JP2003284991A - Coating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To enable the positioning of a nozzle with high accuracy. <P>SOLUTION: A coating apparatus is constituted so that the nozzle (7) is attached to a syringe 6 housing a liquid agent and the syringe (6) is moved to coat a substrate with the liquid agent discharged from the nozzle (7), and a reflection suppressing structure is provided to the nozzle (7). Since the reflection of the nozzle (7) is suppressed, the shift of pattern recognition due to irregular reflection is eliminated. By this constitution, the positional shift of the nozzle (7) can be accurately corrected on the basis of the image processing of the image grasped by cameras (11x and 11y). <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a coating device for coating a liquid agent on an electronic device by means of a nozzle, and more particularly to improvement of a coating nozzle. A typical example of electronic equipment is a hybrid IC configured by mounting a combination of a semiconductor element and discrete components such as a resistor and a capacitor on a ceramic substrate, an organic material substrate, or the like.

[0002]

2. Description of the Related Art In the manufacture of electronic equipment, a coating device is used which applies a liquid agent made of resin from a movable nozzle to the periphery of an electronic component while applying it in a narrow space between the electronic components. In this case, it is necessary to perform a position correction operation for accurately adjusting the X, Y, and Z positions of the tip of the nozzle to the electronic component.

Conventionally, in such nozzle position correction, the nozzle is photographed by a camera, and the positional deviation is calculated by image processing.
A method of correcting the nozzle displacement based on this signal is generally used.

[0004]

However, when the nozzle is photographed by the camera, diffused reflected light from the nozzle enters the camera, so that the accurate pattern of the nozzle cannot be captured, and the accuracy of the misregistration correction by the image processing is reduced. There was a problem that it was not good. In general, many nozzles are made of metallic silver, and in that case, the phenomenon of irregular reflection is particularly remarkable.
Moreover, since many nozzles have a cylindrical shape, diffuse reflection easily occurs in terms of shape. Furthermore, when continuously correcting the displacement of the nozzle, the liquid agent dripping and the liquid agent discharged from the nozzle often drops on the nozzle tip or adheres to the peripheral portion of the nozzle tip. There is also a problem that the tip of the nozzle and the center of the nozzle cannot be accurately discriminated, and an error occurs in pattern recognition.

The present invention has been made in order to solve the above problems, and provides a coating apparatus which enables accurate positioning by accurate pattern recognition of a nozzle by using a nozzle having a reflection suppressing structure. The purpose is to provide.

[0006]

(Structure according to the invention of claim 1) In order to solve the above-mentioned problems, the invention of claim 1 is such that a nozzle is attached to a syringe containing a liquid agent,
In an application device that moves the syringe and applies the liquid agent ejected from the nozzle to an electronic device, the nozzle has a reflection suppressing structure, and an image of a video captured by a camera arranged in the lateral direction of the nozzle. It is characterized in that it is configured to correct the nozzle position deviation based on the processing.

(Structure according to the invention of claim 2) The invention of claim 2 is limited to the structure of the invention of claim 1, wherein the reflection suppressing structure has a reflectance lower than the reflectance of the nozzle body. It is characterized in that it includes a coating or plating applied to at least a part of the nozzle by a member having.

(Structure according to the invention of claim 3) The invention of claim 3 is limited to the structure of the invention of claim 1, wherein the nozzle having the reflection suppressing structure is made of a dark resin. Characterized by

(Structure according to the invention of claim 4) The invention according to claim 4 is limited to the structure of the invention according to any one of claims 1 to 3, wherein the number of the cameras is two and two directions are used. Is configured so as to capture the shadow of the nozzle.

(Structure according to the invention of claim 5) The invention according to claim 5 is limited to the structure of the invention according to claim 4, wherein the number of the cameras is two and the nozzles are arranged in two directions orthogonal to each other. It is characterized by being configured to capture the shadow of.

(Structure according to the invention of claim 6) The invention of claim 6 is limited to the structure of the invention of claim 1, wherein the cameras are two cameras, a first camera and a second camera. The first and second cameras are arranged in the same direction so that the shadow of the nozzle is captured by the first camera at the tip of the second camera from an angle different from that of the first camera. It is characterized in that a modified mirror device for catching is attached.

