JP2003283324A - Superconducting junction line - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To obtain a superconducting junction line which damps oscillations after passing over flux quantum pulses, even using an oxide type junction, etc., for generating abrupt flux quantum pulses, and allows a desired delay time to be set up, thus providing characteristics for a delay line. <P>SOLUTION: The superconducting junction line is basically composed of superconducting junctions and superconducting line inductors with resistors connected between desired points of the inductors and the ground. One or a plurality of resistors may be connected between the inductors and the ground. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates generally to the field of superconducting electronics, and in particular, a magnetic flux quantum capable of high-speed signal processing is used as a signal carrier, a measuring circuit for high-speed signal observation, and an analog for high-speed analog signal processing. The present invention relates to a superconducting flux quantum circuit used in a digital signal conversion circuit or a high speed digital data processing circuit.

[0002]

2. Description of the Related Art FIG. 2 shows an example of a conventional superconducting junction line that transfers magnetic flux quanta. In the figure, 1 is a bias current source, 2 is a superconducting junction, 3 is an inductor, the inductor 3 is connected in series, and the bias current source 1 and the superconducting junction 2 are connected at the connection point of the inductor 3. The other ends of the bias current source 1 and the superconducting junction 2 are grounded. Here, the circuit composed of the bias current source 1, the superconducting junction 2 and the inductor 3 is the minimum unit of the superconducting junction line, and if necessary, a series circuit of the bias current source 1 and the superconducting junction 2 can be formed as shown in FIG. It is possible to form a long superconducting junction line that is repeatedly connected while overlapping. The role of each superconducting junction line and that of a long superconducting junction line are the same, so there is no point in distinguishing this. , Called a unit superconducting junction line. , Inductance L of inductor 3 and superconducting junction 2
Is the product of the critical current Ic, that is, the LIc value is the magnetic flux quantum Φ ₀
If the size is smaller than 2 × 10 ⁻¹⁵ Wb (weber), the inductor 3 and the two superconducting junctions 2 on both sides of the inductor 3
There is only one magnetic flux quantum signal in the superconducting loop consisting of and. Conversely, if the LIc value is made sufficiently larger than the size of the magnetic flux quantum Φ ₀ , two or more magnetic flux quantum signals can exist in the superconducting loop. In either case, the flux quantum signal is transferred without disappearing. In a normal magnetic flux quantum circuit, a superconducting junction line having such a basic structure is used.

The role of the superconducting junction line in the superconducting flux quantum circuit is mainly the following two points. That is, (1) the magnetic flux quantum signal is inserted between circuits such as a flip-flop and a branch circuit that process the magnetic flux quantum signal to shape the waveform of the magnetic flux quantum signal. (2) A magnetic flux quantum signal is transmitted. That is, in particular, in long-distance transmission, the amplitude of the magnetic flux quantum signal is not attenuated but kept constant.

[0004]

The superconducting junction line used in the conventional superconducting flux quantum circuit has the following problems, impairing the high frequency operation of the superconducting flux quantum circuit and narrowing the circuit operating region.

When the conventional superconducting junction line is formed of a metal-based superconducting circuit and a magnetic flux quantum signal is to be transferred, no problem occurs even at high frequency operation. On the other hand, when trying to transfer a flux quantum signal in an oxide-based superconducting circuit that allows a higher operating frequency, there is a problem that the superconducting junction does not return to zero voltage instantly after the flux quantum pulse has passed. . That is, the magnetic flux quantum pulse itself can be transferred with a width of several picoseconds and without blunting of the waveform, but there is a problem that after this pulse, the oscillation around the zero voltage continues for 20 ps or more.

