaluation / management operation method. -The management and operation system is connected to the customer's management server via a network, and is a means for evaluating the line capacity of each production line, and based on the output result of each line capacity evaluation, the production capacity of the entire line, the line It is provided with means for evaluating the overall manufacturing cost / production profit / loss, and when an order for evaluation of the production line is received from the management server of the customer, an evaluation report of the production line via the network, or a simulation The procedure for sending data and the correspondence from the financial institution designated by the customer Integrated line capacity evaluation and management operation method characterized by having a procedure to draw. 14. A line capacity evaluation analysis that is displayed together with the price to be charged when a customer receives a production line evaluation order from the customer management server, selects an evaluation report to be created according to the customer's production line specifications. The type of evaluation report to be transmitted to the customer is determined by the report order operation screen.
The integrated line capacity evaluation and management operation method described in 4.