JP2008229795A - Machining device and machining method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a machining device capable of improving an operating rate, reducing a maintenance work time and reducing costs of expendables by attaining longer life of a switch valve. <P>SOLUTION: The machining device for generating high-pressure machining water 6 by pressurizing machining water 5 including abrasive particles and machining a target object 8 by injecting the high-pressure machining water 6 comprises tanks T1-T4 for respectively storing the machining water 5, a pump 4 for pressurizing the machining water 5 respectively stored in the tanks T1-T4, pump system piping P1-P4 for respectively connecting the pump 4 and tanks T1-T4, switch valves V1-V4 arranged on the pump system piping P1-P4, nozzle system piping J1-J4 respectively connected with the tanks T1-T4, and nozzles N1-N4 respectively connected with the nozzle system piping J1-J4. The switch valves V1-V4 make the pump system piping P1 and P2 open so as to inject the high-pressure machining water 6 from the nozzles N1 and N2 respectively connected with the tanks T1 and T2. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a processing apparatus and a processing method using high-pressure processing water containing abrasive grains (abrasive material).

  A conventional processing apparatus and processing method using high-pressure processing water containing abrasive grains will be described. Here, as an example, a description will be given of cutting by so-called abrasive water jet, in which high-pressure processing water containing abrasive grains is sprayed onto an object to cut the object. In this cutting, processed water in which fine abrasive grains such as silica, garnet, diamond and the like are mixed is used. Then, the processing water stored in the processing water storage tank is pressurized by the pressurizing means, and is introduced into the nozzle via the delivery pipe and the electromagnetic switching valve, and as a water jet made of high-pressure processing water. Injected (see, for example, Patent Document 1).

Japanese Patent Laying-Open No. 2005-230921 (page 5-7, FIG. 2)

  However, according to the above-described conventional technology, the high-pressure machining water containing abrasive grains passes through the inside of the electromagnetic switching valve, and the electromagnetic switching valve is used to start and end the operation of injecting the machining water. Is going. As a result, high-pressure processing water containing abrasive grains passes through the electromagnetic switching valve. Therefore, since the member which comprises an electromagnetic switching valve wears, there exists a problem that the lifetime of an electromagnetic switching valve is short. As a result, problems such as a decrease in operating rate, an increase in maintenance work time, and an increase in the cost of consumable parts occur in the processing apparatus.

  The present invention is a processing device that injects high-pressure processing water (a high-pressure processing water) containing abrasive grains, and is a processing device that can improve the operation rate, reduce maintenance work time, reduce consumable parts costs, and the like. It is intended to provide.

  In order to solve the above-described problems, the processing apparatus according to the present invention generates high-pressure processing water (6) by pressurizing processing water (5) that is stored in a plurality of tanks (T1 to T4) and contains abrasive grains. A processing device that generates and processes the object (8) by injecting the high-pressure processing water (6), and adds the processing water (5) stored in each of the plurality of tanks (T1 to T4). Pressure pump (4), a plurality of pump system pipes (P1 to P4) provided to connect the pump (4) and a plurality of tanks (T1 to T4) respectively, and a plurality of pump system pipes (P1 to P1) One or a plurality of switching valves (VS, V1 to V4) provided in P4), a plurality of nozzle system pipes (J1 to J4) respectively connected to a plurality of tanks (T1 to T4), and a plurality of nozzle systems Plural noses connected to the pipes (J1-J4) (N1 to N4) and one or more switching valves (VS, V1 to V4) from one nozzle (N1) connected to one tank (T1) among the plurality of tanks (T1 to T4). One pump system pipe (P1) connected to one tank (T1) is opened so that the high-pressure processed water (6) is injected.