(Structure according to the invention of claim 7) The invention according to claim 7 is limited to the structure of the invention according to any one of claims 1 to 6, and is capable of sandwiching the nozzle and sandwiching the nozzle. It is characterized in that a cleaning member is provided to enable movement of the.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION (Appearance of Applicator) Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows an external configuration of the entire coating apparatus according to the present invention. In FIG. 1, reference numeral 1 is a table on which a printed wiring board 2 is placed, and X is set by a drive device 4 provided in a housing 3.
It is designed to be moved in the Y and Z directions. The board 2 is picked up by a camera 5 installed above, and is positioned in the X and Y directions based on pattern recognition by the picked-up image.

The resin liquid agent to be applied to the electronic device 2 is stored in the syringe 6 and discharged from the nozzle 7 provided at the tip of the syringe 6. Syringe 6
Is movably attached to a moving mechanism 8 in the Z direction (height direction). This moving mechanism 8 is a moving mechanism 9 in the X direction (lateral direction).
The moving mechanism 9 is movably attached to the moving mechanism 10 in the Y direction (longitudinal direction).
As a result, the nozzle 7 is moved and positioned in the three directions of the XYZ directions simultaneously or in any one direction. As the liquid agent, an epoxy resin, a silicon resin, or the like can be preferably used.

(Camera Positioning) As shown in FIGS. 2 and 3, the camera 11x is arranged at a position for photographing the nozzle 7 from the X direction, and the camera 11y is arranged at a position for photographing the nozzle 7 from the Y direction. There is. This camera 11x,
An image of the nozzle 7 is captured by 11y, and the moving mechanisms 8, 9 and 10 are controlled by a control signal based on the image processing to position the nozzle 7 at a predetermined position.

(Reflection Suppression Structure of Nozzle) In the present invention, in order to perform accurate positioning of the nozzle 7, the nozzle 7 is provided with a reflection suppression structure as described below, whereby the image is disturbed due to diffused reflection during photographing by the camera. Is lost.

In the first embodiment shown in FIG. 4, the nozzle 7
A reflection suppressing portion 17 is formed at the tip of the. Reflection suppression unit 1
7 is a resin coating such as Teflon (registered trademark), a plating treatment such as alumite, chromium, etc., and further, the surface of the nozzle 7 is processed with a means such as coloring of a matte paint to achieve low reflection. is there. The member used for the reflection suppressing process may be a member other than the above members as long as it has a reflectance lower than that of the main body of the nozzle 7. Further, as described above, the nozzle 7 is often made of silver-based metal, but by performing the reflection suppressing process, the reflection suppressing can be realized without changing the nozzle body. The reflection suppressing process may be performed on the entire nozzle 7, but the object can be achieved only with the nozzle tip that requires positioning accuracy.

In the second embodiment shown in FIG. 5, the nozzle 7
The entire structure is made of dark-colored resin to reduce the reflection of the nozzle 7. The type of resin is not limited, but when Teflon, nylon, or the like is used, coloring can be performed at the time of molding, and particularly by adding carbon, a black low-reflection nozzle can be easily manufactured at a low price. There are several types of "dark colors," or dark colors, but at least
This includes black, navy blue, blue and green.

Next, the operation will be described with reference to FIG. As shown in FIG. 6A, the syringe 6 in the standby position is moved in the lateral direction (arrow A1) by the moving mechanisms 9 and 10 in the X and Y directions.
Direction) to position the nozzle 7 above the measurement area.

Next, as shown in FIG. 6 (b), the syringe 6 is lowered (arrow A2 direction) and the nozzle 7 is positioned in the measurement area. At this time, the nozzle 7 is sandwiched by wiping members (cleaning members) 21 and 21 such as sponge or cloth and pulled up to the position shown by the imaginary line, so that the liquid agent adhering to the vicinity of the tip of the nozzle 7 is wiped off. I do. Instead of pulling up, it may be pulled down or moved to the left or right. The wiping members 21 and 21 described above are configured to be able to sandwich the nozzle 7 and to move the sandwiched nozzle 7.
The wiping member may be configured to be wiped without moving the nozzle. The reason why the wiping members 21 and 21 are provided is that when the liquid agent is attached to the tip of the nozzle, the shadow of the nozzle reflected in the camera is different from the original shadow, and the position is apt to be misaligned. This is to prevent

The pattern of the nozzle 7 is captured by the cameras 11x and 11y in the measurement area. Since the nozzle 7 is photographed by the two cameras 11x and 11y from the X direction and the Y direction, not only the Z direction but also the positional deviations in the X direction and the Y direction can be accurately captured. Image processing is performed on the photographed nozzle pattern, and based on this signal, the moving mechanisms 8, 9, 1
0 is controlled and positioned at the coating position. After the positioning is completed, the liquid agent of about 0.1 to 0.3 milligram is applied to the narrow application area between the electronic components depending on the area.