FIG. 3 shows how a magnetic flux quantum signal propagates in an oxide-based superconducting junction line. As you can see from the figure,
The magnetic flux quantum pulse itself has a width of several picoseconds and can be transferred without blunting the waveform, but after this pulse, the oscillation around the zero voltage continues for 20 ps or more. The waveform of FIG. 3 is the product of the critical current Ic of the superconducting junction and the normal resistance Rn,
This is the case where the IcRn product is 2 mV. When the next magnetic flux quantum signal arrives in a state where such vibration is not contained, the magnetic flux quantum pulse and vibration overlap. As a result, depending on the bias current condition for the superconducting junction line, the magnetic flux quantum signal to be transmitted is not propagated, resulting in malfunction. To wait until the vibration after the magnetic flux quantum pulse falls below a certain level, it is necessary to set the transfer interval of the magnetic flux quantum signal to be transferred to 20 ps or more. This is I
The expected high speed performance cannot be achieved by using a superconducting junction having a large cRn product.

By the way, the operating frequency of the superconducting flux quantum circuit is the product of the critical current Ic of the superconducting junction and the normal resistance Rn,
Proportional to IcRn. IcR for oxide-based superconducting junctions
The n product can be easily increased. On the other hand, the IcRn product of a metal-based superconducting junction is usually 0.2 mV to 0.4 m.
Since it is only V, there are great expectations for a superconducting junction line with an oxide-based superconducting junction.
It is essential to suppress the vibration after the magnetic flux quantum pulse as described above.

Therefore, the object of the present invention is to obtain an IcRn product of 1 m.
Even in an oxide-based superconducting junction that generates a steep magnetic flux quantum pulse from V to 2 mV, it is intended to obtain a superconducting junction line having a characteristic that vibrations after the magnetic flux quantum pulse passes quickly are contained.

[0009]

The superconducting junction line which is the object of the present invention is mounted in a superconducting flux quantum circuit in which a flux quantum is used as a signal carrier, and a superconducting pole or a superconducting wire in the circuit is brought into a superconducting state. Used at low temperature. Further, in the superconducting junction line, its transmission speed is determined by circuit parameters such as bias current, and high-speed magnetic flux quantum pulses are propagated. In view of the above problems, the present invention is directed to a superconducting junction line in which a resistor is arranged between an arbitrary location of an inductor of a superconducting junction line composed of an oxide of a superconducting superconductor and an inductor of the superconducting wire and ground. And

FIG. 1 is a diagram showing the basic structure of a superconducting junction line according to the present invention. A unit superconducting junction line composed of a bias current source 1, a superconducting junction 2 and an inductor 3 is connected in a cascade to form a superconducting junction line. As can be easily seen by comparing FIG. 1 and FIG. 2, in the present invention, a resistor 4 is provided between an arbitrary place of the inductor 3 and the ground.
Are connected. Here, the number of resistors connected between the number of divisions of the inductor 3 and the ground may be one or more.

[0011]

BEST MODE FOR CARRYING OUT THE INVENTION (Example 1) A superconducting junction line shown in FIG. 1 was produced. The superconducting junction line is made of oxide, and the cross-sectional structure of the unit superconducting junction line is shown in FIG. FIG. 4 shows a unit superconducting junction line focusing on the inductors 3 and 3 divided into two and the superconducting junctions 2 and 2 on both sides thereof, and the bias current source 1 is omitted. (A) is a plan view, (B) is a cross-sectional view as seen in the direction of the arrow at the BB position in (A), and (C) is C in (A).
It is sectional drawing seen in the arrow direction in the -C position. In the figure, 11 is a substrate, and lanthanum strontium
A single crystal of aluminum / tantalum oxide was used. Reference numeral 12 denotes a magnetic shielding film which also serves as a ground, and an yttrium / barium copper oxide thin film was used. Reference numeral 13 is an insulating film, and a lanthanum-strontium-aluminum-tantalum oxide thin film was used. Reference numerals 14 and 17 denote a lower electrode and an upper electrode for forming a superconducting junction, which are yttrium / barium copper oxide thin films, respectively. 1
An interlayer insulating film 5 is a lanthanum-strontium-aluminum-tantalum oxide thin film. Reference numeral 18 denotes a barrier layer of a superconducting junction, which is a ramp edge type and is a surface damage layer formed by irradiating an ion beam on the end surface of the lower electrode film 14 having a slope. 16
Is an Au film for functioning as the resistor 4. Reference numeral 19 denotes a superconducting thin film, which functions as an inductor 3 connecting the superconducting junctions 2. Reference numeral 20 denotes a contact, which connects the lower electrode 14 and the magnetic shield film 12 through a through hole provided in the insulating film 13. In the portion functioning as the superconducting junction 2, the upper electrode 17 and the superconducting thin film 19 are the same. Here, one end of the Au film 16 functioning as a resistor was connected to the superconducting thin film 19, and the other end was connected to the ground 12 through the superconducting junction upper electrode 17, the superconducting junction barrier layer 18 and the lower electrode 14. This is because, considering the entire process, it is more advantageous than directly grounding one end of the Au film 16 by the contact 20. Compared with the width of the barrier layer 18 of the superconducting junction 2,
It is well known that if the width of the barrier layer 18 of the superconducting junction to which one end of the film 16 is connected is made sufficiently large, a grounded state equivalent to that where one end of the Au film 16 is directly grounded by the contact 20 can be realized. is there.

