JP2003285267A - Lapping fluid supplying apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a lapping fluid supplying apparatus, which can stabilize a supply amount of a lapping fluid, and also can always supply the accurately mixed lapping fluid to a lapping position. <P>SOLUTION: The lapping fluid supplying apparatus comprises a lapping fluid reservoir 12, a discharge port 13 for discharging the lapping fluid from the lapping fluid reservoir 12, a valve body 16 for opening the discharge port 13, supply passages 3, 15 for supplying required quantity of the lapping fluid discharged from the discharge port 13 to lapping portions of a lapping machine 1, and compressed air supplying means 21, 23, 24 for pushing out the lapping fluid accumulated in the supply passages to each lapping portion of the lapping machine 1 with required supply timing by intermittently supplying compressed air to the supply passages. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a lapping liquid supply device for supplying lapping liquid to a lapping machine.

[0002]

2. Description of the Related Art Conventionally, a planetary gear type lapping device is generally used when lapping a workpiece such as a ceramic plate. This wrapping device arranges a planetary gear-shaped carrier holding a plurality of works between upper and lower lapping plates, and spins or revolves or revolves the carrier while injecting lapping liquid between the lapping plates. Thus, the upper and lower surfaces of the work are polished by sliding between the upper and lower lapping platens and the work.

The lapping liquid is a mixture of abrasive grains, which are abrasives, in water or the like, and the lapping liquid is distributed to the lapping device by using the supply device shown in FIG. 6 or 7. FIG. 6 shows an example of a 4-way wrapping device,
Ring-shaped gutter 42 on the lapping machine 40 through the pillars 41
Is fixed, and the lapping liquid is supplied into the gutter 42.
A plurality of holes are provided on the bottom surface of the gutter 42, and the holes and the processed portion of the lapping machine 40 are connected by a supply hose 43. A scraping plate 44 fixed to a fixing portion (not shown) is inserted into the gutter 42. Lapping machine 40 and gutter 4
2 rotates integrally, and the lapping liquid is supplied to a plurality of processing parts of the lapping machine 40 from the holes provided in the gutter 42 by the scraping plate 44 through the hoses 43. FIG. 7 shows an example of a two-way type lapping device, in which the lapping machine 50 and the mortar-shaped saucer 51 do not rotate. The saucer part 51 and the processing part of the lapping machine 50 are connected by a plurality of supply hoses 52. In this case, when the lapping liquid is supplied to the pan portion 51, the lapping liquid is distributed to each processing portion of the lapping machine 50 via each hose 52.

[0004]

In the case of the supply device as described above, gravity feeds the lapping liquid to the respective processing portions of the lapping machines 40 and 50 via the hoses 43 and 52. However, the lapping machines 40 and 50 need to supply the required amount of the lapping liquid to the necessary places, and thus the supply method using gravity as described above tends to cause variations in the supply amount.
This is because the lapping liquid contains solid components such as abrasive grains, so that it is difficult for the lapping liquid to flow in the hoses 43 and 52, and clogging easily occurs in the hoses. Therefore, it was difficult to stably control the supply amount of the lapping liquid. In addition, when supplying the lapping liquid to a plurality of processing parts, the supply hoses 43 and 52 are inevitably lengthened, and after the supply is stopped once, the lapping liquid is kept in the hose. Therefore, the mixed abrasive grains settle in the hose and settle and separate in the hose. As a result, when the supply is started next time, there arises a problem that the lapping liquid mixed accurately from the initial stage cannot be supplied to the processing section.

Therefore, an object of the present invention is to provide a lapping liquid supply device which stabilizes the amount of the lapping liquid supplied and can always supply the lapping liquid mixed with high precision to the processing section.

[0006]

In order to achieve the above object, the invention according to claim 1 provides a lapping liquid storage chamber for storing a lapping liquid containing abrasive grains, and discharging the lapping liquid from the lapping liquid storage chamber. A discharge port, an opening / closing means for opening and closing the discharge port, a supply passage for storing a predetermined amount of lapping liquid discharged from the discharging port, and supplying the lapping liquid to the processing section of the lapping machine, and compressed air. A lap liquid supply device comprising: compressed air supply means for intermittently supplying the lap liquid accumulated in the supply passage to the processing portion of the lapping machine.