  Moreover, the processing apparatus which concerns on this invention produces | generates high-pressure processing water (6) by pressurizing the processing water (5) each stored by several tanks (T1-T4) and containing an abrasive grain, This high-pressure processing water A processing device for processing the object (8) by injecting (6), wherein the pump (4) pressurizes the processing water (5) respectively stored in the plurality of tanks (T1 to T4); A plurality of pump system pipes (P1 to P4) provided to connect the pump (4) and a plurality of tanks (T1 to T4), respectively, and 1 provided in a plurality of pump system pipes (P1 to P4) Alternatively, a plurality of switching valves (VS, V1 to V4), a plurality of nozzle system pipes (J1 to J4) connected to a plurality of tanks (T1 to T4), and a plurality of nozzle system pipes (J1 to J4), respectively. A plurality of nozzles (N1 to N4) connected to each other In addition, one or more switching valves (VS, V1 to V4) are two or more nozzles (N1 to N4) respectively connected to two or more tanks (T1 to T4) among the plurality of tanks (T1 to T4). ), Two or more pump system pipes (P1 to P4) respectively connected to two or more tanks (T1 to T4) are opened so that the high-pressure processed water (6) is injected from To do.

  The processing device according to the present invention includes a plurality of weight sensors (S1 to S4) for measuring the weight of the processing water (5) stored in the plurality of tanks (T1 to T4), respectively, in the above processing device. One or two or more nozzles (N1 to N4) that inject high-pressure processed water (6) according to the weight of the processed water (5) measured in each of the plurality of tanks (T1 to T4) are selected. A control unit (9), and the control unit (9) is configured to open one or more pump lines (P1 to P4) connected to one or more nozzles (N1 to N4), respectively. The switching valve (VS, V1 to V4) is controlled.

  Moreover, the processing method which concerns on this invention is a high-pressure processing water (6) by pressurizing the processing water (5) which is each stored by several tanks (T1-T4) and contains an abrasive grain using a pump (4). And processing the object (8) by injecting the high-pressure processed water (6), wherein the pump (4) and a plurality of tanks (T1 to T4) are connected to each other. The step of switching so that one pump system pipe (P1) among the plurality of provided pump system pipes (P1 to P4) is opened, and one tank (T1) connected to one pump system pipe (P1) ) Pressurizing the processing water (5) stored in the tank (T1) and the high-pressure processing water (6) generated from the processing water (5) stored in the tank (T1) in one tank (T1). Spraying from one nozzle (N1) connected to Together provided, characterized in that one nozzle (N1) is one of a plurality of nozzles (N1-N4), each connected to a plurality of tanks (T1-T4).

  Moreover, the processing method which concerns on this invention is a high-pressure processing water (6) by pressurizing the processing water (5) which is each stored by several tanks (T1-T4) and contains an abrasive grain using a pump (4). And processing the object (8) by injecting the high-pressure processed water (6), wherein the pump (4) and a plurality of tanks (T1 to T4) are connected to each other. The step of switching so that two or more pump system pipes (P1 to P4) among the plurality of provided pump system pipes (P1 to P4) are opened, and two or more pump system pipes (P1 to P4) From the process of pressurizing the processing water (5) stored in two or more connected tanks (T1 to T4) and the processing water (5) stored in two or more tanks (T1 to T4) The generated high-pressure processed water (6) is divided into two or more tanks (T1-T4 And spraying from two or more nozzles (N1 to N4) each connected to a plurality of nozzles (N1 to N4) are connected to a plurality of tanks (T1 to T4), respectively. N4) is two or more of N4).

  Further, the processing method according to the present invention includes a step of measuring the weight of the processing water (5) stored in each of the plurality of tanks (T1 to T4) and the plurality of tanks (T1 to T4) in the above processing method. And a step of selecting one or more nozzles (N1 to N4) for injecting the high-pressure processed water (6) according to the weight of the processed water (5) measured in each of Then, the pump system piping (P1 to P4) respectively connected to one or two or more nozzles (N1 to N4) is opened.