With such a circuit structure, the product of the critical current of the superconducting junction and the resistance in the normal conduction state, IcRn value, is a temperature of 4.2.
It was 2 mV in K. The line width of the inductor 19 connecting the superconducting junctions 2 was set to 1 micron. The insulating layer 13 between the magnetic shield film 12 and the superconducting junction 2 is formed of lanthanum-strontium-
As a result of forming an aluminum / tantalum oxide thin film, the relative dielectric constant of this example was about 25.

FIG. 5 is a diagram for explaining the operating characteristics of the magnetic flux quantum pulse propagating through the superconducting junction line shown in FIG.
This example is a superconducting junction line in which the total length of the inductor 3 (between the superconducting junctions 2-2) is 60 microns and the value of the resistor 4 is 1 ohm. Reference numerals 30 and 31 respectively represent the pulses observed at the connection points A and B in FIG. That is, the pulse observed at the connection point A is observed at the connection point B after about 20 ps. On the other hand, in FIG. 6, the dimensions of the inductor 3 and the characteristics of the superconducting junction 2 are the same, and the connection point A of FIG.
The pulses 40 and 41 observed in B are shown. Here, the pulse 40 corresponds to the pulse 30, and the pulse 41 corresponds to the pulse 3.
Corresponds to 1.

As is apparent by comparing the two, by shunting the resistor 4 between the inductor 3 and ground,
It can be seen that the vibrations following the flux quantum pulse are significantly reduced. That is, in FIG. 5, the magnetic flux quantum pulse is slightly smaller, but the vibration following the magnetic flux quantum pulse is settled in a short time. The reason why the vibration is settled in a short time by shunting the resistor 4 between the inductor 3 and the ground is that a steep pulse damping effect is obtained by the integral action of the combination of the inductor 3 and the resistor 4 in the superconducting junction line.

As can be seen by comparing FIGS. 5 and 6, by connecting the shunt resistor 4, the propagation time of the magnetic flux quantum pulse between the adjacent superconducting junctions is extended.

FIG. 7 shows the dimensions of the inductor 3 and the characteristics of the superconducting junction 2 being the same, and the shunt resistor 4 having different values.
FIG. 4 is a diagram in which the propagation time of the magnetic flux quantum pulse between the adjacent superconducting junctions 2 in the case where is connected is evaluated. The ratio of the bias current supplied to the superconducting junction 2 from the bias current source to the critical current was set to 95% and 85%. As can be seen from these results, the propagation time of the magnetic flux quantum pulse can be increased by reducing the value of the shunt resistor 4. Further, the propagation time of the magnetic flux quantum pulse can be extended by reducing the ratio of the bias current to the critical current.

This means that not only the resistance insertion of the present invention significantly reduces the vibration of the magnetic flux quantum pulse propagating in the superconducting junction line, but also the value of the shunt resistance and the ratio of the bias current. It is also useful for adjusting the propagation time of the magnetic flux quantum pulse between adjacent superconducting junctions to a desired value. From these results, it is possible to use a superconducting junction line connected to a shunt resistor as a delay line and set the delay time to any value in a wide range. For example, in the example of FIG.
Shunt resistance is 0.5 ohm and bias rate is 85
%, The delay time for one superconducting junction line, that is, the delay time between adjacent superconducting junctions can be 52 picoseconds.