First, when the opening / closing means is opened, the lapping liquid is discharged from the lapping liquid storage chamber to the supply passage through the discharge port. The amount of the lapping liquid stored in the supply passage is determined by the opening time of the opening / closing means. After the predetermined amount of lapping liquid is stored in the supply passage, the opening / closing means is closed. Next, when the compressed air supply means is operated to supply the compressed air to the supply passage, the lapping liquid accumulated in the supply passage by the compressed air is pushed out to the processing portion of the lapping machine. At this time, since the discharge port is closed by the opening / closing means, the compressed air does not flow back from the discharge port to the lap liquid storage chamber. As described above, in the present invention, since the predetermined amount of the lapping liquid in the supply passage is forcibly pushed out to the lapping machine by the compressed air, the supply amount of the lapping liquid can be stabilized and the supply passage can be made thin. , Does not hinder the flow of lapping solution. Since the supply passage can be narrowed, the time that the lapping liquid stays in the hose can be shortened, and the lapping liquid mixed accurately can always be supplied to the processing section.

As described in claim 2, the compressed air supply means is preferably provided with a valve which can be switched between two positions of a compressed air supply position and an atmosphere open position. When the compressed air supply means does not open to the atmosphere, a predetermined atmospheric pressure is always applied to the supply passage, and when the opening / closing means is opened, it is possible to hinder the discharge of the lap liquid from the lap liquid storage chamber to the supply passage. Because there is a nature.

As described in claim 3, the amount of compressed air supplied by the compressed air supply means at one time is preferably such that all the lapping liquid accumulated in the supply passage is pushed out to the processing portion of the lapping machine. That is, since the entire amount of the lapping liquid accumulated in the supply passage is pushed out to the processing portion of the lapping machine each time the supply is performed, the supply passage is cleaned for each supply.
Therefore, the abrasive grains do not settle in the supply passage or cause clogging.

According to a fourth aspect of the present invention, a plurality of supply passages are provided for supplying the lapping liquid to the plurality of processing parts of the lapping machine, and the discharge port, the opening / closing means and the compressed air supply means are individually provided in the respective supply passages. Therefore, the operation timings of the opening / closing means and the compressed air supply means may be individually set in accordance with the supply timing to each processing section. The required amount of lapping liquid for the lapping machine differs depending on the position of each processing section. Therefore, by providing an outlet, an opening / closing means, a compressed air supply means, and a supply passage for each processing section, an optimum amount of lapping liquid can be supplied to each processing section.

According to a fifth aspect of the present invention, the lapping liquid tank connected to the lapping liquid storage chamber via the delivery passage and the return passage, and the lapping liquid in the lapping liquid tank to the lapping liquid storage chamber via the delivery passage. And a wrap liquid is constantly circulated between the lap liquid storage chamber and the lap liquid tank, and the delivery pump keeps the lap liquid pressure in the lap liquid storage chamber substantially constant. Is desirable. Since the lapping liquid agitated by the delivery pump is constantly circulated between the lapping liquid storage chamber and the lapping liquid tank, the abrasive grains do not settle on the way and the mixing degree of the lapping liquid does not change. And since the delivery pump keeps the lap liquid pressure in the lap liquid storage chamber substantially constant,
The amount of lapping liquid discharged to the supply passage does not vary depending on the opening / closing time of the opening / closing means. Therefore, a preset amount of lapping liquid can be accurately supplied.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an overall system of a first embodiment of the present invention. 1 is a conventionally known two-way type lapping machine which holds a plurality of works between upper and lower surface plates. A carrier, a sun gear, and a ring gear (all not shown) are arranged, and while the lapping liquid in which the abrasive grains are mixed is injected, the sun gear and the ring gear are driven by the drive motor to rotate and revolve the carrier, The upper and lower surfaces are polished.

A plurality of supply holes 2 for supplying the lapping liquid to each processing portion are provided on the upper surface of the lapping machine 1. Each of the supplying holes 2 is provided with a lapping liquid supplying device 10 and a plurality of supplying hoses 3. It is connected. The lapping liquid supply device 10 is shown in FIG.
As shown in FIG. 3, the main body 11 is provided, and inside the main body 11, one lapping liquid storage chamber 12 for storing the lapping liquid R containing abrasive grains, a lapping liquid storage chamber 12, and an outlet 13 are provided. A plurality of (here, four) valve chambers 14 communicating with each other and a liquid reservoir 15 provided at the bottom of each valve chamber 14 are formed.

In each valve chamber 14, a valve element 16 for opening and closing the discharge port 13 is arranged so as to be movable in the horizontal direction.
Is driven in the front-back direction by a shaft 18 of a valve drive device 17 fixed to a side portion of the main body 11. The valve body 16 and the valve drive device 17 constitute an opening / closing means. In this embodiment, an air cylinder is used as the valve drive device 17, but a hydraulic cylinder may be used, or a solenoid or the like may be used. Return spring 19 on shaft 18
Is interposed and always urges the valve element 16 in a direction to close it. An elastic body 16a such as rubber is attached to the tip of the valve body 16 so as to surely close the discharge port 13.