  According to the present invention, the high-pressure processing water (6) generated by pressurizing the processing water (5) containing abrasive grains does not pass through the switching valves (VS, V1 to V4). As a result, the wear of the members constituting the switching valve (VS, V1 to V4) is greatly reduced, so that the life of the switching valve (VS, V1 to V4) can be extended. Therefore, in the processing apparatus, problems such as a decrease in operating rate, an increase in maintenance work time, and an increase in the cost of consumable parts are suppressed.

  Further, according to the present invention, the high-pressure processed water (6) is jetted from two or more nozzles (N1 to N4) respectively connected to two or more tanks (T1 to T4). This greatly improves the processing efficiency.

  The high pressure working water (6) is generated by pressurizing the working water (5) containing the abrasive grains, and the high pressure working water (6) is injected to each of the processing devices for processing the object (8). Four tanks (T1 to T4) for storing water (5), a pump (4) for pressurizing the processing water (5) stored in each of the four tanks (T1 to T4), and a pump (4 ) And four tanks (T1 to T4) are connected to each other, and four pump system pipes (P1 to P4) provided to connect the four tanks (T1 to T4) and four pump system pipes (P1 to P4) are provided. Four switching valves (V1 to V4), four nozzle pipes (J1 to J4) connected to four tanks (T1 to T4), and four nozzle pipes (J1 to J4), respectively. And four nozzles (N1 to N4) connected to each other. The four switching valves (V1 to V4) are supplied with high-pressure processed water (6) from two nozzles (N1, N2) respectively connected to two tanks (T1, T2) among the four tanks (T1 to T4). The two pump system pipes (P1, P2) respectively connected to the two tanks (T1, T2) are opened so as to be injected.

  A first embodiment of a processing apparatus according to the present invention will be described with reference to FIG. FIG. 1 is a piping system diagram schematically showing the configuration and operation of a processing apparatus according to the present embodiment. In addition, in order to make it easy to understand, any drawing used in the following description is schematically omitted or exaggerated as appropriate. Further, a water source tank and a tank for storing processing water containing abrasive grains are shown in a sectional view. Further, in each of the following examples, semiconductor chips mounted on a circuit board are collectively sealed with a resin to form a sealing body, and then the sealing body is formed along a grid-like cutting line orthogonal thereto. The case of cutting off will be described. In this case, an electronic component (package) which is a final product is a portion corresponding to one cut lattice.

  In the processing apparatus shown in FIG. 1, a water source 1 is provided. The water source 1 stores water 2 containing no abrasive grains and pressurizing water 2. A high pressure pump 4 and a switching valve VS are sequentially connected to the water source 1 via a water supply system pipe 3. Two tanks T1 and T2 are connected to the switching valve VS via two pump system pipes P1 and P2, respectively. The two tanks T1 and T2 are both filled with the processing water 5 containing abrasive grains. Nozzle pipes J1 and J2 are connected to the tanks T1 and T2, respectively. Nozzles N1 and N2 are connected to the tips of the nozzle system pipes J1 and J2, respectively. And the high-pressure process water 6 can be injected from the front-end | tip of nozzle N1, N2, respectively.

  Below the nozzles N1 and N2, a stage 7 is provided opposite to the nozzles N1 and N2. On the upper surface of the stage 7, a sealing body 8 to be processed is fixed by means such as adsorption or adhesion. The nozzles N1 and N2 can be moved independently or integrally in either the XY (horizontal) direction or the Z (vertical) direction shown in FIG. 1 and can be positioned with high accuracy. Has been.

  Both the tanks T1 and T2 are substantially filled with the processing water 5 containing abrasive grains. Here, the tanks T1 and T2 being “substantially filled” means that a case where a slight amount of bubbles or spaces remain inside the tanks T1 and T2 is included. Inside the tanks T1 and T2, the tips of the pump system pipes P1 and P2 are located near the lower bottom, and the tips of the nozzle system pipes J1 and J2 are located near the upper bottom, respectively. Weight sensors S1 and S2 made of load cells and the like are attached to the outer bottoms of the tanks T1 and T2, respectively.