The effect of the superconducting junction line according to the present invention as a delay line will be examined. For example, when using a superconducting wire as a delay line, to obtain a delay time of 50 picoseconds,
Requires a length of 1.5 mm. On the other hand, as shown in the example of FIG. 7, the total length of the inductor 3 (between the superconducting junctions 2-2) is 60 microns,
Shunt resistance is 0.5 ohm and bias rate is 85
%, The superconducting junction line according to the present invention can obtain a delay of 52 picoseconds without extending its length, which means that it can be reduced to 1/25.

In the first embodiment, as is clear by comparing the magnetic flux quantum pulse waveforms of FIGS. 5 and 6, the shunt resistance 4
It is true that the height of the magnetic flux quantum pulse is slightly smaller in the superconducting junction line connected to, but the height of the magnetic flux quantum pulse is 2 mV, and the pulse height of the conventional superconducting junction line without the shunt resistor 4 connected. Comparable to that. The first embodiment proposes a useful circuit that has a function of containing the vibration following the magnetic flux quantum pulse in a short time and setting a delay time required in a predetermined range.

(Embodiment 2) An example of constructing a magnetic flux quantum circuit focusing on the delay effect of the superconducting junction line described in Embodiment 1 will be described. As described in the first embodiment, according to the present invention, the delay time per length of the line can be arbitrarily adjusted, so that the delay time of the line through which a plurality of signals propagate is adjusted, and the signals are input in parallel at the same time. Alternatively, when a plurality of signals processed by individual circuits are simultaneously output in parallel, it can be easily realized without increasing the area on the chip.

FIG. 8 is a diagram showing an example in which a magnetic flux quantum circuit focusing on the delay effect is applied to a flash type 4-bit analog-digital conversion circuit. The output signal waveform of the SQUID type high speed signal detector is divided into four by a ladder type resistor. Each divided bit signal is applied to the level determination circuit of the analog-digital converter. In the level determination circuit, the clock pulse generated by the oscillator is frequency-divided by the branch circuit and added to clock 1 to clock 4 via the four superconducting lines, and the level determination when the clock is applied is performed. Outputs the circuit status. This output is
It is taken out as digital data via a shift register (not shown). Therefore, in order for the analog-digital conversion circuit to output the correct output, the clock 1-
It is important that clock 4 be applied at substantially the same timing.

In this case, it is impossible to make the distance between the oscillator and the level decision circuits of the AD converter the same structurally. That is, as shown in the figure, when each circuit element is arranged on the substrate, the length of the clock path from the oscillator to the level determination circuit is the shortest of the clock 1 paths. The length of pass 4 is the longest. Therefore, the clock signal does not reach the level determination circuit at the same time due to the difference in the length of the superconducting junction line.

FIG. 9 is a diagram showing that there is a difference in clock arrival due to a difference in length of the superconducting junction line. In this example, there is a time difference of 10 picoseconds between adjacent level determination circuits. It takes 30 picoseconds between the level determination circuits at the extreme ends. This time corresponds to a shift of 1.5 cycles when the clock frequency is 50 GHz.

In order to arrive at this almost at the same time, for a path having a short clock path, a delay function suitable for a superconducting line for propagating a clock pulse from a branch circuit to each level judgment circuit of an AD converter. It is necessary to have. Therefore, the superconducting junction line according to the present invention is used between the branch circuit and the level determination circuit. That is, as shown in FIG. 8, from the branch circuit to each level determination circuit,
The conventional superconducting junction line was used for the clock path with the longest distance. For a clock path having a shorter distance than that, the delay circuit using the superconducting junction line according to the present invention is partially used.

In a superconducting flux quantum circuit, such a superconducting junction line is used as a delay line for a flux quantum signal.
In the superconducting junction line, the delay time can be set by the ratio of the magnitude of the inductance to the resistance of the inductor or the ratio of the bias current and the critical current flowing in the superconducting junction.