After the measurement is completed, as shown in FIG. 6 (c), the syringe 6 is raised, moved in the direction of arrow A3, and moved to the standby position.

By using the nozzle 7 having the reflection suppressing structure according to the first and second embodiments, the diffuse reflection of light at the nozzle 7 is almost eliminated, so that the camera 11x,
With 11y, the pattern of the nozzle can be accurately captured.

7 and 8 show a camera 11 for measuring in the X direction.
In this example, the cameras 11y for measuring the x and Y directions are arranged in the same direction. A change mirror device 14 having a reflection mirror 13 inclined at 45 degrees is attached to the tip of the camera 11x for X direction measurement, and the change mirror device 14 captures the shadow of the nozzle 7 from the X direction. The change mirror device 14 may be either the camera 11x or 11y. With this configuration, since the cameras 11x and 11y can be installed side by side in the same direction, the mounting space for the cameras can be small and space can be saved.

In FIG. 9, the nozzle 7 is connected to the cameras 11x and 11y.
In this example, the light source 16 is illuminated from the side. Thus, the nozzle 7 having a low reflection structure does not cause diffused reflection even when illuminated from the camera side, and the image of the nozzle can be accurately captured.

[0026]

As described above, according to the present invention, since the nozzle having the reflection suppressing structure is used, the disturbance of the image due to the irregular reflection is eliminated even in the normal photographing method by the camera, and the nozzle shape can be recognized as a pattern. This enables accurate positioning of the nozzle. Due to the proper positioning of the nozzle, it is possible to apply the liquid agent in a narrow space between electronic components.

According to the present invention, the surface of the nozzle having the reflection suppressing structure is processed to have low reflection by resin coating or plating. Therefore, even if the nozzle is made of metal, the nozzle main body can be processed by applying the reflection suppressing treatment. Has an effect that a reflection suppressing structure can be formed without changing.

According to the present invention, since the nozzle having the reflection suppressing structure is made of the dark resin, it can be colored during the nozzle molding. In particular, by adding carbon, the black low reflection can be easily achieved. There is an effect that the nozzle can be manufactured at a low price.

[Brief description of drawings]

FIG. 1 is an external perspective view of a coating apparatus of the present invention.

FIG. 2 is a plan view of an essential part of a coating apparatus of the present invention.

FIG. 3 is a side view of FIG.

FIG. 4 is a side view showing a first embodiment of a nozzle having a reflection suppressing structure.

FIG. 5 is a side view showing a second embodiment of a nozzle having a reflection suppressing structure.

FIG. 6 is an explanatory view of the operation of the coating device.

FIG. 7 is a main part plan view showing another example of the configuration of the coating apparatus according to the present invention.

FIG. 8 is a side view of FIG. 7.

FIG. 9 is a main part plan view showing another example of the configuration of the coating apparatus according to the present invention.

[Explanation of symbols]

6 syringes 7 nozzles 11x, 11y cameras 14 Change mirror device 15 reflective mirror 17 Reflection suppression processing unit

Claims (7)

[Claims] 1. A coating apparatus, wherein a nozzle is attached to a syringe containing a liquid agent and the syringe is moved to apply the liquid agent discharged from the nozzle to an electronic device, wherein the nozzle has a reflection suppressing structure, A coating device configured to correct a nozzle position shift based on image processing of an image captured by a camera arranged in the lateral direction of the nozzle. 2. The reflection suppressing structure includes a coating or plating applied to at least a part of the nozzle by a member having a reflectance lower than the reflectance of the nozzle body. Coating device. 3. The coating apparatus according to claim 1, wherein the nozzle having the reflection suppressing structure is made of a dark resin. 4. The coating apparatus according to claim 1, wherein the number of the cameras is two, and the shadows of the nozzles are captured from two directions. 5. The coating apparatus according to claim 4, wherein the number of the cameras is two, and the shadows of the nozzles are captured from two directions orthogonal to each other. 6. The camera comprises two cameras, a first camera and a second camera. The first and second cameras are arranged in the same direction, and the first camera catches the shadow of the nozzle. 2. The coating apparatus according to claim 1, wherein a changing mirror device that captures the shadow of the nozzle from a different angle from the first camera is attached to the tip of the second camera. 7. The coating apparatus according to claim 1, further comprising a cleaning member that can hold the nozzle and that can move the held nozzle.