  A control unit 9 is provided in the processing apparatus of FIG. The control unit 9 is a control unit that controls the high-pressure pump 4, the switching valve VS, and the like as necessary. The control unit 9 is connected with wiring for receiving data from the weight sensors S1 and S2 and wiring for sending control signals to the high-pressure pump 4 and the switching valve VS, respectively. In FIG. 1, these wirings are virtually indicated by thin broken arrows. Note that data and control signals may be exchanged wirelessly.

  Hereinafter, a method of cutting the sealing body 8 as an object using the processing apparatus of FIG. 1 will be described. Here, the case where the high pressure processed water 6 is injected from the nozzle N1 as one nozzle will be described. Before the start of the cutting process, the tanks T1 and T2 are substantially filled with the processing water 5 containing abrasive grains. Before the start of the cutting process, the ratio of the abrasive grains contained in the processed water 5 to the processed water 5 (hereinafter referred to as “ratio” in some cases) is a predetermined value. Here, the ratio in the cutting process is preferably in a certain range. The reason is that the higher the ratio, the better the cutting efficiency. On the other hand, when the ratio exceeds the upper limit, it is difficult to agitate and uniformly distribute the abrasive grains in the tanks T1 and T2. .

  First, the control unit 9 sends a control signal to the high-pressure pump 4 in a state where both the pump system pipes P1 and P2 are closed. Accordingly, the high-pressure pump 4 generates pressurized water that has been pressurized by pressurizing the pressurized water 2 supplied from the water source 1, and supplies the pressurized water to the switching valve VS. Thereafter, the switching valve VS is actuated by a control signal sent out by the control unit 9. In the case shown in FIG. 1, the switching valve VS operates so as to open the pump system pipe P1.

  Next, high-pressure pressurized water is supplied (injected) to the tank T1 via the pump system pipe P1. Thereby, the processing water 5 containing abrasive grains is stirred inside the tank T1. In addition, by injecting pressurized water into the tank T1, pressurized working water 5, in other words, high-pressure working water 6 is sent from the inside of the tank T1 to the nozzle system pipe J1. As a result, the high-pressure processed water 6 is jetted from the nozzle N1 via the nozzle system pipe J1. And the sealing body 8 is cut | disconnected by injecting the high-pressure process water 6 containing an abrasive grain toward the sealing body 8 at high speed. Here, the sealing body 8 has orthogonal grid-like cutting lines. Therefore, the sealing body 8 can be cut by appropriately moving the nozzle N1 in the XY directions. Thereby, the sealing body 8 is separated into pieces and a package is completed.

  As described above, according to the present embodiment, the pressurizing water 2 that does not include abrasive grains passes through the switching valve VS. On the other hand, the high-pressure machining water 6 containing abrasive grains does not pass through the switching valve VS. As a result, the wear of the members constituting the switching valve VS is greatly reduced, so that the life of the switching valve VS can be extended. Therefore, in the processing apparatus, problems such as a decrease in operating rate, an increase in maintenance work time, and an increase in the cost of consumable parts are suppressed.

  Here, operations of the weight sensors S1, S2 and the control unit 9 will be described. The weight sensors S1, S2 detect the weight of the processed water 5 stored in the tanks T1, T2, and send the weight data to the control unit 9. Since the weights and capacities of the tanks T1 and T2 and the specific gravity of the abrasive grains are known, if the weight of the processing water 5 is known, the ratio of the abrasive grains contained in the processing water 5 can be calculated.

  By the way, when the cutting process is repeated in the state of FIG. 1, since the abrasive grains flow out in the tank T1, the ratio gradually decreases. And when this ratio becomes too small, cutting efficiency is remarkably lowered, which is not preferable. Therefore, the control unit 9 calculates the weight of the processing water 5 as needed, and determines that the ratio of the abrasive grains contained in the processing water 5 in the tank T1 is too low when the weight falls below a specified value. . And the control part 9 sends out a control signal, operates the switching valve VS, closes pump system piping P1, and opens pump system piping P2. Thereby, the sealing body 8 can be cut | disconnected using the processing water 5 which always has the ratio of an appropriate abrasive grain. Further, the abrasive grains can be replenished to the tank T1 after the pump system pipe P1 is closed.