The superconducting junction line according to the present invention is composed of an inductor having a length of 60 μm, a superconducting junction having an IcRn value of 2 mV, and a shunt resistor, and has two stages. The shunt resistance is 0.5 in order from the line with the shortest distance.
It was ohm, 0.8 ohm, and 2 ohm. The remaining 1 bit is a superconducting junction line of the conventional structure without adding a shunt resistance. The length of the superconducting junction line according to the present invention and the length of the superconducting junction line of the conventional structure added to the remaining 1 bit are equal. The clock signal was supplied to the four level determination circuits by using the superconducting junction line having such a configuration.

FIG. 10 is a diagram showing a clock signal waveform input to each level determination circuit in the above example. Although there is a feeling that the delay time of the clock 1 is insufficient as compared with the other clocks 2 and 3, the deviation of the input timing of the four magnetic flux quantum pulse waveforms is within the range of 5 picoseconds or less. This shows that the superconducting junction line according to the present invention effectively functions as a delay line. Moreover, FIG.
As can be seen from the layout in (A), since only the resistor 4 is inserted, a significant size reduction effect of up to 1 mm can be obtained compared with the case where a delay line is formed by extending a superconducting junction line having a conventional structure. You can see that you can.

In the second embodiment, the product of the critical current of the superconducting junction and the inductance of the inductor is made sufficiently larger than the size of the magnetic flux quantum in the path having the short clock path. With this, it is surrounded by one inductor, two superconducting junctions connected to it, and ground,
And, it is possible to temporarily hold a plurality of magnetic flux quantum signals in a superconducting loop which includes a resistance inside thereof. As a result, stable delay operation can be realized.

As described above, the superconducting junction line according to the present invention is a magnetic flux quantum circuit that operates at an ultrahigh speed, supplies clock signals to a plurality of circuits at the same timing, and contributes to normal circuit operation in a high frequency region. It is a thing.

(Embodiment 3) Another example of a magnetic flux quantum circuit, which focuses on the delay effect of the superconducting junction line described in Embodiment 1, will be described. The third embodiment also has essentially the same function as the second embodiment.

FIG. 11 is a diagram showing an example in which a high-speed magnetic flux quantum signal is distributed to four channels by a demultiplexer, the frequency is reduced to 1/4, and the magnetic flux quantum circuit is taken out of the superconducting circuit. Set the four signal lines from the demultiplexer to match the output timing.
Standby by a reset flip-flop (abbreviated as RS-FF). When the reset signal is input, the held signals are output all at once. In order to be output at the same time, the reset signals need to be input to the four RS-FFs at the same time. However, as described in the second embodiment, in the structure in which the reset signal line divided into four by the branch circuit from one signal source is branched and distributed, adjacent RS-
The lengths of the superconducting junction lines connected to the FF are different from each other. In Example 3, the difference was about 750 microns.

FIG. 12 is a diagram showing that there is a difference in clock arrival due to a difference in length of the superconducting junction line. In this example, a time difference of 25 picoseconds occurs between adjacent RS-FFs. It is 75 picoseconds between the level determination circuits at both ends. Therefore, in order to compensate for the difference in the arrival time of the reset signal from the branch circuit to each RS-FF, the superconducting junction line according to the present invention is used as in the second embodiment.

FIG. 13 is a diagram showing an equivalent circuit of the superconducting junction line used in the third embodiment. The four inductors 3 are composed of an inductor having a total length of 120 μm, a superconducting junction 2 having an IcRn value of 2 mV, and three shunt resistors 4 in one stage. The size of the shunt resistance is 0.6 ohm, 1 in order from the line with the shortest distance.
Ohms, and 3 ohms. The reset signal 1 to the reset signal 4 were supplied to each RS-FF using the superconducting junction line having such a configuration.

FIG. 14 is a diagram showing the waveform of the reset signal input to each RS-FF. Also in this example, the deviation of the input timing of the four magnetic flux quantum pulse waveforms is within the range of 5 picoseconds or less. This shows that the superconducting junction line according to the present invention effectively functions as a delay line. Moreover, it can be seen that, compared with the case where the delay line is formed by extending the superconducting junction line having the conventional structure, the maximum size reduction effect of 2 mm or more is significantly exhibited.