An outlet hole 20 is provided at the lower end of the liquid reservoir 15, and the supply hose 3 is connected to the outlet hole 20. By the liquid reservoir 15 and the supply hose 3,
A supply passage for accumulating a predetermined amount of the lapping liquid R discharged from the discharge port 13 is configured. The supply hose 3 is a thin hose that does not flow out by its own weight due to the surface tension of the wrap liquid.

An air hole 21 for supplying compressed air is provided in the upper portion of the valve chamber 14, and the air hole 21 is connected to a compressed air source 23 (see FIG. 1) via an air hose 22. Although only one air hose 22 is shown in FIG. 1, the number of air hoses 22 corresponding to each valve chamber 14 is actually connected. In the middle of each air hose 22, a switching valve 24 is provided which can switch between a compressed air supply position and an atmosphere open position. When the switching valve 24 is switched to the compressed air supply position, the compressed air passes through the valve chamber 14 and the liquid reservoir 1
5 and the lapping liquid accumulated in the supply passage
Can be extruded into the supply hole 2.

As shown in FIG. 3, an inflow port 12a and an outflow port 12b for the lapping liquid R are provided at both ends of the lapping liquid storage chamber 12, and the inflow port 12a is delivered through a delivery hose 25. It is connected to a pump 26, and the outlet 12b is connected to a wrap liquid tank 28 via a return hose 27. As a result, the lapping liquid R is constantly circulated between the lapping liquid storage chamber 12 and the lapping liquid tank 28, and the abrasive grains of the lapping liquid R do not settle and separate in the lapping liquid storage chamber 12. Also,
The delivery pump 26 is a metering pump, and the pump keeps the lapping liquid pressure in the lapping liquid storage chamber 12 substantially constant. Therefore, when the discharge port 13 is opened, the amount of the lapping liquid R discharged per unit time is increased. Can be constant. A stirrer may be provided in the lapping liquid tank 28 to stir the lapping liquid R and prevent the abrasive grains from settling and separating. The valve drive device 17 and the switching valve 24 are controlled by a control device 30 in which a predetermined program is stored.

The operation of the lapping liquid supply device 10 will be described below with reference to FIGS. 4 and 5. In the initial state (a), the valve body 16 is in the forward position, and the valve body 16 closes the discharge port 13. In addition, the switching valve 24
Is in the open position. Therefore, the lapping liquid R is not accumulated in the supply hose 3 and the liquid reservoir 14. Next, when the valve body 16 is retracted as shown in (b), the discharge port 1
3 is opened, the lapping liquid R in the lapping liquid storage chamber 12 flows into the liquid reservoir 15 through the valve chamber 14 and fills the supply hose 3. After the valve body 16 is opened for a predetermined time, (c)
The valve body 16 is moved forward as in the above, and the discharge port 13 is closed again. In this state, the lapping liquid R is stored in the liquid reservoir 15 and the supply hose 3 by a predetermined amount. Next, the switching valve 2
When 4 is switched to the compressed air supply position, compressed air is supplied from the air hole 21 to the valve chamber 14 as shown in (d),
The compressed air acts on the lapping liquid R accumulated in the liquid reservoir 15 and pushes the lapping liquid R toward the lapping machine 1. The supply time (discharge time) of the compressed air is set to be equal to or longer than the time for which the entire amount of the lapping liquid R accumulated in the liquid reservoir 15 and the supply hose 3 is pushed out to the processing portion of the lapping machine 1. That is, compressed air is supplied until the supply hose 3 becomes empty. As described above, since the entire amount of the lapping liquid R accumulated in the supply passages 3 and 15 is pushed out to the processing portion of the lapping machine 1 every time it is supplied, the supply hose 3 is cleaned for each supply. Therefore, after stopping the supply once, the lapping liquid R stays in the hose 3 until the next supply is started, and the mixed abrasive grains settle and separate in the hose 3. Can be resolved. Then, when the supply is started next time, the lapping liquid R which is accurately mixed from the initial stage can be supplied to the lapping machine 1.