  A second embodiment of the processing apparatus according to the present invention will be described with reference to FIG. FIG. 2 is a piping diagram schematically showing the configuration and operation of the processing apparatus according to the present embodiment. Note that, in any of the drawings used in the following description, the same components as those shown in FIG. The feature of this embodiment is that not only the two nozzles N1 and N2 operate one by one, but also two can operate simultaneously. Here, “operating” of the nozzles N1 and N2 means that the high-pressure processed water 6 is jetted from the nozzles N1 and N2.

  In the processing apparatus shown in FIG. 2, instead of the switching valve VS shown in FIG. 1, switching valves V1, V2 are provided in the pump system pipes P1, P2, respectively. The switching valves V1 and V2 can open and close the pump system pipes P1 and P2 independently of each other according to control signals received from the control unit 9, respectively.

  According to the processing apparatus shown in FIG. 2, as in the case of the first embodiment, problems such as a decrease in operating rate, an increase in maintenance work time, and an increase in consumable part costs are suppressed in the processing apparatus. In addition, the following operation is possible. That is an operation of simultaneously injecting the high-pressure machining water 6 from the nozzles N1, N2 by opening both the switching valves V1, V2. Thereby, the efficiency of a cutting process improves significantly.

  Further, the nozzles N1 and N2 can be moved independently of each other and can be configured with high accuracy. According to this configuration, the nozzles N <b> 1 and N <b> 2 move independently of each other, whereby the sealing body 8 can be cut along cutting lines having different shapes. Therefore, appropriate cutting processing according to various cutting lines becomes possible.

  A third embodiment of the processing apparatus according to the present invention will be described with reference to FIGS. FIG. 3 is a piping diagram schematically illustrating the configuration and operation of the processing apparatus according to the present embodiment. FIG. 4 is a piping diagram schematically showing another operation of the processing apparatus of FIG. The feature of this embodiment is that four nozzles are provided, and that these four nozzles can operate not only one by one but also two to four simultaneously.

  In the processing apparatus shown in FIGS. 3 and 4, the system from pressurizing the processing water 5 in the tanks T1 to T4 to injecting the high-pressure processing water 6 is composed of the following members. The four pump system pipes P1 to P4, the four switching valves V1 to V4, the four tanks T1 to T4, the four weight sensors S1 to S4, and the four nozzle system pipes J1 to J4. J4 and four nozzles N1 to N4. Here, the switching valves V <b> 1 to V <b> 4 can open and close the pump system pipes P <b> 1 to P <b> 4 independently of each other in accordance with control signals received from the control unit 9. The operations of the weight sensors S1 to S4 and the control unit 9 are the same as those in the first embodiment.

  According to the processing apparatus shown in FIG. 3 and FIG. 4, the following operations are possible by appropriately operating the switching valves V1 to V4. First, one nozzle out of the nozzles N1 to N4 is an operation for injecting the high-pressure processed water 6. Second, as shown in FIG. 3, two nozzles (nozzles N <b> 1 and N <b> 2 in FIG. 3) of the nozzles N <b> 1 to N <b> 4 are simultaneously jetting the high-pressure processed water 6. In addition, the number of nozzles operating simultaneously can be three. Third, as shown in FIG. 4, all nozzles, that is, four nozzles N <b> 1 to N <b> 4 simultaneously jet high-pressure processed water 6.