As described above, the superconducting junction line according to the present invention is a magnetic flux quantum circuit that operates at an ultrahigh speed, and a set signal is supplied to a plurality of circuits at the same timing to generate a multi-bit signal in a high frequency region. This contributes to simultaneous output from wiring positions distant from each other.

(Embodiment 4) FIG. 15 shows an equivalent circuit of a block configuration of a ring oscillation circuit using a superconducting junction line according to the present invention. The circuit configuration includes a trigger oscillator 51, an input-side superconducting junction line 52, a superconducting junction ring 53, and an output-side superconducting junction line 54. The configuration of this ring oscillator circuit is related to the inventor of the present application.
Although it is essentially the same as the superconducting oscillator of No. 7687, the previous application was invented with the intention of being realized by a metal-based superconductor, whereas the invention of the present application is an oxide-based superconductor. It is different in that it proposes a ring oscillation circuit realized by. As can be seen by comparing FIG. 15 and FIG. 1 of JP 2001-217687 A, the superconducting junction line and the superconducting junction ring of Example 4 have a shunt resistance between the inductor 3 and the ground of the superconducting junction line. The structure is the same, except that 4 is provided. The superconducting junction line according to the present invention was used. .

The ring oscillator circuit was composed of the oxide thin film shown in FIG. The inductor has an inductance of 30 picohenry and the superconducting junction has a critical current of 0.2 mA.
The IcRn value was 2 mV. Also, the shunt resistance 4 is 2
Ohm. When a 90% DC bias current was applied to the superconducting junction in such a ring oscillator circuit,
A high frequency oscillation operation of GHz was obtained. The cycle of high frequency oscillation corresponds to the time required for the magnetic flux quantum signal to make one round in the superconducting junction ring.

When the shunt resistor was not used, normal ring oscillation operation could not be obtained. This is because vibration remains after the magnetic flux quantum pulse, and this phenomenon is particularly remarkable in the case of a ring. As described above, by using the superconducting junction line according to the present invention, an oxide ring oscillator could be constructed and operated.

[0039]

The superconducting junction line according to the present invention can contain the vibration following the magnetic flux quantum pulse in a short time and delay the propagation operation of the magnetic flux quantum.

[Brief description of drawings]

FIG. 1 is a diagram showing a basic configuration of a superconducting junction line according to the present invention.

FIG. 2 is a diagram showing an example of a conventional superconducting junction line that transfers magnetic flux quanta.

FIG. 3 is a diagram showing how a magnetic flux quantum signal propagates in an oxide-based superconducting junction line.

4A and 4B show sectional structures of unit superconducting junction lines of the superconducting junction line shown in FIG. 1, where FIG. 4A is a plan view and FIG.
3B is a cross-sectional view as seen in the direction of the arrow at BB position in FIG. 3C, and FIG.

FIG. 5 is a diagram for explaining operating characteristics of magnetic flux quantum pulses propagating in the superconducting junction line shown in FIG. 4.

FIG. 6 is a diagram illustrating operating characteristics of a magnetic flux quantum pulse propagating in a conventional superconducting junction line.

FIG. 7 is a diagram illustrating the shunt resistance dependency of the delay time of the magnetic flux quantum pulse propagating through the superconducting junction line according to the first embodiment.

FIG. 8 is a diagram showing an example in which a magnetic flux quantum circuit focusing on a delay effect is applied to a flash type 4-bit analog-digital conversion circuit.

FIG. 9 is a diagram showing that there is a difference in clock arrival due to a difference in length of the superconducting junction line.

FIG. 10 is a diagram showing a clock signal waveform input to each level determination circuit in the example of FIG. 9;

FIG. 11: A high-speed flux quantum signal is demultiplexed by 4
The figure which shows the example applied to the magnetic flux quantum circuit which distribute | circulates to a channel, reduces the frequency to 1/4, and takes it out of the superconducting circuit.

FIG. 12 is a diagram showing that there is a difference in clock arrival due to a difference in length of the superconducting junction line.

FIG. 13 is a diagram showing an equivalent circuit of a superconducting junction line used in Example 3;

14 is a diagram showing a waveform of a reset signal input to each RS-FF in FIG.