In the above description, the operation of the single valve body 16 and the single switching valve 24 has been described, but the individual valve bodies 16 and the switching valves 24 provided corresponding to the plurality of supply holes 2 are controlled. The device 30 can be driven at a supply timing suitable for each supply hole 2. For example, the supply hole 2 on the inner diameter side of the lapping machine 1 may be subjected to arbitrary control such as shortening the supply interval (increasing the supply amount of the lapping liquid) compared to the supply hole 2 on the outer diameter side. it can.
Further, generally, a large amount of lapping solution is required at the initial stage of lapping, but not so much amount at the end of lapping. Therefore, it is possible to control the supply interval of the wrap liquid to be short at the beginning of the lap and long at the end of the lap. In addition, the hole diameter of the discharge port 13 is set to the supply location (supply hole 2).
You may change each time. That is, the discharge amount of the lapping liquid per unit time may be changed for each supply place. Although the lap liquid is circulated between the lap liquid storage chamber 12 and the lap liquid tank 28 in the above embodiment, the lap liquid tank 2
8 may be omitted and only the lap liquid storage chamber 12 may be configured. In this case, it is desirable to provide a stirring means in the lapping liquid storage chamber 12 in order to prevent the abrasive grains of the lapping liquid from settling.

[0020]

As described above, according to the lap liquid supply device of the present invention, the opening / closing means is opened to discharge the lap liquid from the lap liquid storage chamber to the supply passage through the discharge port, and the lap liquid of a predetermined amount is discharged. After the lapping liquid has been accumulated in the supply passage, the opening / closing means is closed and compressed air is supplied to the supply passage so that the lapping liquid accumulated in the supply passage by the compressed air is forced out to the lapping machine. The supply amount of the lapping liquid can be stabilized, and even if the supply passage is narrowed, the flow of the lapping liquid is not hindered. Further, the time that the lapping liquid stays in the hose can be shortened, and the lapping liquid mixed accurately can always be supplied to the processing section.

[Brief description of drawings]

FIG. 1 is an overall view of an example of a system using a lapping liquid supply device according to the present invention.

FIG. 2 is a vertical cross-sectional view of a lapping liquid supply device.

3 is a cross-sectional view taken along the line AA of FIG.

FIG. 4 is an operation explanatory view of the wrap liquid supply device.

FIG. 5 is a time chart showing the operation of a valve body and a switching valve of the lapping liquid supply device.

FIG. 6 is a perspective view of an example of a conventional lapping liquid supply device.

FIG. 7 is a perspective view of another example of a conventional lapping liquid supply device.

[Explanation of symbols]

1 lap machine 3 supply hose 10 Lap liquid supply device 12 Lap liquid storage chamber 13 outlet 15 Liquid pool 16 valve body 17 Valve drive 21 air holes 23 Compressed air source 24 switching valve 26 Delivery pump 28 Lap liquid tank 30 control device

Claims (5)

[Claims] 1. A lap liquid storage chamber for storing a lap liquid containing abrasive grains, a discharge port for discharging the lap liquid from the lap liquid storage chamber, an opening / closing means for opening / closing the discharge port, and a discharge port for discharging the lap liquid. A predetermined amount of the lapping liquid is accumulated, and a supply passage for supplying this lapping liquid to the processing part of the lapping machine and compressed air are intermittently supplied to the above-mentioned supply passage to wrap the lapping liquid accumulated in the supply passage. A lapping liquid supply device, comprising: compressed air supply means for pushing the processing part of the board. 2. The lapping liquid supply apparatus according to claim 1, wherein the compressed air supply means is provided with a valve that can be switched between two positions of a compressed air supply position and an atmosphere open position. 3. The amount of compressed air supplied by the compressed air supply means at one time is an amount by which all of the lapping liquid accumulated in the supply passage is pushed out to the processing portion of the lapping machine. 1. The lapping liquid supply device according to 1 or 2. 4. A plurality of supply passages are provided for supplying a lapping liquid to a plurality of processing parts of the lapping machine, and the discharge port, the opening / closing means and the compressed air supply means are individually provided in each of the supply passages. 4. The lapping liquid supply apparatus according to claim 1, wherein the operation timings of the opening / closing means and the compressed air supply means are individually set in accordance with the supply timing to each processing section. 5. A lapping liquid tank connected to the lapping liquid storage chamber via a delivery passage and a return passage, and a delivery pump for delivering the lapping liquid in the lapping liquid tank to the lapping liquid storage chamber via the delivery passage. Is provided, the lap liquid is constantly circulated between the lap liquid storage chamber and the lap liquid tank, and the lap liquid pressure in the lap liquid storage chamber is kept substantially constant by the delivery pump. The lapping liquid supply device according to any one of claims 1 to 4.