  As described above, according to the present embodiment, the following effects can be obtained. First, as in the case of the first embodiment, problems such as a decrease in operating rate, an increase in maintenance work time, and an increase in consumable part costs are suppressed in the processing apparatus. Second, as shown in FIG. 3, if a nozzle group consisting of two nozzles N1 and N2 is used at the same time and the ratio of abrasive grains decreases, another nozzle group consisting of two nozzles N3 and N4 is used. Can be used. Thereby, like the case of Example 2, the efficiency of a cutting process improves significantly. Thirdly, by operating three to four nozzles simultaneously among the nozzles N1 to N4, the efficiency of the cutting process is further greatly improved.

  In the present embodiment, similarly to the second embodiment, the nozzles N1 to N4 can be moved independently and can be positioned with high accuracy. According to this configuration, the nozzles N1 to N4 move independently of each other, whereby the sealing body 8 can be cut along cutting lines having different shapes. Therefore, appropriate cutting processing according to various cutting lines becomes possible.

  In addition, the switching valves V1 to V4 are provided in the pump system pipes P1 to P4, respectively. Instead of this, a switching valve similar to the switching valve VS used in the first embodiment may be used. In this case, one switching valve operates to simultaneously close four of the pump system pipes P1 to P4 and operates to open one to four simultaneously.

  In each of the embodiments described so far, the processing water 5 containing abrasive grains is stored in the plurality of tanks T1 to T4, and the processing water 5 is pressurized with pressurized water. However, the present invention is not limited to this, and the inside of the plurality of tanks may be divided into two chambers by an isolator, and processing water containing abrasive grains and water for pressurization may be stored in each of the two chambers. In this case, pressurizing water pressurizes the processed water through the separation plate. In other words, the “processed water 5 stored in the tank” referred to in the present invention includes the processed water stored in one chamber separated by the separation plate in the tank.

  Moreover, according to each Example, the processing water 5 containing an abrasive grain is stored in the inside of tank T1-T4, a high pressure is added to the processing water 5, the high pressure processing water 6 is produced | generated, It was decided to eject from nozzles N1 to N4. As a piping system for applying a high pressure to the processed water 5, a configuration other than the configuration shown in FIGS. Even in those configurations, the present invention is not provided by a switching valve in a piping system in which high-pressure machining water containing abrasives flows, but in a piping system in which water for pressurization flows without containing abrasive grains. Applied.

  Further, a case has been described in which semiconductor chips mounted on a circuit board are collectively sealed with a resin to form a sealing body, and the sealing body is cut along orthogonal grid-like cutting lines. The present invention is not limited to this, and the present invention can also be applied when cutting other objects. In addition to the purpose of cutting, the present invention may be applied for the purpose of disassembling in order to dispose of unnecessary materials, in addition to completing the product.

  Moreover, in the sealing body 8 which is the object to be cut, the cutting lines may be in the form of orthogonal grids or may not be orthogonal. Furthermore, in the above-described embodiments, the case where the cutting line is a line segment (a part of a straight line) has been described. The present invention is not limited to this, and the present invention is also applied to a case where the cutting line includes a broken line (a line in which a plurality of line segments are connected). And this invention is applied also when a cutting line contains a curve. By these, the processing apparatus which can cut | disconnect along the cutting line which consists of a broken line and a curve can be provided.

  Moreover, cutting was demonstrated as a process. As processing other than cutting, the present invention is also applied to processing such as surface modification by drilling, cutting, polishing, and peening of a stop hole or a through hole.

  In addition, the water containing abrasive grains may contain other substances for some purpose. Examples of the other substance include a cleaning agent.

  In addition, the present invention is not limited to the above-described embodiments, and may be arbitrarily combined, changed, or selected as necessary without departing from the spirit of the present invention. It can be done.

FIG. 1 is a piping system diagram schematically showing the configuration and operation of a processing apparatus according to Embodiment 1 of the present invention. FIG. 2 is a piping system diagram schematically showing the configuration and operation of a processing apparatus according to Embodiment 2 of the present invention. FIG. 3 is a piping diagram schematically showing the configuration and operation of the processing apparatus according to the third embodiment of the present invention. FIG. 4 is a piping diagram schematically showing another operation of the processing apparatus of FIG.