FIG. 15 is a diagram showing an equivalent circuit of a block configuration of a ring oscillation circuit using a superconducting junction line according to the present invention.

[Explanation of symbols]

1: DC power supply, 2: superconducting junction, 3: inductor, 4:
Resistance, 11: substrate, 12: magnetic shielding film, 13: interlayer insulating film, 14: lower electrode, 15: interlayer insulating film, 16: resistance film, 17: upper electrode, 18: junction barrier layer, 19: inductor, 20 : Contact, 30: Output waveform of superconducting junction in front stage, 31: Output waveform of superconducting junction in rear stage, 40: Output waveform of superconducting junction in front stage, 41: Output waveform of superconducting junction in rear stage, 51: Trigger oscillator, 52 : Input side superconducting junction line, 53: Superconducting junction ring, 54: Output side superconducting junction line.

Continued front page    (72) Inventor Yoshinobu Tarutani             Foundation law, 1-14-3 Shinonome, Koto-ku, Tokyo             International Superconductivity Technology Center             Institute of Electrical Engineering (72) Inventor Hideyuki Sugiyama             Foundation law, 1-14-3 Shinonome, Koto-ku, Tokyo             International Superconductivity Technology Center             Institute of Electrical Engineering (72) Inventor Keiichi Tanabe             Foundation law, 1-14-3 Shinonome, Koto-ku, Tokyo             International Superconductivity Technology Center             Institute of Electrical Engineering F term (reference) 4M113 AA06 AA16 AA25 AA37 AC33                       AC44 AD23 AD36 AD42 AD45                       AD67 AD68 BB07 BC08 CA34                 5J022 AA06 BA05 BA06 CE04 CE08                       CF08 CG02                 5J056 AA11 BB21 CC00 CC14 CC16                       KK03

Claims (5)

[Claims] 1. In a superconducting junction line composed of a superconducting junction made of an oxide-based superconductor and an inductor of a superconducting wire, using a flux quantum as a signal carrier, a resistor is arranged between an arbitrary place of the inductor and ground. A superconducting junction line characterized in that 2. The superconducting junction line according to claim 1, wherein the delay time is set by the ratio of the magnitude of the inductance and the resistance of the inductor of the superconducting wire, or the ratio of the bias current and the critical current applied to the superconducting junction. 3. A superconducting junction line composed of a superconducting junction made of an oxide-based superconductor and an inductor of a superconducting wire, wherein the flux quantum is used as a signal carrier, and the superconducting junction line is connected to one inductor and the inductor. Two superconducting junctions and a superconducting loop surrounded by ground are connected in a cascade, and the product of the critical current of the superconducting junction and the inductance of the inductor is made sufficiently larger than the size of the magnetic flux quantum. A superconducting junction line, wherein a plurality of magnetic flux quantum signals can be temporarily held in one superconducting loop. 4. A unit superconducting junction formed by using a flux quantum as a signal carrier, a superconducting junction made of an oxide superconductor and an inductor of a superconducting wire, and a resistor arranged between an arbitrary place of the inductor and ground. A superconducting junction line in which a plurality of lines are connected in a cascade, and a superconducting junction and a superconducting oxide superconductor connected so as to branch from a part of the superconducting junction line and return to a part of the superconducting junction line again. A superconducting oscillator circuit, comprising: a line inductor; and a superconducting junction line to which a plurality of unit superconducting junction lines configured by arranging a resistor between an arbitrary place of the inductor and the ground are connected. 5. A unit superconducting junction formed by using a magnetic flux quantum as a signal carrier, a superconducting junction made of an oxide superconductor and an inductor of a superconducting wire, and a resistor arranged between an arbitrary place of the inductor and ground. A plurality of superconducting junction lines in which a plurality of lines are connected in a cascade are provided independently, and the ratio of the inductance and the resistance of the inductor of the superconducting wire or the bias current and the critical current of the superconducting junction. A circuit comprising a plurality of superconducting junction lines, characterized in that the delay time of each superconducting junction line is adjusted by a ratio, and signals input to the respective superconducting junction lines are output at substantially the same timing.