Explanation of symbols

1 Water source 2 Water for pressurization 3 Water supply system piping 4 High-pressure pump (pump)
5 Processed water 6 High-pressure processed water 7 Stage 8 Sealed body (object)
9 Control part J1-J4 Nozzle system piping N1-N4 Nozzle P1-P4 Pump system piping S1-S4 Weight sensor T1-T4 Tank VS, V1-V4 Switching valve

Claims (6)

A processing device that generates high-pressure processing water by pressurizing processing water that is stored in each of a plurality of tanks and contains abrasive grains, and that processes an object by spraying the high-pressure processing water,
A pump for pressurizing the processing water stored in each of the plurality of tanks;
A plurality of pump system pipes provided to connect the pump and the plurality of tanks;
One or more switching valves provided in the plurality of pump system pipes;
A plurality of nozzle system pipes respectively connected to the plurality of tanks;
A plurality of nozzles respectively connected to the plurality of nozzle system pipes,
The one or more switching valves open one pump system pipe connected to the one tank so that the high-pressure processed water is injected from one nozzle connected to one of the plurality of tanks. A processing device characterized by that. A processing device that generates high-pressure processing water by pressurizing processing water that is stored in each of a plurality of tanks and contains abrasive grains, and that processes an object by spraying the high-pressure processing water,
A pump for pressurizing the processing water stored in each of the plurality of tanks;
A plurality of pump system pipes provided to connect the pump and the plurality of tanks;
One or more switching valves provided in the plurality of pump system pipes;
A plurality of nozzle system pipes respectively connected to the plurality of tanks;
A plurality of nozzles respectively connected to the plurality of nozzle system pipes,
The one or more switching valves are respectively connected to the two or more tanks such that the high-pressure processed water is injected from two or more nozzles connected to two or more of the plurality of tanks. A processing apparatus characterized by opening two or more pump system pipes. In the processing apparatus according to claim 1 or 2,
A plurality of weight sensors for measuring the weight of the processing water respectively stored in the plurality of tanks;
A control unit that selects one or two or more nozzles that inject the high-pressure processed water according to the weight of the processed water measured in each of the plurality of tanks;
The said control part controls the said 1 or several switching valve so that the pump system piping each connected to the said 1 or 2 or more nozzle may be opened. A processing method for generating high-pressure processing water by pressurizing processing water stored in a plurality of tanks and containing abrasive grains using a pump, and processing an object by spraying the high-pressure processing water,
A step of switching so that one pump system pipe is opened among a plurality of pump system pipes provided to connect the pump and the plurality of tanks, respectively;
Pressurizing the processing water stored in one tank connected to the one pump system pipe;
Injecting the high-pressure processed water generated from the processed water stored in the one tank from one nozzle connected to the one tank,
The processing method according to claim 1, wherein the one nozzle is one of a plurality of nozzles respectively connected to the plurality of tanks. A processing method for generating high-pressure processing water by pressurizing processing water stored in a plurality of tanks and containing abrasive grains using a pump, and processing an object by spraying the high-pressure processing water,
A step of switching so that two or more pump system pipes are opened among a plurality of pump system pipes provided to connect the pump and the plurality of tanks, respectively;
Pressurizing processing water stored in two or more tanks connected to the two or more pump system pipes;
Injecting the high-pressure processed water generated from the processed water stored in the two or more tanks from two or more nozzles respectively connected to the two or more tanks,
The two or more nozzles are two or more of a plurality of nozzles respectively connected to the plurality of tanks. In the processing method according to claim 4 or 5,
Measuring the weight of the processing water stored in each of the plurality of tanks;
Selecting one or more nozzles for injecting the high-pressure processed water according to the weight of the processed water measured in each of the plurality of tanks,
In the switching step, a pump system pipe connected to each of the one or more nozzles is opened.

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